JP2017013968A - Sheet transport device and sheet transport method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sheet transport device, etc. which sufficiently inhibits a sheet travel position from being displaced from a desired position and transports the sheet in a spiral manner.SOLUTION: A sheet transport device includes a roller part which feeds a sheet 32 while spirally winding the sheet and has a first roller 9 and a second roller part 11. The sheet is fed while being spirally wound. The first roller and the second roller part are disposed inclining so that the second roller part is in a predetermined arrangement relative to the first roller.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a sheet conveying apparatus and a conveying method.

Conventionally, a sheet conveying apparatus that conveys a belt-like sheet while being wound around a first roller and a second roller a plurality of times is used.
This type of sheet conveying apparatus is used, for example, in an apparatus for manufacturing an organic EL (electric luminescence) element.

In such an organic EL element manufacturing apparatus, a base material as a belt-like sheet is supplied by a sheet conveying device, and an anode layer, a light emitting layer (organic EL layer) are supplied to the supplied base material by vapor deposition using a vapor deposition source. A vapor deposition layer such as a cathode layer is formed.
Here, in order to form a vapor deposition layer having the required thickness, it is necessary to ensure the vapor deposition time as long as possible.

  In view of this, a sheet conveying apparatus having a can roller as a first roller and a second roller so that the rotation axis of the second roller is inclined at a predetermined angle with respect to the rotation axis of the can roller. Of the base material that is in contact with the can roller, and is provided with a sheet transport device configured to be transported while being wound spirally around the rolls with a constant tension. There has been proposed an organic EL element manufacturing apparatus configured to discharge a vaporized material from a vapor deposition source to form a vapor deposition layer (see Patent Document 1). By providing the sheet conveying device, the organic EL element manufacturing apparatus can ensure a long vapor deposition time, and thus can form a vapor deposition layer having a required thickness.

  However, when the second roller is inclined with respect to the first roller and the sheet is wound around the first roller and the second roller while being spirally wound, the sheet is wound. There is a case where the traveling position of the sheet being shifted is shifted in the axial direction of the first roller. If the running position of the sheet is shifted in this way, for example, in the above-described organic EL device manufacturing apparatus, it is difficult to form a vapor deposition layer having a desired thickness on the base material. Become.

  Therefore, a sheet in which the second roller has a shaft member parallel to the rotation axis of the first roller and a plurality of roller bodies that are arranged on the shaft member and rotate at an angle with respect to the first roller. An apparatus for manufacturing an organic EL element provided with a transport device has been proposed. In such a manufacturing apparatus, since the length of the sheet is constant between the first roller and the second roller, the shift of the traveling position of the sheet is suppressed more than in Patent Document 1 (see Patent Document 2).

JP 2013-139621 A JP 2014-139099 A

  However, even when a sheet conveying apparatus such as that disclosed in Patent Document 2 is used, the traveling position of the wound sheet may be shifted in the axial direction of the first roller. As described above, in the conventional sheet conveying apparatus, it is difficult to say that the shift of the sheet traveling position is sufficiently suppressed.

  In view of the above circumstances, it is an object of the present invention to provide a sheet conveying apparatus and a conveying method that can convey a sheet in a spiral manner while sufficiently suppressing the traveling position of the sheet from deviating from a desired position. .

The sheet conveying apparatus according to the present invention includes:
A first roller and a second roller unit around which the sheet is wound;
The sheet fed from the first roller is wound around the second roller portion and again wound around the first roller, and the sheet is spirally wound by repeating the sequential operation. Sent to you,
A first imaginary line connecting the center of the downstream edge of the contact portion of the sheet with respect to the first roller and the center of the upstream edge of the contact portion of the sheet with respect to the second roller portion, To be positioned substantially perpendicular to the downstream edge and the upstream edge,
and,
A second imaginary line connecting the center of the upstream edge of the contact portion of the sheet with respect to the first roller and the center of the downstream edge of the contact portion of the sheet with respect to the second roller portion, To be positioned substantially perpendicular to the upstream edge and the downstream edge, respectively.
The second roller portion is configured to be inclined with respect to the first roller.

Here, “the first imaginary line is substantially perpendicular to the downstream edge and the upstream edge, respectively” means that the first imaginary line is the downstream edge and the upstream edge. Respectively, and the first imaginary line is within 0 ± 4.5 ° with respect to the direction perpendicular to the downstream edge and the upstream edge.
Further, “the second imaginary line is substantially perpendicular to the upstream end edge and the downstream end edge” means that the second imaginary line extends between the upstream end edge and the downstream end edge. It means that each of them is completely vertical and the second imaginary line is within 0 ± 4.5 ° with respect to the direction perpendicular to the downstream edge and the upstream edge.

Here, in order to convey the sheet in a spiral shape, it is necessary to send the sheet travel path to the downstream side while inclining with respect to the direction (axial direction) in which the rotation shaft of the first roller extends.
Further, as the force acting on the seat in order to incline the traveling path of the seat with respect to the axial direction, the force in the direction of twisting the seat with respect to the surface direction of the seat (see FIG. 6) and the seat in the surface direction of the seat Force in the direction of bending (see FIG. 7).
However, when a force in the direction of twisting the sheet acts on the sheet, the traveling position of the sheet is not easily displaced in the axial direction by this force, whereas when a force in the direction of bending the sheet acts on the sheet, The traveling position is easily displaced in the axial direction.
However, according to the above configuration, the first imaginary line is substantially formed on the downstream edge of the sheet contact portion with respect to the first roller and the upstream edge of the sheet contact portion with respect to the second roller portion. The second imaginary line is positioned vertically and the upstream edge of the contact portion of the sheet with respect to the first roller and the downstream edge of the contact portion of the sheet with respect to the second roller portion Since the second roller portion is inclined with respect to the first roller so as to be positioned substantially perpendicularly, the sheet of the sheet is between the first roller and each of the second roller portions. The sheet is spirally conveyed by changing the travel path of the sheet by applying a force in the direction of twisting the sheet with respect to the surface direction of the sheet with little force in the direction of bending the sheet in the surface direction. be able to.
Accordingly, it is possible to convey the sheet in a spiral manner while sufficiently suppressing the deviation of the traveling position of the sheet from the desired position.

The sheet conveying method according to the present invention includes:
Using the sheet conveying apparatus, the sheet is conveyed while being spirally wound around the first roller and the second roller portion.

  According to this configuration, by using the sheet conveying apparatus, it is possible to convey the sheet in a spiral manner while sufficiently suppressing the traveling position of the sheet from deviating from a desired position.

  ADVANTAGE OF THE INVENTION According to this invention, the conveyance apparatus and conveyance method of a sheet | seat which can convey a sheet | seat spirally, fully suppressing that the driving | running | working position of a sheet | seat shifts | deviates to a width direction from a desired position are provided.

1 is a schematic front view of an organic EL element manufacturing apparatus provided with a sheet conveying apparatus according to an embodiment of the present invention. Schematic side view of a vapor deposition roll unit provided in the sheet conveying apparatus of the present embodiment FIG. 2 is a schematic view of the vapor deposition roll unit provided in the sheet conveying apparatus of FIG. 2 as viewed from the left side of FIG. FIG. 2 is a schematic view of the vapor deposition roll unit provided in the sheet conveying apparatus of FIG. 2 as viewed from the right side of FIG. FIG. 2 is a schematic view of the vapor deposition roll unit provided in the sheet conveying apparatus of FIG. 2 as viewed from the upper side of FIG. FIGS. 6A and 6B are diagrams schematically illustrating a state in which a force in a twisting direction of the sheet acts on the sheet, in which FIG. 6A is a schematic side view, FIG. 6B is a schematic front view, and FIG. Top view It is a figure which shows typically the state in which the force of the direction which bends a sheet | seat acts on a sheet | seat, Comprising: Fig.7 (a) is a schematic side view, FIG.7 (b) is a schematic front view, FIG.7 (c) is schematic. Top view Schematic cross section of organic EL device The schematic side view of the roll part for vapor deposition with which the conveyance apparatus of the sheet | seat of other embodiment of this invention was equipped. Schematic side view of a vapor deposition roll unit provided in a conventional sheet conveying apparatus

  Hereinafter, for a sheet conveying apparatus according to an embodiment of the present invention, the sheet conveying apparatus (hereinafter simply referred to as “conveying apparatus”) is also referred to as an organic EL element manufacturing apparatus (hereinafter simply referred to as “manufacturing apparatus”). ) Will be described with reference to FIGS. 1 to 5.

As shown in FIG. 1, the manufacturing apparatus 1 according to the present embodiment includes a plurality of (three in the illustrated example) vacuum chambers 3 having a vacuum inside, and a base material 32 as a strip-shaped sheet inside the vacuum chamber 3. In order to pass the substrate 32 along the horizontal direction (hereinafter, also referred to as “traveling direction”) X, the substrate 32 conveying device 2 and the substrate 32 in order to deposit the vaporized material on the substrate 32 And a plurality of vapor deposition sources 13 for discharging the vaporized material toward 32.
The transport device 2 for the base material 32 includes a first roller 9 on which the base material 32 is wound a plurality of times, and a plurality of second roller portions 11. The first roller 9 and the second roller unit 11 constitute a vapor deposition roll unit 4 in which a base material 32 is spirally wound to perform vapor deposition together with the vapor deposition source 13.

  The vacuum chamber 3 is continuously provided along the traveling direction X. Further, a vacuum generator (not shown) such as a vacuum pump is connected to each vacuum chamber 3 so that the inside of each vacuum chamber 3 becomes a vacuum.

  The transport device 2 includes a feed roll 5 that feeds the base material 32, a take-up roll 6 that winds the base material 32, and a vapor deposition roll unit 4. The delivery roll 5 is disposed outside the vacuum chamber 3 and upstream.

  Each vapor deposition source 13 is disposed inside the vacuum chamber 3 and is disposed so as to face the base material 32 in the vertical direction (vertical direction). Specifically, each vapor deposition source 13 is disposed below the vapor deposition roll unit 4. Each vapor deposition source 13 discharges the vaporized material evaporated by heating toward the base material 32. Specifically, each vapor deposition source 13 discharges the vaporized material in the upward direction.

The vapor deposition roll unit 4 is disposed in each vacuum chamber 3.
As shown in FIGS. 2 to 5, the vapor deposition roll unit 4 includes a first roller 9 and a plurality of second roller units 11 around which the base material 32 is wound.

  In the vapor deposition roll unit 4, the base material 32 sent from the first roller 9 is laid over the second roller unit 11 once and sent again to the first roller 9, and the repetition is repeated sequentially. Thus, the base material 32 is spirally wound and sent.

  The first roller 9 is formed in a cylindrical shape. More specifically, the first roller 9 has a constant circular cross-sectional diameter from one end to the other end. The peripheral surface of the first roller 9 is formed substantially parallel to the rotation axis R1.

Each second roller portion 11 has a pair of receiving roller 11 a that receives the base material 32 sent from the first roller 9 and a feeding roller 11 b that sends the base material 32 to the first roller 9. Yes.
Each receiving roller 11a and each feeding roller 11b are formed in a cylindrical shape. More specifically, each receiving roller 11 a and each feeding roller 11 b have a constant circular cross-sectional diameter from one end to the other end, and the circular cross-sectional diameter is the circular shape of the first roller 9. It is formed smaller than the diameter of the cross section.
Each pair of the receiving roller 11a and the feeding roller 11b is arranged such that the rotation shafts R2a and R2b are substantially parallel to each other.
Here, “substantially parallel” means completely parallel and means that one side is within 0 ± 0.14 ° with respect to one side. As described above, the rotation axis R2a of the receiving roller 11a and the rotation axis R2b of the feed roller 11b may be within 0 ± 0.14 ° with respect to one, but preferably 0 ± 0. .04 ° or less.

Further, as shown in FIG. 5, each of the pair of receiving rollers 11a and feeding rollers 11b includes a center S5a of a downstream edge (third downstream edge) S5 of a contact portion of the base material 32 with the receiving roller 11a. The third imaginary line L3 connecting the upstream side edge (third upstream side edge) S6 of the contact portion of the base material 32 with the feed roller 11b and the center S6a is the downstream side edge S5 and the upstream side. They are respectively arranged so as to be substantially perpendicular to the edge S6.
Here, “the third virtual line L3 is substantially perpendicular to the downstream edge S5 and the upstream edge S6, respectively” means that the third virtual line L3 is the downstream edge S5 and the upstream side. It is completely perpendicular to the edge S6 and the third virtual line L3 is within 0 ± 0.14 ° with respect to the direction perpendicular to the downstream edge S5 and the upstream edge S6. means. As described above, the third imaginary line L3 may be within 0 ± 0.14 ° with respect to the direction perpendicular to the downstream edge S5 and the upstream edge S6, but preferably 0 ± 0. Within 028 °.

Further, as shown in FIGS. 3 and 4, the center S1a of the downstream side edge (first downstream side edge) S1 of the contact portion of the base material 32 with the first roller 9 and the base material with respect to the receiving roller 11a A first imaginary line L1 connecting the upstream edge (first upstream edge) S2 of the contact portion 32 and the center S2a of the contact portion 32 is approximately in the downstream edge S1 and the upstream edge S2, respectively. The center S3a of the downstream edge S3 of the contact portion of the base material 32 with respect to the feed roller 11b and the center of the upstream edge S4 of the contact portion of the base material 32 with respect to the first roller 9 so as to be positioned vertically A pair of receiving rollers with respect to the first roller 9 so that the second imaginary line L2 connecting S4a is positioned substantially perpendicular to the downstream edge S3 and the upstream edge S4, respectively. 11a and the feed roller 11b are each inclined and arranged.
That is, the first virtual line L1 is positioned substantially perpendicular to the downstream edge S1 and the upstream edge S2, and the second virtual line L2 is the downstream edge S3 and the upstream edge S4. All the receiving rollers 11 a and the feeding rollers 11 b are inclined with respect to the first roller 9 so as to be positioned substantially perpendicular to each other.

The first imaginary line L1 may be within 0 ± 4.5 ° with respect to the direction perpendicular to the downstream edge S1 and the upstream edge S2, but is preferably within 0 ± 0.14 °. More preferably, it is within 0 ± 0.04 °.
The second imaginary line L2 may be within 0 ± 4.5 ° with respect to the direction perpendicular to the downstream edge S3 and the upstream edge S4, but preferably 0 ± 0.14. Is within 0 °, and more preferably within 0 ± 0.04 °.

  The first imaginary line L1 is positioned perpendicular to the downstream edge S1 and the upstream edge S2, respectively, and the second imaginary line L2 is connected to the downstream edge S3 and the upstream edge. In a state where each pair of receiving roller 11a and feeding roller 11b is inclined with respect to the first roller 9 so as to be perpendicular to the edge S4, the first virtual line L1 and the first imaginary line L1 The two virtual lines L2 are all located on a virtual plane P perpendicular to the rotation axis R1 of the first roller 9.

  Moreover, it is preferable that the base material 32 does not overlap on the 1st roller 9, and when this point is considered, the angle (theta) which each receiving roller 11a and each feeding roller 11b makes with respect to the 1st roller 9 is. , Arctan θ> (width of base material 32 / diameter of first roller 9) is preferable.

Here, in order to convey the base material 32 in a spiral shape, the traveling path of the base material 32 is inclined downstream with respect to the direction (axial direction) in which the rotation axis R1 of the first roller 9 extends. Need to be sent to.
Moreover, as a force which acts on the base material 32 in order to incline the driving | running route of the base material 32 with respect to the said axial direction, the base material 32 is twisted with respect to the surface direction of the base material 32 as shown in FIG. The force in the direction and the force in the direction of bending the base material 32 in the surface direction of the base material 32 as shown in FIG.

  However, when the force in the direction of twisting the base material 32 acts on the base material 32, the traveling position of the base material 32 is not easily shifted in the width direction by this force, whereas the force in the direction of bending the base material 32 is applied to the base material. When acting, this force makes it easier for the travel position of the base material 32 to shift in the width direction.

In this regard, in the conventional vapor deposition roll 60 as shown in FIG. 10, both the force in the direction of twisting the base material 32 and the force in the direction of bending the base material 32 act.
In FIG. 10, the base material 32 is wound around the second roller unit 50 a plurality of times. When such a second roller unit 50 is used, for example, the first imaginary line L1 is connected to the downstream edge S1 and the second edge of the first roller 9 only in two places out of a plurality of times. The second imaginary line L2 is positioned between the downstream edge S3 and the first roller 9 in the second roller section 50, and is positioned substantially perpendicular to the upstream edge S2 of the second roller section 50. Is located substantially perpendicular to the upstream edge S4. In these places, a twisting force acts and a bending force hardly acts.
However, in the remaining portion, the first imaginary line L1 is positioned substantially perpendicular to the downstream edge S1 of the first roller 9 and the upstream edge S2 of the second roller portion 50. Further, the second imaginary line L2 is not positioned substantially perpendicular to the downstream end edge S3 of the second roller portion 50 and the upstream end edge S4 of the first roller 9. At these locations, in addition to the twisting force, the bending force also acts on the substrate 32. Therefore, in the vapor deposition roll unit 60 shown in FIG. 10, the positional deviation of the base material 32 cannot be sufficiently suppressed.

On the other hand, in the vapor deposition roll unit 4 of the present embodiment, all the first imaginary lines L1 are connected to the downstream edge S1 at the first roller 9 and the upstream edge S2 at the receiving roller 11a. All the second imaginary lines L2 are positioned substantially perpendicularly to the downstream edge S3 of the feed roller portion 11b and the upstream edge S4 of the first roller 9 are positioned substantially vertically. Yes.
As a result, a force in the direction of bending the base material 32 in the surface direction of the base material 32 between the first roller 9 and each receiving roller 11a and between each feed roller 11b and the first roller 9 is applied. A force in the direction of twisting the base material 32 is applied to the surface direction of the base material 32 with almost no action, thereby changing the travel path of the base material 32 and conveying the base material 32 in a spiral shape. Is possible.
Therefore, according to the vapor deposition roll unit 4, the base material 32 can be transported spirally while sufficiently suppressing the travel position of the base material 32 from shifting from the desired position in the width direction.

  As shown in FIG. 8, the organic EL element 31 manufactured by the organic EL element manufacturing apparatus 1 of the present embodiment is formed by vaporizing a vaporized material from the evaporation source 13 on one surface of the base material 32. An anode layer 33, an organic layer 34 formed by vaporizing a vaporized material from above the anode layer 33, and a cathode layer 35 formed by vaporizing a vaporized material from above the organic layer 34.

  The anode layer 33 is made of, for example, a transparent conductive material such as indium-zinc oxide (IZO) or indium-tin oxide (ITO), or a metal such as gold, silver, or aluminum.

  The organic layer 34 includes a hole transport layer 38 disposed on the anode layer 33, an organic EL layer 39 disposed on the hole transport layer 38, and an electron transport disposed on the organic EL layer 39. Layer 40. The organic layer 34 is disposed between the anode layer 33 and the cathode layer 35 so as to prevent the anode layer 33 and the cathode layer 35 from contacting each other.

The hole transport layer 38 includes, for example, copper phthalocyanine (CuPc), 4,4′-bis [N-4- (N, N-di-m-tolylamino) phenyl] -N-phenylamino] biphenyl (DNTPD), and the like. It is formed with. The organic EL layer 39 is formed of, for example, 4,4′-N, N′-dicarbazonylbiphenyl doped with tris (8-hydroxyquinoline) aluminum (Alq3) or iridium complex (Ir (ppy) 3). CBP) or the like. Furthermore, the electron transport layer 40 is made of, for example, lithium fluoride (LiF), cesium fluoride (CsF), lithium oxide (Li ₂ O), or the like.

  The cathode layer 35 is formed of, for example, an alloy of aluminum, silver, magnesium silver, an alloy containing an alkali metal, an alkaline earth metal, or the like.

  The base material 32 includes a conductive layer 36 having conductivity and an insulating layer 37 having insulation properties. And the conductive layer 36 is comprised with the metal board | substrate, for example, is formed with metals, such as stainless steel, copper, and nickel. Moreover, the insulating layer 37 is arrange | positioned so that the whole surface of the one side of the conductive layer 36 may be covered, for example, is formed with photocurable resins, such as a polyimide resin, a polyester resin, an epoxy resin, and thin glass.

  Next, a method for manufacturing the organic EL element 31 using the transport device 2 of the present embodiment will be described.

  In order to manufacture the organic EL element 31, the substrate 32 is caused to travel from the feed roll 5 toward the take-up roll 6 via the vapor deposition roll section 4 by the transport device 2. As shown in FIG. 1, the base material 32 is conveyed in the order of the inside of the upstream vacuum chamber 3 in the traveling direction X, the inside of the central vacuum chamber 3, and the inside of the downstream vacuum chamber 3. The base material 32 is spirally wound around the vapor deposition roll unit 4 disposed in each vacuum chamber 3. That is, the base material 32 is laid over the second roller portion 11 that is paired with the first roller 9 of the vapor deposition roll portion 4 in sequence.

  In the vacuum chamber 3 on the upstream side, the anode layer 33 is formed on the base material 32 by the vapor deposition source 13 and the vapor deposition roll unit 4 arranged inside. Thereafter, the portion of the base material 32 where the anode layer 33 is formed moves to the central vacuum chamber 3. The organic layer 34 is formed on the portion of the base material 32 where the anode layer 33 is formed so that the organic layer 34 overlaps the anode layer 33 by the vapor deposition source 13 and the vapor deposition roll unit 4 in the vacuum chamber 3. Next, the portion of the substrate 32 where the organic layer 34 is formed moves to the vacuum chamber 3 on the downstream side. In the portion of the base material 32 where the organic layer 34 is formed, the cathode layer 36 is formed so as to overlap the organic layer 34 by the vapor deposition source 13 and the vapor deposition roll unit 4 in the vacuum chamber 3. Specifically, in each vacuum chamber 3, the vaporized material is vapor-deposited on the base material 32 by the vapor deposition source 13 when it is sent by the vapor deposition roll unit 4 and passes between the cylindrical roll 9 and the vapor deposition source 13. The

  Thus, the organic EL element 31 is formed on the base material 32 by performing the vapor deposition process by the vapor deposition source 13 and the vapor deposition roll unit 4 while transporting the base material 32 by the transport device 2.

  As described above, the conveyance device 2 of the sheet 32 according to the present embodiment includes the first roller 9 around which the sheet 32 is wound, and a plurality of pairs of receiving rollers 11a and feeding rollers 11b. The fed sheet 32 is wound around the pair of receiving rollers 11a and the feeding roller 11b and is again wound around the first roller 9, and the sheet 32 is wound in a spiral shape by repeating the sequential operation. The first imaginary line L1 is positioned substantially perpendicular to the downstream edge S1 of the first roller 9 and the upstream edge S2 of the receiving roller 11a, and With respect to the first roller 9, the second imaginary line L <b> 2 is positioned substantially perpendicular to the downstream edge S <b> 3 at the feed roller 11 b and the upstream edge S <b> 4 at the first roller 9. A pair of receiving rollers 11a and a feeding row 11b is configured to be disposed in all inclined.

Here, in order to convey the sheet 32 in a spiral shape, it is necessary to send the traveling path of the sheet 32 to the downstream side while being inclined with respect to the axial direction of the first roller 9.
Further, as a force acting on the sheet 32 in order to incline the traveling path of the sheet 32 with respect to the axial direction of the first roller 9, a force in a direction twisting the sheet 32 with respect to the surface direction of the sheet 32, and a sheet Force in the direction of bending the sheet 32 in the surface direction of 32.
However, when a force in the direction in which the sheet 32 is twisted acts on the sheet 32 (see FIG. 6), the traveling position of the sheet 32 is not easily displaced in the axial direction of the first roller 9 by this force. When a bending force acts on the sheet 32 (see FIG. 7), the traveling position of the sheet 32 is easily shifted in the axial direction of the first roller 9 by this force.
However, according to the transport device 2 of the present embodiment, the first imaginary line L1 is positioned substantially perpendicular to the downstream edge S1 of the first roller 9 and the upstream edge S2 of the receiving roller 11a. And the first imaginary line L2 is positioned substantially perpendicular to the downstream edge S3 of the feed roller 11b and the upstream edge S4 of the first roller 9. A pair of receiving rollers 11 a and feeding rollers 11 b are all inclined with respect to the roller 9.
As a result, almost all of the force in the direction of bending the sheet 32 in the surface direction of the sheet 32 acts between the first roller 9 and each receiving roller 11a and between each feed roller 11b and the first roller 9. Instead, the sheet 32 is spirally formed by applying a force in the direction of twisting the sheet 32 to the surface direction of the sheet 32 to incline the traveling path of the sheet 32 with respect to the axial direction of the first roller 9. Can be transported.
Therefore, it is possible to convey the sheet 32 in a spiral shape while sufficiently suppressing the traveling position of the sheet 32 from being shifted from a desired position.

The sheet 32 conveying method of the present embodiment uses the sheet 32 conveying apparatus 2 of the present embodiment, and conveys the sheet 32 while spirally winding the sheet 32 around the first roller 9 and the second roller unit 11. To do.
In this way, by using the sheet conveying apparatus 2, the sheet 32 can be conveyed spirally while sufficiently suppressing the traveling position of the sheet 32 from shifting from the desired position in the width direction.

  Moreover, the manufacturing apparatus 1 of the organic EL element 31 according to the present embodiment includes the transport device 2 for the base material 32 as a sheet, and transports the base material 32 while spirally winding the base material 32, while depositing the deposited layer on the base material 32. 33, 34, 35 can be formed. Thereby, the vapor deposition layers 33, 34, and 35 are formed on the base material 32 while the base material 32 is transported in a spiral shape while sufficiently suppressing the traveling position of the base material 32 from shifting from the desired position in the axial direction. can do.

  Moreover, the manufacturing method of the organic EL element 31 of this embodiment forms the vapor deposition layers 33, 34, and 35 on the base material 32 while transporting the base material 32 while spirally winding it using the sheet transport device 2 described above. To do. Thereby, the vapor deposition layer 33 on the base material 32 while sufficiently transporting the base material 32 while sufficiently suppressing the traveling position of the base material 32 to be the base material 32 from being shifted in the axial direction from the desired position. 34, 35 can be formed.

  The sheet conveying apparatus 2 and the conveying method of the sheet 32 of the present embodiment are as described above, but the sheet conveying apparatus and the conveying method of the present invention are not limited to the above-described embodiments, and Of course, various changes can be made without departing from the scope of the invention.

  For example, in the above-described embodiment, each second roller portion 11 has a pair of receiving roller 11a and feeding roller 11b. However, in the present invention, as shown in FIG. A mode in which the portion 11 has one second roller 11 may be adopted.

  Moreover, although the conveyance apparatus 2 of the sheet | seat 32 shows the aspect provided with the some 2nd roller part 11 in the said embodiment, you may employ | adopt the aspect which has the one 2nd roller part 11 in this invention. . Specifically, for example, even if the conveyance device 2 of the sheet 32 adopts an aspect in which a pair of receiving rollers 11a and a feeding roller 11b is adopted, an aspect in which one second roller 11 (see FIG. 9) is provided. It may be adopted.

  Further, for example, in the above-described embodiment, an example in which the transport device 2 for the sheet 32 is applied to the aspect of transporting the base material 32 provided in the manufacturing apparatus 1 for the organic EL element 31 has been described. 2 is not particularly limited to application to the above uses, and can be appropriately applied to other uses.

  1: Manufacturing apparatus, 2: Sheet conveying apparatus, 3: Vacuum chamber, 4: Deposition roll section, 5: Delivery roll, 6: Take-up roll, 9: First roller, 11: Second roller section, 11a: receiving roller, 11b: feed roller, L1: first virtual line, L2: second virtual line, L3: third virtual line

Claims (2)

A first roller and a second roller unit around which the sheet is wound;
The sheet fed from the first roller is wound around the second roller portion and again wound around the first roller, and the sheet is spirally wound by repeating the sequential operation. Sent to you,
A first imaginary line connecting the center of the downstream edge of the contact portion of the sheet with respect to the first roller and the center of the upstream edge of the contact portion of the sheet with respect to the second roller portion, To be positioned substantially perpendicular to the downstream edge and the upstream edge,
and,
A second imaginary line connecting the center of the upstream edge of the contact portion of the sheet with respect to the first roller and the center of the downstream edge of the contact portion of the sheet with respect to the second roller portion, So as to be substantially perpendicular to the upstream edge and the downstream edge,
A sheet conveying apparatus configured such that the second roller portion is inclined with respect to the first roller.   A sheet conveying method using the sheet conveying apparatus according to claim 1, wherein the sheet is conveyed while being spirally wound around the first roller and the second roller portion.

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