JP2017017895A5 - - Google Patents
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- JP2017017895A5 JP2017017895A5 JP2015133550A JP2015133550A JP2017017895A5 JP 2017017895 A5 JP2017017895 A5 JP 2017017895A5 JP 2015133550 A JP2015133550 A JP 2015133550A JP 2015133550 A JP2015133550 A JP 2015133550A JP 2017017895 A5 JP2017017895 A5 JP 2017017895A5
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- drive device
- fixed
- piezoelectric drive
- driven
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015133550A JP6617450B2 (ja) | 2015-07-02 | 2015-07-02 | 圧電駆動装置、モーターおよびロボット |
US15/194,943 US10256749B2 (en) | 2015-07-02 | 2016-06-28 | Piezoelectric actuator, motor, robot, and method of driving piezoelectric actuator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015133550A JP6617450B2 (ja) | 2015-07-02 | 2015-07-02 | 圧電駆動装置、モーターおよびロボット |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2017017895A JP2017017895A (ja) | 2017-01-19 |
JP2017017895A5 true JP2017017895A5 (de) | 2018-08-02 |
JP6617450B2 JP6617450B2 (ja) | 2019-12-11 |
Family
ID=57831242
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015133550A Active JP6617450B2 (ja) | 2015-07-02 | 2015-07-02 | 圧電駆動装置、モーターおよびロボット |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6617450B2 (de) |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60148384A (ja) * | 1984-01-10 | 1985-08-05 | Kanto Jidosha Kogyo Kk | 振動波モ−タ |
JP3334450B2 (ja) * | 1995-10-12 | 2002-10-15 | 松下電器産業株式会社 | 圧電アクチュエータおよびそれを用いた焦電型赤外線センサ |
JPH09135585A (ja) * | 1995-11-08 | 1997-05-20 | Nikon Corp | 振動アクチュエータ |
SE0002885D0 (sv) * | 2000-08-11 | 2000-08-11 | Piezomotor Uppsala Ab | Fine walking actuator |
US7355325B2 (en) * | 2006-06-15 | 2008-04-08 | Piezomotor Uppsala Ab | Wide frequency range electromechanical actuator |
DE112010006073T5 (de) * | 2010-12-20 | 2013-10-10 | Piezomotor Uppsala Ab | Elektromechanischer Motor |
DE102011087801B4 (de) * | 2011-02-22 | 2013-04-25 | Physik Instrumente (Pi) Gmbh & Co. Kg | Ultraschallmotor |
JP2013240172A (ja) * | 2012-05-14 | 2013-11-28 | Seiko Epson Corp | 圧電モーター、ロボットハンド、ロボット、電子部品搬送装置、電子部品検査装置、送液ポンプ、印刷装置、電子時計、投影装置、搬送装置 |
DE102013107154B4 (de) * | 2013-07-08 | 2020-09-10 | Physik Instrumente (Pi) Gmbh & Co. Kg | Antriebsvorrichtung |
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2015
- 2015-07-02 JP JP2015133550A patent/JP6617450B2/ja active Active
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