JP2017037893A - Substrate housing container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate housing container which can suppress the movement of a stored substrate.SOLUTION: A substrate housing container 1 includes: a container body 10 having an opening 11 on one end and a loading part 12 disposed opposite to the opening 11 on another end, to store a substrate W in overlay; and a lid body 20 which covers the opening 11. The lid body 20 includes: a lid body part 21 which covers the opening 11; and at least two pressing members 22 which swing to the center direction of the lid body part 21 to press the outside of the substrate W stored and overlaid in the container body 10, at the lid body part 21. The container body 10 includes a guide groove 13 which causes a tip part 22a of the pressing member 22 to move from the outside of the loading part 12 toward the inside, to guide to a position to press the outside of the substrate W. The guide groove 13 is formed into a hollow shape from the surface of the loading part 12.SELECTED DRAWING: Figure 7

Description

  The present invention relates to a substrate storage container.

As a substrate storage container for storing a substrate, for example, there is a container for storing a semiconductor wafer disclosed in Patent Document 1.
The substrate storage container disclosed in Patent Document 1 includes a cylindrical substrate storage portion on a container main body, and a cushion material or the like is provided at the uppermost and lowermost stages of the substrate storage portion, and a wafer ( Substrate) and interlayer paper (synthetic resin sheet, dust-free paper, synthetic resin molded product, etc.) are alternately stored and covered with a cover.

JP 09-129719 A

However, in the substrate storage container of Patent Document 1, in order to store the wafer, the inner diameter of the substrate storage unit needs to be larger than the outer diameter of the wafer, and the substrate storage unit is being transported by the gap between the substrate storage unit and the wafer. The wafer moves in the horizontal direction due to vibration and shock.
For this reason, there are problems such as rubbing with an interlayer paper or the like that is in direct contact with the wafer, damage due to scratches or cracks, dust generation, or contamination of the wafer with chemical components.

  The present invention has been made in view of the problems of the prior art, and an object of the present invention is to provide a substrate storage container capable of suppressing the movement of the stored substrate.

In order to achieve the above object, a substrate storage container according to the present invention includes:
A substrate storage container comprising: a container body having an opening at one end, a container body having a mounting portion on which the substrate is stacked and stored at the other end; and a lid that closes the opening;
The lid body includes a lid body portion that closes the opening, and a pressing member that swings in a center direction of the lid body portion and that presses the outside of the substrate that is housed and stacked in the container body. Have at least two locations,
The container body has a guide groove that moves the tip of the pressing member from the outside to the inside of the mounting portion and guides it to a position for pressing the outside of the substrate.
The guide groove is formed to be recessed from the surface of the mounting portion.
It is characterized by that.

  The container body is formed with a fixed side wall portion defining a storage portion for storing the substrate in the mounting portion at an interval, and the guide groove is formed in the mounting portion between the fixed side wall portions, It is preferable that the lid is formed with the pressing member at the lid portion at a position corresponding to the interval between the fixed side wall portions.

  The presser member may be formed integrally with the lid body, or the presser member may be formed with a groove portion that facilitates swinging along a swinging swinging shaft portion. preferable.

  According to the substrate storage container of the present invention, the movement of the stored substrate can be suppressed.

It is applied to the container main body of one Embodiment of the substrate storage container of this invention, (a) is a top view, (b) is AA sectional drawing in (a). 1A is a sectional view taken along arrow B in FIG. 1A, and FIG. 1B is a cross-sectional view taken along line CC in FIG. 1A. It is. It is applied to the cover body of one Embodiment of the substrate storage container of this invention, (a) is a front view, (b) is a top view. It is a bottom view of the lid concerning one embodiment of the substrate storage container of the present invention. It is DD sectional drawing in FIG.3 (b) of a part of cover body and container main body concerning one Embodiment of the substrate storage container of this invention. It is EE sectional drawing in FIG.3 (b) concerning the cover body of one Embodiment of the substrate storage container of this invention. It is explanatory drawing of operation | movement of the pressing member concerning one Embodiment of the substrate storage container of this invention. It is explanatory drawing of the accommodation process of the board | substrate concerning one Embodiment of the substrate storage container of this invention.

Hereinafter, an embodiment of a substrate storage container of the present invention will be described in detail with reference to the drawings.
The substrate storage container 1 of the present invention has an opening 11 at one end and a container main body 10 having a mounting portion 12 that is opposite to the opening 11 and stores a substrate W on the other end, and closes the opening 11. The lid 20 is a substrate storage container 1 that includes a lid 21 that closes the opening 11 and swings in the center of the lid 21 and is accommodated in the container body 10. The lid body 21 has at least two pressing members 22 for pressing the outside of the stacked substrates W, and the container body 10 moves the tip 22a of the pressing member 22 from the outside to the inside of the mounting portion 12. The guide groove 13 is guided to a position for pressing the outside of the substrate W, and the guide groove 13 is formed to be recessed from the surface of the mounting portion 12.
As a result, when the container body 10 is covered with the lid 20, the distal end portion 22 a of the holding member 22 is moved from the outside to the inside by the guide groove 13 of the container body 10, and at least two places on the outside of the stacked substrate W The movement of the substrate W can be prevented by pressing it down.
In the present embodiment, an example will be described in which the opening 11 of the container body 10 opens upward and a horizontal substrate W is stacked and stored on the mounting portion 12. Note that the substrate W is stored in the substrate storage container 1 in an overlapping manner, and after the storage with the lid 20 covered, the state of the substrate W (the orientation of the substrate W is, for example, horizontal or vertical) is transferred. May be done.

The container body 10 includes a mounting portion 12 serving as a bottom plate. As shown in FIG. 1A, the mounting part 12 is formed in an octagonal shape with four corners cut out, and the substrate W is stacked and stored on the upper surface of the mounting part 12. The mounting portion 12 may be formed in a square shape.
Further, the mounting portion 12 is formed so that a fixed side wall portion 14 that partitions the storage portion S of the substrate W protrudes upward, and a plurality of, for example, four arcs forming a part of a cylinder according to the shape of the substrate W And is formed integrally with the mounting portion 12 with an interval L along the circumference. Accordingly, the upper end portion of the fixed side wall portion 14 becomes the opening 11 of the container body 10, and the space defined by the fixed side wall portion 14 becomes the storage portion S for the substrate W.
The inner diameter of the fixed side wall portion 14 is formed in a size that does not hinder the storage and removal of the substrate W, and is larger than the size (diameter) of the substrate W, for example, 5 inches, 6 inches, 8 inches, 12 inches, or the like. (For example, about 1 to 2 mm in diameter). The interval L between the fixed side wall portions 14 is an insertion port of the robot arm when the substrate W is taken out.

As shown in FIG. 2 (b), the container body 10 has a sealing surface 15 with the lid 20 formed on the outer periphery of the lower end portion of the fixed side wall portion 14, and a protruding piece 15 a protruding upward on the outer side of the sealing surface 15. It is formed in an arc shape. As shown in FIG. 1 (b), a seal surface 16 is formed in the space L between the fixed side wall portions 14 so as to protrude upward from the mounting portion 12. It is continuous and circular. A protruding piece is omitted from the outside of the seal surface 16.
Thereby, when the cover body 20 mentioned later is covered, the inner surface of the cylindrical part 23 of the cover body 20 is sealed by coming into contact with the sealing surfaces 15 and 16, and the outer surface of the cylindrical part 23 of the cover body is projected to the protruding piece 15a. By holding down with, the sealed state is maintained.

  As shown in FIG. 1 and FIG. 2, the container body 10 is provided with locking pieces 17 having claw portions 17 a provided on the inner side of the tip at four corners of the mounting portion 12 and four locations outside the fixed side wall portion 14. And projecting upward. By locking the claw portion 17 a of the locking piece 17 to the lid body 20, the connection state between the container body 10 and the lid body 20 can be maintained. Details of the lid 20 will be described later.

As shown in FIG. 1, the container main body 10 includes guide grooves 13, and is formed at four positions L of the fixed side wall portion 14 of the mounting portion 12. The guide groove 13 swings a pressing member 22 provided on a lid body portion 21 of the lid body 20 described later at a base end portion 22b, and moves the distal end portion 22a from the outside of the mounting portion 12 to the inside (center side). To guide you.
The guide groove 13 is formed in a straight line perpendicular to the center direction of the mounting portion 12 serving as a bottom plate, and is recessed from the surface of the mounting portion 12. The guide groove 13 is configured in a substantially V-shaped cross-section with an inclined surface 13a that is higher on the outer side of the container body 10 and lower on the center side, and a vertical surface 13b that is continuous with the center side of the inclined surface 13a.
In addition, as shown in FIGS. 1 and 2, the container main body 10 is provided with uneven portions and ribs as necessary for members such as the mounting portion 12 and the fixed side wall portion 14 for reinforcement and handling in other processes. Etc. are formed.

As shown in FIGS. 3 to 5, the lid 20 covers the opening 11 of the container body 10, and the lid 20 is an octagonal top plate having the same outer shape as the mounting portion 12. 21 is provided.
The lid portion 21 protrudes from an end portion of the octagon, and an outer wall portion 24 is formed. The lid portion 21 is in contact with the lip portion around the surface of the mounting portion 12 of the container body 10. On the inner side of the outer wall portion 24 of the lid body portion 21, a cylindrical cylindrical portion 23 is formed so as to protrude from the lid body portion 21 serving as a top surface portion, and the sealing surface 15 and the sealing surface 16 of the mounting portion 12 of the container body 10 are formed. It can be sealed in contact and sealed.

Locking holes 25 are formed at four corners of the lid portion 21 and at four positions corresponding to the arrangement of the locking pieces 17 of the container body 10. After the claw portion 17a of the locking piece 17 protruding upward from the mounting portion 12 of the container body 10 gets over the locking hole 25, the lower end horizontal surface of the claw portion 17a is locked.
As shown in FIG. 6, the locking hole 25 is formed in a concave portion 21 a formed on the upper surface of the lid body portion 21 so that the claw portion 17 a of the locking piece 17 does not protrude from the surface of the lid body portion 21. It is. The locking surface 25a of the locking hole 25 to which the claw portion 17a is locked has a central portion recessed so that the locking piece 17 can be pushed back easily when the locked state is released.
Thereby, the nail | claw part 17a of the latching piece 17 by the side of the container main body 10 is made to get over the latching hole 25 by the side of the lid 20 so that the container 20 may cover the lid body 20, and a nail | claw part is obtained. 17a is locked to the locking surface 25a.
In this locked state, the storage portion S of the substrate W is hermetically sealed by the container body 10 and the lid 20.
On the other hand, the release of the locked state can be performed easily by using the concave portion at the center of the locking surface 25a of the lid 20 so that the locking piece 17 can be reliably pushed back from the center side to the outside. it can.

The lid body 20 includes pressing members 22 in at least two places, for example, four places on the outer side of the substrate W.
The pressing member 22 is formed in a flat plate shape, protrudes downward from the inside of the lid body portion 21 serving as the top surface portion, and is integrally formed so as to be orthogonal to the center direction of the lid body portion 21. The presser member 22 is formed so as to be swingable around the swing shaft portion 26 of the base end portion 22b, and the swing shaft portion 26 has a hinge structure by being formed integrally with the lid body 20. .
Here, the pressing member 22 has a groove portion 27 formed in the outer portion of the swing shaft portion 26. Thereby, the hinge structure portion of the pressing member 22 is thinned by the groove portion 27 formed in the swing shaft portion 26, and the pressing member 22 is easily swung around the groove portion 27, and the pressing member 22 by the guide groove 13. The guide can be performed smoothly.
The position of the oscillating shaft portion 26 is set so that the inner side surface (the surface on the center side of the substrate W) of the holding member 22 is positioned according to the outer diameter of the substrate W that is stored in an overlapping manner. The pressing member 22 has a protruding length determined as follows. When the cover member 20 is put on the container body 10, the holding member 22 has a leading end portion (a lower end portion in the illustrated example) 22 a at the guide groove 13 of the container body 10 at the beginning of covering (see FIG. 7A). The inner surface of the pressing member 22 is the vertical surface 13b of the guide groove 13 in the final stage (see FIG. 7B), which is positioned inside and guided by the guide groove 13 as the cover body 20 is covered. The protruding length is determined so that it is guided to the state where it touches.
That is, in the state where the container body 10 is covered with the lid 20 and sealed and locked, the distal end portion 22a of the pressing member 22 is located at the groove distal end of the guide groove 13 and cannot be returned to the outside by the inclined surface 13a. .
Thus, in a state where the container body 10 is covered with the lid body 20 and sealed and locked, the four pressing members 22 are held at positions corresponding to the outer diameter of the substrate W, and the four pressing members 22 are The outside (outside surface) of the stacked substrates W can be pressed, and the horizontal movement of the substrate W can be reliably prevented.
Since the pressing member 22 is located between the lid body portion 21 that is the top surface portion of the lid body 20 and the guide groove 13 that is recessed in the mounting portion 12 that is the bottom surface portion of the container body 10, All the substrates W stacked on the substrate can be pressed, and even the lowermost substrate W can be pressed securely.
Further, since the holding member 22 does not exist in the container body 10 from which the lid 20 is removed, the substrate W can be stored in the container body 10 as before without being obstructed by the holding member 22. it can.
As shown in FIGS. 3 to 5, the lid 20 is attached to members such as the lid 21, the cylindrical portion 23, and the outer wall 24 for reinforcement and handling in other processes as needed. Irregularities, ribs and the like are formed. Further, an upper pressing portion 28 for pressing the substrate W stored in the mounting portion 12 of the container body 10 up and down is integrally formed on the top surface portion of the lid portion 21 and is overlapped as before. The substrate W is pressed up and down with the mounting portion 12.

  In the substrate storage container 1, the container body 10 and the lid body 20 are preferably formed of conductive plastic. Examples of the conductive plastic include a plastic added with a conductive filler and a polymer alloy-treated plastic. Examples of the conductive filler include carbon black, graphite carbon, graphite, carbon fiber, metal powder, metal fiber, metal oxide powder, metal-coated inorganic fine powder, organic fine powder and fiber.

In the substrate storage container 1 configured as described above, as shown in FIG. 8, the lowermost cushion material 31 is disposed on the mounting part 12 surrounded by the four fixed side wall parts 14 of the container body 10, Further, the substrates W and the interlayer paper 32 are alternately stacked, and the cushion material 31 is arranged and stored in the uppermost stage.
After the predetermined number of substrates W are stacked and stored in the container body 10, the lid body 20 is covered.
When the lid 20 is put on the container body 10, as shown in FIG. 7A, when the tip of the cylindrical portion 23 of the lid 20 is put on the seal surface 16, the holding member of the lid 20 is held. The leading end 22 a of 22 is in a state positioned in the guide groove 13 of the container body 10.
Further, when the cover body 20 is put on the container body 10, the distal end portion 22a of the holding member 22 is guided by the inclined surface 13a of the guide groove 13 of the container body 10 and moves from the outside to the center side. 22 swings around the swing shaft portion 26 of the base end portion 22b.
When the lid 20 is completely covered with the container body 10, as shown in FIG. 7B, the pressing member 22 comes into contact with the vertical surface 13 b on the center side of the guide groove 13, and the pressing member The inner side surface of 22 is the position of the outer diameter of the substrate W.
As a result, the outer side (outer side surface) of the stacked substrates W is pressed by the four pressing members 22, and the horizontal movement is prevented.
Further, the stacked substrates W are pressed by the upper surface of the mounting portion 12 of the container body 10 and the upper pressing portion 28 of the lid body portion 21 of the lid body 20, and the movement in the vertical direction is also suppressed.
Further, when the lid 20 is completely covered with the container body 10, the cylindrical portion 23 of the lid 20 is in a sealed state in contact with the sealing surfaces 15 and 16 of the container body 10.
Further, after the claw portion 17a of the locking piece 17 of the container body 10 gets over the locking hole 25 of the lid body 20, it is locked to the locking surface 25a, and the connection state between the lid body 20 and the container body 10 is maintained. Is done.
Thus, after the substrate W is stored in the container body 10 in an overlapping manner and covered with the lid 20, the substrate W stored in the storage portion S is pressed in the vertical and horizontal directions. Even if transported in the direction, the substrate W does not move, but it is rubbed with an interlayer paper or the like that is in direct contact with the substrate W, broken due to scratches or cracks, dust generation, or contamination of the substrate W due to chemical components. Can be prevented.

According to the substrate storage container 1 of the present invention, the container main body 10 having the opening 11 at one end, the mounting body 12 having the other end facing the opening 11 and storing the substrate W stacked thereon, and the opening 11. A lid 20 that closes the opening 11, the lid 20 swings in the center direction of the lid 21 and the lid 21 and closes the container body 10. The lid body 21 has at least two holding members 22 for holding the outside of the stored and stacked substrates W, and the container body 10 has the holding member 22 with the distal end portion 22a facing the mounting portion 12 from the outside to the inside. The guide groove 13 is moved and guided to a position where the outside of the substrate W is pressed, and the guide groove 13 is formed to be recessed from the surface of the mounting portion 12, so that the substrate W stored in the container body 10 is To prevent the movement from being pressed from both sides with the holding member 22 Kill.
Further, since the distal end portion 22a of the pressing member 22 is guided and pressed by the guide groove 13 recessed in the mounting portion 12, the outer side (outer surface) of all the substrates W on the mounting portion 12 can be pressed. Thereby, even if the thickness of the substrate W is thin, it can be reliably pressed and prevented from moving.

According to the substrate storage container 1 of the present invention, the container main body 10 includes the mounting part 12 and the fixed side wall part 14 that defines the storage part S for storing the substrate W, with a gap L, and the fixed side wall part 14. Since the guide groove 13 is formed in the mounting portion 12 between them, and the holding member 22 is formed on the lid body portion 21 at a position corresponding to the interval L of the stationary side wall portion 14, the stationary side wall portion 14 is fixed. By providing the guide groove 13 and the holding member 22 using the interval L, the guide groove 13 and the holding member 22 do not interfere at all when the substrate W is stored or taken out in the container body 10. It can be stored and taken out as before.
In the case of a storage container in which a movable side wall can be swung around a vertical axis in a conventional fixed side wall portion and a substrate is covered by covering the lid by covering the lid, the movable side wall A clearance allowing movement is required between the container main body and the surface of the mounting portion. For this reason, the movable wall moves upward by a gap from the surface of the mounting portion, and there is a possibility that problems such as the inability to press the bottom substrate W may occur depending on the thickness of the substrate.
On the other hand, in the substrate storage container 1 of the present invention, since the distal end portion 22a of the pressing member 22 is positioned up to a position recessed from the surface of the mounting portion 12, all the substrates W can be pressed regardless of the thickness of the substrate W. be able to.
Further, with the conventional movable side wall, when the movable side wall is not returned to the original state when the substrate is accommodated in the container main body, there is a possibility of interference with the accommodated substrate.
On the other hand, in the substrate storage container 1 of the present invention, since the pressing member 22 is provided on the lid 20, when the substrate W is stored, it does not exist in the container main body 10 and interference with the substrate W does not occur at all. You can work as usual.
Further, the distance L between the fixed side wall portions 14 can be used as an insertion port for the robot arm and used for taking out the substrate W.

  According to the substrate storage container 1 of the present invention, since the holding member 22 is formed integrally with the lid 20, there is no need to assemble and adjust the position of the holding member 22, and the substrate W that is securely stacked and stored. Can be pressed.

  According to the substrate storage container 1 of the present invention, since the holding member 22 is formed with the groove portion 27 that promotes the rocking in the rocking shaft portion 26, the hinge structure portion of the holding member 22 becomes thin, and the groove portion 27 is formed. The centering of the pressing member 22 becomes easy, and the pressing member 22 can be smoothly guided by the guide groove 13.

In the above embodiment, the case where the presser members 22 are provided at four locations has been described as an example. However, the presser members 22 may be provided at least at two diagonal positions, and the presser members 22 may be provided at three or more locations. The substrate W can be reliably pressed.
In addition, a single flat plate-like member is installed at one place, but a plurality of flat plate members are oscillated at right angles to the center with one holding member 22 as a divided structure. You can also do it. By doing so, the substrate W can be pressed by the divided pressing members 22.
Further, protrusions protruding toward the substrate W on the surface of the pressing member 22 are provided on both sides in the width direction so that the substrate W can be pressed not only by the central portion of the pressing member 22 but also by protrusions on both sides. good. Alternatively, the surface of the flat pressing member 22 may be recessed so that both sides protrude relatively, and the substrate W can be pressed by the protruding portion, and one or more recesses may be formed. Good.
The present invention is not limited to the above embodiment.

DESCRIPTION OF SYMBOLS 1 Substrate storage container 10 Container body 11 Opening part 12 Mounting part 13 Guide groove 13a Inclined surface 13b Vertical surface 14 Fixed side wall part 15 Sealing surface 15a Protruding piece 16 Sealing surface 17 Locking piece 17a Claw part 20 Lid body 21 Lid body part 21a Concave portion 22 Pressing member 22a Tip portion 22b Base end portion 23 Cylindrical portion 24 Outer wall portion 25 Locking hole 25a Locking surface 26 Oscillating shaft portion 27 Groove portion 28 Upper presser portion 31 Cushion material 32 Interlayer paper L Interval S Storage portion W Substrate

Claims (4)

A substrate storage container comprising: a container body having an opening at one end, a container body having a mounting portion on which the substrate is stacked and stored at the other end; and a lid that closes the opening;
The lid body includes a lid body portion that closes the opening, and a pressing member that swings in a center direction of the lid body portion and that presses the outside of the substrate that is housed and stacked in the container body. Have at least two locations,
The container body has a guide groove that moves the tip of the pressing member from the outside to the inside of the mounting portion and guides it to a position for pressing the outside of the substrate.
The guide groove is formed to be recessed from the surface of the mounting portion.
A substrate storage container. The container body is formed with a fixed side wall portion defining a storage portion for storing the substrate in the mounting portion at an interval, and the guide groove is formed in the mounting portion between the fixed side wall portions,
In the lid body, the pressing member is formed on the lid body portion at a position corresponding to the interval between the fixed side wall portions.
The substrate storage container according to claim 1. The pressing member is formed integrally with the lid.
The substrate storage container according to claim 1, wherein the substrate storage container is a substrate storage container. The pressing member is formed with a groove portion that promotes rocking along a rocking shaft portion that rocks.
The substrate storage container according to any one of claims 1 to 3.

Images