JP2017067687A - Foreign matter inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent heat generated in an X-ray generator from affecting an X-ray inspection control unit provided in an X-ray inspection unit and a metal detection control unit provided in a metal detection unit.SOLUTION: A foreign matter inspection device 1 comprises an X-ray inspection unit 2, a metal detection unit 3, a housing 4 for accommodating the X-ray inspection unit 2 and the metal detection unit 3, and a cooler 9 for sending a cool air into the housing 4. The X-ray inspection unit 2 is provided with an X-ray inspection control unit 20, an X-ray generator 21, and an X-ray detector 22. The metal detection unit 3 is provided with a metal detection control unit 30, a transmission coil 35, and reception coils 36, 37. The cooler 9 sends a cool air to at least the X-ray generator 21, the X-ray inspection control unit 20, and the metal detection control unit 30.SELECTED DRAWING: Figure 5

Description

  The present invention relates to a foreign matter inspection apparatus.

  In Patent Document 1, X-ray inspection for detecting foreign matter contained in an object to be inspected using X-ray permeability and foreign matter contained in the object to be inspected using an interaction between a magnetic field and a metal are disclosed. A foreign substance inspection apparatus capable of performing both of metal detection and the detection is described.

JP 2015-28465 A

  The X-ray generator provided in the X-ray inspection unit may become high temperature when generating X-rays. In the foreign substance inspection apparatus described above, the X-ray inspection unit and the metal detection unit are accommodated in one housing. For this reason, the heat generated by the X-ray generator may affect the control unit (control board) provided in the X-ray inspection unit and the control unit (control board) provided in the metal detection unit. For this reason, in this technical field, the foreign substance inspection apparatus which can suppress that the heat which generate | occur | produced with the X-ray generator exerts influence on the control part provided in the X-ray inspection part, and the control part provided in the metal detection part. Is desired.

  A foreign matter inspection apparatus according to the present invention includes a transport unit that transports an object to be inspected, and an X-ray inspection unit that detects foreign matter contained in the test object being transported by the transport unit using X-ray transparency. And a metal detection unit that detects foreign matter contained in the object being transported by the transport unit using the interaction between the magnetic field and the metal, at least a part of the transport unit, the X-ray inspection unit, and the metal A housing that houses the detection unit; and a cooler that sends cold air into the housing. The X-ray inspection unit generates an X-ray generator that generates X-rays, and X-rays generated by the X-ray generator. An X-ray detector for detecting, and an X-ray generator for controlling the X-ray generator and acquiring a detection result of the X-ray detector to detect a foreign matter, and the metal detector generates a magnetic field The magnetic field generator to be detected, the magnetic field fluctuation detector for detecting the magnetic field fluctuation generated by the magnetic field generator, and the magnetic field generator. And a metal detection control unit that acquires a detection result of the magnetic field fluctuation detector and detects a foreign substance, and the cooler cools at least the X-ray generator, the X-ray inspection control unit, and the metal detection control unit. Send.

  The cooler sends cold air to an X-ray generator, an X-ray inspection control unit, and a metal detection control unit provided in the housing. Thereby, the X-ray generator, the X-ray inspection control unit, and the metal detection control unit are cooled by cold air. Therefore, even when the X-ray inspection unit and the metal detection unit are housed in one housing, the heat generated by the X-ray generator is generated by the X-ray inspection control unit and the metal detection unit of the X-ray inspection unit. It can suppress affecting a metal detection control part.

  In the foreign substance inspection apparatus, an X-ray generator, an X-ray inspection control unit, and a metal detection control unit may be arranged in order from the upstream side to the downstream side in the cold air flow direction. In this case, the high temperature X-ray generator can be efficiently cooled by the coldest air.

  The foreign object inspection apparatus further includes a partition plate that partitions the region on the side where the X-ray generator and the X-ray inspection control unit are provided and the region on the side where the metal detection control unit is provided in the housing, Is arranged in the housing such that a gap is provided between the end of the partition plate and the inner wall of the housing, and cold air flowing from the X-ray inspection control unit to the metal detection control unit passes through the gap. Also good. As described above, by providing the partition plate, it is possible to guide the cold air to the metal detection control unit through the gap while suppressing the heat generated by the X-ray generator from directly affecting the metal detection control unit. .

  The cooler may take in air from the inside of the housing and generate cool air that cools the taken-in air and sends it into the housing. In this way, the cooler circulates air within the housing. Thereby, an X-ray generator etc. can be cooled with cold air, suppressing that a foreign material enters the case from the outside.

  According to the present invention, it is possible to suppress the heat generated by the X-ray generator from affecting the X-ray inspection control unit provided in the X-ray inspection unit and the metal detection control unit provided in the metal detection unit.

It is a front view of the foreign material inspection apparatus which concerns on embodiment. It is a conceptual diagram explaining the internal structure and control system of the foreign material inspection apparatus shown by FIG. It is explanatory drawing of the main structures of the X-ray inspection part and metal detection part of FIG. It is a perspective view of the main structures of the X-ray inspection part and metal detection part of FIG. It is a front view which shows the structure of the board | substrate room | chamber interior of FIG. It is sectional drawing along the VI-VI line in FIG. It is sectional drawing along the VII-VII line in FIG.

  Embodiments of the present invention will be described below with reference to the drawings. In the following description, the same or equivalent elements will be denoted by the same reference numerals, and redundant description will be omitted.

  FIG. 1 is a front view of a foreign matter inspection apparatus 1 according to an embodiment. A foreign matter inspection device 1 shown in FIG. 1 is a device that detects foreign matter contained in an inspection object. The inspected object is, for example, food. The foreign object inspection apparatus 1 performs X-ray inspection and metal detection while conveying the inspection object in the interior thereof, and inspects whether or not the inspection object contains foreign objects.

  X-ray inspection is a technique for detecting foreign matter contained in an object to be inspected using X-ray transparency, and is realized by the X-ray inspection unit 2 (see FIG. 2). In the X-ray inspection, it is possible to detect a foreign substance having X-ray permeability different from that of the inspection object. On the other hand, metal detection is a technique for detecting a foreign substance contained in an inspection object using an interaction between a magnetic field and metal, and is realized by the metal detection unit 3 (see FIG. 2). In metal detection, a metal foreign object can be detected. Details of the X-ray inspection unit 2 and the metal detection unit 3 will be described later.

  The foreign matter inspection apparatus 1 has a housing 4 in which a space is defined. The housing 4 accommodates the X-ray inspection unit 2 and the metal detection unit 3 therein. The housing 4 shields X-rays generated by the X-ray inspection unit 2 and suppresses external leakage of X-rays. The housing 4 is made of, for example, stainless steel.

  The housing 4 has a box shape in this embodiment. An opening 4 a that communicates with the inside of the housing 4 is formed on the left side surface of the housing 4. Similarly, an opening 4 b that communicates with the inside of the housing 4 is formed on the right side surface of the housing 4. In the present embodiment, the object to be inspected is carried into the inside of the housing 4 from the opening 4a and inspected, and is carried out of the housing 4 through the opening 4b. That is, the opening 4a serves as an inspection object carry-in port, and the opening 4b serves as an inspection object carry-out port.

  On the front surface of the housing 4, an upper door 40 and a lower door 41 that open and close the housing 4 are provided. The upper door 40 and the lower door 41 have a hinged door structure, for example. By opening or closing the upper door 40 or the lower door 41, at least a part of an X-ray inspection unit 2 and a metal detection unit 3 described later are exposed to the outside. The upper door 40 and the lower door 41 are made of, for example, stainless steel.

  A display 5 and operation switches 6 are provided on the front surface of the upper door 40. The display 5 is a display device having both a display function and an input function, and is, for example, a touch panel. The display 5 displays the result of X-ray inspection and metal detection, and also displays an operation screen for setting various parameters related to metal detection and X-ray inspection. The operation switch 6 is a power switch for the X-ray inspection unit 2 and the metal detection unit 3.

  The housing 4 is supported by a support base 7. A notification unit 8 and a cooler 9 are provided on the upper surface of the housing 4. The notification unit 8 notifies of foreign matter contamination and the operating state of the device. The notification unit 8 includes a first notification device 81 corresponding to the X-ray inspection unit 2 and a second notification device 82 corresponding to the metal detection unit 3. The cooler 9 sends cool air to the inside of the housing 4 and adjusts the temperature of the devices arranged inside the housing 4.

  FIG. 2 is a conceptual diagram illustrating the internal configuration and control system of the foreign matter inspection apparatus 1 shown in FIG. As shown in FIG. 2, the inside of the housing 4 is inspected with a substrate chamber T <b> 1 in which a part of an X-ray generator to be described later and a control board of a component are arranged, and an object S to be inspected. It is divided into the inspection room T2 to be performed. The temperature of the substrate chamber T1 is adjusted by the cooler 9 described above.

  In the inspection room T2, a conveyor (conveying unit) 10 that conveys the inspection object S is disposed. The conveyor 10 is a roller belt conveyor in the present embodiment, and extends in the horizontal direction inside the housing 4 with one end located in the opening 4a and the other end located in the opening 4b. doing. That is, the housing | casing 4 has accommodated the part except the one end part and other end part among the conveyors 10 inside. The conveyor 10 according to the present embodiment carries the inspection object S into the housing 4 through the opening 4a and carries the inspection object S out of the housing 4 through the opening 4b.

  An X-ray shielding curtain 42 is disposed in the opening 4a. Similarly, an X-ray shielding curtain 43 is disposed in the opening 4b. The X-ray shielding curtains 42 and 43 have upper ends that are fixed to the housing 4 and lower ends that are free ends. The X-ray shielding curtains 42 and 43 shield X-rays generated by the X-ray inspection unit 2 and suppress external leakage of X-rays. The X-ray shielding curtains 42 and 43 are made of, for example, a flexible material containing tungsten. In order to automate the loading and unloading of the inspection object S, the loading conveyor 11 may be disposed on the right side of the conveyor 10 and the unloading conveyor 12 may be disposed on the left side of the conveyor 10. Further, the carry-out conveyor 12 may have a function of distributing the inspection object S.

  In the inspection room T2, a cylindrical case 31 having a through hole 31a for allowing the inspection object S to pass therethrough is disposed. The conveyor 10 penetrates the case 31 through the through hole 31a. The inspection object S passes through the through hole 31 a of the case 31 by the conveyor 10, and X-ray inspection and metal detection are sequentially performed in the case 31. The case 31 is made of, for example, stainless steel.

  First, the X-ray inspection unit 2 that performs X-ray inspection will be described. The X-ray inspection unit 2 includes an X-ray inspection control unit 20, an X-ray generator 21, and an X-ray detector 22. The X-ray generator 21 includes an X-ray source that generates X-rays and a slit mechanism. The X-ray detector 22 detects X-rays generated by the X-ray generator 21. The X-ray generator 21 and the X-ray detector 22 are arranged so as to face each other so as to sandwich the conveyor 10 and the case 31 from above and below. In the X-ray generator 21, an X-ray source and the like are disposed in the substrate chamber T1, and a mechanism for irradiating X-rays is disposed in the examination chamber T2. As the X-ray detector 22, for example, a line sensor in which a plurality of X-ray detection sensors are arranged in parallel in the front-rear direction is used. The X-ray detector 22 is accommodated in the substrate case 23 in order to reduce X-ray leakage. The substrate case 23 is provided with a slit 23a (see FIG. 4) in order to allow X-rays to reach the X-ray detector 22.

  The X-ray inspection control unit 20 temporarily stores input / output interface I / O for inputting / outputting signals to / from the outside, a ROM (Read Only Memory) in which a program and information for performing processing, and the like are stored. It has a storage medium such as a RAM (Random Access Memory) and a HDD (Hard Disk Drive), a CPU (Central Processing Unit), a communication circuit, and the like. The X-ray inspection control unit 20 stores input data in the RAM based on a signal output from the CPU, loads a program stored in the ROM into the RAM, and executes the program loaded in the RAM. The functions described later are realized.

  The X-ray inspection control unit 20 is disposed in the substrate chamber T <b> 1 and is connected to the X-ray generator 21 and the X-ray detector 22. The X-ray inspection control unit 20 is connected to the display 5 and receives operation information from an operator via an operation screen. The X-ray inspection control unit 20 sets operation profiles of the X-ray generator 21 and the X-ray detector 22 based on the operation information, and controls operations of the X-ray generator 21 and the X-ray detector 22. When the X-ray inspection control unit 20 detects the inspection object S using the laser sensor 24 disposed upstream of the X-ray generator 21 and the X-ray detector 22, the X-ray inspection control unit 20 inspects the inspection object S. Start. The X-ray inspection control unit 20 controls the X-ray generator 21 to irradiate the inspection object S being conveyed by the conveyor 10 with X-rays. The X-ray detector 22 measures the X-ray transmission amount of X-rays that have passed through the inspection object S, and outputs the measured X-ray transmission amount (detection result) to the X-ray inspection control unit 20.

  The X-ray inspection control unit 20 generates an X-ray transmission image in which the X-ray transmission amount acquired in time series is reflected in the pixel value. Then, the X-ray inspection control unit 20 detects the foreign matter by analyzing the X-ray transmission image using an image processing technique. For example, the X-ray inspection control unit 20 determines whether there is an image region in which the difference from the reference transmittance of the inspection object S is a predetermined value or more based on the pixel value of the X-ray transmission image. The X-ray inspection control unit 20 determines that a foreign object has been detected when there is an image region in which the difference from the reference transmittance of the inspection object S is a predetermined value or more.

  The X-ray inspection control unit 20 displays the result data of the X-ray inspection on the display 5 or stores the result data in the storage unit in response to a request from the worker. Further, the X-ray inspection control unit 20 indicates that when the X-ray generator 21 and the X-ray detector 22 are operating normally, the device relating to the X-ray inspection is operating using the first alarm 81. To the workers. Further, when it is determined that a foreign object has been detected, the X-ray inspection control unit 20 notifies the worker that the foreign object has been detected using the first notification device 81.

  FIG. 3 is an explanatory diagram of the main components of the X-ray inspection unit 2 and the metal detection unit 3 of FIG. FIG. 4 is a perspective view of the main components of the X-ray inspection unit 2 and the metal detection unit 3 of FIG. As shown in FIGS. 3 and 4, the case 31 includes a main body portion 32, a first hood portion 33, and a second hood portion 34. The first hood portion 33 is provided on the opening 4 a side (loading side) with respect to the main body portion 32. The second hood part 34 is provided on the opening part 4 b side (the outlet side) with respect to the main body part 32. The through hole 31 a of the case 31 described above is defined by the inner walls of the main body portion 32, the first hood portion 33, and the second hood portion 34.

  An X-ray passage slit 33 a that allows X-rays to pass is formed on the upper surface of the first hood portion 33 so as to be positioned below the X-ray generator 21. An X-ray passage slit 33b that allows X-rays to pass through is formed on the lower surface of the first hood portion 33 so as to face the X-ray passage slit 33a. The X-ray detector 22 is disposed below the X-ray passage slit 33b. With this configuration, the X-ray 21 a generated by the X-ray generator 21 passes through the X-ray passage slits 33 a and 33 b and is irradiated to the inspection object S being conveyed inside the case 31. In addition, on the side surface of the first hood portion 33, a slit 33c is provided on the downstream side (the main body portion 32 side) of the X-ray passage slits 33a and 33b. A laser sensor 38 is disposed in the slit 33c. The laser sensor 38 irradiates the inspection object S on the conveyor 10 with laser through the slit 33c.

  Next, the metal detection unit 3 that performs metal detection will be described. The metal detection unit 3 includes a metal detection control unit 30, an annular transmission coil (magnetic field generator) 35 that is a search coil, and annular reception coils (magnetic field fluctuation detectors) 36 and 37 that are search coils. The transmission coil 35 and the reception coils 36 and 37 are formed of a conductive material such as metal and are disposed inside the main body 32 of the case 31. The transmission coil 35 and the reception coils 36 and 37 are arranged coaxially with the extending direction of the through hole 31a. That is, the transmission coil 35 and the reception coils 36 and 37 are disposed so as to surround the through hole 31a. As a result, the inspection object S passes through the transmission coil 35 and the reception coils 36 and 37 by the conveyor 10.

  The transmission coil 35 is disposed between the reception coils 36 and 37. The receiving coils 36 and 37 are differentially connected to each other and arranged symmetrically with respect to the transmitting coil 35. The two receiving coils 36 and 37 have the same flux linkage. The transmission coil 35 is configured to be energized and generates magnetic flux. A voltage is excited in each of the receiving coils 36 and 37 by electromagnetic induction of a magnetic field generated by the transmitting coil 35. The first hood portion 33 and the second hood portion 34 shield external leakage of the magnetic field generated by the transmission coil 35 and entry of an external magnetic field.

  The metal detection control unit 30 includes an input / output interface I / O for inputting / outputting signals from / to the outside, a ROM storing programs and information for processing, a RAM for temporarily storing data, an HDD, etc. Storage medium, CPU, and communication circuit. The metal detection control unit 30 stores input data in the RAM based on a signal output from the CPU, loads a program stored in the ROM into the RAM, and executes the program loaded into the RAM, which will be described later. Realize the function to do.

  The metal detection control unit 30 is disposed in the substrate chamber T1 and connected to the X-ray inspection control unit 20, and receives operation information from the worker input to the operation screen of the display 5 via the X-ray inspection control unit 20. Accept. The metal detection control unit 30 sets operation profiles of the transmission coil 35 and the reception coils 36 and 37 based on the operation information. When the metal detection control unit 30 detects the inspection object S using the laser sensor 38 disposed on the upstream side of the transmission coil 35 and the reception coils 36 and 37, the metal detection control unit 30 starts metal detection of the inspection object S. .

  The metal detection control unit 30 supplies an alternating excitation current to the transmission coil 35 to generate a magnetic flux. The magnetic flux generated by the transmission coil 35 passes through the two reception coils 36 and 37, and a voltage is excited in each of the reception coils 36 and 37 by electromagnetic induction. The metal detection control unit 30 acquires the differential connection output voltage (detection result) of the receiving coils 36 and 37, and determines metal detection. When the differential connection output voltage is 0, the metal detection control unit 30 determines that a metal foreign object is not detected. On the other hand, when the differential connection output voltage is not zero, the metal detection control unit 30 determines that a metal foreign object has been detected.

  The metal detection control unit 30 displays the metal detection result data on the display 5 or stores the result data in the storage unit in response to a request from the worker. In addition, when the transmission coil 35 and the reception coils 36 and 37 are operating normally, the metal detection control unit 30 informs the worker that the metal detection device is operating using the second alarm 82. Inform. Furthermore, when the metal detection control unit 30 determines that a foreign object has been detected, the metal detection control unit 30 notifies the worker that the foreign object has been detected using the second notification device 82. The case 31 may be held by a vibration isolation table 39 (anti-vibration tables 39a and 39b) for the purpose of improving the vibration resistance characteristics.

  The X-ray inspection unit 2 and the metal detection unit 3 described above are configured to be independently operable. That is, the foreign substance inspection apparatus 1 can perform not only both the X-ray inspection and the metal detection but also any one of the X-ray inspection and the metal detection. As described above, in the present embodiment, since the X-ray inspection unit 2 performs display control of the display 5, the operation screen of the metal detection unit 3 is displayed on the display 5 when the X-ray inspection unit 2 is stopped. Not. For this reason, a sub-display (not shown) connected to the metal detection unit 3 is disposed inside the housing 4. When the X-ray inspection unit 2 is stopped, the metal detection unit 3 receives operation information via the sub display and displays result data or the like on the sub display.

  Next, a configuration in which the temperature of the equipment in the substrate chamber T1 is adjusted by the cooler 9 will be described. In the present embodiment, the cooler 9 cools the device as adjustment of the temperature of the device in the substrate chamber T1. As shown in FIGS. 5 to 7, the substrate chamber T <b> 1 is surrounded by the upper door 40, the rear door 44, the left side plate 45, the right side plate 46, the top plate 47, and the upper and lower partition plates 48. FIG. 5 shows the internal configuration of the housing 4 in a state where the upper door 40 is opened. The back door 44 is a door provided on the back surface (rear surface) of the foreign matter inspection apparatus 1. The back door 44 has a hinged door structure, for example. The upper and lower partition plates 48 partition the substrate chamber T1 and the inspection chamber T2. The rear door 44, the left side plate 45, the right side plate 46, the top plate 47, and the upper and lower partition plates 48 are formed of, for example, stainless steel like the upper door 40.

  In the substrate chamber T1, at least an X-ray inspection control unit 20, an X-ray generator 21, and a metal detection control unit 30 are arranged. A first partition plate (partition plate) 51 and a second partition plate 52 are disposed in the substrate chamber T1. The first partition plate 51 includes a substrate chamber T1, an X-ray inspection substrate chamber A in which the X-ray inspection control unit 20 and the X-ray generator 21 are disposed, and a metal detection substrate chamber B in which the metal detection control unit 30 is disposed. And partition. The first partition plate 51 is provided across the top plate 47 and the upper and lower partition plates 48. A front gap (gap) S <b> 1 is formed between the front end of the first partition plate 51 and the inner surface (inner wall) of the upper door 40. A rear gap S <b> 2 is formed between the rear end of the first partition plate 51 and the inner surface (inner wall) of the rear door 44.

  The second partition plate 52 divides the X-ray inspection substrate chamber A into an X-ray front substrate chamber A1 that is a front side (upper door 40 side) space and an X-ray rear side that is a rear side (back door 44 side) space. Partition into substrate chamber A2. The second partition plate 52 is provided across the first partition plate 51 and the left side plate 45 (see FIG. 5). The upper end of the second partition plate 52 extends to the lower surface of the top plate 47. A lower gap S <b> 3 is formed between the lower end of the second partition plate 52 and the upper and lower partition plates 48.

    The cooler 9 is installed on the top plate 47. The cooler 9 sends cold air into the substrate chamber T1. That is, the cooler 9 sends cool air to at least the X-ray inspection control unit 20, the X-ray generator 21, and the metal detection control unit 30 to cool them. The cooler 9 takes in air from the substrate chamber T1 and generates cool air that cools the taken-in air and sends it into the substrate chamber T1. Thus, the cooler 9 is an inside air circulation type cooler that circulates air in the substrate chamber T1. Specifically, the cooler 9 takes in air from the X-ray rear substrate chamber A2, cools the taken-in air, and generates cold air. Then, the cooler 9 sends the generated cold air into the X-ray rear substrate chamber A2 (see FIG. 6). The cooler 9 takes in air from the X-ray rear substrate chamber A2 and sends cold air into the X-ray rear substrate chamber A2 through an opening (not shown) provided in the top plate 47.

  The X-ray generator 21 is installed on the upper surface of the upper and lower partition plates 48 in a path of cool air from the X-ray rear substrate chamber A2 through the lower gap S3 toward the X-ray front substrate chamber A1. The X-ray inspection control unit 20 is disposed in the X-ray front substrate chamber A1. The X-ray inspection control unit 20 is installed on the side surface of the first partition plate 51 on the X-ray front substrate chamber A1 side. The metal detection control unit 30 is installed on the side surface of the first partition plate 51 on the metal detection substrate chamber B side.

  The cooler 9 sends cold air into the X-ray rear substrate chamber A2 toward the X-ray generator 21. The X-ray generator 21 is cooled by the cold air from the X-ray rear substrate chamber A2 toward the X-ray front substrate chamber A1 through the lower gap S3. The X-ray generator 21 takes in the cool air sent from the cooler 9, and guides the cool air taken in by the fan to the heat generating portion of the X-ray generator 21 and also passes the cold air that has passed through the heat generating portion to the X-ray front substrate chamber A1. You may have the flow-path part led in.

  The X-ray inspection control unit 20 is cooled by the cool air sent into the X-ray front substrate chamber A1. The cold air sent into the X-ray rear substrate chamber A2 is sent from the front side of the first partition plate 51 through the front gap S1 into the metal detection substrate chamber B. The metal detection control unit 30 is cooled by the cold air sent into the metal detection substrate chamber B. That is, the cold air flowing from the X-ray inspection control unit 20 toward the metal detection control unit 30 passes through the front gap S1. The cool air sent into the metal detection substrate chamber B returns from the rear side of the first partition plate 51 through the rear gap S2 to the X-ray rear substrate chamber A2. The cool air (air) returned to the X-ray rear substrate chamber A2 is taken in by the cooler 9 and cooled.

  Thus, after the cool air sent from the cooler 9 into the X-ray rear substrate chamber A2 passes through these substrate chambers in the order of the X-ray front substrate chamber A1 and the metal detection substrate chamber B, the metal detection substrate The chamber B returns again to the X-ray rear substrate chamber A2. The X-ray generator 21, the X-ray inspection control unit 20, and the metal detection control unit 30 are the X-ray generator 21, the X-ray inspection control unit 20, and the metal from the upstream side to the downstream side in the cold air flow direction. The detection control units 30 are arranged in this order.

  The present embodiment is configured as described above, and the cooler 9 sends cold air to the X-ray generator 21, the X-ray inspection control unit 20, and the metal detection control unit 30 provided in the substrate chamber T <b> 1 of the housing 4. . Thereby, the X-ray generator 21, the X-ray inspection control unit 20, and the metal detection control unit 30 are cooled by cold air. Accordingly, even when the X-ray inspection unit 2 and the metal detection unit 3 are accommodated in one housing 4, the heat generated by the X-ray generator 21 is controlled by the X-ray inspection control of the X-ray inspection unit 2. It can suppress affecting the metal detection control part 30 of the part 20 and the metal detection part 3. FIG.

  In the foreign substance inspection apparatus 1, an X-ray generator 21, an X-ray inspection control unit 20, and a metal detection control unit 30 are arranged in order from the upstream side to the downstream side in the flow direction of the cold air sent out from the cooler 9. ing. Thereby, the X-ray generator 21 which becomes high temperature can be efficiently cooled by the coldest air.

  In the substrate chamber T1, an X-ray inspection substrate chamber A on the side where the X-ray generator 21 and the X-ray inspection control unit 20 are provided, and a metal detection substrate chamber B on the side where the metal detection control unit 30 is provided The 1st partition plate 51 which partitions off is provided. A front gap S <b> 1 is provided between the front end of the first partition plate 51 and the upper door 40. Thus, by providing the 1st partition plate 51, suppressing that the heat which generate | occur | produced with the X-ray generator 21 has direct influence on the metal detection control part 30, metal detection control part via the front side clearance S1. Cold air can be led to 30.

  The cooler 9 is an inside air circulation type cooler. As a result, the X-ray generator 21 and the like can be cooled by cold air while suppressing foreign matter from entering the substrate chamber T1 from outside the substrate chamber T1.

  Although one embodiment of the present invention has been described above, the present invention is not limited to the above-described embodiment.

  Other substrates or devices other than the X-ray generator 21, the X-ray inspection control unit 20, and the metal detection control unit 30 may be accommodated in the substrate chamber T1. The cooler 9 may also cool other substrates or devices accommodated in the substrate chamber T <b> 1 together with the X-ray generator 21, the X-ray inspection control unit 20, and the metal detection control unit 30.

  The X-ray generator 21, the X-ray inspection control unit 20, and the metal detection control unit 30 are not limited to be disposed in order from the upstream side to the downstream side in the flow direction of the cool air from the cooler 9. The front clearance S1 between the front end of the first partition plate 51 and the upper door 40 may not be provided. In the case where the front gap S1 is not provided, for example, an opening may be provided in the first partition plate 51, and cold air may be sent from the X-ray front substrate chamber A1 side to the metal detection substrate chamber B side through the opening.

  It is not essential to provide the second partition plate 52. Further, it is not essential to provide the first partition plate 51.

  In the above-described embodiment, the example in which the inspection object S is transported from the opening 4a to the opening 4b has been described. However, the transport direction may be reversed. In this case, the laser sensor 24 may be disposed between the opening 4b and the second hood portion 34, and a slit may be provided on the side surface of the second hood portion 34.

  Moreover, although embodiment mentioned above demonstrated the example which arrange | positions a part of conveyor 10 inside the housing | casing 4, all the conveyor 10 may be accommodated in the inside of the housing | casing 4. FIG.

  DESCRIPTION OF SYMBOLS 1 ... Foreign substance inspection apparatus, 2 ... X-ray inspection part, 3 ... Metal detection part, 4 ... Case, 9 ... Cooler, 10 ... Conveyor (conveyance part), 20 ... X-ray inspection control part, 21 ... X-ray generator 22 ... X-ray detector, 30 ... metal detection controller, 35 ... transmitting coil (magnetic field generator), 36, 37 ... receiving coil (magnetic field fluctuation detector), 51 ... first partition plate (partition plate), S1 ... front gap (gap), S ... inspection object.

Claims (4)

A transport unit for transporting an object to be inspected;
An X-ray inspection unit that detects foreign matter contained in the inspection object being transported by the transport unit, utilizing X-ray transparency;
Utilizing the interaction between the magnetic field and the metal, a metal detection unit that detects foreign matter contained in the inspection object being conveyed by the conveyance unit;
A housing that houses at least a part of the transport unit, the X-ray inspection unit, and the metal detection unit;
A cooler for sending cool air into the housing;
With
The X-ray inspection unit
An X-ray generator for generating the X-ray;
An X-ray detector for detecting the X-rays generated by the X-ray generator;
An X-ray inspection control unit that controls the X-ray generator and acquires the detection result of the X-ray detector to detect the foreign matter;
With
The metal detector is
A magnetic field generator for generating a magnetic field;
A magnetic field fluctuation detector for detecting fluctuations of the magnetic field generated by the magnetic field generator;
A metal detection control unit that controls the magnetic field generator and detects the foreign matter by obtaining a detection result of the magnetic field fluctuation detector;
With
The foreign matter inspection apparatus, wherein the cooler sends the cold air to at least the X-ray generator, the X-ray inspection control unit, and the metal detection control unit.   The foreign matter inspection apparatus according to claim 1, wherein the X-ray generator, the X-ray inspection control unit, and the metal detection control unit are arranged in order from the upstream side to the downstream side in the flow direction of the cold air. . In the housing, further comprising a partition plate for partitioning the region on the side where the X-ray generator and the X-ray inspection control unit are provided and the region on the side where the metal detection control unit is provided,
The partition plate is disposed in the housing such that a gap is provided between an end of the partition plate and the inner wall of the housing.
The foreign matter inspection apparatus according to claim 2, wherein the cold air flowing from the X-ray inspection control unit toward the metal detection control unit passes through the gap.   4. The foreign matter inspection apparatus according to claim 1, wherein the cooler takes in air from the inside of the casing and generates the cold air that cools the taken-in air and sends the air into the casing. 5.

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