JP2016212124A5 - - Google Patents

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Publication number
JP2016212124A5
JP2016212124A5 JP2016185408A JP2016185408A JP2016212124A5 JP 2016212124 A5 JP2016212124 A5 JP 2016212124A5 JP 2016185408 A JP2016185408 A JP 2016185408A JP 2016185408 A JP2016185408 A JP 2016185408A JP 2016212124 A5 JP2016212124 A5 JP 2016212124A5
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JP
Japan
Prior art keywords
magnetic layer
region
hard bias
electrode
pressure sensor
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JP2016185408A
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English (en)
Japanese (ja)
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JP2016212124A (ja
JP6200565B2 (ja
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Priority to JP2016185408A priority Critical patent/JP6200565B2/ja
Priority claimed from JP2016185408A external-priority patent/JP6200565B2/ja
Publication of JP2016212124A publication Critical patent/JP2016212124A/ja
Publication of JP2016212124A5 publication Critical patent/JP2016212124A5/ja
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JP2016185408A 2016-09-23 2016-09-23 圧力センサ、音響マイク、血圧センサ及びタッチパネル Active JP6200565B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016185408A JP6200565B2 (ja) 2016-09-23 2016-09-23 圧力センサ、音響マイク、血圧センサ及びタッチパネル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016185408A JP6200565B2 (ja) 2016-09-23 2016-09-23 圧力センサ、音響マイク、血圧センサ及びタッチパネル

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2012221274A Division JP2014074606A (ja) 2012-10-03 2012-10-03 圧力センサ、音響マイク、血圧センサ及びタッチパネル

Publications (3)

Publication Number Publication Date
JP2016212124A JP2016212124A (ja) 2016-12-15
JP2016212124A5 true JP2016212124A5 (de) 2017-01-26
JP6200565B2 JP6200565B2 (ja) 2017-09-20

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ID=57549597

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016185408A Active JP6200565B2 (ja) 2016-09-23 2016-09-23 圧力センサ、音響マイク、血圧センサ及びタッチパネル

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JP (1) JP6200565B2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6421101B2 (ja) * 2015-09-09 2018-11-07 株式会社東芝 センサ、情報端末、マイクロフォン、血圧センサ及びタッチパネル
JP6615971B2 (ja) * 2018-10-05 2019-12-04 株式会社東芝 センサ、マイクロフォン、血圧センサ及びタッチパネル
WO2021079669A1 (ja) * 2019-10-21 2021-04-29 株式会社村田製作所 センサ、歪検知センサ、圧力センサ、およびマイクロフォン、ならびに、センサの製造方法、および歪検知センサの製造方法
WO2021250924A1 (ja) * 2020-06-11 2021-12-16 株式会社村田製作所 磁気センサチップおよび磁気センサ装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19648424C1 (de) * 1996-11-22 1998-06-25 Siemens Ag Mikromechanischer Sensor
JP2000148393A (ja) * 1998-11-06 2000-05-26 Minolta Co Ltd 視触覚情報伝達装置
US7027320B2 (en) * 2003-10-21 2006-04-11 Hewlett-Packard Development Company, L.P. Soft-reference magnetic memory digitized device and method of operation
DE102005010338B4 (de) * 2005-03-07 2007-01-25 Infineon Technologies Ag Kraftsensoranordnung mit magnetostriktiven Magnetowiderstandssensoren und Verfahren zur Ermittlung einer auf den Träger einer Kraftsensoranordnung wirkenden Kraft
JP5101659B2 (ja) * 2010-05-25 2012-12-19 株式会社東芝 血圧センサ
JP5235964B2 (ja) * 2010-09-30 2013-07-10 株式会社東芝 歪検知素子、歪検知素子装置、および血圧センサ

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