JP2017022295A5 - - Google Patents

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Publication number
JP2017022295A5
JP2017022295A5 JP2015140102A JP2015140102A JP2017022295A5 JP 2017022295 A5 JP2017022295 A5 JP 2017022295A5 JP 2015140102 A JP2015140102 A JP 2015140102A JP 2015140102 A JP2015140102 A JP 2015140102A JP 2017022295 A5 JP2017022295 A5 JP 2017022295A5
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JP
Japan
Prior art keywords
plasma processing
processing apparatus
base
sample stage
disposed
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JP2015140102A
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English (en)
Japanese (ja)
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JP2017022295A (ja
JP6753654B2 (ja
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Priority to JP2015140102A priority Critical patent/JP6753654B2/ja
Priority claimed from JP2015140102A external-priority patent/JP6753654B2/ja
Publication of JP2017022295A publication Critical patent/JP2017022295A/ja
Publication of JP2017022295A5 publication Critical patent/JP2017022295A5/ja
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Publication of JP6753654B2 publication Critical patent/JP6753654B2/ja
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JP2015140102A 2015-07-14 2015-07-14 プラズマ処理装置 Active JP6753654B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2015140102A JP6753654B2 (ja) 2015-07-14 2015-07-14 プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015140102A JP6753654B2 (ja) 2015-07-14 2015-07-14 プラズマ処理装置

Publications (3)

Publication Number Publication Date
JP2017022295A JP2017022295A (ja) 2017-01-26
JP2017022295A5 true JP2017022295A5 (enExample) 2018-08-16
JP6753654B2 JP6753654B2 (ja) 2020-09-09

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JP2015140102A Active JP6753654B2 (ja) 2015-07-14 2015-07-14 プラズマ処理装置

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JP (1) JP6753654B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7278175B2 (ja) * 2019-08-23 2023-05-19 東京エレクトロン株式会社 基板処理装置、基板処理装置の製造方法及びメンテナンス方法
KR102855389B1 (ko) * 2020-12-07 2025-09-04 주식회사 원익아이피에스 히터조립체 및 이를 구비하는 기판처리장치
CN114107956B (zh) * 2021-11-26 2025-07-25 中国科学院金属研究所 一种可变尺寸的高功率微波等离子体化学气相沉积设备偏压样品台
WO2025033180A1 (ja) * 2023-08-07 2025-02-13 東京エレクトロン株式会社 プラズマ処理装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009149964A (ja) * 2007-12-22 2009-07-09 Tokyo Electron Ltd 載置台構造及び熱処理装置
JP2011054838A (ja) * 2009-09-03 2011-03-17 Tokyo Electron Ltd 載置台構造及び処理装置
JP5835722B2 (ja) * 2009-12-10 2015-12-24 オルボテック エルティ ソラー，エルエルシー 自動順位付け多方向直列型処理装置

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