JP2016524018A - 誘電体としてのメタセシスポリマー - Google Patents
誘電体としてのメタセシスポリマー Download PDFInfo
- Publication number
- JP2016524018A JP2016524018A JP2016522424A JP2016522424A JP2016524018A JP 2016524018 A JP2016524018 A JP 2016524018A JP 2016522424 A JP2016522424 A JP 2016522424A JP 2016522424 A JP2016522424 A JP 2016522424A JP 2016524018 A JP2016524018 A JP 2016524018A
- Authority
- JP
- Japan
- Prior art keywords
- polymer
- alkyl
- oxacycloolefin
- electronic device
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 229920000642 polymer Polymers 0.000 title claims abstract description 90
- 239000003989 dielectric material Substances 0.000 title claims abstract description 15
- 238000005649 metathesis reaction Methods 0.000 title abstract description 4
- 230000005669 field effect Effects 0.000 claims abstract description 22
- 239000003990 capacitor Substances 0.000 claims abstract description 16
- 239000004065 semiconductor Substances 0.000 claims description 33
- 239000000758 substrate Substances 0.000 claims description 25
- 229910052739 hydrogen Inorganic materials 0.000 claims description 18
- 229920001577 copolymer Polymers 0.000 claims description 16
- 239000001257 hydrogen Substances 0.000 claims description 16
- 239000002904 solvent Substances 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 13
- 229910052736 halogen Inorganic materials 0.000 claims description 12
- 150000002367 halogens Chemical class 0.000 claims description 12
- 150000002431 hydrogen Chemical class 0.000 claims description 10
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 10
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 claims description 8
- 125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 claims description 8
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 6
- 125000001072 heteroaryl group Chemical group 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 229910052760 oxygen Inorganic materials 0.000 claims description 6
- 238000007152 ring opening metathesis polymerisation reaction Methods 0.000 claims description 6
- 125000001424 substituent group Chemical group 0.000 claims description 6
- RBRGWYHSVYKUQT-UHFFFAOYSA-N 5-oxabicyclo[2.2.1]hept-2-ene Chemical compound C1C2COC1C=C2 RBRGWYHSVYKUQT-UHFFFAOYSA-N 0.000 claims description 5
- 125000000217 alkyl group Chemical group 0.000 claims description 5
- 125000004432 carbon atom Chemical group C* 0.000 claims description 5
- 238000005227 gel permeation chromatography Methods 0.000 claims description 5
- 125000004430 oxygen atom Chemical group O* 0.000 claims description 5
- 125000003118 aryl group Chemical group 0.000 claims description 4
- 125000002619 bicyclic group Chemical group 0.000 claims description 4
- 230000009477 glass transition Effects 0.000 claims description 4
- 229920006395 saturated elastomer Polymers 0.000 claims description 4
- 125000000753 cycloalkyl group Chemical group 0.000 claims description 3
- 238000000113 differential scanning calorimetry Methods 0.000 claims description 3
- 125000006656 (C2-C4) alkenyl group Chemical group 0.000 claims description 2
- 125000005336 allyloxy group Chemical group 0.000 claims description 2
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 claims description 2
- 125000002837 carbocyclic group Chemical group 0.000 claims description 2
- 150000001721 carbon Chemical class 0.000 claims description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 2
- 239000006185 dispersion Substances 0.000 claims description 2
- 238000001035 drying Methods 0.000 claims description 2
- 239000007772 electrode material Substances 0.000 claims description 2
- 125000000592 heterocycloalkyl group Chemical group 0.000 claims 1
- 239000003054 catalyst Substances 0.000 abstract description 7
- 238000006116 polymerization reaction Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 22
- FYNROBRQIVCIQF-UHFFFAOYSA-N pyrrolo[3,2-b]pyrrole-5,6-dione Chemical group C1=CN=C2C(=O)C(=O)N=C21 FYNROBRQIVCIQF-UHFFFAOYSA-N 0.000 description 21
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 18
- 239000000203 mixture Substances 0.000 description 14
- 239000003960 organic solvent Substances 0.000 description 12
- 238000009835 boiling Methods 0.000 description 11
- -1 bicyclic olefins Chemical class 0.000 description 9
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 8
- 239000002253 acid Substances 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 8
- 239000002244 precipitate Substances 0.000 description 8
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 8
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- WFDIJRYMOXRFFG-UHFFFAOYSA-N Acetic anhydride Chemical compound CC(=O)OC(C)=O WFDIJRYMOXRFFG-UHFFFAOYSA-N 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- YTPLMLYBLZKORZ-UHFFFAOYSA-N Thiophene Chemical compound C=1C=CSC=1 YTPLMLYBLZKORZ-UHFFFAOYSA-N 0.000 description 6
- 0 CC(*CN)(C1)C1C(*)C1CCC1 Chemical compound CC(*CN)(C1)C1C(*)C1CCC1 0.000 description 5
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 4
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- BGTOWKSIORTVQH-UHFFFAOYSA-N cyclopentanone Chemical compound O=C1CCCC1 BGTOWKSIORTVQH-UHFFFAOYSA-N 0.000 description 4
- FJKIXWOMBXYWOQ-UHFFFAOYSA-N ethenoxyethane Chemical compound CCOC=C FJKIXWOMBXYWOQ-UHFFFAOYSA-N 0.000 description 4
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 4
- 239000000178 monomer Substances 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229920003023 plastic Polymers 0.000 description 4
- 239000004033 plastic Substances 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- 238000004528 spin coating Methods 0.000 description 4
- 125000004434 sulfur atom Chemical group 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- HZVOZRGWRWCICA-UHFFFAOYSA-N methanediyl Chemical compound [CH2] HZVOZRGWRWCICA-UHFFFAOYSA-N 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000002985 plastic film Substances 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 238000010992 reflux Methods 0.000 description 3
- 238000010129 solution processing Methods 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- 229930192474 thiophene Natural products 0.000 description 3
- QQYNRBAAQFZCLF-FBXFSONDSA-N (3ar,4s,7r,7as)-rel-3a,4,7,7a-tetrahydro-4,7-epoxyisobenzofuran-1,3-dione Chemical compound O1[C@@H]2[C@@H]3C(=O)OC(=O)[C@@H]3[C@H]1C=C2 QQYNRBAAQFZCLF-FBXFSONDSA-N 0.000 description 2
- QQZOPKMRPOGIEB-UHFFFAOYSA-N 2-Oxohexane Chemical compound CCCCC(C)=O QQZOPKMRPOGIEB-UHFFFAOYSA-N 0.000 description 2
- CCTFMNIEFHGTDU-UHFFFAOYSA-N 3-methoxypropyl acetate Chemical compound COCCCOC(C)=O CCTFMNIEFHGTDU-UHFFFAOYSA-N 0.000 description 2
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 2
- FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Chemical compound CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 2
- HYTRYEXINDDXJK-UHFFFAOYSA-N Ethyl isopropyl ketone Chemical compound CCC(=O)C(C)C HYTRYEXINDDXJK-UHFFFAOYSA-N 0.000 description 2
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 2
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- VMHLLURERBWHNL-UHFFFAOYSA-M Sodium acetate Chemical compound [Na+].CC([O-])=O VMHLLURERBWHNL-UHFFFAOYSA-M 0.000 description 2
- QOTQFLOTGBBMEX-UHFFFAOYSA-N alpha-angelica lactone Chemical compound CC1=CCC(=O)O1 QOTQFLOTGBBMEX-UHFFFAOYSA-N 0.000 description 2
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 2
- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229940116333 ethyl lactate Drugs 0.000 description 2
- JBFHTYHTHYHCDJ-UHFFFAOYSA-N gamma-caprolactone Chemical compound CCC1CCC(=O)O1 JBFHTYHTHYHCDJ-UHFFFAOYSA-N 0.000 description 2
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 2
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 2
- HJOVHMDZYOCNQW-UHFFFAOYSA-N isophorone Chemical compound CC1=CC(=O)CC(C)(C)C1 HJOVHMDZYOCNQW-UHFFFAOYSA-N 0.000 description 2
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 2
- 229940043265 methyl isobutyl ketone Drugs 0.000 description 2
- 125000001624 naphthyl group Chemical group 0.000 description 2
- JFNLZVQOOSMTJK-KNVOCYPGSA-N norbornene Chemical compound C1[C@@H]2CC[C@H]1C=C2 JFNLZVQOOSMTJK-KNVOCYPGSA-N 0.000 description 2
- 125000003518 norbornenyl group Chemical group C12(C=CC(CC1)C2)* 0.000 description 2
- LRTFPLFDLJYEKT-UHFFFAOYSA-N para-isopropylaniline Chemical compound CC(C)C1=CC=C(N)C=C1 LRTFPLFDLJYEKT-UHFFFAOYSA-N 0.000 description 2
- KJOLVZJFMDVPGB-UHFFFAOYSA-N perylenediimide Chemical compound C=12C3=CC=C(C(NC4=O)=O)C2=C4C=CC=1C1=CC=C2C(=O)NC(=O)C4=CC=C3C1=C42 KJOLVZJFMDVPGB-UHFFFAOYSA-N 0.000 description 2
- 229920006255 plastic film Polymers 0.000 description 2
- 229920000301 poly(3-hexylthiophene-2,5-diyl) polymer Polymers 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 229910052707 ruthenium Inorganic materials 0.000 description 2
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 2
- 239000001632 sodium acetate Substances 0.000 description 2
- 235000017281 sodium acetate Nutrition 0.000 description 2
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 2
- IFLREYGFSNHWGE-UHFFFAOYSA-N tetracene Chemical compound C1=CC=CC2=CC3=CC4=CC=CC=C4C=C3C=C21 IFLREYGFSNHWGE-UHFFFAOYSA-N 0.000 description 2
- WLPUWLXVBWGYMZ-UHFFFAOYSA-N tricyclohexylphosphine Chemical compound C1CCCCC1P(C1CCCCC1)C1CCCCC1 WLPUWLXVBWGYMZ-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 125000006731 (C1-C8) thioalkoxy group Chemical group 0.000 description 1
- ULPMRIXXHGUZFA-UHFFFAOYSA-N (R)-4-Methyl-3-hexanone Natural products CCC(C)C(=O)CC ULPMRIXXHGUZFA-UHFFFAOYSA-N 0.000 description 1
- ZRPFJAPZDXQHSM-UHFFFAOYSA-L 1,3-bis(2,4,6-trimethylphenyl)-4,5-dihydroimidazole;dichloro-[(2-propan-2-yloxyphenyl)methylidene]ruthenium Chemical compound CC(C)OC1=CC=CC=C1C=[Ru](Cl)(Cl)=C1N(C=2C(=CC(C)=CC=2C)C)CCN1C1=C(C)C=C(C)C=C1C ZRPFJAPZDXQHSM-UHFFFAOYSA-L 0.000 description 1
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
- ZGEGCLOFRBLKSE-UHFFFAOYSA-N 1-Heptene Chemical group CCCCCC=C ZGEGCLOFRBLKSE-UHFFFAOYSA-N 0.000 description 1
- BHKKSKOHRFHHIN-MRVPVSSYSA-N 1-[[2-[(1R)-1-aminoethyl]-4-chlorophenyl]methyl]-2-sulfanylidene-5H-pyrrolo[3,2-d]pyrimidin-4-one Chemical compound N[C@H](C)C1=C(CN2C(NC(C3=C2C=CN3)=O)=S)C=CC(=C1)Cl BHKKSKOHRFHHIN-MRVPVSSYSA-N 0.000 description 1
- LTZPMMPTGSDNLQ-UHFFFAOYSA-N 1-ethynyl-2,3,4-tri(propan-2-yl)pentacene Chemical compound C(#C)C1=C(C(=C(C2=CC3=CC4=CC5=CC=CC=C5C=C4C=C3C=C12)C(C)C)C(C)C)C(C)C LTZPMMPTGSDNLQ-UHFFFAOYSA-N 0.000 description 1
- 125000001637 1-naphthyl group Chemical group [H]C1=C([H])C([H])=C2C(*)=C([H])C([H])=C([H])C2=C1[H] 0.000 description 1
- 125000006176 2-ethylbutyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(C([H])([H])*)C([H])([H])C([H])([H])[H] 0.000 description 1
- VRAYTNFBRROPJU-UHFFFAOYSA-N 2-methoxy-1,3-dioxolane Chemical compound COC1OCCO1 VRAYTNFBRROPJU-UHFFFAOYSA-N 0.000 description 1
- HPJFXFRNEJHDFR-UHFFFAOYSA-N 22291-04-9 Chemical compound C1=CC(C(N(CCN(C)C)C2=O)=O)=C3C2=CC=C2C(=O)N(CCN(C)C)C(=O)C1=C32 HPJFXFRNEJHDFR-UHFFFAOYSA-N 0.000 description 1
- PFCHFHIRKBAQGU-UHFFFAOYSA-N 3-hexanone Chemical compound CCCC(=O)CC PFCHFHIRKBAQGU-UHFFFAOYSA-N 0.000 description 1
- VATRWWPJWVCZTA-UHFFFAOYSA-N 3-oxo-n-[2-(trifluoromethyl)phenyl]butanamide Chemical compound CC(=O)CC(=O)NC1=CC=CC=C1C(F)(F)F VATRWWPJWVCZTA-UHFFFAOYSA-N 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical compound C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 description 1
- FFPJWLNUWRJMEH-UHFFFAOYSA-N CC(C)c(cc1)ccc1N(C(c1c2c3ccc1[o]3)=O)C2=O Chemical compound CC(C)c(cc1)ccc1N(C(c1c2c3ccc1[o]3)=O)C2=O FFPJWLNUWRJMEH-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229920000089 Cyclic olefin copolymer Polymers 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- WLLGXSLBOPFWQV-UHFFFAOYSA-N MGK 264 Chemical compound C1=CC2CC1C1C2C(=O)N(CC(CC)CCCC)C1=O WLLGXSLBOPFWQV-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- XBDYBAVJXHJMNQ-UHFFFAOYSA-N Tetrahydroanthracene Natural products C1=CC=C2C=C(CCCC3)C3=CC2=C1 XBDYBAVJXHJMNQ-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 125000003342 alkenyl group Chemical group 0.000 description 1
- 125000004171 alkoxy aryl group Chemical group 0.000 description 1
- 125000003545 alkoxy group Chemical group 0.000 description 1
- 125000005907 alkyl ester group Chemical group 0.000 description 1
- 125000002947 alkylene group Chemical group 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229920006125 amorphous polymer Polymers 0.000 description 1
- 125000003710 aryl alkyl group Chemical group 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 125000003917 carbamoyl group Chemical group [H]N([H])C(*)=O 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 125000004093 cyano group Chemical group *C#N 0.000 description 1
- 150000001925 cycloalkenes Chemical class 0.000 description 1
- 125000001995 cyclobutyl group Chemical group [H]C1([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 description 1
- 125000004976 cyclobutylene group Chemical group 0.000 description 1
- 125000000582 cycloheptyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 1
- 125000004977 cycloheptylene group Chemical group 0.000 description 1
- 125000004956 cyclohexylene group Chemical group 0.000 description 1
- 125000000640 cyclooctyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C([H])([H])C1([H])[H] 0.000 description 1
- 125000004979 cyclopentylene group Chemical group 0.000 description 1
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- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
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- 229910052814 silicon oxide Inorganic materials 0.000 description 1
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- 229910052708 sodium Inorganic materials 0.000 description 1
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- 238000003786 synthesis reaction Methods 0.000 description 1
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- 125000000383 tetramethylene group Chemical group [H]C([H])([*:1])C([H])([H])C([H])([H])C([H])([H])[*:2] 0.000 description 1
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- 238000007740 vapor deposition Methods 0.000 description 1
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Abstract
Description
nおよびR2〜R5の各々は上記で定義されたとおりであり、且つ
Rは水素、C1〜C25−アルキル、C1〜C25−ハロアルキル、フェニル、フェニル−C1〜C4−アルキル、シクロペンチル、シクロヘキシルであり、ここでフェニル部分またはシクロペンチルまたはシクロヘキシル部分自体は、非置換またはC1〜C4−アルキル、C1〜C4−アルコキシ、OHまたはハロゲンによって置換されている。
且つ、ここで、R、R’およびR’’は独立して、C1〜C25−アルキル、C1〜C25−ハロアルキル、C5〜C10−アリール、C6〜C12−アリールアルキル、C3〜C12−シクロアルキルから選択され、好ましくはC1〜C6−アルキル、フェニル、ベンジル、シクロペンチル、シクロヘキシルから選択され、且つRは水素であってもよく、
ここで、各々のアリールまたはヘテロアリールまたはシクロアルキル自体は非置換であるか、またはC1〜C4−アルキル、C2〜C4−アルケニル、C1〜C4−アルコキシ、OH、CHO、C1〜C4−アルキル−カルボニル、C1〜C4−アルキル−カルボニルオキシ、C1〜C4−アルコキシ−カルボニル、アリルオキシ、ハロゲンによって置換されている。
i) 上述のとおり、適した溶剤中のオキサシクロオレフィンポリマーの溶液または分散液を準備する段階、および
ii) 基板、電極材料および/または半導体上に層を形成し、前記層を乾燥させる段階
を含む前記方法を提供する。
ボトムゲート・ボトムコンタクト(BGBC)型の設計の場合、ゲートは基板の上部且つ誘電体層の下部にあり、半導体層は誘電体層の上部にあり、且つソース/ドレイン電極は半導体層の上部にある。
以下の式のポリマー単位
n’は4〜1000、好ましくは4〜200、より好ましくは5〜100であり、
x’は0.995〜0.005であり、好ましくはx’は0.2〜0.8であり、
y’は0.005〜0.995であり、好ましくはy’は0.8〜0.2であり、且つ、
x’+y’=1であり;
r’は0.985〜0.005であり、
s’は0.005〜0.985であり、
t’は0.005〜0.985であり、
u’は0.005〜0.985であり、且つ、
r’+s’+t’+u’=1である;
Aは以下の式の基である:
a’’は1、2または3であり、
a’’’は0、1、2または3であり、
b’は0、1、2または3であり、
b’’は0、1、2または3であり、
c’は0、1、2または3であり、
c’’は0、1、2または3であり、
d’は0、1、2または3であり、
d’’は0、1、2または3であり、
ただし、a’’’が0である場合、b’’は0ではない;
R40およびR41は、同一または異なり、且つ水素、C1〜C100−アルキル基、−COOR106''; 1つまたはそれより多くのハロゲン、ヒドロキシル、ニトロ、−CNまたはC6〜C18−アリールで置換され且つ/または−O−、−COO−、−OCO−または−S−によって中断されたC1〜C100−アルキル; C7〜C25−アリールアルキル、カルバモイル、1〜3箇所、C1〜C8−アルキルおよび/またはC1〜C8−アルコキシによって置換されていてよいC5〜C12−シクロアルキル、C6〜C24−アリール、特にフェニルまたは1−ナフチルもしくは2−ナフチルであって1〜3箇所、C1〜C8−アルキル、C1〜C25−チオアルコキシ、および/またはC1〜C25−アルコキシで置換されていてよいもの、またはペンタフルオロフェニルからなる群から選択され、ここで、R106''はC1〜C50−アルキル、好ましくはC4〜C25−アルキルである;
Ar1、Ar1'、Ar2、Ar2'、Ar3、Ar3'、Ar4およびAr4'は互いに独立して、複素環式芳香族または芳香環であり、それらは縮合および/または置換されていてよく、好ましくは下記である:
X3およびX4の一方はNであり且つ他方はCR99であり、
ここでR99は水素、ハロゲン、好ましくはFまたはC1〜C25−アルキル、好ましくはC4〜C25−アルキル(任意に1つまたはそれより多くの酸素原子または硫黄原子によって中断されていてよい)、C7〜C25−アリールアルキルまたはC1〜C25−アルコキシであり、
R104、R104'、R123およびR123'は互いに独立して、水素、ハロゲン、好ましくはF、またはC1〜C25−アルキル、好ましくはC4〜C25−アルキル(任意に1つまたはそれより多くの酸素原子または硫黄原子によって中断されていてよい)、C7〜C25−アリールアルキルまたはC1〜C25−アルコキシであり、
R105、R105'、R106およびR106'は互いに独立して、水素、ハロゲン、C1〜C25−アルキル(任意に1つまたはそれより多くの酸素原子または硫黄原子によって中断されていてよい)、C7〜C25−アリールアルキルまたはC1〜C18−アルコキシであり、
R107はC7〜C25−アリールアルキル、C6〜C18−アリール; C1〜C18−アルキル、C1〜C18−ペルフルオロアルキルまたはC1〜C18−アルコキシによって置換されたC6〜C18−アリール、C1〜C18−アルキル; −O−または−S−によって中断されたC1〜C18−アルキル、または−COOR124であり、
ここでR124は、C1〜C25−アルキル、好ましくはC4〜C25−アルキル(1つまたはそれより多くの酸素原子または硫黄原子によって中断されていてよい)、C7〜C25−アリールアルキルであり、
R108およびR109は、互いに独立して、H、C1〜C25−アルキル、E’によって置換されたおよび/またはD’によって中断されたC1〜C25−アルキル、C7〜C25−アリールアルキル、C6〜C24−アリール、Gによって置換されたC6〜C24−アリール、C2〜C20−ヘテロアリール、Gによって置換されたC2〜C20−ヘテロアリール、C2〜C18−アルケニル、C2〜C18−アルキニル、C1〜C18−アルコキシ、E’によって置換されたおよび/またはDによって中断されたC1〜C18−アルコキシ、またはC7〜C25−アラルキルである、または
R108およびR109は、一緒に式=CR110R111の基を形成し、
ここで、R110およびR111は、互いに独立してH、C1〜C18−アルキル、E’によって置換されたおよび/またはD’によって中断されたC1〜C18−アルキル、C6〜C24−アリール、Gによって置換されたC6〜C24−アリール、C2〜C20−ヘテロアリール、Gによって置換されたC2〜C20−ヘテロアリールであるか、または
R108およびR109は、一緒に5または6員環を形成し、それは任意にC1〜C18−アルキル、E’によって置換されたおよび/またはD’によって中断されたC1〜C18−アルキル、C6〜C24−アリール、Gによって置換されたC6〜C24−アリール、C2〜C20−ヘテロアリール、Gによって置換されたC2〜C20−ヘテロアリール、C2〜C18−アルケニル、C2〜C18−アルキニル、C1〜C18−アルコキシ、E’によって置換されたおよび/またはDによって中断されたC1〜C18−アルコキシ、またはC7〜C25−アラルキルによって置換されていてよく、
ここで、
D’は−CO−、−COO−、−S−、−O−または−NR112−であり、
E’はC1〜C8−チオアルコキシ、C1〜C8−アルコキシ、CN、−NR112R113、−CONR112R113またはハロゲンであり、
GはE’またはC1〜C18−アルキルであり、且つ
R112およびR113は互いに独立して、H; C6〜C18−アリール; C1〜C18−アルキルまたはC1〜C18−アルコキシによって置換されたC6〜C18−アリール; C1〜C18−アルキル; または−O−によって中断されたC1〜C18−アルキルであり、且つ、
B、DおよびEは互いに独立して式
ただし、B、DおよびEが式(24)の基である場合、それらはAとは異なり、ここで、
k’は1であり、
I’は0または1であり、
r’は0または1であり、
z’は0または1であり、且つ
Ar5、Ar6、Ar7およびAr8は互いに独立して、以下の式の基
ここで、X5およびX6の一方はNであり、且つ他方はCR140であり、
R140、R140'、R170およびR170'は、互いに独立して、H、C1〜C25−アルキル、好ましくはC6〜C25−アルキルであって任意に1つまたはそれより多くの酸素原子によって中断されていてよいものである。
R40およびR41は、C1〜C36−アルキル、好ましくはC8〜C36−アルキルであり、且つ
n’は4〜1000、好ましくは4〜200、より好ましくは5〜100である。
R40およびR41は、C1〜C36−アルキル、好ましくはC8〜C36−アルキルであり、
R42は、C1〜C18−アルキルであり、
R150は、C4〜C18−アルキル基であり、
x’は0.995〜0.005であり、好ましくはx’は0.4〜0.9であり、
y’は0.005〜0.995であり、好ましくはy’は0.6〜0.1であり、且つ、
x’+y’=1である。
または式(21−1)のコポリマー単位を含む、好ましくは本質的に前記コポリマー単位からなるDPPポリマーが特に好ましい。例えばWO2010/049321号の例1が参照される:
(i) 好ましくは(周囲圧力での)沸点160℃未満、好ましくは150℃未満、より好ましくは120℃未満を有し、従って120℃未満の温度、好ましくは60〜110℃の温度範囲での熱処理によって除去され得ること、
(ii) 好ましくは適した半導体材料、例えばジケトピロロピロール(DPP)チオフェンを溶解せず、従って、当該オキサシクロオレフィンポリマーを、ジケトピロロピロール(DPP)チオフェンを含む半導体層上に施与する際に滑らかな境界の形成が可能であること
である。
Mw 高温ゲル透過クロマトグラフィーによって得られた分子量
NMP N−メチルピロリドン
PDI 多分散性(高温ゲル透過クロマトグラフィーによる)
Tg ガラス転移温度
b.p. (1気圧での) 沸点
リン含有率 24mg/kg
ルテニウム含有率 117mg/kg。
ポリ(エチレンテレフタレート)(PET)フィルム上に金をスパッタして、約40nm厚の膜を形成し、その後、ソース/ドレイン電極(チャネル長: 10μm、チャネル幅: 10mm)をフォトリソグラフィー法によって構造形成する。トルエン中、0.75%(質量/質量)のジケトピロロピロール(DPP)−チオフェンポリマー(WO2010/049321の例1によるポリマー21−1)
例1bにおいて得られたポリマーP1の、メトキシプロピルアセテート中の8%(質量/質量)溶液を0.45μmのフィルターを通じてろ過し、且つ、インジウムスズ酸化物(ITO)電極を備えた清浄なガラス基板上にスピンコーティング(1100rpm、30秒)によって塗布する。その濡れた膜を100℃で20分間、ホットプレート上でプレベークして、490nm厚の層が得られる。次に、金電極(面積=3mm2)を、シャドーマスクを通じてP1層上に<1×10-6Torrで真空堆積する。
比誘電率εrおよび損失係数tg(δ)=εr’’を、LCR計測器Agilent 4284A(信号の振幅1V)を用いて測定された複素容量から導出する。電流/電圧(l/V)曲線は、半導体パラメータアナライザAgilent 4155Cを用いて得られる。降伏電圧は、電流が1μAの値に達する電圧Edである。体積抵抗率ρは、抵抗、試料の厚さおよび電極の表面から計算される。
Mw=128kDa
PDI=3.4
Tg=228℃
Na含有率 14mg/kg
P含有率 24mg/kg
Ru含有率 117mg/kg
Claims (14)
- オキサシクロオレフィンポリマーを含む少なくとも1つの誘電体材料を含有する電子素子。
- 前記オキサシクロオレフィンポリマーが、二環式オキサオレフィンのRuカルベン触媒開環メタセシス重合によって調製されている、請求項1に記載の電子素子。
- Ruカルベン触媒開環メタセシス重合によって調製されたポリマーおよび/またはオキサシクロオレフィンポリマーを含むゲート絶縁層。
- 前記オキサシクロオレフィンポリマーが、本質的にオキサシクロオレフィンポリマーからなる層として存在する、請求項1から3までのいずれか1項に記載の電子素子またはゲート絶縁層。
- 前記ポリマーが、オキサノルボルネンのRuカルベン触媒開環メタセシス重合によって得られ、前記オキサノルボルネンは特に式I
R1〜R6の各々は、水素およびC1〜C4−アルキルから選択され、且つ
R7およびR8は水素または置換基であるか、またはR7とR8とが、それらが結合されている炭素原子と共に、非置換または置換されている5〜12個の炭素原子の飽和または不飽和の炭素環、または環員として4〜11個の炭素原子および1または2個の酸素原子またはNR9基を含む飽和または不飽和の環を形成し、その際、前記R9は水素または置換基であり、前記環は非置換または置換されている]
のオキサノルボルネンである、請求項1から3までのいずれか1項に記載の電子素子またはゲート絶縁層。 - 任意の置換基が、水素、ハロゲン、C1〜C25−アルキル、C2〜C25−アルケニル、C1〜C25−アルキルチオ、C1〜C25−アルコキシ、C2〜C25−アルケニルオキシ、C4〜C10−アリール、C1〜C9−ヘテロアリール、C3〜C12−シクロアルキル、C2〜C11−ヘテロシクロアルキル(前記の各々は非置換またはR’によって置換されている)から選択されるか、または、C2〜C25−アルキル、C3〜C25−アルケニル、C2〜C25−アルキルチオ、C2〜C25−アルコキシ、C3〜C25−アルケニルオキシ(前記はアルキル部分においてO、CO、COO、CONR、CONRCO、S、SO、SO2、NRによって中断されており且つ非置換であるかまたはR’によって置換されている)であるか、または基OR、COR、CH=NR、CH=N−OH、CH=N−OR、COOR、CONHR、CONRR’、CONH−NHR、CONH−NRR’、SO2R、SO3R、SO2NHR、SO2NRR’、SO2NH−NHR、SO2NH−NRR’、S(O)R、S(O)OR、S(O)NHR、S(O)NRR’、S(O)NH−NHR、S(O)NH−NRR’、SiRR’R’’、PORR’、PO(OR)R’、PO(OR)2、PO(NHR)2、PO(NRR’)2、CN、NO2、NHR、NRR’、NH−NHR、NH−NRR’、CONROHから選択され、且つ、飽和炭素に結合している場合、オキソであってもよく、
且つ、ここで、R、R’およびR’’は独立して、C1〜C25−アルキル、C1〜C25−ハロアルキル、C5〜C10−アリール、C6〜C12−アリールアルキル、C3〜C12−シクロアルキルから選択され、好ましくはC1〜C6−アルキル、フェニル、ベンジル、シクロペンチル、シクロヘキシルから選択され、且つRは水素であってもよく、
ここで、各々のアリールまたはヘテロアリールまたはシクロアルキル自体は非置換であるか、またはC1〜C4−アルキル、C2〜C4−アルケニル、C1〜C4−アルコキシ、OH、CHO、C1〜C4−アルキル−カルボニル、C1〜C4−アルキル−カルボニルオキシ、C1〜C4−アルコキシ−カルボニル、アリルオキシ、ハロゲンによって置換されている、
請求項5または6に記載の電子素子またはゲート絶縁層。 - 前記オキサシクロオレフィンポリマーが、示差走査熱量測定によって測定される、90℃を上回るガラス転移温度、および/またはゲル透過クロマトグラフィーによって測定される、5000〜2000000g/mol、好ましくは10000〜1000000g/molの範囲の分子量を有する、請求項1から8までのいずれか1項に記載の電子素子。
- キャパシタ、トランジスタ、例えば有機電界効果トランジスタ、および前記キャパシタおよび/またはトランジスタを含む素子から選択される、請求項1から9までのいずれか1項に記載の電子素子。
- さらに基板を含み、且つ、オキサシクロオレフィンポリマー誘電体と直接接触する機能性材料の少なくとも1つのさらなる層を含む、請求項1から10までのいずれか1項に記載の電子素子。
- 誘電体材料としてのオキサシクロオレフィンポリマーの層が、電極層および/または半導体層、特に有機半導体、例えばジケトピロロピロール類の(コ)ポリマーの層と直接接触している、請求項11に記載の電子素子。
- 基板上に電子素子、例えばキャパシタまたはトランジスタを製造する方法であって、
i) 適した溶剤中のオキサシクロオレフィンポリマーの溶液または分散液を準備する段階、および
ii) 基板、電極材料および/または半導体上に層を形成し、前記層を乾燥させる段階
を含む前記方法。 - 請求項1から9までのいずれか1項において定義されたオキサシクロオレフィンポリマーの、誘電体としての、特に印刷による電子素子、例えばキャパシタまたは有機電界効果トランジスタにおける誘電体層としての使用。
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EP3013885A1 (en) | 2016-05-04 |
JP6095855B2 (ja) | 2017-03-15 |
EP3013885B1 (en) | 2022-08-10 |
CN105324408A (zh) | 2016-02-10 |
KR20160013944A (ko) | 2016-02-05 |
TW201512297A (zh) | 2015-04-01 |
US9786409B2 (en) | 2017-10-10 |
CN105324408B (zh) | 2018-06-22 |
US20160276060A1 (en) | 2016-09-22 |
TWI644971B (zh) | 2018-12-21 |
KR101961985B1 (ko) | 2019-03-25 |
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