JP2017082256A - Thin film deposition system and thin film deposition method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a thin film deposition system excellent in thin film deposition efficiency, and hardly displacing a beltlike substrate in a width direction, and to provide a thin film deposition method.SOLUTION: A thin film deposition system 1 for depositing a thin film on the surface of a beltlike substrate 2 in the middle of transportation of the beltlike substrate 2 so as to draw a spiral transportation locus, has a first spiral transportation part 7A for transporting the beltlike substrate 2 spirally in a clockwise direction or a counterclockwise direction, and a second spiral transportation part 7B for transporting it spirally in a direction reverse to the first spiral transportation part 7A in succession to the first spiral transportation part 7A.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a thin film forming apparatus and method for forming a thin film on a belt-like substrate.

A roll-to-roll method is known as a method of forming various thin films on the surface of a belt-like substrate. The roll-to-roll method refers to a method in which a belt-shaped substrate is pulled out from a roll and transported, a thin film is formed on the surface of the belt-shaped substrate in the middle of transport, and then the belt-shaped substrate is wound around a roll again.
For example, Patent Document 1 discloses that a gas barrier organic thin film is formed on the surface of a strip substrate by a roll-to-roll method.
Patent Document 2 discloses that a conductive film of a solar battery cell is formed on the surface of the band-shaped substrate while the band-shaped substrate is being conveyed so as to draw a spiral conveyance locus. The method of Patent Document 2 is excellent in thin film formation efficiency as compared to the method of Patent Document 1 because the belt-like substrate is spirally conveyed.

Further, [0029] of Patent Document 2 discloses that a plurality of film formation processing units including a chamber and a roll that conveys a belt-like substrate in a spiral manner and a material supply unit are arranged in a straight line.
In Patent Document 2, for example, after a first thin film is formed while a belt-shaped substrate is conveyed in a clockwise direction in a first film formation processing unit, the belt-shaped substrate is moved to the right in a second film formation processing unit. A plurality of thin films can be stacked on the surface of the belt-shaped substrate by forming the second thin film while being conveyed in a spiral in the rotating direction and repeating this in sequence.
However, in such a method, the belt-like substrate is easily displaced in the width direction, and improvement thereof is required.

JP 2007-230115 A JP 2013-139621 A

  An object of the present invention is to provide a thin film forming apparatus and a thin film forming method that are excellent in thin film formation efficiency and in which a strip-shaped substrate is not easily displaced in the width direction.

  The thin film forming apparatus of the present invention is a thin film forming apparatus for forming a thin film on the surface of the belt-like substrate in the middle of carrying the belt-like substrate so as to draw a spiral conveyance locus. A first spiral transport section that transports in a spiral shape in one direction, and a second spiral transport section that transports the first spiral transport section in a spiral direction opposite to the first spiral transport section, following the first spiral transport section. Have.

A preferable thin film forming apparatus of the present invention includes a plurality of the first spiral transport units and the second spiral transport units, and the first spiral transport units and the second spiral transport units are alternately arranged.
In a preferred thin film forming apparatus of the present invention, the first spiral transport unit transports the strip substrate in a first direction, and the second spiral transport unit transports the strip substrate in a direction opposite to the first direction. The first spiral transport unit and the second spiral transport unit are arranged side by side so as to transport.

According to another aspect of the present invention, a method for forming a thin film is provided.
The thin film forming method of the present invention includes a first film forming step of forming a thin film on the surface of the belt-like substrate while carrying the belt-like substrate so as to draw a spiral conveyance locus in either the clockwise direction or the counterclockwise direction. ,
A second film forming step of further forming a thin film on the surface of the thin film while transporting the belt-like substrate on which the thin film is formed so as to draw a spiral transport locus in a direction opposite to the first film forming step; Have

  By using the thin film forming apparatus and the thin film forming method of the present invention, the shift of the belt-like substrate is suppressed, so that the target thin film can be efficiently formed at a predetermined position of the belt-like substrate.

The schematic right view of the thin film forming apparatus of 1st Embodiment. The schematic plan view of the thin film forming apparatus. The top view of the thin film formation apparatus seen from the arrow III direction of FIG. The left view of the thin film formation apparatus seen from the arrow IV direction of FIG. The front view of the thin film formation apparatus seen from the arrow V direction of FIG. The top view of the 1st spiral conveyance part in the thin film forming apparatus of the 1st example of 2nd Embodiment. The front view of the 1st spiral conveyance part in the thin film forming apparatus of the 2nd example of 2nd Embodiment.

The present invention will be described below with reference to the drawings. However, it should be noted that dimensions such as size and length in each drawing are different from actual ones.
Further, in the present specification, there are cases where “first” and “second” are added to the beginning of the term, but this first etc. is added only for distinguishing the terms, and the order thereof. And has no special meaning such as superiority or inferiority. “Strip shape” means a substantially rectangular shape whose length in one direction is sufficiently longer than the length in a direction orthogonal to one direction. The strip shape is, for example, a substantially rectangular shape whose length in one direction is 10 times or more of the length in a direction perpendicular thereto, preferably 30 times or more, and more preferably 100 times or more. The “longitudinal direction” is one direction of the band (a direction parallel to the long side of the band), and the “short direction” is a direction orthogonal to the longitudinal direction (a direction parallel to the short side of the band). . The notation “PPP to QQQ” means “PPP or more and QQQ or less”.

[First Embodiment]
The thin film forming apparatus of the present invention forms a thin film on the surface of the belt-like substrate in the middle of carrying the belt-like substrate so as to draw a spiral conveyance locus. The thin film forming apparatus of the present invention includes a first spiral transport unit that transports the belt-like substrate in a spiral shape in either a clockwise direction or a counterclockwise direction, and the first spiral transport unit following the first spiral transport unit. And a second spiral transport unit that transports in a spiral shape opposite to the unit, and forms a thin film in the first spiral transport unit and the second spiral transport unit.

<Strip substrate>
The strip substrate has flexibility. The flexible strip substrate is a flexible sheet that can be wound around a roll.
Examples of the strip substrate include a resin film, a metal sheet, and a glass sheet. The strip substrate may be either transparent or opaque. In addition, when using a metal sheet as a strip | belt-shaped board | substrate, an insulating layer is provided in the surface of the metal sheet as needed.

Examples of the resin film include polyester resin films such as polyethylene terephthalate, polyethylene naphthalate, and polybutylene terephthalate; α such as polyethylene, polypropylene, polymethylpentene, ethylene-propylene copolymer, and ethylene-vinyl acetate copolymer. -Olefin resin film containing olefin as monomer component; polyvinyl chloride resin film; vinyl acetate resin film; polycarbonate resin film; polyphenylene sulfide resin film; polyamide (nylon), wholly aromatic polyamide (aramid), etc. Examples include amide resin films; polyimide resin films; polyetheretherketone resin films; As the resin film, it is preferable to use a film having high heat resistance, particularly a film having a high glass transition temperature and hardly causing heat shrinkage in consideration of the influence of radiant heat from a film forming source or the like. When a film having a low glass transition temperature or easily shrinks by heat is used, there is a risk that the band-shaped substrate may be distorted when a thin film is formed. From such a point, it is preferable to use a film having high heat resistance as the resin film. For example, a resin film in which the respective shrinkage rates in the lateral direction (TD) and the longitudinal direction (MD) are both 0.5% or less is preferable. Examples of such a heat-resistant resin film include resin films made of cycloolefin polymer, polyethylene naphthalate, polyethylene sulfide, polyphenyl sulfide, polycarbonate, polyimide, polyamide, and the like.
Examples of the metal of the metal sheet include stainless steel, iron, aluminum, nickel, cobalt, copper, and alloys thereof, and stainless steel is preferably used.
The thickness of the strip substrate is not particularly limited, and is usually 20 μm to 200 μm, and preferably 50 μm to 150 μm from the viewpoint of handling.
The width of the strip substrate is not particularly limited, but is preferably 100 mm or less, for example.

  The strip-shaped substrate may be subjected to surface modification treatment such as corona discharge treatment, plasma discharge treatment, or ion etching (RIE) treatment on the surface (surface on which a thin film is formed). Alternatively, an inorganic layer or a polymer layer that can be a smooth layer and an adhesive layer may be formed on the surface of the belt-like substrate.

<Thin film forming equipment>
The thin film forming apparatus of the present invention forms a thin film on the surface of a strip substrate by a roll-to-roll method.
The thin film forming apparatus includes a first spiral transport unit that transports the belt-like substrate in a spiral shape in either the clockwise direction or the counterclockwise direction, and the first spiral transport unit, which is opposite to the first spiral transport unit. And at least a second spiral transport unit that transports in a spiral direction.
1 and 2 are schematic views showing an outline of a thin film forming apparatus. The X direction, the Y direction, and the Z direction are directions orthogonal to each other. In the example of illustration, although the up-down direction of an apparatus is represented as the Z direction, it is not limited to this, For example, the X direction or Y direction may be the up-down direction of an apparatus. Moreover, the thin arrow of each figure shows the advancing direction of a strip | belt-shaped substrate.
1 and 2, the belt-like substrate 2 wound around the roll 91 is pulled out, the belt-like substrate 2 is introduced into the thin film forming apparatus 1 and a thin film is formed on the surface of the belt-like substrate 2, and then the belt-like substrate 2 with the thin film formed thereon. Is wound around the roll 92 again.

The thin film forming apparatus 1 is provided in each of the plurality of spiral transport units 7A, 7B, 7C, and 7D that transport the belt-like substrate so as to draw a spiral transport locus, and each of the spiral transport units 7A, 7B, 7C, and 7D. A film forming source.
Two or more spiral conveying units may be provided, and may be three or four or more. Preferably, an even number of spiral conveying units are provided. In the illustrated example, four spiral transport units 7A, 7B, 7C, and 7D (first spiral transport unit 7A, second spiral transport unit 7B, third spiral transport unit 7C, and fourth spiral transport unit 7D) are provided. .
In the illustrated example, between the roll 91 and the roll 92, the first spiral transport unit 7A, the second spiral transport unit 7B, the third spiral transport unit 7C, and the fourth spiral transport unit 7D are arranged in this order. Accordingly, the strip-shaped substrate drawn out from the roll 91 is wound around the roll 92 again after a thin film is formed in order by the first to fourth spiral transport units 7A, 7B, 7C, and 7D. In addition, between 1st thru | or 4th spiral conveyance part 7A, 7B, 7C, 7D, a strip | belt-shaped board | substrate is not wound up by a roll, but a thin film is continuously formed on the surface of the strip | belt-shaped board | substrate 2. FIG.
The 1st thru | or 4th spiral conveyance part 7A, 7B, 7C, 7D is arrange | positioned side by side, for example. In the illustrated example, the first to fourth spiral transport units 7A, 7B, 7C, and 7D are arranged in a straight line in the Y direction.

The first spiral transfer unit 7A and the third spiral transfer unit 7C have the same spiral direction of the belt-like substrate 2 to be transferred. The second spiral transport unit 7B and the fourth spiral transport unit 7D have the same spiral direction of the belt-like substrate 2 to be transported. The first spiral transport unit 7A and the second spiral transport unit 7B have opposite spiral directions of the belt-like substrate 2 to be transported.
Specifically, the first spiral transport unit 7A and the third spiral transport unit 7C transport the belt-like substrate 2 while drawing a spiral transport trajectory clockwise (clockwise) when viewed from the X1 side to the X2 side. To do. In this case, the belt-like substrate 2 is transported from the X1 side to the X2 side (first direction 11). That is, the first spiral transport unit 7A and the third spiral transport unit 7C transport the belt-like substrate 2 in the first direction 11 while drawing a clockwise spiral trajectory. When viewed from the X2 side to the X1 side, the second spiral transport unit 7B and the fourth spiral transport unit 7D transport the belt-shaped substrate 2 while drawing a counterclockwise spiral transport locus. In this case, the belt-like substrate 2 is transported from the X2 side to the X1 side (second direction 12). That is, the 2nd spiral conveyance part 7B and the 4th spiral conveyance part 7D convey the strip | belt-shaped board | substrate 2 to the 2nd direction 12, drawing the spiral locus | trajectory of a counterclockwise direction. The second direction 12 is a direction opposite to the first direction 11.

The first to fourth spiral transfer units 7A, 7B, 7C, and 7D each independently include a transfer device including a can roll, a chamber that covers the outside of the transfer device and has a thin film formation area and a non-formation area. A film source.
As shown in FIGS. 1 and 2, each of the first to fourth spiral conveying units 7A, 7B, 7C, and 7D is desired in one direction (Y direction) with the rotation axis of the can roll being substantially parallel to each other. They are arranged side by side at intervals. By arranging in this way, the entire thin film forming apparatus 1 does not have a distorted shape, and a linear thin film forming apparatus 1 can be configured, and the thin film forming apparatus 1 can be installed in a relatively small space.
3 and 4 show the internal structures of the first and second spiral transfer sections, and FIG. 5 shows the internal structure of the first spiral transfer section.
Since the third spiral transport unit 7C is the same as the first spiral transport unit 7A, and the fourth spiral transport unit 7D is the same as the second spiral transport unit 7B, the detailed description thereof is omitted.

(First spiral transport section)
As shown in FIGS. 3 to 5, the first spiral transfer unit 7A includes a transfer device 3A including a can roll 31A, a chamber 4A that covers the outside of the transfer device 3A and has a thin film formation area and a non-formation area. A film source 6A. 3 A of said conveying apparatuses send the strip | belt-shaped board | substrate 2 so that a clockwise spiral conveyance locus | trajectory may be drawn, and guide the strip | belt-shaped board | substrate 2 to a thin film formation area and a non-formation area alternately.
The basic configuration of the transfer device 3A includes a can roll 31A that can be rotated so as to feed the belt-like substrate 2 in the longitudinal direction, and a pair of left and right auxiliary rolls 321A and 322A. One auxiliary roll is called a first auxiliary roll, and the other auxiliary roll is called a second auxiliary roll.

The can roll 31A is arranged in the chamber 4A so that a part thereof is included in the thin film formation area and the remaining part is included in the non-formation area. The first and second auxiliary rolls 321A and 322A are arranged in the chamber 4A so that all of them are included in the non-formation area.
The can roll 31A is provided with temperature control means (not shown). The temperature control means maintains the belt-like substrate 2 at a desired temperature through the peripheral surface of the can roll 31A. Examples of the temperature control means include a heat medium circulating device that circulates silicone oil and the like.

The can roll 31A is formed in a columnar shape as a whole. The can roll 31A is rotatably supported by the rotation shaft 31S. The rotation shaft 31S of the can roll 31A extends in the X direction.
The first auxiliary roll 321A and the second auxiliary roll 322A have a columnar shape having a smaller diameter than the can roll 31A, and a plurality of sets are arranged with the first auxiliary roll 321A and the second auxiliary roll 322A as one set on the left and right. In the illustrated example, eight first auxiliary rolls 321A and eight second auxiliary rolls 322A are provided. Accordingly, eight sets of first auxiliary roll 321A and second auxiliary roll 322A are provided.
Each first auxiliary roll 321A is a roll that sends the belt-like substrate 2 sent from the can roll 31A to the second auxiliary roll 322A. Each second auxiliary roll 322A can scan the belt-like substrate 2 sent from the first auxiliary roll 321A. It is a roll sent to the roll 31A. Each of the first auxiliary roll 321A and the second auxiliary roll 322A is pivotally supported by independent rotating shafts 321S and 322S. The rotation shafts 321S of the plurality of first auxiliary rolls 321A are substantially parallel, and the rotation shafts 322S of the plurality of second auxiliary rolls 322A are also arranged substantially parallel. Further, the rotation shaft 321S of the first auxiliary roll 321A and the rotation shaft 322S of the second auxiliary roll 322A are also arranged substantially in parallel. Here, in this specification, “substantially parallel” means being completely parallel or within a range of 0 ° ± 0.14 °.
The rotation shaft 321S of the first auxiliary roll 321A and the rotation shaft 322S of the second auxiliary roll 322A are included in a plane including the X direction and the Y direction, respectively, and are inclined with respect to the X direction. The inclination angles of the rotation shaft 321S of the first auxiliary roll 321A and the rotation shaft 322S of the second auxiliary roll 322A with respect to the X direction are not particularly limited as long as they are acute angles, and in the illustrated example, for example, in the range of 1 to 15 degrees. Is set in. By adjusting the tilt angle, the interval between the belt-like substrates 2 when the belt-like substrate 2 is transported in a spiral shape can be appropriately set.

The first auxiliary roll 321A and the second auxiliary roll 322A are separated from the can roll 31A and arranged on the Z1 side with reference to the can roll 31A. The first auxiliary roll 321A is arranged on the Y2 side, and the second auxiliary roll 322A is arranged on the Y1 side. That is, the first auxiliary roll 321A and the second auxiliary roll 322A face each other in the Y direction and make a pair, and are arranged on the Z1 side with the can roll 31A as a reference.
An imaginary line connecting the center in the width direction of the outermost portion of the peripheral surface of the first auxiliary roll 321A and the outermost portion of the peripheral surface of the can roll 31A is substantially parallel to the Z direction. An imaginary line connecting the center in the width direction of the outermost portion of the peripheral surface of the second auxiliary roll 322A and the outermost portion of the peripheral surface of the can roll 31A is substantially parallel to the Z direction. The first auxiliary roll 321A and the second auxiliary roll 322A are arranged so that the virtual lines are substantially parallel to the Z direction.

  The belt-like substrate 2 guided into the chamber 4A is transported while being hung on the Z2 side half of the peripheral surface of the can roll 31A, and is a 1/4 portion on the Z1 side of the peripheral surface of the first auxiliary roll 321A. Furthermore, after the second auxiliary roll 322A is hung on the opposite 1/4 side of the Z1 side and conveyed, it is again hung on the can roll 31A, and this is repeated. In the example of illustration, the strip | belt-shaped board | substrate 2 is wound 9 times around the can roll 31A seeing from the downward side. The belt-like substrate 2 is conveyed from the X1 side to the X2 side while alternately contacting the can roll 31A, the first auxiliary roll 321A, and the second auxiliary roll 322A to draw a spiral conveyance locus. Specifically, the belt-like substrate 2 introduced into the chamber 4A is fed from the Y1 side to the Y2 side while drawing an arc on the peripheral surface of the can roll 31A from the X1 side end of the can roll 31A. The outermost part of 31A is separated from the can roll 31A and is sent to the Z1 side. The outermost part of the first auxiliary roll 321A is in contact with the first auxiliary roll 321A and draws a circular arc on the peripheral surface of the roll 321A. To the second auxiliary roll 322A, sent to the Z2 side while drawing an arc on the peripheral surface of the roll 322A, after leaving the second auxiliary roll 322A at the outermost part of the second auxiliary roll 322A, Again, it touches the outermost part on the opposite side of the can roll 31A and is sent from the Y1 side to the Y2 side while drawing an arc on the peripheral surface of the can roll 31A. This is repeated. . Accordingly, when viewed from the X1 side to the X2 side, the first spiral transport unit transports the belt-like substrate 2 while drawing a clockwise spiral trajectory. In this case, the transport direction of the belt-like substrate 2 is from the X1 side to the X2 side (first direction 11).

  In the present embodiment in which the auxiliary rolls 321A and 322A are inclined, the belt-like substrate 2A is fed in the circumferential direction of the can roll 31A on the can roll 31A. Specifically, the belt-like substrate 2A is transported in contact with the can roll 31A so that the center in the width direction of the belt-like substrate 2A moves in an arc in a plane perpendicular to the rotation axis direction of the can roll 31A. Between the can roll 31A and the first auxiliary roll 321A and between the can roll 31A and the second auxiliary roll 322A, the belt-like substrate 2 is linear in the plane perpendicular to the rotation axis direction of the can roll 31A (Z It is conveyed so as to move in the direction).

The chamber 4A is formed in a size that can cover the outside of the can roll 31A and the auxiliary rolls 321A and 322A. Inside the chamber 4A, a partition wall 47A for partitioning the thin film formation area and the non-formation area is provided.
In the chamber 4A, the Z1 side is a non-formation area and the Z2 side is a thin film formation area based on the partition wall 47A. The non-formed area refers to a space where no thin film is formed, and the thin film formed area refers to a space where a thin film is formed.

A film forming source 6A is provided inside the chamber 4A. In the illustrated example, there is one film forming source 6A, but two or more film forming sources including different materials or the same material may be provided in the chamber 4A.
The film forming source 6A is appropriately set according to the thin film to be formed. Examples of the film forming source 6A include a vacuum evaporation method, a sputtering target, and an ion plating material.
Hereinafter, the vacuum deposition method will be described as an example.
A vacuum pump and a reaction gas supply device (not shown) are connected to the chamber 4A. The vacuum pump draws out the air in the chamber 4A and adjusts it to a desired degree of vacuum in the chamber. The reactive gas supply device encloses the reactive gas in the chamber 4A. The reaction gas can be appropriately set according to the type of the film forming source 6A, and examples thereof include an oxygen-containing gas, a nitrogen-containing gas, a hydrocarbon-containing gas, or a mixed gas thereof. Examples of the oxygen-containing gas include oxygen (O ₂ ), dinitrogen monoxide (N ₂ O), and nitrogen monoxide (NO). Examples of the nitrogen-containing gas include nitrogen (N ₂ ) and ammonia (NH ₃ ), nitric oxide (NO), and the like. Examples of the hydrocarbon-containing gas include methane (CH ₄ ), ethane (C ₂ H ₆ ), propane (C ₃ H ₈ ), butane (C ₄ H _10). ), Ethylene (C ₂ H ₄ ), acetylene (C ₂ H ₂ ), and the like.

Although not particularly illustrated, a plasma source, a discharge gas supply device, and the like may be independently provided in the chamber 4A as necessary.
The plasma source generates a plasma in an individual chamber. The plasma is not particularly limited, and for example, arc discharge plasma, glow discharge plasma, or the like can be used. Unlike glow discharge plasma or the like, it is preferable to use arc discharge plasma because it has a very high electron density. By using the arc discharge plasma, the reactivity of the material can be increased, and a very dense thin film can be formed on the belt-like substrate 2. As the plasma source, for example, a pressure gradient plasma gun, a direct current discharge plasma generator, a high frequency discharge plasma generator, or the like can be used. Among these, it is preferable to use a pressure gradient type plasma gun as a plasma source because high-density plasma can be stably generated during film formation.
The discharge gas supply device supplies a discharge gas having an appropriate pressure into the chamber 4A. As the discharge gas, typically, an inert gas such as argon gas can be used.

When forming a thin film by a vacuum evaporation method, an evaporation source is used as the film formation source 6A. As a means for evaporating the material of the film forming source 6A, the plasma can be used, but resistance heating, an electron beam, or the like may be used.
As the film formation source 6A, metal; semimetal; metal or semimetal oxide, nitride, carbide, oxynitride, oxycarbide, nitride carbide, or oxynitride carbide; material used for the organic layer of the organic EL element And so on.
Examples of the metal include alkali metals, alkaline earth metals, and other metals. Examples of metals other than alkali metals and alkaline earth metals include titanium, aluminum, zinc, gallium, and indium. The metalloid refers to a substance that exhibits an intermediate property between metal and nonmetal. Examples of the metalloid include silicon, germanium, arsenic, antimony, tellurium, polonium, and astatine. As a material used for the organic layer of the organic EL element, for example, N, N′-bis (naphthalen-1-yl) -N, N′-bis (phenyl) -2,2′-dimethylbenzidine (abbreviation: spiro compounds such as α-NPD), N, N′-bis (naphthalen-1-yl) -N, N′-bis (phenyl) -9,9′-spirobisfluorene (abbreviation: Spiro-NPB); Organometallic complexes such as (8-quinolinolato) aluminum (Alq ₃ ); carbazole derivatives such as 1,3,5-tris (carbazol-9-yl) benzene (abbreviation: TCP); tris (2-phenylpyridina) G) Organic iridium complexes such as iridium (III) (Ir (ppy) ₃ ); 1,3-bis [5- (p-tert-butylphenyl) -1,3,4-oxadiazol-2-yl] Be Zen (abbreviation: OXD-7) heteroaromatic compounds, such as poly (2,5-pyridine - diyl) (abbreviation: PPy) polymer compounds, such as and the like.

  For example, when silicon is used as the film forming source 6A and nitrogen gas is used as the reaction gas, a silicon nitride film is formed on the surface of the band-shaped substrate 2 while the band-shaped substrate 2 passes through the first spiral transfer unit. It is formed. When silicon is used as the film forming source 6A and carbon hydrogen gas is used as the reaction gas, a silicon carbide film is formed on the surface of the band-shaped substrate 2 while the band-shaped substrate 2 passes through the first spiral transfer unit. Is done.

(Second spiral transport section)
As shown in FIGS. 3 and 4, the second spiral transfer unit 7 </ b> B includes a transfer device 3 </ b> B including a can roll 31 </ b> B, a chamber 4 </ b> B that covers the outside of the transfer device and has a thin film formation area and a non-formation area, And a source 6B. The transfer device 3B sends the band-shaped substrate 2 so as to draw a counterclockwise spiral transfer locus, and guides the band-shaped substrate 2 alternately to the thin film formation area and the non-formation area.
The basic configuration of the transport device 3B includes a can roll 31B that can be rotated so as to feed the belt-like substrate 2 in its longitudinal direction, and first and second auxiliary rolls 321B and 322B.
In the second spiral conveyance unit 7B, the can roll 31B and the first and second auxiliary rolls 321B and 322B are contrasted with the can roll 31A and the first and second auxiliary rolls 321A and 322A of the first spiral conveyance unit 7A. Is the same as the first spiral transport unit 7A except for the points provided in the above. Hereinafter, in describing the details of the second spiral conveyance unit 7B, mainly the configuration different from the first spiral conveyance unit 7A will be mainly described, and the description of the same configuration will be omitted.

The can roll 31B is provided with a temperature control means (not shown) similarly to the first spiral conveyance unit 7A.
The can roll 31B is formed in a cylindrical shape as a whole, and the rotation shaft 31S extends in the X direction.
Each first auxiliary roll 321B is a roll that sends the belt-like substrate 2 sent from the can roll 31B to the second auxiliary roll 322B. Each second auxiliary roll 322B can scan the belt-like substrate 2 sent from the first auxiliary roll 321B. It is a roll sent to the roll 31B. The rotation shafts 321S of the plurality of first auxiliary rolls 321B are substantially parallel, and the rotation shafts 322S of the plurality of second auxiliary rolls 322B are also arranged substantially parallel. Further, the rotation shaft 321S of the first auxiliary roll 321B and the rotation shaft 322S of the second auxiliary roll 322B are also arranged substantially in parallel.
The rotation shaft 321S of the first auxiliary roll 321B and the rotation shaft 322S of the second auxiliary roll 322B are included in a plane including the X direction and the Y direction, respectively, and are inclined with respect to the X direction. Further, the rotation shaft 321S of the first auxiliary roll 321B and the rotation shaft 322S of the second auxiliary roll 322B are viewed from the plan view of FIG. The second auxiliary roll 322A is inclined in the direction opposite to the rotation shaft 322S.

  After passing through the first spiral transport section 7A, the belt-like substrate 2 guided into the chamber 4B is transported while being hung on the Z2 side half of the peripheral surface of the can roll 31B, and hung on the first auxiliary roll 321B. Further, after being carried on the second auxiliary roll 322B, it is again hung on the can roll 31B, and this is repeated. In the illustrated example, the belt-like substrate 2 is wound around the can roll 31B nine times. The belt-like substrate 2 is conveyed from the X2 side to the X1 side while alternately contacting the can roll 31B, the first auxiliary roll 321B, and the second auxiliary roll 322B to draw a spiral conveyance locus. Specifically, the belt-like substrate 2 guided into the chamber 4B is fed from the Y1 side to the Y2 side while drawing an arc on the peripheral surface of the can roll 31B from the X2 side end of the can roll 31B. At the outermost part of 31B, it is sent to the Z1 side away from the can roll 31B, is in contact with the first auxiliary roll 321B, and is sent to the Y1 side while drawing an arc on the peripheral surface of the roll 321B to the second auxiliary roll 322B. The roller 322B is sent to the Z2 side while drawing an arc on the peripheral surface of the roll 322B, and again comes into contact with the outermost part on the opposite side of the can roll 31B, and from the Y1 side while drawing an arc on the peripheral surface of the can roll 31B To the side and repeat this. Accordingly, when viewed from the X2 side to the X1 side, the second spiral transport unit 7B transports the belt-like substrate 2 while drawing a counterclockwise spiral transport locus. In this case, the transport direction of the strip-shaped substrate 2 is from the X2 side to the X1 side (second direction 12).

A passage 99 through which the belt-like substrate 2 passes is provided between the first spiral transport unit 7A and the second spiral transport unit 7B. The passage 99 is provided between the chamber 4A and the chamber 4B so that the chamber 4A and the chamber 4B can be kept airtight. If necessary, the passage 99 may be provided with a pressure adjusting unit. For example, the pressure adjusting unit can adjust the pressure in the chamber by differential pressure exhaust.
Note that similar passages 99 are also provided between the second spiral transport unit 7B and the third spiral transport unit 7C and between the third spiral transport unit 7C and the fourth spiral transport unit 7D, respectively.

A partition wall 47B is provided inside the chamber 4B of the second spiral transfer unit 7B. The chamber 4B is provided with a film forming source 6B. Further, a vacuum pump and a reaction gas supply device (not shown) are connected to the chamber 4B, and a plasma source, a discharge gas supply device, and the like are provided as necessary.
The chamber 4B, the partition wall 47B, the film forming source 6B, the vacuum pump, the reactive gas supply device, the plasma source, and the discharge gas supply device are as described in the first spiral transfer unit 7A. In addition, each film-forming source with which the 1st thru | or 4th spiral conveyance part 7A, 7B, 7C, 7D is equipped may be the same, and may differ. Similarly, each member such as a discharge gas supply device provided in the first to fourth spiral transfer units 7A, 7B, 7C, and 7D may be the same as or different from each other. By providing the first to fourth spiral transfer units 7A, 7B, 7C, and 7D with the same member, the same type of thin film can be formed in each transfer unit, and by providing different members in each transfer unit, Different types of thin films can be formed in the transport section. That is, the kind of the thin film formed in each conveyance part is not specifically limited, Various thin films can be formed by designing each conveyance part suitably.

<Method for forming thin film>
By using the thin film forming apparatus 1, a desired thin film can be formed on the surface of the strip substrate 2.
First, film forming sources 6A and 6B corresponding to the thin film to be formed are arranged in the respective chambers 4A and 4B. If necessary, the reaction gas supply device is filled with a reaction gas corresponding to the thin film to be formed. Each vacuum pump is operated, and the inside of each chamber 4A, 4B is set to a degree of vacuum corresponding to the film forming source and the film forming method.
The temperature control means is operated to raise the temperature of the peripheral surfaces of the can rolls 31A and 31B to a desired temperature. For example, the peripheral surfaces of the can rolls 31 </ b> A and 31 </ b> B are heated so that the belt-like substrate 2 becomes 20 ° C. to 200 ° C.
The transport devices 3A and 3B are operated to transport the belt-like substrate 2 clockwise in the first spiral transport unit 7A, and then transport the belt-like substrate 2 in the counterclockwise spiral in the second spiral transport unit 7B. Further, the strip-shaped substrate 2 is transported clockwise in the third spiral transport section 7C, and the strip-shaped substrate 2 is transported counterclockwise in the fourth spiral transport section 7D. In the first to fourth spiral transfer sections 7A, 7B, 7C, and 7D, the belt-like substrate 2 passes through the thin film formation area and the non-formation area alternately.
The conveyance speed of the strip | belt-shaped board | substrate 2 can be suitably set in consideration of the film-forming rate, the thickness of the thin film for formation, etc., for example, is 0.1-20 m / min. Generally, when the transport speed is increased, a thin film having a relatively small thickness is formed, and when the transport speed is decreased, a thin film having a relatively large thickness is formed.

As shown in FIGS. 3 and 4, the first spiral transfer unit 7 </ b> A transfers the belt-like substrate 2 so as to draw a clockwise spiral transfer trajectory, and the belt-like substrate 2 alternates between thin film formation areas and non-formation areas. To pass through. While the strip substrate 2 passes through the thin film formation area, a thin film forming material corresponding to the film formation source 6A is deposited on the surface of the strip substrate 2 to form a first thin film (first film formation step). .
The belt-like substrate 2 on which the first thin film is formed is introduced into the first spiral transfer unit 7B through the passage 99. The 2nd spiral conveyance part 7B conveys the strip | belt-shaped board | substrate 2 so that a counterclockwise spiral conveyance locus | trajectory may be drawn, and lets the strip | belt-shaped board | substrate 2 pass alternately through a thin film formation area and a non-formation area. While the strip-shaped substrate 2 passes through the thin film forming area, a thin film forming material corresponding to the film forming source 6B is deposited on the surface of the first thin film, thereby forming a second thin film (second film forming). Process).
Thereafter, similarly, the strip-shaped substrate 2 is guided to the third spiral transport unit 7C through the passage 99, the third thin film is formed on the surface of the second thin film, and further guided to the fourth spiral transport unit 7D. A fourth thin film is formed on the surface of the third thin film.
In this way, on the surface of the belt-like substrate 2, four thin films comprising the first thin film / second thin film / third thin film / fourth thin film are laminated.
Although the film-forming rate of the said thin film can be set suitably, it is 10-300 nm / min, for example.
The thickness of each thin film can be set as appropriate. For example, it is independently 5 nm to 800 nm, preferably 10 nm to 500 nm.

The thin film forming apparatus 1 of the present invention can be used for various applications.
For example, the thin film forming apparatus 1 can be used for manufacturing a transparent gas barrier film, an organic EL device, a solar battery, a thin film battery, and the like. Preferably, it can be used for manufacture of an organic EL device. The organic EL device can be used as, for example, a lighting device or a display device.

Since the thin film forming apparatus 1 of the present invention forms a thin film while the belt-shaped substrate 2 is spirally conveyed, the apparatus does not become long and is excellent in thin film forming efficiency.
Furthermore, the thin film forming apparatus 1 of the present invention transports the belt-like substrate 2 clockwise in the first spiral transport unit 7A, and then, in the second spiral transport unit 7B, rotates the belt-like substrate 2 in the counterclockwise spiral. Therefore, the belt-like substrate 2 is hardly displaced in the width direction. For example, when the belt-like substrate is transported in a spiral shape, the belt-like substrate gradually shifts in the width direction (transport direction). In particular, as the number of times of winding on the can roll increases, the deviation of the belt-like substrate is added, and the belt-like substrate is largely displaced in the width direction at the rear end portion of the can roll. In this regard, as in the present invention, after the belt-shaped substrate 2 is transported in either the clockwise or counterclockwise direction in the first spiral transport section 7A, the second spiral transport section 7B is spirally striped in the opposite direction. When the substrate 2 is conveyed, the deviation of the belt-like substrate 2 can be corrected. That is, the belt-like substrate 2 is slightly shifted to one side in the width direction in the first spiral transfer unit 7A (in the illustrated example, the belt-like substrate 2 is slightly shifted to the X2 side in the first spiral transfer unit 7A), but the second Since the belt-like substrate 2 is slightly shifted to the opposite side in the width direction in the spiral conveyance unit 7B (in the illustrated example, the belt-like substrate 2 is slightly shifted to the X1 side in the second spiral conveyance unit 7B), the deviation of the belt-like substrate 2 is corrected. The
As described above, according to the thin film forming apparatus 1 and the thin film forming method of the present invention, since the shift of the belt-like substrate is suppressed, the target thin film can be formed at a predetermined position on the belt-like substrate 2.

  The thin film forming apparatus of the present invention is not limited to the first embodiment, and can be appropriately modified within the range intended by the present invention. Hereinafter, other embodiments of the present invention will be described. In the description, configurations and effects different from those of the first embodiment will be mainly described, and configurations similar to those of the first embodiment will be described. In some cases, the term or reference is used as it is, and the description of the configuration is omitted.

[Second Embodiment]
In the first embodiment, the transport device 3A of the first spiral transport unit 7A includes a pair of left and right auxiliary rolls. For example, as illustrated in FIG. 6, the transport device 3A includes one auxiliary roll 323A and a can roll. It may be composed of 31A.
Moreover, as shown in FIG. 7, you may use 3 A of conveying apparatuses which do not have an auxiliary roll. According to the transport apparatus 3A shown in FIG. 7, the belt-like substrate 2 is wound around the can roll 31A only in a spiral manner and transported. In addition, although not particularly illustrated, a Nelson roll disclosed in Japanese Patent Laid-Open No. 2013-139621 may be used as the transport device of the present invention.
Similarly, the transport devices of the second spiral transport unit 7B, the third spiral transport unit 7C, and the fourth spiral transport unit 7D can be changed.
In the thin film forming apparatus 1 of the present invention, on the condition that the belt-like substrate 2 can be transported so as to draw a spiral transport locus, the specific configuration of the transport apparatus of each spiral transport unit is not particularly limited, and various structures are possible. Can be adopted.

[Other Embodiments]
In the first embodiment, the belt-like substrate 2 conveyed spirally is wound around the can roll nine times. However, on the condition that the belt-like substrate 2 is wound around the can roll twice or more, The number is not particularly limited.

DESCRIPTION OF SYMBOLS 1 Thin film formation apparatus 2 Strip | belt-shaped board | substrate 3 Conveyance apparatus 31A, 31B Can roll 321A, 322A, 321B, 322B Auxiliary roll 4A, 4B Chamber 6A, 6B Deposition source 7A 1st spiral conveyance part 7B 2nd spiral conveyance part 7C 3rd spiral Conveying part 7D 4th spiral conveying part

Claims (4)

In the thin film forming apparatus for forming a thin film on the surface of the belt-shaped substrate in the middle of transporting the belt-shaped substrate so as to draw a spiral transport locus,
A first spiral transport unit that transports the belt-like substrate spirally in either a clockwise direction or a counterclockwise direction, and a spiral shape that is opposite to the first spiral transport unit following the first spiral transport unit. A thin film forming apparatus.   2. The thin film forming apparatus according to claim 1, wherein the thin film forming apparatus includes a plurality of the first spiral transport units and the second spiral transport units, and the first spiral transport units and the second spiral transport units are alternately arranged.   The first spiral transport unit transports the strip-shaped substrate in a first direction, and the second spiral transport unit transports the strip-shaped substrate in a direction opposite to the first direction. The thin film forming apparatus according to claim 1, wherein the transport unit and the second spiral transport unit are arranged side by side. A first film forming step of forming a thin film on the surface of the band-shaped substrate while conveying the band-shaped substrate so as to draw a spiral conveyance locus in either the clockwise direction or the counterclockwise direction;
A second film forming step of further forming a thin film on the surface of the thin film while transporting the belt-like substrate on which the thin film is formed so as to draw a spiral transport locus in a direction opposite to the first film forming step;
A method for forming a thin film.

Images