JP2016122751A - 多層反射膜付き基板、反射型マスクブランク及び反射型マスク、並びに多層反射膜付き基板、反射型マスクブランク及び半導体装置の製造方法 - Google Patents
多層反射膜付き基板、反射型マスクブランク及び反射型マスク、並びに多層反射膜付き基板、反射型マスクブランク及び半導体装置の製造方法 Download PDFInfo
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| JP2014262460A JP2016122751A (ja) | 2014-12-25 | 2014-12-25 | 多層反射膜付き基板、反射型マスクブランク及び反射型マスク、並びに多層反射膜付き基板、反射型マスクブランク及び半導体装置の製造方法 |
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| JP2014262460A JP2016122751A (ja) | 2014-12-25 | 2014-12-25 | 多層反射膜付き基板、反射型マスクブランク及び反射型マスク、並びに多層反射膜付き基板、反射型マスクブランク及び半導体装置の製造方法 |
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| Publication Number | Publication Date |
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| JP2016122751A true JP2016122751A (ja) | 2016-07-07 |
| JP2016122751A5 JP2016122751A5 (enrdf_load_stackoverflow) | 2018-01-25 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2022065144A1 (enrdf_load_stackoverflow) * | 2020-09-28 | 2022-03-31 | ||
| CN114527718A (zh) * | 2022-02-25 | 2022-05-24 | 江苏鑫亿鼎石英科技股份有限公司 | 一种石英砂数据化智能生产控制系统 |
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| JP2015141972A (ja) * | 2014-01-28 | 2015-08-03 | 凸版印刷株式会社 | Ｅｕｖマスクおよびｅｕｖマスクの製造方法 |
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| JP2009523311A (ja) * | 2006-01-12 | 2009-06-18 | 旭硝子株式会社 | Ｅｕｖリソグラフィ用反射型マスクブランク |
| JP2009212220A (ja) * | 2008-03-03 | 2009-09-17 | Toshiba Corp | 反射型マスク及びその作製方法 |
| WO2010026998A1 (ja) * | 2008-09-05 | 2010-03-11 | 旭硝子株式会社 | Ｅｕｖリソグラフィ用反射型マスクブランクおよびその製造方法 |
| JP2011044520A (ja) * | 2009-08-20 | 2011-03-03 | Dainippon Printing Co Ltd | 反射型マスクおよびその製造方法 |
| JP2011129843A (ja) * | 2009-12-21 | 2011-06-30 | Toshiba Corp | 反射型露光用マスク、反射型露光用マスクの製造方法、反射型露光用マスクの検査方法、及び反射型露光用マスクの洗浄方法 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JPWO2022065144A1 (enrdf_load_stackoverflow) * | 2020-09-28 | 2022-03-31 | ||
| WO2022065144A1 (ja) * | 2020-09-28 | 2022-03-31 | Hoya株式会社 | 多層反射膜付き基板、反射型マスクブランク、反射型マスクの製造方法、及び半導体装置の製造方法 |
| KR20230073195A (ko) | 2020-09-28 | 2023-05-25 | 호야 가부시키가이샤 | 다층 반사막 부착 기판, 반사형 마스크 블랭크, 반사형 마스크의 제조 방법, 및 반도체 장치의 제조 방법 |
| CN114527718A (zh) * | 2022-02-25 | 2022-05-24 | 江苏鑫亿鼎石英科技股份有限公司 | 一种石英砂数据化智能生产控制系统 |
| CN114527718B (zh) * | 2022-02-25 | 2024-01-09 | 江苏鑫亿鼎石英科技股份有限公司 | 一种石英砂数据化智能生产控制系统 |
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