JP2016178865A - Oscillatory wave driving device and image blur correction device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce an output loss caused by a load of frictional force due to contact with a mobile in an oscillatory wave driving device which does not contribute to movement of the mobile.SOLUTION: An oscillatory wave driving device includes a vibrator having an electromechanical energy conversion element and a support member supporting the vibrator, makes vibration excited in the vibrator, and makes the mobile in contact with the vibrator move by frictional force. The vibrator has a moving mechanism capable of moving in a second direction intersecting a first direction in which the vibrator drives in a plane parallel to a surface where the vibrator and the mobile contact with each other.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a vibration wave drive device and an image shake correction device using the same.

  Many vibration wave driving devices have been proposed that excite vibrations in a vibrator and move a moving body that is in pressure contact with the vibrator. These are positioned as important functional components in an optical instrument that requires particularly precise operation. Among them, linear motion type (a type that can move the moving body in a straight line) multiple vibration wave drive devices are arranged to combine the drive, enabling the moving body to move in the two-dimensional direction, and image touch correction Some devices are used as devices (see Patent Document 1 and Patent Document 2).

  However, the method of combining the driving by the plurality of vibration wave driving devices has the following important problems to be solved.

  For example, depending on the moving direction of the moving body, the moving direction of the moving body and the driving direction of any of the plurality of vibration wave driving devices may intersect at an angle or near an orthogonal angle. is there. In this case, the vibration wave driving device that intersects the moving direction orthogonally or at an angle close to the orthogonal direction cannot contribute to driving, and the frictional force due to the contact between the moving body and the vibration wave driving device causes the load of movement of the moving body. Since energy is lost, output loss occurs. For example, when used as a drive device of an image shake correction apparatus, the characteristics of the image shake correction apparatus are deteriorated.

  In order to deal with such problems, Patent Document 1 and Patent Document 2 described above disclose a configuration in which vibration in a pressurizing direction with a moving body is excited to reduce frictional force and reduce output loss.

JP 2009-031353 A Japanese Patent No. 0391936

  However, the means for reducing the output loss in the vibration wave driving device and the image shake correction device described above have the effect of reducing the output loss, but excite vibrations in the vibration wave driving device that does not contribute to the movement of the moving body. Electric energy is required, and power consumption due to this is increased. Moreover, unless the magnitude of vibration in the pressurizing direction with the moving body is increased to a certain level or more, it is difficult to effectively suppress output loss. For this reason, it is necessary to generate a vibration having a large amplitude of a certain value or more, and there is a problem that power consumption increases.

  An object of the present invention is to provide a vibration wave driving device and an image shake correction device that can reduce the previous output loss without increasing power consumption.

  A first configuration of the vibration wave driving device according to claim 1 of the present application includes a vibrator having an electromechanical energy conversion element and a support member that supports the vibrator, and excites vibration in the vibrator. Then, in the vibration wave driving apparatus that moves the moving body that contacts the vibrator by a frictional force, the first driving the vibrator is performed in a plane parallel to the surface that the vibrator and the moving body are in contact with. The vibrator has a mechanism for moving in a second direction that intersects the direction.

  According to the present invention, when a force is applied to the vibrator in a direction different from the drive direction, the power consumption of the vibration wave drive device and the image shake correction device is achieved by having a mechanism that moves in the direction in which the force is applied. The output loss can be reduced without increasing the value.

The perspective view of the vibration wave drive device of 1st Example The figure which shows arrangement | positioning of the mobile body 5 and the vibration wave drive device 6 of a 1st Example. Sectional drawing of the camera as an imaging device according to the first embodiment Vibration mode of the vibrator The perspective view of the vibration wave drive device which concerns on 2nd Example. The perspective view of the vibration wave drive device which concerns on a 3rd Example. The perspective view of the vibration wave drive device which concerns on a 4th Example. The perspective view of the vibration wave drive device which concerns on a 5th Example. The perspective view of the vibration wave drive device which concerns on a 6th Example. The perspective view of the vibration wave drive device which concerns on Example 8. FIG. The perspective view of the vibration wave drive device which concerns on Example 8. FIG. The figure which shows arrangement | positioning of the mobile body 5 and the vibration wave drive device 6 of a 7th Example.

  Embodiments of the present invention will be described below.

  The present invention includes a vibrator having an electromechanical energy conversion element, and a support member that supports the vibrator, and excites vibration in the vibrator and contacts the vibrator by a frictional force. In the vibration wave driving apparatus for moving the vibrator, the vibrator has a second direction intersecting a first direction driven by the vibrator in a plane parallel to a surface in contact with the vibrator and the moving body. It has a moving mechanism which can move to.

  In the present invention, the “surface where the vibrator and the moving body come into contact” means a virtual plane including a plurality of contact points where the vibrator and the vibrator come into contact. The “plane parallel to the surface where the vibrator and the moving body contact” means a virtual plane parallel to the above-described virtual “surface where the vibrator and the moving body contact”. Exists. These planes are planes that are defined to clearly grasp the first direction and the second direction, which are directions for defining the moving direction of the moving mechanism of the present invention. In the present invention, the first direction is a direction in which the vibrator moves the moving body, and is also referred to as a driving direction. In addition, the second direction of the present invention is a direction that can be moved by the moving mechanism of the present invention, and is also referred to as a “drilling direction”, and is applied when a force acts in a direction that intersects the moving direction of the original moving body. It means the direction of moving (dodging) without resisting force. The moving mechanism of the present invention is characterized in that it can move in the second direction defined by the above configuration.

  In the present invention, the vibrator can be selectively moved in the second direction (not substantially moved in the first direction) by providing a guide member that can move only in the second direction. realizable. Furthermore, the vibrator can be supported by an elastic member (typically a spring member) and the elastic member can be easily displaced only in a specific direction.

  In the present invention, the state in which the “second direction intersecting the first direction” exists includes a component in a direction different from the moving direction that is the first direction (different from the first direction). This means a state in which a force moving in the direction is generated. As described above, a state in which a force moving in a direction different from the moving direction is acting causes output loss as described above. The angle at which the first direction and the second direction intersect typically has the highest possibility of causing an output loss when it is 90 °, but if there is even a slight intersection, the output according to the intersection angle Loss can occur.

  The vibrator according to the present invention includes a diaphragm (also referred to as a vibrating body) and an electromechanical energy conversion element (typically piezoelectric ceramics), and applies a predetermined electric field to the electromechanical energy conversion element. The desired vibration can be excited.

  In the present invention, the direct acting vibration wave driving device means a vibration wave driving device that can be driven linearly, and is also called a linear vibration wave driving device. The single body is configured to move the moving body (also called the driven body) linearly, but the moving body can be moved in a desired direction by combining a plurality of direct-acting vibration wave driving devices. it can.

  EXAMPLES The present invention will be specifically described below with reference to examples, but the present invention is not limited to these descriptions. In addition, all the “directions” in the embodiments mean directions in “a plane parallel to the surface where the vibrator and the moving body contact”.

  FIG. 3 is a cross-sectional view of a camera as an imaging apparatus according to the first embodiment of the present invention. The camera shown in FIG. 3 has a moving image and still image shooting function. Reference numeral 1 denotes a lens barrel, and 2 denotes a camera body. Reference numeral 3 denotes an image blur correction device 3 built in the lens barrel 1. The image blur correction device 3 includes an optical lens 4, a moving body 5 that holds the optical lens 4, and a vibration wave driving device 6 that moves the moving body 5.

  Although not shown in FIG. 3, the lens barrel 1 includes an optical system other than the optical lens 4, an acceleration sensor that detects shake of the lens barrel 1, and an encoder that detects two-dimensional movement of the moving body. Provided. Furthermore, a power supply that supplies electric energy to the vibration wave driving device 6 and a control unit that incorporates a control method that processes the signal output from the acceleration sensor and the signal output from the encoder to operate the power supply are provided.

  There is an image sensor 7 in the camera body 2. Light from the subject passes through an optical system including the optical lens 4 in the lens barrel 1 and enters the image sensor 7 in the camera body 2. The image blur can be corrected by moving the optical lens 4 by the image blur correction device 6 based on the signal from the acceleration sensor.

  FIG. 2 shows the arrangement of the moving body 5 and the vibration wave driving device 6 as viewed from the image sensor 7 side. The moving body 5 is made of heat-treated stainless steel with high wear resistance, and is processed into an annular shape. An optical lens 4 for image touch correction is held at the center. The vibration wave driving device 6 is arranged avoiding the optical lens 4 in the radial direction so as not to disturb the optical path. Four vibration wave driving devices 6 (6A, 6B, 6C, 6D) are arranged so as to equally divide the circumferential direction.

  The vibration wave drive device 6 is capable of linear drive forward drive and reverse drive, and the respective drive directions are indicated by arrows 8. The driving directions of the vibration wave driving devices 6A and 6C are the X direction in the drawing, and the driving directions of the vibration wave driving devices 6B and 6D are the Y direction in the drawing. These are arranged so that the driving directions are orthogonal. By combining these drives, the moving body 5 can be moved two-dimensionally in the XY plane. In this embodiment, the two-dimensional movement of the moving body 5 is made possible by the vibration wave driving device 6 whose driving directions are orthogonal to each other. However, if the vibration wave driving device 6 is arranged so that the driving directions intersect, Similar to the embodiment, the two-dimensional moving body 5 can be moved.

  FIG. 1 is a perspective view of a vibration wave driving device 6 of the present invention. The coordinate system in the figure shows the orthogonal coordinate system as a right-handed system.

  Reference numeral 9 denotes a rectangular plate-shaped vibrator. The vibrator 9 includes a vibration plate 10 having two protrusions 12 and a piezoelectric ceramic 11 that is an electromechanical energy conversion element fixed to the vibration plate 10. The diaphragm 10 has a beam portion and a vibrator fixing portion 13. The two protrusions 12 are arranged side by side in the longitudinal direction of the vibrator 9.

  Reference numeral 14 denotes a sleeve fixed to the vibrator fixing portion 13, and reference numeral 15 denotes a bar whose end is fixed to the lens barrel 1. A hole is opened in the sleeve 14, and a bar 15 passes through the hole, and a combination of these holes serves as a guide member. The guide member in the present invention refers to a member that allows movement in a specific direction and restrains movement in other directions. The vibrator 9 is movable in the longitudinal direction of the bar 15. Further, grease is applied to the contact surface between the sleeve 14 and the bar 15, and the sliding resistance is extremely small. The upper surface of the protrusion 12 is in contact with the moving body 5, and the protrusion 15 is pressed in the direction of the moving body 5 by a bar 15 with a coil spring (not shown). Thereby, the protrusion 12 and the moving body 5 are in pressure contact.

  An alternating voltage is applied to the piezoelectric ceramic 10 from a power source to excite the vibrator 9 in two vibration modes. 4A and 4B show two vibration modes. The vibration mode in FIG. 4A is also referred to as an A mode. Moreover, the vibration mode of FIG.4 (b) is also called B mode. The vibration mode shown in FIG. 4A is a vibration mode (A mode) in which the upper surface of the protrusion 12 vibrates in the longitudinal direction of the vibrator 9 (also referred to as a feed direction: X direction in the figure). The vibration mode shown in FIG. 4B is a vibration mode (B mode) in which the upper surface of the protrusion 12 vibrates in a contact direction (also referred to as a push-up direction) with the moving body 5. The alternating voltage is set so as to excite vibrations in these two vibration modes at a time phase of approximately 90 °. Here, the meaning of “approximately 90 °” means that even if it is not exactly 90 °, it is allowed within a range where necessary vibrations are synthesized. Hereinafter, the expression “approximately” in the present invention has the same meaning. As a result, the upper surface of the protrusion 12 moves along an elliptical locus, and moves the moving body 5 in contact in one direction of the X direction in FIG. If the phase difference between the vibrations of the two vibration modes is approximately −90 °, the moving body 5 can be moved in the opposite direction.

  These moving directions are the driving directions (Y direction: first direction) of the vibration wave driving device 6 previously indicated by the arrow 8 in FIG.

  In this embodiment, the vibration wave driving device 6 has a guide member composed of a sleeve 14 and a bar 15 in a direction (second direction) orthogonal to the driving direction (first direction). Thus, when the moving body 5 moves in the X direction (second direction), the vibration wave driving devices 6B and 6D move in the X direction as the moving body 5 moves. The movement in the X direction is not restricted at all, and the resistance can be substantially ignored. For this reason, from the vibration wave drive devices 6B and 6D, the force in the X direction acting on the moving body 5 can be made substantially zero, the movement of the moving body 5 is not hindered, and there is almost no output loss.

  In the present invention, it is not necessary to excite the vibration mode (A mode) vibration of FIG. 4A in the vibration wave driving devices 6B and 6D, and the voltage applied to the electromechanical energy conversion element 11 can be reduced. Therefore, the power consumption that has been consumed can be reduced. When the voltage applied to the electromechanical energy conversion element 11 is zero, the power consumption reduction effect is maximized.

  In the present embodiment, the case where the moving body 5 is moved in the X direction (second direction) when the moving body 5 is driven in the Y direction (first direction) is described with reference to FIG. Similarly, when the movable body 5 is driven in the X direction (first direction), the effect of the present invention can be obtained by providing a mechanism capable of moving the vibrator in the Y direction (second direction). . Further, when the X direction and the Y direction intersect at an angle other than 90 °, in any of the vibration wave driving devices 6 (6A, 6B, 6C, 6D), the driving direction and the moving direction of the moving body 5 intersect. Therefore, a frictional force component in a direction orthogonal to the driving direction is generated. Even in such a case, according to the present invention, output loss due to frictional force between the moving body 5 and the vibration wave driving device 6 can be suppressed.

  In the present embodiment, the moving body is moved two-dimensionally using only the vibration wave driving device 6, but a part thereof may be replaced with an electromagnetic motor that does not use contact. For example, the moving body 5 can be moved in the two-dimensional direction even if one electromagnetic motor and one vibration wave driving device 6 are arranged so that their driving directions are different.

  Moreover, although the vibration wave driving device of the present invention has shown the example in which the image blur correction device 3 is incorporated in the lens barrel 1, it may be built in the camera body 2 or may move the image sensor in the camera body. Even if it comprises, the effect similar to a present Example is acquired. Even if the shape and vibration mode of the vibrator 9 are different, the effect of the present invention can be obtained.

  Here, the problem when the prior art is used in this embodiment will be described with reference to FIG. For example, when the moving body 5 is moved in the X direction so that the image shakes in the X direction (second direction) and cancels out, the vibration wave driving devices 6B and 6D have the driving direction in the Y direction. Therefore, it does not contribute to driving. Further, since the moving body 5 and the vibration wave driving devices 6B and 6D are in pressure contact with each other, a frictional force is generated between them and the moving body 5 is prevented from moving in the X direction. In order to reduce the degree of this inhibition, the vibration mode vibration in which the upper surface of the protrusion 12 shown in FIG. 4A vibrates in the contact direction with the moving body 5 was excited. However, in order to sufficiently reduce the frictional force, it is necessary to cause a large amplitude. Therefore, it is necessary to generate a vibration with a large amplitude, and there is a problem that power consumption increases.

  FIG. 5A is a perspective view of a vibration wave driving device according to another embodiment of the present invention viewed from the protrusion 12 side. FIG. 5B is a perspective view of the vibration wave driving device as viewed from the opposite side of the protrusion 12. The coordinate system in the figure shows the orthogonal coordinate system as a right-handed system. This will be described with reference to both figures.

  In the present embodiment, the configuration of the vibrator and the fixing portion and the holding structure of the vibrator are different from those in the first embodiment. The holder 20 is coupled to the fixed portion 13 of the vibrator 9 and has a square frame shape. A spring 17 that is an elastic member is attached to the holder 20. The holder 20 holds the magnet 16 in the space between the vibrator 9 and the spring 17.

  The spring 17 is manufactured by pressing a sheet metal, and the material is a spring material made of stainless steel. However, the spring that can be employed in the present invention is not limited to this configuration. The spring 17 includes a Y-deformation spring 18 as a portion extending in the X direction in the drawing, which is fixed to the holder 20, and a portion extending in the Z direction in the drawing, and a fixing portion 19 at the tip. . A fixing portion 19 is fixed to the lens barrel 1 (not shown). The plate thickness direction of the Y deformation spring 18 is the Y direction in the figure, the spring rigidity is small in the Y direction (second direction), and the spring rigidity is large in the X direction (first direction).

  When the movable body 5, which is a magnetic body (not shown), is brought into contact with the protrusion 12, the vibrator 9 and the movable body 5 are pressurized by the magnet 16. Similar to the first embodiment, when a predetermined alternating voltage is applied to the piezoelectric ceramic 11, the movable body 5 can be driven in the X direction (first direction). When the moving body 5 is moved in the Y direction (second direction) by another actuator, the Y deformation spring portion 18 has a small spring rigidity in the Y direction, so that it is bent and deformed in the Y direction. 9 moves in the Y direction. At this time, the force in the Y direction applied from the vibrator 9 to the moving body 5 is an amount obtained by multiplying the amount of movement of the vibrator 9 in the Y direction by the spring rigidity of the Y deformation spring portion 18 in the Y direction. If the plate thickness of the Y-deformation spring portion 18 is made thin or thin, or a spring with low spring rigidity is used, this spring rigidity can be easily reduced, and the force that hinders the movement of the movable body 5 in the Y direction can be reduced. it can. In addition, since the spring stiffness of the Y deformation spring portion 18 is increased in the X direction of the vibration wave drive device, the movable body 5 can be driven in the X direction with little force loss. In the first embodiment, the guide member is used. However, in this embodiment, the leaf spring is used, and the effect of the present invention can be obtained with a simpler structure.

  FIG. 6 is a perspective view of a vibration wave driving device according to another embodiment of the present invention as viewed from the opposite side of the protrusion 12. The coordinate system in the figure shows the orthogonal coordinate system as a right-handed system.

  The present embodiment is different from the second embodiment in that two Y deformation springs 18 of the spring 17 are arranged in the Y direction (second direction) in the figure and there are two fixing portions 19 ahead. The two fixing portions 19 are fixed to the lens barrel 1 (not shown). This configuration is elastically a parallel crank mechanism in the Y direction (second direction). When the vibrator 9 receives a force in the Y direction from the moving body 5, the vibrator 9 hardly rotates in the XZ plane and moves mainly in the Y direction. In the present embodiment, similarly to the second embodiment, the Y-deformation spring 18 has a plate thickness direction in the Y direction (second direction) in the figure, and the spring rigidity is small in the Y direction. Thereby, the force which prevents the moving body 5 from moving in the Y direction can be reduced. Further, since the spring rigidity is increased in the X direction (first direction), the movable body 5 can be driven in the X direction with little loss of force.

  Further, when the moving body 5 moves in the Y direction by driving another actuator and the vibrator 9 moves in the Y direction, the vibrator 9 is rotated in the XZ plane by the elastic parallel crank mechanism. Exercise is less likely to occur. Accordingly, the amount of inclination of the protrusion 12 of the vibrator 9 with respect to the moving body 5 is suppressed, and the contact between the protrusion 12 and the moving body 5 can be stabilized.

  FIG. 7A is a perspective view of a vibration wave driving device according to another embodiment of the present invention as viewed from the opposite side of the protrusion 12. FIG. 7B is a perspective view of the vibration wave driving device as viewed from the opposite side of the protrusion 12. The coordinate system in the figure shows the orthogonal coordinate system as a right-handed system. This will be described with reference to both figures.

  The present embodiment is different from the second embodiment in that the Y deformation spring 18 and the fixing portion 19 of the spring 17 have the X direction (first direction) of the driving direction of the vibration wave driving device as the longitudinal direction. The plate thickness direction of the Y deformation spring 18 is the Y direction (second direction) in the drawing orthogonal to the drive direction of the vibration wave drive device, as in the second embodiment.

  In the present embodiment, similarly to the second embodiment, the Y-deformation spring 18 has a plate thickness direction in the Y direction in the figure, and the spring rigidity is small in the Y direction. Thereby, the force which prevents the moving body 5 from moving in the Y direction can be reduced. Further, since the spring rigidity is increased in the X direction, the movable body 5 can be driven in the X direction with little force loss. In this embodiment, since the spring 17 has the X direction as the longitudinal direction, the vibration wave driving device can be reduced in height.

  FIG. 8A is a perspective view of a vibration wave driving device according to another embodiment of the present invention as viewed from the opposite side of the protrusion 12. FIG. 8B is a perspective view of the vibration wave driving device viewed from the opposite side of the protrusion 12. The coordinate system in the figure shows the orthogonal coordinate system as a right-handed system. This will be described with reference to both figures.

  The present embodiment is different from the fourth embodiment in that two Y deformation springs 18 and fixing portions 19 of the spring 17 are arranged in the X direction of the driving direction of the vibration wave driving device. The plate thickness direction of the Y deformation spring 18 is the Y direction (second direction) in the figure orthogonal to the drive direction (first direction) of the vibration wave drive device, as in the fourth embodiment.

  In the present embodiment, similarly to the fourth embodiment, the thickness of the Y deformation spring 18 is the Y direction in the drawing, and the spring rigidity is small in the Y direction (second direction). Thereby, the force which prevents the moving body 5 from moving in the Y direction can be reduced. Further, since the spring rigidity is increased in the X direction (first direction), the movable body 5 can be driven in the X direction with little loss of force.

  Further, when the moving body 5 is moved in the Y direction by driving another actuator and the vibrator 9 is moved in the Y direction, the rigidity against rotation in the XY plane is increased. However, it is difficult to get up. As a result, it is possible to reduce the amount that the driving direction of the vibration wave driving device rotates in the XY plane in the drawing.

  FIG. 9A is a perspective view of a vibration wave driving device according to another embodiment of the present invention viewed from the opposite side of the protrusion 12. FIG. 9B is a perspective view of the vibration wave driving device viewed from the opposite side of the protrusion 12. The coordinate system in the figure shows the orthogonal coordinate system as a right-handed system. This will be described with reference to both figures.

  The present embodiment is different from the fifth embodiment in that two Y deformation springs 18 and fixing portions 19 of the spring 17 are arranged in the Y direction in the drawing orthogonal to the driving direction of the vibration wave driving device. If two Y deformation springs 18 are arranged in the X direction of the driving direction as in the fifth embodiment, when the vibrator 9 moves greatly in the Y direction (second direction), the Y deformation spring 18 is in the longitudinal direction. It will be in the state pulled by. Thereby, the movement of the vibrator 9 in the Y direction is hindered, and the movement of the moving body 5 in the Y direction may be restricted when a certain amount of movement is required. On the other hand, in this embodiment, two Y deformation springs 18 are arranged in the Y direction. Even if the vibrator 9 moves greatly in the Y direction (second direction), the Y deformation spring 18 can be kept in a bending deformation state, and the phenomenon that the Y deformation spring 18 is pulled in the longitudinal direction can be suppressed.

  Further, the spring 17 of the present embodiment has a buffer portion 21 whose plate thickness direction is the Z direction and whose longitudinal direction is the X direction. The buffer portion 17 has a configuration in which the vibrator 9 can easily rotate in the YZ plane and the XZ plane and translate in the Z direction. Even if the vibration wave driving device is fixed to the mounting body in these directions with an error with respect to the unillustrated moving body 5, the upper surface of the protrusion 12 can easily follow the surface of the moving body 5.

  The plate thickness direction of the Y deformation spring 18 is the Y direction (second direction) in the figure orthogonal to the drive direction (first direction) of the vibration wave driving device, as in the fifth embodiment. In the present embodiment, similarly to the fifth embodiment, the Y-deformation spring 18 has the plate thickness direction in the Y direction in the figure, and the spring rigidity is small in the Y direction. Thereby, the force which prevents the moving body 5 from moving in the Y direction can be reduced. Further, since the spring rigidity is increased in the X direction (first direction), the movable body 5 can be driven in the X direction with little loss of force.

  The present embodiment is different from the first embodiment in that the limiting member 24 is provided.

  This will be described with reference to FIG. FIG. 12 shows the arrangement of the moving body 5 and the vibration wave driving device 6. It is the figure seen from the image pick-up element 7 side in FIG.

  The limiting member 24 has a rectangular parallelepiped shape and is fixed to the moving body 5. The restricting member 24 moves the sleeve 14 to which the vibrator 9 of each vibration wave driving device 6 (6A, 6B, 6C, 6D) is fixed in a direction (second direction) orthogonal to the driving direction 8 (first direction). Are arranged two by two so as to be sandwiched in the direction of In the vibration wave driving device 6 </ b> A, the side surface along the X direction of the sleeve 14 and the side surface along the X direction of the limiting member 24 constitute an X direction guide. Accordingly, the relative movement amount in the Y direction orthogonal to the vibrator 9 and the sleeve 14 with respect to the moving body 5 is allowed (movable) while the relative movement amount in the Y direction orthogonal thereto is limited. Yes. Similarly, in other vibration wave driving devices (6B, 6C, 6D), relative movement in the driving direction 8 of the vibrator 9 and the sleeve 14 with respect to the moving body 5 is allowed, and the relative movement amount in the direction orthogonal thereto is limited. Has been.

  Here, the effect of the limiting member 24 will be described.

  The driving direction 8 of the vibration wave driving device 6A is the X direction, and normally the relative movement in the Y direction between the moving body 5 and the vibrator 9 does not occur. In this case, when a desired amount of movement is given to the movable body 5, the amount of movement of the vibrator 9 and the sleeve 14 in the Y direction with respect to the bar 15 matches the desired amount of movement of the movable body 5.

  However, relative movement due to slippage in the Y direction between the moving body 5 and the vibrator 9 may occur due to a shift in the driving direction or disturbance due to an assembly error or the like. In this case, the amount of movement of the vibrator 9 and the sleeve 14 in the Y direction with respect to the bar 15 is the amount obtained by adding the relative movement amount due to the sliding of the moving body 5 and the vibrator 9 to the desired moving amount of the moving body 5. Become.

  When many relative movements due to this slip occur repeatedly, the relative movement amounts in the Y direction of the moving body 5, the vibrator 9, and the sleeve 14 may increase.

  If this becomes too large, the guide member constituted by the sleeve 14 and the bar 15 hits, and an unnecessary force for changing the posture acts on the vibrator 9. This causes problems such as unstable contact between the moving body 5 and the vibrator 9.

  In this embodiment, the relative movement amount of the vibrator 9 and the sleeve 14 and the moving body 5 in the Y direction is limited by the limiting member 24. Thereby, the amount of movement of the vibrator 9 and the sleeve 14 in the Y direction with respect to the bar 15 can be limited, and the above-described problem can be prevented.

  The effect is the same in other vibration wave driving devices (6B, 6C, 6D).

  Further, the restricting member 24 is also effective in the vibration wave driving device 6 described in the second to sixth embodiments using the Y deformation spring 18.

  Here, a case will be described in which a guide in a direction orthogonal to the driving direction is configured by the side surface of the limiting member 24 and the side surface of the holder 20 to which the vibrator 9 is fixed.

  When a desired amount of movement is given to the moving body 5, a displacement of an amount obtained by adding a relative amount of movement due to the sliding of the moving body 5 and the vibrator 9 in the Y direction to the moving amount occurs in the Y deformation spring 18. If the amount of relative movement due to the sliding in the Y direction increases, the deformation reaction force of the Y deformation spring 18 increases, and the force that hinders the movement of the moving body 5 in the Y direction increases. In addition, if the Y deformation spring 18 is deformed so as to be plastically deformed, the force that hinders the movement of the movable body 5 in the Y direction further increases due to work hardening.

  If the limiting member 24 is provided and the relative movement amount of the vibrator 9 in the Y direction with respect to the moving body 5 is limited as in this embodiment, an effect of reducing the deformation of the Y deformation spring 18 can be obtained. In the present embodiment, as the limiting mechanism for the relative movement amount orthogonal to the driving direction of the vibrator 9 with respect to the moving body 5, the configuration using the limiting member 24 and the sleeve 14 and the configuration using the limiting member 24 and the holder 20 are described. However, the present invention is not limited to this, and other configurations such as a bar and a sleeve may be used. Further, a concave portion having a groove along the driving direction of the vibration wave driving device 6 may be provided in the moving body 5, and a sliding guide may be configured by the concave portion and the side surface of the protruding portion 12 of the vibrator 9. As described above, it is only necessary to have a limiting mechanism capable of limiting the relative movement amount orthogonal to the driving direction of the vibrator 9 with respect to the moving body 5, and the configuration of the limiting mechanism is not limited.

  In Examples 1 to 7, the configuration is such that a guide member or a leaf spring is used. However, there are other configurations of the embodiment that achieve the effects of the present invention. For example, as shown in FIGS. 10A and 10B, a round bar 22 having a thin wire diameter is arranged on the spring 17 in the X direction in the driving direction of the vibration wave driving device, and both ends thereof are not shown. It can be fixed to the lens barrel 1. The coordinate system in the figure shows the orthogonal coordinate system as a right-handed system.

  In this configuration, the vibrator 9 is easy to be rotated about the round bar 22 as an axis. When the moving body 5 is moved in the Y direction (second direction) by another actuator, the vibrator 9 is rotated so that the upper surface of the protrusion 12 moves in the Y direction so as not to obstruct it. It has become.

  As another example, two wires 23 are arranged in the X direction in the drawing shown in FIGS. 11 (a) and 11 (b), and both ends thereof are attached to the lens barrel 1 (not shown). There is also an example of fixing. The coordinate system in the figure shows the orthogonal coordinate system as a right-handed system. In this configuration, particularly by adjusting the tension applied to the two wires 23, it is possible to easily adjust the rigidity with respect to the movement of the vibrator 9 in the Y direction (second direction).

  Also in these examples, since the vibrator 9 is configured to easily move in the Y direction, when the moving body 5 is moved in the Y direction by another actuator, an effect that does not hinder it is obtained. It is done.

  Moreover, as a thing with which the effect of this invention is acquired, the protrusion part 12 of the vibrator | oscillator 9 which contacts the mobile body 5 does not need to be a protrusion shape. Furthermore, it is not the structure which the upper surface contacts, For example, a chamfering shape may be provided in the front-end | tip of the projection part 12, and the chamfering inclined surface may be made to contact the mobile body 5, and the front-end | tip of the projection part 12 is made into R shape. It may be.

  Furthermore, the main deformation direction of the Y-deformation spring is set to the Y direction orthogonal to the X direction in each of the drawings in order to help understanding of the explanation. If there is a component that moves, the effect of the present invention can be obtained.

DESCRIPTION OF SYMBOLS 1 Lens barrel 2 Camera body 3 Image shake correction apparatus 4 Optical lens 5 Moving body 6 Vibration wave drive device 7 Imaging element 8 Driving direction of vibration wave drive device 9 Vibrator 10 Diaphragm 11 Piezoelectric ceramics 12 Protrusion part 13 Vibrator fixation Part 14 Sleeve 15 Bar 16 Magnet 17 Spring 18 Y Deformation Spring 19 Fixed part 20 Holder 21 Buffer part 22 Round bar 23 Wire 24 Restriction member

Claims (13)

A vibrator having an electromechanical energy conversion element;
A support member for supporting the vibrator,
In a vibration wave driving device that excites vibration in the vibrator and moves a moving body that contacts the vibrator by a frictional force.
The vibrator is in a plane parallel to a surface where the vibrator and the moving body are in contact with each other.
A vibration wave driving device comprising a moving mechanism capable of moving in a second direction intersecting with a first direction driven by the vibrator. A mechanism by which the vibrator can move is
The vibration wave driving device according to claim 1, further comprising a guide member that regulates a moving direction of the vibrator. A mechanism by which the vibrator can move is
The vibration wave driving device according to claim 1, further comprising an elastic member. The spring rigidity of the elastic member is
Than the spring stiffness of the vibrator in the first direction,
4. The vibration wave driving device according to claim 3, wherein the spring rigidity in the second direction is small. The vibration wave driving device according to claim 4, wherein the elastic member includes a plate portion. The vibration wave driving device according to claim 5, wherein a plate thickness direction of the plate portion is the second direction.   The vibration wave driving device according to claim 6, wherein the mechanism capable of moving the vibrator includes a configuration in which a plurality of the plate portions are arranged in the first direction. The vibration wave driving device according to claim 6, comprising a configuration in which a plurality of the plate portions are arranged in the second direction. A plurality of the vibrators;
By synthesizing displacement or driving force of the plurality of vibrators,
9. The vibration wave driving device according to claim 1, wherein a moving body in contact with the plurality of vibrators is moved. The vibration wave driving device according to claim 9, wherein the plurality of vibrators include vibrators having different driving directions. The vibration wave driving device according to claim 10, wherein the plurality of vibrators include vibrators whose driving directions are orthogonal to each other. 12. The vibration wave driving device according to claim 1, further comprising a limiting mechanism that limits a relative movement amount of the vibrator and the moving body in the second direction.   An image shake correction apparatus comprising: the vibration wave driving device according to claim 1; an optical lens or an image sensor; a control unit; and a power source.

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