JP2017018951A5 - - Google Patents
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- Publication number
- JP2017018951A5 JP2017018951A5 JP2016148189A JP2016148189A JP2017018951A5 JP 2017018951 A5 JP2017018951 A5 JP 2017018951A5 JP 2016148189 A JP2016148189 A JP 2016148189A JP 2016148189 A JP2016148189 A JP 2016148189A JP 2017018951 A5 JP2017018951 A5 JP 2017018951A5
- Authority
- JP
- Japan
- Prior art keywords
- gas
- substrate
- environment
- providing
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
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- 239000007789 gas Substances 0.000 claims 17
- 238000000034 method Methods 0.000 claims 16
- 239000000758 substrate Substances 0.000 claims 10
- 238000000151 deposition Methods 0.000 claims 6
- 230000008021 deposition Effects 0.000 claims 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- 229910001873 dinitrogen Inorganic materials 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 238000004891 communication Methods 0.000 claims 1
- 239000012530 fluid Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
- 229910052756 noble gas Inorganic materials 0.000 claims 1
- 230000001590 oxidative effect Effects 0.000 claims 1
- 239000002904 solvent Substances 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016148189A JP2017018951A (ja) | 2016-07-28 | 2016-07-28 | 印刷ギャップの制御のための装置および方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016148189A JP2017018951A (ja) | 2016-07-28 | 2016-07-28 | 印刷ギャップの制御のための装置および方法 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015526775A Division JP6050492B2 (ja) | 2013-10-02 | 2013-10-02 | 印刷ギャップの制御のための装置および方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017255134A Division JP2018058073A (ja) | 2017-12-29 | 2017-12-29 | 印刷ギャップの制御のための装置および方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017018951A JP2017018951A (ja) | 2017-01-26 |
JP2017018951A5 true JP2017018951A5 (enrdf_load_stackoverflow) | 2017-09-07 |
Family
ID=57887427
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016148189A Ceased JP2017018951A (ja) | 2016-07-28 | 2016-07-28 | 印刷ギャップの制御のための装置および方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2017018951A (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20210040684A (ko) * | 2019-10-04 | 2021-04-14 | (주)포인트엔지니어링 | 마이크로 led 디스플레이 제조장치 및 마이크로 led 디스플레이 제조방법 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8182608B2 (en) * | 2007-09-26 | 2012-05-22 | Eastman Kodak Company | Deposition system for thin film formation |
US8808799B2 (en) * | 2009-05-01 | 2014-08-19 | Kateeva, Inc. | Method and apparatus for organic vapor printing |
US20110097494A1 (en) * | 2009-10-27 | 2011-04-28 | Kerr Roger S | Fluid conveyance system including flexible retaining mechanism |
KR101780431B1 (ko) * | 2011-08-09 | 2017-09-21 | 카티바, 인크. | 하향 인쇄 장치 및 방법 |
-
2016
- 2016-07-28 JP JP2016148189A patent/JP2017018951A/ja not_active Ceased
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