JP2016517236A - ナノ機械的共振器アレイ及びその製造方法 - Google Patents
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- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
- H03H9/2447—Beam resonators
- H03H9/2463—Clamped-clamped beam resonators
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- B82B1/00—Nanostructures formed by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
- B82B1/005—Constitution or structural means for improving the physical properties of a device
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
- H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
- H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
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- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
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Abstract
Description
2 共振器
3 結合(coupling)膜
4 クランプ部材
5 作動電極(actuating electrode)
6 読出電極
C 共振器キャパシタンス
R 共振器抵抗
L 共振器インダクタンス
La 作動のための電気機械変換インダクタンス
Lr 読み出しのための電気機械変換インダクタンス
Lc 結合要素インダクタンス
Cc 結合要素キャパシタンス
RDrive 入力抵抗
RLoad 出力抵抗
VAC 作動電圧
Cf 電極間(貫通)キャパシタンス
Co 電極−共振器間キャパシタンス
Cp 寄生容量
fo 第1モード周波数
FEA 有限要素解析
NCT 数値計算ツール
CSP 回路シミュレーションプログラム
RES 共振器の回路表現
ACT 作動伝達の回路表現
RO 読み出し伝達の回路表現
CP 結合の回路表現(CP
M マスク
Si シリコン
E エッチストップ
O 酸化物
S1 第1犠牲材料
S2 第2犠牲材料
N 構造材料
C 電極材料
D 自己整列マスク材
P 電極統合
Claims (17)
- 発振器に用いるのに適した共振器アレイ(1)であって、
ナノメータの大きさであって、垂直に配列された、少なくとも二つの共振器(2)と、
前記共振器をクランプすることによって支持する、少なくとも一つのクランプ要素(4)と、
を備えた、共振器アレイ(1)。 - 前記共振器をその一端から機械的に結合する、少なくとも一つの結合膜(3)と、
前記結合膜(3)をクランプすることによって機械的な結合を支持する、少なくとも一つのクランプ要素(4)と、
をさらに備えた、請求項1に記載の共振器アレイ(1)。 - 前記共振器アレイ(1)の全ての前記共振器(2)は同一である、請求項1又は2に記載の共振器アレイ(1)。
- 前記共振器アレイ(1)の少なくとも二つの共振器(2)は同一でない、請求項1又は2に記載の共振器アレイ(1)。
- 請求項1から4のいずれか一項に記載の共振器アレイ(1)を有する発振器であって、前記発振器は、少なくとも前記共振器アレイを作動させるアクチュエータを備えた、発振器。
- 前記アクチュエータは、作動電極である、請求項5に記載の発振器。
- 前記アクチュエータは、熱アクチュエータである、請求項5に記載の発振器。
- 前記アクチュエータは、磁気アクチュエータである、請求項5に記載の発振器。
- 前記発振器は、前記共振器アレイ(1)の動きを検出する、少なくとも一つの読出電極(6)を備えた、請求項6から8のいずれか一項に記載の発振器。
- 前記発振器は、前記共振器アレイ(1)の動きを検出する、少なくとも一つの光学的検出器を備えた、請求項6から8のいずれか一項に記載の発振器。
- 前記発振器は、異なる周波数応答を有する少なくとも二つの共振器アレイ(1)を備えた、請求項5から10のいずれか一項に記載の発振器。
- 前記発振器は、少なくとも一つの周波数操作回路構成を備え、各アレイの出力は、前記周波数操作回路構成と接続されている、請求項11に記載の発振器。
- 請求項1から4のいずれか一項に記載の共振器アレイ(1)の製造方法であって、
デバイスのシリコン層上に2つのウインドウをパターニングし、それを露出させてボッシュ工程を用いてプラズマエッチングする工程と、
さらに酸化を行って、幅広マスクの場合に酸化物エンベロープにナノワイヤを形成する工程と、
前記酸化物エンベロープをエッチングして前記ナノワイヤを解放する工程と、
を含む、共振器アレイ(1)の製造方法。 - 請求項5から12のいずれか一項に記載の発振器の製造方法であって、
デバイスのシリコン層上に2つのウインドウをパターニングし、それを露出させてボッシュ工程を用いてプラズマエッチングする工程と、
さらに酸化を行って、幅広マスクの場合に酸化物エンベロープにナノワイヤを形成する工程と、
酸化物又は同様の犠牲材料を堆積させてナノワイヤをさらに覆う工程と、
電極材料を堆積させる工程と、
自己整合マスク材料を堆積させる工程と、
電極材料が露出するまで化学機械的研磨を行う工程と、
電極材料をエッチングする工程と、
前記酸化物エンベロープ及び/又は他の犠牲材料をエッチングして前記ナノワイヤを解放する工程と、
を含む、発振器の製造方法。 - 請求項1から4のいずれか一項に記載の共振器アレイ(1)の製造方法であって、
犠牲層と構造層との堆積を互いの上面に順次繰り返して多層構造を形成する工程と、
前記多層構造の上面をパターニングする工程と、
前記多層構造の異方性エッチングを行う工程と、
異方性エッチングによって前記犠牲層を除去してナノワイヤを解放する工程と、
を含む、共振器アレイ(1)の製造方法。 - 請求項5から12のいずれか一項に記載の発振器の製造方法であって、
犠牲層と構造層との堆積を互いの上面に順次繰り返して多層構造を形成する工程と、
前記多層構造の上面をパターニングする工程と、
前記多層構造の異方性エッチングを行う工程と、
新たな等角の犠牲層を堆積させる工程と、
電極材料を堆積させる工程と、
自己整合マスク材料を堆積させる工程と、
電極材料が露出するまで化学機械的研磨を行う工程と、
電極材料をエッチングする工程と、
異方性エッチングによって全ての前記犠牲層を除去してナノワイヤを解放する工程と、
を含む、発振器の製造方法。 - 請求項5から12のいずれか一項に記載の発振器の製造方法であって、
犠牲層と構造層との堆積を互いの上面に順次繰り返して多層構造を形成する工程と、
前記多層構造の上面をパターニングする工程と、
前記多層構造の異方性エッチングを行う工程と、
前記犠牲層の等方性エッチングを行う工程と、
新たな等角の犠牲層を堆積させる工程と、
電極材料を堆積させる工程と、
自己整合マスク材料を堆積させる工程と、
電極材料が露出するまで化学機械的研磨を行う工程と、
電極材料をエッチングする工程と、
異方性エッチングによって前記犠牲層を除去してナノワイヤを解放する工程と、
を含む、発振器の製造方法。
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CN107651650A (zh) * | 2017-09-29 | 2018-02-02 | 江西师范大学 | 耦合纳米机械振子及其形成方法 |
CN107697883A (zh) * | 2017-09-29 | 2018-02-16 | 江西师范大学 | 耦合纳米机械振子及其形成方法 |
CN107462609A (zh) * | 2017-09-29 | 2017-12-12 | 江西师范大学 | 纳米气敏传感器及其形成方法 |
US11217694B2 (en) * | 2019-03-18 | 2022-01-04 | Shanghai Industrial Μtechnology Research Institute | Field-effect transistor and method for manufacturing the same |
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US7157990B1 (en) * | 2004-05-21 | 2007-01-02 | Northrop Grumman Corporation | Radio frequency device and method using a carbon nanotube array |
US20080149919A1 (en) * | 2005-04-13 | 2008-06-26 | Commissariat A L'energie Atomique | Structure and Method For Realizing a Microelectronic Device Provided With a Number of Quantum Wires Capable of Forming One or More Transistor Channels |
JP2010500559A (ja) * | 2006-08-11 | 2010-01-07 | エージェンシー フォー サイエンス,テクノロジー アンド リサーチ | ナノワイヤセンサ、ナノワイヤセンサアレイ、及び当該センサ及びセンサアレイを形成する方法 |
JP2010204098A (ja) * | 2009-02-27 | 2010-09-16 | Commissariat A L'energie Atomique & Aux Energies Alternatives | ナノワイヤセンサ装置 |
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US20160087600A1 (en) | 2016-03-24 |
EP2987239A1 (en) | 2016-02-24 |
WO2014169960A1 (en) | 2014-10-23 |
US9413333B2 (en) | 2016-08-09 |
EP2987239B1 (en) | 2016-12-14 |
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