JP2017028247A5 - - Google Patents
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- Publication number
- JP2017028247A5 JP2017028247A5 JP2016081747A JP2016081747A JP2017028247A5 JP 2017028247 A5 JP2017028247 A5 JP 2017028247A5 JP 2016081747 A JP2016081747 A JP 2016081747A JP 2016081747 A JP2016081747 A JP 2016081747A JP 2017028247 A5 JP2017028247 A5 JP 2017028247A5
- Authority
- JP
- Japan
- Prior art keywords
- silicon
- graphite
- intermediate layer
- oxygen
- conjugates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 10
- 229910052710 silicon Inorganic materials 0.000 claims 10
- 239000010703 silicon Substances 0.000 claims 10
- 229910002804 graphite Inorganic materials 0.000 claims 8
- 239000010439 graphite Substances 0.000 claims 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 5
- 229910052760 oxygen Inorganic materials 0.000 claims 5
- 239000001301 oxygen Substances 0.000 claims 5
- 229910052799 carbon Inorganic materials 0.000 claims 2
- 238000002441 X-ray diffraction Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015141731 | 2015-07-16 | ||
| JP2015141731 | 2015-07-16 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017028247A JP2017028247A (ja) | 2017-02-02 |
| JP2017028247A5 true JP2017028247A5 (https=) | 2019-01-24 |
| JP6590322B2 JP6590322B2 (ja) | 2019-10-16 |
Family
ID=57775434
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016081747A Active JP6590322B2 (ja) | 2015-07-16 | 2016-04-15 | グラファイトとシリコンとの結合体及びその製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US10357942B2 (https=) |
| JP (1) | JP6590322B2 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20200338860A1 (en) * | 2018-06-21 | 2020-10-29 | Jinan Jingzheng Electronics Co., Ltd. | Composite monocrystalline film |
| JP7199743B2 (ja) | 2018-12-28 | 2023-01-06 | 国立研究開発法人産業技術総合研究所 | グラファイト薄膜／シリコン基板積層体、及びその製造方法、高排熱型電子デバイス用基板 |
| JPWO2023243225A1 (https=) * | 2022-06-14 | 2023-12-21 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS505212B1 (https=) | 1966-04-09 | 1975-03-01 | ||
| JPS586712B2 (ja) | 1976-07-01 | 1983-02-05 | 財団法人特殊無機材料研究所 | 耐熱性高強度接合体の製造方法 |
| JPS6311509A (ja) * | 1986-07-03 | 1988-01-19 | Hitachi Chem Co Ltd | 黒鉛モノクロメ−タ−の製造法 |
| JP4182323B2 (ja) | 2002-02-27 | 2008-11-19 | ソニー株式会社 | 複合基板、基板製造方法 |
| JP5138244B2 (ja) * | 2007-03-20 | 2013-02-06 | 日本電信電話株式会社 | 電子デバイス用基板の製造方法 |
| JP2008294110A (ja) | 2007-05-23 | 2008-12-04 | Nippon Telegr & Teleph Corp <Ntt> | 電子デバイス用基板およびその製造方法 |
| JP5091920B2 (ja) * | 2009-06-23 | 2012-12-05 | 株式会社沖データ | 半導体ウエハの製造方法 |
| US8822306B2 (en) * | 2010-09-30 | 2014-09-02 | Infineon Technologies Ag | Method for manufacturing a composite wafer having a graphite core, and composite wafer having a graphite core |
-
2016
- 2016-04-15 JP JP2016081747A patent/JP6590322B2/ja active Active
- 2016-07-09 US US15/206,264 patent/US10357942B2/en active Active
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