JP2016103569A - Mounting structure of semiconductor element - Google Patents

Mounting structure of semiconductor element Download PDF

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JP2016103569A
JP2016103569A JP2014241203A JP2014241203A JP2016103569A JP 2016103569 A JP2016103569 A JP 2016103569A JP 2014241203 A JP2014241203 A JP 2014241203A JP 2014241203 A JP2014241203 A JP 2014241203A JP 2016103569 A JP2016103569 A JP 2016103569A
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semiconductor element
wiring board
mounting structure
heat sink
bonded
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隆文 大吉
Takafumi Oyoshi
隆文 大吉
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Kyocera Circuit Solutions Inc
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Kyocera Circuit Solutions Inc
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73201—Location after the connecting process on the same surface
    • H01L2224/73203—Bump and layer connectors
    • H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector

Abstract

PROBLEM TO BE SOLVED: To provide a mounting structure of a semiconductor element capable of allowing the semiconductor element to stably operate.SOLUTION: A mounting structure A of a semiconductor element, includes: a wiring board 1 which has a rectangular plate-like shape; a semiconductor element S which is mounted in a manner of flip-chip bonding in a central area of the upper plane of the wiring board 1; and a heat radiation plate 2 which has a heat radiation plate body 2a having a rectangular plate-like shape covering the semiconductor element S and a projection 2b which protrudes from the bottom outer periphery part of the heat radiation plate body 2a and is bonded to an upper plane outer periphery part of the wiring board 1. The wiring board 1 and the heat radiation plate 2 are bonded to each other in a part excluding corners of the upper plane of the wiring board 1.SELECTED DRAWING: Figure 1

Description

本発明は、半導体素子の実装構造に関するものである。   The present invention relates to a semiconductor element mounting structure.

近年、コンピューターやゲーム機等に代表される電子機器の高機能化が進む中で、それらに使用される半導体素子は、同時に多量の演算処理を行うようになってきている。そのため、半導体素子が作動時に発生する熱量も多くなっている。半導体素子の温度が高くなりすぎると、半導体素子を安定して作動させることができなくなる。したがって、半導体素子の実装構造においては、半導体素子が作動時に発生する熱を外部に効率良く放熱する必要がある。   In recent years, as electronic devices typified by computers and game machines have become highly functional, semiconductor elements used for them have been subjected to a large amount of arithmetic processing at the same time. For this reason, the amount of heat generated when the semiconductor element operates is also increased. If the temperature of the semiconductor element becomes too high, the semiconductor element cannot be stably operated. Therefore, in the mounting structure of a semiconductor element, it is necessary to efficiently dissipate heat generated when the semiconductor element is operated to the outside.

図２（ａ）および（ｂ）に、このような発熱量の多い半導体素子が実装される従来の半導体素子の実装構造Ｂを示す。実装構造Ｂは、配線基板２１と、半導体素子Ｓと、放熱板２２とを備えている。   2A and 2B show a conventional semiconductor element mounting structure B on which such a semiconductor element with a large amount of heat generation is mounted. The mounting structure B includes a wiring board 21, a semiconductor element S, and a heat sink 22.

配線基板２１は、四角平板状であり、絶縁基板２３および配線導体２４およびソルダーレジスト層２５から成る。
絶縁基板２３には、その上面から下面にかけて貫通する複数のスルーホール２６が形成されている。そして絶縁基板２３の上下面およびスルーホール２６内には、配線導体２４が被着されている。
さらに、絶縁基板２３および配線導体２４の上面には、ソルダーレジスト層２５が形成されている。上側のソルダーレジスト層２５は、配線導体２４の一部を半導体素子接続パッド２７として露出する第１開口部２５ａを有している。また、下側のソルダーレジスト層２５は、配線導体２４の一部を外部接続パッド２８として露出する第２開口部２５ｂを有している。
配線基板２１は、樹脂系の絶縁材料から成り、その熱膨張係数は、およそ１５ｐｐｍ／℃程度である。 The wiring substrate 21 has a rectangular flat plate shape, and includes an insulating substrate 23, a wiring conductor 24, and a solder resist layer 25.
The insulating substrate 23 is formed with a plurality of through holes 26 penetrating from the upper surface to the lower surface. A wiring conductor 24 is deposited on the upper and lower surfaces of the insulating substrate 23 and in the through hole 26.
Further, a solder resist layer 25 is formed on the upper surfaces of the insulating substrate 23 and the wiring conductor 24. The upper solder resist layer 25 has a first opening 25 a that exposes a part of the wiring conductor 24 as a semiconductor element connection pad 27. Further, the lower solder resist layer 25 has a second opening 25 b that exposes a part of the wiring conductor 24 as the external connection pad 28.
The wiring board 21 is made of a resin-based insulating material and has a thermal expansion coefficient of about 15 ppm / ° C.

半導体素子Ｓは、配線基板２１の上に半田を介してフリップチップ接続されている。
半導体素子Ｓと配線基板２１との間は、絶縁性の熱硬化性樹脂Ｒで充填されている。
半導体素子Ｓは、シリコンから成り、その熱膨張係数は、およそ３ｐｐｍ／℃程度である。 The semiconductor element S is flip-chip connected to the wiring substrate 21 via solder.
A space between the semiconductor element S and the wiring substrate 21 is filled with an insulating thermosetting resin R.
The semiconductor element S is made of silicon, and its thermal expansion coefficient is about 3 ppm / ° C.

放熱板２２は、四角平板状の放熱板本体２２ａと、放熱板本体２２ａの下面外周部に形成された四角枠状の突出部２２ｂとを有している。放熱板本体２２ａの下面と半導体素子Ｓの上面とは、熱伝導性のグリース（不図示）により熱的に接続されている。そして、突出部２２ｂの下面の全面が配線基板２１の上面外周部に接着されている。半導体素子Ｓが作動時に発生する熱は、主としてこの放熱板２２を介して外部に放熱される。
放熱板２２は、銅からなり、その熱膨張係数は、およそ１７ｐｐｍ／℃程度である。 The heat radiating plate 22 includes a square flat plate-shaped heat radiating plate main body 22a and a square frame-shaped protruding portion 22b formed on the outer peripheral portion of the lower surface of the heat radiating plate main body 22a. The lower surface of the heat sink main body 22a and the upper surface of the semiconductor element S are thermally connected by thermally conductive grease (not shown). The entire lower surface of the protrusion 22 b is bonded to the outer periphery of the upper surface of the wiring substrate 21. Heat generated when the semiconductor element S is operated is radiated to the outside mainly through the heat radiating plate 22.
The heat radiating plate 22 is made of copper and has a thermal expansion coefficient of about 17 ppm / ° C.

ところで、上述のように半導体素子Ｓの高機能化が進み演算の処理量が増えてくると、半導体素子Ｓから生じる熱量も増加してくる。そのため、半導体素子Ｓが作動するときの熱履歴により、それぞれ熱膨張係数が異なる配線基板２１と、半導体素子Ｓと、放熱板２２との間に大きな熱伸縮差が生じるようになる。特に、熱膨張係数が大きい放熱板本体２２ａにおける角部では熱伸縮量が非常に大きくなる。そして、この角部が熱伸縮するときの応力が、配線基板２１の角部を介して半導体素子Ｓ角部付近の電極と半導体素子接続パッド２７との接合部に集中して作用する。その結果、両者の接合部にクラックが発生してしまい、半導体素子Ｓを安定的に作動させることができない場合がある。   By the way, as the function of the semiconductor element S increases as described above and the amount of processing increases, the amount of heat generated from the semiconductor element S also increases. Therefore, a large thermal expansion / contraction difference occurs between the wiring board 21, the semiconductor element S, and the heat radiating plate 22 having different thermal expansion coefficients due to the thermal history when the semiconductor element S operates. In particular, the amount of thermal expansion and contraction is very large at the corners of the heat sink main body 22a having a large thermal expansion coefficient. The stress when the corner portion is thermally expanded and contracted acts on the junction portion between the electrode near the semiconductor element S corner and the semiconductor element connection pad 27 via the corner portion of the wiring substrate 21. As a result, a crack occurs at the joint between the two, and the semiconductor element S may not be stably operated.

特許第３１８９２７０号公報Japanese Patent No. 3189270

本発明は、半導体素子角部付近の電極と半導体素子接続パッドとの接合部に作用する熱応力を低減することで両者の間にクラックが発生することを抑制する。これにより、半導体素子を安定的に作動させることが可能な半導体素子の実装構造を提供することを課題とする。   The present invention reduces the occurrence of cracks between the two by reducing the thermal stress acting on the junction between the electrode near the corner of the semiconductor element and the semiconductor element connection pad. Accordingly, it is an object to provide a semiconductor element mounting structure capable of stably operating a semiconductor element.

本発明の半導体素子の実装構造は、四角平板状の配線基板と、配線基板の上面中央部にフリップチップ接続により搭載された半導体素子と、半導体素子上を覆う四角平板状の放熱板本体および放熱板本体の下面外周部から突出して配線基板の上面外周部に接着された突出部を有する放熱板と、を具備して成る半導体素子の実装構造であって、配線基板と放熱板とは、配線基板の上面角部を除く部位で接着されていることを特徴とするものである。   The semiconductor element mounting structure of the present invention includes a rectangular flat plate-like wiring board, a semiconductor element mounted by flip chip connection at the center of the upper surface of the wiring board, a square flat plate-like heat sink body covering the semiconductor element, and heat dissipation A heat sink having a protrusion protruding from the outer periphery of the lower surface of the board body and having a protrusion bonded to the outer periphery of the upper surface of the wiring board. It is characterized by being bonded at a portion excluding the upper surface corner of the substrate.

本発明の半導体素子の実装構造によれば、放熱板と配線基板とは、放熱板本体の下面に形成された突出部を介して配線基板の上面角部を除く部位で接着されている。
このため、放熱板本体の角部における熱伸縮時の応力が、配線基板の上面角部を介して半導体素子角部付近の電極と半導体素子接続パッドとの接合部に集中して作用することを抑制できる。その結果、両者の接合部に生じるクラックを低減して半導体素子を安定的に作動させることが可能な半導体素子の実装構造を提供することができる。 According to the semiconductor element mounting structure of the present invention, the heat radiating plate and the wiring board are bonded to each other at the portion excluding the upper surface corner of the wiring board via the protrusion formed on the lower surface of the heat radiating plate main body.
For this reason, the stress at the time of thermal expansion / contraction at the corner of the heat sink main body is concentrated on the junction between the electrode near the semiconductor element corner and the semiconductor element connection pad via the upper surface corner of the wiring board. Can be suppressed. As a result, it is possible to provide a semiconductor element mounting structure capable of reducing the number of cracks generated at the joint between the two and stably operating the semiconductor element.

図１（ａ）および（ｂ）は、本発明の半導体素子の実装構造の実施形態の一例を示す概略断面図および概略上面図である。1A and 1B are a schematic cross-sectional view and a schematic top view showing an example of an embodiment of a semiconductor element mounting structure of the present invention. 図２（ａ）および（ｂ）は、従来の半導体素子の実装構造の実施形態の一例を示す概略断面図および概略上面図である。2A and 2B are a schematic cross-sectional view and a schematic top view illustrating an example of an embodiment of a conventional semiconductor element mounting structure.

次に、本発明における半導体素子の実装構造の一例を、図１（ａ）および（ｂ）を基に説明する。
実装構造Ａは、配線基板１と、半導体素子Ｓと、放熱板２とを備えている。 Next, an example of a semiconductor element mounting structure according to the present invention will be described with reference to FIGS.
The mounting structure A includes a wiring board 1, a semiconductor element S, and a heat sink 2.

配線基板１は、四角平板状であり、絶縁基板３および配線導体４およびソルダーレジスト層５から成る。
絶縁基板３は、例えばエポキシ樹脂やビスマレイミドトリアジン樹脂等の熱硬化性樹脂をガラスクロスに含浸させて、圧力下で熱硬化された電気絶縁材料から成る。
そして、その上面から下面にかけて貫通する複数のスルーホール６が形成されている。スルーホール６は、ドリル加工やブラスト加工、あるいはレーザー加工により形成される。
また、絶縁基板３の上下面およびスルーホール６内には、配線導体４が被着されている。配線導体４は、例えば周知のセミアディティブ法により、銅等の良導電性金属から成る。
さらに、絶縁基板３の上下面および配線導体４の表面には、ソルダーレジスト層５が形成されている。上側のソルダーレジスト層５は、配線導体４の一部を半導体素子接続パッド７として露出する第１開口部５ａを有している。また、下側のソルダーレジスト層５は、配線導体４の一部を外部接続パッド８として露出する第２開口部５ｂを有している。
ソルダーレジスト層５は、例えばエポキシ樹脂やポリイミド樹脂等の熱硬化性樹脂を含有する樹脂ペーストまたはフィルムを絶縁基板３の上に塗布または貼着して熱硬化させた電気絶縁材料から成る。
配線基板１の熱膨張係数は、およそ１５ｐｐｍ／℃程度である。 The wiring substrate 1 has a rectangular flat plate shape, and includes an insulating substrate 3, a wiring conductor 4, and a solder resist layer 5.
The insulating substrate 3 is made of an electrically insulating material obtained by impregnating a glass cloth with a thermosetting resin such as an epoxy resin or a bismaleimide triazine resin and thermosetting under pressure.
A plurality of through holes 6 penetrating from the upper surface to the lower surface are formed. The through hole 6 is formed by drilling, blasting, or laser processing.
A wiring conductor 4 is deposited on the upper and lower surfaces of the insulating substrate 3 and in the through hole 6. The wiring conductor 4 is made of a highly conductive metal such as copper by a known semi-additive method, for example.
Further, solder resist layers 5 are formed on the upper and lower surfaces of the insulating substrate 3 and the surface of the wiring conductor 4. The upper solder resist layer 5 has a first opening 5 a that exposes a part of the wiring conductor 4 as a semiconductor element connection pad 7. The lower solder resist layer 5 has a second opening 5 b that exposes a part of the wiring conductor 4 as the external connection pad 8.
The solder resist layer 5 is made of an electrically insulating material obtained by applying or pasting a resin paste or film containing a thermosetting resin such as an epoxy resin or a polyimide resin on the insulating substrate 3 and thermosetting it.
The thermal expansion coefficient of the wiring board 1 is about 15 ppm / ° C.

半導体素子Ｓは、例えば演算処理用途に用いられ、周知のフリップチップ接続により配線基板１の上側に、それぞれが対応する半導体素子Ｓの電極と半導体素子接続パッド７とが半田を介して接続される。
そして、半導体素子Ｓと配線基板１との間の隙間を絶縁性の樹脂Ｒで封止することで、半導体素子Ｓの電極と半導体素子接続パッド７との接続部を外部環境から保護している。
半導体素子Ｓの熱膨張係数は、およそ３ｐｐｍ／℃程度である。 The semiconductor element S is used for arithmetic processing, for example, and the electrodes of the corresponding semiconductor element S and the semiconductor element connection pads 7 are connected to the upper side of the wiring board 1 via solder by well-known flip chip connection. .
Then, the gap between the semiconductor element S and the wiring substrate 1 is sealed with an insulating resin R, so that the connection portion between the electrode of the semiconductor element S and the semiconductor element connection pad 7 is protected from the external environment. .
The thermal expansion coefficient of the semiconductor element S is about 3 ppm / ° C.

放熱板２は、四角平板状の放熱板本体２ａと、放熱板本体２ａの下面外周部に形成された突出部２ｂとから成り、例えば銅等の熱伝導性に優れた金属から成る。そして、放熱板本体２ａが半導体素子Ｓ上を覆うように配置されて半導体素子Ｓから生じる熱を、外部に効率よく放出する機能を有している。なお、半導体素子Ｓと放熱板本体２ａとは、熱伝導性のグリース（不図示）を介して熱的に接続されている。
また、突出部２ｂは、配線基板１の角部を除く上面外周部に接着されている。これにより、半導体素子の実装構造Ａが形成される。
放熱板２の熱膨張係数は、およそ１７ｐｐｍ／℃程度である。 The heat radiating plate 2 includes a rectangular flat plate-shaped heat radiating plate main body 2a and a protruding portion 2b formed on the outer peripheral portion of the lower surface of the heat radiating plate main body 2a, and is made of a metal having excellent thermal conductivity such as copper. And the heat sink main body 2a is arrange | positioned so that the semiconductor element S may be covered, and it has a function which discharge | releases the heat | fever which arises from the semiconductor element S efficiently to the exterior. The semiconductor element S and the heat sink main body 2a are thermally connected via thermally conductive grease (not shown).
Further, the protruding portion 2 b is bonded to the outer peripheral portion of the upper surface excluding the corner portion of the wiring board 1. As a result, a semiconductor element mounting structure A is formed.
The thermal expansion coefficient of the heat sink 2 is about 17 ppm / ° C.

そして、上述のような半導体素子の実装構造Ａの外部接続パッド８と、外部の電気回路基板の配線導体とを半田を介して接続することにより、半導体素子Ｓが外部の電気回路基板に電気的に接続されて作動する。   The semiconductor element S is electrically connected to the external electric circuit board by connecting the external connection pads 8 of the semiconductor element mounting structure A as described above and the wiring conductor of the external electric circuit board via solder. Connected to and operates.

ところで、本発明の半導体素子の実装構造Ａによれば、半導体素子Ｓ上を覆う四角平板状の放熱板本体２ａの下面に形成された突出部２ｂが、配線基板１の角部を除く上面外周部に接着されている。
このため、放熱板本体２ａが熱伸縮するときの応力が、配線基板１の上面角部を介して半導体素子Ｓ角部付近の電極と半導体素子接続パッド７との接合部に集中して作用することを抑制できる。その結果、両者の接合部に生じるクラックを低減して半導体素子を安定的に作動させることが可能な半導体素子の実装構造を提供することができる。 By the way, according to the semiconductor element mounting structure A of the present invention, the protrusion 2b formed on the lower surface of the square plate-like heat sink main body 2a covering the semiconductor element S has the upper surface outer periphery excluding the corner of the wiring board 1. Bonded to the part.
For this reason, the stress when the heat sink main body 2a thermally expands and contracts acts on the junction between the electrode near the semiconductor element S and the semiconductor element connection pad 7 via the upper surface corner of the wiring board 1. This can be suppressed. As a result, it is possible to provide a semiconductor element mounting structure capable of reducing the number of cracks generated at the joint between the two and stably operating the semiconductor element.

なお、本発明は上述の実施形態の一例に限定されるものではなく、本発明の要旨を逸脱しない範囲であれば種々の変更は可能である。例えば、上述の実施形態の一例では、絶縁基板３は単層構造であるが、同一または異なる電気絶縁材料から成る複数の絶縁層を絶縁基板３表面に多層に積層した多層構造であってもよい。
In addition, this invention is not limited to an example of above-mentioned embodiment, A various change is possible if it is a range which does not deviate from the summary of this invention. For example, in the example of the above-described embodiment, the insulating substrate 3 has a single-layer structure, but may have a multilayer structure in which a plurality of insulating layers made of the same or different electrical insulating materials are stacked on the surface of the insulating substrate 3. .

１ 配線基板
２ 放熱板
２ａ 放熱板本体
２ｂ 突出部
Ｓ 半導体素子 DESCRIPTION OF SYMBOLS 1 Wiring board 2 Heat sink 2a Heat sink main body 2b Protrusion part S Semiconductor element

Claims (1)

四角平板状の配線基板と、該配線基板の上面中央部にフリップチップ接続により搭載された半導体素子と、該半導体素子上を覆う四角平板状の放熱板本体および該放熱板本体の下面外周部から突出して前記配線基板の上面外周部に接着された突出部を有する放熱板と、を具備して成る半導体素子の実装構造であって、前記配線基板と前記放熱板とは、前記配線基板の上面角部を除く部位で接着されていることを特徴とする半導体素子の実装構造。   From a square plate-like wiring board, a semiconductor element mounted on the center of the upper surface of the wiring board by flip-chip connection, a square plate-like heat sink body covering the semiconductor element, and a lower surface outer periphery of the heat sink board body And a heat sink having a protrusion that protrudes and is bonded to the outer periphery of the upper surface of the wiring board, wherein the wiring board and the heat sink are formed on the upper surface of the wiring board. A semiconductor element mounting structure, wherein the semiconductor element is bonded at a portion excluding a corner portion.
JP2014241203A 2014-11-28 2014-11-28 Mounting structure of semiconductor element Pending JP2016103569A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018006724A (en) * 2016-06-23 2018-01-11 京セラ株式会社 Wiring board

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JPH0334445A (en) * 1989-06-30 1991-02-14 Hitachi Ltd Semiconductor integrated circuit device and structure for sealing it
JP2001127219A (en) * 1999-10-29 2001-05-11 Kyocera Corp Package for housing semiconductor element

Patent Citations (2)

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Publication number Priority date Publication date Assignee Title
JPH0334445A (en) * 1989-06-30 1991-02-14 Hitachi Ltd Semiconductor integrated circuit device and structure for sealing it
JP2001127219A (en) * 1999-10-29 2001-05-11 Kyocera Corp Package for housing semiconductor element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018006724A (en) * 2016-06-23 2018-01-11 京セラ株式会社 Wiring board

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