JP2016180701A5 - - Google Patents

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JP2016180701A5
JP2016180701A5 JP2015061370A JP2015061370A JP2016180701A5 JP 2016180701 A5 JP2016180701 A5 JP 2016180701A5 JP 2015061370 A JP2015061370 A JP 2015061370A JP 2015061370 A JP2015061370 A JP 2015061370A JP 2016180701 A5 JP2016180701 A5 JP 2016180701A5
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foreign matter
sensors
inspection
matter contamination
inspection object
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JP2015061370A
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JP6674169B2 (en
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Claims (14)

検査対象物を消磁する消磁器と、
消磁後の検査対象物に混入した金属に渦電流を生じさせて渦電流による磁界に基づき磁気インピーダンスを検出する磁気インピーダンスセンサと、
前記磁気インピーダンスセンサの出力に基づき前記検査対象物に混入した金属異物を検出する検出手段と
を具備することを特徴とする異物混入検査装置。 A degausser that degausses the inspection object;
A magnetic impedance sensor for detecting magnetic impedance based on a magnetic field caused by eddy current by generating eddy current in the metal mixed in the inspection object after demagnetization;
A foreign matter contamination inspection apparatus, comprising: a detecting unit that detects metal foreign matter mixed in the inspection object based on an output of the magnetic impedance sensor. 磁気インピーダンスセンサは、渦電流発生部を有し、この渦電流発生部に交流を印加して渦電流を生じさせることを特徴とする請求項１に記載の異物混入検査装置。   2. The foreign matter contamination inspection apparatus according to claim 1, wherein the magnetic impedance sensor includes an eddy current generation unit, and generates an eddy current by applying an alternating current to the eddy current generation unit. 検査対象物は磁性体であり、金属異物は非磁性体であることを特徴とする請求項１または請求項２に記載の異物混入検査装置。   The foreign matter contamination inspection apparatus according to claim 1 or 2, wherein the inspection object is a magnetic material, and the metal foreign material is a nonmagnetic material. 検査対象物は所定幅を有し、１つまたは複数の磁気インピーダンスセンサを用い、前記所定幅の幅方向と直交する方向にスキャンすることを特徴とする請求項１乃至３のいずれか１項に記載の異物混入検査装置。   The inspection object has a predetermined width, and scans in a direction orthogonal to the width direction of the predetermined width using one or a plurality of magnetic impedance sensors. The foreign matter contamination inspection device described. 検査対象物は所定幅を有し、複数の磁気インピーダンスセンサを用い、２つのセンサが干渉しない距離に隣接するセンサを離間させて配置して検出を行うことを特徴とする請求項１乃至３のいずれか１項に記載の異物混入検査装置。   The inspection object has a predetermined width, and a plurality of magneto-impedance sensors are used, and detection is performed by arranging the sensors adjacent to each other at a distance where the two sensors do not interfere with each other. The foreign matter contamination inspection apparatus according to any one of the above items. 前記所定幅の幅方向と直交する方向にスキャンし、前記複数のセンサを、前記幅方向に直線状に並べて、一つおきにスキャン方向にジグザグに並べて、配置して検出を行うことを特徴とする請求項５に記載の異物混入検査装置。   Scanning in a direction perpendicular to the width direction of the predetermined width, and detecting the plurality of sensors arranged in a straight line in the width direction and arranged in a zigzag manner in every other scan direction. The foreign matter contamination inspection apparatus according to claim 5. 前記所定幅の幅方向と直交する方向にスキャンし、隣接するセンサをスキャン方向に所定寸法ずつずらして直線状に並べて、配置して検出を行うことを特徴とする請求項５に記載の異物混入検査装置。   6. Foreign matter contamination according to claim 5, wherein scanning is performed in a direction perpendicular to the width direction of the predetermined width, and adjacent sensors are detected by being arranged in a straight line with a predetermined dimension shifted in the scanning direction. Inspection device. 検査対象物を消磁する消磁ステップと、
消磁後の検査対象物に混入した金属に渦電流を生じさせて渦電流による磁界に基づき磁気インピーダンスセンサにより磁気インピーダンスを検出する磁気インピーダンス検出ステップと、
前記磁気インピーダンスセンサの出力に基づき前記検査対象物に混入した金属異物を検出する異物検出ステップと
を具備することを特徴とする異物混入検査方法。 A degaussing step for degaussing the inspection object;
A magnetic impedance detection step of generating an eddy current in the metal mixed in the inspection object after demagnetization and detecting the magnetic impedance by a magnetic impedance sensor based on the magnetic field due to the eddy current;
A foreign matter detection method, comprising: a foreign matter detection step of detecting a metallic foreign matter mixed in the inspection object based on an output of the magnetic impedance sensor. 磁気インピーダンス検出ステップでは、磁気インピーダンスセンサの渦電流発生部に交流を印加して渦電流を生じさせて検出を行うことを特徴とする請求項８に記載の異物混入検査方法。   9. The foreign matter contamination inspection method according to claim 8, wherein, in the magnetic impedance detection step, detection is performed by applying an alternating current to an eddy current generator of the magnetic impedance sensor to generate an eddy current. 検査対象物は磁性体であり、金属異物は非磁性体であることを特徴とする請求項８または請求項９に記載の異物混入検査方法。   10. The foreign matter contamination inspection method according to claim 8, wherein the inspection object is a magnetic material, and the metal foreign material is a non-magnetic material. 検査対象物は所定幅を有し、１つまたは複数の磁気インピーダンスセンサを用い、前記所定幅の幅方向と直交する方向にスキャンすることにより検査を行うことを特徴とする請求項８乃至１０のいずれか１項に記載の異物混入検査方法。   11. The inspection object has a predetermined width, and the inspection is performed by scanning in a direction orthogonal to the width direction of the predetermined width using one or a plurality of magneto-impedance sensors. The foreign matter contamination inspection method according to any one of the above items. 検査対象物は所定幅を有し、複数の磁気インピーダンスセンサを用い、２つのセンサが干渉しない距離に隣接するセンサを離間させて配置して検出を行うことを特徴とする請求項８乃至１０のいずれか１項に記載の異物混入検査方法。   The inspection object has a predetermined width, and a plurality of magneto-impedance sensors are used, and detection is performed by arranging sensors adjacent to each other at a distance where the two sensors do not interfere with each other. The foreign matter contamination inspection method according to any one of the above items. 前記所定幅の幅方向と直交する方向にスキャンし、前記複数のセンサを、前記幅方向に直線状に並べて、一つおきにスキャン方向にジグザグに並べて、配置して検出を行うことを特徴とする請求項１２に記載の異物混入検査方法。   Scanning in a direction perpendicular to the width direction of the predetermined width, and detecting the plurality of sensors arranged in a straight line in the width direction and arranged in a zigzag manner in every other scan direction. The foreign matter contamination inspection method according to claim 12. 前記所定幅の幅方向と直交する方向にスキャンし、隣接するセンサをスキャン方向に所定寸法ずつずらして直線状に並べて、配置して検出を行うことを特徴とする請求項１２に記載の異物混入検査方法。
13. The foreign matter contamination according to claim 12, wherein scanning is performed in a direction perpendicular to the width direction of the predetermined width, and adjacent sensors are detected by being arranged in a straight line with a predetermined dimension shifted in the scanning direction. Inspection method.
JP2015061370A 2015-03-24 2015-03-24 Inspection apparatus for foreign matter and its method Active JP6674169B2 (en)

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JP2016180701A5 true JP2016180701A5 (en) 2018-05-17
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JP6842164B2 (en) * 2017-03-03 2021-03-17 宮城県 Magnetic foreign matter inspection device and magnetic foreign matter inspection system
CN112415447B (en) * 2020-11-03 2023-08-22 内蒙古工业大学 High-frequency magnetic impedance testing device and method

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DE3720686A1 (en) * 1987-06-23 1989-01-05 Foerster Inst Dr Friedrich METHOD FOR EXAMINING AN OBJECT
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JP2001305108A (en) * 2000-04-21 2001-10-31 Daido Steel Co Ltd Eddy current flaw detector
JP2001318079A (en) * 2000-05-01 2001-11-16 Mitsubishi Heavy Ind Ltd Method and device for detecting foreign matter in fluid
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