JP2016114431A - Measuring jig and measuring device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a measuring jig and a measuring device of a measurement sample, which can perform highly reproducible measurement on the measurement sample even when the measurement sample to be used has a film or sheet shape.SOLUTION: A measuring jig 12 used for a measuring device 1 includes: a support part 52 for holding an SPDR resonator 21 or an SiPDR resonator 21; a holding unit 63 for holding at least two portions of a measurement sample 100; and adjustment means 73 for adjusting a position of the measurement sample 100 held by the holding unit 63.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a measurement jig and a measurement apparatus for a measurement sample for measuring dielectric characteristics using a dielectric resonator.

  Currently, as a technique for measuring dielectric properties such as dielectric constant and dielectric loss tangent of a measurement sample, a technique using a pair of dielectric resonators having a predetermined gap between opposing surfaces is known. In such a measuring method, a measurement sample is arranged in a gap between a pair of dielectric resonators, and dielectric characteristics are measured by these dielectric resonators. As such dielectric resonators, techniques using SPDR (Split-post Dielectric Resonator) resonators and SiPDR (Single Post Dielectric Resonators) resonators are known.

  In addition, a technique using a measuring jig provided with a V-shaped groove on the side surface of the resonator in order to accurately align the center positions of the pair of resonators is also known (see, for example, Patent Document 1).

JP 2007-57462 A

  The measurement using the dielectric resonator as described above has the following problems. That is, when a measurement sample is placed between a pair of dielectric resonators, and when a rigid measurement sample is placed, the position to be placed in the gap between the pair of dielectric resonators, that is, the measurement sample Reproducibility of measurement position is relatively high.

  On the other hand, when the measurement sample is a flexible sample such as a film or sheet, the measurement sample itself may bend and the measurement position between the pair of dielectric resonators may vary. As a result, there is a problem that the measurement results vary. For this reason, there is a demand for measurement using a dielectric resonator in which the measurement position of the measurement sample, and hence the measurement result is highly reproducible, and the measurement result has little variation. There is also a demand for a technique for improving the reproducibility of the measurement position of a rigid measurement sample.

  Therefore, the present invention has an object to provide a measurement sample measurement jig and a measurement apparatus capable of measuring a measurement sample with high reproducibility even when a film-like or sheet-like measurement sample is used. And

  In order to solve the problems and achieve the object, the measuring jig and measuring apparatus of the present invention are configured as follows.

  As one aspect of the present invention, the measurement jig includes a support unit that holds the SPDR resonator or the SiPDR resonator, a holding unit that holds at least two locations of the measurement sample, and the measurement sample held by the holding unit. Adjusting means for adjusting the position.

  As one aspect of the present invention, a measurement apparatus includes the measurement jig described above and the SPDR resonator or the SiPDR resonator.

  ADVANTAGE OF THE INVENTION According to this invention, even if it is a case where a film-form or a sheet-form measurement sample is used, it is possible to provide a measurement sample measurement jig and a measurement apparatus capable of measuring a measurement sample with high reproducibility. It becomes.

The side view which shows the structure of the measuring apparatus which concerns on the 1st Embodiment of this invention. The top view which shows the structure of the measuring apparatus. Explanatory drawing which shows typically the principal part structure of the measuring device. The side view which shows the structure of the 1st holding member used for the measuring apparatus. The side view which shows the structure of the 1st holding member used for the measuring apparatus. The top view which shows the structure of the 1st holding member used for the same measuring apparatus. The side view which shows the structure of the 2nd holding member used for the same measuring apparatus. The top view which shows the structure of the 2nd holding member used for the same measuring apparatus. Explanatory drawing which shows the result of the dielectric constant of the measurement sample measured using the same measuring apparatus and a comparative example. Explanatory drawing which shows the result of the dielectric constant of the measurement sample measured using the same measuring apparatus and a comparative example. Explanatory drawing which shows the result of the dielectric loss tangent of the measurement sample measured using the same measuring apparatus and a comparative example. Explanatory drawing which shows the result of the dielectric loss tangent of the measurement sample measured using the same measuring apparatus and a comparative example. The perspective view which shows the structure of the measuring apparatus which concerns on the 2nd Embodiment of this invention. The perspective view which shows the structure of the measuring apparatus which concerns on the 3rd Embodiment of this invention. Explanatory drawing which shows typically the structure of the measuring device used for the measuring apparatus which concerns on the 4th Embodiment of this invention.

(First embodiment)
Hereinafter, the configuration of the measuring apparatus 1 according to the first embodiment of the present invention will be described with reference to FIGS. 1 to 8.
FIG. 1 is a side view showing the configuration of the measuring apparatus 1 according to the first embodiment of the present invention, FIG. 2 is a top view showing the configuration of the measuring apparatus 1, and FIG. 3 is a measuring instrument 11 used in the measuring apparatus 1 and detection. FIG. 4 is a side view showing the configuration of the first holding member 41 used in the measuring apparatus 1, and FIG. 5 is the first holding member used in the measuring apparatus 1. FIG. 6 is a top view illustrating the configuration of the first holding member 41 used in the measuring apparatus 1, and FIG. 7 is a side view illustrating the configuration of the second holding member 42 used in the measuring apparatus 1. FIG. 8 is a top view showing the configuration of the second holding member 42 used in the measuring apparatus 1. In the drawings, arrows X, Y, and Z indicate three directions orthogonal to each other, the X direction and the Y direction indicate the horizontal direction, and the Z direction indicates the vertical direction, respectively.

  As shown in FIGS. 1 to 3, the measuring apparatus 1 includes a measuring instrument 11 that measures the dielectric characteristics of a measuring sample 100 that is a measurement target, and a measuring jig that holds the measuring sample 100 and the measuring instrument 11 at predetermined positions. 12, a detector 13 connected to the measuring instrument 11, and a processing device 14 connected to the detector 13.

  The measurement sample 100 is generally an electrical insulator. Specific examples of the measurement sample 100 include resin materials, glass, ceramics, and various composite materials thereof. Note that the measurement sample 100 may include a metal material.

  In the present embodiment, the measurement sample 100 is formed of a resin material and has flexibility. The measurement sample 100 is formed in a film shape or a sheet shape. The measurement sample 100 is a sample for measuring dielectric characteristics. The measurement sample 100 is, for example, a film-like PTFE (polytetrafluoroethylene) sheet. The measurement sample 100 is formed in, for example, a rectangular shape in which one direction is longer than the other direction.

  The measuring device 11 is a SPDR (Split-post Dielectric Resonator) resonator. The measuring instrument 11 is formed so that the dielectric constant and dielectric loss tangent of the measurement sample 100 can be measured. As shown in FIG. 1 to FIG. 3, specifically, the measuring instrument 11 includes an outer body 21 and a pair of dielectric resonators 22 arranged to face each other with a predetermined gap in the outer body 21. And a signal line 23 electrically connected to each of the pair of dielectric resonators 22. As shown in FIG. 3, the measuring instrument 11 is formed so that it can be placed by inserting the measurement sample 100 into the gap between the pair of dielectric resonators 22.

  The outer body 21 is formed so as to be fixed to the measuring jig 12. The dielectric resonator 22 is formed in a disk shape. The pair of dielectric resonators 22 are fixed to the outer body 21 so that the opposing surfaces facing each other are parallel. The gap between the pair of dielectric resonators 22 is formed larger than the thickness of the measurement sample 100. The signal line 23 is, for example, a coaxial cable. The signal line 23 is provided with a loop antenna at one end. The other end of the signal line 23 is connected to the detector 13.

  The measurement jig 12 includes a base 31 and a holding member 32 that fixes the measuring instrument 11 and the measurement sample 100. The measuring jig 12 includes an indicator 33 for measuring the reference position of the measuring instrument 11 and the holding member 32. The base 31 is formed in a flat plate shape whose main surface extends in the X direction and the Y direction.

  The base 31 supports a holding member 32 on its upper surface so as to be movable in one direction. The base 31 includes a rail 31a that guides the movement of the holding member 32, and a first scale 31b that extends along the rail 31a.

  The rail 31a extends along the X direction on the base 31 so that the movement of the holding member 32 can be guided in one direction, along the X direction in FIGS. The first scale 31b is provided on the base 31 along the extending direction of the rail 31a over the movable range of the holding member 32, for example. The first scale 31b is disposed on the base 31 with a predetermined distance from the rail 31a in order to avoid interference with the movable holding member 32.

  The holding member 32 includes a first holding member 41 that holds the measuring instrument 11, a pair of second holding members 42 that hold the measurement sample 100, and a second holding member 42 in a direction in which the pair of second holding members 42 are separated from each other. And an external force applying means 43 for applying an external force. The holding member 32 is disposed on the base 31 along the rail 31a so that the first holding member 41 and the pair of second holding members 42 can move.

  As shown in FIGS. 4 and 5, the first holding member 41 includes a first base portion 51 provided on the base 31 and a first support portion (movable in the Z direction with respect to the upper surface of the first base portion 51). Support portion) 52.

  As shown in FIG. 4, the first base 51 is formed with a rail groove 51 a that engages with the rail 31 a of the base 31 on the lower surface thereof. The 1st base 51 is provided in the base 31 so that a movement along the rail 31a is possible because the rail groove 51a engages with the rail 31a. The first base 51 is formed in a hollow shape, for example, for weight reduction.

  For example, the first support portion 52 is formed in a square shape in a top view. The first support portion 52 is formed so that the outer body 21 of the measuring instrument 11 can be fixed and held on the upper surface thereof. The first support part 52 fixes the outer body 21 so that the surface direction of the main surface of the dielectric resonator 22 of the measuring instrument 11 is along the upper surface of the base 31. For example, the first support portion 52 has a plurality of relief portions 52a such as openings and notches into which the outer shape irregularities and legs of the outer body 21 can be inserted on the upper surface thereof.

  As shown in FIGS. 4 and 6, the first support portion 52 is fixed to the first base 51 movably along the Z direction by a fixing member 52 b such as a bolt. The first support portion 52 includes first moving means 53 that can move in the Z direction with respect to the first base portion 51.

  As shown in FIGS. 4 to 6, the first moving means 53 is, for example, formed between the upper and lower main surfaces of the first support portion 52 provided at the four corners of the first support portion 52. 1 female screw part 53a and a second female screw part 53b formed from the side surface of the first support part 52 into the first female screw part 53a. The first moving means 53 includes a first fastening member 53c that is screwed with the first female screw portion 53a, and a second fastening member 53d that is screwed with the second female screw portion 53b.

  The first fastening member 53 c is formed so as to protrude from the lower surface of the first support portion 52. As the first fastening member 53c, for example, a so-called enamel set or a set screw called a set screw is used. As the second fastening member 53d, for example, a set screw is used similarly to the first fastening member 53c. The second fastening member 53d is formed to be able to fix the first fastening member 53c. The first fastening member 53c and the second fastening member 53d may be other screws such as bolts as long as the first fastening member 53c and the second fastening member 53d are configured so as to protrude from the lower surface of the first support portion 52 by a predetermined amount. It may also be a pin or the like.

  The first moving means 53 adjusts the length protruding from the lower surface of the first support portion 52 according to the length by which the first female screw portion 53a and the first fastening member 53c are screwed together. Thereby, the 1st moving means 53 can adjust the height position of the 1st support part 52 with respect to the 1st base 51, the levelness of an upper surface, etc. by moving the 1st support part 52 along a perpendicular direction. Is formed.

  As shown in FIGS. 7 and 8, the second holding member 42 includes a second base 61 provided on the base 31, and a second support provided so as to be movable in the Z direction with respect to the upper surface of the second base 61. 62, and a holding unit 63 that is provided so as to be movable in the Z direction with respect to the upper surface of the second support portion 62 and holds the measurement sample 100.

  As shown by a broken line in FIG. 7, the second base 61 has a rail groove 61 a that engages with the rail 31 a of the base 31 on the lower surface thereof. The 2nd base 61 is provided in the base 31 so that a movement along the rail 31a is possible because the rail groove 61a engages with the rail 31a. The second base 61 is formed in a hollow shape, for example, for weight reduction.

  For example, the second support portion 62 is formed in a square shape when viewed from above, and the holding unit 63 is fixed to the upper surface thereof. The second support portion 62 is fixed to the second base portion 61 movably along the Z direction by a fixing member 62a such as a bolt. Further, the second support portion 62 includes second moving means 64 that can move along the Z direction with respect to the second base portion 61.

  The second moving means 64 includes, for example, a third female screw portion 64a formed between the upper and lower main surfaces of the second support portion 62 provided at each of the four corners of the second support portion 62, and a second support portion. And a fourth female screw portion 64b formed from the side surface of 62 into the third female screw portion 64a. The second moving means 64 includes a third fastening member 64c that is screwed with the third female screw part 64a, and a fourth fastening member 64d that is screwed with the fourth female screw part 64b.

  The third fastening member 64 c is formed so as to protrude from the lower surface of the second support portion 62. As the third fastening member 64c, for example, a so-called enamel set or a set screw called a set screw is used. As the fourth fastening member 64d, for example, a set screw is used similarly to the third fastening member 64c. The fourth fastening member 64d is formed to be able to fix the third fastening member 64c. The first fastening member 53c and the second fastening member 53d may be other screws such as bolts as long as the first fastening member 53c and the second fastening member 53d are configured so as to protrude from the lower surface of the first support portion 52 by a predetermined amount. It may also be a pin or the like.

  The second moving means 64 adjusts the length protruding from the lower surface of the second support portion 62 according to the length of the third female screw portion 64a and the third fastening member 64c that are screwed together. Is moved along the vertical direction so that the height positions of the second support portion 62 and the holding unit 63 relative to the second base portion 61 and the horizontality of the upper surfaces thereof can be adjusted.

  The holding unit 63 includes a support 71 on which the measurement sample 100 is placed, a clamp 72 that holds the measurement sample 100 together with the support 71, and a third moving unit 73 that adjusts the support 71 in the height direction. It is equipped with. In addition, the holding unit 63 is provided on the support body 71, and is provided on the support body 71 along the rail 31 a and the second scale 74 disposed along the support body 71, and in a direction orthogonal to the second scale 74. And a third scale 75 arranged along.

  The support 71 is supported by the second support part 62 via the third moving means 73. The support 71 is disposed along the direction orthogonal to the rail 31a, in other words, the Y direction, and is formed in a rectangular plate shape having a predetermined length. Here, the predetermined length is a length capable of arranging a measurement sample to be measured.

  The clamp 72 is interposed between the support 71 and the main body 72a, a quadratic columnar main body 72a formed to have substantially the same length as the support 71, a fastening member 72b for fixing the main body 72a to the support 71. An urging member 72c and a guide member 72d for guiding the movement of the main body 72a in the Z direction are provided. The main body 72a is biased in a direction away from the support 71 by a biasing member 72c. Further, the main body 72a is fixed to the support 71 by a fastening member 72b, so that the main body 72a can be brought into contact with the opposing surface of the support 71 against the urging by the urging member 72c.

  The fastening member 72b is, for example, a bolt. The fastening members 72b are provided at two locations on both ends of the support 71 through the main body 72a. The biasing member 72c is, for example, a coil spring. Two urging members 72c are provided adjacent to the fastening member 72b. The guide member 72d is a guide pin that can reciprocate along one direction, and is composed of, for example, a piston and a cylinder. Two guide members 72d are provided adjacent to the fastening member 72b and the biasing member 72c.

  The 3rd moving means 73 is formed so that the support body 71 can be raised-lowered to a Z direction. That is, the third moving unit 73 is an adjusting unit that can adjust the height position of the support 71 with respect to the measuring instrument 11 by moving the support 71 in the vertical direction together with the second moving unit 64.

  The third moving unit 73 includes an operation unit 73 b having a micrometer 73 a and a fixing unit 73 c that fixes the position of the support 71. The third moving means 73 is formed such that the support body 71 can be moved up and down in the vertical direction by rotating the operation portion 73b, and the position of the support body 71 can be fixed by the fixing means 73c.

  The micrometer 73a is engraved with a scale of 10 μm, for example. The third moving means 73 is formed so that the support 71 can be moved up and down in units of 10 μm by checking the micrometer 73a and operating the operation portion 73b. The fixing means 73c is formed so that the height position of the support 71 can be fixed by operating. The fixing means 73c is constituted by a fastening member such as a bolt, for example, and the tip of the fixing means 73c abuts on the support 71, thereby restricting the movement of the support 71.

  The second scale 74 is provided along the outer edge of the support 71. The upper surface of the second scale 74 is disposed substantially flush with the upper surface of the support 71. The third scale 75 is provided so as to protrude outward from the outer edge of the support 71. The upper surface of the third scale 75 is disposed substantially flush with the upper surface of the support 71.

  The external force application means 43 is formed so as to hold the pair of second holding members 42 at predetermined positions and to apply an external force in a direction in which the pair of second holding members 42 are separated from each other. The external force applying means 43 is, for example, a ratchet belt. The external force application unit 43 includes a belt 43a, a ratchet portion 43b, and a plurality of support columns 43c that are provided on the base 31 and support the belt 43a. Such external force applying means 43 are provided on the pair of second holding members 42, respectively. Further, the support pillars 43c of the external force applying means 43 are provided in, for example, two places in a direction in which the pair of second holding members 42 are separated from each other and from the second holding member 42.

  The external force applying means 43 is an annular formed by the belt 43a by arranging the belt 43a so as to surround the support column 43c of the base 31 and the second base 61 of the second holding member 42 and operating the ratchet portion 43b. The second holding member 42 is held with a predetermined force by shortening the peripheral length of the second holding member 42.

  The detector 13 is electrically connected to a pair of dielectric resonators 22 via a signal line 23. The detector 13 is a network analyzer, for example.

  The processing device 14 is electrically connected to the detector 13 via a signal line 14a. The processing device 14 is, for example, a personal computer. The processing device 14 includes a display unit that can display the dielectric characteristics of the measurement sample 100 detected by the pair of dielectric resonators 22, a recording unit that records the dielectric characteristics, and the like.

Next, a method for measuring the dielectric properties of the measurement sample 100 using the measurement apparatus 1 including the measurement jig 12 configured as described above will be described below.
First, the measuring instrument 11 is fixed to the measuring jig 12. Specifically, the outer body 21 of the measuring instrument 11 is fixed to the first support portion 52 of the first holding member 41. Next, from the base 31 on the upper surface of the dielectric resonator 22 below the measuring instrument 11 fixed to the first holding member 41 and the upper surface of the support 71 of the pair of second holding members 42 by the indicator 33. Measure the height of each. In addition, by measuring the height from the base 31 at a plurality of locations on the upper surface of the dielectric resonator 22 and the upper surfaces of the pair of support bodies 71 by the indicator 33, the level of each upper surface, in other words, the base The parallelism of each upper surface with respect to 31 is measured.

  Next, the height of the upper surface of the dielectric resonator 22 and the height of the upper surface of the support 71 of the pair of second holding members 42 are the same, and each upper surface is parallel to the base 31. The first moving means 53 and the second moving means 64 are adjusted. These measurements and adjustments are repeated so that the upper surface of the dielectric resonator 22 and the upper surface of the support 71 of the pair of second holding members 42 are flush with each other.

  Next, the positions of the pair of second holding members 42 are separated from the first holding member 41 by substantially the same distance while checking the first scale 31b according to the length direction of the measurement sample 100 to be measured. In this way, the pair of second holding members 42 are moved along the rails 31a, respectively.

  Next, as shown in FIGS. 1 and 2, the measurement sample 100 is disposed on the upper surface of the dielectric resonator 22 and the upper surfaces of the pair of supports 71. At this time, the measurement sample 100 is arranged by the second scale 74 and the third scale 75 so as to be substantially symmetrical with respect to the center of the dielectric resonator 22.

  Next, by fastening the fastening member 72 b of the clamp 72, the main body 72 a is fixed in close contact with the support 71. Accordingly, the measurement sample 100 is sandwiched between the support 71 and the main body 72a and fixed to the second holding member 42. Next, by applying a predetermined external force to the second holding member 42 by the external force applying means 43, the pair of second holding members 42 are respectively set so that the measurement sample 100 becomes flat and a predetermined tension is obtained. It moves along the rail 31a in the direction away from each other. As a result, the measurement sample 100 is placed on the measurement jig 12 with a predetermined tension so that its main surface is parallel to the base 31.

  Next, the dielectric property of the measurement sample 100 is measured by the dielectric resonator 22, the value of the dielectric property is obtained by the detector 13, and predetermined processing such as display and storage is performed by the processing device 14.

  After the measurement sample 100 is measured, the fastening member 72b of the clamp 72 is loosened, and the measurement sample 100 is detached from the support 71 and the main body 72a. Next, the measurement sample 100 to be measured is disposed on the upper surface of the dielectric resonator 22 and the upper surfaces of the pair of supports 71. Thereafter, the dielectric characteristics of the plurality of measurement samples 100 are measured by repeating the same process.

  Further, a case where a plurality of measurement samples 100 are measured at a specific position in the gap between the pair of dielectric resonators 22, for example, at a predetermined distance from the upper surface of the lower dielectric resonator 22 will be described. To do. In this case, after fixing the measurement sample 100 to the holding unit 63, the operation units 73b of the pair of third moving means 73 are operated while checking the micrometer 73a. By this operation, the support bodies 71 of the pair of second holding members 42 are moved in the vertical direction by the same amount. Thereafter, the dielectric characteristics are similarly measured by the dielectric resonator 22. Note that the pair of supports 71 may be moved by the same amount before the measurement sample 100 is held by the holding unit 63.

(Evaluation test)
Next, an evaluation test of the measurement method of the measurement sample 100 using the measurement apparatus 1 as an example and the measurement method of the measurement sample 100 using only the measuring device 11 as a conventional technique will be described below as a comparative example. explain.

  In this evaluation test, a PTFE sheet having a film thickness of 106 μm was used as the measurement sample 100. In addition, the dielectric property of the measurement sample 100 is a literature value when “measurement method and evaluation result of each dynamic property of plastic material” is measured at 10 GHz in a 25 ° C. environment using a cavity resonator. In addition, the dielectric constant Dk = 2.1 and the dielectric loss tangent Df = 0.0002, and when measured at 100 to 10 GHz under the environment of 25 ° C. in the “Chemical Handbook”, Dk = 2.1, “Kanto Electronics Application Development In this example, Dk = 2.07 and Df = 0.0002 when measured at 1 GHz using a cavity resonator.

Moreover, the conditions of a present Example and a comparative example are as follows.
(Example)
Of the pair of dielectric resonators 22, the upper surface of the lower dielectric resonator 22 and the upper surface of the support 71 of the second holding member 42 are flush with each other, and the measurement sample 100 is in contact with the upper surface of the dielectric resonator 22. In the state, the dielectric properties are measured. Moreover, the measurement sample 100 was attached to and detached from the measurement jig 12 every time, and the dielectric characteristics of the same measurement sample 100 were measured six times. The temperature of the indoor space at this time was 23 ° C. and humidity 50%.

(Comparative example)
The measuring device 11 is placed on the work table as it is, and the dielectric characteristics are measured in a state where the measurement sample 100 is placed on the upper surface of the dielectric resonator 22 below. In addition, the measurement sample 100 was placed on and removed from the upper surface of the dielectric resonator 22 every time, and the dielectric characteristics of the same measurement sample 100 were measured six times. The temperature of the indoor space at this time was 23 ° C. and humidity 50%.

(Test results)
9 and 10 show the dielectric constant Dk measured in the example and the comparative example, and FIGS. 11 and 12 show the dielectric loss tangent Df measured in the example and the comparative example, respectively. In the drawings, the use of the jig is the measurement value measured in the example using the measurement jig 12, and the measurement value measured in the comparative example using only the measuring instrument 11 is that the jig is not used. It is.

  As shown in FIG. 9 to FIG. 10, as an example, the measurement result using the measurement jig 12 is that the maximum value of the dielectric constant Dk of the measurement sample 100 is 2.05297, the minimum value is 2.04522, and measured six times. The average value was 2.04910. Further, as shown in FIGS. 11 and 12, the maximum value of the dielectric loss tangent Df of the measurement sample 100 was 0.00026, the minimum value was 0.00020, and the average value measured six times was 0.00023.

  As shown in FIGS. 9 to 10, as a comparative example, the measured value measured only with the measuring instrument 11 without using the measuring jig 12 has a maximum value of 2.05943 and a minimum value of the dielectric constant Dk of the measurement sample 100. Was 1.95894, and the average value measured six times was 2.00091. Further, as shown in FIGS. 11 and 12, the maximum value of the dielectric loss tangent Df of the measurement sample 100 was 0.00028, the minimum value was 0.00012, and the average value measured six times was 0.00020.

  As described above, when the dielectric characteristic of the measurement sample 100 is measured by the measurement apparatus 1 using the measurement jig 12 as an example, the dielectric characteristic of the measurement sample 100 is measured using only the measuring instrument 11 which is a comparative example. Rather than this, there was less variation in the values of the dielectric properties of the measured samples.

  As is clear from these results, by using the measuring apparatus 1 including the measuring jig 12, the measurement position of the measurement sample 100 is made substantially the same, and the measurement state such as the shape of the measurement sample 100 at the time of measurement is changed. It becomes possible to make it substantially the same. As a result, by using the measuring apparatus 1, the measurement sample 100 can be measured with high reproducibility.

  According to the measurement apparatus 1 using the measurement jig 12 configured as described above, the measurement sample 100 is held by the second holding member 42, and thereafter, the measurement sample 100 is held at a predetermined tension by the external force applying means 43. By holding the second holding member 42 as possible, the state of the measurement sample 100 at the time of measurement can be made substantially the same. Thereby, the measuring apparatus 1 can measure the dielectric characteristics of the measurement sample 100 in which the main surface of the film-like or sheet-like measurement sample 100 is in a flat state.

  Further, the second holding member 42 can adjust the height position of the main surface of the support 71 on which the measurement sample 100 is arranged by the second moving unit 64 and the third moving unit 73. Similarly, the height position of the main surface below the pair of dielectric resonators 22 can be adjusted by the first moving means 53. Further, the position at which the measurement sample 100 is arranged on the second holding member 42 is guided by the second scale 74 and the third scale 75, whereby the position of the measurement sample 100 to be arranged can be adjusted.

  In other words, the measurement jig 12 can adjust the reference position for measuring the measurement sample 100. For this reason, the measurement position of the measurement sample 100 can be measured at substantially the same position. Accordingly, when measuring a plurality of measurement samples 100 or repeatedly measuring the same measurement sample 100, the flatness and tension of the measurement sample 100 and the height position at which the measurement sample 100 is measured are measured. It is possible to make the measurement conditions such as substantially the same.

  In other words, according to the measurement apparatus 1 using the measurement jig 12, the measurement conditions of the measurement sample 100 can be reproduced. For this reason, it becomes possible to measure the measurement sample 100 with high reproducibility, to prevent the measurement value of the measurement sample 100 from varying as much as possible, and to measure the dielectric characteristics with high accuracy. Become. As a result, the reliability of the measurement result of the measurement sample 100 can be improved.

  Further, the measurement jig 12 can adjust the height position of the support 71 for fixing the measurement sample 100 by a minute distance, in this embodiment, by 10 μm by operating the third moving means 73. For this reason, the measurement position of the measurement sample 100 is not only the state where the upper surface of the support 71 and the upper surface of the dielectric resonator 22 below the pair of dielectric resonators 22 are flush with each other, but also the pair of dielectric resonances. The dielectric property of the measurement sample 100 can be measured at an arbitrary position in the gap of the vessel 22. Further, by making the heights of the pair of supports 71 different from each other, it is possible to measure the dielectric characteristics in a state where the measurement sample 100 is inclined with respect to the horizontal direction, and it is possible to reproduce the measurement conditions. .

  As described above, according to the measuring apparatus 1 using the measuring jig 12 according to the present embodiment, the reproducibility of the measurement conditions and the measurement results can be achieved even when the film-like or sheet-like measurement sample 100 is used. It becomes possible to make it higher.

(Second Embodiment)
Next, a measuring apparatus 1A using a measuring jig 12A according to a second embodiment of the present invention will be described with reference to FIG.
FIG. 13 is a perspective view showing a configuration of a measuring apparatus 1A according to the second embodiment of the present invention. Note that, in the measurement apparatus 1A according to the second embodiment, the same components as those of the measurement apparatus 1 according to the first embodiment described above are denoted by the same reference numerals, and detailed description thereof is omitted.

  The measuring apparatus 1A includes a measuring instrument 11, a measuring jig 12A, a detector 13, and a processing apparatus 14 that measure the dielectric characteristics of the measurement sample 100.

  The measurement jig 12 </ b> A includes a rectangular plate-shaped base 31 </ b> A, a holding member 32 </ b> A that holds the measuring instrument 11 and the measurement sample 100, and an indicator 33. The base 31A is formed so that the holding member 32A can be fixed.

  The holding member 32 </ b> A includes a first holding member 41 </ b> A that holds the measuring instrument, and a second holding member 42 </ b> A that holds the measurement sample 100.

  The first holding member 41A includes a first base 51A provided on the base 31A.

  The first base portion 51 </ b> A includes a plurality of spacers 81 attached to the base 31 </ b> A and a plurality of fastening members 82 that fix the measuring instrument 11 to the base 31 </ b> A via the spacers 81. For example, the first base portion 51 </ b> A includes four spacers 81 and a fastening member 82.

  The spacer 81 is formed in a cylindrical shape, for example, and is formed so that a fastening member 82 can be inserted therein. Such a spacer 81 is a first support portion 52 that supports the measuring instrument 11. Moreover, the spacer 81 is the 1st moving means 53 which can adjust the height position and parallelism of the measuring instrument 11 by using suitably the spacer 81 from which length differs. The fastening member 82 is formed so as to be able to fix the measuring instrument 11 by being inserted through the outer member 21 and the spacer 81 of the measuring instrument 11 and screwed with a female screw portion formed on the base 31A.

  The first holding member 41 </ b> A is formed such that the height of the measuring instrument 11 and the parallelism of the upper surface of the dielectric resonator 22 below the measuring instrument 11 can be adjusted by changing the height of the spacer 81. ing.

  The second holding member 42A is provided on the second base 61A fixed to the base 31A, the second support 62A provided on the second base 61A, and the second support 62A, and holds the measurement sample 100. And a holding unit 63A movable in the Z direction.

  The holding unit 63A is fixed to the side surface of the second support portion 62A. The second support portion 62A includes second moving means (third moving means) 73 that can move along the Z direction together with the holding unit 63A. This 2nd moving means 73 is the structure similar to the 3rd moving means 73 in 1st Embodiment.

  The holding unit 63A includes a U-shaped support 71A on the top surface of the measurement sample 100 placed on its upper surface, and a clamp 72 that holds the measurement sample 100 together with the support 71A.

  The support 71A is fixed to the second support 62A and extends in the horizontal direction. The support 71 </ b> A is bifurcated at its ends, and both ends thereof are arranged at substantially symmetrical positions around the measuring instrument 11.

  The support 71A is provided with a clamp 72 at one end. The support 71A has a support plate 85 formed at the other end flush with the upper surface of the support 71A and movable with respect to the side surface of the other end, and the support plate 85 at one end. And an external force applying means 43A for applying an external force in a direction away from the portion. A clamp 72 is provided on the support plate 85.

  The external force applying means 43A is formed so as to hold the pair of second holding members 42A in a predetermined position and to be able to press the pair of second holding members 42A away from each other. The external force applying means 43A, for example, biases or pulls the support plate 85 in a direction away from the support 71A by a fastening member such as a spring and a bolt, so that the measurement sample 100 held on the support plate 85 and the support 71A. A predetermined tension is applied to.

  According to the measurement apparatus 1A including the measurement jig 12A configured as described above, the measurement sample 100 is attached to the support 71A and the support plate 85 by the clamp 72 in the same manner as the measurement jig 12 of the first embodiment described above. By fixing, it is possible to place the measurement sample 100 on the measurement jig 12A with a predetermined tension so that its main surface is substantially parallel to the base 31A. Thereby, 1 A of measuring devices can measure the dielectric property of the measurement sample 100 with the main surface of the film-like or sheet-like measurement sample 100 being flat.

  The second holding member 42 </ b> A can adjust the height positions of the support 71 </ b> A on which the measurement sample 100 is arranged and the support plate 85 by the second moving unit 73. Further, in order to adjust the height position of the support 71A, only the second moving means 73 may be provided, and the configuration of the measuring jig 12A can be simplified. Furthermore, the height position of the pair of dielectric resonators 22 can be adjusted by the first moving means 53A. As a result, the measurement sample 100 is measured under substantially the same measurement conditions such as the flatness and tension of the measurement sample 100, and the height positions of the upper surfaces of the support 71A, the support plate 85, and the dielectric resonator 22. It becomes possible to measure. As a result, according to the measurement apparatus 1A using the measurement jig 12A, it is possible to measure the measurement sample 100 with high reproducibility.

  Note that the second holding member 42A has a configuration in which the holding unit 63A is fixed to the second support portion 62A, thereby facilitating the reference adjustment when measuring the dielectric characteristics. That is, when the reference adjustment is performed, the dielectric resonator 22 with respect to the base 31A and the height position of one dielectric resonator 22, the support 71A and the support plate 85 of the measuring instrument 11, and the base 31A are measured by the indicator 33. The parallelism of the upper surfaces may be measured and adjusted by the first moving means 53A and the second moving means 73 so that the upper surfaces are flush with each other.

  As described above, according to the measurement apparatus 1A using the measurement jig 12A according to the present embodiment, the measurement conditions and the reproducibility of the measurement results can be achieved even when the film-like or sheet-like measurement sample 100 is used. It becomes possible to make it higher.

  The present invention is not limited to the above embodiment. For example, instead of the second holding member 42A of the measuring apparatus 1A according to the second embodiment as in the measuring apparatus 1B according to the third embodiment shown in FIG. A configuration in which the holding member 42A is provided and the second moving unit 73 moves the holding unit 63A in the Z direction may be employed. The support 71A of the holding unit 63A in this case may be configured in a U-shape that protrudes in the vertical direction. As shown in FIG. 14, the second holding member 42A may not have the second base portion 61A and the second support portion 62A, and the second moving means 73 may be arranged directly on the base 31A.

  Moreover, as shown in FIG. 14, the structure which provides the 1st support part 52A which supports the measuring device 11 between 51 A of 1st bases and the measuring device 11 may be sufficient. Further, without using the fastening member 82 shown in FIG. 13, an uneven portion that engages with a part of the outer shape of the outer body 21 of the measuring instrument 11 is provided on the upper surface of the spacer 81 to engage the spacer 81 and the outer body 21. By doing so, the structure which supports the measuring device 11 may be sufficient.

  Moreover, in the example mentioned above, although the structure which fixes the measuring device 11 to the 1st holding member 41 was demonstrated, when using multiple types of measuring devices 11 from which a frequency differs, for example, the 1st of the 1st holding member 41 is used. The support part 52 may be configured to select and replace the first support part 52 as appropriate according to the measuring instrument 11 that is provided in a plural number so that the measuring instruments 11 can be attached.

  In the above-described example, the configuration using the ratchet belt as the external force applying unit 43 and the configuration using the spring and the fastening member as the external force applying unit 43A have been described. However, the configuration is not limited thereto, and is provided in the second holding members 42 and 42A. Other configurations may be used as long as a predetermined tension can be applied to the measurement sample 100.

  Further, in the above-described example, the configuration in which the first scale 31b, the second scale 74, and the third scale 75 are provided in the measurement jig 12 has been described. However, the configuration is not limited thereto, and the measurement jig 100 is reproduced with respect to the measurement position. In the case where the property is not required, a configuration in which these scales 31b, 74, and 75 are not provided may be employed. When only the measurement sample 100 having the same shape is measured, the installation position of the measurement sample 100 and the arrangement of the second holding members 42 and 42A are changed to the first scale 31b, the second scale 74, and the third scale 75. The structure which provides the mark which guides a position may be sufficient. That is, each scale 31b, 74, 75 is a guide means for adjusting the position of the measurement sample 100. The guide means can guide the position of the measurement sample 100 and can reproduce the measurement conditions at the time of measurement. If there is, it can be set appropriately.

  In the above-described example, the measurement sample 100 is described as having a flexible film shape or sheet shape. However, the measurement sample 100 can be used as a rigid measurement sample 100. .

  In the above-described example, the configuration in which the third moving unit 73 is used as the adjusting unit that adjusts the position of the measurement sample 100 has been described. However, the configuration is not limited thereto. For example, as long as the position of the measurement sample 100 can be adjusted with respect to the measuring instrument 11, a configuration in which the position of the measurement sample 100 is adjusted by the second moving unit 64 may be used. Good.

  Furthermore, in the above-described example, the configuration in which the SPDR resonator is used for the measuring device 11 has been described, but the configuration is not limited thereto. As another example of the measuring instrument 11, FIG. 15 shows an example in which a SiPDR (Single Post Dielectric Resonators) resonator is used as the measuring instrument 11A of the measuring apparatus 1 according to the fourth embodiment.

  As shown in FIG. 15, the measuring instrument 11 </ b> A includes an outer body 21, one dielectric resonator 22 disposed in the outer body 21, and a gantry 21 </ b> A that faces the dielectric resonator 22 with a predetermined gap. And a signal line 23 electrically connected to the dielectric resonator 22. As shown in FIG. 3, the measuring instrument 11A is formed so that it can be placed by inserting the measurement sample 100 into the gap between the dielectric resonator 22 and the gantry 21A.

  The gantry 21A constitutes a part of the outer body 21, and forms a predetermined gap with the dielectric resonator 22. The gantry 21A is configured such that the dielectric resonator 22 and opposing surfaces facing each other are parallel to each other. The gap between the gantry 21 </ b> A and the dielectric resonator 22 is formed larger than the thickness of the measurement sample 100.

  Such a measuring instrument 11A is used in the same manner as the measuring instrument 11 used in the measuring devices 1 and 1A described above. Further, the measuring instruments 11 and 11A have the same configuration, that is, the measuring jig 12 as long as the measuring specimen 100 is a measuring instrument that measures each characteristic in a state where the measuring sample 100 is disposed between the predetermined gaps formed by the measuring instrument. , 12A enables measurement with high reproducibility. In addition, various modifications can be made without departing from the scope of the present invention.

  DESCRIPTION OF SYMBOLS 1, 1A, 1B ... Measuring apparatus, 11 ... Measuring instrument, 12, 12A ... Measuring jig, 13 ... Detector, 14 ... Processing apparatus, 14a ... Signal line, 21 ... Outer body, 22 ... Dielectric resonator, 23 Signal line 31, 31A ... Base, 31a ... Rail, 31b ... First scale, 32, 32A ... Holding member, 33 ... Indicator, 41, 41A ... First holding member, 42, 42A ... Second holding member, 43 43A, external force applying means, 43a, belt, 43b, ratchet portion, 43c, support column, 51, 51A, first base, 51a, rail groove, 52, 52A, first support portion (support portion), 52a, relief. , 52b ... fixing member, 53 ... first moving means, 53a ... first female threaded portion, 53A ... first moving means, 53b ... second female threaded portion, 53c ... first fastening member, 53d ... second fastening member, 61 61A ... second base, DESCRIPTION OF SYMBOLS 1a ... Rail groove, 62, 62A ... 2nd support part, 62a ... Fixing member, 63, 63A ... Holding unit, 64 ... 2nd moving means, 64a ... 3rd internal thread part, 64b ... 4th internal thread part, 64c ... 1st 3 fastening members, 64d ... 4th fastening member, 71 ... support, 71A ... support, 72 ... clamp, 72a ... main body, 72b ... fastening member, 72c ... biasing member, 72d ... guide member, 73 ... 3rd movement Means (adjusting means, second moving means), 73a ... micrometer, 73b ... operation part, 73c ... fixing means, 74 ... second scale, 75 ... third scale, 81 ... spacer, 82 ... fastening member, 85 ... support Plate, 100: measurement sample, Dk: dielectric constant, Df: dielectric loss tangent.

Claims (9)

A support for holding the SPDR resonator or the SiPDR resonator;
A holding unit for holding at least two parts of the measurement sample;
Adjusting means for adjusting the position of the measurement sample held by the holding unit;
A measuring jig comprising:   2. The measurement jig according to claim 1, wherein the adjustment unit is configured to be able to move the measurement sample held in the holding unit with respect to the SPDR resonator or the SiPDR resonator. .   The measuring jig according to claim 2, further comprising moving means capable of moving the support portion.   The measurement jig according to claim 1, wherein the holding unit includes a support that supports the measurement sample, and a clamping member clamp that clamps the measurement sample together with the support. The measurement sample has flexibility,
The measurement jig according to claim 1, further comprising an external force applying unit that applies tension to the measurement sample. A base on which the support part and the holding unit are provided;
A rail provided on the base and extending in one direction;
A first base that supports the support and the moving means, and has a rail groove that engages with the rail, and is formed to be movable along the rail;
The measurement according to claim 3, further comprising: a second base portion that supports the holding unit and has a rail groove that engages with the rail, and is formed to be movable along the rail. jig. The second base and the holding unit are provided in a pair with the support portion sandwiched between the base and the base.
The measurement jig according to claim 6, wherein the holding unit holds both ends of the measurement sample at two locations.   The measurement jig according to claim 1, further comprising guide means for guiding the arrangement of the measurement sample. A measuring jig according to any one of claims 1 to 8,
The SPDR resonator or the SiPDR resonator;
A measuring apparatus comprising: