JP2016140180A - Vibration type driving device and apparatus using the same as driving source - Google Patents

Abstract

PROBLEM TO BE SOLVED: To suppress obstruction in vibration of a piezoelectric element due to upsizing of a flexible substrate without forming a gap between the piezoelectric element and the flexible substrate in a vibration type driving device.SOLUTION: A vibration type driving device 100 has a vibrator 109 including an electric/mechanical energy conversion element 103 and an elastic body 102 and a flexibly substrate 104 including a fixed substrate section 104e fixed on the electric/mechanical energy conversion element, and relatively moves the vibrator and a contactor 101 coming into contact with the elastic member by exciting vibration on the elastic member by the electric/mechanical energy conversion element. The fixed substrate portion has rigidity reduction sections 140a, 140b, 140c for reducing rigidity of a first section including positions of antinodes 122a, 122b, 122c of vibration out of the fixed substrate section lower than the rigidity of a second section different from the first section.SELECTED DRAWING: Figure 6

Description

  The present invention relates to a vibration type driving device in which a vibration body excited by an electro-mechanical energy conversion element and a contact body in contact with the vibration body are relatively moved.

  In the vibration type drive device as described above, a piezoelectric element as an electro-mechanical energy conversion element is fixed to an elastic body to form a vibrating body, and an alternating voltage is applied to the piezoelectric element to excite vibration in the vibrating body. . The voltage is applied to the piezoelectric element through a flexible substrate fixed to the electrode of the piezoelectric element.

  In order to prevent the piezoelectric element from cracking when the flexible substrate is fixed to the piezoelectric element, it is desirable to make the flexible substrate as large as possible. However, when a large flexible substrate is fixed to the piezoelectric element, vibration of the piezoelectric element is hindered.

  Patent Document 1 discloses a method of providing a gap between a portion of a piezoelectric element having a large vibration amplitude and a flexible substrate as a method of suppressing inhibition of the vibration of the piezoelectric element by the flexible substrate.

JP 2013-201887 A

  However, in the method disclosed in Patent Document 1, since there is a gap between the piezoelectric element and the flexible substrate, there is a possibility that the vibrating piezoelectric element and the flexible substrate collide with each other to generate abnormal noise.

  The present invention provides a vibration type driving device that can suppress the inhibition of vibration of a piezoelectric element caused by enlarging the flexible substrate without providing a gap between the piezoelectric element and the flexible substrate.

  A vibration type driving apparatus according to one aspect of the present invention includes a vibrating body including an electro-mechanical energy conversion element and an elastic member, and a flexible substrate including a fixed substrate portion fixed to the electro-mechanical energy conversion element. By exciting vibration in the elastic member by the electromechanical energy conversion element, the vibration body and the contact body in contact with the elastic member are relatively moved. The fixed substrate portion includes a rigidity reducing unit that lowers the rigidity of the first portion including the position of the antinode of the fixed substrate portion to be lower than the rigidity of the second portion different from the first portion. It is characterized by that.

  Note that various devices including the vibration type driving device and a driven member driven by a driving force from the vibration type driving device also constitute another aspect of the present invention.

  According to the present invention, by providing the rigidity reducing portion in the fixed substrate portion of the flexible substrate, it is possible to suppress the inhibition of the vibration of the vibrating body when the flexible substrate is enlarged. Furthermore, since no gap is provided between the electromechanical energy conversion element and the fixed substrate portion, it is possible to avoid the generation of abnormal noise during vibration (during driving).

1 is an exploded perspective view of a vibrating body in a vibration type motor that is Embodiment 1 of the present invention. The top view and sectional drawing of the vibrating body shown in FIG. The perspective view which shows the elastic member and support member in the vibrating body shown in FIG. FIG. 3 is an xz sectional view and a yz sectional view of the vibration type motor of the first embodiment. The figure which shows the position of the node and antinode of the vibration in two bending modes of the said vibrating body. FIG. 3 is a diagram illustrating a shape of a flexible substrate in the first embodiment. The graph which shows the magnitude | size of the distortion in the said two bending modes. The figure which shows the shape of the flexible substrate in Example 2 of this invention. The figure which shows the shape of the flexible substrate in Example 3 of this invention. FIG. 9 is a diagram illustrating a configuration of a digital camera that is Embodiment 4 of the present invention.

  Embodiments of the present invention will be described below with reference to the drawings.

  FIG. 1 shows an exploded view of a vibration type motor (vibration type driving device) 100 that is Embodiment 1 of the present invention. FIGS. 2A and 2B and FIGS. 4A and 4B show a state where the members shown in FIG. 1 are assembled. Further, FIG. 3 shows some of the components of the vibration type motor 100.

  In the present embodiment, the direction in which the vibrating body 109 and the friction member 101 as a contact body described later relatively move by an elliptical motion generated in the vibrating body 109 described later is defined as an x direction. In addition, a pressing direction of the vibrating body 109 against the friction member 101 by a spring member 107 described later is defined as a z direction. In the z direction, the direction in which the vibrating body 109 faces the friction member 101 is defined as the −z direction, and the opposite direction is defined as the + z direction. Furthermore, a direction orthogonal to the x direction and the z direction is defined as the y direction. 2A and 2B show the vibration type motor 100 as viewed from the + z direction and the −y direction, respectively. 4A and 4B show an xz section and a yz section of the vibration type motor 100, respectively.

  In this embodiment, a vibration type motor used as a lens driving actuator in an optical device such as a lens barrel or an interchangeable lens of a camera will be described as an example. However, the same configuration is applied to a vibration type motor for other uses. May be. In this embodiment, a linear type vibration type motor that linearly drives a movable part to be described later will be described. However, the same configuration is applied to other types of vibration type motors such as a ring type that rotates the movable part. May be.

  Reference numeral 110 denotes a fixed base that holds the entire unit of the vibration type motor 100. The friction member 101 has a contact surface 101a having a predetermined surface roughness. The friction member 101 is a prismatic member extending in the x direction, and both ends thereof are fixed to the fixing base 110 by two fixing screws 111.

  Reference numeral 102 denotes an elastic body (elastic member), as shown in FIG. 3 as viewed from the friction member 101 side (−z direction), in contact with the contact surface 101a of the friction member 101 at two locations in the x direction. Part 102b.

  Reference numeral 103 denotes a piezoelectric element as an electro-mechanical energy conversion element fixed to the elastic body 102 by using a fixing means such as an adhesive. The piezoelectric element 103 is formed by stacking and integrating a plurality of piezoelectric element films. In this embodiment, by applying two alternating voltages to the laminated type piezoelectric element 103, bending vibrations in two modes (vibration modes) having different directions are generated, and the elastic body to which the piezoelectric element 103 is fixed. 102 excites these two modes of bending vibration. At this time, by giving a predetermined phase difference to the phases of the bending vibrations in the two modes, an elliptical motion is generated in the contact portion 102b of the elastic body 102 as shown by an arrow in FIG. The application of the alternating voltage to the piezoelectric element 103 is performed through a flexible substrate, which will be described later, fixed to the piezoelectric element 103.

  The elastic body 102 and the piezoelectric element 103 constitute a vibrating body 109. Alternatively, the vibration type motor may be configured by only the vibrating body 109 excluding the friction member 101.

  Reference numeral 115 denotes a vibration blocking member that blocks the vibration of the piezoelectric element 103 from being transmitted to other components. In particular, the function of preventing the vibration from being transmitted to the small base 104 described later without attenuating the vibration of the piezoelectric element 103. Have The vibration blocking member 115 is formed of felt cloth or the like and makes surface contact with the piezoelectric element 103.

  The small base 104 is in contact with the vibration blocking member 115 at its lower surface 104a. A contact portion 104 b is provided at the upper center of the small base 104. The contact portion 104b has a shape in which an arc shown in the xz cross section of FIG.

  A pressure member 106 is fitted in a through hole portion 108a of a pressure receiving member 108 described later, and is held so as to be movable only in a direction substantially perpendicular to the contact surface 101a of the friction member 101. The lower end surface 106 a of the pressure member 106 is a flat surface and is in line contact with the contact portion 104 b of the small base 104 in the y direction. For this reason, the small base 104 can be inclined in the xz section. Even if the elastic body 102 is tilted due to dimensional errors, assembly errors, or disturbances during manufacturing, good pressurization between the contact portion 102 b of the elastic body 102 and the contact surface 101 a of the friction member 101 due to the tilt of the small base 104. The contact state can be maintained.

  Reference numeral 105 denotes a holding member that holds components around the vibrating body 109. The holding member 105 transmits a pressing force from a spring member 107 described later to the vibrating body 109 via the small base 104 and the vibration blocking member 115, and applies the elastic body 102 of the vibrating body 109 to the contact surface 101a of the friction member 101. Press contact. Hole portions 105a are provided at two locations in the x direction of the holding member 105, and shaft portions 104c provided at two locations in the x direction of the small base 104 are fitted into these hole portions 105a. Yes. The hole 105a has a long hole shape in which the width in the x direction is larger than the width in the y direction. Thereby, the small base 104 can be inclined to some extent in the xz section.

  The spring member 107 is a compression coil spring, one end of which is fixed by the pressure receiving member 108, and the other end transmits a pressing force to the pressure member 106. The pressing member 106 and the spring member 107 constitute a pressing unit.

  The pressure receiving member 108 has a disk shape in which the above-described through hole portion 108 a that is a round hole is formed at the center thereof, and a screw portion formed on the outer peripheral side surface thereof is screwed into the screw portion 105 b of the holding member 105. Is fixed.

  The holding member 105 described above is formed with a female screw portion 105b, and the male screw portion 108b provided on the outer peripheral side surface of the pressure receiving member 108 is screwed. The pressure can be adjusted by changing the screwing amount according to the component variation. The shaft portion 106b of the pressure member 106 is fitted into the fitting hole portion 108a formed at the center of the pressure receiving member 108. Thereby, the pressure member 106 can move only in the z direction with respect to the holding member 105.

  Reference numeral 114 denotes a support member that holds the elastic body 102 that contacts the friction member 101 and is fixed to the holding member 105 as shown in FIG. The support member 114 is formed of a frame-shaped thin plate, and has lower rigidity in the z direction than in the x direction. For this reason, the deformation of the support member 114 allows the elastic body 102 to freely move in the z direction with respect to the holding member 105, and has a function of fixing the position of the elastic body 102 in the x direction.

  Reference numeral 113 denotes a pressing plate. The support member 114 is fastened and fixed to the holding member 105 together with the holding plate 113 by two fixing screws 112. Further, the pressing plate 113 is disposed with a predetermined amount of gap from the vibrating body 109. For this reason, when the vibrating body 109 moves by a predetermined amount or more in the −z direction, the vibrating body 109 comes into contact with the pressing plate 113 and further movement is prevented. That is, the pressing plate 113 has a function of restricting the vibration body 109 from moving in the −z direction by a predetermined amount or more.

  The top plate 117 is fixed to the fixed base 110 with four screws 118. The top plate 117 receives the reaction in the + z direction received from the holding member 105 when the contact portion 102b of the elastic body 102 is brought into pressure contact with the contact surface 101a of the friction member 101 in the -z direction by the spring force of the spring member 107. Have a role to receive power.

  116 is a ball. The ball 116 is disposed between a groove 105 d formed in the holding member 105 that holds the vibrating body 109 and a groove 117 a formed in the top plate 117. The ball 116 rolls in both the groove portions 105d and 117a, thereby supporting the holding member 105 movably in the extending direction of the groove portions 105d and 117a with respect to the top plate 117. Thus, the holding member 105 can move in the x direction with a small frictional resistance with respect to the top plate 117 while receiving a reaction force of the applied pressure in the z direction. Further, when the ball 116 is engaged with both the groove portions 105d and 117a in the y direction, the position of the holding member 105 in the y direction with respect to the top plate 117 is determined. In the present embodiment, by disposing the four balls 116 in the xy plane, the holding member 105 is supported so as to be movable in the x direction without being inclined with respect to the top plate 117.

  A rectangular opening 117 a is formed at the center of the top plate 117, and the four corners of the top plate 117 are fixed to the fixed base 110 with four fixing screws 118. From the top plate 117, the protruding portion 105c of the holding member 105 that passes through the rectangular opening 117a protrudes in the + z direction.

  In the vibration type motor 100 configured as described above, the fixed base 110, the friction member 101, the fixed screws 111, the top plate 117, and the fixed screws 118 serve as fixed portions. On the other hand, there are a vibrating body 109, a vibration blocking member 115, a small base 104, a fixing screw 112, a pressing plate 113, a supporting member 114, a pressing member 106, a spring member 107, a pressing pressing member 108, and a holding member 105 for holding them. It becomes a movable part. That is, the vibration type motor 100 of the present embodiment is a self-propelled motor in which the vibrating body 109 itself that generates a driving force by an elliptical motion moves.

  When the vibration type motor 100 of this embodiment is incorporated in an optical device as a lens driving actuator, the holding member 105 is connected to a focus mechanism or a zoom mechanism.

  Next, the holding structure of the elastic body 102 by the support member 114 will be described in detail with reference to FIG. As described above, FIG. 3 shows the elastic body 102 and the support member 114 as viewed from the friction member 101 side (−z direction).

  Protrusions 102e are formed at two locations on the friction member 101 side in the joint 102a provided in the center of the elastic body 102. Further, a contact portion 102b, which is a convex portion having a smaller diameter than the projection portion 102e, is formed at the upper end of each projection portion 102e. The upper surface of the contact portion 102 b comes into contact with the contact surface 101 a of the friction member 101. These two contact portions 102b are formed on the same plane (xy surface), and are made flat by a finishing process such as polishing in the manufacturing process in order to improve the contact state with the contact surface 101a of the friction member 101. The

  The piezoelectric element 103 is fixed to the back surface of the bonding portion 102a (the surface opposite to the protruding portion 102e) by adhesion. However, the back surface of the joint 102a and the piezoelectric element 103 may be fixed by a method other than adhesion.

  At both ends of the elastic body 102, joint portions 102 c are formed on both sides of the support member 114 in the x direction and bonded to the step portions 114 a formed so as to protrude in the + z direction by bonding or welding. However, the joining method of the joining part 102c and the level | step-difference part 114a may be methods other than adhesion | attachment and welding. Two arm portions 102d are formed between the joint portion 102c and each joint portion 102a, and the joint portion 102a to which the piezoelectric element 103 is fixed is fixed to the support member 114 via the arm portion 102d. The The arm portion 102d has a thin shape with respect to the joint portion 102a and the joint portion 102c in order to make it difficult for vibration generated in the joint portion 102a to be transmitted to the joint portion 102c. In other words, the arm portion 102d realizes a connection configuration in which the support member 114 does not inhibit the vibration generated in the joint portion 102a.

  As described above, the support member 114 holding the elastic body 102 is fixed to the holding member 105, so that the free movement of the elastic body 102 in the z direction with respect to the holding member 105 is allowed, as described above. The position of the elastic body 102 is fixed. Accordingly, it is possible to press the elastic member 102 in the −z direction against the friction member 101, and it is possible to accurately drive the holding member 105 connected to the focus mechanism or the zoom mechanism in the x direction.

  5A and 5B show the positions of the nodes and antinodes of the two modes of bending vibration described above. FIG. 5A shows the positions of the nodes and antinodes in the bending vibration of the bending secondary mode (second vibration mode, secondary vibration mode) having three nodes and two antinodes in the x direction. By applying a high-frequency alternating voltage to the piezoelectric element 103, the bending vibration of the bending secondary mode is excited in the vibrating body 109. Reference numerals 121a, 121b, and 121c are bending vibration nodes in the bending secondary mode. 122a and 122b are antinodes of bending vibration in the bending secondary mode. In the nodes 121a, 121b, and 121c, the amplitude in the z direction is very small. Since the contact portion 102b of the elastic body 102 is provided at a position corresponding to the node 121a and the node 121b, it does not vibrate in the z direction due to the bending vibration of the bending secondary mode, but vibrates in the x direction. By providing the contact portion 102b at such a position, vibration in the x direction is excited in the contact portion 102b by bending vibration in the secondary bending mode in the x direction (hereinafter referred to as secondary bending vibration in the x direction).

  FIG. 5B shows the positions of the bending vibration nodes and antinodes of the bending primary mode (first vibration mode, primary vibration mode) having two nodes and one antinode in the y direction. 121d and 121e are bending vibration nodes in the primary bending mode. 122c is an antinode of bending vibration in the primary bending mode. In the nodes 121d and 121e, the amplitude in the z direction due to the bending vibration of the bending first mode is very small. On the other hand, in the antinode 122c, the amplitude in the z direction due to the bending vibration in the bending primary mode is large. Since the contact portion 102b of the elastic body 102 is provided at a position corresponding to the antinode 122c, it does not vibrate in the x direction due to the bending vibration of the bending primary mode, but vibrates in the z direction. By providing the contact portion 102b at such a position, vibration in the z direction is excited in the contact portion 102b by bending vibration in the primary bending mode in the y direction (hereinafter referred to as primary bending vibration in the y direction).

  If there is an obstruction in the position of the antinodes 122a and 122b having a large amplitude in the z direction due to the secondary bending vibration in the x direction shown in FIG. 5A, the secondary bending vibration is attenuated. Similarly, if there is something that inhibits vibration at the position of the antinode 122c that vibrates greatly in the z direction due to the primary bending vibration in the y direction shown in FIG. 5B, the primary bending vibration is attenuated. For this reason, in the present embodiment, as described below, the shape of the flexible substrate fixed to the piezoelectric element 103 is set so as not to attenuate the bending vibrations.

  In FIG. 6, the shape of the flexible substrate 140 that is fixed to the piezoelectric element 103 and can apply an alternating voltage to the piezoelectric element 103 is shown as viewed from the back side of the piezoelectric element 103. The fixed substrate portion 140 e of the flexible substrate 140 is fixed to the piezoelectric element 103. A connection substrate portion 140d connected to a drive circuit (not shown) that outputs an alternating signal extends from the fixed substrate portion 140e.

  Reference numerals 140a and 140b denote rigidity reduction portions provided at portions (first portions) including positions corresponding to the antinodes 122a and 122b of the secondary bending vibration in the x direction in the fixed substrate portion 140e. In the present embodiment, a pair of rigidity reducing portions 140a spaced in the y direction with respect to the belly 122a is provided, and a pair of rigidity reducing portions 140b spaced in the y direction with respect to the belly 122b is provided. Reference numeral 140c denotes a rigidity reducing portion provided in a portion (first portion) including a position corresponding to the antinode 122c of the primary bending vibration in the y direction in the fixed substrate portion 140e. In the present embodiment, a pair of rigidity reduction portions 140c that are spaced apart from each other in the x direction with respect to the belly 122c are provided.

  Each rigidity reduction part has the role which makes the rigidity of the 1st part including the position of the antinode of vibration among the fixation board | substrate parts 140e lower than the rigidity of the 2nd part different from this 1st part. In this embodiment, the rigidity reducing portion is formed as a U-shaped concave portion (notch portion).

  It is not preferable that the flexible substrate 140 (fixed substrate portion 140e) having a high vibration damping property is fixed to a position corresponding to the antinodes 122a, 122b, and 122c so as to inhibit vibration. Further, when an adhesive is used to fix the flexible substrate 140 to the piezoelectric element 103, the cured adhesive also attenuates vibration. Therefore, in this embodiment, the rigidity reducing portions 140a, 140b, and 140c are provided so as to include positions corresponding to the antinodes 122a, 122b, and 122c having large amplitudes in the fixed substrate portion 140e. That is, the fixing substrate portion 140e is prevented from being fixed to a portion including positions corresponding to the antinodes 122a, 122b, and 122c in the piezoelectric element 103. Accordingly, it is possible to avoid or reduce the inhibition of vibration caused by the fixed substrate portion 140e being fixed to the piezoelectric element 103.

  In the present embodiment, the case where the rigidity reducing portion is a concave portion has been described. However, the rigidity reducing portion may be a hole-shaped portion or a groove-shaped portion as in the embodiments described later. May be. Moreover, you may form a rigidity reduction part as a part whose thickness is thinner than the other part in a fixed board | substrate part.

  In addition, by providing the rigidity reducing portions 140a, 140b, and 140c to reduce the inhibition of vibration, the size of the outer shape of the fixed substrate portion 140e can be brought close to the size of the piezoelectric element 103 (substantially the same). As a result, a sufficient pressing area when the flexible substrate 140 is fixed to the piezoelectric element 103 can be secured, and the possibility that the piezoelectric element 103 is cracked can be reduced. Further, the fixed substrate portion 140 e is fixed to the piezoelectric element 103 on the entire surface thereof, and there is no gap between the fixed substrate portion 140 e and the piezoelectric element 103. For this reason, the piezoelectric element 103 and the fixed substrate portion 140e do not collide with each other due to the bending vibration of the piezoelectric element 103, and no abnormal noise is generated.

  Further, FIGS. 7A and 7B show the magnitude of strain (amplitude) at each position in the x direction in the secondary bending vibration in the x direction and each position in the y direction in the primary bending vibration in the y direction. It shows the magnitude of distortion at. In these figures, the horizontal axis represents the position in the x direction or the y direction, and the vertical axis represents the magnitude of distortion. In FIG. 7A, the distortion becomes the maximum value str1 at the antinode 122a of the secondary bending vibration in the x direction, and the distortion becomes the minimum value −str1 at the antinode position 122b. In the nodes 121a, 121b, and 121c, the distortion is zero (or almost zero). On the other hand, in FIG. 7B, the strain becomes the maximum value str2 at the antinode 122c of the primary bending vibration in the y direction. In the nodes 121d and 121e, the distortion is zero (or almost zero).

  7A and 7B, the distortion str1 (−str1) of the piezoelectric element 103 generated at the positions of the antinodes 122a and 122b of the secondary bending vibration in the x direction and the antinode 122c of the primary bending vibration in the y direction shown in FIGS. When compared with the strain str2 generated at the position, the second-order bending vibration in the x direction has a larger strain. That is, since the bending order of the primary bending vibration is larger in the secondary bending vibration, the relationship between str1 (−str1) and str2 is as follows.

str1> str2
For this reason, compared with the primary bending vibration in the y direction, the secondary bending vibration in the x direction has a greater influence of vibration inhibition due to the flexible substrate 140 being fixed to the piezoelectric element 103.

  Therefore, in this embodiment, the combined area of the two pairs of rigidity reducing portions 140a and 140b provided in the x direction is set larger than the combined area of the pair of rigidity reducing portions 140c provided in the y direction. Thus, vibration inhibition due to the flexible substrate 140 being fixed to the piezoelectric element 103 can be reduced while the size of the outer shape of the fixing substrate portion 140e is substantially the same as the size of the piezoelectric element 103.

  FIG. 8 shows a second embodiment of the present invention. In the present embodiment, the same components as those in the first embodiment are denoted by the same reference numerals as those in the first embodiment, and the description is omitted.

  In the first embodiment, the pair of rigidity reducing portions 140c as concave portions are provided at both ends in the x direction of the fixed substrate portion 140e with respect to the antinode 122c of the primary bending vibration in the y direction. A rigidity reducing portion 140f as a hole-shaped portion is provided at the center in the x direction of 140e ′.

  By providing the rigidity reducing portion 140f in the center of the fixed substrate portion 140e ′, the number of notches on the outer edge of the fixed substrate portion 140e ′ is reduced as compared with the first embodiment. Accordingly, it is possible to avoid deterioration in assembly workability such as bending of the outer edge of the fixed substrate portion 140e ′ when the fixed substrate portion 140e ′ is fixed to the piezoelectric element 103.

  FIG. 9 shows a third embodiment of the present invention. In the present embodiment, the same components as those in the first embodiment are denoted by the same reference numerals as those in the first embodiment, and the description is omitted.

  In the first and second embodiments, the same shape as that of the pair of rigidity reducing portions 140a as the concave shape portions at both ends in the y direction of the fixed substrate portion 140e with respect to the antinode positions 122a and 122b of the secondary bending vibration in the x direction. A pair of rigidity reduction portions 140b is provided. On the other hand, in this embodiment, the fixed substrate portion 140e ″ is not provided with a rigidity reducing portion for the anti-nodes 122a and 122b of the secondary bending vibration in the x direction, and is provided in the anti-nodes 122c of the primary bending vibration in the y direction. Only the rigidity reducing portion 140g is provided for the rigidity reducing portion 140g, and the rigidity reducing portion 140g is provided as a hole-shaped portion at the center in the x direction of the fixed substrate portion 140e ″, as in the second embodiment.

  According to the present embodiment, it is possible to eliminate the cutout portion of the outer edge of the fixed substrate portion 140e ″. Accordingly, when the fixed substrate portion 140e ″ is fixed to the piezoelectric element 103, the outer edge of the fixed substrate portion 140e ″. It is possible to more effectively avoid the deterioration of the assembly workability such as bending of the case than in the second embodiment.

  According to each of the above-described embodiments, the rigidity reduction portion is provided in the flexible substrate (adhesion substrate portion), so that the piezoelectric element in the case where the flexible substrate is enlarged to prevent cracking of the piezoelectric element when the flexible substrate is fixed to the piezoelectric element. Inhibition of vibration can be suppressed. In addition, since no gap is provided between the piezoelectric element and the fixed substrate portion, it is possible to avoid the generation of abnormal noise during vibration.

  In addition, you may provide a hole shape part (rigidity reduction part) in two intersections of the dashed-dotted line which shows the position of the antinode 122a, 122b, and the dashed-dotted line which shows the position of the antinode 122c among the adhering board | substrate parts shown in FIG.

  FIG. 10 shows a digital camera (optical apparatus) as an apparatus using the vibration type motor 100 described in the first to third embodiments as a lens driving actuator. Reference numeral 200 denotes a camera body, in which an image sensor 203 composed of a CCD sensor, a CMOS sensor, or the like is disposed.

  A lens barrel (or interchangeable lens) 202 accommodates a focus lens (driven member) 201 that moves in the optical axis direction and performs focus adjustment. The focus lens 202 is driven in the optical axis direction by the vibration type motor 100.

  The vibration type motor 100 may be used as an actuator for driving a lens (such as a variable power lens) other than the focus lens 202.

  Furthermore, you may use the vibration type motor 100 demonstrated in Examples 1-3 as a drive actuator of the to-be-driven member in various apparatuses other than a digital camera.

  Each embodiment described above is only a representative example, and various modifications and changes can be made to each embodiment in carrying out the present invention.

DESCRIPTION OF SYMBOLS 101 Friction member 102 Elastic body 103 Piezoelectric element 109 Vibrating bodies 122a, 122b, 122c Abdomen 140 Flexible board 140e Adhering board part 140a, 140b, 140c Stiffness reduction part

Claims (9)

A vibrating body including an electro-mechanical energy conversion element and an elastic member; and a flexible substrate including a fixed substrate portion fixed to the electro-mechanical energy conversion element. A vibration type driving device that relatively moves the vibrating body and the contact body that contacts the elastic member by exciting vibrations,
The fixed substrate portion includes a rigidity reducing portion that lowers the rigidity of the first portion including the position of the antinode of the vibration in the fixed substrate portion to be lower than the rigidity of the second portion different from the first portion. A vibration type drive device characterized by that.   2. The vibration type driving device according to claim 1, wherein the rigidity reducing unit has a shape that makes the rigidity of the first part lower than the rigidity of the second part.   The vibration type driving device according to claim 2, wherein the rigidity reducing portion has a concave shape, a hole shape, or a groove shape.   3. The vibration type driving device according to claim 1, wherein the rigidity reducing portion is thinner than the second portion. The vibration includes two vibration modes whose directions are different from each other,
5. The vibration type driving device according to claim 1, wherein the fixed substrate portion includes the rigidity reduction portion for at least one of the two vibration modes. The vibration includes a first vibration mode and a second vibration mode having a direction different from that of the first vibration mode and having a larger amplitude than the first vibration mode,
The fixed substrate portion has the rigidity reduction portion for each of the first and second vibration modes,
6. The rigidity of the first part with respect to the second vibration mode is lower than the rigidity of the first part with respect to the first vibration mode. 6. Vibration type drive device.   The vibration type driving apparatus according to claim 6, wherein the first vibration mode is a primary vibration mode, and the second vibration mode is a secondary vibration mode.   8. The vibration type driving device according to claim 6, wherein an area of the rigidity reduction unit with respect to the second vibration mode is larger than an area of the rigidity reduction unit with respect to the first vibration mode. 9. The vibration type driving device according to any one of claims 1 to 8,
A driven member driven by a driving force from the vibration type driving device.