JP2016119012A - Mass flow controller and vaporization system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a mass flow controller which is for controlling flow rate of high temperature gas and is capable of preventing failures due to heat of circuit boards without increasing the size thereof.SOLUTION: A mass flow controller includes; fluid detection devices 31; a fluid control valve 32; circuit boards 33; a housing C that accommodates the fluid detection devices 31, the fluid control valve 32, and the circuit boards 33; partition walls 4 that separates a space on a side of the circuit boards 33 and a space on a side of the fluid detection devices 31 or the fluid control valve 32; a cooling gas inlet port 5 for introducing a cooling gas from outside the housing C into the space partitioned by the partition walls 4; and a cooling gas outlet port 6 for discharging the cooling gas from the space partitioned by the partition walls 4 to the outside of the housing C.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a mass flow controller suitably used for controlling the flow rate of a high-temperature gas.

  Conventionally, in a vaporization system that vaporizes a liquid material and supplies the vaporized gas at a predetermined flow rate, a mass flow controller is used to control the flow rate of the vaporized gas.

  For example, as shown in Patent Document 1, the mass flow controller includes a main body block in which a flow path is formed, a flow rate sensor that is attached to the main body block and measures a flow rate of a gas flowing through the flow path, and the flow And a flow rate control valve for controlling the flow rate of the fluid flowing through the passage. And the said flow sensor and the said flow control valve are accommodated in the housing | casing.

  In such a mass flow controller, since the main body block is heated by the vaporized gas or heated by a heater to prevent re-liquefaction of the vaporized gas, a flow sensor and a flow control valve attached to the main body block. Will also be hot.

  Here, since the circuit board of the flow sensor may break down in a high temperature environment, the flow sensor includes a sensing unit that outputs a signal corresponding to the flow rate, and a circuit board that calculates the flow rate from the signal of the sensing unit. It is considered that the circuit board is arranged as far as possible from the main body block and connected by wiring.

  However, simply separating the flow sensor into the sensing unit and the circuit board increases the separation distance for reducing the thermal effect on the circuit board, resulting in a larger housing for storing them. There is a problem that the mass flow controller becomes large.

JP 2004-157719 A

  Therefore, the present invention has been made to solve the above-mentioned problems, and in a mass flow controller that controls the flow rate of a high-temperature gas, the main problem is to prevent failure due to heat of a circuit board without increasing the size. Is.

  That is, the mass flow controller according to the present invention includes a fluid detection device that detects a physical quantity related to the flow rate of the fluid flowing through the flow channel, a fluid control valve that controls the fluid flowing through the flow channel, the fluid detection device, and the fluid control. A circuit board spaced apart from the valve, a housing for housing the fluid detection device, the fluid control valve, and the circuit board; a space on the circuit board side provided in the housing; and the fluid A partition wall that partitions the detection device side or the fluid control valve side space, and a cooling gas introduction port that is provided in the housing and introduces cooling gas from outside the housing into the space partitioned by the partition wall And a cooling gas derivation port for deriving the cooling gas from the space partitioned by the partition wall to the outside of the casing.

If it is such, since the circuit board which processes the signal from the fluid detection apparatus or the signal to the fluid control valve is provided apart from the fluid detection apparatus and the fluid control valve, the flow path is formed. It can be made hard to receive the heat influence from a body block, a flow volume detection mechanism, and a fluid control valve.
In addition, since a partition wall is provided to partition the circuit board side space and the fluid detection device side space or the fluid control valve side space, the body block, the flow rate detection mechanism, and the fluid control valve are connected through the space to the circuit board. Heat transfer can be reduced.
Furthermore, since the cooling gas is introduced into the space partitioned by the partition wall, the circuit board can be cooled by the cooling gas. Note that heat transfer through the space can be further reduced by the cooling gas, and heat transfer to the circuit board can be reduced by cooling the partition wall and the housing.
Thus, the heat transfer to the circuit board can be reduced by the partition wall and the cooling gas, and the circuit board can be cooled, so that the distance between the circuit board and the flow rate detection mechanism and the fluid control valve can be made closer than before. Failure of the circuit board due to the heat of the circuit board can be prevented without increasing the size of the mass flow controller.

It is desirable that the cooling gas introduction port is for introducing the cooling gas into the space on the circuit board side.
In this case, the circuit board can be directly cooled by the cooling gas, and the cooling effect on the circuit board can be improved.

Here, the partition wall is located between the first space where the circuit board is located, the second space located on the fluid detection device side or the fluid control valve side, and the first space and the second space. The cooling gas introduction port is configured to introduce the cooling gas into the first space, and the cooling gas outlet port is configured to partition the cooling gas from the second space. Preferably, the cooling gas is configured to flow from the first space to the second space through the third space.
Since the partition wall partitions the plurality of spaces in this way, the cooling gas flow path between the cooling gas introduction port and the cooling gas outlet port becomes long, and the flow rate of the cooling gas necessary to obtain a desired cooling effect is reduced. The running cost can be reduced. That is, the cooling gas supplied into the housing can be effectively used, and the cooling effect of the circuit board by the cooling gas can be improved.
Further, since the cooling gas is supplied in the coldest state to the first space where the circuit board to be cooled most is located, the cooling effect of the circuit board can be improved. On the other hand, since the cooling gas which has passed through the first space and the third space and has taken away the surrounding heat and is heated is supplied to the fluid detection device or the second space located on the fluid control valve side, it is maintained at a high temperature. Do not overcool the body block you want to keep warm.

A protective pipe that accommodates and protects the wiring that connects the fluid detection device or the fluid control valve and the circuit board, and the partition wall is connected to the protective pipe directly or via a heat conducting member; Is desirable.
This makes it difficult for noise to ride on the signal and reduces the thermal effect on the wiring. Moreover, since the partition wall is connected to this protective pipe directly or via a heat conducting member, the heat transmitted to the protective pipe can be radiated from the partition wall.

The flow path is formed inside, and includes a body block to which the fluid detection device, the fluid control valve, and the housing are attached, and a heater for heating the fluid flowing through the flow path is provided in the body block. It is desirable that
Thus, in the structure which provided the heater in the body block, since the fluid detection apparatus, the fluid control valve, and housing | casing which were attached to the body block and the said body block become high temperature, the effect of this invention becomes still more remarkable.

  The vaporization system according to the present invention includes a vaporization unit that vaporizes a liquid material, and a mass flow controller that controls a flow rate of the gas vaporized by the vaporization unit, and the mass flow controller described above is used as the mass flow controller. It is desirable to use

  According to the present invention configured as described above, the space between the fluid detection device or the fluid control valve and the circuit board is partitioned, and the partition wall against which the cooling gas supplied from the outside of the housing hits is provided. In the mass flow controller that controls the flow rate of the high-temperature gas, it is possible to prevent failure due to the heat of the circuit board without increasing the size.

The schematic diagram which shows the structure of the vaporization system of this embodiment. The top view seen from the apparatus attachment surface of the main body block (1st body block and 2nd body block) of the embodiment. The schematic diagram which shows the connection part of the partition wall and protection pipe of the embodiment. The schematic diagram which shows the passage route of the cooling gas of the embodiment. The schematic diagram which shows the modification of the passage route of the cooling gas of the embodiment. The schematic diagram which shows the modification of the passage route of the cooling gas of the embodiment.

  Hereinafter, an embodiment of a vaporization system incorporating a mass flow controller according to the present invention will be described with reference to the drawings.

  The vaporization system 100 of this embodiment is for supplying a gas at a predetermined flow rate to a chamber that is incorporated in, for example, a semiconductor production line and performs a semiconductor production process, and vaporizes a liquid material as shown in FIG. A vaporization unit 2 and a mass flow controller 3 for controlling the flow rate of the gas vaporized by the vaporization unit 2 are provided.

  The vaporizer 2 includes a vaporizer 21 that vaporizes a liquid material by a baking method, a supply amount control device 22 that controls a supply amount of the liquid material to the vaporizer 21, and a liquid material that is supplied to the vaporizer 21 And a preheater 23 for preheating to a predetermined temperature.

  The vaporizer 21, the supply amount control device 22, and the preheater 23 are attached to one surface of a body block B1 (hereinafter referred to as a first body block B1) in which flow paths (R1 to R4) are formed. . The first body block B1 is provided with a heater H1, and the upstream opening of the internal flow path R1 is connected to the liquid material introduction port P1. The first body block B1 is installed in a semiconductor manufacturing line or the like so that its longitudinal direction is in the vertical direction (vertical direction).

  The vaporizer 21 includes a storage container having a space for storing the liquid material therein and a vaporization heater (both not shown) for vaporizing the liquid material. The storage container is provided with a liquid level sensor (not shown) for detecting the storage amount of the stored liquid material.

  The supply amount control device 22 is a control valve that controls the supply flow rate of the liquid material to the vaporizer 21, and is an electromagnetic on-off valve in this embodiment. Then, based on a detection signal from a liquid level sensor provided in the storage container, a control device (not shown) turns on the electromagnetic on-off valve 22 so that the liquid material stored in the storage container is always a predetermined amount. / OFF control. Thereby, the liquid material is intermittently supplied to the vaporizer 21 during the vaporization operation.

  The preheater 23 includes a preheating block in which a flow path through which the liquid material flows is formed, and a preheating heater (not shown) provided in the preheating block for preheating the liquid material. The preheater 23 heats the liquid material to a temperature just before vaporization (less than the boiling point).

  The liquid material introduced from the liquid material introduction port P1 is preheated to a predetermined temperature by flowing through the preheater 23 by the vaporization unit 2 configured as described above. The liquid material preheated by the preheater 23 is intermittently introduced into the vaporizer 21 by ON / OFF control of the electromagnetic on-off valve 22 which is a supply amount control device. And in the vaporizer 21, it will be in the state by which the liquid material was always stored, the liquid material was vaporized and the vaporized gas was produced | generated continuously, without being influenced by ON / OFF control of the electromagnetic on-off valve 22, It is continuously derived to the mass flow controller 3.

Next, the mass flow controller 3 will be described.
The mass flow controller 3 includes a fluid detection device 31 that detects a physical quantity related to the flow rate of the fluid flowing through the flow path, a fluid control valve 32 that controls the fluid flowing through the flow path, the fluid detection device 31, the fluid control valve 32, and a space. And a circuit board 33 provided through the circuit board.

  The fluid detection device 31 and the fluid control valve 32 are attached to one surface of a body block B2 (hereinafter referred to as a second body block B2) which is a manifold block in which flow paths (R5, R6) are formed. Yes. An upstream pressure sensor 34 and an opening / closing valve 35 are provided on the upstream side of the fluid control valve 32. The second body block B2 is provided with a heater H2, and the downstream opening of the internal flow path R6 is connected to the vaporized gas outlet port P2.

  The second body block B2 of the mass flow controller 3 is connected to the first body block B1 of the vaporizing unit 2 to constitute the main body block B. The main body block B is arranged in a semiconductor manufacturing line or the like so that the longitudinal direction thereof is in the vertical direction (vertical direction) so that the liquid material introduction port P1 is located on the lower side and the vaporized gas outlet port P2 is located on the upper side. Installed.

  The fluid detection device 31 detects the pressure on the upstream side of the fluid resistance 313 provided in the internal flow path R6, for example, the capacitance type pressure sensor 311 and the pressure on the downstream side of the fluid resistance 313, for example, static. This is a capacitance type pressure sensor 312.

  The fluid control valve 32 is a control valve that controls the flow rate of the vaporized gas generated by the vaporizer 21, and is a piezo valve in this embodiment.

  Further, as the circuit board 33, a gas flowing in the internal flow path is obtained by obtaining a detection signal from the fluid detection mechanism 31 (specifically, the pressure sensor 311 and the pressure sensor 312) and calculating the detection signal. A circuit board 331 for flow rate calculation in which an arithmetic circuit (for example, an amplifier circuit) for calculating the flow rate of the fluid is formed, a circuit board 332 for control in which a control circuit for controlling the fluid control valve 32 is formed, and the like. Is provided. In the present embodiment, in addition, a circuit board 333 for pressure measurement is provided on which an arithmetic circuit for calculating a detection signal from the upstream pressure sensor 34 is formed.

  The circuit board 331 for calculating the flow rate is provided away from the fluid detection mechanism 31 on the opposite side to the second body block B2, and is connected to the fluid detection mechanism 31 by wiring. This wiring is, for example, a coaxial cable, and is protected by, for example, a metal protection pipe 361. In the present embodiment, the circuit board 331 is supported by the protective pipe 361.

  The control circuit board 332 is provided on the opposite side of the second body block B2 from the fluid control valve 32, and is connected to the fluid control valve 32 by wiring. This wiring is, for example, a coaxial cable, and is protected by, for example, a metal protection pipe 362. In the present embodiment, the circuit board 332 is supported by the protective pipe 362.

  The pressure measurement circuit board 333 is provided away from the upstream pressure sensor 34 on the opposite side of the second body block B2, and is connected to the upstream pressure sensor 34 by wiring. This wiring is, for example, a coaxial cable and is protected by, for example, a metal protection pipe 363. In the present embodiment, the circuit board 333 is supported by the protective pipe 363.

  The fluid detection device 31, the fluid control valve 32, the circuit board 33, and the like are accommodated in a casing C attached to the main body block B. The casing C of the present embodiment is a single one, and not only the components 31 to 35 of the mass flow controller 3 attached to the second body block B2, but also the vaporizer 2 attached to the first body block B1. These components 21 to 23 are also accommodated. The housing C is provided with a circuit board 33 housed inside and a connector CN for connecting a control device to the outside.

  As shown in FIG. 1, the vaporization system 100 according to the present embodiment is provided inside the housing C, and includes a partition wall 4 that partitions the internal space of the housing C into a plurality of spaces, and the housing C. A cooling gas introduction port 5 that is provided and introduces a cooling gas from the outside of the housing C into a space partitioned by the partition wall 4; and a cooling gas that is provided in the housing C and partitioned from the space partitioned by the partition wall 4. And a cooling gas lead-out port 6 for leading the gas to the outside of the casing C. In the present embodiment, the devices attached to the main body block B are covered with the heat insulating plate 7, and the internal space of the housing C is closed from the heat insulating plate 7 and the housing C. It is space.

  The partition wall 4 partitions the internal space of the housing C into a space on the circuit board 33 side and a space on the fluid detection device 31 and fluid control valve 32 side, that is, the body block B side.

  Specifically, the partition wall 4 includes a first space S1 in which the circuit boards 331, 332, and 333 are located, a second space S2 that is located on the fluid detection device 31 and the fluid control valve 32 side, and the first space S1 and It divides into 3rd space S3 located between said 2nd space S2. Here, the first space S <b> 1 is a space farthest from the main body block B among the spaces partitioned by the partition wall 4. Hereinafter, the partition wall 4 that partitions the first space S1 and the third space S3 is referred to as a first partition wall 4a, and the partition wall 4 that partitions the third space S3 and the second space S2 is referred to as a second partition wall 4b.

  The first partition wall 4a is formed with one or a plurality of vent holes 4a1 for communicating the first space S1 and the third space S3. The second partition wall 4b is formed with one or a plurality of vent holes 4b1 for communicating the third space S3 and the second space S2. In this embodiment, each partition wall 4a, 4b makes the flat plate shape provided along the longitudinal direction of the main body block B, for example.

  Further, through holes 4a2, 4b2 are formed in the partition walls 4a, 4b, respectively, through which the protection pipes 361, 362, 363 of the circuit boards 331, 332, 333 are passed. In addition, as shown in FIG. 3, between each through-hole 4a2, 4b2 and the protective pipes 361, 362, 363 passing through each through-hole 4a2, 4b2, for example, is sealed by a high thermal conductive member 8 such as thermal conductive silicon. The heat transmitted from the main body block B side is transferred to the partition walls 4a and 4b. And since the partition walls 4a and 4b are connected to the housing | casing C, heat | fever is transmitted also to the housing | casing C and can also be thermally radiated from the housing | casing C. FIG.

  The cooling gas introduction port 5 directly introduces the cooling gas into the first space S1, and is provided on the side wall of the casing C that forms the first space S1. The cooling gas introduction port 5 is connected to an external pipe connected to a cooling gas source provided outside the housing C. Further, as the cooling gas, for example, an inert gas such as nitrogen gas or argon gas is used. Thereby, even when a leak of a liquid material or vaporized gas occurs, ignition or the like can be prevented, and the safety of the vaporization system 100 can be improved.

  The cooling gas lead-out port 6 leads the cooling gas from the second space S2 to the outside of the casing C, and is provided on the side wall of the casing C that forms the second space S2. The cooling gas outlet port 6 is connected to an external pipe for exhausting the cooling gas or returning it to the cooling gas source.

  The partition walls 4a and 4b, the vent holes 4a1 and 4b1 formed in the partition walls 4a and 4b, the cooling gas introduction port 5 and the cooling gas outlet port 6 are formed in the longitudinal direction ( In this embodiment, they are arranged so as to form a flow path that reciprocates in the vertical direction (see FIG. 4).

  In the present embodiment, the cooling gas introduction port 5 is provided below the circuit boards 331, 332, and 333 (one longitudinal end side of the main body block B) on the side wall of the casing C that forms the first space S1. ing. The vent hole 4a1 of the first partition wall 4a is an upper portion of the partition wall 4a, that is, in the vicinity of or above the protective pipe 361 located at the other longitudinal end of the main body block B (the other longitudinal end of the main body block B). Side). FIG. 1 shows a case where the vent hole 4a1 is provided on the partition wall 4a above the protective pipe 361 (on the other end side in the longitudinal direction of the main body block B). The vent hole 4b1 of the second partition wall 4b is formed in the lower part of the partition wall 4b1, that is, in the vicinity of the protective pipe 363 located at one end in the longitudinal direction of the main body block B or at the lower side thereof (one longitudinal end of the main body block B). Side). In FIG. 1, the vent hole 4b1 is provided in the partition wall 4b so as to include the protective pipe 363. The cooling gas outlet port 6 is provided on the side wall located on one end side in the longitudinal direction of the main body block B on the side wall of the casing C forming the second space S2.

The cooling action of the vaporization system 100 configured as described above will be described with reference to FIG.
The cooling gas introduced into the first space S1 from the cooling gas introduction port 5 flows from one longitudinal end side of the main body block B toward the other longitudinal end side, and each circuit board 331 located in the first space S1. The circuit boards 331, 332, 333 are cooled by hitting 332,333. That is, the cooling gas introduced from the cooling gas introduction port 5 is supplied to the first space S1 where the circuit board 33, which is the object to be cooled most, is located in the coldest state compared to the other spaces S2 and S3. Further, the cooling gas hits the outer surface of the protection pipes 361, 362, 363 located in the first space S1, and the protection pipes 361, 362, 363 are also cooled. Then, the cooling gas flows through the vent hole 4a1 provided in the first partition wall 4a and flows into the third space S3.

  The cooling gas flowing into the third space S3 flows from the other longitudinal end of the main body block B toward the one longitudinal end, and hits the outer surface of the protective pipes 361, 362, 363 located in the third space S3. Then, the protection pipes 361, 362, 363 are cooled. Moreover, in this embodiment, the actuator part of the on-off valve 35 located in 3rd space S3 is also cooled. Thereby, the lifetime of the actuator part of the on-off valve 35 can be extended. Furthermore, the actuator part of the supply amount control device 22 located in the third space S3 is also cooled. Thereby, the lifetime of the actuator part of the on-off valve 35 and the flow volume supply apparatus 22 can be extended. Thus, the cooling gas is warmed in the process of passing through the first space S1 and the third space S3, and the warmed cooling gas passes through the vent hole 4b1 provided in the second partition wall 4b and passes through the first hole S1. 2 flows into the space S2.

  The cooling gas that has flowed into the second space flows from one end in the longitudinal direction of the main body block B toward the other end in the longitudinal direction, hits the outer surface of the protective pipes 361, 362, 363 located in the second space S2, The protection pipes 361, 362, 363 are cooled. Further, the actuator part of the fluid control valve 32 and the actuator part of the on-off valve 35 located in the second space S2 are also cooled. Thereby, the lifetime of the actuator part of the fluid control valve 32 and the actuator part of the on-off valve 35 can be extended. Here, since the cooling gas that has flowed into the second space is heated in the process of passing through the first space S1 and the third space S3, the main body block B (second body block B2) that is desired to be maintained (heat-retained) at a high temperature. Do not overcool. Then, the cooling gas is led out of the casing C from the cooling gas lead-out port 6.

  According to the vaporization system 100 of the present embodiment, the circuit board 33 is provided apart from the fluid detection device 31 and the fluid control valve 32, and the first space S1 on the circuit board 33 side and the fluid detection device 31 side or the fluid control valve are provided. Since the partition walls 4a and 4b are provided so as to divide into the second space S2 on the 32 side, the space from the main body block B (second body block B2), the flow rate detection mechanism 31 and the fluid control valve 32 to the circuit board 33 is interposed. Heat transfer can be reduced. In addition, since the cooling gas is introduced into the spaces S1 to S3 partitioned by the partition walls 4a and 4b, the accommodation equipment such as the circuit board 33 can be cooled by the cooling gas. At this time, since the partition walls 4a and 4b, the casing C, the protection pipes 361, 362, and 363 are also cooled, heat transfer from them to the circuit board 33 can also be reduced. Thus, the heat transfer to the circuit board 33 can be reduced by the partition walls 4a and 4b and the cooling gas, and the circuit board 33 can be cooled. Therefore, the distance between the circuit board 33, the flow rate detection mechanism 31 and the fluid control valve 32. Can be brought closer than before, and the failure of the vaporization system 100 can be prevented by the heat of the circuit board 33 without increasing the size of the vaporization system 100.

  In addition, since the partition walls 4a and 4b are partitioned into a plurality of spaces S1 to S3, the cooling gas flow path between the cooling gas introduction port 5 and the cooling gas outlet port 6 becomes long, so as to obtain a desired cooling effect. The flow rate of the necessary cooling gas can be reduced, and the running cost can be reduced. That is, the cooling gas supplied into the housing C can be effectively used, and the cooling effect of the circuit board 33 by the cooling gas can be improved.

In addition, since the vaporizer 21 and the supply amount control device 22 constituting the vaporizer 2 are configured to be attached to the first body block B1, which is a manifold block, pipe connection such as a pipe joint becomes unnecessary, and the vaporizer 2 can be reduced in size. Further, by this miniaturization, it is possible to reduce the size of the vaporizing section 2 having the preheater 23 by mounting the preheater 23 conventionally prepared on the user side on the first body block B1. Furthermore, the vaporization part 2 can be handled as a gas panel which is a single unit.
Further, since the liquid material is preheated by the preheater 23, even if the liquid material is intermittently supplied to the storage container, the temperature change of the storage container (vaporization tank) is small, and the small vaporization system 100 is used. A large flow rate can be stably vaporized.

  In addition, since the vaporization system 100 is divided into the first body block B1 of the vaporization unit 2 and the second body block B2 of the mass flow controller 3, and heaters H1 and H2 are provided individually, the vaporization unit 2 and the mass flow. Each controller 3 can be controlled to an optimum temperature, and the vaporization efficiency can be increased. At this time, it is desirable to set the second body block B2 of the mass flow controller 3 at a higher temperature than the second body block B2 of the vaporizing unit 2. Further, the division into the body blocks B1 and B2 has an advantage that the holes for inserting the heaters H1 and H2 can be easily processed.

The present invention is not limited to the above embodiment.
For example, the vaporization system of the above embodiment is an integrated type in which the vaporization unit and the mass flow controller are accommodated in a single housing, but the vaporization unit and the mass flow controller are separate bodies, and the body block of the vaporization unit And a mass flow controller body block may be connected to a connection pipe.

  The mass flow controller of the present invention can also be used in systems that require high-temperature gas flow rate control other than the vaporization system.

  Furthermore, the space partitioned by the partition wall is not limited to three, and may be two or four or more.

  In addition, the circuit board of the embodiment is divided into three circuit boards, but each circuit of the embodiment may be formed on a single board. It is not limited to the substrate.

  In addition, the flow path of the cooling gas formed by the partition wall is not limited to the above embodiment, and the cooling gas reciprocates once in the longitudinal direction by one partition wall 4 as shown in FIG. May be. In this case, the cooling gas introduction port 5 and the cooling gas outlet port 6 are provided, for example, on the other end side in the longitudinal direction, and the ventilation hole 41 is provided on one end side in the longitudinal direction of the partition wall 4 so It can be configured to reciprocate. Further, since the cooling gas introduction port 5 and the cooling gas outlet port 6 are provided only on one side, it is possible to easily connect the external piping of the cooling gas.

  In addition, as shown in FIG. 6, a partition wall 4 that partitions the internal space of the housing C into a first space where the circuit boards 331, 332, and 333 are located and other spaces is provided to form the first space. The cooling gas introduction port 5 and the cooling gas outlet port 6 may be provided on the side wall. At this time, it is desirable to provide one or a plurality of vent holes 41 in the partition wall 4 so that the cooling gas flows in a space other than the first space.

  Regarding the partition wall, in the embodiment, the fluid detection device 31 and the circuit board 331 of the fluid detection device 31 and the fluid control valve 32 and the circuit board 332 of the fluid control valve are partitioned. However, what is necessary is just to partition between the circuit board 331 of the fluid detection apparatus 31 and the said fluid detection apparatus 31 at least.

  Furthermore, in the above-described embodiment, the protective pipe is provided on the wiring of each circuit board. However, the protective pipe may not be provided. In addition, it is desirable to provide a protection pipe at least on the wiring of the fluid detection device 31 and the circuit board 331 for calculating the flow rate.

  In addition, it goes without saying that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.

DESCRIPTION OF SYMBOLS 100 ... Vaporization system 2 ... Vaporization part 21 ... Vaporizer 22 ... Supply amount control apparatus 23 ... Preheater 3 ... Mass flow controller 31 ... 1st body block R5, R6. .... Flow path 31 ... Fluid detection device 32 ... Fluid control valve 33 ... Circuit board 331 ... Flow rate sensor board 332 ... Flow rate control board C ... Housing 5 ... Cooling gas Introduction port 6 ... Cooling gas outlet port 4 ... Partition wall S1 ... First space S2 ... Second space S3 ... Third spaces 361, 362, 363 ... Protection pipe 8 ...・ Heat conduction member

Claims (6)

A fluid detection device for detecting a physical quantity related to the flow rate of the fluid flowing through the flow path;
A fluid control valve for controlling the fluid flowing through the flow path;
A circuit board provided apart from the fluid detection device and the fluid control valve;
A housing for housing the fluid detection device, the fluid control valve, and the circuit board;
A partition wall provided in the housing, and partitioned into a space on the circuit board side and a space on the fluid detection device side or the fluid control valve side;
A cooling gas introduction port that is provided in the housing and introduces a cooling gas from outside the housing into a space partitioned by the partition wall;
A mass flow controller comprising: a cooling gas outlet port that is provided in the casing and leads the cooling gas from a space partitioned by the partition wall to the outside of the casing.   The mass flow controller according to claim 1, wherein the cooling gas introduction port introduces the cooling gas into a space on the circuit board side. The partition wall is located between the first space where the circuit board is located, the second space located on the fluid detection device side or the fluid control valve side, and the first space and the second space. It is divided into three spaces,
The cooling gas introduction port introduces the cooling gas into the first space;
The cooling gas outlet port leads the cooling gas from the second space;
The mass flow controller according to claim 1, wherein the cooling gas is configured to flow from the first space to the second space through the third space. A protective pipe that houses and protects the wiring that connects the fluid detection device or the fluid control valve and the circuit board;
The mass flow controller according to any one of claims 1 to 3, wherein the partition wall is connected to the protective pipe directly or via a heat conducting member. The flow path is formed inside, and includes a body block to which the fluid detection device, the fluid control valve, and the housing are attached,
The mass flow controller as described in any one of Claims 1 thru | or 4 with which the heater for heating the fluid which flows through the said flow path is provided in the said body block. A vaporizing section for vaporizing the liquid material;
A mass flow controller for controlling the flow rate of the gas vaporized by the vaporization unit,
The vaporization system whose said mass flow controller is a thing as described in any one of Claims 1 thru | or 5.