JP2016211896A5 - Gas detector - Google Patents
Gas detector Download PDFInfo
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- JP2016211896A5 JP2016211896A5 JP2015093602A JP2015093602A JP2016211896A5 JP 2016211896 A5 JP2016211896 A5 JP 2016211896A5 JP 2015093602 A JP2015093602 A JP 2015093602A JP 2015093602 A JP2015093602 A JP 2015093602A JP 2016211896 A5 JP2016211896 A5 JP 2016211896A5
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- electrode
- gas
- heater combined
- combined electrode
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- 238000001514 detection method Methods 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 4
- 230000004323 axial length Effects 0.000 claims 1
- 230000000747 cardiac effect Effects 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Description
本発明は、ガス検知装置に関する。 The present invention relates to a gas sensing device.
本発明は、上記事情に鑑みてなされたものであり、その目的とするところは、ヒータ兼用電極の大きさを小さくしても、中心電極がヒータ兼用電極に接触するのを抑制できるガス検知装置を提供することにある。 The present invention has been made in view of the above circumstances, it is an object also to reduce the size of the heater combined electrode, the center electrode can be suppressed from contacting the heater combined electrode Ruga scan It is to provide a detection device.
本発明のガス検知装置は、中心電極と、前記中心電極から離れた状態で前記中心電極の周囲に巻き回されてコイル状に形成されたヒータ兼用電極と、前記ヒータ兼用電極と前記中心電極とを覆う感ガス体とを備えた半導体式ガスセンサと、前記ヒータ兼用電極に通電して前記感ガス体を加熱する駆動部とを備え、前記ヒータ兼用電極は、外径が１４０μｍ以下で、かつ、前記外径に対する中心軸方向の長さの比率が１以下となるように構成されており、前記駆動部は、前記ヒータ兼用電極に対し０．０６〜０．１秒間通電した後、前記ヒータ兼用電極に対する通電を停止し、これにより前記感ガス体を加熱することを特徴とする。 The gas detector of the present invention includes a center electrode, a heater combined electrode that is wound around the center electrode in a state of being separated from the center electrode, and is formed in a coil shape, the heater combined electrode, and the center electrode A gas sensor that covers the gas sensor, and a driving unit that heats the gas sensor by energizing the heater electrode, and the heater electrode has an outer diameter of 140 μm or less, and is configured so that the ratio of the length of the mandrel direction becomes 1 or less in against the outer diameter, the drive unit, after energizing 0.06 to 0.1 seconds with respect to the heater combined electrode, The energization to the heater combined electrode is stopped, and thereby the gas sensitive body is heated .
またこのガス検知装置において、前記ヒータ兼用電極のターン数が２以下であることが好ましい。 In this gas detector , the number of turns of the heater combined electrode is preferably 2 or less.
またこのガス検知装置において、前記感ガス体の体積が０．００１ｍｍ３以上０．０１ｍｍ３以下であることが好ましい。 In the gas detection device , the volume of the gas sensitive body is preferably 0.001 mm 3 or more and 0.01 mm 3 or less.
またこのガス検知装置において、前記半導体式ガスセンサの駆動中の前記ヒータ兼用電極と中心電極との間の抵抗値に基づいて対象ガスを検知する検出部をさらに備えていることが好ましい。 In the gas detection apparatus preferably further comprises a detection unit for detecting a target gas based on the resistance value between the heater combined electrode and the center electrode in the driving before Symbol semiconductor gas sensor.
本発明の半導体式ガスセンサは、外径に対する中心軸方向の長さの比率が１以下となるように構成されているため、製造時において、中心電極が傾いた場合であっても、当該中心電極がヒータ兼用電極に接触しにくい。したがって、本発明のガス検知装置によれば、ヒータ兼用電極の大きさを小さくしても、中心電極がヒータ兼用電極に接触するのを抑制できる。 Since the semiconductor gas sensor of the present invention is configured so that the ratio of the length in the central axis direction to the outer diameter is 1 or less, even when the central electrode is inclined during manufacture, the central electrode Is difficult to contact the heater electrode. Therefore, according to the gas detection apparatus of the present invention, even when reducing the size of the heater combined electrode, the center electrode can be prevented from contacting the heater combined electrode.
Claims (4)
前記ヒータ兼用電極に通電して前記感ガス体を加熱する駆動部と
を備え、
前記ヒータ兼用電極は、外径が１４０μｍ以下で、かつ、前記外径に対する中心軸方向の長さの比率が１以下となるように構成されており、
前記駆動部は、前記ヒータ兼用電極に対し０．０６〜０．１秒間通電した後、前記ヒータ兼用電極に対する通電を停止し、これにより前記感ガス体を加熱する、
ガス検知装置。 A center electrode; a heater combined electrode wound around the center electrode in a state of being separated from the center electrode; and a gas sensitive body that covers the heater combined electrode and the center electrode. A semiconductor gas sensor ,
A drive unit for energizing the heater combined electrode to heat the gas sensitive body;
With
The heater combined electrode is an outer diameter of 140μm or less, and the ratio of the cardiac axial length in against the outer diameter is configured to be 1 or less,
The drive unit energizes the heater combined electrode for 0.06 to 0.1 seconds, then stops the energization of the heater combined electrode, thereby heating the gas sensitive body.
Gas detector.
請求項１記載のガス検知装置。 The number of turns of the heater combined electrode is 2 or less,
The gas detection device according to claim 1 .
請求項１または請求項２記載のガス検知装置。 The volume of the gas sensitive body is 0.001 mm 3 or more and 0.01 mm 3 or less.
The gas detection device according to claim 1 or 2 .
ガス検知装置。 Further comprising a detection unit for detecting a target gas based on the resistance value between the previous SL said heater combined electrode and the center electrode in the driving of the semiconductor gas sensor,
Gas detector.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015093602A JP6203214B2 (en) | 2015-04-30 | 2015-04-30 | Semiconductor gas sensor manufacturing method and gas detector |
| PCT/JP2016/060643 WO2016174988A1 (en) | 2015-04-30 | 2016-03-31 | Semiconductor gas sensor and gas detection device provided with same |
| TW105113307A TW201643419A (en) | 2015-04-30 | 2016-04-28 | Semiconductor gas sensor and gas detector with the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015093602A JP6203214B2 (en) | 2015-04-30 | 2015-04-30 | Semiconductor gas sensor manufacturing method and gas detector |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016211896A JP2016211896A (en) | 2016-12-15 |
| JP2016211896A5 true JP2016211896A5 (en) | 2017-01-26 |
| JP6203214B2 JP6203214B2 (en) | 2017-09-27 |
Family
ID=57198453
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015093602A Active JP6203214B2 (en) | 2015-04-30 | 2015-04-30 | Semiconductor gas sensor manufacturing method and gas detector |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6203214B2 (en) |
| TW (1) | TW201643419A (en) |
| WO (1) | WO2016174988A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6976991B2 (en) * | 2019-06-06 | 2021-12-08 | Ｎｉｓｓｈａ株式会社 | Concentration ratio calculation method for two-component gas and concentration calculation method for detection target gas |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3087982B2 (en) * | 1992-06-11 | 2000-09-18 | フィガロ技研株式会社 | Gas sensor |
| JPH09269308A (en) * | 1996-04-02 | 1997-10-14 | New Cosmos Electric Corp | Heat ray type semiconductor gas detection element and gas detector |
| JP3101712B2 (en) * | 1998-12-03 | 2000-10-23 | 東京工業大学長 | Smell / gas flow visualization measurement device |
| JP2001021515A (en) * | 1999-07-05 | 2001-01-26 | Figaro Eng Inc | Gas sensor and gas detection method |
| JP3480823B2 (en) * | 1999-11-02 | 2003-12-22 | フィガロ技研株式会社 | Gas sensor and method of manufacturing the same |
| JP3518800B2 (en) * | 1999-12-16 | 2004-04-12 | フィガロ技研株式会社 | Gas sensor and gas detection device |
| JP3868736B2 (en) * | 2000-12-01 | 2007-01-17 | 矢崎総業株式会社 | Gas detection device and gas detection method |
| US6644098B2 (en) * | 2001-01-18 | 2003-11-11 | Advanced Test Products, Inc. | Heated electrode refrigerant detector utilizing one or more control loop |
| GB2474635A (en) * | 2009-10-16 | 2011-04-27 | Reckitt & Colmann Prod Ltd | Air treatment agent dispensing device |
| JP5951980B2 (en) * | 2011-12-21 | 2016-07-13 | 日本写真印刷株式会社 | Semiconductor gas sensor element, semiconductor gas sensor element manufacturing method, and gas detection apparatus |
| JP2015004537A (en) * | 2013-06-19 | 2015-01-08 | 新コスモス電機株式会社 | Gas detection element driving method and gas detection device |
-
2015
- 2015-04-30 JP JP2015093602A patent/JP6203214B2/en active Active
-
2016
- 2016-03-31 WO PCT/JP2016/060643 patent/WO2016174988A1/en active Application Filing
- 2016-04-28 TW TW105113307A patent/TW201643419A/en unknown
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