JP2016143674A - Sample holder - Google Patents

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JP2016143674A
JP2016143674A JP2015015739A JP2015015739A JP2016143674A JP 2016143674 A JP2016143674 A JP 2016143674A JP 2015015739 A JP2015015739 A JP 2015015739A JP 2015015739 A JP2015015739 A JP 2015015739A JP 2016143674 A JP2016143674 A JP 2016143674A
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support member
support pin
support
sample holder
recess
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JP6396818B2 (en
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内山　京治
Kyoji Uchiyama
京治 内山
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Kyocera Corp
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Kyocera Corp
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Abstract

PROBLEM TO BE SOLVED: To reduce foreign matters from entering between a support pin and a bottom face of a recessed part.SOLUTION: A sample holder 10 includes: a substrate 1 made of ceramic and having a sample holding surface 11 provided with a plurality of recessed parts 12 on the top face thereof; a support pin 2 disposed on the bottom face of each of the recessed parts 12 and having a projecting part 21 at the center of the top face thereof; a first support member 5 provided to surround the projecting part 21 while the bottom face thereof is in contact with a region around the projection part 21 on the top face of the supporting pin 2; and a second support member 6 held by a wall surface of each of the recessed parts 12 to press the first support member 5.SELECTED DRAWING: Figure 2

Description

本発明は、主にウエハを保持するために用いる試料保持具に関するものである。   The present invention relates to a sample holder mainly used for holding a wafer.

試料保持具として、例えば、特開２００２−１４１２８８号公報（以下、特許文献１ともいう）に記載のウエハ加熱装置が知られている。特許文献１に記載のウエハ加熱装置においては、基体の上面に複数の凹部が設けられているとともに、複数の凹部のそれぞれに支持ピンが配置されている。そして、ウエハ加熱装置は支持ピンによってウエハ等の試料を支えることによって試料を保持する。近年、ウエハの位置精度に対する要求がさらに高まっている。これに伴って、支持ピンの位置精度がさらに求められている。   As a sample holder, for example, a wafer heating apparatus described in JP-A-2002-141288 (hereinafter also referred to as Patent Document 1) is known. In the wafer heating apparatus described in Patent Document 1, a plurality of recesses are provided on the upper surface of the substrate, and support pins are disposed in each of the plurality of recesses. The wafer heating device holds the sample by supporting the sample such as a wafer with support pins. In recent years, there has been an increasing demand for wafer positional accuracy. Along with this, the positional accuracy of the support pins is further required.

特開２００２−１４１２８８号公報JP 2002-141288 A

特許文献１に記載のウエハ加熱装置においては、凹部の底面に支持ピンが配置されるとともに、凹部の開口面近くにリング状の固定冶具が配置されている。リング状の固定冶具の内径は支持ピンの外径よりも小さくなるように設定されている。このようにして、支持ピンが凹部の外部に脱落することを防止している。   In the wafer heating apparatus described in Patent Document 1, support pins are disposed on the bottom surface of the recess, and a ring-shaped fixing jig is disposed near the opening surface of the recess. The inner diameter of the ring-shaped fixing jig is set to be smaller than the outer diameter of the support pin. In this way, the support pin is prevented from dropping out of the recess.

しかしながら、特許文献１に記載のウエハ加熱装置においては、支持ピンが底面に固定されていない。そのため、ウエハ加熱装置が振動の影響を受ける環境下で用いられたときに、支持ピンと凹部の底面との間に異物が侵入してしまうおそれがあった。その結果、支持ピンと凹部の底面との密着性が低下してしまい、支持ピンの位置精度が悪化してしまうおそれがあった。   However, in the wafer heating apparatus described in Patent Document 1, the support pins are not fixed to the bottom surface. Therefore, when the wafer heating device is used in an environment that is affected by vibration, there is a possibility that foreign matter may enter between the support pins and the bottom surface of the recess. As a result, the adhesiveness between the support pin and the bottom surface of the recess is lowered, and the position accuracy of the support pin may be deteriorated.

本発明はかかる問題点に鑑みてなされたものであり、その目的は、支持ピンの位置精度が向上した試料保持具を提供することにある。   The present invention has been made in view of such problems, and an object thereof is to provide a sample holder in which the positional accuracy of the support pins is improved.

本発明の試料保持具は、セラミックスから成り上面に複数の凹部が設けられた試料保持面を有する基体と、前記凹部の底面に配置されており上面の中央に凸部を有する支持ピンと、該支持ピンの上面のうち前記凸部の周りの領域に下面を接して前記凸部を囲むように設けられた第１支持部材と、前記凹部の壁面に保持されて前記第１支持部材を押さえる第２支持部材とを備えたことを特徴とする。   The sample holder of the present invention comprises a substrate having a sample holding surface made of ceramics and provided with a plurality of recesses on the upper surface, a support pin disposed on the bottom surface of the recess and having a protrusion at the center of the upper surface, and the support A first support member provided so as to surround the convex portion with a lower surface in contact with a region around the convex portion of the upper surface of the pin, and a second that is held by the wall surface of the concave portion and presses the first support member. And a support member.

本発明の一態様の試料保持具によれば、試料保持具を振動の影響を受ける環境下で用いたとしても、支持ピンと凹部の底面との間に異物が侵入することを低減できる。   According to the sample holder of one embodiment of the present invention, even when the sample holder is used in an environment that is affected by vibration, it is possible to reduce the entry of foreign matter between the support pin and the bottom surface of the recess.

本発明の一実施形態の試料保持具を示す断面図である。It is sectional drawing which shows the sample holder of one Embodiment of this invention. 本発明の一実施形態の試料保持具を示す部分断面図である。It is a fragmentary sectional view showing the sample holder of one embodiment of the present invention. 本発明の試料保持具の変形例を示す部分断面図である。It is a fragmentary sectional view which shows the modification of the sample holder of this invention.

以下、本発明の一実施形態に係る試料保持具１０について説明する。図１に示すように、試料保持具１０は、基体１と、基体１に設けられた支持ピン２と、発熱抵抗体３とを備えている。なお、図１においては便宜上、支持ピン２を拡大して記載している。   Hereinafter, a sample holder 10 according to an embodiment of the present invention will be described. As shown in FIG. 1, the sample holder 10 includes a base 1, a support pin 2 provided on the base 1, and a heating resistor 3. In FIG. 1, the support pin 2 is shown enlarged for convenience.

基体１は上面に試料保持面１１を有する部材である。基体１は、例えば、円板状の部材である。基体１の試料保持面１１には、複数の凹部１２が設けられている。基体１はセラミックスから成る。セラミックスとしては、炭化珪素、炭化硼素、窒化硼素、窒化珪素または窒化アルミニウムを主成分とするセラミックスを用いることができる。基体１の寸法は、例えば、主面の径を２００〜５００ｍｍ、厚みを１〜７ｍｍに設定できる。   The substrate 1 is a member having a sample holding surface 11 on the upper surface. The base 1 is, for example, a disk-shaped member. A plurality of recesses 12 are provided in the sample holding surface 11 of the substrate 1. The substrate 1 is made of ceramics. As the ceramic, a ceramic mainly composed of silicon carbide, boron carbide, boron nitride, silicon nitride, or aluminum nitride can be used. The dimensions of the substrate 1 can be set, for example, such that the diameter of the main surface is 200 to 500 mm and the thickness is 1 to 7 mm.

発熱抵抗体３は、ウエハ等の試料（被保持物Ｗ）を加熱するための部材である。発熱抵抗体３は、基体１の下面に設けられている。発熱抵抗体３は、例えば、帯状に形成されている。発熱抵抗体３は、例えば、金、銀、パラジウムまたは白金等の金属材料から成る。発熱抵抗体３には給電部３１が形成されており、給電部３１に導通端子３２を押圧して接触させることにより、導通が確保されている。   The heating resistor 3 is a member for heating a sample (held object W) such as a wafer. The heating resistor 3 is provided on the lower surface of the base 1. The heating resistor 3 is formed in a band shape, for example. The heating resistor 3 is made of a metal material such as gold, silver, palladium, or platinum. The heating resistor 3 is formed with a power feeding portion 31, and conduction is ensured by pressing and contacting the conduction terminal 32 with the power feeding portion 31.

筺体４は、基体１が固定される部材である。筺体４は、内部に導通端子３２等を収納する空間を有しており、上端に基体１が取り付けられている。基体１と筺体４とは、ボルトによって固定されている。筺体４は、例えば、ステンレスまたはアルミ合金等から成る。   The housing 4 is a member to which the base body 1 is fixed. The housing 4 has a space for accommodating the conduction terminal 32 and the like inside, and the base body 1 is attached to the upper end. The base body 1 and the casing 4 are fixed by bolts. The housing 4 is made of, for example, stainless steel or aluminum alloy.

試料保持面１１の凹部１２は、支持ピン２を収納するために設けられている。凹部１２は、試料保持面１１に、例えば、略同心円状に複数設けられている。これにより、凹部１２に配置される支持ピン２によって被保持物Ｗを安定して載置できる。   The concave portion 12 of the sample holding surface 11 is provided for accommodating the support pin 2. A plurality of the recesses 12 are provided on the sample holding surface 11 in a substantially concentric manner, for example. Thereby, the to-be-held object W can be stably mounted by the support pin 2 arrange | positioned at the recessed part 12. FIG.

それぞれの凹部１２は、底面と壁面とを有しており、底面には支持ピン２が配置されている。凹部１２の形状は、例えば、円柱状である。凹部１２の寸法は、例えば、直径を３〜７ｍｍ、深さを０．５〜５ｍｍに設定できる。   Each recess 12 has a bottom surface and a wall surface, and the support pin 2 is disposed on the bottom surface. The shape of the recess 12 is, for example, a cylindrical shape. The dimension of the recessed part 12 can set a diameter to 3-7 mm and a depth to 0.5-5 mm, for example.

支持ピン２は、被保持物Ｗを支えるための部材である。支持ピン２は、凹部１２の底面に配置されている。図２に示すように、支持ピン２は、中央に凸部２１を有している。より具体的には、支持ピン２は、底面に接する第１部分２２と、第１部分２２上に位置する第２部分２３とを有しており、第１部分２２よりも第２部分２３の径が小さい。これにより、中央に凸部２１を有した形状になっている。支持ピン２の形状は、適宜、設定できるが、例えば、第１部分２２および第２部分２３を円板状に形成することができる。支持ピン２は、第１部分２２の径を２〜７ｍｍ、厚みを０．５〜４ｍｍ、第２部分２３の径を１〜５ｍｍ、厚みを０．５〜４ｍｍに設定できる。支持ピン２は、例えば、アルミナまたは炭化珪素等のセラミック材料から成る。   The support pin 2 is a member for supporting the article to be held W. The support pin 2 is disposed on the bottom surface of the recess 12. As shown in FIG. 2, the support pin 2 has a convex portion 21 at the center. More specifically, the support pin 2 includes a first portion 22 that is in contact with the bottom surface and a second portion 23 that is located on the first portion 22, and the second portion 23 is more than the first portion 22. The diameter is small. Thereby, it has the shape which has the convex part 21 in the center. The shape of the support pin 2 can be appropriately set. For example, the first portion 22 and the second portion 23 can be formed in a disk shape. The support pin 2 can set the diameter of the first portion 22 to 2 to 7 mm, the thickness to 0.5 to 4 mm, the diameter of the second portion 23 to 1 to 5 mm, and the thickness to 0.5 to 4 mm. The support pin 2 is made of a ceramic material such as alumina or silicon carbide, for example.

支持ピン２は、基体１を上面視したときに、略同心円上に配置するのが好ましい。これはウエハＷを安定して載置する為である。そして、支持ピン２の試料保持面１１からの突出高さは、０．０７〜０．１３ｍｍに調整されている。   The support pins 2 are preferably arranged substantially concentrically when the base body 1 is viewed from above. This is because the wafer W is stably placed. And the protrusion height from the sample holding surface 11 of the support pin 2 is adjusted to 0.07-0.13 mm.

支持ピン２は、第１支持部材５および第２支持部材６によって固定されている。第１支持部材５が支持ピン２に直接接触し、この第１支持部材５を第２支持部材６によって押さえることによって、支持ピン２を固定している。第１支持部材５は、支持ピン２の上面のうち凸部２１の周りの領域に下面を接して凸部２１を囲むように設けられている。本実施形態の試料保持具１０における第１支持部材５は、中心に貫通孔を有する円盤状の部材であって、凸部２１の周りの領域（第１部分２２の上面）および支持ピン２の側面（第１部分２２の側面）に接するように、下面が屈曲している。さらに、第１支持部材５の上面も
下面に沿って屈曲している。つまり、第１支持部材５の上面のうち外周側の領域は、中心側の領域よりも下側に位置している。第１支持部材５は、例えば、ステンレスまたはニッケル合金等の金属材料から成る。 The support pin 2 is fixed by a first support member 5 and a second support member 6. The first support member 5 is in direct contact with the support pin 2, and the support pin 2 is fixed by pressing the first support member 5 with the second support member 6. The first support member 5 is provided so as to surround the convex portion 21 with the lower surface in contact with the region around the convex portion 21 of the upper surface of the support pin 2. The first support member 5 in the sample holder 10 of the present embodiment is a disk-shaped member having a through-hole at the center, and the region around the convex portion 21 (the upper surface of the first portion 22) and the support pin 2. The lower surface is bent so as to contact the side surface (the side surface of the first portion 22). Furthermore, the upper surface of the first support member 5 is also bent along the lower surface. That is, the area on the outer peripheral side of the upper surface of the first support member 5 is located below the area on the center side. The 1st support member 5 consists of metal materials, such as stainless steel or a nickel alloy, for example.

第２支持部材６は、凹部１２の壁面に保持されて第１支持部材５を押さえている。第２支持部材６は、リング状の部材であって、凹部１２の壁面に押し込まれている。このとき、第２支持部材６の下側部分が第１支持部材５の上面を押した状態で、第２支持部材６を凹部１２の壁面に固定することによって、第１支持部材５を介して支持ピン２を固定できる。第２支持部材６は、弾性力によって凹部１２の壁面に固定されていることが好ましい。そのため、第２支持部材６は、例えば、スリットが入ったリング状であることが好ましい。これにより、径が小さくなるように第２支持部材６を撓ませた状態で凹部１２に挿入しておけば、径が大きくなる方向に広がろうとする第２支持部材６が凹部１２の壁面によって押し込まれることによって、弾性力によって第２支持部材６を固定できる。   The second support member 6 is held on the wall surface of the recess 12 to hold down the first support member 5. The second support member 6 is a ring-shaped member and is pushed into the wall surface of the recess 12. At this time, the second support member 6 is fixed to the wall surface of the recess 12 in a state where the lower portion of the second support member 6 presses the upper surface of the first support member 5. The support pin 2 can be fixed. The second support member 6 is preferably fixed to the wall surface of the recess 12 by an elastic force. Therefore, it is preferable that the 2nd support member 6 is a ring shape in which the slit was contained, for example. As a result, if the second support member 6 is inserted into the recess 12 in a state where the second support member 6 is bent so that the diameter becomes smaller, the second support member 6 that tries to expand in the direction in which the diameter increases becomes larger by the wall surface of the recess 12. By being pushed in, the second support member 6 can be fixed by elastic force.

以上の通り、本実施形態における試料保持具１０においては、支持ピン２の上面のうち凸部２１の周りの領域に下面を接して凸部２１を囲むように設けられた第１支持部材５と、凹部１２の壁面に保持された第２支持部材６とを備えており、第２支持部材６が第１支持部材５を押さえている。これにより、支持ピン２を凹部１２に強固に固定でき、試料保持具１０を振動の影響を受ける環境下で用いたとしても、支持ピン２と凹部１２の底面との間に異物が侵入することを低減できる。   As described above, in the sample holder 10 in the present embodiment, the first support member 5 provided so as to surround the convex portion 21 with the lower surface in contact with the region around the convex portion 21 of the upper surface of the support pin 2. And the second support member 6 held on the wall surface of the recess 12, and the second support member 6 presses the first support member 5. As a result, the support pin 2 can be firmly fixed to the recess 12, and even if the sample holder 10 is used in an environment affected by vibrations, foreign matter can enter between the support pin 2 and the bottom surface of the recess 12. Can be reduced.

さらに、第１支持部材５が凸部２１の全周を囲んでいてもよい。これにより、凹部１２に侵入した異物が凹部１２の底面に到達するおそれを低減できる。そのため、支持ピン２と凹部１２の底面との間に異物が侵入することをさらに低減できる。第１支持部材５が凸部２１の全周を囲んでいる場合には、前述したようなスリットが入ったリング状である場合と比較して、弾性変形がしにくくなるおそれがある。この場合には、第１支持部材５の材料として、例えば、ばね用のステンレス鋼材等を用いればよい。   Further, the first support member 5 may surround the entire circumference of the convex portion 21. Thereby, the possibility that foreign matter that has entered the recess 12 may reach the bottom surface of the recess 12 can be reduced. Therefore, it is possible to further reduce the entry of foreign matter between the support pin 2 and the bottom surface of the recess 12. When the first support member 5 surrounds the entire circumference of the convex portion 21, there is a risk that elastic deformation is less likely than in the case where the first support member 5 has a ring shape with slits as described above. In this case, for example, a stainless steel material for a spring may be used as the material of the first support member 5.

さらに、支持ピン２が、下面の周辺部で凹部１２の底面に接していることが好ましい。具体的には、例えば、図３に示すように、支持ピン２が、底面の中央部に窪み２４を有していることが好ましい。これにより、仮に支持ピン２と凹部１２の底面との間に異物が侵入したとしても、この異物を窪み２４に入り込ませることができるので、異物が支持ピン２を押し上げてしまうおそれを低減することができる。支持ピン２の底面の窪み２４は、例えば、円柱状にすることが好ましい。   Furthermore, it is preferable that the support pin 2 is in contact with the bottom surface of the recess 12 at the peripheral portion of the lower surface. Specifically, for example, as shown in FIG. 3, it is preferable that the support pin 2 has a recess 24 at the center of the bottom surface. Thereby, even if a foreign object enters between the support pin 2 and the bottom surface of the recess 12, the foreign object can be caused to enter the recess 24, thereby reducing the possibility that the foreign object will push up the support pin 2. Can do. For example, the recess 24 on the bottom surface of the support pin 2 is preferably cylindrical.

特に、窪み２４の側面と支持ピン２の底面とから成る角（窪み２４の開口部）がＣ面またはＲ面であることが好ましい。言い換えると、窪み２４の側面と支持ピン２の底面とから成る角が丸みを帯びていることが好ましい。これにより、振動によって支持ピン１２が動いてしまったときに、窪み２４の開口部の角が欠けて、異物となってしまうおそれを低減できる。さらに、支持ピン２と凹部１２の底面との間に異物が侵入したときに、異物が窪み２４に入り込みやすくなる。そのため、異物が支持ピン２と凹部１２の底面との間に挟まって、支持ピン２を押し上げてしまうおそれを低減することができる。   In particular, it is preferable that the corner (opening portion of the depression 24) formed by the side surface of the depression 24 and the bottom surface of the support pin 2 is the C plane or the R plane. In other words, the corner formed by the side surface of the recess 24 and the bottom surface of the support pin 2 is preferably rounded. Thereby, when the support pin 12 moves by vibration, the angle | corner of the opening part of the hollow 24 may be missing and it may reduce a possibility of becoming a foreign material. Furthermore, when a foreign object enters between the support pin 2 and the bottom surface of the recess 12, the foreign object easily enters the recess 24. For this reason, it is possible to reduce the possibility that foreign matter is sandwiched between the support pin 2 and the bottom surface of the recess 12 and pushes up the support pin 2.

さらに、第１支持部材５は、下面が支持ピン２側よりも周辺部で低くなる段差を有しており、段差の側面が支持ピン２の側面に接している。これにより、第１支持部材５が支持ピン２を横方向からも押さえることができるので、振動によって、支持ピン２の下面が凹部１２の底面に対して傾いてしまうおそれを低減できる。その結果、支持ピン２と凹部１２の底面との間に異物が侵入することをさらに低減できる。   Further, the first support member 5 has a step whose lower surface is lower at the periphery than the support pin 2 side, and the side surface of the step is in contact with the side surface of the support pin 2. Thereby, since the 1st support member 5 can hold down the support pin 2 also from a horizontal direction, the possibility that the lower surface of the support pin 2 may incline with respect to the bottom surface of the recessed part 12 by vibration can be reduced. As a result, the entry of foreign matter between the support pin 2 and the bottom surface of the recess 12 can be further reduced.

さらに、第１支持部材５は、上面が支持ピン２側よりも周辺部で低くなっている。これ
により、第１支持部材５を撓ませやすくすることができるので、支持ピン２を安定して押さえることができる。 Furthermore, the upper surface of the first support member 5 is lower in the peripheral portion than the support pin 2 side. Thereby, since the 1st support member 5 can be made easy to bend, the support pin 2 can be pressed down stably.

さらに、第１支持部材５は、支持ピン２よりもヤング率が小さい材料から成ることが好ましい。これにより、ヒートサイクル下において熱応力が発生したとしても、これを第１支持部材５が撓むことで吸収することができる。そのため、第１支持部材５によって支持ピン２を安定して押さえることができる。支持ピン２がアルミナ（ヤング率：３６０ＧＰａ）から成る場合には、第１支持部材５としては、例えば、ステンレス（ヤング率：１９０ＧＰａ）を用いることができる。   Further, the first support member 5 is preferably made of a material having a Young's modulus smaller than that of the support pin 2. Thereby, even if a thermal stress is generated under a heat cycle, this can be absorbed by the bending of the first support member 5. Therefore, the support pin 2 can be stably pressed by the first support member 5. When the support pin 2 is made of alumina (Young's modulus: 360 GPa), for example, stainless steel (Young's modulus: 190 GPa) can be used as the first support member 5.

また、第１支持部材５と第２支持部材６とが同じ材料から成ることが好ましい。第１支持部材５と第２支持部材６とが異なる材料から成る場合には、ヒートサイクル下において、繰り返し使用したときに、第１支持部材５と第２支持部材６との熱膨張率差に起因して、第１支持部材５と第２支持部材６との間に働く応力が増減することになる。そうすると、第２支持部材６が次第に疲労してしまい、第２支持部材６が第１支持部材５を押さえる力が徐々に低下していくおそれがある。これに対して、第１支持部材５と第２支持部材６とが同じ材料から成ることによって、第１支持部材５と第２支持部材６とが同様に熱膨張することから、第２支持部材６が第１支持部材５を押さえる力が低下していくことを低減できる。その結果、長期にわたって支持ピン２と凹部１２の底面との間に異物が侵入することを低減できる。   Moreover, it is preferable that the 1st supporting member 5 and the 2nd supporting member 6 consist of the same material. In the case where the first support member 5 and the second support member 6 are made of different materials, the difference in thermal expansion coefficient between the first support member 5 and the second support member 6 when repeatedly used under a heat cycle. As a result, the stress acting between the first support member 5 and the second support member 6 increases or decreases. If it does so, the 2nd support member 6 will get tired gradually, and there exists a possibility that the force in which the 2nd support member 6 presses down the 1st support member 5 may fall gradually. On the other hand, since the first support member 5 and the second support member 6 are made of the same material, the first support member 5 and the second support member 6 are similarly thermally expanded. It can reduce that the force in which 6 presses the 1st supporting member 5 falls. As a result, it is possible to reduce the entry of foreign matter between the support pin 2 and the bottom surface of the recess 12 over a long period of time.

１０：試料保持具
１：基体
１１：試料保持面
２：支持ピン
２１：凸部
２２：第１部分
２３：第２部分
３：発熱抵抗体
１２：凹部
３１：給電部
３２：導通端子
４：筺体
５：第１支持部材
６：第２支持部材 10: Sample holder 1: Substrate 11: Sample holding surface 2: Support pin 21: Convex part 22: First part 23: Second part 3: Heating resistor 12: Concave part 31: Feeding part 32: Conducting terminal 4: Housing 5: First support member 6: Second support member

Claims (7)

セラミックスから成り上面に複数の凹部が設けられた試料保持面を有する基体と、前記凹部の底面に配置されており上面の中央に凸部を有する支持ピンと、該支持ピンの上面のうち前記凸部の周りの領域に下面を接して前記凸部を囲むように設けられた第１支持部材と、前記凹部の壁面に保持されて前記第１支持部材を押さえる第２支持部材とを備えたことを特徴とする試料保持具。   A base having a sample holding surface made of ceramics and provided with a plurality of recesses on the upper surface, a support pin disposed on the bottom surface of the recess and having a protrusion at the center of the upper surface, and the protrusion of the upper surface of the support pin And a second support member that is held by the wall surface of the concave portion and presses the first support member. A sample holder characterized by the above. 前記第１支持部材が前記凸部の全周を囲んでいることを特徴とする請求項１に記載の試料保持具。   The sample holder according to claim 1, wherein the first support member surrounds the entire circumference of the convex portion. 前記支持ピンが、下面の周辺部で前記凹部の底面に接していることを特徴とする請求項１または請求項２に記載の試料保持具。   The sample holder according to claim 1, wherein the support pin is in contact with a bottom surface of the recess at a peripheral portion of a lower surface. 前記第１支持部材は、下面が前記支持ピン側よりも周辺部で低くなる段差を有しており、該段差の側面が前記支持ピンの側面に接していることを特徴とする請求項１乃至請求項３のいずれかに記載の試料保持具。   The first support member has a step whose lower surface is lower at a peripheral portion than the support pin side, and a side surface of the step is in contact with a side surface of the support pin. The sample holder according to claim 3. 前記第１支持部材は、上面が前記支持ピン側よりも周辺部で低くなっていることを特徴とする請求項１乃至請求項４のいずれかに記載の試料保持具。   5. The sample holder according to claim 1, wherein an upper surface of the first support member is lower in a peripheral portion than the support pin side. 前記第１支持部材は、前記支持ピンよりもヤング率が小さい材料から成ることを特徴とする請求項１乃至請求項５に記載の試料保持具。   The sample holder according to any one of claims 1 to 5, wherein the first support member is made of a material having a Young's modulus smaller than that of the support pin. 前記第１支持部材と前記第２支持部材とが同じ材料から成ることを特徴とする請求項１乃至請求項６のいずれかに記載の試料保持具。   The sample holder according to any one of claims 1 to 6, wherein the first support member and the second support member are made of the same material.
JP2015015739A 2015-01-29 2015-01-29 Sample holder Active JP6396818B2 (en)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH082464Y2 (en) * 1989-04-18 1996-01-29 臼井国際産業株式会社 Fuel delivery pipe
JPH09289162A (en) * 1996-11-05 1997-11-04 Tokyo Electron Ltd Temperature adjusting equipment
JP2002246286A (en) * 2001-02-15 2002-08-30 Ibiden Co Ltd Ceramic heater
JP2004200156A (en) * 2002-12-05 2004-07-15 Ibiden Co Ltd Metal heater
JP2004307939A (en) * 2003-04-07 2004-11-04 Tokyo Electron Ltd Heat treatment apparatus
JP2013171979A (en) * 2012-02-21 2013-09-02 Kelk Ltd Heater

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH082464Y2 (en) * 1989-04-18 1996-01-29 臼井国際産業株式会社 Fuel delivery pipe
JPH09289162A (en) * 1996-11-05 1997-11-04 Tokyo Electron Ltd Temperature adjusting equipment
JP2002246286A (en) * 2001-02-15 2002-08-30 Ibiden Co Ltd Ceramic heater
JP2004200156A (en) * 2002-12-05 2004-07-15 Ibiden Co Ltd Metal heater
JP2004307939A (en) * 2003-04-07 2004-11-04 Tokyo Electron Ltd Heat treatment apparatus
JP2013171979A (en) * 2012-02-21 2013-09-02 Kelk Ltd Heater

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