JP2017073548A - Ｖｌｓｉ装置用の最適波長光子放射顕微鏡 ［関連出願の参照］ 本出願は、２０１５年１０月５日に出願された米国仮出願第６２／２３７，３９９号の優先権利益を主張し、そのすべての内容が本明細書に参考として援用される。［政府許認可権］ 本発明は、空軍研究所（ａｆｒｌ）の契約番号ｆａ８６５０−１１−ｃ−７１０５を介した、アメリカ合衆国国家情報長官官房（ｏｄｎｉ）、情報先端研究プロジェクト活動（ｉａｒｐａ）による支援事業に基づくものである。本明細書に含まれるアイデア及び結果は、本発明者らのアイデア及び結果であり、ｏｄｎｉ、ｉａｒｐａ、ａｆｒｌ又は米国政府の公式承認を必ずしも有するものとして解釈されるべきでない。 - Google Patents

Ｖｌｓｉ装置用の最適波長光子放射顕微鏡 ［関連出願の参照］ 本出願は、２０１５年１０月５日に出願された米国仮出願第６２／２３７，３９９号の優先権利益を主張し、そのすべての内容が本明細書に参考として援用される。［政府許認可権］ 本発明は、空軍研究所（ａｆｒｌ）の契約番号ｆａ８６５０−１１−ｃ−７１０５を介した、アメリカ合衆国国家情報長官官房（ｏｄｎｉ）、情報先端研究プロジェクト活動（ｉａｒｐａ）による支援事業に基づくものである。本明細書に含まれるアイデア及び結果は、本発明者らのアイデア及び結果であり、ｏｄｎｉ、ｉａｒｐａ、ａｆｒｌ又は米国政府の公式承認を必ずしも有するものとして解釈されるべきでない。 Download PDF

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Publication number
JP2017073548A
JP2017073548A JP2016197584A JP2016197584A JP2017073548A JP 2017073548 A JP2017073548 A JP 2017073548A JP 2016197584 A JP2016197584 A JP 2016197584A JP 2016197584 A JP2016197584 A JP 2016197584A JP 2017073548 A JP2017073548 A JP 2017073548A
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dut
optical
radiation
filter
test
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Japanese (ja)
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ハーヴ，デスランデス
Deslandes Herve
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FEI Co
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FEI Co
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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G02B21/08—Condensers
    • G02B21/082—Condensers for incident illumination only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/265—Contactless testing
    • G01R31/2656—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2836—Fault-finding or characterising
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/008—Details of detection or image processing, including general computer control
    • G02B21/0084—Details of detection or image processing, including general computer control time-scale detection, e.g. strobed, ultra-fast, heterodyne detection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/365—Control or image processing arrangements for digital or video microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
    • G02B6/29389—Bandpass filtering, e.g. 1x1 device rejecting or passing certain wavelengths

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Multimedia (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Electromagnetism (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Microscoopes, Condenser (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
JP2016197584A 2015-10-05 2016-10-05 Ｖｌｓｉ装置用の最適波長光子放射顕微鏡 ［関連出願の参照］ 本出願は、２０１５年１０月５日に出願された米国仮出願第６２／２３７，３９９号の優先権利益を主張し、そのすべての内容が本明細書に参考として援用される。［政府許認可権］ 本発明は、空軍研究所（ａｆｒｌ）の契約番号ｆａ８６５０−１１−ｃ−７１０５を介した、アメリカ合衆国国家情報長官官房（ｏｄｎｉ）、情報先端研究プロジェクト活動（ｉａｒｐａ）による支援事業に基づくものである。本明細書に含まれるアイデア及び結果は、本発明者らのアイデア及び結果であり、ｏｄｎｉ、ｉａｒｐａ、ａｆｒｌ又は米国政府の公式承認を必ずしも有するものとして解釈されるべきでない。 Pending JP2017073548A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201562237399P 2015-10-05 2015-10-05
US62/237,399 2015-10-05

Publications (1)

Publication Number Publication Date
JP2017073548A true JP2017073548A (ja) 2017-04-13

Family

ID=58538428

Family Applications (1)

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JP2016197584A Pending JP2017073548A (ja) 2015-10-05 2016-10-05 Ｖｌｓｉ装置用の最適波長光子放射顕微鏡 ［関連出願の参照］ 本出願は、２０１５年１０月５日に出願された米国仮出願第６２／２３７，３９９号の優先権利益を主張し、そのすべての内容が本明細書に参考として援用される。［政府許認可権］ 本発明は、空軍研究所（ａｆｒｌ）の契約番号ｆａ８６５０−１１−ｃ−７１０５を介した、アメリカ合衆国国家情報長官官房（ｏｄｎｉ）、情報先端研究プロジェクト活動（ｉａｒｐａ）による支援事業に基づくものである。本明細書に含まれるアイデア及び結果は、本発明者らのアイデア及び結果であり、ｏｄｎｉ、ｉａｒｐａ、ａｆｒｌ又は米国政府の公式承認を必ずしも有するものとして解釈されるべきでない。

Country Status (3)

Country Link
JP (1) JP2017073548A (zh)
KR (1) KR20170040778A (zh)
CN (1) CN106842537A (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109239914B (zh) * 2018-09-12 2020-05-01 南京大学 一种实现高空间带宽积的成像方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08274138A (ja) * 1995-03-31 1996-10-18 Sumitomo Metal Ind Ltd 半導体デバイスの絶縁膜の不良検出方法およびその装置
JP2005523428A (ja) * 2002-04-04 2005-08-04 ハイパービジョン インコーポレイテッド 室温光学系を備えた放出型顕微鏡を利用した高感度熱放射検出
US20150091602A1 (en) * 2013-04-10 2015-04-02 Dcg Systems, Inc. Optimized wavelength photon emission microscope for vlsi devices

Family Cites Families (10)

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Publication number Priority date Publication date Assignee Title
US4755874A (en) * 1987-08-31 1988-07-05 Kla Instruments Corporation Emission microscopy system
JPH05191728A (ja) * 1992-01-09 1993-07-30 Fujitsu Ltd 赤外線撮像装置
JPH05226220A (ja) * 1992-02-10 1993-09-03 Toshiba Corp アライメント測定装置
CA2089332A1 (en) * 1992-03-12 1993-09-13 Robert Bishop Method of and apparatus for object or surface inspection employing multicolor reflection discrimination
US5638005A (en) * 1995-06-08 1997-06-10 Schlumberger Technologies Inc. Predictive waveform acquisition
CN100474888C (zh) * 2002-04-04 2009-04-01 海珀视像公司 使用具有室温光学系统的发射型显微镜的高灵敏度热辐射探测器
US7256879B2 (en) * 2003-12-11 2007-08-14 Corning Incorporated Semiconductor array tester
US20060103378A1 (en) * 2004-11-12 2006-05-18 Nader Pakdaman Apparatus and method for dynamic diagnostic testing of integrated circuits
US7733100B2 (en) * 2005-08-26 2010-06-08 Dcg Systems, Inc. System and method for modulation mapping
EP2059792A4 (en) * 2006-08-01 2010-01-27 Bt Imaging Pty Ltd DETERMINATION OF THE MINORITY CARRIER LENGTH OF DIFFUSION BY LUMINESCENCE

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08274138A (ja) * 1995-03-31 1996-10-18 Sumitomo Metal Ind Ltd 半導体デバイスの絶縁膜の不良検出方法およびその装置
JP2005523428A (ja) * 2002-04-04 2005-08-04 ハイパービジョン インコーポレイテッド 室温光学系を備えた放出型顕微鏡を利用した高感度熱放射検出
US20150091602A1 (en) * 2013-04-10 2015-04-02 Dcg Systems, Inc. Optimized wavelength photon emission microscope for vlsi devices

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CN106842537A (zh) 2017-06-13

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JP2017073548A (ja) Ｖｌｓｉ装置用の最適波長光子放射顕微鏡 ［関連出願の参照］ 本出願は、２０１５年１０月５日に出願された米国仮出願第６２／２３７，３９９号の優先権利益を主張し、そのすべての内容が本明細書に参考として援用される。［政府許認可権］ 本発明は、空軍研究所（ａｆｒｌ）の契約番号ｆａ８６５０−１１−ｃ−７１０５を介した、アメリカ合衆国国家情報長官官房（ｏｄｎｉ）、情報先端研究プロジェクト活動（ｉａｒｐａ）による支援事業に基づくものである。本明細書に含まれるアイデア及び結果は、本発明者らのアイデア及び結果であり、ｏｄｎｉ、ｉａｒｐａ、ａｆｒｌ又は米国政府の公式承認を必ずしも有するものとして解釈されるべきでない。
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