JP2016148566A - Probe card - Google Patents

Abstract

PURPOSE: To provide a probe card that does not necessarily require a sub for expanding the pitch interval of a conductive path.CONSTITUTION: The probe card C1 includes a plurality of probes P1 and fixers C11 and C12. The probe P1 includes a main body 11 and connectors 15. The main body 11 is fixed on the fixers C11 and C12 at intervals. The connectors 15 extend radially from the main body 11. The fixers C12 have a plurality of conductors C12a disposed at larger intervals than the main body 11. The conductor C12a is electrically and mechanically connected to the connector 15.SELECTED DRAWING: Figure 1A

Description

  The present invention relates to a probe card.

  Conventional probe cards are described in Patent Documents 1 to 3 below. These probe cards have a plurality of cantilever probes and a substrate. A probe is fixed indirectly or directly to the first surface of the substrate. The substrate has a plurality of first and second electrodes and a plurality of conductive lines. The first electrodes are provided on the first surface of the substrate at the same pitch interval as the probes. A first electrode is connected to each probe. The second electrode is provided on the second surface of the substrate at a pitch interval wider than the pitch interval of the first electrode. A conductive line connects the first and second electrodes. In this way, the pitch interval of the probe is converted to a wider pitch interval of the second electrode by the substrate.

JP2013-142691A JP 2004-170189 A JP 2005-69712 A

  In recent probe cards, probes are arranged at a narrow pitch with the increase in integration of inspection objects (semiconductor wafers and semiconductor devices). Therefore, the conventional probe card requires a substrate for extending the pitch interval of the plurality of conductive paths of the probe card as described above.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a probe card that does not require a substrate for extending the pitch interval of the conductive paths.

  In order to solve the above problems, the first probe card of the present invention includes a plurality of probes and a fixing portion. The probe has a main body part and a connection part. The main body is fixed on the fixed portion with a gap in the first direction. The connection portion extends radially from the main body portion. The fixed part has a plurality of conductor parts arranged at a wider interval than the main body part. The conductor portion is mechanically and electrically connected to the connection portion.

  The first probe card of such an embodiment does not require a substrate for extending the pitch interval of the plurality of conductive paths. This is because, since the radially extending connecting portion of the probe is connected to the conductor portion of the fixed portion, the probe converts the pitch interval of the main body portion of the probe into a wide pitch interval of the conductor portion of the fixed portion. is there. Further, even if the probe card includes a substrate for extending the pitch interval of the plurality of conductive paths, as described above, a part of the plurality of conductive paths of the probe card (the main body part, the connection part) In addition, since the pitch interval of the conductor portion is extended, the pitch interval of the conductive path of the probe card can be further extended by the substrate.

  The second probe card of the present invention includes a plurality of probes and a fixing portion. The probe has a main body part and a connection part. The main body is fixed on the fixed portion with a gap in the first direction. The connection part is provided in the main body part. Among the probes, the dimensions of the probes in the second direction adjacent to each other in the first direction are different. The second direction is the longitudinal direction of the probe and is a direction that intersects the first direction. The fixed part has a plurality of conductor parts. The conductor portions are arranged at intervals in the first direction and are mechanically and electrically connected to the connection portion. Of the conductor portions, the conductor portions located next to each other in the first direction are arranged such that the distance between the conductor portions located next to each other in the second direction is larger than the distance between the adjacent body portions of the probes in the first direction. The position is displaced in the second direction.

  The second probe card of such an embodiment does not require a substrate for extending the pitch interval of the plurality of conductive paths. This is because the distance between the adjacent conductor portions in the second direction is larger than the distance between the adjacent probe main body portions in the first direction. The dimensions of the adjacent probe in the second direction are different. Since the connecting portion of the probe is connected to the conductor portion, the probe converts the pitch interval of the main body portion of the probe into a wide pitch interval of the conductor portion of the fixed portion. Further, even if the probe card includes a substrate for extending the pitch interval of the plurality of conductive paths, as described above, a part of the plurality of conductive paths of the probe card (the main body part, the connection part) In addition, since the pitch interval of the conductor portion is extended, the pitch interval of the conductive path of the probe card can be further extended by the substrate.

  The fixing portion may further include at least one of a plurality of first slits and first fixing holes arranged at intervals in the first direction. The probe may further include a leg portion provided on the main body portion. The leg portion can be configured to be detachably fixed to at least one of the first slit and the first fixing hole. The connecting portion may be configured to be mechanically and electrically connected to the conductor portion so as to be detachable.

  In the case of using the first and second probe cards in such a manner, the probes can be exchanged in units of one. This is because the leg portion of the probe is detachable from at least one of the first slit and the first fixing hole, and the connection portion of the probe is detachable from the conductor portion.

  The fixing portion may further include at least one of a plurality of second slits and second fixing holes. The conductor portion of the fixed portion can be a solder wire disposed in at least one of the second slit and the second fixed hole. By connecting the conductor portion to the connecting portion of the probe by soldering, the conductor portion can be mechanically and electrically connected to the connecting portion.

  In the case of the first and second probe cards having such an aspect, the connecting portion is easily connected to the conductor portion by soldering the conductor portion, which is a solder wire, to the connecting portion. And since the solder wire is arrange | positioned in at least one of a 2nd slit and a 2nd fixing hole, it becomes possible to perform solder connection by automation.

  The fixing portion may further include at least one of a plurality of second slits and second fixing holes. The conductor portion of the fixed portion may be arranged in at least one of the second slit and the second fixed hole and may have a bifurcated portion or a concave portion. By fitting the connecting portion of the probe into the bifurcated portion or the concave portion of the conductor portion, the connecting portion can be mechanically and electrically connected to the conductor portion.

  In the case of the first and second probe cards having such an aspect, the connecting portion is easily connected to the conductor portion by fitting the connecting portion into the bifurcated portion or the concave portion of the conductor portion. In addition, since the connecting portion is simply fitted into the forked portion or the concave portion of the conductor portion, the connection between the conductor portion and the connecting portion can be automated.

  The fixing portion may further include at least one of a plurality of third slits and third fixing holes arranged in the vicinity of the conductor portion. The connecting portion of the probe can be fixed to at least one of the third slit and the third fixing hole.

  In the case of the first and second probe cards having such a configuration, since the connecting portion is fixed to at least one of the third slit and the third fixing hole, the connecting portion is easily connected to the conductor portion.

  The connecting portion can be bent or bent in at least one of the thickness direction and the height direction of the probe with respect to the main body portion. In the case of using the first and second probe cards in such an aspect, the connection of the connecting portion to the conductor portion is facilitated. This is because, after fixing the main body portion of the probe to the fixing portion, the connecting portion and the conductor portion can be aligned by bending or bending the connecting portion in at least one of the thickness direction and the height direction of the probe.

  The fixing unit may further include a fixing plate to which the main body of the probe is fixed and a substrate to which the fixing plate is fixed. The substrate can be configured to have the conductor portion. Alternatively, the fixing portion may further include a fixing plate having the conductor portion and the main body portion of the probe being fixed, and a substrate electrically connected to the conductor portion.

  The probe further includes a beam extending from the main body portion to one side in the longitudinal direction of the probe, and a contact portion provided on the beam and capable of contacting the electrodes to be inspected of the first and second probe cards. Is possible. The connecting portion can be configured to extend from the main body portion to the other side in the longitudinal direction. In the case of the first and second probe cards having such a configuration, the beam of the probe extends from the main body portion to one side in the longitudinal direction. When the contact portion provided on the beam contacts the electrode to be inspected, a load is applied to the contact portion and the beam. Due to this load, a force is applied to the connecting portion to leave the fixing portion with the main body portion as a fulcrum. Since the connecting portion is mechanically connected to the conductor portion of the fixed portion, the possibility that the connection between the connecting portion and the conductor portion is released can be reduced even if the above-described force is applied.

  The first slit can have a plurality of holes arranged in the longitudinal direction of the first slit. Of the holes, holes located adjacent to each other in the longitudinal direction of the first slit may be configured to communicate with each other. In the case of using the first and second probe cards in such a manner, the fine first slit can be easily formed in the fixed portion. The second and third slits can have the same configuration.

It is a schematic bottom view of the probe card which concerns on Example 1 of this invention. It is a 2B-2B partial end elevation in FIG. 1A of the said probe card. FIG. 3 is a schematic bottom view and a partially enlarged view of a fixing plate and a substrate of the probe card. It is a schematic partial bottom view of the probe card which concerns on Example 2 of this invention. It is a 2B-2B partial end elevation in FIG. 2A of the said probe card. It is 2C-2C partial end elevations in FIG. 2A of the said probe card. It is a 2D-2D partial end elevation in Drawing 2A of the probe card. It is 2E-2E partial end elevations in FIG. 2A of the said probe card. FIG. 3 is a schematic partial bottom view and a partially enlarged view of a fixing plate and a substrate of the probe card. It is a schematic partial bottom view of the probe card which concerns on Example 3 of this invention. It is 3B-3B partial end elevation in FIG. 3A of the said probe card. It is the 3C-3C partial end elevation in FIG. 3A of the said probe card. It is 3D-3D partial end elevation in FIG. 3A of the said probe card. It is 3E-3E partial end elevations in FIG. 3A of the said probe card. FIG. 3 is a schematic partial bottom view and a partially enlarged view of a fixing plate and a substrate of the probe card. It is a schematic partial bottom view of the probe card which concerns on Example 4 of this invention. It is the 4B-4B partial end elevation in FIG. 4A of the said probe card. It is the 4C-4C partial end elevation in FIG. 4A of the said probe card. It is a 4D-4D partial end view in Drawing 4A of the above-mentioned probe card. It is the 4E-4E partial end elevation in FIG. 4A of the said probe card. It is a 4F-4F partial end elevation in Drawing 4A of the above-mentioned probe card. FIG. 3 is a schematic partial bottom view and a partially enlarged view of a fixing plate and a substrate of the probe card. It is a schematic partial bottom view which shows the example of a design change of the slit of the fixing plate of the said probe card. FIG. 5B is a partial end view of FIG. 5A-5A of the fixing plate of the probe card.

  Examples 1 to 4 of the present invention will be described below.

  Hereinafter, the probe card C1 according to the first embodiment of the present invention will be described with reference to FIGS. 1A to 1C. The probe card C1 includes a plurality of cantilever type probes P1 and a fixing portion. Hereinafter, each component of the probe card C1 will be described in detail. FIG. 1A shows the Y-Y ′ direction and the X-X ′ direction. The Y-Y ′ direction and the X-X ′ direction correspond to the planar direction of a substrate C12 described later of the fixed portion. The X-X ′ direction intersects the Y-Y ′ direction at a right angle. FIG. 1B shows the Y-Y ′ direction and the Z-Z ′ direction. The Z-Z ′ direction corresponds to the height direction of the probe card C1 and the height direction of the probe P1.

  The fixing part includes a fixing plate C11 and a substrate C12, as best shown in FIG. 1C. The fixed plate C11 is an insulating plate and is fixed to the central portion of the main surface of the substrate C12. The fixed plate C11 is substantially O-shaped when viewed from the bottom, and has a main surface, a back surface, first to fourth corners, and first to fourth parts. The back surface of the fixed plate C11 is in contact with the substrate C12 (see FIG. 1B). The first and third corners of the fixed plate C11 are located diagonally, and the second and fourth corners are located diagonally. The first and third corners are provided with a plurality of positioning holes C11d which are through holes. The second and fourth corners are provided with a plurality of screw holes C11e which are through holes. A pin is inserted into the hole C11d, and the pin is engaged with a positioning hole (not shown) of the substrate C12. A screw is inserted into the screw hole C11e, and the screw is fixed to a screw hole (not shown) of the substrate C12.

  The first part of the fixed plate C11 is a portion between the first corner and the second corner. The second part of the fixed plate C11 is a portion between the third corner and the fourth corner. The third part of the fixed plate C11 is a portion between the second corner and the third corner. The fourth part of the fixed plate C11 is a portion between the first corner and the fourth corner.

  As shown in FIGS. 1B and 1C, the fixing plate C11 further includes a plurality of slit pairs and a plurality of recesses C11c. A slit pair is provided in the first to fourth parts of the fixed plate C11. Hereinafter, the slit pair of the second part will be described as an example. The slit pair of the second part is arranged at an interval in the X-X ′ direction (first direction (the arrangement direction of the probes P1)). Each slit pair of the second part has first slits C11a and C11b arranged at intervals in the Y-Y ′ direction. That is, in the second part, the first slits C11a are arranged in a row in the XX ′ direction and the first slits C11b are spaced in the XX ′ direction on the Y ′ direction side from the first slits C11a. They are arranged in a row with a gap. The first slits C11a and C11b are slits for fixing the probe P1. The first part slit pair has the same configuration as the second part slit pair except that it is arranged symmetrically in the Y-Y ′ direction with respect to the second part slit pair. The third part slit pair has the same configuration as the second part slit pair except that the third part slit pair is arranged 90 ° rotated to the left side of the drawing in FIG. 1C with respect to the second part slit pair. The fourth pair of slit pairs has the same configuration as the second pair of slit pairs except that the fourth pair of slit pairs is disposed 90 ° to the right side of FIG. 1C with respect to the second pair of slits. The plurality of recesses C11c may be provided on the back side portion of the slit pair so as to communicate with the plurality of slit pairs (first slits C11a, C11b) of the first part of the fixing plate C11. Similarly, the recesses C11c are preferably provided in the second to fourth parts of the fixing plate C11. In this case, the recess C11c and the slit pair communicate with each other one by one. Alternatively, one recess C11c may be provided on the back side portion of the slit pair so as to communicate with all the slit pairs (first slits C11a, C11b) of the first part of the fixing plate C11. Similarly, a plurality of recesses C11c may be provided in the second part to the fourth part of the fixing plate C11. In this case, all the slit pairs for each of the first to fourth parts of the fixed plate C11 communicate with one recess C11c.

  The board C12 is a printed board. Around the fixed plate C11 on the main surface of the substrate C12, a plurality of conductor portions C12a are provided at intervals in the circumferential direction of the substrate C12. The conductor portion C12a is an electrode extending radially. The interval between the inner ends of the conductor portion C12a is larger than the interval between the slit pair of the fixing plate C11 (that is, the main body portion 11 of the probe P1 fixed thereto). A plurality of through-hole electrodes C12b are provided outside the conductor portion C12a of the substrate C12. The through-hole electrodes C12b are staggered in the circumferential direction. Of the through-hole electrodes C12b, the interval between the through-hole electrodes C12b located adjacent to each other in the circumferential direction is larger than the interval between the conductor portions C12a located adjacent to each other in the circumferential direction. The through-hole electrode C12b is electrically connected to the conductor portion C12a by a plurality of conductive lines of the substrate C12 (not shown).

  The probe card C1 can be configured to further include a main board disposed on the Z direction side of the board C12. In this case, the through-hole electrode C12b is electrically connected to a plurality of electrodes on the main board via a plurality of relay members such as a spring probe and a conductive pin.

  As shown in FIG. 1A, the probe P1 is fixed to the first to fourth parts of the fixing plate C11 with a gap therebetween. Hereinafter, the probe P1 fixed to the second part with an interval in the XX ′ direction (the first direction (the arrangement direction of the probes P1)) will be described as an example.The probe P1 is best shown in FIG. As shown, the probe P1 is a thin plate made of a conductive material (for example, Cu, Au, W, Rh, NiCo, PdCo, AgPdCu, Ru, Ir, or a composite metal material thereof). A main body 11, leg portions 12 a and 12 b, a beam 13, a contact portion 14, and a connection portion 15 are provided.

  The main body 11 is a rectangular plate. The main body 11 includes a first end 111 (tip portion) on the Y direction side (one side in the longitudinal direction of the probe P1) and a second end portion 112 (rear end) on the Y ′ direction side (the other side in the longitudinal direction). Portion), a third end 113 on the Z ′ direction side (one side in the height direction of the probe P1), a fourth end portion 114 on the Z direction side (the other side in the height direction), and a plurality of through holes And have. The through hole penetrates the central part of the main body part 11 in the thickness direction of the probe P1.

  The leg portion 12a is a plate provided integrally with a portion on the Y direction side of the third end portion 113 of the main body portion 11, and extends from the third end portion 113 in the Z 'direction. The leg portion 12 b is a plate provided integrally with a portion on the Y ′ direction side of the third end portion 113 of the main body portion 11, and extends from the third end portion 113 in the Z ′ direction. The leg portions 12a and 12b have shapes corresponding to the shapes of the first slits C11a and C11b (see FIG. 1C) of the fixing plate C11 or shapes that can be inserted into the first slits C11a and C11b. The leg portions 12a and 12b are provided with through holes penetrating in the thickness direction of the probe P1.

  As best shown in FIG. 1B, the leg 12a is detachably fixed to the first slit C11a and the leg 12b is detachably fixed to the first slit C11b. Specifically, the leg portion 12a is detachably fitted to the first slit C11a, and the leg portion 12b is detachably fitted to the first slit C11b. Or the leg part 12a is inserted in the 1st slit C11a, and the leg part 12b is inserted in the 1st slit C11b. A resin may be applied in the recess C11c of the fixed plate C11, and the legs 12a and 12b may be fixed to the fixed plate C11 by the resin. Specifically, when a plurality of recesses C11c communicate with each slit pair (first slits C11a, C11b), the resin in each recess C11c is one probe P1 fitted or inserted into each slit pair. It is applied to the leg portions 12a and 12b, and the leg portions 12a and 12b are fixed to the fixing plate C11. When the plurality of recesses C11c communicate with a plurality of slit pairs (first slits C11a, C11b), the resin in each recess C11c is the legs 12a of the plurality of probes P1 fitted or inserted into the plurality of slit pairs. , 12b to fix the leg portions 12a, 12b to the fixing plate C11. With the legs 12a and 12b fixed to the fixed plate C11 in this way, the third end 113 of the main body 11 of the probe P1 contacts the fixed plate C11, and the main body 11 is fixed on the fixed plate C11. Has been. In the second part of the fixed plate C11, since the slit pairs are arranged at intervals in the XX ′ direction, the main body part 11 of the plurality of probes P1 is also placed on the second part of the fixed plate C11 along the line XX ′. It is fixed at intervals in the direction. If the resin is not fixed, the recess C11c of the fixing plate C11 can be omitted.

  The beam 13 is a plate provided integrally with the first end 111 of the main body 11. The beam 13 extends from the first end 111 in the Y direction. The beam 13 is elastically deformable in the Z-Z ′ direction.

  The contact portion 14 is integrally provided at the tip of the beam 13. The contact portion 14 extends in the Z direction from the tip of the beam 13. The front end of the contact portion 14 is located on the Z direction side with respect to the fourth end portion 114 of the main body portion 11. The contact portion 14 is a portion that can contact an electrode of an inspection object (semiconductor device or semiconductor wafer) (not shown) of the probe card C1. At the time of this contact, the contact portion 14 receives a load from the electrode to be inspected, whereby the beam 13 is elastically deformed in the Z ′ direction.

  The connection portion 15 is a plate-like arm that is provided integrally with the second end portion 112 of the main body portion 11 and extends from the second end portion 112 in the Y ′ direction. The connecting portion 15 can be bent or bent in the Z-Z ′ direction and the X-X ′ direction (thickness direction of the probe P1). The distal end portion (end portion on the Y direction side) of the connection portion 15 has a smaller dimension in the Z-Z ′ direction than the portion other than the distal end portion of the connection portion 15. Thereby, it is easy to bend or curve the connecting portion 15. The connection portion 15 is mechanically and electrically connected to the conductor portion C12a of the substrate C12 so as to be detachable. For example, the connection portion 15 can be mechanically and electrically connected to the conductor portion C12a so as to be detachable by solder connection, conductive adhesive, wire bonding, welding, or the like. In FIG. 1A and FIG. 1B, the rear-end part of the connection part 15 is connected to the conductor part C12a by the solder S, respectively. In this connected state, the tip of the connecting portion 15 is bent or curved, and the connecting portion 15 extends radially.

  The first part probe P1 has the same configuration as the second part probe P1 except that it is arranged symmetrically in the Y-Y 'direction with respect to the second part probe P1. The third part probe P1 has substantially the same configuration as the second part probe P1, except that the third part probe P1 is rotated by 90 ° to the left in the drawing of FIG. 1A with respect to the second part probe P1. The fourth part probe P1 has substantially the same configuration as the second part probe P1 except that the fourth part probe P1 is disposed 90 ° to the right side of FIG. 1A with respect to the second part probe P1.

  The probe P1 configured as described above is created using MEMS (Micro Electro Mechanical Systems) technology. First, a conductive sacrificial layer made of copper or the like is formed on a substrate. Thereafter, a photoresist made of a photosensitive organic material is applied on the sacrificial layer. Thereafter, exposure and development are performed using a mask for the photoresist to form a pattern corresponding to a part of the shape of the probe P1. Thereafter, the sacrificial layer is electroplated to fill the pattern with a conductive material. Photoresist application, pattern formation, and electroplating are repeated to form the probe P1. Thereafter, the photoresist is removed using a predetermined solution. Thereafter, the sacrificial layer is removed using an etching solution that selectively removes copper. In this way, a plate-like probe P1 is obtained.

  Hereinafter, an assembly procedure of the probe card C1 having the above-described configuration will be described in detail. A plurality of probes P1 and a fixing plate C11 are prepared. The leg portion 12a of each probe P1 is fitted into the first slit C11a of the fixed plate C11, and the leg portion 12b of the probe P1 is fitted into the first slit C11b of the fixed plate C11. Resin may be applied in the recess C11c of the fixing plate C11, and the fitted leg portions 12a and 12b may be fixed to the fixing plate C11 with resin. Alternatively, the leg portion 12a of each probe P1 is inserted into the first slit C11a of the fixed plate C11, and the leg portion 12b of the probe P1 is inserted into the first slit C11b of the fixed plate C11. Resin is applied in the recess C11c of the fixing plate C11, and the inserted leg portions 12a and 12b are fixed to the fixing plate C11 with resin. In this way, the probe P1 is fixed on the main surface of the fixing plate C11 with an interval in the arrangement direction. When the probe P1 is fixed to the fixing plate C11 as described above, a jig or the like is inserted into the through hole of the probe P1, and the legs 12a and 12b are fitted or inserted into the first slits C11a and C11b. good.

  Thereafter, a substrate C12 is prepared. The fixing plate C11 is brought into contact with the main surface of the substrate C12. At this time, the positioning hole C11d of the fixing plate C11 is communicated with the positioning hole of the substrate C12, and the screw hole C11e of the fixing plate C11 is communicated with the screw hole of the substrate C12. Thereafter, the pin is inserted into the positioning hole C11d of the fixing plate C11 and engaged with the positioning hole of the substrate C12. A screw is inserted into the screw hole C11e of the fixing plate C11, and is screwed into the screw hole C11e of the substrate C12. In this way, the fixing plate C11 is fixed to the substrate C12.

  Then, the connection part 15 of each probe P1 is arrange | positioned on the edge part inside the corresponding conductor part C12a. At this time, the distal end portion of the connection portion 15 of each probe P1 is bent or curved, and is arranged so as to incline downward in the Y ′ direction and extend radially. The rear end portion of the connection portion 15 of each probe P1 is soldered to the conductor portion C12a. The probe card C1 is assembled as described above.

  The probe card C1 as described above has the following technical features and effects. First, the probe card C1 does not require an ST substrate (wiring substrate) for extending the pitch interval of the plurality of conductive paths. The reason is as follows. The interval between the conductor portions C12a is larger than the interval between the main body portions 11 of the probe P1. The connection part 15 of the probe P1 extends radially and is connected to the conductor part C12a. For this reason, since the pitch interval of the main body part 11 of the probe P1 is converted into the wide pitch interval of the conductor part C12a by the probe P1, the ST substrate is not essential. Further, even if the probe card C1 includes the ST substrate, as described above, the probe P1 extends the pitch interval of a part of the plurality of conductive paths of the probe card C1 (paths from the probe P1 to the conductor part C12a). Therefore, the pitch interval of the conductive path of the probe card C1 can be further expanded by the ST board.

  When the probe card C1 includes an ST substrate, the substrate C12 can be used as the ST substrate. The probe card C1 can be configured to further include an ST substrate and a main substrate. In this case, the ST substrate is disposed between the substrate C12 and the main substrate. The through-hole electrodes C12b of the substrate C12 are electrically connected to the plurality of first electrodes of the ST substrate, respectively. The plurality of second electrodes on the ST substrate are electrically connected to the plurality of electrodes on the main substrate via a plurality of relay members such as spring probes and conductive pins. The first electrode and the second electrode of the ST substrate are connected to each other by a conductive line of the ST substrate. The pitch interval between the second electrodes is larger than the pitch interval between the first electrodes.

  Second, the probe P1 can be exchanged individually and simply by the following steps. First, the solder connection between the connection portion 15 and the conductor portion C12a is released. The leg portions 12a and 12b are pulled out from the first slits C11a and C11b. Thereafter, the legs 12a and 12b of the new probe P1 are fixed to the first slits C11a and C11b of the fixing plate C11. The connection portion 15 of the new probe P1 is soldered to the conductor portion C12a of the substrate C12. In addition, when the leg portions 12a and 12b are fixed to the fixing plate C11 with resin, it is preferable to remove the resin and replace the probe P1 as described above, and then apply the resin again into the recess C11c.

  Thirdly, connection between the connection portion 15 and the conductor portion C12a and release of the connection can be easily performed. Since the interval between the conductor portions C12a is larger than the interval between the first slits C11a of the fixing plate C11, it is possible to easily solder and remove the solder between the connection portion 15 and the conductor portion C12a for each probe P1. Moreover, since the connecting portion 15 can be bent or bent in the thickness direction and the height direction of the probe P1, the connecting portion 15 is bent or bent after the main body portion 11 of the probe P1 is fixed to the fixing plate C11. 15 and the conductor part C12a can be easily aligned.

  Fourth, it is possible to reduce the possibility that the connection between the connection portion 15 and the conductor portion C12a is unexpectedly released, and to improve the connection reliability. The beam 13 of the probe P1 extends from the first end portion 111 to one side in the longitudinal direction of the probe P1, while the connection portion 15 extends from the first end portion 111 to the other side in the longitudinal direction of the probe P1. For this reason, when the contact portion 14 at the tip of the beam 13 contacts the electrode to be inspected, a load is applied to the contact portion 14 and the beam 13. Due to this load, a force is exerted on the connecting portion 15 to leave the conductor portion C12a with the main body portion 11 as a fulcrum. Since the connection portion 15 is mechanically connected to the conductor portion C12a, even if the above-described force is applied, the possibility that the connection between the connection portion 15 and the conductor portion C12a is unexpectedly released may be reduced. Connection reliability can be improved.

  Hereinafter, a probe card C2 according to a second embodiment of the present invention will be described with reference to FIGS. 2A to 2F. The probe card C2 includes a plurality of cantilever type probes P2 to P5 and a fixing portion. Hereinafter, each component of the probe card C2 will be described in detail. FIG. 2A shows the Y-Y ′ direction and the X-X ′ direction. The Y-Y ′ direction and the X-X ′ direction correspond to the planar direction of the substrate C22 of the probe card C2. The X-X ′ direction intersects the Y-Y ′ direction at a right angle. 2B to 2E show the Y-Y ′ direction and the Z-Z ′ direction. The Z-Z ′ direction corresponds to the height direction of the probe card C2 and the height direction of the probes P2 to P5.

  The fixing part includes a fixing plate C21 and a substrate C22 as best shown in FIG. 2F. The fixed plate C21 has the same configuration as the fixed plate C11 of the first embodiment except for the following differences. Therefore, the description which overlaps with the fixed plate C11 is abbreviate | omitted among description of the fixed plate C21. Note that C21e shown in FIG. 2F is a positioning hole, and C21f is a screw hole.

  The difference 1 is that the arrangement of the plurality of slit pairs of the fixed plate C21 is different from the arrangement of the plurality of slit pairs of the fixed plate C11. The difference 2 is that the fixing plate C21 does not have the recess C11c. The difference 3 is that the fixing plate C21 has a plurality of first fixing holes C21a2, C21b2, a plurality of second fixing holes C21c1, a plurality of second fixing holes C21c2, a plurality of second fixing holes C21c3, and a plurality of first fixing holes C21a2, C21b2. 2 fixing holes C21c4 and a plurality of conductor portions C21d.

  The slit pair of the fixing plate C21, the first fixing holes C21a2 and C21b2, the second fixing holes C21c1 to 4 and the conductor part C21d are provided in the first to fourth parts of the fixing plate C21. Hereinafter, the slit pair of the second part of the fixing plate C21, the first fixing holes C21a2, C21b2, the second fixing holes C21c1 to 4 and the conductor part C21d will be described as an example. The slit pairs are provided in the second portion of the fixed plate C21 so as to be arranged in a staggered manner with a gap in the X-X 'direction (the arrangement direction of the probes P2 to P5). Each slit pair has first slits C21a1 and C21b1 arranged at intervals in the Y-Y ′ direction. The first fixing hole C21a2 is provided in the second part of the fixing plate C21 so as to communicate with the end of the first slit C21a1 in the Y direction (one side in the longitudinal direction of the probes P2 to P5). The first fixing hole C21b2 is provided in the second part of the fixing plate C21 so as to communicate with the end of the first slit C21b1 in the Y ′ direction (the other side in the longitudinal direction of the probes P2 to P5).

  As best shown in FIG. 2F, the second fixing holes are arranged in the XX ′ direction in the order of C21c1, C21c2, C21c3, and C21c4 in the Y ′ direction portion from the first fixing hole C21b2 of the fixing plate C21. It is repeatedly provided at intervals. The second fixing holes C21c1, C21c2, C21c3, and C21c4 are arranged in a zigzag manner in the X-X ′ direction so as to correspond to the positions of the rear ends of the connecting portions described later of the probes P2, P5, P3, and P4. The second fixed hole C21c1 and the second fixed hole C21c2 located adjacent to each other in the X-X ′ direction are displaced in the Y-Y ′ direction. The second fixed hole C21c2 and the second fixed hole C21c3 located adjacent to each other in the X-X ′ direction are displaced in the Y-Y ′ direction. The second fixed hole C21c3 and the second fixed hole C21c4 located adjacent to each other in the X-X ′ direction are displaced in the Y-Y ′ direction. The second fixed hole C21c4 and the second fixed hole C21c1 located adjacent to each other in the X-X ′ direction are displaced in the Y-Y ′ direction. The interval between the second fixing hole C21c1 and the second fixing hole C21c2 in the YY ′ direction is different from the interval between the second fixing hole C21c2 and the second fixing hole C21c3 in the YY ′ direction (the former is more than the latter). Is also big). The interval between the second fixing hole C21c2 and the second fixing hole C21c3 in the YY ′ direction is different from the interval between the second fixing hole C21c3 and the second fixing hole C21c4 in the YY ′ direction (the former is more than the latter). Is also big). The distance between the second fixed hole C21c3 and the second fixed hole C21c4 in the Y-Y ′ direction is different from that of the second fixed hole C21c4 and the second fixed hole C21c1 (the former is smaller than the latter). The interval between the second fixing holes adjacent in the XX ′ direction in the YY ′ direction is XX ′ of a main body portion to be described later of the probes P2 and P5 positioned adjacent in the XX ′ direction. Interval in the direction, XX ′ direction of the probe P5 and P3 adjacent to each other in the XX ′ direction, and XY ′ direction in the main body described later, and the main body of the probes P3 and P4 adjacent in the XX ′ direction. This is larger than the interval in the XX ′ direction of the part and the interval in the XX ′ direction of the main body part to be described later of the probes P4 and P2 located next to each other in the XX ′ direction.

  The conductor portion C21d is a solder wire disposed in each of the second fixing holes C21c1, C21c2, C21c3, and C21c4. Since the second fixing holes C21c1, C21c2, C21c3, and C21c4 are arranged as described above, the XX ′ direction corresponds to the position of the rear end portion of the connecting portion, which will be described later, of the probes P2, P5, P3, and P4. Are arranged in a zigzag. The conductor C21d located adjacent in the X-X 'direction is displaced in the Y-Y' direction. The distance in the YY ′ direction between the conductor portion C21d in the second fixed hole C21c1 and the conductor portion C21d in the second fixed hole C21c2 is the conductor portion C21d in the second fixed hole C21c2 and the conductor in the second fixed hole C21c3. This is different from the interval in the YY ′ direction of the part C21d (the former is larger than the latter). The distance in the YY ′ direction between the conductor portion C21d in the second fixed hole C21c2 and the conductor portion C21d in the second fixed hole C21c3 is the conductor portion C21d in the second fixed hole C21c3 and the conductor in the second fixed hole C21c4. This is different from the interval in the YY ′ direction of the part C21d (the former is larger than the latter). The distance in the YY ′ direction between the conductor part C21d in the second fixed hole C21c3 and the conductor part C21d in the second fixed hole C21c4 is the conductor part C21d in the second fixed hole C21c4 and the conductor in the second fixed hole C21c1. It is different from the part C21d (the former is smaller than the latter). The spacing in the YY ′ direction of the conductor part C21d located adjacent in the XX ′ direction is the XX ′ direction of the body part described later of the probes P2 and P5 located adjacent in the XX ′ direction. , The distance between the probes P5 and P3 located next to each other in the XX ′ direction, the distance between the main parts described later in the XX ′ direction, and the body located after the probes P3 and P4 located next in the XX ′ direction. Is larger than the interval in the XX ′ direction, and the interval in the XX ′ direction of the main body portion, which will be described later, of the probes P4 and P2 located adjacent to each other in the XX ′ direction.

  The board C22 is a printed board. On the main surface of the substrate C22, a plurality of first electrodes C22a are provided at positions corresponding to the second fixing holes C21c1 to C21-4 of the fixing plate C21. The first electrode C22a is electrically connected to the conductor portion C21d. A plurality of second electrodes (not shown) are provided on the back surface of the substrate C22. The second electrode is electrically connected to the first electrode by a plurality of conductive lines on the substrate C22 (not shown).

  As shown in FIG. 2A, the probes P2 to P5 are made of a conductive material (for example, Cu, Au, W, Rh, NiCo, PdCo, AgPdCu, Ru, Ir, or a composite metal material thereof). It is a thin plate. The dimensions of the probes P2 to P5 in the Y-Y ′ direction (second direction) are different. Specifically, the dimension of the probe P3 in the Y-Y ′ direction is larger than the dimension of the probe P2 in the Y-Y ′ direction. The dimension of the probe P4 in the Y-Y ′ direction is larger than the dimension of the probe P3 in the Y-Y ′ direction. The dimension of the probe P5 in the Y-Y ′ direction is larger than the dimension of the probe P4 in the Y-Y ′ direction. In the second embodiment, the main bodies of the probes P2 to P5 are fixed on the first to fourth parts of the fixing plate C21 so that the probes are repeatedly arranged in the order of P2, P5, P3, and P4. Hereinafter, the probes P2 to P5 fixed to the second part with an interval in the X-X ′ direction (first direction (the arrangement direction of the probes P2 to P5)) will be described as an example.

  As best shown in FIG. 2B, the probe P <b> 2 includes a main body portion 21, leg portions 22 a and 22 b, beams 23 a and 23 b, a contact portion 24, and a connection portion 25.

  The main body 21 is a substantially trapezoidal plate in side view. The main body 21 includes a first end 211 (tip portion) on the Y direction side (one side in the longitudinal direction of the probe P2) and a second end portion 212 on the Y ′ direction side (the other side in the longitudinal direction of the probe P2). (Rear end), a third end 213 on the Z ′ direction side (one side in the height direction of the probe P2), and a fourth end portion 214 on the Z direction side (the other side in the height direction of the probe P2). And a through hole. The through hole penetrates the central portion of the main body portion 21 in the X-X ′ direction. The third end 213 is in contact with the fixed plate C21.

  The leg portion 22 a is a plate that is integrally provided at the end portion in the Y direction of the third end portion 213 of the main body portion 21. The leg 22a has a trunk portion 22a1 and a branch portion 22a2. The trunk portion 22a1 is a rectangular plate integrally provided at the end portion in the Y direction of the third end portion 213 of the main body portion 21, and extends in the Y-Y 'direction. The trunk portion 22a1 has a shape corresponding to the shape of the first slit C21a1 corresponding to the fixed plate C21. The trunk portion 22a1 is detachably fitted in the corresponding first slit C21a1. The branch portion 22a2 is a bifurcated plate extending in the Z ′ direction from the trunk portion 22a1. The dimension of the branch part 22a2 in the Y-Y 'direction is smaller than the dimension of the trunk part 22a1 in the Y-Y' direction. The branch portion 22a2 has a shape corresponding to the shape of the first fixing hole C21a2 corresponding to the fixing plate C21. The branch part 22a2 is detachably fitted in the corresponding first fixing hole C21a2.

  The leg 22 b is a plate that is integrally provided at the end of the third end 213 of the main body 21 in the Y ′ direction. The leg portion 22b has a trunk portion 22b1 and a branch portion 22b2. The trunk portion 22b1 has substantially the same configuration as the trunk portion 22a1 of the leg portion 22a except for the following points. The first is that the third end portion 213 of the main body portion 21 is integrally provided at the end portion in the Y ′ direction. Secondly, the trunk portion 22b1 has a shape corresponding to the shape of the first slit C21b1 corresponding to the fixed plate C21. The trunk portion 22b1 is detachably fitted to the corresponding first slit C21b1. The branch part 22b2 has substantially the same configuration as the branch part 22a2 except for the following points. That is, the branch portion 22b2 has a shape corresponding to the shape of the corresponding first fixing hole C21b2 of the fixing plate C21. The branch portion 22b2 is detachably fitted into the corresponding first fixing hole C21b2.

  The beam 23 a is a plate provided integrally with the first end 211 of the main body 21. The beam 23 b is a plate that is integrally provided in a portion in the Z ′ direction with respect to the beam 23 a of the first end portion 211 of the main body portion 21. The beams 23a and 23b extend from the first end 211 in the Y direction. The beams 23a and 23b can be elastically deformed in the Z-Z 'direction.

  The contact portion 24 is integrally provided at the ends (tips) in the Y direction of the beams 23a and 23b. The contact portion 24 extends in the Z direction from the tip of the beam 23b. An end (front end) in the Z direction of the contact portion 24 is located in the Z direction with respect to the fourth end portion 214 of the main body portion 21. The contact portion 24 is a portion that can contact an electrode of an inspection object (semiconductor device or semiconductor wafer) (not shown) of the probe card C2. During this contact, the contact portion 24 receives a load from the electrode to be inspected, whereby the beams 23a and 23b are elastically deformed in the Z ′ direction.

  The connection portion 25 is a plate-like arm that is provided integrally with the second end portion 212 of the main body portion 21 and extends from the second end portion 212 in the Y ′ direction. The connecting portion 25 is inclined downward in the Z ′ direction. A through-hole penetrating in the X-X ′ direction is provided at an end portion (rear end portion) in the Y ′ direction of the connecting portion 25. The rear end portion of the connecting portion 25 is mechanically and electrically connected to the conductor portion C21d in the second fixing hole C21c1 of the fixing plate C21 so as to be detachable. For example, the rear end portion of the connection portion 25 is mechanically and electrically connected to the conductor portion C21d by solder connection, conductive adhesive, wire bonding, welding, or the like.

  As best shown in FIG. 2C, the probe P3 has substantially the same configuration as the probe P2 except that the configuration of the connection portion 25 'of the probe P3 is different from the configuration of the connection portion 25 of the probe P2. Therefore, in the description of the probe P3, the description overlapping with the probe P2 is omitted.

  The connecting portion 25 ′ has an arm 251 ′ and a hanging portion 252 ′. The arm 251 ′ is a plate extending in the Y ′ direction while being inclined downward from the second end portion 212 of the main body 21 in the Z ′ direction. The dimension in the Y-Y ′ direction of the arm 251 ′ is larger than the dimension in the Y-Y ′ direction of the connection portion 25 of the probe P <b> 2. The hanging part 252 'is a plate extending in the Z' direction from the Y 'direction end of the arm 251'. With such a configuration, the length from the contact portion 24 of the probe P3 to the connection portion 25 ′ (the dimension in the YY ′ direction of the probe P3) is from the contact portion 24 of the probe P2 to the rear end of the connection portion 25. It is longer (larger) than the length (dimension in the YY ′ direction of the probe P2). The drooping portion 252 ′ is provided with a through-hole penetrating the drooping portion 252 ′ in the X-X ′ direction. The hanging portion 252 'is mechanically and electrically connected to the conductor portion C21d in the second fixing hole C21c3 of the fixing plate C21. For example, the drooping portion 252 'is mechanically and electrically connected to the conductor portion C21d by solder connection, conductive adhesive, wire bonding, welding, or the like.

  As best shown in FIG. 2D, the probe P4 has substantially the same configuration as the probe P3 except that the configuration of the main body 21 'of the probe P4 is different from the configuration of the main body 21 of the probe P3. Therefore, in the description of the probe P4, the description overlapping with the probe P3 is omitted.

  The dimension of the main body 21 ′ of the probe P 4 in the Y-Y ′ direction is larger than the dimension of the main body 21 of the probe P 3 in the Y-Y ′ direction. With such a configuration, the length from the contact portion 24 of the probe P4 to the connection portion 25 ′ (the dimension of the probe P4 in the YY ′ direction) is the length from the contact portion 24 of the probe P3 to the connection portion 25 ′. It is longer (larger) than (dimension in the YY ′ direction of the probe P3). The main body portion 21 ′ is provided with two through holes that penetrate the main body portion 21 ′ in the X-X ′ direction. In FIG. 2D, 211 ′ is the first end of the main body 21 ′ in the Y direction, 212 ′ is the second end of the main body 21 ′ in the Y ′ direction, and 213 ′ is the first end of the main body 21 ′ in the Z ′ direction. The three ends 214 ′ are the fourth ends in the Z direction of the main body 21 ′. The hanging portion 252 'of the connecting portion 25' of the probe P4 is mechanically and electrically connected to the conductor portion C21d in the second fixing hole C21c4 of the fixing plate C21.

  As best shown in FIG. 2E, the probe P5 has a dimension in the YY ′ direction of the arm 251 ″ of the connecting portion 25 ″ of the probe P5 that is the same as that of the arm 251 ′ of the connecting portion 25 ′ of the probe P4. The configuration is substantially the same as that of the probe P4 except that the size is larger than the dimension in the YY ′ direction. Therefore, in the description of the probe P5, the description overlapping with the probe P4 is omitted. With the above-described configuration, the length from the contact portion 24 of the probe P5 to the connection portion 25 ″ (the dimension of the probe P5 in the YY ′ direction) is the length from the contact portion 24 of the probe P4 to the connection portion 25 ′. It is longer (larger) than (dimension in the YY ′ direction of the probe P4). The hanging portion 252 ′ of the connection portion 25 ″ of the probe P 5 is mechanically and electrically connected to the conductor portion C 21 d in the second fixing hole C 21 c 2 of the fixing plate C 21.

  The probes P2 to P5 described above are created using MEMS (Micro Electro Mechanical Systems) technology in the same manner as the probe P1.

  Hereinafter, an assembly procedure of the probe card C2 having the above-described configuration will be described in detail. A fixing plate C21 is prepared. The conductor portions C21d are inserted into the second fixing holes C21c1 to C21-4 of the fixing plate C21. The conductor portion C21d protrudes from the second fixed holes C21c1 to C4 in the Z direction.

  A plurality of probes P2 to P5 are prepared. The main body portions of the probes P2 to P5 are fixed on the fixing plate C21 so that the probes are repeatedly arranged in the arrangement direction in the order of P2, P5, P3, and P4. Specifically, the trunk portion 22a1 of the leg portion 22a of the probes P2 to P5 is fitted into the first slit C21a1 of the fixing plate C21, and the branch portion 22a2 of the leg portion 22a of the probes P2 to P5 is fitted to the first portion of the fixing plate C21. Each is fitted into the fixing hole C21a2. At the same time, the trunk portions 22b1 of the leg portions 22b of the probes P2 to P5 are respectively fitted into the first slits C21b1 of the fixing plate C21, and the branch portions 22b2 of the leg portions 22b of the probes P2 to P5 are respectively fitted to the first fixing holes C21b2. Combine. Thereby, the rear end part of the connection part of the probes P2 to P5 is arranged in the vicinity of the conductor part C21d. Thereafter, the conductor portion C21d is soldered to the rear end portion of the connecting portion of the probes P2 to P5. When the probes P2 to P5 are fixed to the fixing plate C21 as described above, a jig or the like is inserted into the through holes of the probes P2 to P5, and the leg portions 22a of the probes P2 to P5 are connected to the first slit C21a1 and the first It is preferable that the first fixing hole C21a2 is fitted and the leg portions 22b of the probes P2 to P5 are fitted to the first slit C21b1 and the first fixing hole C21b2.

  After fixing the main body of the probes P2 to P5 on the fixing plate C21, the fixing plate C21 is fixed to the substrate C22 as in the first embodiment. At this time, the conductor portion C21d of the fixed plate C21 contacts the first electrode C22a of the substrate C22 and is electrically connected. The probe card C2 is assembled as described above.

  The probe card C2 as described above has the following technical features and effects. First, the probe card C2 does not require an ST substrate (wiring substrate) for extending the pitch interval of the plurality of conductive paths. The reason is as follows. The spacing in the YY ′ direction of the conductor portion C21d located next in the XX ′ direction is larger than the spacing in the XX ′ direction in the main body portions of the probes P2 to P5 located next in the XX ′ direction. large. The dimensions in the Y-Y 'direction of the probes P2 to P5 located next to each other in the X-X' direction are different. The conductor portion C21d is soldered to the rear end portion of the connecting portion of the probes P2 to P5. For this reason, since the pitch interval of the main body portions of the probes P2 to P5 of the probe card C2 is converted into the wide pitch interval of the conductor portion C21d by the probes P2 to P5, the ST substrate is not essential. Further, even if the probe card C2 includes the ST board, as described above, the probes P2 to P5 may be used for a part of the plurality of conductive paths of the probe card C2 (paths from the probes P2 to P5 to the conductor portion C21d). Since the pitch interval is extended, the pitch interval of the conductive path of the probe card C2 can be further extended by the ST substrate.

  When the probe card C2 includes an ST substrate, the substrate C22 can be used as the ST substrate. The probe card C2 can be configured to further include an ST substrate and a main substrate. In this case, the ST substrate is disposed between the substrate C22 and the main substrate. The second electrodes of the substrate C22 are electrically connected to the plurality of first electrodes of the ST substrate, respectively. The plurality of second electrodes on the ST substrate are electrically connected to the plurality of electrodes on the main substrate via a plurality of relay members such as spring probes and conductive pins. The first electrode and the second electrode of the ST substrate are connected to each other by a conductive line of the ST substrate. The pitch interval of the second electrodes of the ST substrate is larger than the pitch interval of the first electrodes of the ST substrate.

  Second, the probes P2 to P5 of the probe card C2 can be exchanged individually and simply by the following steps. Of the probes P2 to P5, the solder connection between the connecting portion of the probe to be replaced and the conductor portion C21d is released. Thereafter, the leg portion 22a of the probe is pulled out from the first slit C21a1 and the first fixing hole C21a2, and the leg portion 22b of the probe is pulled out from the first slit C21b1 and the first fixing hole C21b2 of the fixing plate C21. Thereafter, the leg portion 22a of the new probe is fitted into the first slit C21a1 and the first fixing hole C21a2, and the leg portion 22b of the new probe is fitted into the first slit C21b1 and the first fixing hole C21b2 of the fixing plate C21. Combine. Thereafter, the connection portion of the new probe is solder-connected to the conductor portion C21d.

  Thirdly, connection and disconnection between the connection parts of the probes P2 to P5 and the conductor part C21d can be easily performed. The spacing in the YY ′ direction of the conductor portion C21d located next in the XX ′ direction is larger than the spacing in the XX ′ direction in the main body portions of the probes P2 to P5 located next in the XX ′ direction. Since it is large, it is possible to easily solder and remove the solder between the connecting portion and the conductor portion C21d for each of the probes P2 to P5. Moreover, since the conductor portion C21d protrudes from the second fixing holes C21c1 to C4 at the time of solder connection, the protruding portion of the conductor portion C21d can be easily soldered to the connection portion of the probes P2 to P5.

  Fourth, the probe card C2 has the fourth technical feature and effect of the probe card C1. This is because the connection parts of the probes P2 to P5 and the conductor part C21d are mechanically connected.

  Fifth, since the conductor portion C21d is a solder wire disposed in each of the second fixing holes C21c1, C21c2, C21c3, and C21c4, the solder connection between the conductor portion C21d and the connecting portions of the probes P2 to P5 is automated by the apparatus. It becomes possible to do.

  Hereinafter, a probe card C3 according to Embodiment 3 of the present invention will be described with reference to FIGS. 3A to 3F. The probe card C3 includes a plurality of cantilever type probes P6 to P9 and a fixing portion. Hereinafter, each component of the probe card C3 will be described in detail. FIG. 3A shows the Y-Y ′ direction and the X-X ′ direction. The Y-Y ′ direction and the X-X ′ direction correspond to the planar direction of the substrate C22 of the probe card C3. The X-X ′ direction intersects the Y-Y ′ direction at a right angle. 3B to 3E show the Y-Y 'direction and the Z-Z' direction. The Z-Z ′ direction corresponds to the height direction of the probe card C3 and the height directions of the probes P6 to P9.

  The fixing portion includes a fixing plate C31 and a substrate C22 as best shown in FIG. 3F. The fixed plate C31 has the same configuration as the fixed plate C21 of the second embodiment except for the following differences. Therefore, the description which overlaps with the fixed plate C21 is abbreviate | omitted among description of the fixed plate C31. Note that C31f shown in FIG. 3F is a positioning hole, and C31g is a screw hole.

  The first to fourth portions of the fixing plate C31 are replaced with a plurality of first slits C21a1, C21b1, a plurality of first fixing holes C21a2, C21b2, a plurality of second fixing holes C21c1-4, and a plurality of conductor portions C21d. A plurality of first slits C31a, a plurality of first fixing holes C31b, a plurality of second fixing holes C31c1 to C4, a plurality of conductor portions C31d, and a plurality of third fixing holes C31e are provided.

  Hereinafter, the first slit C31a, the first fixing hole C31b, the second fixing holes C31c1 to C4, the conductor part C31d, and the third fixing hole C31e of the second part of the fixing plate C31 will be described as examples. The first slits C31a are provided in the second portion of the fixed plate C31 so as to be spaced apart and staggered in the X-X ′ direction (the arrangement direction of the probes P6 to P9). The first fixing holes C31b are respectively provided in the second part of the fixing plate C31 so as to communicate with the end of the first slit C31a in the Y direction (one side in the longitudinal direction of the probes P6 to P9).

  As best shown in FIG. 3F, the second fixing holes are spaced in the XX ′ direction in the order of C31c1, C31c2, C31c3, and C31c4 in the Y ′ direction portion from the first slit C31a of the fixing plate C31. Opened repeatedly. The second fixing holes C31c1, C31c2, C31c3, and C31c4 are arranged in a zigzag manner in the XX ′ direction so as to correspond to the positions of the rear end portions of the connecting portions described later of the probes P6, P9, P7, and P8. The configuration is the same as the second fixing holes C21c1, C21c2, C21c3, and C21c4 of the fixing plate C21 of the second embodiment. The interval in the YY ′ direction between the second fixing holes located next to each other in the XX ′ direction is the same as that in the XX ′ direction of the main body described later of the probes P6 and P9 located next in the XX ′ direction. Intervals between the probes P9 and P7 located next to each other in the XX ′ direction, the intervals between the main parts described later in the XX ′ direction, and between the probes P7 and P8 located next to each other in the XX ′ direction. It is larger than the interval in the XX ′ direction and the interval in the XX ′ direction of the main body portion to be described later of the probes P8 and P6 located next to each other in the XX ′ direction.

  The conductor portion C31d has the same configuration as the conductor portion C21d of the fixing plate C21 of Example 2 except that the conductor portion C31d is disposed in each of the second fixing holes C31c1, C31c2, C31c3, and C31c4. The distance in the YY ′ direction of the conductor part C31d located adjacent in the XX ′ direction is the distance in the XX ′ direction of the body part described later of the probes P6 and P9 located adjacent in the XX ′ direction. , An interval in the XX ′ direction of a body part described later of the probes P9 and P7 located next to each other in the XX ′ direction, and an X of a body part described later of the probes P7 and P8 located in the XX ′ direction. It is larger than the interval in the −X ′ direction and the interval in the XX ′ direction of the main body portion to be described later of the probes P8 and P6 located adjacent in the XX ′ direction.

  The third fixing hole C31e is located between the first slit C31a and the second fixing holes C31c1, C31c2, C31c3, and C31c4 so as to be positioned in the vicinity of the second fixing holes C31c1, C31c2, C31c3, and C31c4. Each is provided in the second part. The third fixing hole C31e is disposed at a position corresponding to a position of a branch portion of a connecting portion described later of the probes P6 to P9.

  As shown in FIG. 3A, the probes P6 to P9 are made of a conductive material (for example, Cu, Au, W, Rh, NiCo, PdCo, AgPdCu, Ru, Ir, or a composite metal material thereof). It is a thin plate. The dimensions of the probes P6 to P9 in the Y-Y ′ direction (second direction) are different. Specifically, the dimension of the probe P7 in the Y-Y ′ direction is larger than the dimension of the probe P6 in the Y-Y ′ direction. The dimension of the probe P8 in the Y-Y ′ direction is larger than the dimension of the probe P7 in the Y-Y ′ direction. The dimension of the probe P9 in the Y-Y ′ direction is larger than the dimension of the probe P8 in the Y-Y ′ direction. In the third embodiment, the main bodies of the probes P6 to P9 are fixed on the first to fourth parts of the fixing plate C31 so that the probes are repeatedly arranged in the order of P6, P9, P7, and P8. Hereinafter, the probes P6 to P9 fixed to the second part with an interval in the X-X ′ direction (first direction (the arrangement direction of the probes P6 to P9)) will be described as an example.

  As best shown in FIG. 3B, the probe P <b> 6 includes a main body portion 31, leg portions 32, beams 33 a and 33 b, a contact portion 34, and a connection portion 35.

  The main body 31 is a substantially trapezoidal plate in a side view. The main body 31 includes a first end 311 (tip portion) on the Y direction side (one side in the longitudinal direction of the probe P6) and a second end portion 312 on the Y ′ direction side (the other side in the longitudinal direction of the probe P6). (Rear end portion), a third end portion 313 on the Z ′ direction side (one side in the height direction of the probe P6), and a fourth end portion 314 on the Z direction side (the other side in the height direction of the probe P6). And a through hole. The through hole penetrates the center portion of the main body portion 31 in the X-X ′ direction. The third end 313 is in contact with the fixed plate C31.

  The leg portion 32 is a plate provided integrally with an end portion in the Y direction of the third end portion 313 of the main body portion 31. The leg portion 32 has the same configuration as the leg portion 22a of the probe P2 of the second embodiment. The leg part 32 has a trunk part 321 and a branch part 322. The trunk 321 has a shape corresponding to the shape of the first slit C31a corresponding to the fixed plate C31. The trunk 321 is detachably fitted to the corresponding first slit C31a. The branch portion 322 has a shape corresponding to the shape of the first fixing hole C31b corresponding to the fixing plate C31. The branch part 322 is detachably fitted in the corresponding first fixing hole C31b.

  The beams 33a and 33b have the same configuration as the beams 23a and 23b of the probe P2 of the second embodiment. The contact portion 34 has the same configuration as the contact portion 24 of the probe P2 of the second embodiment.

  The connection portion 35 is provided integrally with the second end portion 312 of the main body portion 31. The connection part 35 has a trunk part 351 and a branch part 352. The trunk 351 is a plate that is provided integrally with the second end 312 of the main body 31 and extends in the Y ′ direction. A through hole is provided at the end in the Z ′ direction of the trunk 351. The trunk portion 351 is mechanically and electrically connected to the conductor portion C31d in the second fixing hole C31c1 of the fixing plate C31 so as to be detachable. For example, the trunk portion 351 is mechanically and electrically connected to the conductor portion C31d by solder connection, conductive adhesive, wire bonding, welding, or the like. The branch portion 352 is a bifurcated plate extending from the trunk portion 351 in the Z ′ direction. The branch part 352 has a shape corresponding to the shape of the third fixing hole C31e in the vicinity of the second fixing hole C31c1 of the fixing plate C31. The branch part 352 is detachably fitted in the third fixing hole C31e.

  As best shown in FIG. 3C, the probe P7 has substantially the same configuration as the probe P6 except that the configuration of the connecting portion 35 'of the probe P7 is different from the configuration of the connecting portion 35 of the probe P6. Therefore, in the description of the probe P7, the description overlapping with the probe P6 is omitted.

  The connecting portion 35 ′ has an arm 351 ′ instead of the trunk portion 351. The arm 351 ′ is a substantially L-shaped plate that extends in the Y ′ direction from the second end 312 of the main body 31 and then extends in the Z ′ direction. A through hole is provided at the end in the Z ′ direction of the arm 351 ′. The branch portion 352 of the connection portion 35 ′ extends not in the trunk portion 351 but in the Z ′ direction from the end portion in the Z ′ direction of the arm 351 ′. With such a configuration, the length from the contact portion 34 of the probe P7 to the connection portion 35 ′ (the dimension of the probe P7 in the YY ′ direction) is the length from the contact portion 34 of the probe P6 to the connection portion 35 ( It is longer (larger) than the dimension of the probe P6 in the YY ′ direction. The end of the arm 351 'in the Z' direction is mechanically and electrically connected to the conductor C31d in the second fixing hole C31c3 of the fixing plate C31. For example, the arm 351 'is mechanically and electrically connected to the conductor portion C31d by solder connection, conductive adhesive, wire bonding, welding, or the like.

  As best shown in FIG. 3D, probe P8 has substantially the same configuration as probe P7, except for the following differences. Therefore, in the description of the probe P8, the description overlapping with the probe P7 is omitted. The difference 1 is that the leg portion 32 of the probe P8 is provided not at the end portion in the Y direction of the third end portion 313 of the main body portion 31 but at the center portion of the third end portion 313. The difference 2 is that the dimension in the YY ′ direction of the arm 351 ″ of the connection part 35 ″ of the probe P8 is larger than the dimension in the YY ′ direction of the arm 351 ′ of the connection part 35 ′ of the probe P7. It is. With such a configuration, the length from the contact portion 34 of the probe P8 to the connection portion 35 ″ (the dimension of the probe P8 in the YY ′ direction) is the length from the contact portion 34 of the probe P7 to the connection portion 35 ′. It is longer (larger) than (the dimension in the YY ′ direction of the probe P7). The end portion in the Z ′ direction of the arm 351 ″ is mechanically and electrically connected to the conductor portion C31d in the second fixing hole C31c4 of the fixing plate C31. For example, the arm 351 ″ is mechanically and electrically connected to the conductor portion C 31 d by solder connection, conductive adhesive, wire bonding, welding, or the like.

  As best shown in FIG. 3E, probe P9 has substantially the same configuration as probe P8, except for the following differences. Therefore, the description overlapping with the probe P8 is omitted in the description of the probe P9. The difference is that the dimension of the arm 351 ′ ″ of the connecting part 35 ′ ″ of the probe P9 in the YY ′ direction is larger than the dimension of the arm 351 ″ of the connecting part 35 ″ of the probe P8 in the YY ′ direction. Is also big. With such a configuration, the length from the contact portion 34 of the probe P9 to the connection portion 35 ′ ″ (the dimension of the probe P9 in the YY ′ direction) is from the contact portion 34 of the probe P8 to the connection portion 35 ″. Is longer (larger) than the length (dimension in the YY ′ direction of the probe P8). The end portion in the Z ′ direction of the arm 351 ″ ″ is mechanically and electrically connected to the conductor portion C 31 d in the second fixing hole C 31 c 2 of the fixing plate C 31. For example, the arm 351 ″ ″ is mechanically and electrically connected to the conductor portion C 31 d by solder connection, conductive adhesive, wire bonding, welding, or the like.

  The probes P6 to P9 described above are created using MEMS (Micro Electro Mechanical Systems) technology in the same manner as the probe P1.

  Hereinafter, an assembly procedure of the probe card C3 having the above-described configuration will be described in detail. A fixing plate C31 is prepared. The conductor portions C31d are respectively inserted into the second fixing holes C31c1 to C4-4 of the fixing plate C31. The conductor portion C31d protrudes from the second fixing holes C31c1 to C31-4 in the Z direction.

  A plurality of probes P6 to P9 are prepared. The main bodies of the probes P6 to P9 are fixed on the fixing plate C31 so that the probes are repeatedly arranged in the thickness direction of the probes P6 to P9 in the order of P6, P9, P7, and P8. Specifically, the trunk portion 321 of the leg portion 32 of the probes P6 to P9 is fitted into the first slit C31a of the fixing plate C31, and the branch portion 322 of the leg portion 32 of the probes P6 to P9 is fitted to the first portion of the fixing plate C31. Each is fitted into the fixing hole C31b. At the same time, the branch portions 352 of the connecting portions of the probes P6 to P9 are fitted into the third fixing holes C31e, respectively. Thereby, the connection part of the probes P6-P9 is arrange | positioned in the vicinity of the conductor part C31d. Thereafter, the conductor part C31d is soldered to the connection parts of the probes P6 to P9. When the probes P6 to P9 are fixed to the fixing plate C31 as described above, a jig or the like is inserted into the through holes of the probes P6 to P9, and the leg portions 32 of the probes P6 to P9 are connected to the first slit C31a and the first slit C31a. It is preferable that the first fixed hole C31b is fitted and the connecting portions of the probes P6 to P9 are fitted to the third fixed hole C31e.

  After fixing the main body of the probes P6 to P9 on the fixing plate C31, the fixing plate C31 is fixed to the substrate C22 as in the second embodiment. At this time, the conductor portion C31d of the fixed plate C31 contacts the first electrode C22a of the substrate C22 and is electrically connected. The probe card C3 is assembled as described above.

  The probe card C3 as described above exhibits the first and third to fifth technical features and effects of the probe card C2. In addition, the probe card C3 can replace the probes P6 to P9 individually and simply by the following steps. Of the probes P6 to P9, the solder connection between the connection portion of the probe to be replaced and the conductor portion C31d is released. The probe leg 32 is pulled out from the first slit C31a and the first fixing hole C31b, and the branch 352 of the probe connecting portion is pulled out from the third fixing hole C31e of the fixing plate C31. Thereafter, the leg portion 32 of the new probe is fitted into the first slit C31a and the first fixing hole C31b, and the branch portion 352 of the connecting portion of the new probe is fitted into the third fixing hole C31e of the fixing plate C31. Let Thereafter, the connection portion of the new probe is solder-connected to the conductor portion C31d.

  Note that when the probe card C3 includes an ST substrate, the same configuration as the probe card C2 is possible.

  Hereinafter, a probe card C4 according to Embodiment 4 of the present invention will be described with reference to FIGS. 4A to 4G. The probe card C4 includes a plurality of cantilever probes P10 to P13 and a fixing portion. Hereinafter, each component of the probe card C4 will be described in detail. FIG. 4A shows the Y-Y ′ direction and the X-X ′ direction. The Y-Y ′ direction and the X-X ′ direction correspond to the planar direction of the substrate C22 of the probe card C4. The X-X ′ direction intersects the Y-Y ′ direction at a right angle. 4B to 4E show the Y-Y 'direction and the Z-Z' direction. The Z-Z ′ direction corresponds to the height direction of the probe card C4 and the height direction of the probes P10 to P13.

  The fixing part includes a fixing plate C41 and a substrate C22 as best shown in FIG. 4G. The fixed plate C41 has the same configuration as the fixed plate C21 of the second embodiment except for the following differences. Therefore, the description which overlaps with the fixed plate C21 is abbreviate | omitted among description of the fixed plate C41. Note that C41f shown in FIG. 4G is a positioning hole, and C41g is a screw hole.

  The first to fourth portions of the fixing plate C41 are replaced with a plurality of first slits C21a1, C21b1, a plurality of first fixing holes C21a2, C21b2, a plurality of second fixing holes C21c1-4, and a plurality of conductor portions C21d. A plurality of first slits C41a1, a plurality of first fixing holes C41a2, a plurality of first fixing holes C41b, a plurality of second fixing holes C41c1 to C4, and a plurality of conductor portions C41d are provided.

  Hereinafter, the first slit C41a1, the first fixing holes C41a2, C41b, the second fixing holes C41c1 to C4-4, and the conductor part C41d of the second part of the fixing plate C41 will be described as an example. The first slits C41a1 are provided in the second part of the fixed plate C41 so as to be spaced apart and staggered in the X-X ′ direction (first direction (the arrangement direction of the probes P10 to P13)). The first fixing hole C41a2 is provided in the second part of the fixing plate C41 so as to communicate with the end of the first slit C41a1 in the Y direction (one side in the longitudinal direction of the probes P10 to P13). The first fixing holes C41b are provided in the second portion of the fixing plate C41 so as to be staggered and spaced apart in the XX ′ direction from the first slit C41a1 of the fixing plate C41 in the Y ′ direction. .

  As best shown in FIG. 4G, the second fixing holes are arranged in the XX ′ direction in the order of C41c1, C41c2, C41c3, and C41c4 in the Y ′ direction portion from the first fixing hole C41b of the fixing plate C41. It is repeatedly provided at intervals. The second fixing holes C41c1, C41c2, C41c3, and C41c4 are arranged in a zigzag manner in the XX ′ direction so as to correspond to the position of a hanging portion 452 of a connecting portion described later of the probes P10, P13, P11, and P12. The configuration is the same as the second fixing holes C21c1, C21c2, C21c3, and C21c4 of the fixing plate C21 of the second embodiment. The interval in the YY ′ direction between the second fixing holes located next to each other in the XX ′ direction is the same as that in the XX ′ direction of the main body described later of the probes P10 and P13 located next in the XX ′ direction. Interval of the main body (described later) of the probes P13 and P11 located next to each other in the XX 'direction, and the distance of the main body described later of the probes P11 and P12 located adjacent to each other in the XX' direction. It is larger than the interval in the XX ′ direction and the interval in the XX ′ direction of the main body portion to be described later of the probes P12 and P10 located next to each other in the XX ′ direction.

  The conductor portion C41d is a conductive pin disposed in each of the second fixing holes C41c1, C41c2, C41c3, and C41c4, as best shown in FIG. 4F. The conductor portion C41d is fixed to the second fixing holes C41c1, C41c2, C41c3, and C41c4. A bifurcated portion C41d1 is provided at the end of the conductor portion C41d in the Z direction. An end portion in the Z ′ direction of the conductor portion C41d is electrically connected to the first electrode C22a of the substrate C22. The distance in the YY ′ direction of the conductor part C41d located next in the XX ′ direction is the distance in the XX ′ direction of the body part described later of the probes P10 and P13 located next in the XX ′ direction. , An interval in the XX ′ direction of the body part described later of the probes P13 and P11 located next to each other in the XX ′ direction, and an X of the body part described later of the probes P11 and P12 located in the XX ′ direction. It is larger than the interval in the −X ′ direction and the interval in the XX ′ direction of the main body portion to be described later of the probes P12 and P10 located adjacent in the XX ′ direction.

  As shown in FIG. 4A, the probes P10 to P13 were made of a conductive material (for example, Cu, Au, W, Rh, NiCo, PdCo, AgPdCu, Ru, Ir, or a composite metal material thereof). It is a thin plate. The dimensions of the probes P10 to P13 in the Y-Y ′ direction (second direction) are different. Specifically, the dimension of the probe P11 in the Y-Y ′ direction is larger than the dimension of the probe P10 in the Y-Y ′ direction. The dimension of the probe P12 in the Y-Y ′ direction is larger than the dimension of the probe P11 in the Y-Y ′ direction. The dimension of the probe P13 in the Y-Y ′ direction is larger than the dimension of the probe P12 in the Y-Y ′ direction. In the fourth embodiment, the main bodies of the probes P10 to P13 are fixed on the first to fourth parts of the fixing plate C41 so that the probes are repeatedly arranged in the order of P10, P13, P11, and P12. Hereinafter, the probes P10 to P13 fixed to the second part at an interval in the X-X ′ direction (first direction (the arrangement direction of the probes P10 to P13)) will be described as an example.

  As best shown in FIG. 4B, the probe P10 includes a main body 41, legs 42a and 42b, beams 43a and 43b, a contact portion 44, and a connection portion 45.

  The main body 41 is a substantially trapezoidal plate in a side view. The main body 41 includes a first end 411 (tip portion) on the Y direction side (one side in the longitudinal direction of the probe P10) and a second end portion 412 on the Y ′ direction side (the other side in the longitudinal direction of the probe P10). (Rear end portion), a third end portion 413 on the Z ′ direction side (one side in the height direction of the probe P10), and a fourth end portion 414 on the Z direction side (the other side in the height direction of the probe P10). And a through hole. The through hole penetrates the central portion of the main body 41 in the X-X ′ direction. The third end 413 is in contact with the fixed plate C41.

  The leg portion 42 a is a plate that is integrally provided at the end portion in the Y direction of the third end portion 413 of the main body portion 41. The leg part 42a has the same configuration as the leg part 22a of the probe P2 of the second embodiment. The leg part 42a has a trunk part 42a1 and a branch part 42a2. The trunk portion 42a1 has a shape corresponding to the shape of the first slit C41a1 corresponding to the fixed plate C41. The trunk portion 42a1 is detachably fitted to the corresponding first slit C41a1. The branch portion 42a2 has a shape corresponding to the shape of the first fixing hole C41a2 corresponding to the fixing plate C41. The branch part 42a2 is detachably fitted in the corresponding first fixing hole C41a2.

  The leg portion 42 b is a bifurcated plate that is provided integrally with the end portion in the Y ′ direction of the third end portion 413 of the main body portion 41 and extends from the third end portion 413 in the Z ′ direction. The leg portion 42b has a shape corresponding to the shape of the first fixing hole C41b corresponding to the fixing plate C41. The leg portion 42b is detachably fitted in the corresponding first fixing hole C41b.

  The beams 43a and 43b have the same configuration as the beams 23a and 23b of the probe P2 of the second embodiment. The contact portion 44 has the same configuration as the contact portion 24 of the probe P2 of the second embodiment.

  The connecting portion 45 is provided integrally with the second end portion 412 of the main body portion 41. The connection part 45 has an arm 451 and a hanging part 452. The arm 451 is a plate that is provided integrally with the second end 412 of the main body 41 and extends in the Y ′ direction. The hanging portion 452 is a plate extending in the Z ′ direction from the end of the arm 451 in the Y ′ direction. The hanging portion 452 is provided with a through hole. The hanging portion 452 has a shape that can be inserted into the second fixing hole C41c1 of the fixing plate C41. The hanging portion 452 is inserted into the second fixing hole C41c1, and is detachably mechanically and electrically connected to the conductor portion C41d in the second fixing hole C41c1. Specifically, the hanging portion 452 is detachably fitted to the forked portion C41d1 of the conductor portion C41d.

  As best shown in FIG. 4C, the probe P11 has substantially the same configuration as the probe P10 except that the configuration of the connection portion 45 'of the probe P11 is different from the configuration of the connection portion 45 of the probe P10. Therefore, the description which overlaps with probe P10 is abbreviate | omitted among description of probe P11. The dimension in the Y-Y ′ direction of the arm 451 ′ of the connection part 45 ′ of the connection part 45 ′ is larger than the dimension in the Y-Y ′ direction of the arm 451 of the connection part 45 of the probe P <b> 10. With this configuration, the length from the contact portion 44 of the probe P11 to the connection portion 45 ′ (dimension in the YY ′ direction of the probe P11) is the length from the contact portion 44 of the probe P10 to the connection portion 45 ( It is longer (larger) than the dimension of the probe P10 in the YY ′ direction. The hanging portion 452 is inserted into the second fixing hole C41c3, and is detachably fitted to the forked portion C41d1 of the conductor portion C41d in the second fixing hole C41c3.

  As best shown in FIG. 4D, the probe P12 has substantially the same configuration as the probe P11 except for the following differences. Therefore, the description which overlaps with probe P11 is abbreviate | omitted among description of probe P12. The difference 1 is that the dimension of the main body 41 ′ of the probe P 12 in the Y-Y ′ direction is smaller than the dimension of the main body 41 of the probe P 11 in the Y-Y ′ direction. In FIG. 4D, 411 ′ is a first end portion in the Y direction of the main body portion 41 ′, 412 ′ is a second end portion in the Y ′ direction of the main body portion 41 ′, and 413 ′ is a first end portion in the Z ′ direction of the main body portion 41 ′. The three ends 414 ′ are the fourth ends in the Z direction of the main body 41 ′. The difference 2 is that the leg part 42a of the probe P12 is provided at the center part of the main body part 41 '. The difference 3 is that the dimension in the YY ′ direction of the arm 451 ″ of the connection part 45 ″ of the probe P12 is larger than the dimension in the YY ′ direction of the arm 451 ′ of the connection part 45 ′ of the probe P11. It is. With this configuration, the length from the contact portion 44 of the probe P12 to the connection portion 45 ″ (the dimension in the YY ′ direction of the probe P12) is the length from the contact portion 44 of the probe P11 to the connection portion 45 ′. It is longer (larger) than (the dimension of the probe P11 in the YY ′ direction). A hanging portion 452 of the connection portion 45 ″ is inserted into the second fixing hole C41c4, and is detachably fitted to the forked portion C41d1 of the conductor portion C41d in the second fixing hole C41c4.

  As best shown in FIG. 4E, the probe P13 has substantially the same configuration as the probe P12 except for the following differences. Therefore, in the description of the probe P13, the description overlapping with the probe P12 is omitted. The difference 1 is that the dimension of the body part 41 ″ of the probe P 13 in the Y-Y ′ direction is larger than the dimension of the body part 41 ′ of the probe P 12 in the Y-Y ′ direction. In FIG. 4E, 411 ″ denotes a first end portion in the Y direction of the main body portion 41 ″, 412 ″ denotes a second end portion in the Y ′ direction of the main body portion 41 ″, and 413 ″ denotes a main body portion 41 ″. The third end portion 414 ″ of the Z ′ direction is the fourth end portion of the main body portion 41 ″ in the Z direction. The difference 2 is that the dimension of the arm 451 ′ ″ of the connection part 45 ′ ″ of the probe P13 in the YY ′ direction is the dimension of the arm 451 ″ of the connection part 45 ″ of the probe P12 in the YY ′ direction. Is bigger than that. With such a configuration, the length from the contact portion 44 of the probe P13 to the connection portion 45 ′ ″ (the dimension in the YY ′ direction of the probe P13) is from the contact portion 44 of the probe P12 to the connection portion 45 ″. Is longer (larger) than the length (the dimension of the probe P13 in the YY ′ direction). The hanging portion 452 of the connection portion 45 ″ ″ of the probe P 13 is inserted into the second fixing hole C 41 c 2 and is detachably fitted to the forked portion C 41 d 1 of the conductor portion C 41 d in the second fixing hole C 41 c 2.

  The probes P10 to P13 described above are created using MEMS (Micro Electro Mechanical Systems) technology in the same manner as the probe P1.

  Hereinafter, the assembly procedure of the probe card C4 having the above-described configuration will be described in detail. A fixing plate C41 is prepared. The conductor portions C41d are inserted into the second fixing holes C41c1 to C4-4 of the fixing plate C41.

  A plurality of probes P10 to P13 are prepared. The main bodies of the probes P10 to P13 are fixed on the fixing plate C41 so that the probes are repeatedly arranged in the arrangement direction in the order of P10, P13, P11, and P12. Specifically, it is as follows. 1) The trunk portion 42a1 of the leg portion 42a of the probes P10 to P13 is fitted into the first slit C41a1 of the fixing plate C41, and the branch portion 42a2 of the leg portion 42a of the probes P10 to P13 is fitted to the first fixing hole C41a2 of the fixing plate C41. To fit each. 2) The leg portions 42b of the probes P10 to P13 are fitted into the first fixing holes C41b of the fixing plate C41. 3) The hanging portion 452 of the connecting portion of the probes P10, P13, P11, and P12 is inserted into the second fixing holes C41c1, C41c2, C41c3, and C41c4 of the fixing plate C41, and is fitted to the bifurcated portion C41d1 of the conductor portion C41d. . When the probes P10 to P13 are fixed to the fixing plate C41, a jig or the like is inserted into the through holes of the probes P10 to P13, and the leg portions 42a of the probes P10 to P13 are inserted into the first slit C41a1 and the first fixing hole. C41a2 is fitted, the leg portions 42b of the probes P10 to P13 are fitted to the first fixing hole C41b, and the connection portions of the probes P10 to P13 are fitted to the bifurcated portion C41d1 of the conductor portion C41d.

  After fixing the main body of the probes P10 to P13 on the fixing plate C41, the fixing plate C41 is fixed to the substrate C22 as in the second embodiment. At this time, the conductor portion C41d of the fixing plate C41 contacts the first electrode C22a of the substrate C22 and is electrically connected. The probe card C4 is assembled as described above.

  The probe card C4 as described above exhibits the first, third, and fourth technical features and effects of the probe card C2. In addition, the probe card C4 can exchange the probes P10 to P13 individually and simply by the following steps. First, of the probes P10 to P13, the probe to be replaced is removed from the fixing plate C41 as follows. 1) Pull out the connecting portion of the probe to be replaced from the bifurcated portion C41d1 of the conductor portion C41d. 2) Pull out the leg part 42a of the probe from the first slit C41a1 and the first fixing hole C41a2. 3) Pull out the leg portion 42b from the first fixing hole C41b. Thereafter, a new probe is attached to the fixing plate C41 as follows. 3) Fit the leg portion 42a of the new probe into the first slit C41a1 and the first fixing hole C41a2. 4) The leg portion 42b of the probe is fitted into the first fixing hole C41b. 5) The hanging portion 452 of the connecting portion of the probe is fitted to the forked portion C41d1 of the conductor portion C41d of the fixing plate C41.

  Furthermore, since the probes P10 to P13 are fitted to the bifurcated portion C41d1 of the conductor portion C41d, the connection between the conductor portion C21d and the connecting portions of the probes P10 to P13 can be automated by the apparatus.

  In addition, when the probe card C4 includes an ST substrate, the same configuration as the probe card C2 can be used.

  The probe card described above is not limited to the above-described embodiment, and can be arbitrarily changed in design within the scope of the claims. Details will be described below.

  The 1st probe card of the present invention should just be provided with the above-mentioned example or a plurality of below-mentioned probes and fixing parts at least. The probe of a 1st probe card should just have the main-body part fixed at intervals in the 1st direction on the fixing | fixed part, and the connection part extended radially from this main-body part. For example, the plurality of beams of the probe can be configured to extend from the main body portion to one side in the longitudinal direction of the probe. Further, the beam of the probe can be provided at any part of the main body. It is also possible to omit the probe beam and provide the contact portion at the fourth end of the main body. The leg portion of the probe may be omitted, and the main body portion may be directly fixed to the fixing portion. The connecting portion of the probe may be configured so that it cannot be bent or bent with respect to the main body portion. Further, the probe connection portion may be configured to be able to bend or bend in at least one of the thickness direction and the height direction of the probe with respect to the main body portion.

  The fixing portion of the first probe card can be arbitrarily changed as long as it has the following configuration. 1) The main body portion of the probe of any one of the above aspects of the first probe card is fixed on the fixing portion with a gap in the first direction. 2) The plurality of conductor portions of the fixed portion are arranged at a wider interval than the main body portion of the probe of any one of the above aspects of the first probe card, and the conductor portions are mechanically and electrically connected to the connection portion of the probe. It is connected.

  For example, the fixing portion of any one of the above-described aspects of the first probe card can have a configuration having at least one of a plurality of first slits and first fixing holes arranged at intervals in the first direction. It is. It is preferable that the leg portion of the probe of any of the above-described aspects of the first probe card is detachably fixed to at least one of the first slit and the first fixing hole.

  The fixing part of any of the above-described aspects of the first probe card can be configured to have at least one of a plurality of second slits and second fixing holes. A conductor portion may be disposed in at least one of the second slit and the second fixing hole. The conductor portion can be a solder wire or a relay member (for example, a conductive pin, a probe, or a spring probe). The solder wire is soldered to the connecting portion of the probe of any one of the above aspects of the first probe card. The relay member may have a bifurcated portion or a recess into which the connecting portion of the probe of any one of the above aspects of the first probe card is detachably fitted. Moreover, the conductor part of any one of the above-described aspects can be a through-hole electrode or the like provided in the fixed part. In this case, the second slit and the second fixing hole are omitted.

  The fixing part of any aspect of the first probe card may have at least one of a plurality of third slits and third fixing holes arranged in the vicinity of the conductor part of any of the above aspects. good. The connecting portion of the probe according to any one of the aspects of the first probe card is detachably fixed to at least one of the third slit and the third fixing hole.

  The fixing portion of any one of the above aspects of the first probe card of any one of the above aspects may be formed of a single insulating plate or a plurality of insulating plates. For example, the above-described fixing portion can be configured to include an insulating fixing plate on which the main body portion of the probe of any one of the above-described aspects of the first probe card is fixed, and a substrate. In this case, the fixing plate can have a conductor portion of any of the above-described aspects. This conductor portion is mechanically and electrically connected to the connection portion of the probe of any of the above-described aspects of the first probe card. The substrate is electrically connected to the conductor portion.

  The second probe card of the present invention can be arbitrarily changed in design as long as it includes at least a plurality of probes and fixing portions described later in the above embodiment or later. The plurality of probes of the second probe card can be arbitrarily changed as long as it has the following configuration. 1) The main body portion of the probe is fixed on the fixing portion described later or in the first direction with a gap in the first direction. 2) The second direction dimension of the probe located next to the first direction is different, and the second direction is a longitudinal direction of the probe and a direction intersecting the first direction. 3) A probe connecting portion is provided in the main body, and is mechanically and electrically connected to the conductor portion of the above-described embodiment or a fixing portion described later. For example, one or more beams of the probe can be configured to extend from the main body portion to one side in the longitudinal direction of the probe. Further, the beam of the probe can be provided at any part of the main body. It is also possible to omit the probe beam and provide the contact portion at the fourth end of the main body. The leg portion of the probe may be omitted, and the main body portion may be directly fixed to the fixing portion. The connecting portion of the probe may be configured to be able to be bent or bent in at least one of the thickness direction and the height direction of the probe with respect to the main body portion.

  The fixing part of the second probe card can be arbitrarily changed as long as it has the following configuration. 1) The main body portion of the probe according to any one of the above aspects of the second probe card is fixed on the fixing portion with a gap in the first direction. 2) The plurality of conductor portions of the fixed portion are arranged at intervals in the first direction and are mechanically and electrically connected to the connection portion. 3) The second conductor portion positioned adjacently in the first direction has the second interval so that the second-direction interval between the adjacent conductor portions is larger than the first-direction interval between the adjacent probe main body portions. Misaligned in the direction.

  For example, the fixing portion of any of the above-described aspects of the second probe card can have a configuration having at least one of a plurality of first slits and first fixing holes arranged at intervals in the first direction. It is. It is preferable that the leg portion of the probe of any of the above-described aspects of the second probe card is detachably fixed to at least one of the first slit and the first fixing hole. Moreover, the recessed part may be provided similarly to Example 1 in the back side part of at least one of the 1st slit and 1st fixing hole of the fixing | fixed part of any aspect mentioned above of the 2nd probe card. A resin may be applied in the recess, and a leg portion of the probe fitted or inserted into at least one of the first slit and the first fixing hole may be fixed with the resin.

  The fixing part in any one of the above-described aspects of the second probe card can be configured to have at least one of a plurality of second slits and second fixing holes. A conductor portion may be disposed in at least one of the second slit and the second fixing hole. The conductor portion can be a solder wire or a relay member (for example, a conductive pin, a probe, or a spring probe). The solder wire is soldered to the connecting portion of the probe of any one of the above aspects of the second probe card. The relay member may have a bifurcated portion or a recess into which the connecting portion of the probe of any one of the above aspects of the second probe card is detachably fitted. Moreover, the conductor part in any one of the above-described aspects can be a surface electrode or a through-hole electrode provided in the fixed part. In this case, the second slit and the second fixing hole are omitted.

  The fixing part of any aspect of the second probe card may have at least one of a plurality of third slits and third fixing holes arranged in the vicinity of the conductor part of any of the above aspects. good. The connecting portion of the probe of any one of the above aspects of the second probe card is detachably fixed to at least one of the third slit and the third fixing hole. The fixing portion of any of the above-described aspects of the second probe card may be configured with a single insulating plate or may be configured with a plurality of insulating plates. For example, the fixing portion may be configured to include an insulating fixing plate to which the main body portion of the probe of any one of the above aspects of the second probe card is fixed, and a substrate to which the fixing plate is fixed. Is possible. In this case, the substrate can be configured to have a conductor portion such as a surface electrode or a through-hole electrode. This conductor portion is mechanically and electrically connected to the connection portion of the probe of any one of the above aspects of the second probe card. The conductor portions of any of the above-described aspects of the second probe card are preferably arranged at a wider interval in the probe arrangement direction than the probe main body portions. In this case, it is preferable that the connecting portion of the probe according to any one of the aspects described above extends radially.

  The first slit, the second slit, or the third slit according to any one of the aspects described above has a plurality of holes arranged in the longitudinal direction of the slit, and of the holes, holes adjacent to each other in the longitudinal direction communicate with each other. It is possible to make it the structure which carries out. For example, the first slit H shown in FIGS. 5A and 5B has a plurality of holes H1. The holes H1 are arranged in the longitudinal direction of the first slit H, and the holes H1 adjacent in the longitudinal direction communicate with each other. By miniaturizing the probe according to any one of the aspects described above, the first slit according to any one of the aspects described above is also miniaturized. As described above, by forming the first slit with a plurality of holes, the fine first slit can be easily formed in the fixed portion. The first slit is preferably fitted or inserted so that the leg portion of the probe according to any one of the aspects described above can be detachably attached.

  Note that the materials, shapes, dimensions, number, arrangement, and the like constituting each component of the probe card in the above-described embodiments and design modifications are examples, and as long as similar functions can be realized. It is possible to change the design arbitrarily. The above-described embodiments and design modification examples can be combined with each other as long as they do not contradict each other. The design of the first direction of the present invention can be arbitrarily changed as long as it is the arrangement direction of the probe according to any one of the above aspects. The second direction of the present invention can be arbitrarily changed in design as long as it is the longitudinal direction of the probe of any of the above-described aspects and intersects the first direction. The ZZ ′ direction (third direction) of the present invention is the height direction of the probe of any of the above-described aspects and can be arbitrarily changed in design as long as it intersects the first and second directions. It is.

C1: Probe card P1: Probe 11: Body portion 111: First end portion 112: Second end portion 113: Third end portion 114: Fourth end portion 12a: Leg portion 12b: Leg portion 13: Beam 14: Contact portion 15: Connection part C11: Fixed plate (part of the fixed part)
C11a: first slit C11b: first slit C11c: recess C11d: positioning hole C11e: screw hole C12: substrate (part of the fixing portion)
C12a: Conductor portion C12b: Through-hole electrode S: Solder C2: Probe card P2: Probe 21: Body portion 211: First end portion 212: Second end portion 213: Third end portion 214: Fourth end portion 22a: Leg Part 22b: Leg part 23a: Beam 23b: Beam 24: Contact part 25: Connection part P3: Probe 21: Body part 211: First end part 212: Second end part 213: Third end part 214: Fourth end part 22a: Leg part 22b: Leg part 23a: Beam 23b: Beam 24: Contact part 25 ': Connection part P4: Probe 21': Main body part 211 ': First end part 212': Second end part 213 ': Third End portion 214 ′: Fourth end portion 22a: Leg portion 22b: Leg portion 23a: Beam 23b: Beam 24: Contact portion 25 ′: Connection portion P5: Probe 21 ′: Body portion 211 ′: First end portion 212 ′: Second end 21 ': Third end 214': the fourth end portion 22a: leg 22b: leg 23a: Beam 23b: beam 25 '': connecting portion C21: (part of the fixed portion) fixed plate
C21a1: first slit C21b1: first slit C21a2: first fixing hole C21b2: first fixing hole C21c1-4: second fixing hole C21d: conductor portion C21e: positioning hole C21f: screw hole C22: substrate (fixing portion) Part of
C22a: first electrode C3: probe card P6: probe 31: main body 311: first end 312: second end 313: third end 314: fourth end 32: leg 33a: beam 33b: beam 34: Contact portion 35: Connection portion P7: Probe 31: Main body portion 311: First end portion 312: Second end portion 313: Third end portion 314: Fourth end portion 32: Leg portion 33a: Beam 33b: Beam 34 : Contact portion 35 ': Connection portion P8: Probe 31: Main body portion 311: First end portion 312: Second end portion 313: Third end portion 314: Fourth end portion 32: Leg portion 33a: Beam 33b: Beam 34 : Contact part 35 '': connection part P9: probe 31: main body part 311: first end part 312: second end part 313: third end part 314: fourth end part 32: leg part 33a: beam 33b: beam 34: Contact part 5 ''': connecting portion C31: fixing plate (part of the fixed part)
C31a: first slit C31b: first fixing hole C31c1-4: second fixing hole C31d: conductor part C31e: third fixing hole C31f: positioning hole C31g: screw hole C22: substrate (part of fixing part)
C22a: first electrode C4: probe card P10: probe 41: body portion 411: first end portion 412: second end portion 413: third end portion 414: fourth end portion 42: leg portion 43a: beam 43b: beam 44: Contact portion 45: Connection portion P11: Probe 41: Main body portion 411: First end portion 412: Second end portion 413: Third end portion 414: Fourth end portion 42: Leg portion 43a: Beam 43b: Beam 44 : Contact portion 45 ': connection portion P12: probe 41': body portion 411 ': first end portion 412': second end portion 413 ': third end portion 414': fourth end portion 42: leg portion 43a: Beam 43b: Beam 44: Contact part 45 '': Connection part P13: Probe 41 '': Main body part 411 '': First end part 412 '': Second end part 413 '': Third end part 414 '' : 4th end part 42: Leg part 43a: Beam 43b: Bi 44: Contact portion 45 ″: Connection portion C41: Fixed plate (part of the fixed portion)
C41a1: first slit C41a2: first fixing hole C41b: first fixing hole C41c1-4: second fixing hole C41d: conductor portion C41e: positioning hole C41f: screw hole C22: substrate (part of fixing portion)
C22a: first electrode

Claims (11)

Multiple probes,
With a fixed part,
The probe has a body portion fixed on the fixing portion with a gap in a first direction;
A connecting portion extending radially from the main body,
The probe unit has a plurality of conductor portions arranged at wider intervals than the main body portion, and the conductor portions are mechanically and electrically connected to the connection portion. Multiple probes,
With a fixed part,
The probe has a body portion fixed on the fixing portion with a gap in a first direction;
A connecting portion provided in the main body,
The second direction dimension of the probe located next to the probe in the first direction is different, the second direction is a longitudinal direction of the probe and a direction intersecting the first direction,
The fixed portion has a plurality of conductor portions that are arranged at intervals in the first direction and are mechanically and electrically connected to the connection portion,
Of the conductor portions, the conductor portion located next to the conductor in the first direction has an interval in the first direction of the body portion of the probe located adjacent to the conductor portion located in the second direction. A probe card which is displaced in the second direction so as to be larger than In the probe card according to claim 1 or 2,
The fixing portion further includes at least one of a plurality of first slits and first fixing holes arranged at intervals in the first direction,
The probe further includes a leg provided on the main body,
The leg is detachably fixed to at least one of the first slit and the first fixing hole,
The connection part is a probe card mechanically and electrically connected to the conductor part so as to be detachable. In the probe card according to any one of claims 1 to 3,
The fixing portion further includes at least one of a plurality of second slits and second fixing holes,
The conductor portion of the fixing portion is a solder wire disposed in at least one of the second slit and the second fixing hole, and the conductor portion is soldered to the connection portion of the probe, A probe card in which the conductor portion is mechanically and electrically connected to the connection portion. In the probe card according to any one of claims 1 to 3,
The fixing portion further includes at least one of a plurality of second slits and second fixing holes,
The conductor portion of the fixed portion is disposed in at least one of the second slit and the second fixed hole, and has a bifurcated portion or a concave portion,
A probe card in which the connection portion is mechanically and electrically connected to the conductor portion by fitting the connection portion of the probe into the bifurcated portion or the concave portion of the conductor portion. In the probe card according to any one of claims 1 to 5,
The fixing part further includes at least one of a plurality of third slits and third fixing holes arranged in the vicinity of the conductor part,
The probe card in which the connecting portion of the probe is fixed to at least one of the third slit and the third fixing hole. In the probe card according to any one of claims 1 to 6,
The probe card can be bent or bent in at least one of a thickness direction and a height direction of the probe with respect to the main body portion. In the probe card according to any one of claims 1 to 7,
The fixing portion includes a fixing plate to which the main body portion of the probe is fixed;
A substrate on which the fixing plate is fixed;
The probe card in which the substrate has the conductor. In the probe card according to any one of claims 1 to 7,
The fixing portion includes the conductor portion and a fixing plate to which the body portion of the probe is fixed;
A probe card further comprising a substrate electrically connected to the conductor portion. In the probe card according to any one of claims 1 to 9,
The probe has a beam extending from the main body portion to one side in the longitudinal direction of the probe,
A contact portion provided on the beam and capable of contacting an electrode to be inspected of the probe card;
The connection part is a probe card extending from the main body part to the other side in the longitudinal direction. The probe card according to claim 3, wherein
The first slit has a plurality of holes arranged in the longitudinal direction of the first slit,
A probe card in which holes adjacent to each other in the longitudinal direction of the first slit communicate with each other.

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