JP2016200420A - Imaging apparatus and inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To appropriately image an imaging object using an inexpensive and simple configuration without increasing the size of the whole of an apparatus.SOLUTION: An imaging apparatus (11) comprises a stage (23) on which an imaging object (W) is installed, a mirror member (31) for covering the imaging object on the stage with a paraboloid-shaped mirror surface (32), an optical system (41) for imaging the imaging object on the stage using the mirror surface of the mirror member, and a movement mechanism (55) for separating or bringing the imaging object on the stage and the optical system from or closer to each other, the imaging apparatus being configured in such a way that the direction of separation or approach is set to be the axial direction, the imaging object is positioned at the focus of light incident on the mirror surface of the mirror member from a direction perpendicular to the axial direction.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an imaging apparatus and an inspection apparatus that are used to detect scratches, foreign objects, and the like of an imaging target based on a captured image.

  Conventionally, in an appearance inspection of an imaging target, a plurality of cameras are fixedly arranged in advance according to an inspection site of the imaging target, and the imaging target is imaged and inspected from a plurality of directions. In this appearance inspection, when an imaging direction with respect to an imaging target is fixed and an unexpected scratch or a foreign object is generated on the imaging target, it is necessary to inspect by changing the arrangement of the cameras. Therefore, as an inspection apparatus used for this type of appearance inspection, a plurality of cameras and illumination are arranged so as to be relatively movable with respect to the imaging target, and the imaging target is imaged from various directions and inspected by the plurality of cameras. Those are known (for example, see Patent Document 1).

JP 2013-130438 A

  However, since the inspection apparatus described in Patent Document 1 must be provided with a moving mechanism for moving each camera individually in addition to a plurality of cameras, the entire apparatus becomes larger and the number of parts increases. There was a problem that the cost increased. Furthermore, it is necessary to appropriately control the movement of each camera according to the imaging region to be imaged, and the apparatus configuration and the control configuration are complicated.

  The present invention has been made in view of such points, and an object thereof is to provide an imaging apparatus and an inspection apparatus that can appropriately capture an imaging target with an inexpensive and simple configuration without increasing the size of the entire apparatus. And

  The imaging apparatus of the present invention includes a stage on which an imaging target is installed, a mirror member that covers the imaging target on the stage with a parabolic mirror surface, and the imaging on the stage using a mirror surface of the mirror member. An optical system for imaging an object; and a moving mechanism for relatively separating or approaching the imaging object of the stage and the optical system, wherein the separation or approach direction is an axial direction, and a direction perpendicular to the axial direction The imaging object is positioned at the focal point of light incident on the mirror surface of the mirror member.

  According to this configuration, light from a direction perpendicular to the axial direction is reflected toward the imaging target positioned at the focal point at any position on the parabolic mirror surface, and light from the imaging target positioned at the focal point is reflected Any position on the parabolic mirror surface is reflected in a direction perpendicular to the axial direction. For this reason, when the optical system separates or approaches the imaging target, it is possible to adjust how the light hits the imaging target and how the imaging target looks. Therefore, it is possible to appropriately capture an imaging target with an inexpensive and simple configuration without increasing the size of the entire apparatus. Note that the imaging target is positioned at the focal point is not limited to the configuration in which the center of the imaging target is positioned at the focal point, and the imaging target blocks a position where a part of the imaging target overlaps the focal point and an optical path connecting the mirror surface and the focal point. Such a configuration positioned at a substantially focal point is also included.

In the imaging device of the present invention, the mirror surface of the mirror member may be a paraboloid represented by Expression (1) when f is an arbitrary constant in an xyz coordinate space in which the axial direction is the z-axis direction. It is formed in a planar shape.
Formula (1)
z ⁴ -16f ² x ² -16f ² y ² -8f ² z ² + 16f ⁴ = 0
According to this configuration, the origin of the xyz coordinate space becomes the focal point, and the imaging object can be positioned at the origin and imaging can be performed.

  In the imaging apparatus according to the aspect of the invention, the optical system may include an imaging unit that captures an image of a mirror surface of the mirror member from a direction perpendicular to the axial direction, and the moving mechanism may include the imaging target of the stage and the imaging The part is relatively separated or approached. According to this configuration, light incident on the parabolic mirror surface from the imaging object positioned at the focal point is reflected in a direction perpendicular to the axial direction at any position on the parabolic mirror surface. Therefore, the appearance of the imaging target can be adjusted by changing the position where the imaging unit captures the mirror image from the mirror surface in the axial direction.

  The imaging apparatus of the present invention further includes a rotation mechanism that relatively rotates the imaging target of the stage and the optical system with the axial direction as a rotation axis. According to this configuration, the imaging target can be imaged from an appropriate direction by changing the position at which the optical system captures the mirror image from the mirror surface in the rotation direction.

  In the imaging apparatus of the present invention, an installation table on which the imaging target is installed is provided on the stage, and the rotation mechanism rotates the installation table with respect to the optical system. According to this configuration, since the orientation of the imaging target rotates with respect to the imaging unit, the imaging target can be imaged from an appropriate orientation in a state where the position where the optical system captures the mirror image from the mirror surface is fixed in the rotation direction. it can.

  In the imaging device according to the aspect of the invention, the mirror surface of the mirror member is formed in a partial paraboloid shape including a part of a paraboloid. According to this configuration, since the position at which the imaging unit captures the mirror image from the mirror surface is fixed in the rotation direction, the imaging target can be imaged even if the mirror surface is formed of a partial paraboloid.

  In the imaging apparatus of the present invention, the optical system includes an imaging unit that images the imaging target from the axial direction, and an illumination unit that illuminates the mirror surface of the mirror member from a direction perpendicular to the axial direction. The moving mechanism relatively separates or approaches the imaging target of the stage and the illumination unit. According to this configuration, the light incident on the parabolic mirror surface from the illumination unit is reflected toward the imaging object positioned at the focal point at any position on the parabolic mirror surface. Therefore, by changing the position where the illuminating unit illuminates the mirror surface in the axial direction, it is possible to adjust how the light strikes the imaging target.

  Moreover, the said imaging device of this invention WHEREIN: The said illumination part is disk type illumination which illuminates the mirror surface of the said mirror member over a perimeter. According to this configuration, the imaging region to be imaged can be illuminated from the surroundings by the light emitted from the disk-type illumination.

  The imaging apparatus of the present invention may further include a rotation mechanism that relatively rotates the imaging target on the installation table provided on the stage and the illumination unit with the axial direction as a rotation axis, and the illumination unit includes: It is spot illumination which partially illuminates the mirror surface of the mirror member. According to this configuration, the imaging region to be imaged can be partially illuminated by the spot light emitted from the spot illumination.

  In the imaging device according to the aspect of the invention, the mirror surface of the mirror member is formed in a partial paraboloid shape including a part of a paraboloid. According to this configuration, since the position at which the mirror surface is irradiated with the spot light is fixed in the rotation direction, the imaging target can be partially illuminated even if the mirror surface is formed as a partial paraboloid.

  An inspection apparatus according to the present invention includes the above-described imaging apparatus and an image processing apparatus that inspects the imaging target by image processing of a captured image captured by the imaging apparatus. According to this configuration, it is possible to capture an imaging target with an inexpensive and simple configuration without increasing the size of the entire apparatus, and to inspect a scratch or a foreign object generated on the imaging target based on the captured image.

  According to the present invention, since the optical system is separated or approached with respect to the imaging target, the appearance of the imaging target captured by the optical system and the way the light hits the imaging target can be changed. Therefore, the imaging target can be appropriately illuminated and imaged with an inexpensive and simple configuration.

It is a mimetic diagram of the inspection device concerning a 1st embodiment. It is explanatory drawing of the mirror member which concerns on 1st Embodiment. It is explanatory drawing of the imaging operation by the imaging device which concerns on 1st Embodiment. It is explanatory drawing of the imaging operation by the imaging device which concerns on 2nd Embodiment. It is explanatory drawing of the imaging operation by the imaging device which concerns on 3rd Embodiment. It is explanatory drawing of the imaging operation by the imaging device which concerns on 4th Embodiment. It is explanatory drawing of the imaging operation by the imaging device which concerns on 5th Embodiment. It is explanatory drawing of the mirror member which concerns on 5th Embodiment. It is explanatory drawing of the imaging operation by the imaging device which concerns on 6th Embodiment. It is explanatory drawing of the imaging operation by the imaging device which concerns on 7th Embodiment. It is explanatory drawing of the imaging operation by the imaging device which concerns on 8th Embodiment. It is explanatory drawing of the imaging operation by the imaging device which concerns on 9th Embodiment.

  Hereinafter, an inspection apparatus according to the present embodiment will be described with reference to the accompanying drawings. Note that the inspection apparatus according to the present embodiment may be configured in any way as long as it includes an imaging apparatus that captures an image using a mirror member having a parabolic inner surface as a mirror surface. In the following description, a configuration in which the imaging target and the optical system are separated or approached in the z-axis direction will be described as an example, but the separation or approaching direction of the imaging target and the optical system is not particularly limited. In the following embodiments, for convenience of explanation, the same components are denoted by the same reference numerals. FIG. 1 is a schematic diagram of an inspection apparatus according to the first embodiment. FIG. 2 is an explanatory diagram of the mirror member according to the first embodiment.

  As shown in FIG. 1, the inspection apparatus 1 is configured to inspect the imaging target W by performing image processing on the captured image captured by the imaging apparatus 11 in the image processing apparatus 12. The inspection apparatus 1 is required not only for a defect inspection of an imaging region assumed in advance, but also for an inspection of an imaging region defect that is not assumed in advance. For this reason, although it is necessary to image the imaging target W not only from a fixed direction but also from various directions, a plurality of imaging units (cameras) and a complicated moving mechanism must be used. Therefore, the imaging apparatus 11 according to the present embodiment uses the dome-shaped mirror member 31 to vary the imaging direction with respect to the imaging target W.

As shown in FIG. 2A, the cross-sectional shape of the mirror surface 32 of the mirror member 31 is a parabola represented by the following equation (2) in the xz coordinate system. Here, p ≦ x ≦ 1, p is a constant having a value between 0 and 1, and f is an arbitrary constant. The parabola shown by this formula (2) is focused on the origin.
Formula (2)
^{y 2 = -4f (x-f} )
In this parabola, all the light emitted from the focal point (origin) and reflected by the parabola travels in a direction perpendicular to the z-axis, so the focal point is focused according to the position where the viewpoint is directed to the parabola from the direction perpendicular to the z-axis. It is possible to obtain images viewed from different directions.

As shown in FIG. 2B, the mirror surface 32 of the mirror member 31 formed by rotating the parabola around the z-axis is a rotary paraboloid represented by Expression (3) in the xyz coordinate space.
Formula (3)
z ⁴ -16f ² x ² -16f ² y ² -8f ² z ² + 16f ⁴ = 0
Thus, in the imaging device 11, it is possible to vary the imaging direction with respect to the imaging target W by utilizing the property of the parabolic mirror surface 32 of the mirror member 31.

  Returning to FIG. 1, the base 21 of the imaging apparatus 11 is provided with a stage 23 having an installation base 24 for the imaging target W. On the stage 23, a dome-shaped mirror member 31 is provided that covers the imaging target W on the installation table 24 with a parabolic mirror surface 32. The imaging target W on the installation table 24 is positioned on the stage 23 at the focal point (origin) of light incident on the mirror surface 32 of the mirror member 31 from the direction perpendicular to the z-axis direction (axial direction). The inner surface of the mirror member 31 is a rotating paraboloidal mirror surface 32, and reflects light from the imaging target W placed at the focal point in a direction perpendicular to the z-axis direction. In addition, an opening 33 that connects the inside and outside of the mirror member 31 is formed at the apex portion of the mirror member 31.

  An optical system 41 that images the imaging target W on the stage 23 is inserted into the opening 33 of the mirror member 31 via the mirror surface 32 of the mirror member 31. The case 42 of the optical system 41 is formed in a cylindrical shape, and an opening 43 facing the mirror surface 32 of the mirror member 31 is formed on the side surface on the lower end side of the case 42. An imaging unit 44 with the imaging surface facing downward is installed on the upper end side of the case 42, and a mirror 46 that reflects light incident from the opening 43 toward the imaging surface of the imaging unit 44 is installed on the lower end side of the case 42. Has been. The light from the imaging target W is reflected sideways by the parabolic mirror surface 32 of the mirror member 31 and then reflected upward by the mirror 46 to be taken into the imaging unit 44.

  Further, a support column 51 is erected on the base 21, and the support unit 51 is provided with a moving mechanism 55 that moves the optical system 41 away from or approaches the imaging target W on the stage 23. The moving mechanism 55 adjusts the height of the optical system 41 with respect to the mirror member 31 by moving the optical system 41 supported by the arm 52 in the z-axis direction. The arm 52 is provided with a rotation mechanism 56 that rotates the optical system 41 with respect to the imaging target W of the stage 23 about the z axis as a rotation axis. The rotation mechanism 56 adjusts the orientation of the optical system 41 with respect to the mirror surface 32 of the mirror member 31 in the horizontal direction by rotating the entire optical system 41 around the z axis.

  The light from the imaging target W positioned at the focal point is reflected in a direction perpendicular to the z-axis direction at any position on the parabolic mirror surface 32. For this reason, by moving the optical system 41 in the z-axis direction with respect to the mirror surface 32, light in an oblique direction from the imaging target W can be taken into the optical system 41, and the appearance of the imaging target W from obliquely above is visible. Be changed. Further, by rotating the optical system 41 around the z axis with respect to the mirror surface 32, the direction in which the imaging target W can be seen is changed. In this way, by moving the viewpoint of the optical system 41 with respect to the mirror surface 32 of the mirror member 31 by the moving mechanism 55 and the rotating mechanism 56, images obtained by viewing the imaging target W from various directions are acquired.

  In the first embodiment, an illumination unit that illuminates the imaging target W may be provided in the optical system 41, or may be provided inside the mirror member 31. Further, external light may be taken into the inside of the mirror member 31 through a gap between the opening 33 of the mirror member 31 and the case 42 of the optical system 41 without providing the illumination unit in the imaging device 11.

  The image processing device 12 detects a defect in the imaging target W by performing image processing on the captured image captured by the imaging device 11. The image processing by the image processing device 12 is not particularly limited. For example, a defect of an imaging target is detected by a method such as comparing a captured image with a reference image prepared in advance or a template matching based on a normalized correlation coefficient. May be. In the first embodiment, the image processing device 12 detects the defect of the imaging target W. However, the operator may check the defect of the imaging target W from the captured image by visual observation.

  With reference to FIG. 3, the imaging operation by the imaging device will be described. FIG. 3 is an explanatory diagram of an imaging operation performed by the imaging apparatus according to the first embodiment. Here, it is assumed that an illumination unit is provided in the optical system and the imaging target is irradiated through the mirror surface of the mirror member.

  As shown in FIG. 3, when the optical system 41 is positioned at the upper position by the moving mechanism 55 and the orientation of the optical system 41 is directed to a predetermined direction by the rotating mechanism 56, the moving system 55 is inclined in an oblique direction close to the imaging object W. The traveling light is reflected in the direction perpendicular to the z-axis at the reflection position P 1 of the mirror surface 32 of the mirror member 31 and is taken into the optical system 41. The light taken into the optical system 41 is reflected by the mirror 46 toward the imaging unit 44 located directly above. Thereby, a mirror image of the imaging target W at the reflection position P1 of the mirror surface 32 is captured by the imaging unit 44, and a captured image when the imaging target W is viewed from a direction close to directly above is acquired.

  When the optical system 41 is positioned at the lower position by the moving mechanism 55, the light traveling in the oblique direction near the horizontal from the imaging target W is reflected in the direction perpendicular to the z axis at the reflection position P2 of the mirror surface 32 of the mirror member 31. And taken into the optical system 41. The light taken into the optical system 41 is reflected by the mirror 46 toward the imaging unit 44 located directly above. Thereby, the mirror image of the imaging target W at the reflection position P2 of the mirror surface 32 is captured by the imaging unit 44, and a captured image when the imaging target W is viewed from a direction close to the horizontal is acquired. As described above, by changing the position at which the mirror image is captured from the mirror surface 32, it is possible to obtain images obtained by viewing the imaging target W from various directions.

  As described above, the imaging apparatus 11 according to the first embodiment changes the position where the mirror image is captured from the mirror surface 32 by moving the imaging unit 44 relative to the imaging target W in the z-axis direction and rotating around the z-axis. The appearance of the imaging target W can be adjusted. Therefore, the imaging part of the imaging target W can be imaged from various directions to obtain a captured image, and the imaging target is appropriately imaged and inspected with an inexpensive and simple configuration without increasing the size of the inspection apparatus 1. be able to.

  In the first embodiment, the optical system 41 (imaging unit 44) is configured to be movable in the z-axis direction and rotatable about the z-axis, but is not limited to this configuration. The optical system 41 and the imaging target W on the stage 23 are relatively separated or approached in the z-axis direction, and the optical system 41 and the imaging target W on the stage 23 are relatively rotated about the z-axis. Any configuration may be used. For example, as shown in FIG. 4, instead of the optical system 41, the stage 23 may be configured to be movable in the z-axis direction and rotatable about the z-axis.

  An inspection apparatus according to the second embodiment will be described with reference to FIG. The inspection apparatus according to the second embodiment is different from the inspection apparatus according to the first embodiment in that the stage of the imaging apparatus moves in the z-axis direction and rotates around the z-axis. In the second embodiment, the description of the same configuration as that of the first embodiment is omitted. FIG. 4 is an explanatory diagram of an imaging operation performed by the imaging apparatus according to the second embodiment. Here, it is assumed that an illumination unit is provided in the optical system and the imaging target is irradiated through the mirror surface of the mirror member.

  As shown in FIG. 4, in the imaging apparatus 11 according to the second embodiment, a support unit 25 extends downward from the stage 23, and an imaging target on the stage 23 with respect to the optical system 41 is supported by the support unit 25. A moving mechanism 55 that separates or approaches W is provided. The moving mechanism 55 adjusts the height of the mirror member 31 with respect to the optical system 41 by moving the mirror member 31 on the stage 23 in the z-axis direction. A rotation mechanism 56 that rotates the imaging target W on the stage 23 with respect to the optical system 41 with the z axis as a rotation axis is provided below the support unit 25. The rotation mechanism 56 adjusts the orientation of the imaging target W with respect to the optical system 41 in the horizontal direction by rotating the entire stage 23 around the z axis.

  In the imaging apparatus 11 configured as described above, when the stage 23 is positioned at the upper position by the moving mechanism 55 and the stage 23 is directed in a predetermined direction by the rotating mechanism 56, the imaging apparatus 11 advances from the imaging target W in an oblique direction close to the horizontal. The light is reflected in the direction perpendicular to the z-axis at the reflection position P 3 of the mirror surface 32 of the mirror member 31 and is taken into the optical system 41. The light taken into the optical system 41 is reflected by the mirror 46 toward the imaging unit 44 located directly above. Thereby, a mirror image of the imaging target W at the reflection position P3 of the mirror surface 32 is captured by the imaging unit 44, and a captured image when the imaging target W is viewed from a direction close to the horizontal is acquired.

  Then, when the stage 23 is positioned at the lower position by the moving mechanism 55, the light traveling in the oblique direction close to the upper side from the imaging target W is reflected in the direction perpendicular to the z axis at the reflection position P4 of the mirror surface 32 of the mirror member 31. And taken into the optical system 41. The light taken into the optical system 41 is reflected by the mirror 46 toward the imaging unit 44 located directly above. Thereby, the mirror image of the imaging target W at the reflection position P4 of the mirror surface 32 is captured by the imaging unit 44, and a captured image when the imaging target W is viewed from a direction close to directly above is acquired.

  As described above, also in the imaging apparatus 11 according to the second embodiment, the position of capturing the mirror image from the mirror surface 32 is changed by moving the stage 23 in the z-axis direction and rotating around the z-axis. You can adjust the appearance. Therefore, the imaging part of the imaging target W can be imaged and examined from various directions.

  In addition to the first and second embodiments, the optical system 41 may be movable in the z-axis direction and the stage 23 may be rotated about the z-axis, or the optical system 41 may be rotated about the z-axis. The stage 23 may be rotatable and movable in the z-axis direction. Furthermore, as shown in FIG. 5, the optical system 41 may be movable in the z-axis direction, and the installation base 24 on the stage 23 may be configured to be rotatable about the z-axis.

  An inspection apparatus according to the third embodiment will be described with reference to FIG. The inspection apparatus according to the third embodiment is different from the inspection apparatus according to the first embodiment in that an installation base on the stage of the imaging apparatus rotates around the z axis. In the third embodiment, the description of the same configuration as that of the first embodiment is omitted. FIG. 5 is an explanatory diagram of an imaging operation performed by the imaging apparatus according to the third embodiment. Here, it is assumed that an illumination unit is provided in the optical system and the imaging target is irradiated through the mirror surface of the mirror member.

  As shown in FIG. 5, in the imaging apparatus 11 according to the third embodiment, a rotation shaft 26 extends downward from the installation table 24, and the installation table 24 is below the rotation shaft 26 with respect to the optical system 41. A rotation mechanism 56 for rotating the upper imaging target W is provided. The rotation mechanism 56 adjusts the orientation of the imaging target W with respect to the optical system 41 in the horizontal direction by rotating the installation base 24 around the z axis. Note that, in the imaging apparatus 11 according to the third embodiment, the optical system 41 is separated from the imaging target W on the stage 23 in the column part 51 on the base 21 as in the first embodiment. Alternatively, a moving mechanism 55 is provided for approaching.

  In the imaging apparatus 11 configured as described above, when the optical system 41 is positioned at the upper position by the moving mechanism 55 and the installation base 24 is directed in a predetermined direction by the rotating mechanism 56, the obliquely close to the imaging target W. The light traveling in the direction is reflected in the direction perpendicular to the z-axis at the reflection position P5 of the mirror surface 32 of the mirror member 31 and taken into the optical system 41. The light taken into the optical system 41 is reflected by the mirror 46 toward the imaging unit 44 located directly above. Thereby, a mirror image of the imaging target W at the reflection position P5 of the mirror surface 32 is captured by the imaging unit 44, and a captured image when the imaging target W is viewed from a direction close to directly above is acquired.

  When the optical system 41 is positioned at the lower position by the moving mechanism 55, the light traveling in the oblique direction near the horizontal from the imaging target W is reflected in the direction perpendicular to the z axis at the reflection position P6 of the mirror surface 32 of the mirror member 31. And taken into the optical system 41. The light taken into the optical system 41 is reflected by the mirror 46 toward the imaging unit 44 located directly above. Thereby, the mirror image of the imaging target W at the reflection position P6 of the mirror surface 32 is captured by the imaging unit 44, and a captured image when the imaging target W is viewed from a direction close to the horizontal is acquired.

  As described above, also in the imaging apparatus 11 according to the third embodiment, the position at which the mirror image is captured from the mirror surface 32 is rotated by changing the position at which the mirror image 32 is captured by the movement of the optical system 41 in the z-axis direction. The imaging target can be imaged from an appropriate direction while being fixed in the direction. Therefore, the imaging part of the imaging target W can be imaged and examined from various directions.

  In the imaging device 11 according to the third embodiment described above, the optical system 41 captures a mirror image of the imaging target W using a part of the mirror member 31 without changing the orientation of the optical system 41, so that the mirror member 31 There is no need to form a dome. For this reason, as in the fourth embodiment shown in FIG. 6, a mirror member 31 having a dome shape cut out may be used. In this case, the mirror surface 32 of the mirror member 31 is formed in the shape of a partial paraboloid composed of a part of the paraboloid. Since the position at which the mirror image is taken from the mirror surface 32 is fixed in the rotation direction, the imaging target W can be imaged even if the mirror surface 32 is formed as a partial paraboloid.

  In the first to fourth embodiments described above, the mirror image reflected on the mirror surface 32 of the mirror member 31 is picked up by the image pickup unit 44. However, the present invention is not limited to this structure. Any configuration may be used as long as the imaging target W on the stage 23 is imaged using the mirror surface 32 of the mirror member 31, and the imaging target W is illuminated by the illumination unit 47 via the mirror surface 32 of the mirror member 31 as shown in FIG. 7. The imaging unit 44 may be configured to image the imaging target W from directly above. In this case, as shown in FIG. 8, the cross-sectional shape of the mirror surface 32 of the mirror member 31 is a parabola expressed by the above formula (2), and all the light incident on the parabola from the direction perpendicular to the z-axis is focused. Since it moves forward, it is possible to illuminate the imaging target from various directions according to the incident position with respect to the parabola.

  With reference to FIG. 7, an inspection apparatus according to a fifth embodiment will be described. Note that in the fifth embodiment, description of the same configuration as in the first embodiment will be omitted. FIG. 7 is an explanatory diagram of an imaging operation performed by the imaging apparatus according to the fifth embodiment.

  As shown in FIG. 7, the base 21 of the imaging apparatus 11 is provided with a stage 23 having an installation base 24 for the imaging target W. On the stage 23, a dome-shaped mirror member 31 is provided that covers the imaging target W on the installation table 24 with a parabolic mirror surface 32. The imaging target W on the installation base 24 is positioned on the stage 23 at the focal point (origin position) of light incident on the mirror member 31 from the direction perpendicular to the z-axis direction (axial direction). The inner surface of the mirror member 31 is a rotating paraboloidal mirror surface 32, and reflects light from a direction perpendicular to the z-axis toward the focal point. In addition, an opening 33 that connects the inside and outside of the mirror member 31 is formed at the apex portion of the mirror member 31.

  An imaging unit 44 that images the imaging target W from the z-axis direction is positioned above the opening 33 of the mirror member 31. The mirror member 31 is positioned below the opening 33 of the mirror member 31 from a direction perpendicular to the z-axis direction. The illumination unit 47 that illuminates the mirror surface 32 is positioned. In the fifth embodiment, the optical system 41 includes the imaging unit 44 and the illumination unit 47. The imaging unit 44 is supported by a support unit 53 erected on the stage 23 with the imaging surface facing directly downward. The illuminating unit 47 is formed in a ring shape so as to avoid the optical axis of the imaging unit 44, and is configured by a disk-type illumination that illuminates the mirror surface 32 of the mirror member 31 over the entire circumference (360 °).

  The light emitted from the illumination unit 47 to the surroundings is reflected toward the focal point by the parabolic mirror surface 32 of the mirror member 31, and the imaging target W is illuminated from the surroundings by the reflected light from the mirror surface 32. Then, the imaging target W illuminated by the illumination unit 47 is imaged by the imaging unit 44 positioned directly above. In this case, since the illumination unit 47 is formed in a ring shape avoiding the optical axis of the imaging unit 44, the imaging by the imaging unit 44 is not hindered by the illumination unit 47. In addition, the illumination part 47 may be comprised, for example, arrange | positioning LED (Light Emitting Diode) in a ring shape, and may arrange | position a ring-shaped fluorescent lamp.

  Further, a support column 51 is erected on the base 21, and the support unit 51 is provided with a moving mechanism 55 that moves the illumination unit 47 away from or approaches the imaging target W on the stage 23. The moving mechanism 55 adjusts the height of the illumination unit 47 with respect to the mirror member 31 by moving the illumination unit 47 supported by the arm 52 in the z-axis direction. Light traveling from the illumination unit 47 in the direction perpendicular to the z-axis direction is reflected toward the imaging target W positioned at the focal point at any position on the parabolic mirror surface 32. For this reason, by moving the illumination unit 47 in the z-axis direction with respect to the mirror surface 32, the way the light strikes the imaging target can be changed, and the brightness of the captured image is adjusted.

  In the imaging apparatus 11 configured as described above, when the illumination unit 47 is positioned at the upper position by the moving mechanism 55, the light traveling in the direction perpendicular to the z-axis direction from the illumination unit 47 is reflected on the mirror surface 32 of the mirror member 31. Reflected toward the focal point at the position P9, the imaging target W is illuminated from the surroundings. Thereby, since the imaging target W is illuminated from a direction close to directly above, a bright captured image is acquired by the imaging unit 44 positioned directly above.

  When the illumination unit 47 is positioned at the lower position by the moving mechanism 55, the light traveling in the direction perpendicular to the z-axis direction from the illumination unit 47 is reflected toward the focal point at the reflection position P10 of the mirror surface 32 of the mirror member 31. Thus, the imaging target W is illuminated from the surroundings. Thereby, since the imaging target W is illuminated from a direction close to the horizontal, a dark captured image is acquired by the imaging unit 44. In this way, by changing the position where the mirror surface 32 of the mirror member 31 is illuminated, it is possible to obtain images obtained by illuminating the imaging target W from various directions.

  As described above, the imaging device 11 according to the fifth embodiment adjusts the way the light strikes the imaging target W by changing the position where the mirror surface 32 is illuminated by the movement of the illumination unit 47 in the z-axis direction. can do. Therefore, the imaging part of the imaging target W can be illuminated from the surroundings with the light from the illumination unit 47 and imaged.

  In the fifth embodiment, the illumination unit 47 is configured to be movable in the z-axis direction, but is not limited to this configuration. What is necessary is just the structure in which the illumination part 47 and the imaging target W on the stage 23 are relatively separated or approached. For example, as shown in FIG. 9, the stage 23 may be configured to be movable in the z-axis direction instead of the illumination unit 47.

  With reference to FIG. 9, an inspection apparatus according to a sixth embodiment will be described. The inspection apparatus according to the sixth embodiment is different from the inspection apparatus according to the fifth embodiment in that the stage of the imaging apparatus moves in the z-axis direction. Note that in the sixth embodiment, description of the same configuration as in the fifth embodiment is omitted. FIG. 9 is an explanatory diagram of an imaging operation performed by the imaging apparatus according to the sixth embodiment.

  As shown in FIG. 9, in the imaging apparatus 11 according to the sixth embodiment, a support portion 25 extends downward from the stage 23, and the support portion 25 captures an image on the stage 23 with respect to the illumination portion 47. A moving mechanism 55 that separates or approaches the target W is provided. The moving mechanism 55 adjusts the height of the mirror member 31 with respect to the illumination unit 47 by moving the mirror member 31 on the stage 23 in the z-axis direction.

  In the imaging device 11 configured as described above, when the stage 23 is positioned at the upper position by the moving mechanism 55, the light traveling from the illumination unit 47 in the direction perpendicular to the z-axis direction is reflected by the mirror surface 32 of the mirror member 31. Reflected toward the focal point at P11, the imaging object W is illuminated from the surroundings. Thereby, since the imaging target W is illuminated from the direction close to the horizontal, a darker captured image is acquired by the imaging unit 44 positioned directly above.

  When the illumination unit 47 is positioned at the lower position by the moving mechanism 55, the light traveling from the illumination unit 47 in the direction perpendicular to the z-axis direction is reflected toward the focal point at the reflection position P12 of the mirror surface 32 of the mirror member 31. Thus, the imaging target W is illuminated from the surroundings. Thereby, since the imaging target W is illuminated from a direction close to directly above, a bright captured image is acquired by the imaging unit 44 positioned directly above.

  As described above, also in the imaging apparatus 11 according to the sixth embodiment, how the light strikes the imaging target W is adjusted by changing the position where the mirror surface 32 is illuminated by the movement of the stage 23 in the z-axis direction. can do. Therefore, the imaging part of the imaging target W can be illuminated from the surroundings with the light from the illumination unit 47 and imaged.

  In the sixth embodiment, the illumination unit 47 is configured by the disk-type illumination that illuminates the mirror surface 32 of the mirror member 31 over the entire circumference (360 °), but is not limited to this configuration. The illumination part 47 should just be the structure which can illuminate the mirror surface 32 of the mirror member 31, and may be comprised by the spot illumination which partially illuminates the mirror surface 32 of the mirror member 31, as shown in FIG.

  With reference to FIG. 10, an inspection apparatus according to a seventh embodiment will be described. The inspection apparatus according to the seventh embodiment is different from the inspection apparatus according to the fifth embodiment in that the illumination unit is spot illumination that can rotate around the z axis. Note that in the seventh embodiment, description of the same configuration as in the fifth embodiment is omitted. FIG. 10 is an explanatory diagram of an imaging operation performed by the imaging apparatus according to the seventh embodiment.

  As shown in FIG. 10, in the imaging apparatus 11 according to the seventh embodiment, the illumination unit 47 is supported by the arm 52 connected to the moving mechanism 55 via the rotating mechanism 56. The illumination unit 47 is formed in a ring shape so as to avoid the optical axis of the imaging unit 44, and is configured by spot illumination that partially illuminates the mirror surface 32 of the mirror member 31 from one direction of the ring shape. In this case, since the illumination unit 47 is formed in a ring shape avoiding the optical axis of the imaging unit 44, the imaging by the imaging unit 44 is not hindered by the illumination unit 47. In addition, the illumination part 47 may be comprised, for example, arrange | positioning LED, and may be comprised by guiding light from a light source (not shown) using an optical fiber. Note that the spot illumination may be configured such that the spot diameter is variable.

  In the imaging device 11 configured as described above, when the illumination unit 47 is positioned at the upper position by the moving mechanism 55 and the orientation of the illumination unit 47 is adjusted by the rotation mechanism 56, the illumination unit 47 is perpendicular to the z-axis direction. The light traveling in the direction is reflected toward the focal point at the reflection position P13 of the mirror surface 32 of the mirror member 31, and the imaging target W is spot-illuminated. Thereby, since the imaging target W is illuminated from a direction close to directly above, a bright captured image is acquired by the imaging unit 44 positioned directly above.

  When the illumination unit 47 is positioned at the lower position by the moving mechanism 55, the light traveling in the direction perpendicular to the z-axis direction from the illumination unit 47 is reflected toward the focal point at the reflection position P14 of the mirror surface 32 of the mirror member 31. Thus, the imaging target W is spot illuminated. Thereby, since the imaging target W is illuminated from the direction close to the horizontal, a darker captured image is acquired by the imaging unit 44 positioned directly above.

  As described above, also in the imaging apparatus 11 according to the seventh embodiment, the imaging target W is changed by changing the position where the mirror surface 32 is illuminated by the movement of the illumination unit 47 in the z-axis direction and the rotation around the z-axis. It is possible to adjust the way the light strikes against. Therefore, the imaging part of the imaging target W can be partially illuminated with the spot light from the illumination unit 47 and imaged. In the seventh embodiment, the stage 23 may be moved in the z-axis direction instead of moving the illumination unit 47 in the z-axis direction.

  In the seventh embodiment, the illumination unit 47 that is spot illumination is configured to be rotatable. However, the present invention is not limited to this configuration. For example, as shown in FIG. 11, instead of the illumination unit 47, the installation table 24 may be configured to be rotatable around the z axis.

  With reference to FIG. 11, an inspection apparatus according to an eighth embodiment will be described. The inspection apparatus according to the eighth embodiment is different from the inspection apparatus according to the seventh embodiment in that the installation table can rotate around the z axis. Note that in the eighth embodiment, description of the same configuration as in the seventh embodiment is omitted. FIG. 11 is an explanatory diagram of an imaging operation performed by the imaging apparatus according to the eighth embodiment.

  In the imaging apparatus 11 according to the eighth embodiment, the rotation shaft 26 extends downward from the installation table 24, and the imaging target W on the installation table 24 is rotated with respect to the illumination unit 47 below the rotation shaft 26. A rotating mechanism 56 is provided. The rotation mechanism 56 adjusts the direction of the imaging target W with respect to the illumination unit 47 in the horizontal direction by rotating the installation base 24 around the z axis. Note that, in the imaging device 11 according to the eighth embodiment, the optical system 41 is separated from the imaging target W on the stage 23 by the support 51 on the base 21 as in the seventh embodiment. Alternatively, a moving mechanism 55 is provided for approaching.

  In the imaging apparatus 11 configured as described above, when the illumination unit 47 is positioned at the upper position by the moving mechanism 55 and the installation base 24 is directed in a predetermined direction by the rotation mechanism 56, the illumination unit 47 is perpendicular to the z-axis direction. The light traveling in one direction is reflected toward the focal point at the reflection position P15 of the mirror surface 32 of the mirror member 31, and the imaging target W is spot-illuminated. Thereby, since the imaging target W is illuminated from a direction close to directly above, a bright captured image is acquired by the imaging unit 44 positioned directly above.

  When the illumination unit 47 is positioned at the lower position by the moving mechanism 55, the light traveling in the direction perpendicular to the z-axis direction from the illumination unit 47 is reflected toward the focal point at the reflection position P16 of the mirror surface 32 of the mirror member 31. Thus, the imaging target W is spot illuminated. Thereby, since the imaging target W is illuminated from the direction close to the horizontal, a darker captured image is acquired by the imaging unit 44 positioned directly above.

  As described above, also in the imaging apparatus 11 according to the eighth embodiment, by changing the position where the mirror surface 32 is illuminated by the movement of the illumination unit 47 in the z-axis direction and the rotation of the installation base 24 around the z-axis. The way the light strikes the imaging target W can be adjusted. Therefore, the imaging part of the imaging target W can be partially illuminated with the spot light from the illumination unit 47 and imaged. In the eighth embodiment, the stage 23 may be moved in the z-axis direction instead of moving the illumination unit 47 in the z-axis direction.

  In the imaging device 11 according to the eighth embodiment, the illumination unit 47 uses a part of the mirror member 31 to illuminate the imaging target W without changing the direction of the illumination unit 47, so that the mirror member 31 is a dome. It is not necessary to be formed in a shape. For this reason, as in the ninth embodiment shown in FIG. 12, a mirror member 31 with a cut-out dome shape may be used. In this case, the mirror surface 32 of the mirror member 31 is formed in the shape of a partial paraboloid composed of a part of the paraboloid. Since the position at which the mirror surface 32 is illuminated by the spot light is fixed in the rotation direction, the imaging target W can be partially illuminated even if the mirror surface 32 is formed as a partial paraboloid.

  In addition, this invention is not limited to the said embodiment, It can change and implement variously. In the above-described embodiment, the size, shape, and the like illustrated in the accompanying drawings are not limited to this, and can be appropriately changed within a range in which the effect of the present invention is exhibited. In addition, various modifications can be made without departing from the scope of the object of the present invention.

  For example, in each of the above embodiments, the imaging target W is installed on the installation base 24 of the stage 23. However, the present invention is not limited to this configuration. The stage 23 may not be provided with the installation table 24, and the imaging target W may be installed directly on the stage 23.

  Moreover, in each said embodiment, although the mirror member 31 was made into the structure formed in a dome shape, it is not limited to this structure. The mirror member 31 may be formed in any way as long as it has a parabolic mirror surface 32 that covers the imaging target W. Further, it is not necessary that the entire inner surface of the mirror member 31 is formed by the parabolic mirror surface 32, and a part of the inner surface of the mirror member 31 may be formed by the parabolic mirror surface 32.

  Moreover, in each said embodiment, although the mirror surface 32 of the mirror member 31 was made into the structure formed in the paraboloid shape shown to Formula (3), it is not limited to this structure. The mirror surface 32 of the mirror member 31 has a direction in which the imaging target W and the optical system 41 are relatively separated or approached as an axial direction, and reflects light incident from a direction perpendicular to the axial direction toward the focal point. What is necessary is just to be formed in such paraboloid shape.

  In the first to fourth embodiments, the optical system 41 is configured to reflect light from a direction perpendicular to the z-axis direction directly above the mirror 46 and to capture an image with the imaging unit 44. It is not limited to. The optical system 41 may not include the mirror 46, and the imaging surface of the imaging unit 44 is perpendicular to the z-axis direction so that the imaging unit 44 can directly image light from a direction perpendicular to the z-axis direction. May be oriented in any direction.

  In each of the above-described embodiments, the imaging target W being positioned at the focal point is not limited to a configuration in which the center of the imaging target W is positioned at the focal point, and a position where a part of the imaging target W overlaps the focal point, A configuration in which the optical path connecting the mirror surface 32 and the focal point is positioned at a substantially focal point such that the imaging target W blocks the optical path is also included.

  As described above, the present invention has an effect that an imaging target can be appropriately captured with an inexpensive and simple configuration without increasing the size of the entire apparatus. It is useful for an imaging device and an inspection device used for detection of the above.

DESCRIPTION OF SYMBOLS 1 Inspection apparatus 11 Imaging apparatus 12 Image processing apparatus 23 Stage 24 Installation stand 31 Mirror member 32 Mirror surface 41 Optical system 44 Imaging part 47 Illumination part 55 Moving mechanism 56 Rotating mechanism W Imaging object

Claims (11)

A stage on which an imaging target is installed;
A mirror member that covers the imaging target on the stage with a parabolic mirror surface;
An optical system for imaging the imaging object on the stage using a mirror surface of the mirror member;
A moving mechanism that relatively separates or approaches the imaging target of the stage and the optical system;
An imaging apparatus in which the imaging target is positioned at a focal point of light incident on a mirror surface of the mirror member from a direction perpendicular to the axial direction, the separation or approaching direction being an axial direction. The mirror surface of the mirror member is formed in a paraboloidal shape represented by Expression (1) when x is an xyz coordinate space with the axial direction being the z-axis direction and f is an arbitrary constant. The imaging apparatus according to claim 1, wherein the imaging apparatus is characterized.
Formula (1)
z ⁴ -16f ² x ² -16f ² y ² -8f ² z ² + 16f ⁴ = 0 The optical system has an imaging unit that images the mirror surface of the mirror member from a direction perpendicular to the axial direction,
The imaging apparatus according to claim 1, wherein the moving mechanism relatively separates or approaches the imaging target of the stage and the imaging unit.   The imaging apparatus according to claim 3, further comprising a rotation mechanism that relatively rotates the imaging target of the stage and the optical system with the axial direction as a rotation axis. An installation base on which the imaging target is installed on the stage is provided,
The imaging apparatus according to claim 4, wherein the rotation mechanism rotates the installation base with respect to the optical system.   The imaging apparatus according to claim 5, wherein the mirror surface of the mirror member is formed in a partial paraboloid shape including a part of a paraboloid. The optical system includes an imaging unit that images the imaging target from the axial direction, and an illumination unit that illuminates the mirror surface of the mirror member from a direction perpendicular to the axial direction.
The imaging apparatus according to claim 1, wherein the moving mechanism relatively separates or approaches the imaging target of the stage and the illumination unit.   The imaging apparatus according to claim 7, wherein the illumination unit is disk-type illumination that illuminates a mirror surface of the mirror member over the entire circumference. A rotation mechanism that relatively rotates the imaging target on the installation table provided on the stage and the illumination unit with the axial direction as a rotation axis,
The imaging apparatus according to claim 7, wherein the illumination unit is spot illumination that partially illuminates a mirror surface of the mirror member.   The imaging apparatus according to claim 9, wherein a mirror surface of the mirror member is formed in a partial paraboloid shape including a part of a paraboloid. An imaging device according to any one of claims 1 to 10,
An inspection apparatus comprising: an image processing apparatus that inspects the imaging target by image processing of a captured image captured by the imaging apparatus.

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