JP2016134800A - Piezoelectric vibration piece and piezoelectric vibrator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a small-sized piezoelectric vibration piece capable of stably outputting a desired resonance frequency.SOLUTION: A piezoelectric vibration piece 3 includes: a first vibration arm unit 31 and a second vibration arm unit 32 arranged side by side in a width direction W; a base unit 35 for mutually connecting base end portions 31b, 32b of respective vibration arm units 31, 32; and a first support arm section 33 and a second support arm section 34 located on the outsides of the respective vibration arm units 31, 32 in the width direction W and extended from the base unit 35. The vibration arm units 31, 32 respectively include body sections 31A, 32A extended from the base unit 35 and weight sections 31B, 32B formed on tips of the body sections 31A, 32A so that widths in the width direction W are wider than that of the body sections 31A, 32A. The body sections 31A, 32A respectively include a first inclination section 41 and a second inclination section 43 extended to the outside in the width direction W obliquely from the width direction W.SELECTED DRAWING: Figure 5

Description

  The present invention relates to a piezoelectric vibrating piece and a piezoelectric vibrator.

  For example, a piezoelectric vibrator using a crystal or the like is used in an electronic device such as a mobile phone or a personal digital assistant device as a device used for a timing source such as a time source or a control signal, a reference signal source, or the like. As this type of piezoelectric vibrator, a piezoelectric vibrator in which a piezoelectric vibrating piece is hermetically sealed in a package in which a cavity is formed is known. In recent years, with the miniaturization of electronic devices, demands for miniaturization of piezoelectric vibrators and piezoelectric vibrating pieces are increasing.

  Incidentally, the resonance frequency of the piezoelectric vibrating piece generally increases in inverse proportion to the square of the length of the vibrating arm portion. For this reason, if the piezoelectric vibrating piece is reduced in size by shortening the vibrating arm portion, the resonance frequency increases. Therefore, there is known a method of outputting a desired resonance frequency applicable to an electronic device by suppressing the increase of the resonance frequency by increasing the mass of the tip of the vibration arm while shortening the vibration arm. .

  As a method of increasing the mass of the tip of the vibrating arm, a method of providing a weight at the tip of the vibrating arm is known. For example, the piezoelectric vibrating piece described in Patent Document 1 is formed at the base, at least one arm (equivalent to “main body” in the claims) extending from the base, and the tip of the arm, and is wider than the arm. And a vibrating arm having a wide weight portion (corresponding to “vibrating arm portion” in the claims).

JP 2011-182024 A

  However, in the piezoelectric vibrating piece described in Patent Document 1, the pair of vibrating arms extends in parallel from the base. For this reason, there is a limit in increasing the width of the weight portion, and it is difficult to suppress an increase in the resonance frequency while downsizing the piezoelectric vibrating piece. Therefore, the conventional piezoelectric vibrating piece has a problem in that a desired resonance frequency is stably output while realizing miniaturization.

  Accordingly, the present invention provides a piezoelectric vibrating piece and a piezoelectric vibrator that can stably output a desired resonance frequency while reducing the size.

The piezoelectric vibrating piece of the present invention includes a pair of vibrating arm portions arranged side by side in a predetermined direction, a base portion that connects base ends of the pair of vibrating arm portions, and the pair of vibrating arm portions in the predetermined direction. A pair of support arm portions that are located outward and extend from the base portion, wherein the vibrating arm portion is formed at a main body portion that extends from the base portion and a tip of the main body portion, and is in the predetermined direction A weight part wider than the main body part, and the main body part has an inclined part extending obliquely with respect to the predetermined direction toward the outside in the predetermined direction. .
According to the present invention, since the vibrating arm portion has the inclined portion extending obliquely outward from the base portion, the width of the weight portion is set wide while preventing the weight portions from contacting each other, and the vibrating arm The mass of the tip of the part can be increased. Thereby, the length of the vibrating arm portion can be shortened while suppressing an increase in the resonance frequency. Therefore, a piezoelectric vibrating piece capable of stably outputting a desired resonance frequency while being downsized is obtained.

In the piezoelectric vibrating piece described above, it is preferable that the width of the weight portion in the predetermined direction is three times or more the width of the main body portion in the predetermined direction.
According to the present invention, the mass of the tip of the vibrating arm portion can be sufficiently secured by setting the width of the weight portion to three times or more the width of the main body portion. For this reason, it is possible to shorten the vibrating arm portion while suppressing an increase in the resonance frequency, and it is possible to reduce the size of the piezoelectric vibrating piece.

In the piezoelectric vibrating piece described above, it is desirable that the total value of the widths of the pair of weight portions in the predetermined direction is 60% or more and less than 100% of the total width.
According to the present invention, the total value of the widths of the pair of weight portions is set to 60% or more and less than 100% of the total width of the piezoelectric vibrating piece, thereby providing a gap between the weight portions and the tip of the vibrating arm portion. Can be secured sufficiently. For this reason, it is possible to shorten the vibrating arm portion while suppressing an increase in the resonance frequency, and it is possible to reduce the size of the piezoelectric vibrating piece.

In the above-described piezoelectric vibrating piece, it is preferable that the weight portion has a symmetrical shape.
According to the present invention, the balance of the weight balance of each vibrating arm portion can be maintained by making the weight portion symmetrical. For this reason, the vibration blur of each vibration arm part is suppressed, and a vibration can be stabilized. Therefore, it is possible to stably output a desired resonance frequency.

A piezoelectric vibrator according to the present invention includes the above-described piezoelectric vibrating piece.
According to the present invention, since the above-described piezoelectric vibrating piece is provided, it is possible to obtain a piezoelectric vibrating piece that can stably output a desired resonance frequency while being downsized.

The piezoelectric vibrator includes a bonding material for mounting the pair of support arm portions on a package, and the bonding material is in contact with a proximal end side with respect to a distal end portion of the support arm portion. desirable.
According to the present invention, since the bonding material is in contact with the base end side of the distal end portion of the support arm portion, it is possible to suppress the bonding material from moving to the surface of the distal end portion of the support arm portion. Thereby, it can prevent that the weight part located in the periphery of the front-end | tip part of a support arm part and a joining material contact, and the vibration of a vibration arm part is disturb | confused. Therefore, a desired resonance frequency can be output stably.

  According to the present invention, since the vibrating arm portion has the inclined portion extending obliquely outward from the base portion, the width of the weight portion is set wide while preventing the weight portions from contacting each other, and the vibrating arm The mass of the tip of the part can be increased. Thereby, the length of the vibrating arm portion can be shortened while suppressing an increase in the resonance frequency. Therefore, a piezoelectric vibrating piece capable of stably outputting a desired resonance frequency while being downsized is obtained.

It is an external perspective view of a piezoelectric vibrator. It is an internal block diagram of a piezoelectric vibrator. It is sectional drawing in the III-III line of FIG. It is a disassembled perspective view of a piezoelectric vibrator. It is a top view of a piezoelectric vibrating piece. It is a top view of the piezoelectric vibrating piece of a modification.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
(Piezoelectric vibrator)
FIG. 1 is an external perspective view of a piezoelectric vibrator. FIG. 2 is an internal configuration diagram of the piezoelectric vibrator. FIG. 3 is a cross-sectional view taken along line III-III in FIG. FIG. 4 is an exploded perspective view of the piezoelectric vibrator.

As shown in FIGS. 1 to 4, the piezoelectric vibrator 1 according to the present embodiment includes a package 2 having a cavity C hermetically sealed therein, and a piezoelectric vibrating piece 3 accommodated in the cavity C. It is a ceramic package type surface-mount type resonator.
The piezoelectric vibrator 1 is formed in a substantially rectangular parallelepiped shape. In the present embodiment, the longitudinal direction of the piezoelectric vibrator 1 is referred to as a longitudinal direction L and the short side direction is referred to as a width direction W in plan view. A direction orthogonal to the direction L and the width direction W is referred to as a thickness direction T.

The package 2 includes a package body 5 and a sealing plate 6 that is bonded to the package body 5 and that forms a cavity C between the package body 5 and the package body 5.
The package main body 5 includes a first base substrate 10 and a second base substrate 11 which are joined in a state of being overlapped with each other, and a seal ring 12 which is joined on the second base substrate 11.

  At the four corners of the first base substrate 10 and the second base substrate 11, cutout portions 15 having a ¼ arc shape in plan view are formed over the entire thickness direction of both the base substrates 10 and 11. The first base substrate 10 and the second base substrate 11 are formed, for example, by stacking and joining two wafer-like ceramic substrates, and then forming a plurality of through-holes penetrating both ceramic substrates in a matrix form. It is produced by cutting both ceramic substrates into a lattice shape with reference to the holes. At this time, the through hole is divided into four parts, thereby forming the cutout part 15.

  Although the first base substrate 10 and the second base substrate 11 are made of ceramics, specific ceramic materials include, for example, HTCC (High Temperature Co-Fired Ceramic) made of alumina, or LTCC (made of glass ceramics). Low Temperature Co-Fired Ceramic) and the like.

The upper surface of the first base substrate 10 corresponds to the bottom surface of the cavity C.
The second base substrate 11 is superimposed on the first base substrate 10 and is bonded to the first base substrate 10 by sintering or the like. That is, the second base substrate 11 is integrated with the first base substrate 10.

  The second base substrate 11 has a penetrating part 11a. The through portion 11a is formed in a rectangular shape in plan view with rounded corners. The inner side surface of the penetrating portion 11a constitutes a part of the side wall of the cavity C. Mounting portions 14A and 14B projecting inward are provided on inner side surfaces of both sides in the width direction W of the penetrating portion 11a. The mounting portions 14A and 14B are formed at substantially the center in the longitudinal direction L of the penetrating portion 11a.

  The seal ring 12 is a conductive frame-like member that is slightly smaller than the outer shape of the first base substrate 10 and the second base substrate 11, and is bonded to the upper surface of the second base substrate 11. Specifically, the seal ring 12 is bonded onto the second base substrate 11 by baking with a brazing material such as silver brazing or a solder material, or is formed on the second base substrate 11 (for example, electrolytic plating or electroless). In addition to plating, bonding is performed by welding or the like to a metal bonding layer formed by vapor deposition or sputtering.

Examples of the material of the seal ring 12 include a nickel-based alloy, and specifically, it may be selected from Kovar, Elinvar, Invar, 42-alloy, and the like. In particular, as the material of the seal ring 12, it is preferable to select a material having a thermal expansion coefficient close to that of the first base substrate 10 and the second base substrate 11 made of ceramics. For example, when alumina having a thermal expansion coefficient of 6.8 × 10 ⁻⁶ / ° C. is used as the first base substrate 10 and the second base substrate 11, the seal ring 12 has a thermal expansion coefficient of 5.2 × 10 ⁻ It is preferable to use ⁶ / ° C. Kovar or a 42-alloy having a thermal expansion coefficient of 4.5 to 6.5 × 10 ⁻⁶ / ° C.

  The sealing plate 6 is a conductive substrate stacked on the seal ring 12, and is hermetically bonded to the package body 5 by bonding to the seal ring 12. A space defined by the sealing plate 6, the seal ring 12, the penetrating portion 11 a of the second base substrate 11, and the upper surface of the first base substrate 10 functions as a hermetically sealed cavity C.

  Examples of the welding method of the sealing plate 6 include seam welding by bringing a roller electrode into contact, laser welding, ultrasonic welding, and the like. Moreover, in order to make the welding of the sealing plate 6 and the seal ring 12 more reliable, a bonding layer such as nickel or gold that is familiar to each other is provided at least on the lower surface of the sealing plate 6 and the upper surface of the seal ring 12. It is preferable to form.

  A pair of electrode pads 20 </ b> A and 20 </ b> B, which are connection electrodes to the piezoelectric vibrating reed 3, are formed on the upper surfaces of the mounting portions 14 </ b> A and 14 </ b> B of the second base substrate 11. A pair of external electrodes 21 </ b> A and 21 </ b> B are formed on the lower surface of the first base substrate 10 at intervals in the longitudinal direction L. The electrode pads 20A and 20B and the external electrodes 21A and 21B are, for example, a single-layer film made of a single metal formed by vapor deposition or sputtering, or a laminated film in which different metals are stacked, and are mutually connected via a wiring (not shown). Each is conducting.

(Piezoelectric vibrating piece)
FIG. 5 is a plan view of the piezoelectric vibrating piece.
As shown in FIG. 5, the piezoelectric vibrating piece 3 is a vibrating piece made of a piezoelectric material such as quartz, lithium tantalate, or lithium niobate, and vibrates when a predetermined voltage is applied. In the following description, quartz will be described as an example of the piezoelectric material. The longitudinal direction L, the width direction W, and the thickness direction T of the piezoelectric vibrator 1 coincide with the longitudinal direction, the width direction (corresponding to “predetermined direction” in the claims), and the thickness direction of the piezoelectric vibrating piece 3. . Therefore, in the following description, the same reference numerals as those of the longitudinal direction L, the width direction W, and the thickness direction T of the piezoelectric vibrator 1 are attached to the longitudinal direction, the width direction, and the thickness direction of the piezoelectric vibrating piece 3. To explain.

  The piezoelectric vibrating piece 3 is a plate-like member whose width D1 (full width) in the width direction W is set to, for example, about 500 to 550 μm. The piezoelectric vibrating piece 3 includes a pair of vibrating arm portions (first vibrating arm portion 31 and second vibrating arm portion 32), a base portion 35, and a pair of supporting arm portions (first supporting arm portion 33 and second supporting arm portion). 34). The piezoelectric vibrating reed 3 is formed symmetrically with respect to the center line P along the longitudinal direction L passing between the first vibrating arm portion 31 and the second vibrating arm portion 32 when viewed from the thickness direction T.

  The vibrating arm portions 31 and 32 extend from both ends of the base portion 35 in the width direction W, respectively. The vibrating arm portions 31 and 32 extend along the longitudinal direction L and are arranged side by side in the width direction W. The vibrating arm portions 31 and 32 vibrate with the base end portions 31b and 32b as fixed ends and the distal end portions 31a and 32a as free ends. Each of the vibrating arm portions 31 and 32 includes main body portions 31A and 32A formed at the base end, and weight portions 31B and 32B formed at the distal end.

The main body portions 31A and 32A extend from the base portion 35, respectively.
The main body portion 31 </ b> A of the first vibrating arm portion 31 includes a first inclined portion 41 that extends obliquely with respect to the longitudinal direction L from the base portion 35 toward the outside in the width direction W, and a longitudinal direction from the tip of the first inclined portion 41. And a first straight portion 42 extending along L. The first inclined portion 41 is on a side edge on one side in the longitudinal direction L of the base portion 35, and extends linearly from a corner portion on one side in the width direction W. The dimension of the first inclined portion 41 in the longitudinal direction L is not more than half of the dimension of the main body portion 31A in the longitudinal direction L, and is about one fifth in this embodiment.

  The main body portion 32 </ b> A of the second vibrating arm portion 32 includes a second inclined portion 43 extending obliquely with respect to the longitudinal direction L from the base portion 35 toward the outside in the width direction W, and a longitudinal direction from the tip of the second inclined portion 43. And a second straight portion 44 extending along L. The second inclined portion 43 is linearly extended from the corner portion on the other side in the width direction W on the one end edge in the longitudinal direction L of the base portion 35. The dimension of the 2nd inclination part 43 in the longitudinal direction L is below half of the dimension of the main-body part 32A in the longitudinal direction L, Comprising: In this embodiment, it is about 1/5.

  Groove portions 37 are formed in the main body portions 31A and 32A, respectively. The groove portion 37 is recessed in the thickness direction T on both main surfaces of the main body portions 31A and 32A and extends along the extending direction of the main body portions 31A and 32A. The groove portion 37 is formed from the base end portions 31b and 32b of the vibrating arm portions 31 and 32 to the distal ends of the main body portions 31A and 32A.

  Two systems of excitation electrodes (not shown) are provided on the surfaces of the main body portions 31A and 32A to vibrate each of the vibrating arm portions 31 and 32 in the width direction W. Each excitation electrode is patterned in a state of being electrically insulated from each other, and is arranged so as to vibrate each of the vibrating arm portions 31 and 32 at a predetermined frequency.

  The weight portions 31B and 32B extend along the longitudinal direction L from the tips of the main body portions 31A and 32A, respectively. The weight portions 31B and 32B have a rectangular shape in plan view, and the width in the width direction W is wider than the main body portions 31A and 32A. More specifically, the weight portion 31B is formed symmetrically with respect to the center line Q1 that bisects the first straight portion 42 in the width direction W when viewed from the thickness direction T. The width D2 in the width direction W of the weight portion 31B is, for example, about 200 to 240 μm, and is three times or more the width D4 in the width direction W of the first straight portion 42 of the main body portion 31A. The weight portion 32B is formed symmetrically with respect to a center line Q2 that bisects the second straight portion 44 in the width direction W when viewed from the thickness direction T. The width D3 in the width direction W of the weight portion 32B is equal to the width D2 of the weight portion 31B, and is three times or more the width D5 in the width direction W of the second straight portion 44 of the main body portion 32A.

  As described above, by providing the wide weight portions 31B and 32B at the tips of the vibrating arm portions 31 and 32, the mass of the tips of the vibrating arm portions 31 and 32 and the moment of inertia at the time of vibration can be increased. Thereby, compared with the piezoelectric vibrating piece which does not have the weight parts 31B and 32B, each vibration arm part 31 and 32 can be shortened, suppressing the raise of a resonant frequency.

  The base portion 35 integrally connects the base end portions 31 b and 32 b of the vibrating arm portions 31 and 32. The base 35 has a rectangular shape in plan view, and a width D6 in the width direction W is, for example, about half of the entire width D1 of the piezoelectric vibrating piece 3.

  The support arm portions 33 and 34 are located outward in the width direction W of the vibrating arm portions 31 and 32 and extend from both ends of the base portion 35 in the width direction W. More specifically, the first support arm portion 33 extends from one end portion in the width direction W of the base portion 35 toward the outside in the width direction W, and further bends toward the first vibrating arm portion 31 in the longitudinal direction. It extends along L. The second support arm portion 34 extends from the other end portion of the base portion 35 in the width direction W toward the outside in the width direction W, and further bends toward the second vibrating arm portion 32 along the longitudinal direction L. It extends. The front end portions 33a and 34a of the support arm portions 33 and 34 are located on the base 35 side with respect to the weight portions 31B and 32B in the longitudinal direction L.

Mounted electrodes (not shown) are provided on the surfaces of the support arm portions 33 and 34 as mount portions when the piezoelectric vibrating reed 3 is mounted on the package 2. Each mount electrode is disposed in the vicinity of the tip of each support arm portion 33, 34.
The two systems of mount electrodes and the two systems of excitation electrodes are electrically connected by a routing electrode (not shown). The routing electrode is formed on a path from each of the support arm portions 33 and 34 to each of the vibrating arm portions 31 and 32 via the base portion 35.

As shown in FIGS. 2 to 4, the piezoelectric vibrating reed 3 configured as described above is accommodated in the cavity C of the hermetically sealed package 2. Each mount electrode (not shown) of the piezoelectric vibrating piece 3 is electrically and mechanically connected to the two electrode pads 20A and 20B provided on the mounting portions 14A and 14B of the package 2 via the conductive bonding material 8, respectively. It is joined to. Thereby, the piezoelectric vibrating piece 3 is supported by the support arm portions 33 and 34.
The bonding material 8 has fluidity in the early stage of bonding, and has a property of solidifying in the later stage of bonding to express bonding strength. As the bonding material 8, for example, a conductive adhesive such as silver paste, a metal bump, or the like is suitable. Here, the bonding material 8 is in contact with the proximal end side of the distal end portions 33a and 34a of the support arm portions 33 and 34, and moves to the surface of the distal end portions 33a and 34a of the support arm portions 33 and 34. Is suppressed.

  When a predetermined voltage is applied to the external electrodes 21A and 21B (see FIG. 3), a current flows through each excitation electrode, and an electric field is generated between each excitation electrode. The vibrating arm portions 31 and 32 vibrate at a predetermined resonance frequency in a direction (width direction W), for example, approaching and separating from each other due to an inverse piezoelectric effect caused by an electric field generated between the excitation electrodes. The vibrations of the vibrating arm portions 31 and 32 are used as a time source, a control signal timing source, a reference signal source, and the like.

As described above, in the piezoelectric vibrating piece 3 of the present embodiment, the vibrating arm portions 31 and 32 are formed at the main body portions 31A and 32A extending from the base portion 35 and the distal ends of the main body portions 31A and 32A, respectively. The weight portions 31B and 32B are wider than the main body portions 31A and 32A. The main body portions 31 </ b> A and 32 </ b> A have a first inclined portion 41 and a second inclined portion 43 extending obliquely with respect to the width direction W toward the outside in the width direction W.
According to this structure, since each vibrating arm part 31 and 32 has the 1st inclination part 41 and the 2nd inclination part 43 which are diagonally extended toward the outward from the base 35, between the weight parts 31B and 32B. While preventing the contact, the width of the weight portions 31B and 32B can be set wide, and the mass of the tip of each vibrating arm portion 31 and 32 can be increased. Thereby, the length of each vibration arm part 31 and 32 can be shortened, suppressing the raise of a resonant frequency. Therefore, the piezoelectric vibrating piece 3 that can stably output a desired resonance frequency while being downsized is obtained.

  Further, when the width D6 of the base portion 35 in the width direction W is increased, the vibration energy of the vibrating arm portions 31 and 32 easily propagates to the support arm portions 33 and 34 through the base portion 35, and the CI value increases. End up. In the present embodiment, each of the vibrating arm portions 31 and 32 includes the first inclined portion 41 and the second inclined portion 43 that extend outward in the width direction W, so that the width D6 of the base portion 35 is not increased. The width of the weight portions 31B and 32B can be set wide.

  In addition, the width D2 of the weight part 31B is three times or more the width D4 of the main body part 31A (first straight part 42), and the width D3 of the weight part 32B is the main body part 32A (second straight part 44). The width D5 is three times or more. Thereby, since the mass of the front-end | tip of each vibration arm part 31 and 32 can fully be ensured, it becomes possible to shorten each vibration arm part 31 and 32. FIG. Therefore, the piezoelectric vibrating reed 3 can be reduced in size while suppressing an increase in the resonance frequency.

  Moreover, since the weight parts 31B and 32B are symmetrical, the balance of the weight balance of the vibrating arm parts 31 and 32 can be maintained. For this reason, the vibration blur of each vibration arm part 31 and 32 is suppressed, and a vibration can be stabilized. Therefore, it is possible to stably output a desired resonance frequency.

  In addition, according to the present embodiment, by providing the piezoelectric vibrating reed 3, the piezoelectric vibrator 1 that can stably output a desired resonance frequency while being downsized is obtained.

  In the present embodiment, since the bonding material 8 is in contact with the proximal end side of the distal end portions 33a and 34a of the support arm portions 33 and 34, the bonding material 8 is in contact with the distal end portions of the support arm portions 33 and 34. It can suppress moving to the surface of 33a, 34a. Thereby, it can prevent that the weight parts 31B and 32B located in the periphery of the front-end | tip parts 33a and 34a of each support arm part 33 and 34, and the joining material 8 contact, and the vibration of each vibration arm part 31 and 32 is disturb | confused. . Therefore, a desired resonance frequency can be output stably.

The present invention is not limited to the above-described embodiment described with reference to the drawings, and various modifications can be considered within the technical scope thereof.
For example, in the said embodiment, the 1st inclination part 41 and the 2nd inclination part 43 extended linearly. However, the present invention is not limited to this, and the first inclined portion 41 and the second inclined portion 43 may each be bent between a straight portion and a base portion as shown in FIG. Moreover, the shape which curves may be sufficient as a 1st inclination part and a 2nd inclination part. In any case, it is desirable that the dimension of the first inclined part and the second inclined part in the longitudinal direction L is not more than half of the dimension of the main body part in the longitudinal direction L.

  In the above embodiment, the width D2 of the weight portion 31B, the width D3 of the weight portion 32B, and the total width D1 of the piezoelectric vibrating piece 3 are defined and described. However, the width D2 of the weight portion 31B and the weight portion 32B The total value of the width D3 may be 60% or more and less than 100% of the total width D1 of the piezoelectric vibrating piece 3. In this case, it is possible to sufficiently secure the mass of the tip of each vibrating arm portion 31 and 32 while providing a gap between the weight portions 31B and 32B. For this reason, it becomes possible to shorten each vibration arm part 31 and 32, suppressing the raise of a resonant frequency, and the piezoelectric vibrating piece 3 can be reduced in size.

  In the above-described embodiment, the ceramic package type surface-mount type vibrator has been described as the piezoelectric vibrator 1 using the piezoelectric vibrating piece 3. However, the piezoelectric vibrating piece 3 is formed of a glass substrate and a base substrate. The present invention can also be applied to a glass package type piezoelectric vibrator in which a lid substrate is bonded by anodic bonding.

  In addition, it is possible to appropriately replace the components in the above-described embodiments with known components without departing from the spirit of the present invention.

  DESCRIPTION OF SYMBOLS 1 ... Piezoelectric vibrator 2 ... Package 3 ... Piezoelectric vibration piece 8 ... Bonding material 31 ... 1st vibration arm part (vibration arm part) 31A, 32A ... Main-body part 31B, 32B ... Weight part 31b, 32b ... Base of a vibration arm part End portion 32 ... second vibrating arm portion (vibrating arm portion) 33 ... first supporting arm portion (supporting arm portion) 33a, 34a ... tip end portion of supporting arm portion 34 ... second supporting arm portion (supporting arm portion) 41 ... 1st inclined part (inclined part) 43 ... 2nd inclined part (inclined part) D1 ... Width of piezoelectric vibrating piece (full width) D2, D3 ... Width of weight part D4, D5 ... Width of straight part (width of main body part) W: Width direction (predetermined direction)

Claims (6)

A pair of vibrating arms arranged side by side in a predetermined direction;
A base for connecting the base ends of the pair of vibrating arms; and
A pair of support arm portions that are located outward in the predetermined direction of the pair of vibrating arm portions and extend from the base portion;
With
The vibrating arm portion is
A main body extending from the base,
A weight portion formed at a tip of the main body portion and having a width in the predetermined direction wider than the main body portion;
With
The main body has an inclined portion extending obliquely with respect to the predetermined direction toward the outside in the predetermined direction.
A piezoelectric vibrating piece characterized by that. The width of the weight portion in the predetermined direction is at least three times the width of the main body portion in the predetermined direction.
The piezoelectric vibrating piece according to claim 1. The total value of the widths of the pair of weight portions in the predetermined direction is 60% or more and less than 100% of the total width.
The piezoelectric vibrating piece according to claim 1 or 2, wherein The weight portion has a symmetrical shape,
The piezoelectric vibrating piece according to any one of claims 1 to 3, wherein   A piezoelectric vibrator comprising the piezoelectric vibrating piece according to claim 1. A bonding material for mounting the pair of support arms on the package;
The bonding material is in contact with the base end side with respect to the distal end portion of the support arm portion,
The piezoelectric vibrator according to claim 5.

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