JP2016145780A - Measurement device and measurement method thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a measurement device and a measurement method thereof capable of reducing wear of a placing table on which a workpiece having recesses and projections formed on a surface thereof is put and accurately measuring positions of the recesses or the projections on the workpiece.SOLUTION: A measurement device 10 is provided with: a placing table 1 on which a workpiece W having recesses and projections formed on a surface thereof is put; a projector 2 that projects linear light on the surface of the workpiece; a camera 3 that images, at a predetermined timing, an optical image 21 formed on the workpiece by the light projected from the projector; a movement mechanism 4 that moves the placing table on a planer surface such that the optical image is formed in a measurement region WZ of the workpiece; and an arithmetic control device 5 that calculates positional data of recessed parts W2 or projected parts W3 with respect to an end part W1 of the workpiece from image data of the optical image imaged by the camera and an amount of movement of the placing table by the movement mechanism. An upper surface of the placing table includes a recessed groove 11 formed in a range, within the measurement region, corresponding to the end part of the workpiece positioned on the placing table.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a measuring apparatus and a measuring method for measuring a concavo-convex shape formed on a surface of a workpiece, and in particular, a position of a concave portion or a convex portion (planar arrangement relationship, pitch) in a workpiece having a concavo-convex shape formed on the surface. The present invention also relates to a measuring apparatus and a measuring method thereof.

  For example, Patent Document 1 discloses a concavo-convex shape measuring apparatus and a concavo-convex shape measuring method for measuring the shape of the concavo-convex member or the convex portion of the concavo-convex member having at least two concave portions or convex portions formed on the surface. In such a concavo-convex shape measuring apparatus 100, as shown in FIG. 8, a mounting table 102 on which a concavo-convex member 101 having a concave portion or a convex portion on the surface is placed, and an angle of 45 degrees with respect to the surface of the concavo-convex member 101. A laser projector 103 that irradiates a line-shaped laser beam, a camera 104 that shoots the concavo-convex member 101 irradiated with the laser beam, an imaging timing control device 105 that controls the timing of imaging by this camera, and the entire device are controlled. In addition, a microcomputer 106 that calculates the depth of the concave portion and the height of the convex portion of the concavo-convex member 101 based on the image taken by the camera 104 and the position of the mounting table 102 is provided.

Moreover, when measuring the height of a convex part using the said uneven | corrugated shape measuring apparatus 100, for example, it carries out with the following measuring methods. That is, the linear laser beam from the laser projector 103 is irradiated at an angle of 45 degrees to the first predetermined position set as the center line of the two adjacent convex portions of the concave-convex member 101 mounted on the mounting table 102. The moving mechanism 102 a of the mounting table 102 is adjusted so that the camera 104 captures a first irradiation image. After that, the moving mechanism 102a is adjusted so that the line-shaped laser beam is irradiated to the second predetermined position that is on the extension line of the first predetermined position between two adjacent convex portions, and the camera 104 generates a second irradiation image. Take a picture. A deviation amount between the first predetermined position and the laser beam in the first irradiation image and a deviation amount between the second predetermined position and the laser beam in the second irradiation image are calculated, and the amount of movement from the first predetermined position to the second predetermined position is calculated. The calculated deviation amount is added (corrected) to obtain the height of the convex portion.
As described above, according to the concavo-convex shape measuring apparatus 100 and the measurement method thereof, the concavo-convex part of the concavo-convex member 101 having a plurality of bulges formed on the surface based on an optical cutting method using a line-shaped laser beam. Can be accurately measured.

JP 2001-249011 A

However, the uneven shape measuring apparatus and the uneven shape measuring method described in Patent Document 1 have the following problems.
That is, when measuring the position (planar arrangement relationship) of the recesses or protrusions on a workpiece having an uneven surface formed on the surface based on an optical cutting method using a line-shaped laser beam, the recesses or protrusions to be measured are measured. The position of the part needs to be specified with reference to a predetermined position of the workpiece (for example, an end portion of the workpiece). Therefore, for example, after measuring the position of the end portion of the workpiece, which is a reference, the position of the concave portion or the convex portion is measured in relation to the end portion (reference position) of the workpiece.

However, when a workpiece with an uneven surface is repeatedly set on the mounting table of the measuring device, the contact surface of the mounting table that contacts the end of the workpiece is damaged by the edge of the end and wears linearly. To go. In particular, when the end portion of the workpiece is press-cut, the edge of the end portion becomes sharp and the contact surface of the mounting table is easily worn. If the laser beam hits the contact surface of the worn mounting table, irregular reflection of the light occurs, so that the end of the workpiece cannot be accurately measured, and the position of the end of the workpiece may be erroneously determined. was there.
Therefore, there has been a problem that the position of the concave portion or the convex portion cannot be accurately measured with reference to the position of the end portion of the workpiece. In order to avoid this, there is a method of replacing the mounting table before the wear progresses, but this is not preferable because of an increase in cost.

  The present invention has been made to solve the above-described problems, and reduces the wear of a mounting table on which a workpiece having a concavo-convex shape formed on the surface is reduced. It is an object of the present invention to provide a measuring apparatus and a measuring method thereof capable of accurately measuring a general arrangement relationship).

In order to solve the above problems, a measuring apparatus and a measuring method thereof according to the present invention have the following configuration.
(1) A mounting table for placing a workpiece having a concavo-convex shape on the surface on the upper surface, a projector for projecting a line-shaped light onto the surface of the workpiece, and a light projected from the projector on the workpiece. A camera that captures the optical image formed at a predetermined timing, a moving mechanism that moves the mounting table parallel to the upper surface to form the optical image in the measurement area of the workpiece, and an optical image that the camera captures A calculation device including an arithmetic control device that calculates the position data of the concave portion or the convex portion with respect to the end portion of the workpiece from the image data and the amount of movement of the mounting table by the moving mechanism,
A concave groove is formed in the upper surface of the mounting table in a range corresponding to the end portion of the workpiece positioned on the mounting table in the measurement area.

In the present invention, since a concave groove is formed on the upper surface of the mounting table in a range corresponding to the end of the workpiece in the measurement area, a workpiece having a concavo-convex shape formed on the surface is used as the mounting table of the measuring device. Even if it is set repeatedly, the upper surface of the mounting table does not wear out in the range corresponding to the end of the work within the work measurement area. Therefore, there is no fear that the line-shaped light projected from the projector to the end of the work is irregularly reflected by the upper surface of the mounting table, and the camera can clearly take a light image formed on the end of the work W. . Then, the arithmetic control device can accurately calculate (determine) the position data of the end portion of the workpiece based on the image data of the optical image as a measurement reference. As a result, the measurement apparatus can accurately measure the position (planar arrangement relationship) of the concave portion or the convex portion in the workpiece with reference to the end portion of the workpiece.
Therefore, according to the present invention, it is possible to reduce the wear of a mounting table on which a workpiece having a concavo-convex shape is formed on the surface, and to accurately measure the position (planar arrangement relationship) of the concave portion or the convex portion on the workpiece. A measuring device can be provided.

(2) In the measuring device described in (1),
A workpiece pressing plate that presses the workpiece placed on the upper surface of the mounting table is provided, and the workpiece pressing plate is formed with a through hole that surrounds the outer peripheral edge of the measurement region.

In the present invention, since the work pressing plate that presses the work placed on the upper surface of the placing table is provided, the warpage of the work can be corrected and measured. Further, since the work holding plate is formed with a through hole surrounding the outer peripheral edge of the measurement area, the projector accurately forms an optical image in the corrected measurement area of the work without being blocked by the work holding plate. be able to.
As a result, the position (planar arrangement relationship) of the concave portion or the convex portion on the workpiece can be measured more accurately.

(3) In the measuring device described in (2),
The upper surface of the mounting table is black-coated, and the work pressing plate is formed of a transparent plate material.

In the present invention, the upper surface of the mounting table is blackened, and the work pressing plate is formed of a transparent plate material, so that the reflection of various lights with respect to the mounting table is reduced, and the mounting table, the work pressing plate, It can be easily confirmed visually whether or not the work set between the two is set at a proper position on the mounting table.
As a result, the set deviation of the workpiece can be prevented, and the position (planar arrangement relationship) of the concave portion or the convex portion on the workpiece can be measured even more accurately.

(4) A measurement method for measuring a position of a concave portion or a convex portion in a workpiece having a concavo-convex shape formed on a surface using the measuring device described in any one of (1) to (3). ,
The camera captures the optical image formed on the end portion of the workpiece placed on the upper surface of the mounting table, and the arithmetic and control unit is configured to end the workpiece based on image data of the optical image. The position data of the part is calculated as a measurement reference.

In the present invention, the camera captures an optical image formed on the end of the workpiece placed on the upper surface of the mounting table, but the upper surface of the mounting table has a groove in a range corresponding to the end of the workpiece. Since it is formed, there is no risk that the line-shaped light projected from the projector to the end of the work will be irregularly reflected by the upper surface of the mounting table, and the camera clearly captures the light image formed at the end of the work. be able to. Further, since the calculation control device calculates the position data of the end portion of the workpiece based on the image data of the optical image as a measurement reference, the position data of the end portion of the workpiece is calculated based on the clear image data of the optical image. Can be accurately calculated (determined) without misunderstanding. As a result, according to this measurement device method, the position of the concave portion or the convex portion of the workpiece can be accurately measured with reference to the position of the end portion of the workpiece.
Therefore, according to the present invention, it is possible to reduce the wear of a mounting table on which a workpiece having a concavo-convex shape is formed on the surface, and to accurately measure the position (planar arrangement relationship) of the concave portion or the convex portion on the workpiece. A measurement method can be provided.

(5) In the measurement method described in (4),
The camera captures a plurality of optical images formed in the same concave portion or convex portion of the workpiece, and the arithmetic control device determines a planar shape of the concave portion or convex portion from the plurality of image data in the optical image. Then, the center of gravity position of the planar shape is calculated.

In the present invention, the camera captures a plurality of optical images formed in the same concave portion or convex portion of the workpiece, and the arithmetic and control unit calculates the planar shape of the concave portion or convex portion from the plurality of image data in the optical image. Since the center of gravity of the planar shape is calculated and the position of the concave portion or the convex portion in the work is erroneously determined.
As a result, according to this measurement method, it is possible to accurately measure the position (planar arrangement relationship) of the concave portion or the convex portion in the workpiece while preventing erroneous determination.

  ADVANTAGE OF THE INVENTION According to this invention, the measuring device which reduces the abrasion of the mounting base which mounts the workpiece | work with which uneven | corrugated shape was formed in the surface, and can measure correctly the position (planar arrangement relationship) of the recessed part or convex part in a workpiece | work. And a measuring method thereof.

It is a typical perspective view of the measuring device concerning the embodiment of the present invention. It is a top view in the state which set the work to the mounting base shown in FIG. It is AA sectional drawing shown in FIG. It is sectional drawing of the state which remove | excluded the work holding plate from the AA cross section shown in FIG. It is explanatory drawing in the case of measuring the position of the convex part in the measurement area | region of the workpiece | work shown in FIG. It is explanatory drawing which determines the gravity center position of the convex part shown in FIG. It is a flowchart figure of the measuring method which concerns on other embodiment of this invention. It is a schematic block diagram of the uneven | corrugated shape measuring apparatus described in patent document 1. FIG.

  Next, a measuring device and a measuring method thereof according to an embodiment of the present invention will be described in detail with reference to the drawings. First, the overall structure of the measurement apparatus according to the present embodiment will be described, and then the measurement method for measuring the position of the concave portion or convex portion of the workpiece having a concavo-convex shape formed on the surface using the measurement device will be described in detail. Explained.

<Overall structure of measuring device>
First, the overall structure of the measuring apparatus according to the present embodiment will be described with reference to FIGS. In FIG. 1, the typical perspective view of the measuring device which concerns on embodiment of this invention is shown. FIG. 2 shows a plan view of a work set on the mounting table shown in FIG. FIG. 3 is a cross-sectional view taken along the line AA shown in FIG. FIG. 4 is a cross-sectional view showing a state in which the work pressing plate is removed from the AA cross section shown in FIG.

  As shown in FIGS. 1 to 4, the measuring apparatus 10 according to the present embodiment projects a line-shaped light onto the mounting table 1 on which the work W having a concavo-convex shape formed on the surface is placed, and the surface of the work W. Mounted to form a light projector 2, a camera 3 that captures a light image 21 formed on the workpiece by light projected from the projector 2 at a predetermined timing, and a light image 21 in the measurement area WZ of the workpiece W. The moving mechanism 4 for moving the mounting table 1 on a plane, the shape data of the optical image 21 taken by the camera 3 and the amount of movement of the mounting table 1 by the moving mechanism 4, the concave portion W2 or the convex portion W3 with respect to the end W1 of the workpiece W. Are provided with a calculation control device 5 for calculating the position data and a workpiece pressing plate 6 for pressing the workpiece W mounted on the upper surface of the mounting table 1. Here, the workpiece W includes, for example, a rectangular metal sheet in which fine irregularities are regularly formed on the surface. The end W1 of the workpiece W is formed by press cutting.

  The mounting table 1 is a table table that is formed in a substantially rectangular shape in plan view and on which the workpiece W is mounted so as to be positioned. A rectangular measurement area WZ photographed by the camera 3 is formed in a band shape from the vicinity of the front end of the mounting table 1 to the vicinity of the rear end along the feeding direction (the direction of arrow F) at the left and right central portions of the mounting table 1. Yes. A substantially rectangular concave groove 11 is formed in a plan view in a range corresponding to the end W1 of the workpiece W located on the front end side in the measurement area WZ formed in a band shape. The concave groove 11 is formed with a certain depth (about 1 to 2 mm) with respect to the upper surface of the mounting table 1, from the front of the end W1 of the workpiece W to the rear of the end W1 of the workpiece W. Is formed. The size and depth of the groove 11 is such that the end W1 of the work W does not contact the bottom surface of the groove 11 even if the thin sheet-like work W is bent slightly when the work is placed on the mounting table 1. It is formed to the extent.

  In addition, positioning blocks 12, 12, and 13 are provided on the upper surface of the mounting table 1 so as to be in contact with the end portion W <b> 1 of the workpiece W along two orthogonal edges. At the front end of the mounting table 1 in the feed direction, positioning blocks 12, 12 with which the end W1 of the workpiece W serving as a measurement reference abuts are arranged symmetrically. The intermediate protrusion 16 sandwiched between the left and right positioning blocks 12 and 12 is formed on the same surface as the surface on which the workpiece W is placed.

  Further, a reference hole 14 and a fastening screw 15 for attaching to the moving mechanism 4 are appropriately formed on the lower surface of the mounting table 1. Further, the upper surface (including the concave groove 11) of the mounting table 1 is subjected to a black coating process having excellent wear resistance. Further, an arcuate notch 17 for setting the workpiece W and operating the workpiece pressing plate 6 is formed on the operator side (left end) of the mounting table 1.

  The projector 2 is a laser projector that projects a slit-shaped laser beam downward substantially vertically toward the mounting table 1, and is fixed to a main body (not shown) of the measuring device 10. The projector 2 is fixed so that the optical image 21 formed when the laser beam is projected onto the workpiece is formed in parallel with the end W1 of the workpiece W located on the front end side. The slit length of the laser light projected from the projector 2 is formed to such a length that the laser light can be projected simultaneously onto the plurality of concave portions W2 or convex portions W3 formed on the workpiece W. Further, the slit width of the laser beam is set to a width that allows a plurality of laser beams to be separated and projected to one concave portion W2 or convex portion W3.

  The camera 3 is a CCD camera having a function of two-dimensionally arranging a plurality of pixel sensors and outputting shape data of the photographed optical image 21. In addition, the camera 3 is located in front of the projector 2, and can photograph the optical image 21 formed on the workpiece by the laser light from the projector 2 with a predetermined inclination angle with respect to the projection direction of the projector 2. As described above, the measurement device 10 is fixed to the main body. The shooting range 31 of the camera 3 is formed in a substantially rectangular shape, and is set so that the optical image 21 is arranged at the center in the feed direction.

  The moving mechanism 4 is a drive mechanism that positions and fixes the mounting table 1 and moves it in the feeding direction at a predetermined speed. The moving mechanism 4 includes, for example, an electric screw mechanism that linearly drives the slide table with a ball screw. The moving mechanism 4 includes a position sensor, and can output the original position and the movement amount from the original position.

  The arithmetic and control unit 5 includes an operation control unit 51 for operating the projector 2, the camera 3, and the moving mechanism 4, shape data of the optical image 21 photographed by the camera 3, and movement amount data for the moving mechanism 4 to move the mounting table 1. Is calculated using the position data of the end W1 of the workpiece W as a measurement reference based on the shape data of the optical image 21 and the movement amount data of the mounting table 1, and the concave portion W2 or the convex of the workpiece W is calculated. A calculation unit 53 that specifies the planar shape of the part W3 and calculates the gravity center position W30 of the planar shape is provided, and is electrically connected to the projector 2, the camera 3, and the moving mechanism 4.

  The work pressing plate 6 is a transparent plate-like body that is formed in a substantially rectangular shape in plan view and is formed to be approximately the same size as the mounting table 1. The work pressing plate 6 is formed with a rectangular through hole 61 surrounding the outer peripheral edge of the measurement region WZ described above in a strip shape along the feeding direction (direction of arrow F). A connecting portion 62 that connects the front end of the through hole is formed on the front end side of the work pressing plate 6. The work holding plate 6 is held by an operator and set on the mounting table 1. At that time, the front end and the right end of the work pressing plate 6 are brought into contact with the positioning blocks 12, 12, 13 protruding from the mounting table 1, and the relative position between the work pressing plate 6 and the mounting table 1 is determined. .

<Measurement method for measuring the position of the concave or convex part of the workpiece>
Next, a measurement method for measuring the position of the concave portion W2 or the convex portion W3 of the workpiece W having a concavo-convex shape formed on the surface using the measurement apparatus 10 will be described with reference to FIGS. Here, the case where the position of the convex part W3 of the workpiece | work W is measured on the basis of the position of the edge part W1 is demonstrated. FIG. 5 is an explanatory diagram for measuring the position of the convex portion in the workpiece measurement region shown in FIG. FIG. 6 is an explanatory diagram for determining the position of the center of gravity of the convex portion shown in FIG. FIG. 7 shows a flowchart of a measurement method according to another embodiment of the present invention.

  As shown in FIGS. 5 and 6, a plurality of convex portions W <b> 3 are arranged on the surface of the workpiece W so as to form a matrix. The matrices n1, n2, and n3 of each convex portion W3 are formed in parallel with the end portion W1 of the workpiece W, and the intervals (vertical pitches of the convex portions) L1 and L2 of each matrix are substantially constant. The interval L0 between the end W1 of the workpiece W and the first row n1 is formed larger than the intervals (vertical pitches of the convex portions) L1 and L2 of each matrix for the convenience of press cutting. The plurality of convex portions W3 formed in one matrix are arranged at a predetermined interval (lateral pitch of the convex portions) R0 in a direction orthogonal to the feed direction (the direction of the arrow F). Further, the matrix of the convex portions W3 adjacent in the feed direction is formed such that the phases m1, m2, and m3 of the convex portion W3 are shifted from each other in the direction orthogonal to the feed direction, and the phase shift amounts R1 and R2 are substantially equal. It is constant.

Each convex portion W3 is formed so as to protrude upward in a substantially triangular frustum shape from the workpiece surface. A substantially triangular flat surface is formed on the upper end W3A of each convex portion W3. An inclined portion W3C is formed between the upper end portion W3A and the base end portion W3B of each convex portion W3. However, a communication hole W3D that communicates the front and back of the workpiece W is formed in the inclined portion formed to face the end portion W1 of the workpiece W.
In addition, although the recessed part W2 which protrudes in the opposite direction to the convex part W3 is formed between the convex parts W3 adjacent to the direction orthogonal to a feed direction (direction of arrow F), FIG. 5, FIG. Then, since it becomes complicated, the recessed part W2 is abbreviate | omitted.

As described above, the position (planar arrangement relationship) of the convex portions W3 regularly formed on the surface of the workpiece W is measured based on the flowchart shown in FIG.
As shown in FIG. 7, in step S1, the operation control unit 51 of the arithmetic and control unit 5 is operated to move the mounting table 1 to the original position. Then, the work W is set on the upper surface of the mounting table 1. At this time, the workpiece pressing plate 6 is brought into contact with the workpiece W from above to correct warpage of the workpiece W or the like.

Next, in step S <b> 2, the end W <b> 1 of the workpiece W is irradiated with the laser light of the projector 2 while moving the mounting table 1 in the feeding direction at the original position of the mounting table 1. The camera 3 captures the optical image 21a of the laser beam first formed on the end W1 of the workpiece W, and based on the shape data of the optical image 21a and the moving amount of the moving mechanism 4, the arithmetic unit of the arithmetic control device. 53 determines the position data of the end W <b> 1 as a measurement reference and stores it in the storage unit 52.
Next, in step S3, the camera 3 intermittently captures images for a predetermined time while continuously moving the mounting table 1 in the feeding direction. The shooting timing of the camera 3 is commanded from the operation control unit 51 of the arithmetic and control unit 5.

  Next, in step S4, based on the shape data of a plurality (two) of optical images 21b and 21c formed on the same convex portion W3 of the workpiece W photographed by the camera 3, the calculation unit 53 of the calculation control device 5 is used. However, the gravity center position W30 of the convex part W3 is calculated. Specifically, as shown in FIG. 6, two optical images 21b and 21c are formed in parallel on the upper end portion W3A of one convex portion W3, near the triangular base and near the apex opposite to the base. Since the two optical images 21b and 21c bend at the intersection between the upper end W3A of the convex portion W3 and the inclined portion W3C, the calculation unit 53 of the calculation control device 5 forms a triangle that passes through the bending point. A gravity center position W30 composed of vertices W31, W32 and W33 of the triangle is calculated. The calculated center-of-gravity position W30 is obtained by adding the amount of movement of the moving mechanism 4 to the position data of the end W1 of the workpiece W to obtain position data in the feed direction of the convex portion W3 of the workpiece W, and is included in the same matrix. The interval between the convex portions W3 is stored in the storage unit 52 as position data in a direction orthogonal to the feed direction. As shown in FIG. 5, the calculation unit 53 of the calculation control device 5 calculates the gravity center position W30 of the convex portion W3 for each of the matrices n1, n2, and n3. In this case, it is preferable to calculate the gravity center position W30 of the plurality of convex portions W3 for each of the matrices n1, n2, and n3 and take the average value to absorb the measurement error of the gravity center position W30.

Next, in step S5, the calculation unit 53 of the calculation control device 5 determines the pitches (vertical pitches L1 and L2 and horizontal pitch R0) of the adjacent projections W3 based on the position data of the center of gravity position W30 of the projections W3. ) And the phase shift amounts R1 and R2 between the matrices n1, n2, and n3 are calculated and stored in the storage unit 52, respectively.
Next, in step S6, the calculation unit 53 of the calculation control device 5 calculates the calculated pitches of the adjacent convex portions W3 (vertical pitches L1, L2 and horizontal pitch R0) and the phases between the matrices n1, n2, n3. The shift amounts R1 and R2 of the difference and the design value are compared, and it is determined whether or not they are within a predetermined range. The determination result is displayed through the monitor screen of the measurement apparatus 10 or the like. In addition, although the case where the position of the convex part W3 of the workpiece | work W was measured on the basis of the position of the edge part W1 was demonstrated here, the position of the recessed part W2 of the workpiece | work W can also be measured by the method similar to the above. it can.

<Effect>
As described above in detail, according to the measuring apparatus 10 according to the present embodiment, the upper surface of the mounting table 1 corresponds to the end W1 of the workpiece W positioned on the mounting table 1 in the measurement area WZ. Since the concave groove 11 is formed in the range to be formed, even if the workpiece W having a concavo-convex shape formed on the surface thereof is repeatedly set on the mounting table 1 of the measuring device 10, the end of the workpiece W is measured in the measurement area WZ of the workpiece W. The upper surface of the mounting table 1 does not wear out in a range corresponding to the portion W1. Therefore, there is no fear that the line-shaped laser light projected from the projector 2 to the end W1 of the work W is irregularly reflected by the upper surface of the mounting table 1, and the optical image 21 formed by the camera 3 on the end W1 of the work W is provided. Can be taken clearly. Then, the calculation control device 5 can accurately calculate (determine) the position data of the end W1 of the workpiece W based on the shape data of the optical image 21 as the measurement reference. As a result, the measurement apparatus 10 can accurately measure the position (planar arrangement relationship) of the concave portion W2 or the convex portion W3 on the workpiece W with reference to the end portion W1 of the workpiece W.

Moreover, according to this embodiment, since the workpiece pressing plate 6 that presses the workpiece W placed on the upper surface of the mounting table 1 is provided, the warp of the workpiece W can be corrected and measured. In addition, since the work holding plate 6 is formed with a through hole 61 that surrounds the outer periphery of the measurement region WR, the projector 2 is not obstructed by the work holding plate 6, and the corrected work W is measured in the measurement region WR. The optical image 21 can be accurately formed.
As a result, the position (planar arrangement relationship) of the concave portion W2 or the convex portion W3 in the workpiece W can be measured more accurately.

In addition, according to the present embodiment, the upper surface of the mounting table 1 is blackened, and the work pressing plate 6 is formed of a transparent plate material, so that the reflection of various lights with respect to the mounting table 1 is reduced. Whether or not the workpiece W set between the mounting table 1 and the work pressing plate 6 is set at a proper position on the mounting table 1 can be easily confirmed visually.
As a result, the set displacement of the workpiece W can be prevented, and the position (planar arrangement relationship) of the concave portion W2 or the convex portion W3 in the workpiece W can be measured even more accurately.

  In addition, according to the measurement method for measuring the position of the concave portion or the convex portion in the workpiece according to another embodiment, the optical image formed on the end portion W1 of the workpiece W placed on the upper surface of the placement table 1 is a camera. 3, since the concave groove 11 is formed in the upper surface of the mounting table 1 in a range corresponding to the end W1 of the workpiece W, a line shape projected from the projector 2 to the end W1 of the workpiece W is formed. Therefore, the camera 3 can clearly shoot the optical image 21 formed on the end W1 of the workpiece W. In addition, since the calculation control device 5 calculates the position data of the end W1 of the workpiece W based on the shape data of the optical image 21, the workpiece W is calculated based on the clear shape data of the optical image 21. It is possible to calculate (determine) accurately without misidentifying the position data of the end W1. As a result, according to this measurement device method, the position of the concave portion W2 or the convex portion W3 in the workpiece W can be accurately measured with reference to the position of the end portion W1 of the workpiece W.

Further, according to another embodiment, the camera 3 has a plurality of (two) optical images 21 (21b, 21c, 21d, 21e, 21f, 21g) formed in the same concave portion W2 or convex portion W3 of the workpiece W. ..)), The arithmetic and control unit 5 specifies the planar shape (triangular shape) of the concave portion W2 or the convex portion W3 from the plurality of shape data in the optical image 21, and the center of gravity of the planar shape (triangular shape). Since the position W30 is calculated, erroneous determination of the position of the concave portion W2 or the convex portion W3 in the workpiece W can be prevented.
As a result, according to this measurement method, it is possible to accurately measure the position (planar arrangement relationship) of the concave portion W2 or the convex portion W3 in the workpiece W while preventing erroneous determination.

In addition, it cannot be overemphasized that this embodiment can be changed in the range which does not change the summary of this invention.
For example, in the present embodiment, the mounting table 1 is moved by the moving mechanism 4, and the projector 2 and the camera 3 are fixed to the main body of the measuring device 10. However, the projector and the camera are moved by the moving mechanism, and the mounting table is moved. You may fix to a main-body part.
In this embodiment, a CCD camera is used as the camera 3, but other cameras (for example, a PSD camera) may be used.

  The present invention is a measuring device and a measuring method for measuring the uneven shape formed on the surface of the workpiece, and in particular, the position of the concave portion or the convex portion (planar arrangement relationship) in the workpiece having the uneven shape formed on the surface. It can be used as a measuring device and a measuring method for measuring.

DESCRIPTION OF SYMBOLS 1 Mounting stand 2 Projector 3 Camera 4 Movement mechanism 5 Arithmetic control device 6 Work holding plate 10 Measuring device 11 Groove 21, 21a Optical image 61 Through-hole W Work W1 End W2 Concavity W3 Convex portion W30 Center of gravity position WZ Measurement area

Claims (5)

Formed on the workpiece by a mounting table for placing a workpiece having a concavo-convex shape on the upper surface, a projector for projecting line-shaped light on the surface of the workpiece, and light projected from the projector. A camera that captures the optical image at a predetermined timing, a moving mechanism that moves the mounting table parallel to the upper surface to form the optical image in the measurement area of the workpiece, and image data of the optical image captured by the camera And an arithmetic and control unit that calculates position data of a concave portion or a convex portion with respect to an end portion of the workpiece from the amount of movement of the mounting table described above by the moving mechanism,
A measuring device, wherein a concave groove is formed on a top surface of the mounting table in a range corresponding to an end portion of the workpiece positioned on the mounting table in the measurement area. In the measuring device according to claim 1,
A measuring apparatus comprising a work pressing plate that presses the work placed on the upper surface of the mounting table, wherein the work pressing plate is formed with a through hole surrounding an outer peripheral edge of the measurement region. In the measuring device according to claim 2,
The measuring apparatus according to claim 1, wherein the upper surface of the mounting table is black-coated, and the work pressing plate is formed of a transparent plate material. A measurement method for measuring a position of a concave portion or a convex portion in a workpiece having a concavo-convex shape formed on a surface using the measuring device according to any one of claims 1 to 3,
The camera captures the optical image formed on the end portion of the workpiece placed on the upper surface of the mounting table, and the arithmetic and control unit is configured to end the workpiece based on image data of the optical image. A measurement method characterized in that the position data of a part is calculated as a measurement reference. In the measurement method described in Claim 4,
The camera captures a plurality of optical images formed in the same concave portion or convex portion of the workpiece, and the arithmetic control device determines a planar shape of the concave portion or convex portion from the plurality of image data in the optical image. And calculating the position of the center of gravity of the planar shape.

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