JP2016100531A - Table device, positioning device, flat panel display manufacturing apparatus, and precision machine - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a table device which inhibits insufficient positioning accuracy.SOLUTION: A table device includes: a table; a base member having an upper surface facing a lower surface of the table; and a support device which supports the table so that the lower surface of the table faces the upper surface of the base member forming a gap therebetween. The support device includes a table guide bearing which guides the table in a vertical direction so that the lower surface of the table and the upper surface of the base member contact with each other when a vertical load, which is equivalent to or larger than a predetermined value, acts on the table.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a table device, a positioning device, a flat panel display manufacturing device, and a precision machine.

  In a device manufacturing process or a device measuring process, a positioning apparatus that determines the position of a workpiece is used. The positioning device includes a table device having a table that is movable while supporting a workpiece. For example, in a flat panel display manufacturing process, a process of bonding two substrates is performed. One substrate is supported on the table. The two substrates are bonded together by pressing the other substrate against the one substrate supported by the table from above. The two substrates are bonded together in a relatively positioned state. Patent Document 1 discloses an example of a technique for bonding two substrates in a manufacturing process of a liquid crystal panel display which is a kind of flat panel display.

JP 2002-131762 A

  When the other substrate is pressed against one substrate and a vertical load is applied to the table, if the positioning accuracy of the table is insufficient, the performance of the manufactured device may be degraded.

  An object of an aspect of the present invention is to provide a table device, a positioning device, a flat panel display manufacturing device, and a precision machine that can suppress a shortage of positioning accuracy.

  According to the first aspect of the present invention, the table, a base member having an upper surface facing the lower surface of the table, and the table so that the lower surface of the table and the upper surface of the base member are opposed to each other through a gap. A support device that supports the vertical member such that when a vertical load of a predetermined value or more acts on the table, the lower surface of the table and the upper surface of the base member come into contact with each other. A table device is provided having a table guide bearing for guiding the table in a direction.

  According to the first aspect of the present invention, the table guide bearing allows the displacement of the table in the vertical direction. When a vertical load of a predetermined value or more is applied to the table, the table is guided by the table guide bearing and moves downward, and is supported on the upper surface of the base member. The table can be moved straight downward by a table guide bearing. Even if the table is thermally deformed, the heat deformation of the table is absorbed by the table guide bearing. For this reason, even when a load in the vertical direction acts on the table, deficiency in positioning accuracy of the table is suppressed.

  In the first aspect of the present invention, the table includes a rod-shaped first slide member guided by the table guide bearing, and the support device includes the table guide bearing around the first slide member. You may have a supporting member which supports the said table guide bearing so that it may be arrange | positioned.

  Thereby, the table is guided to the table guide bearing via the first slide member.

  In the first aspect of the present invention, a plurality of the first slide members are provided on the upper surface of the table, and a plurality of the table guide bearings are provided so as to be arranged around each of the plurality of the first slide members. May be.

  Accordingly, the table is guided to the table guide bearing via the plurality of first slide members.

  The 1st aspect of this invention WHEREIN: You may provide the movement system which has an actuator which can move the said supporting member within a horizontal surface.

  Thereby, the table can move in a horizontal plane together with the support member.

  In the first aspect of the present invention, the support device further includes a frame member that is disposed around the table and has an upper surface to which the support member is connected, and a stage that is disposed around the base member. And a first linear bearing connected to a lower surface of the frame member, and a first linear bearing disposed on the upper surface of the stage and guiding the first linear bearing in a direction parallel to a first axis in a horizontal plane. A first guide member; a second linear bearing connected to the lower surface of the stage; a second guide member for guiding the second linear bearing in a direction parallel to a second axis in a horizontal plane perpendicular to the first axis; A first actuator for generating power for moving the first linear bearing in a direction parallel to the first axis, and the second linear in a direction parallel to the second axis. A second actuator that generates power for moving the bearing may have.

  Thereby, the table can move in two directions in the horizontal plane.

  In the first aspect of the present invention, the moving system includes a third guide member connected to the first support member among the plurality of support members, and the third guide in a direction parallel to the second axis in a horizontal plane. A third linear bearing guided by the member; a fourth guide member connected to the second support member among the plurality of support members; and a direction parallel to the first axis in a horizontal plane perpendicular to the second axis. A first actuator that generates power for moving the first support member in a direction parallel to the first axis by moving the fourth linear bearing guided by the fourth guide member and the third linear bearing. And a second actuator that moves the fourth linear bearing to generate power for moving the second support member in a direction parallel to the second axis.

  Thereby, the table can move in two directions in the horizontal plane.

  In the first aspect of the present invention, a plurality of one or both of the first actuator and the second actuator are provided, and the movement system includes a plurality of operating amounts of the first actuators or a plurality of the second actuators. The table may be moved in a rotational direction about an axis parallel to the third axis orthogonal to the horizontal plane by changing the operation amount.

  As a result, the table can move in three directions: a direction parallel to the first axis, a direction parallel to the second axis, and a rotation direction.

  In the first aspect of the present invention, at least the table and the table guide bearing may be disposed in an internal space of the chamber apparatus, and the actuator may be disposed in an external space of the chamber apparatus.

  Thereby, size reduction of a chamber apparatus is achieved. Since the actuator is disposed in the external space of the chamber device, even if heat is generated from the actuator, the influence of the heat on the table is suppressed.

  In the first aspect of the present invention, the base member is disposed between the lower surface of the table and the upper surface of the base member, and the lower surface of the table and the upper surface of the base member face each other with a gap therebetween. A plane guide device for guiding the table in a horizontal direction parallel to the upper surface of the plate may be provided.

  Thereby, the table can move smoothly in the horizontal direction.

  1st aspect of this invention WHEREIN: The said plane guide apparatus has a rod-shaped 2nd slide member, is supported by the said table, and supports the said 2nd slide member so that a movement is possible in a perpendicular direction. You may prepare.

  Thus, when the table moves downward so that the lower surface of the table and the upper surface of the base member are in contact with the upper surface of the base member while the plain guide bearing is in contact with the upper surface of the base member, the plain guide device is Relative movement is possible.

  In the first aspect of the present invention, a drive element that moves the plane guide device in a vertical direction may be provided.

  Thereby, the load of the vertical direction which acts on a plane guide apparatus is adjusted. For example, it is possible to prevent an excessive load from acting on the plane guide device.

  According to a second aspect of the present invention, there is provided a positioning apparatus that includes the table device of the first aspect and determines the position of a work supported by the table of the table device.

  According to the 2nd aspect of this invention, the shortage of the positioning accuracy of the workpiece | work supported by the table is suppressed.

  According to the 3rd aspect of this invention, a flat panel display manufacturing apparatus provided with the table apparatus of a 1st aspect and the process part which processes the workpiece | work supported by the said table is provided.

  According to the 3rd aspect of this invention, since the flat panel display manufacturing apparatus can process the workpiece | work positioned by the table, it is suppressed that a defective product is manufactured from the workpiece | work. The flat panel display manufacturing apparatus includes, for example, a bonding apparatus that bonds two substrates, and is used in at least a part of the flat panel display manufacturing process. The flat panel display includes at least one of a liquid crystal display, a plasma display, and an organic EL display.

  According to a fourth aspect of the present invention, there is provided a precision machine comprising the table device of the first aspect and a processing unit for processing a work supported by the table.

  According to the fourth aspect of the present invention, since the precision machine can process the workpiece positioned by the table, it is possible to suppress a defective product from being manufactured from the workpiece. The precision machine includes, for example, one or both of a precision measuring machine and a precision processing machine. Since the precision measuring machine can measure the workpiece positioned by the table, the workpiece can be measured accurately. Since the precision processing machine can process the workpiece positioned by the table, the workpiece can be processed precisely.

  According to the aspects of the present invention, there are provided a table device, a positioning device, a flat panel display manufacturing device, and a precision machine that can suppress a shortage of positioning accuracy.

FIG. 1 is a plan view showing an example of a table device according to the first embodiment. FIG. 2 is a side view showing an example of the table device according to the first embodiment. FIG. 3 is a side sectional view showing an example of the table device according to the first embodiment. FIG. 4 is a diagram illustrating a part of the table device according to the first embodiment. FIG. 5 is a plan view showing an example of a table device according to the second embodiment. FIG. 6 is a side sectional view showing an example of a table device according to the second embodiment. FIG. 7 is a plan view showing an example of a table device according to the third embodiment. FIG. 8 is a plan view showing an example of a table device according to the fourth embodiment. FIG. 9 is a side sectional view showing an example of a table device according to the fourth embodiment. FIG. 10 is a plan view showing an example of a table device according to the fifth embodiment. FIG. 11 is a side sectional view showing an example of a table device according to the fifth embodiment. FIG. 12 is a diagram illustrating a part of the table device according to the fifth embodiment. FIG. 13 is a plan view showing an example of a table device according to the sixth embodiment. FIG. 14 is a side sectional view showing an example of a table device according to the sixth embodiment. FIG. 15 is a diagram illustrating a part of the table device according to the sixth embodiment. FIG. 16 is a side sectional view showing an example of a table device according to the sixth embodiment. FIG. 17 is a side sectional view showing an example of a table device according to the sixth embodiment. FIG. 18 is a diagram illustrating an example of a flat panel display manufacturing apparatus according to the seventh embodiment. FIG. 19 is a diagram illustrating an example of a precision machine according to the eighth embodiment. FIG. 20 is a diagram illustrating an example of a precision machine according to the ninth embodiment.

  Hereinafter, embodiments according to the present invention will be described with reference to the drawings, but the present invention is not limited thereto. The components of each embodiment described below can be combined as appropriate. Some components may not be used.

  In the following description, an XYZ orthogonal coordinate system is set, and the positional relationship of each part will be described with reference to this XYZ orthogonal coordinate system. A direction parallel to the first axis in the predetermined plane is defined as an X-axis direction. A direction parallel to the second axis perpendicular to the first axis in the predetermined plane is defined as a Y-axis direction. A direction parallel to the third axis perpendicular to the predetermined plane is taken as a Z-axis direction. A rotation (tilt) direction around the X axis (first axis) is defined as a θX direction. A rotation (tilt) direction around the Y axis (second axis) is defined as a θY direction. A rotation (tilt) direction around the Z axis (third axis) is defined as a θZ direction. The predetermined plane includes an XY plane. In the present embodiment, the predetermined plane and the horizontal plane are parallel. The Z-axis direction is the vertical direction. The X axis is orthogonal to the YZ plane. The Y axis is orthogonal to the XZ plane. The Z axis is orthogonal to the XY plane. The XY plane includes an X axis and a Y axis. The XZ plane includes an X axis and a Z axis. The YZ plane includes a Y axis and a Z axis.

<First Embodiment>
A first embodiment will be described. FIG. 1 is a plan view showing an example of a table apparatus 100A according to the present embodiment. FIG. 2 is a side view showing an example of the table device 100A according to the present embodiment. FIG. 3 is a side sectional view showing an example of the table device 100A according to the present embodiment.

  As shown in FIGS. 1, 2, and 3, the table apparatus 100 </ b> A includes a table 1 having an upper surface 1 </ b> A and a lower surface 1 </ b> B, a base member 2 having an upper surface 2 </ b> A facing the lower surface 1 </ b> B of the table 1, And a support device 3 that supports the table 1 so that the lower surface 1B and the upper surface 2A of the base member 2 face each other with a gap G therebetween. The table 1 supports the workpiece S. The workpiece S is supported on the upper surface 1A of the table 1.

  The table device 100A functions as a positioning device that determines the position of the workpiece S. A positioning device including the table device 100 </ b> A determines the position of the workpiece S supported by the table 1. The table device may be referred to as a positioning device.

  When the load in the vertical direction (Z-axis direction) equal to or greater than a predetermined value is applied to the table 1, the support device 3 is configured so that the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 are in contact with each other in the vertical direction. It has a table guide bearing 4 for guiding.

  The table 1 has a rod-shaped first slide member 5 guided by a table guide bearing 4. The first slide member 5 is disposed on the upper surface 1 </ b> A of the table 1. The first slide member 5 is provided on the upper surface 1A of the table 1 so as to protrude upward (+ Z direction) from the upper surface 1A.

  The table guide bearing 4 is substantially cylindrical. The table guide bearing 4 is disposed around the rod-shaped first slide member 5.

  The support device 3 includes a support member 6 that supports the table guide bearing 4. The support member 6 supports the table guide bearing 4 so that the table guide bearing 4 is disposed around the first slide member 5.

  As shown in FIG. 1, a plurality of first slide members 5 are provided on the upper surface 1 </ b> A of the table 1. A plurality of first slide members 5 are provided so as to surround the center of the upper surface 1A. The 1st slide member 5 is arrange | positioned around the workpiece | work S supported by 1 A of upper surfaces. A plurality of table guide bearings 4 are provided so as to be arranged around each of the plurality of first slide members 5. A plurality of support members 6 are provided so as to support each of the plurality of table guide bearings 4.

  In the present embodiment, four first slide members 5 are provided on the upper surface 1A. Four table guide bearings 4 are provided. Four support members 6 are provided.

  The table apparatus 100A includes a moving system 8 having an actuator 7 that can move the support member 6 in a horizontal plane. By moving the support member 6, the table 1 connected to the support member 6 moves in the horizontal plane together with the support member 6.

  In the present embodiment, the actuator 7 moves the support member 6 (table 1) in the Y-axis direction and the first actuator 7X that generates power for moving the support member 6 (table 1) in the X-axis direction. And a second actuator 7Y for generating the following power. In the present embodiment, the actuator 7 includes a servo motor.

  In the present embodiment, the support device 3 includes a frame member 9 that is disposed around the table 1 and has an upper surface 9A to which the support member 6 is connected, and a stage 10 that is disposed around the base member 2. In the present embodiment, the upper surface 10 </ b> A of the stage 10 is disposed below the upper surface 2 </ b> A of the base member 2. Note that the upper surface 10A may be disposed in the same plane (the same height) as the upper surface 2A, or may be disposed above the upper surface 2A.

  The frame member 9 has an opening 9K. At least a part of the table 1 is disposed inside the opening 9K. The frame member 9 and the table 1 are separated. The inner surface of the opening 9K and the side surface of the table 1 face each other through a gap.

  The stage 10 is a frame-like member disposed around the base member 2. The stage 10 has an opening 10K. At least a part of the base member 2 is disposed inside the opening 10K. The stage 10 and the base member 2 are separated from each other. The inner surface of the opening 10K and the side surface of the base member 2 face each other with a gap.

  The moving system 8 includes a first linear bearing 11 connected to the lower surface 9B of the frame member 9, a first guide member 12 disposed on the upper surface 10A of the stage 10 and guiding the first linear bearing 11 in the X-axis direction, A second linear bearing 13 connected to the lower surface 10B of the stage 10 and a second guide member 14 disposed on the base member 2 and guiding the second linear bearing 13 in the Y-axis direction are provided.

  The first actuator 7X generates power for moving the first linear bearing 11 in the X-axis direction. The second actuator 7Y generates power for moving the second linear bearing 13 in the Y-axis direction.

  The actuator 7 (the first actuator 7X and the second actuator 7Y) includes a servo motor. The moving system 8 has a ball screw mechanism 15 connected to the actuator 7. The ball screw mechanism 15 includes a first ball screw mechanism 15X connected to the first actuator 7X and a second ball screw mechanism 15Y connected to the second actuator 7Y. The first ball screw mechanism 15X includes a ball screw that is rotated by the power generated by the first actuator 7X, and a nut that is disposed around the ball screw and connected to the lower surface 9B of the frame member 9. The second ball screw mechanism 15Y includes a ball screw that is rotated by the power generated by the second actuator 7Y, and a nut that is disposed around the ball screw and connected to the lower surface 10B of the stage 10. The actuator 7 and the ball screw mechanism 15 are connected via a coupling 16.

  When the first actuator 7X is actuated, the ball screw of the first ball screw mechanism 15X rotates. Thereby, the frame member 9 moves in the X-axis direction. The frame member 9 having the first linear bearing 11 is guided in the X-axis direction by the first guide member 12. The frame member 9 and the table 1 are connected via a table guide bearing 4, a first slide member 5, and a support member 6. Accordingly, when the frame member 9 moves in the X-axis direction, the table 1, the table guide bearing 4, the first slide member 5, and the support member 6 move together with the frame member 9 in the X-axis direction.

  When the second actuator 7Y operates, the ball screw of the second ball screw mechanism 15Y rotates. Thereby, the stage 10 moves in the Y-axis direction. The stage 10 having the second linear bearing 13 is guided in the Y-axis direction by the second guide member 14. The frame member 9 is supported by the stage 10 via the first guide member 12 and the first linear bearing 11. Therefore, when the stage 10 moves in the Y-axis direction, the frame member 9 moves in the Y-axis direction together with the stage 10. The frame member 9 and the table 1 are connected via a table guide bearing 4, a first slide member 5, and a support member 6. Therefore, when the frame member 9 moves in the Y-axis direction, the table 1, the table guide bearing 4, the first slide member 5, and the support member 6 move together with the frame member 9 in the Y-axis direction.

  Thus, in the present embodiment, the table 1 can be moved in two directions, the X-axis direction and the Y-axis direction, by the moving system 8 including the first actuator 7X and the second actuator 7Y.

  FIG. 4 is a diagram showing a part of the table apparatus 100A according to the present embodiment. FIG. 4 is an enlarged view of the vicinity of the table guide bearing 4 and the first slide member 5. As shown in FIG. 4, the table 1 has a first slide member 5 fixed to the upper surface 1A. The first slide member 5 is provided so as to protrude upward from the upper surface 1A. The first slide member 5 includes a rod portion 5L and flange portions 5F arranged at the upper end portion and the lower end portion of the rod portion 5L.

  The table guide bearing 4 is disposed around the rod portion 5L. The table guide bearing 4 is supported by the casing 17. The support member 6 supports the table guide bearing 4 via the casing 17.

  The table guide bearing 4 includes a ball bearing. The table guide bearing 4 includes an inner ring 4A disposed so as to contact the rod portion 5L, an outer ring 4B disposed around the inner ring 4A, and a ball 4C disposed between the inner ring 4A and the outer ring 4B. Including. In the present embodiment, two ball bearings including the inner ring 4A, the outer ring 4B, and the ball 4C are arranged in the vertical direction (a direction parallel to the central axis of the rod portion 5L).

  The table guide bearing 4 allows the movement of the first slide member 5 in the vertical direction. The first slide member 5 is supported by the table guide bearing 4 so as to be movable in the vertical direction. In the present embodiment, the table 1 is movable in the vertical direction with respect to the frame member 9 and the support member 6. In other words, the vertical displacement of the table 1 with respect to the frame member 9 and the support member 6 is allowed.

  When the vertical load on the table 1 is less than a predetermined value, the support device 3 including the table guide bearing 4 supports the table 1 so that the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 do not contact each other. When the vertical load on the table 1 is zero (no load), the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 face each other with a gap G therebetween.

  The table guide bearing 4 allows the movement of the table 1 in the vertical direction by the size of the gap G. The dimension of the gap G is the distance between the lower surface 1B and the upper surface 2A when the vertical load on the table 1 is zero (no load). When a load in the vertically downward direction (−Z direction) acts on the table 1, the table 1 moves downward (−Z direction) while being guided by the table guide bearing 4. As the table 1 moves downward, the lower surface 1B of the table 1 contacts the upper surface 2A of the base member 2. When the vertical force on the table 1 is a predetermined value, the lower surface 1 </ b> B of the table 1 contacts the upper surface 2 </ b> A of the base member 2. The table guide bearing 4 guides the table 1 in the vertical direction so that the lower surface 1 </ b> B of the table 1 and the upper surface 2 </ b> A of the base member 2 come into contact with each other when a load below the predetermined value in the vertical direction acts on the table 1. . The table 1 is supported on the upper surface 2 </ b> A of the base member 2 by the lower surface 1 </ b> B of the table 1 contacting the upper surface 2 </ b> A of the base member 2.

  The dimension of the gap G is determined so that the lower surface 1B and the upper surface 2A come into contact before an excessive load (overload) is applied to the table guide bearing 4. In other words, the dimension of the gap G is determined so that no overload acts on the table guide bearing 4 even if the table 1 moves in the vertical direction within the range of the dimension of the gap G. In addition, the state where an overload acts on the table guide bearing 4 is a state where a load exceeding the static load rating acts on the table guide bearing 4, and the balls 4C are detached from the guide grooves of the inner ring 4A and the outer ring 4B. A state in which such a load acts on the table guide bearing 4 is exemplified.

  The predetermined value means that a load in the -Z direction acts on the table 1, the table guide bearing 4 cannot maintain the position of the table 1 in the vertical direction, the table 1 moves in the -Z direction, and the lower surface 1B of the table 1 And the upper surface 2 </ b> A of the base member 2, and the value of the −Z direction load acting on the table 1 when the dimension of the gap G becomes zero. When the load acting on the table 1 is zero (no load), the table 1 does not move in the −Z direction, the position of the table 1 in the vertical direction is maintained, and the gap G between the lower surface 1B and the upper surface 2A is maintained. Is done. When a load in the -Z direction acts on the table 1, the movement of the table 1 in the -Z direction is started. When the load acting on the table 1 is less than a predetermined value, the table 1 moves in the −Z direction and the size of the gap G gradually decreases, but the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 are separated from each other. Yes. When the load acting on the table 1 reaches a predetermined value, the lower surface 1B of the table 1 moved in the −Z direction comes into contact with the upper surface 2A of the base member 2, and the size of the gap G becomes zero.

  It should be noted that the size of the gap G that allows the lower surface 1B and the upper surface 2A to come into contact with each other before an overload is applied to the table guide bearing 4 and the predetermined value of the load can be obtained in advance based on experiments or simulations. Based on the obtained data, the dimension of the gap G and the predetermined value of the load appropriate for the table guide bearing 4 to be used are determined.

  Next, an example of the operation of the table apparatus 100A according to the present embodiment will be described. In the present embodiment, an example in which the table device 100A is used in a manufacturing process of a liquid crystal panel display which is a kind of flat panel display will be described. An example in which two substrates of a liquid crystal panel display are bonded using the table apparatus 100A will be described.

  As the work S, one of the two substrates is supported on the upper surface 1A of the table 1. The other substrate is held by the substrate holder. The other substrate held by the substrate holder is pressed against the one substrate supported by the table 1 from above.

  Before the other substrate is pressed against one substrate, a gap G is formed between the lower surface 1B of the table 1 and the upper surface 2A of the base member 2. When the other substrate is pressed against one substrate and a vertically downward load acts on the table 1, the table 1 moves downward. The table guide bearing 4 guides the table 1 in the vertical direction so that the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 are in contact with each other. The table 1 is guided by the table guide bearing 4 and moves downward. When the load reaches a predetermined value, the lower surface 1B of the table 1 comes into contact with the upper surface 2A of the base member 2, and the table 1 is supported by the upper surface 2A of the base member 2.

  The table 1 can be moved straight downward by a table guide bearing 4. Therefore, when the load in the vertical direction acts on the table 1, the lack of positioning accuracy of the table 1 is suppressed.

  For example, even if the table 1 is thermally deformed, the heat deformation of the table 1 is absorbed by the table guide bearing 4. For example, even if the table 1 is thermally deformed in the horizontal direction, the heat deformation is absorbed by the table guide bearing 4. Therefore, the table guide bearing 4 can guide the table 1 satisfactorily.

  After the other substrate is pressed against one substrate and the one substrate and the other substrate are bonded together, the substrate holder is raised. Thereby, the load which acts on the table 1 decreases. When the load acting on the table 1 decreases and the vertical load on the table 1 becomes less than a predetermined value, the table 1 moves upward by the restoring force of the table guide bearing 4. Thereby, a gap G is formed between the lower surface 1B of the table 1 and the upper surface 2A of the base member 2.

  As described above, according to the present embodiment, when a load in the vertical direction acts on the table 1, the table 1 can be moved straight downward by the table guide bearing 4. When a vertical load equal to or greater than a predetermined value acts on the table 1, the table 1 is supported by the base member 2. Therefore, when the load in the vertical direction acts on the table 1, the lack of positioning accuracy of the table 1 is suppressed.

  Even if the table 1 is thermally deformed, the heat deformation 1 of the table is absorbed by the table guide bearing 4. For example, even if the table 1 is thermally deformed in the horizontal direction, the heat deformation is absorbed by the table guide bearing 4. Therefore, the table guide bearing 4 can guide the table 1 satisfactorily. In addition, insufficient positioning accuracy of the table 1 is suppressed.

  In the present embodiment, the table 1 has a rod-shaped first slide member 5 guided by the table guide bearing 4, and the support device 3 includes the table guide bearing 4 around the first slide member 5. It has the support member 6 which supports the table guide bearing 4 so that it may be arrange | positioned. Thereby, the table 1 is favorably guided to the table guide bearing 4 through the first slide member 5.

  In the present embodiment, a plurality of first slide members 5 are provided on the upper surface 1A of the table 1, and a plurality of table guide bearings 4 are provided so as to be arranged around each of the plurality of first slide members 5. It is done. As a result, the table 1 is satisfactorily guided by the table guide bearing 4 via the plurality of first slide members 5.

  Moreover, in this embodiment, the movement system 8 which has the actuator 7 which can move the support member 6 within a horizontal surface is provided. Thereby, the table 1 can move in the horizontal plane together with the support member 6.

  Further, in the present embodiment, the support device 3 is disposed around the table 1 and has a frame member 9 having an upper surface 9A to which the support member 6 is connected, a stage 10 disposed around the base member 2, and Have The moving system 8 includes a first linear bearing 11 connected to the lower surface 9B of the frame member 9, a first guide member 12 disposed on the upper surface 10A of the stage 10 and guiding the first linear bearing 11 in the X-axis direction, and a stage. 10, a second linear bearing 13 connected to the lower surface 10 </ b> B, a second guide member 14 for guiding the second linear bearing 13 in the Y-axis direction, and power for moving the first linear bearing 11 in the X-axis direction. It has the 1st actuator 7X which generate | occur | produces, and the 2nd actuator 7Y which generates the motive power for moving the 2nd linear bearing 13 to a Y-axis direction. Thereby, the table 1 can move in two directions of the X-axis direction and the Y-axis direction in the horizontal plane.

Second Embodiment
A second embodiment will be described. In the following description, the same or equivalent components as those in the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 5 is a plan view showing an example of the table device 100B according to the present embodiment. FIG. 6 is a side sectional view showing an example of the table device 100B according to the present embodiment.

  5 and 6, the table apparatus 100B includes a table 1 having an upper surface 1A and a lower surface 1B, a base member 2 having an upper surface 2A opposite to the lower surface 1B of the table 1, and a lower surface 1B and a base of the table 1. And a support device 3 that supports the table 1 such that the upper surface 2A of the member 2 faces the gap G. The table 1 supports the workpiece S. The workpiece S is supported on the upper surface 1A of the table 1.

  The support device 3 includes a table guide bearing 4 that guides the table 1 in the vertical direction, and a support member 6 that supports the table guide bearing 4. The table 1 has a rod-shaped first slide member 5 guided by a table guide bearing 4.

  As shown in FIG. 5, a plurality of first slide members 5 are provided on the upper surface 1 </ b> A of the table 1. A plurality of first slide members 5 are provided so as to surround the center of the upper surface 1A. The 1st slide member 5 is arrange | positioned around the workpiece | work S supported by 1 A of upper surfaces. In the present embodiment, six first slide members 5 are provided on the upper surface 1A. Six table guide bearings 4 are provided. Six support members 6 are provided.

  The table apparatus 100B includes a moving system 8 having an actuator 7 that can move the support member 6 in a horizontal plane. By moving the support member 6, the table 1 connected to the support member 6 moves in the horizontal plane together with the support member 6.

  The actuator 7 generates power for moving the support member 6 (table 1) in the X-axis direction and power for moving the support member 6 (table 1) in the Y-axis direction. Second actuator 7Y.

  In the present embodiment, the moving system 8 includes a third guide member 18 connected to the first support member 6X among the plurality of support members 6, and a third linear bearing guided by the third guide member 18 in the Y-axis direction. 19, a fourth guide member 20 connected to the second support member 6Y among the plurality of support members 6, and a fourth linear bearing 21 guided by the fourth guide member 20 in the X-axis direction. .

  The first actuator 7X moves the third linear bearing 19 to generate power for moving the first support member 6X in the X-axis direction. The second actuator 7Y moves the fourth linear bearing 21 to generate power for moving the second support member 6Y in the Y-axis direction.

  The third linear bearing 19 is supported by the support member 22. The support member 22 is fixed to the first linear bearing 11. The first actuator 7X generates power for moving the first linear bearing 11 in the X-axis direction. The first linear bearing 11 is guided by the first guide member 12 in the X-axis direction. When the first linear bearing 11 moves in the X-axis direction, the third linear bearing 19 supported by the support member 22 moves in the X-axis direction together with the first linear bearing 11. The third linear bearing 19 and the table 1 are connected via a table guide bearing 4, a first slide member 5, a support member 6 (first support member 6 </ b> X), and a third guide member 18. Therefore, when the third linear bearing 19 moves in the X-axis direction, the table 1, the table guide bearing 4, the first slide member 5, the support member 6 (first support member 6X), and the third guide member 18 are It moves in the X-axis direction together with the third linear bearing 19.

  The fourth linear bearing 21 is supported by the support member 23. The support member 23 is fixed to the second linear bearing 13. The second actuator 7Y generates power for moving the second linear bearing 13 in the Y-axis direction. The second linear bearing 13 is guided by the second guide member 14 in the Y-axis direction. When the second linear bearing 13 moves in the Y-axis direction, the fourth linear bearing 21 supported by the support member 23 moves in the Y-axis direction together with the second linear bearing 13. The fourth linear bearing 21 and the table 1 are connected via a table guide bearing 4, a first slide member 5, a support member 6 (second support member 6 </ b> Y), and a fourth guide member 20. Therefore, when the fourth linear bearing 21 moves in the Y-axis direction, the table 1, the table guide bearing 4, the first slide member 5, the support member 6 (second support member 6Y), and the fourth guide member 20 are It moves in the Y-axis direction together with the fourth linear bearing 21.

  As shown in FIG. 5, in the present embodiment, the first support member 6 </ b> X is disposed on both sides (+ X side and −X side) in the X-axis direction with respect to the center of the upper surface 1 </ b> A of the table 1. Two first support members 6X are arranged in the Y-axis direction.

  As shown in FIG. 5, in the present embodiment, the second support member 6 </ b> Y is disposed on both sides (+ Y side and −Y side) in the Y-axis direction with respect to the center of the upper surface 1 </ b> A of the table 1. The second support member 6Y on the + Y side can be omitted.

  A position in the Y-axis direction of the first support member 6X disposed on the + X side with respect to the center of the upper surface 1A of the table 1 and a first support member disposed on the −X side with respect to the center of the upper surface 1A of the table 1 The position in the Y-axis direction of 6X is equal. That is, the Y coordinates of the first support members 6X disposed on both sides in the X-axis direction with respect to the center of the upper surface 1A of the table 1 are equal.

  The X-axis direction position of the second support member 6Y disposed on the + Y side with respect to the center of the upper surface 1A of the table 1 and the second support member disposed on the −Y side with respect to the center of the upper surface 1A of the table 1 The position of 6Y in the X-axis direction is equal. That is, the X coordinates of the second support members 6Y disposed on both sides in the Y-axis direction with respect to the center of the upper surface 1A of the table 1 are equal.

  The first support members 6X disposed on both sides in the X-axis direction are opposed to the center of the upper surface 1A of the table 1. The first actuator 7X includes one first support member 6X (-X in the present embodiment, -X) of the pair of first support members 6X disposed on both sides in the X-axis direction with respect to the center of the upper surface 1A of the table 1. Side first support member 6X) is arranged to move. The first actuator 7X is not connected to the other first support member 6X (in this embodiment, the first support member 6X on the + X side).

  The second support members 6Y disposed on both sides in the Y-axis direction are opposed to the center of the upper surface 1A of the table 1. The second actuator 7Y includes one second support member 6Y (-Y in the present embodiment) of the pair of second support members 6Y disposed on both sides in the Y-axis direction with respect to the center of the upper surface 1A of the table 1. Side second support member 6Y) is arranged to move. The second actuator 7Y is not connected to the other second support member 6Y (second support member 6Y on the + Y side in this embodiment).

  A plurality of first actuators 7X are arranged. In the space on the −X side with respect to the center of the upper surface 1 </ b> A of the table 1, the first actuator 7 </ b> X moves each of the two first support members 6 </ b> X arranged in the Y axis direction in the X axis direction. Two are arranged.

  The moving system 8 can move the table 1 in the θZ direction (rotational direction) by changing the operation amount of the plurality of (two) first actuators 7X.

  A plurality of second support members 6Y may be arranged in the X-axis direction. A plurality of second actuators 7Y may be arranged so that each of the second support members 6Y arranged in the X-axis direction moves in the Y-axis direction. The movement system 8 may move the table 1 in the θZ direction by changing the operation amounts of the plurality of second actuators 7Y.

  Thus, in the present embodiment, the table 1 is movable in three directions, that is, the X-axis direction, the Y-axis direction, and the θZ direction.

  Similar to the above-described embodiment, when the vertical load on the table 1 is zero, the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 face each other with a gap G therebetween. When a load below the predetermined value in the vertical direction (−Z direction) acts on the table 1, the table 1 moves downward (−Z direction) while being guided by the table guide bearing 4. When a load below the predetermined value in the vertical direction (−Z direction) acts on the table 1, the lower surface 1 </ b> B of the table 1 moved downward contacts the upper surface 2 </ b> A of the base member 2. The table 1 is supported on the upper surface 2 </ b> A of the base member 2 by the lower surface 1 </ b> B of the table 1 contacting the upper surface 2 </ b> A of the base member 2.

  As described above, also in the present embodiment, when a load in the vertical direction acts on the table 1, the table 1 can be moved straight downward by the table guide bearing 4. Further, the table 1 is supported by the base member 2 when a load of a predetermined value or more is applied to the table 1. Even if the table 1 is thermally deformed, the heat deformation 1 of the table is absorbed by the table guide bearing 4. Therefore, insufficient positioning accuracy of the table 1 is suppressed.

  In this embodiment, when a load is applied to the table 1, the first linear bearing 11 is pitched (rotation in the θY direction), the second linear bearing 13 is pitched (rotation in the θX direction), and the third linear bearing 19. The gap G is also reduced by at least one of rolling (rotation in the θY direction) and rolling of the fourth linear bearing 21 (rotation in the θX direction). When the first linear bearing 11 and the second linear bearing 13 are separated from the table 1, the pitching of the first linear bearing 11 and the pitching of the second linear bearing 13 contribute to reducing the gap G. In the present embodiment, for example, when a load in the X-axis direction acts on the table 1, the radial rigidity of the table guide bearing 4, the X-axis rigidity of the third linear bearing 19, and the axial rigidity of the ball screw portion (nuts) The load is supported by the rigidity of the part, the rigidity of the support bearing part, and the rigidity of the rotating system from the servo motor. Even if a load in the vertical direction acts on the table 1 and a force for moving the table 1 in the X-axis direction based on the load is generated, the movement of the table 1 in the X-axis direction is suppressed by the above-described rigidity.

<Third Embodiment>
A third embodiment will be described. In the following description, the same or equivalent components as those in the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 7 is a plan view showing an example of the table device 100C according to the present embodiment. A table apparatus 100C according to the present embodiment is a modification of the table apparatus 100B described in the above-described embodiment.

  As shown in FIG. 7, the table apparatus 100C supports the table 1 so that the table 1, the base member 2, and the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 face each other with a gap G therebetween. And a device 3.

  The support device 3 includes a table guide bearing 4 that guides the table 1 in the vertical direction, and a support member 6 that supports the table guide bearing 4. The table 1 has a rod-shaped first slide member 5 guided by a table guide bearing 4.

  As shown in FIG. 7, a plurality of first slide members 5 are provided on the upper surface 1 </ b> A of the table 1. A plurality of first slide members 5 are provided so as to surround the center of the upper surface 1A. The 1st slide member 5 is arrange | positioned around the workpiece | work S supported by 1 A of upper surfaces. In the present embodiment, three first slide members 5 are provided on the upper surface 1A. Three table guide bearings 4 are provided. Three support members 6 are provided.

  The table apparatus 100 </ b> C includes a movement system 8 having an actuator 7 that can move the support member 6 in a horizontal plane. By moving the support member 6, the table 1 connected to the support member 6 moves in the horizontal plane together with the support member 6.

  The actuator 7 generates power for moving the support member 6 (table 1) in the X-axis direction and power for moving the support member 6 (table 1) in the Y-axis direction. Second actuator 7Y.

  The movement system 8 includes a third guide member 18 connected to the first support member 6X among the plurality of support members 6, a third linear bearing 19 guided by the third guide member 18 in the Y-axis direction, and a plurality of A fourth guide member 20 connected to the second support member 6Y of the support member 6 and a fourth linear bearing 21 guided by the fourth guide member 20 in the X-axis direction are provided.

  The first actuator 7X moves the third linear bearing 19 to generate power for moving the first support member 6X in the X-axis direction. The second actuator 7Y moves the fourth linear bearing 21 to generate power for moving the second support member 6Y in the Y-axis direction.

  The third linear bearing 19 is supported by the support member 22. The support member 22 is fixed to the first linear bearing 11. The first actuator 7X generates power for moving the first linear bearing 11 in the X-axis direction. The first linear bearing 11 is guided by the first guide member 12 in the X-axis direction. When the first linear bearing 11 moves in the X-axis direction, the third linear bearing 19 supported by the support member 22 moves in the X-axis direction together with the first linear bearing 11. The third linear bearing 19 and the table 1 are connected via a table guide bearing 4, a first slide member 5, a support member 6 (first support member 6 </ b> X), and a third guide member 18. Therefore, when the third linear bearing 19 moves in the X-axis direction, the table 1, the table guide bearing 4, the first slide member 5, the support member 6 (first support member 6X), and the third guide member 18 are It moves in the X-axis direction together with the third linear bearing 19.

  The fourth linear bearing 21 is supported by the support member 23. The support member 23 is fixed to the second linear bearing 13. The second actuator 7Y generates power for moving the second linear bearing 13 in the Y-axis direction. The second linear bearing 13 is guided by the second guide member 14 in the Y-axis direction. When the second linear bearing 13 moves in the Y-axis direction, the fourth linear bearing 21 supported by the support member 23 moves in the Y-axis direction together with the second linear bearing 13. The fourth linear bearing 21 and the table 1 are connected via a table guide bearing 4, a first slide member 5, a support member 6 (second support member 6 </ b> Y), and a fourth guide member 20. Therefore, when the fourth linear bearing 21 moves in the Y-axis direction, the table 1, the table guide bearing 4, the first slide member 5, the support member 6 (second support member 6Y), and the fourth guide member 20 are It moves in the Y-axis direction together with the fourth linear bearing 21.

  As shown in FIG. 7, in the present embodiment, the first support member 6 </ b> X is disposed on both sides (+ X side and −X side) in the X-axis direction with respect to the center of the upper surface 1 </ b> A of the table 1.

  As shown in FIG. 7, in the present embodiment, the second support member 6 </ b> Y is disposed on one side (−Y side) in the Y-axis direction with respect to the center of the upper surface 1 </ b> A of the table 1.

  A position in the Y-axis direction of the first support member 6X disposed on the + X side with respect to the center of the upper surface 1A of the table 1 and a first support member disposed on the −X side with respect to the center of the upper surface 1A of the table 1 It is different from the position of 6X in the Y-axis direction. That is, the Y coordinates of the first support members 6X disposed on both sides in the X-axis direction with respect to the center of the upper surface 1A of the table 1 are different.

  The first support members 6X disposed on both sides in the X-axis direction with respect to the center of the upper surface 1A of the table 1 do not face each other but are displaced. Two first actuators 7X are provided so as to move both the pair of first support members 6X arranged on both sides in the X-axis direction with respect to the center of the upper surface 1A of the table 1.

  The moving system 8 can move the table 1 in the θZ direction (rotational direction) by changing the operation amount of the plurality of (two) first actuators 7X.

  A plurality of second support members 6Y may be arranged in the X-axis direction. A plurality of second actuators 7Y may be arranged so that each of the second support members 6Y arranged in the X-axis direction moves in the Y-axis direction. The movement system 8 may move the table 1 in the θZ direction by changing the operation amounts of the plurality of second actuators 7Y.

  The table 1 is movable in three directions, the X-axis direction, the Y-axis direction, and the θZ direction.

  When the vertical load on the table 1 is less than a predetermined value, the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 face each other with a gap G therebetween. When a load below the predetermined value in the vertical direction (−Z direction) acts on the table 1, the table 1 moves downward (−Z direction) while being guided by the table guide bearing 4. As the table 1 moves downward, the lower surface 1B of the table 1 contacts the upper surface 2A of the base member 2. The table 1 is supported on the upper surface 2 </ b> A of the base member 2 by the lower surface 1 </ b> B of the table 1 contacting the upper surface 2 </ b> A of the base member 2.

  As described above, also in this embodiment, when a vertical load of a predetermined value or more is applied to the table 1, the table 1 can be moved straight downward by the table guide bearing 4. Even if the table 1 is thermally deformed, the heat deformation 1 of the table is absorbed by the table guide bearing 4. Therefore, when the load in the vertical direction acts on the table 1, the lack of positioning accuracy of the table 1 is suppressed.

  In the present embodiment, the number of the first support members 6X or the number of the second support members 6Y is small, and the increase in size and the structure of the table device 100C are suppressed. For example, when the size and mass of the table 1 are smaller than the table guide bearing 4, the structure of the table device 100C is effective.

<Fourth embodiment>
A fourth embodiment will be described. In the following description, the same or equivalent components as those in the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 8 is a plan view showing an example of the table device 100D according to the present embodiment. FIG. 9 is a side sectional view showing an example of the table device 100D according to the present embodiment.

  Most parts of the table device 100D according to the present embodiment are the same as the table device 100B described in the above embodiment.

  In the present embodiment, at least a part of the table device 100 </ b> D is disposed in the internal space of the chamber device 24. Of the table apparatus 100 </ b> D, at least the table 1 and the table guide bearing 4 are disposed in the internal space of the chamber apparatus 24.

  In this embodiment, the table 1, the table guide bearing 4, the first slide member 5, the support member 6, the third guide member 18, the third linear bearing 19, the fourth guide member 20, the fourth linear bearing 21, and the like. , Disposed in the internal space of the chamber device 24.

  The actuator 7 (the first actuator 7X and the second actuator 7Y) is disposed in the external space of the chamber device 24.

  The chamber device 24 includes an environment control system that controls the environment of the internal space. The environment of the internal space includes at least one of the type of gas in the internal space, temperature, humidity, pressure (including the degree of vacuum), and cleanliness.

  By the environment control system, the internal space of the chamber device 24 is controlled to a vacuum state, for example. In addition, the internal space of the chamber device 24 is controlled at a constant temperature by the environmental control system, and is maintained at a high degree of cleanliness.

  The chamber device 24 has an opening 24K that connects the internal space and the external space. At least a part of the moving system 8 is disposed in the opening 24K.

  The chamber device 24 includes a bellows 25 disposed in the opening 24K and a support device 26 that supports the bellows 25. Thereby, the circulation of gas between the internal space and the external space is suppressed.

  In the present embodiment, the opening 24 </ b> K is disposed on each of the + Y side and the −Y side of the chamber device 24. In the present embodiment, one opening 24 </ b> K is disposed on each of the + Y side and the −Y side of the chamber device 24. The X coordinate of the opening 24K on the + Y side and the X coordinate of the opening 24K on the −Y side are the same. Note that two openings 24K may be arranged on each of the + Y side and the −Y side of the chamber device 24, or an arbitrary number of three or more may be arranged.

  In the present embodiment, the opening 24 </ b> K is disposed on each of the + X side and the −X side of the chamber device 24. In the present embodiment, two openings 24 </ b> K are arranged on each of the + X side and the −X side of the chamber device 24. The Y coordinate of the + X side opening 24K and the Y coordinate of the −X side opening 24K are the same. One opening 24K may be disposed on each of the + X side and the −X side of the chamber device 24, or any number of three or more may be disposed.

  The bellows 25 is disposed in each of the plurality of openings 24K. In the present embodiment, the chamber device 24 has a line-symmetric structure with respect to a first imaginary line that passes through the center of the chamber device 24 in the XY plane and is parallel to the X axis. The chamber device 24 has a line-symmetric structure with respect to a second imaginary line passing through the center of the chamber device 24 in the XY plane and parallel to the Y axis.

  As described above, according to the present embodiment, since the chamber device 24 having at least the internal space in which the table 1 is disposed is provided, it is supported by the table 1 in the internal space of the chamber device 24 in which the environment is controlled. The workpiece S is processed. Since the actuator 7 is disposed in the external space of the chamber device 24, for example, even if heat is generated from the actuator 7, the influence of the heat on the table 1 and the workpiece S is suppressed. Further, even if foreign matter is generated from the actuator 7, the influence of the foreign matter on the table 1 and the workpiece S is suppressed. Further, the entire table device 100D is not accommodated in the internal space of the chamber device 24, at least the table 1 and the table guide bearing 4 are accommodated in the internal space of the chamber device 24, and the actuator 7 is disposed in the external space of the chamber device 24. As a result, an increase in the size of the chamber device 24 is suppressed.

  According to the present embodiment, the chamber device 24 has a line-symmetric structure. When there is a pressure difference between the internal space of the chamber device 24 and the external space of the chamber device 24, a force proportional to the area of the bellows 25 acts in the expansion / contraction direction of the bellows 25 due to the pressure difference. The opening 24K and the bellows 25 are arranged symmetrically with respect to the first imaginary line, and arranged symmetrically with respect to the second imaginary line, so that the force in the expansion / contraction direction acting on the bellows 25 cancels out. Is done. The arrangement of the bellows 25 is preferably such that the −X side drive section is symmetric and the + X side driven section is symmetric with respect to the first imaginary line. Note that the interval between the + X side drive units and the interval between the −X side driven units may be different.

<Fifth Embodiment>
A fifth embodiment will be described. In the following description, the same or equivalent components as those in the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 10 is a plan view showing an example of the table device 100E according to the present embodiment. FIG. 11 is a side sectional view showing an example of the table device 100E according to the present embodiment.

  Most parts of the table device 100E according to the present embodiment are the same as the table device 100B described in the above-described embodiment.

  As shown in FIGS. 10 and 11, the table apparatus 100E is disposed between the lower surface 1B of the table 1 and the upper surface 2A of the base member 2, and the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 have a gap G. A plane guide device 30 for guiding the table 1 in a horizontal direction parallel to the upper surface 2A of the base member 2 is provided.

  In the present embodiment, the plane guide device 30 is disposed in an internal space 1H formed in the table 1. As shown in FIG. 10, a plurality of plane guide devices 30 are provided. In the present embodiment, three plane guide devices 30 are arranged in the XY plane.

  The plane guide device 30 includes a support plate 32 that supports a plurality of balls 31 and a rod-shaped second slide member 33 connected to the support plate 32. The ball 31 is disposed on the lower surface side of the support plate 32. The ball 31 is supported by the support plate 32 so as to be rotatable (rollable). In the plain guide device 30, at least a part of the ball 31 is disposed so as to protrude downward from the lower surface 1 </ b> B of the table 1.

  The table 1 moves on the upper surface 2 </ b> A of the base member 2 by the operation of the moving system 8. When the gap G is formed, the balls 31 of the plane guide device 30 can roll while in contact with the upper surface 2 </ b> A of the base member 2. Thereby, the table 1 is guided in at least one of the X-axis direction, the Y-axis direction, and the θZ direction parallel to the upper surface 2A.

  The second slide member 33 is fixed to the upper surface of the support plate 32. The second slide member 33 is provided so as to protrude upward from the upper surface of the support plate 32. The second slide member 33 includes a rod portion 33L and a flange portion 33F disposed on each of the upper end portion and the lower end portion of the rod portion 33L.

  In the present embodiment, the table apparatus 100E includes a plain guide bearing 34 that is supported by the table 1 and supports the second slide member 33 so as to be movable in the vertical direction.

  FIG. 12 is an enlarged view showing the vicinity of the plain guide bearing 34. The plain guide bearing 34 is disposed around the rod portion 33L. The plain guide bearing 34 is supported on the inner surface of the internal space 1H of the table 1.

  The plain guide bearing 34 includes a ball bearing. The plain guide bearing 34 includes an inner ring 34A disposed so as to contact the rod portion 33L, an outer ring 34B disposed around the inner ring 34A, and a ball 34C disposed between the inner ring 34A and the outer ring 34B. Including. In the present embodiment, two ball bearings including the inner ring 34A, the outer ring 34B, and the ball 34C are arranged in the vertical direction (direction parallel to the central axis of the rod portion 33L).

  The plain guide bearing 34 allows the movement of the second slide member 33 (plane guide device 30) in the vertical direction. The second slide member 33 is supported by the plain guide bearing 34 so as to be movable in the vertical direction. In the present embodiment, the plane guide device 30 is movable in the vertical direction with respect to the table 1. In other words, displacement of the plane guide device 30 in the vertical direction with respect to the table 1 is allowed.

  When the vertical load on the table 1 is zero, the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 face each other with a gap G therebetween. When the vertical load on the table 1 is less than a predetermined value and the vertical load is applied to the table 1, the table 1 is lowered so that the size of the gap G is reduced. When the vertical load on the table 1 is less than a predetermined value, the support device 3 including the table guide bearing 4 supports the table 1 so that the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 do not contact each other.

  In a state where the vertical load on the table 1 is less than a predetermined value and the gap G is formed, at least a part of the plane guide device 30 supported by the table 1 contacts the upper surface 2A of the base member 2. When the table 1 moves in the horizontal plane by the operation of the moving system 8, the table 1 is guided to the upper surface 2 </ b> A of the base member 2 via the plane guide device 30. Thereby, the table 1 can move smoothly in the horizontal direction.

  The table guide bearing 4 allows the movement of the table 1 in the vertical direction by the size of the gap G. When a load below the predetermined value in the vertical direction (−Z direction) acts on the table 1, the table 1 moves downward (−Z direction) while being guided by the table guide bearing 4. As the table 1 moves downward, the lower surface 1B of the table 1 contacts the upper surface 2A of the base member 2. The table guide bearing 4 guides the table 1 in the vertical direction so that the lower surface 1 </ b> B of the table 1 and the upper surface 2 </ b> A of the base member 2 come into contact with each other when a load below the predetermined value in the vertical direction acts on the table 1. . The table 1 is supported on the upper surface 2 </ b> A of the base member 2 by the lower surface 1 </ b> B of the table 1 contacting the upper surface 2 </ b> A of the base member 2.

  The dimension of the gap G is determined so that the lower surface 1B and the upper surface 2A come into contact before an excessive load (overload) is applied to the table guide bearing 4. The dimension of the gap G is determined so that overload does not act on the table guide bearing 4 even if the table 1 moves in the vertical direction within the range of the dimension of the gap G.

  In the present embodiment, the plain guide bearing 34 allows the movement of the second slide member 33 (plane guide device 30) in the vertical direction. When the load below the predetermined value in the vertical direction acts on the table 1 and the table 1 moves downward, the plane guide device 30 supported by the plane guide bearing 34 moves upward relative to the table 1. It is movable. Thereby, the entire plane guide device 30 is accommodated in the internal space 1H of the table 1.

  In the present embodiment, the rigidity of the plane guide bearing 34 in the vertical direction is smaller than the rigidity of the plane guide device 30 in the vertical direction. When the table 1 moves downward, a load in the vertical direction acts on the plane guide device 30. The size of the gap G is determined so that the lower surface 1B and the upper surface 2A come into contact before an excessive load (overload) is applied to the plane guide device 30. In other words, the dimension of the gap G is determined so that no overload acts on the plane guide device 30 even if the table 1 moves in the vertical direction within the range of the dimension of the gap G.

  As described above, according to the present embodiment, since the plane guide device 30 is provided, the table 1 with the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 facing each other with the gap G therebetween. Can move smoothly in a horizontal direction parallel to the upper surface 2A of the base member 2.

  Further, according to the present embodiment, the plane guide device 30 includes the rod-shaped second slide member 33. The second slide member 33 is supported by a plain guide bearing 34 supported by the table 1 so as to be movable in the vertical direction. Therefore, when the table 1 moves downward so that the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 are in contact with the upper surface 2A of the base member 2, the plain guide device 30 Can move upward relative to the table 1. Thereby, the plane guide device 30 is accommodated in the internal space 1H of the table 1.

<Sixth Embodiment>
A sixth embodiment will be described. In the following description, the same or equivalent components as those in the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 13 is a plan view showing an example of the table device 100F according to the present embodiment. FIG. 14 is a side sectional view showing an example of the table device 100F according to the present embodiment.

  Most parts of the table apparatus 100F according to this embodiment are the same as the table apparatus 100E described in the above-described embodiment.

  In the present embodiment, the table device 100F includes a drive element 35 that moves the plane guide device 30 in the vertical direction.

  FIG. 15 is an enlarged view showing the vicinity of the plane guide device 30 and the drive element 35. The plane guide device 30 has a rod-shaped second slide member 33 fixed to a support plate 32. In the internal space 1H of the table 1, a plain guide bearing 34 that supports the second slide member 33 so as to be movable in the vertical direction is provided. The plain guide bearing 34 is supported on the inner surface of the internal space 1H of the table 1.

  The plain guide bearing 34 includes a ball bearing. The plain guide bearing 34 includes an inner ring 34A disposed so as to contact the rod portion 33L, an outer ring 34B disposed around the inner ring 34A, and a ball 34C disposed between the inner ring 34A and the outer ring 34B. Including. In the present embodiment, two ball bearings including the inner ring 34A, the outer ring 34B, and the ball 34C are arranged in the vertical direction (direction parallel to the central axis of the rod portion 33L).

  In the present embodiment, the spacer member 37 is disposed between the two inner rings 34A disposed in the vertical direction. The inner ring 34 </ b> A is in contact with the spacer member 37. The two outer rings 34B arranged in the vertical direction face each other with a gap.

  The drive element 35 includes a piezoelectric element such as a piezoelectric element. The drive element 35 is disposed between the upper surface of the plain guide bearing 34 and a fixing member 36 fixed to the inner surface of the internal space 1H of the table 1.

  The drive element 35 can adjust the position of the lower end of the plane guide device 30 in the vertical direction (the lower end of the ball 31 in this embodiment). As the drive element 35 contracts, the lower end portion of the plane guide device 30 moves upward. As the drive element 35 extends, the lower end portion of the plane guide device 30 moves downward.

  In the present embodiment, the drive element 35 is disposed between the upper outer ring 34 </ b> B and the fixing member 36 among the two outer rings 34 </ b> B disposed in the vertical direction of the plane guide bearing 34. The operation of the drive element 35 changes the distance between the two outer rings 34B. Thereby, the position of the lower end part of the plane guide apparatus 30 is adjusted.

  According to the present embodiment, the position of the lower end portion of the plane guide device 30 in the vertical direction can be adjusted by the drive element 35. Therefore, the load acting on the plane guide device 30 is adjusted. For example, an excessive load acting on the plane guide device 30 is suppressed.

  When the vertical load on the table 1 is less than a predetermined value, the lower surface 1B of the table 1 and the upper surface 2A of the base member 2 face each other with a gap G therebetween. In a state where the gap G is formed, the lower end portion of the plane guide device 30 supported by the table 1 is in contact with the upper surface 2 </ b> A of the base member 2. By adjusting the position of the lower end portion of the plane guide device 30 in the vertical direction by the drive element 35, the load acting on the lower end portion of the plane guide device 30 in contact with the upper surface 2A is adjusted.

  When a load below the predetermined value in the vertical direction (−Z direction) acts on the table 1, the table 1 moves downward (−Z direction) while being guided by the table guide bearing 4. As the table 1 moves downward, the lower surface 1B of the table 1 contacts the upper surface 2A of the base member 2. The table 1 is supported on the upper surface 2 </ b> A of the base member 2 by the lower surface 1 </ b> B of the table 1 contacting the upper surface 2 </ b> A of the base member 2. When the table 1 moves downward, the lower end portion of the plane guide device 30 supported by the table 1 via the plane guide bearing 34 receives a load from the upper surface 2 </ b> A of the base member 2. When the table 1 moves downward, the load on the lower end portion of the plane guide device 30 received from the upper surface 2A of the base member 2 increases. In this embodiment, when the table 1 moves downward and the load acting on the lower end portion of the plane guide device 30 increases, the drive element 35 moves the lower end portion of the plane guide device 30 upward with respect to the table 1. Move relative to. Thereby, increase of the load which acts on the lower end part of the plane guide apparatus 30 is suppressed.

  As described above, according to the present embodiment, since the drive element 35 that can move the plane guide device 30 in the vertical direction is provided, it is possible to suppress an excessive load from acting on the plane guide device 30. Since the load acting on the plane guide device 30 can be reduced, an increase in the size of the plane guide device 30 is suppressed.

  In the present embodiment, a plane guide device 30, a plane guide bearing 34, and a drive element 35 may be arranged in the internal space 2H of the base member 2 as in the table device 100G shown in FIG.

  In the present embodiment, the drive element 35 may be a force control actuator such as an air cylinder, as in the table apparatus 100H shown in FIG.

  In the present embodiment, when the vertical load is not applied to the table 1, the dimension of the gap G between the table 1 and the base member 2 may be adjusted to zero by the drive element 35.

<Seventh embodiment>
A seventh embodiment will be described. In the following description, the same or equivalent components as those in the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 18 is a diagram illustrating an example of a flat panel display manufacturing apparatus 500 including the table apparatus 100A (100B to 100H) according to the present embodiment. The flat panel display manufacturing apparatus 500 is used in at least a part of a flat panel display manufacturing process. The flat panel display includes at least one of a liquid crystal display, a plasma display, and an organic EL display.

  The flat panel display manufacturing apparatus 500 includes a transfer device 600 that can transfer a workpiece S for manufacturing a flat panel display. The transport apparatus 600 includes a table apparatus 100A according to the present embodiment.

  In FIG. 18, the table device 100A is illustrated in a simplified manner. The workpiece S is supported by the table 1.

  In the present embodiment, the workpiece S is a substrate for manufacturing a flat panel display. A flat panel display is manufactured from the workpiece S. The workpiece S may include a glass plate. When a liquid crystal display is manufactured, the workpiece S may include a TFT substrate or a color filter substrate.

  The flat panel display manufacturing apparatus 500 performs processing for manufacturing a flat panel display using the workpiece S arranged at the processing position (target position) PJ1. The table apparatus 100A places the work S supported by the table 1 at the processing position PJ1. The transport device 600 includes a carry-in device 601 that can transport (load in) the workpiece S to the table 1 of the table device 100 </ b> A, and a carry-out device 602 that can transport (unload) the work S from the table 1. The work S before processing is transported (carried in) to the table 1 by the carry-in device 601. The work S supported by the table 1 is transported to the processing position PJ1 by the table apparatus 100A. The unloaded device 602 transports (unloads) the processed workpiece S from the table 1.

  The table apparatus 100A moves the table 1 and moves the workpiece S supported by the table 1 to the processing position PJ1. The table apparatus 100A can arrange the workpiece S supported by the table 1 at the processing position PJ1 with high positioning accuracy.

  For example, when the flat panel display manufacturing apparatus 500 includes a bonding apparatus that bonds two substrates, the workpiece S supported by the table 1 includes one of the two substrates. The processing position PJ1 includes a bonding position where one substrate is bonded to the other substrate. The other substrate is pressed against one substrate of the table 1 arranged at the bonding position.

  In the present embodiment, the flat panel display manufacturing apparatus 500 includes a substrate holder 501 that holds the other substrate. The substrate holder 501 functions as a processing unit that processes the workpiece S (one substrate) supported by the table 1. The substrate holder 501 makes one substrate disposed at the bonding position and the other substrate held by the substrate holder 501 face each other. The substrate holder 501 moves downward so as to press the other substrate against one substrate supported by the table 1. Thereby, two board | substrates are bonded together.

  After the workpiece S is processed at the processing position PJ1, the processed workpiece S is conveyed from the table 1 by the carry-out device 602. The workpiece S transported (unloaded) by the unloading device 602 is transported to a processing device that performs a post-process.

  In the present embodiment, the table apparatus 100A can arrange the workpiece S at the processing position PJ1. In addition, lack of positioning accuracy of the table 1 is suppressed. Therefore, generation | occurrence | production of a defective product (flat panel display) is suppressed.

  Note that the table device 100A (100B to 100H) may be used in a semiconductor manufacturing apparatus. The semiconductor manufacturing apparatus includes, for example, an exposure apparatus that forms a device pattern on the workpiece S via a projection optical system. In the exposure apparatus, the processing position PJ1 includes the image plane position (exposure position) of the projection optical system. The projection optical system functions as a processing unit that performs exposure processing on the workpiece S supported by the table 1. By disposing the workpiece S at the processing position PJ1, the semiconductor manufacturing apparatus can form a device pattern on the workpiece S via the projection optical system.

  The semiconductor manufacturing apparatus may include a film forming apparatus that forms a film on the workpiece S. When the semiconductor manufacturing apparatus includes a film forming apparatus, the processing position PJ1 includes a supply position (film forming position) to which a material for forming a film is supplied. The supply unit that supplies the material functions as a processing unit that performs the film forming process of the workpiece S supported by the table 1. By disposing the workpiece S at the processing position PJ1, a film for forming a device pattern is formed on the workpiece S.

<Eighth Embodiment>
An eighth embodiment will be described. FIG. 19 is a diagram illustrating an example of a precision machine 700 including the table device 100A (100B to 100H) according to the present embodiment. In the present embodiment, an example in which the precision machine 700 is a precision measuring machine that accurately measures a workpiece such as a precision instrument will be described.

  The precision measuring instrument 700 measures the workpiece S2. The workpiece S2 may include, for example, at least one of a flat panel display manufactured by the flat panel display manufacturing apparatus 500 and a semiconductor device manufactured by the above-described semiconductor manufacturing apparatus. The precision measuring machine 700 includes a transfer device 600B that can transfer the workpiece S2. The transport apparatus 600B includes a table apparatus 100A according to the present embodiment.

  In FIG. 19, the table apparatus 100A is illustrated in a simplified manner. The workpiece S2 is supported by the table 1.

  The precision measuring instrument 700 measures the workpiece S2 arranged at the measurement position (target position) PJ2. The table apparatus 100A places the workpiece S2 supported by the table 1 at the measurement position PJ2. The transfer device 600B includes a carry-in device 601B that can transfer (carry in) the workpiece S2 to the table 1 of the table device 100A, and a carry-out device 602B that can transfer (carry out) the workpiece S2 from the table 1. The workpiece S2 before measurement is transported (carried in) to the table 1 by the loading device 601B. The workpiece S2 supported by the table 1 is conveyed to the measurement position PJ2 by the table apparatus 100A. The workpiece S2 after measurement is conveyed (unloaded) from the table 1 by the unloading device 602B.

  The table apparatus 100A moves the table 1 and moves the workpiece S2 supported by the table 1 to the measurement position PJ2. The table device 100A can place the workpiece S2 supported by the table 1 at the measurement position PJ2 with high positioning accuracy.

  In the present embodiment, the precision measuring instrument 700 optically measures the workpiece S2 using detection light. The precision measuring instrument 700 includes an irradiation device 701 capable of emitting detection light and a light receiving device 702 capable of receiving at least part of the detection light emitted from the irradiation device 701 and reflected by the workpiece S2. In the present embodiment, the measurement position PJ2 includes a detection light irradiation position. The irradiation device 701 and the light receiving device 702 function as a processing unit that processes the workpiece S2 supported by the table 1. In the present embodiment, the irradiation device 701 and the light receiving device 702 function as a measurement unit that measures the workpiece S2 supported by the table 1. By disposing the workpiece S2 at the measurement position PJ2, the state of the workpiece S2 is optically measured.

  After the workpiece S2 is measured at the measurement position PJ2, the workpiece S2 after the measurement is conveyed from the table 1 by the carry-out device 602B.

  In the present embodiment, the table apparatus 100A can suppress the occurrence of measurement failure because the workpiece S2 can be arranged at the measurement position (target position) PJ2. That is, the precision measuring instrument 700 can satisfactorily determine whether or not the workpiece S2 is defective. Thereby, for example, it is suppressed that defective work S2 is conveyed to a back process, or shipped. Further, since the precision measuring instrument 700 can measure the workpiece S2 placed at the measurement position PJ2 by the table 1, the workpiece S2 can be precisely measured.

  Note that the three-dimensional measurement apparatus may include the table apparatus 100A according to the present embodiment, or may include a transport apparatus including the table apparatus 100A. Since the workpiece to be measured is supported by the table 1, the three-dimensional measuring apparatus can measure the workpiece placed at the target position, and therefore can accurately measure the workpiece.

<Ninth Embodiment>
A ninth embodiment will be described. FIG. 20 is a diagram illustrating an example of a precision machine 800 including the table device 100A (100B to 100H) according to the present embodiment. In the present embodiment, an example in which the precision machine 800 is a precision machine capable of performing precision machining will be described.

  The precision processing machine 800 processes the workpiece S3. The precision processing machine 800 includes a machining center, and includes a table device 100A and a processing head 801. The processing head 801 functions as a processing unit that processes the workpiece S3 supported by the table 1 of the table apparatus 100A. In the present embodiment, the processing head 801 functions as a processing unit that processes the workpiece S3 supported by the table 1 of the table apparatus 100A. The processing head 801 has a processing tool and processes the workpiece S3 supported by the table 1 of the table apparatus 100A with the processing tool. The machining head 801 is a mechanism for cutting the workpiece S3. The machining head 801 moves the machining tool in the Z-axis direction orthogonal to the movement direction of the table 1.

  The precision processing machine 800 can relatively move the processing tool and the workpiece S3 by moving the workpiece S3 in the XY plane by the table apparatus 100A and moving the processing head 801 in the Z-axis direction.

  Since the precision processing machine 800 can process the workpiece S3 on the table 1 arranged at the processing position (target position), the workpiece S3 can be precisely processed.

  In the present embodiment, the table 1 is moved in the XY plane (in the horizontal plane). In the present embodiment, the table 1 may be moved in a direction inclined with respect to the XY plane. That is, the XY plane may be parallel to the horizontal plane or may be inclined with respect to the horizontal plane.

1 Table 1A Upper surface 1B Lower surface 1H Internal space 2 Base member 2A Upper surface 2H Internal space 3 Support device 4 Table guide bearing 4A Inner ring 4B Outer ring 4C Ball 5 First slide member 5F Flange portion 5L Rod portion 6 Support member 6X First support member 6Y Second support member 7 Actuator 7X First actuator 7Y Second actuator 8 Movement system 9 Frame member 9A Upper surface 9B Lower surface 9K Opening 10 Stage 10A Upper surface 10B Lower surface 10K Opening 11 First linear bearing 12 First guide member 13 Second linear bearing 14 Second guide member 15 Ball screw mechanism 15X First ball screw mechanism 15Y Second ball screw mechanism 16 Coupling 17 Casing 18 Third guide member 19 Third linear bearing 20 Fourth guide member 21 Fourth linear bearing 22 Support portion 23 support member 24 chamber device 24K opening 25 bellows 26 support device 30 plain guide device 31 ball 32 support plate 33 second slide member 33F flange portion 33L rod portion 34 plain guide bearing 35 drive element 36 fixing member 37 spacer member 100A table device 100B Table device 100C Table device 100D Table device 100E Table device 100F Table device 100G Table device 100H Table device 500 Flat panel display manufacturing device 700 Precision machine (precision measuring machine)
800 Precision machine (Precision processing machine)
G Gap S Workpiece

Claims (14)

Table,
A base member having an upper surface facing the lower surface of the table;
A support device for supporting the table such that the lower surface of the table and the upper surface of the base member face each other with a gap between them,
The support device is a table guide bearing that guides the table in the vertical direction so that a lower surface of the table and an upper surface of the base member come into contact with each other when a vertical load of a predetermined value or more acts on the table. Having
Table device. The table has a rod-shaped first slide member guided by the table guide bearing,
The support device is
A support member that supports the table guide bearing such that the table guide bearing is disposed around the first slide member;
The table apparatus according to claim 1. A plurality of the first slide members are provided on the upper surface of the table,
A plurality of the table guide bearings are provided so as to be arranged around each of the plurality of first slide members,
The table device according to claim 2. A moving system having an actuator capable of moving the support member in a horizontal plane;
The table apparatus according to claim 2 or 3. The support device is
A frame member disposed around the table and having an upper surface to which the support member is connected;
A stage disposed around the base member;
Further comprising
The mobile system is
A first linear bearing connected to the lower surface of the frame member;
A first guide member that is disposed on the upper surface of the stage and guides the first linear bearing in a direction parallel to a first axis in a horizontal plane;
A second linear bearing connected to the lower surface of the stage;
A second guide member for guiding the second linear bearing in a direction parallel to a second axis in a horizontal plane perpendicular to the first axis;
A first actuator that generates power for moving the first linear bearing in a direction parallel to the first axis;
A second actuator for generating power for moving the second linear bearing in a direction parallel to the second axis;
Having
The table device according to claim 4. The mobile system is
A third guide member connected to the first support member among the plurality of support members;
A third linear bearing guided by the third guide member in a direction parallel to the second axis in a horizontal plane;
A fourth guide member connected to a second support member among the plurality of support members;
A fourth linear bearing guided by the fourth guide member in a direction parallel to the first axis in a horizontal plane perpendicular to the second axis;
A first actuator that moves the third linear bearing to generate power for moving the first support member in a direction parallel to the first axis;
A second actuator that moves the fourth linear bearing to generate power for moving the second support member in a direction parallel to the second axis;
Having
The table device according to claim 4. A plurality of one or both of the first actuator and the second actuator are provided,
The moving system changes the operation amount of the plurality of first actuators or the operation amount of the plurality of second actuators, and moves the table in a rotation direction about an axis parallel to a third axis orthogonal to the horizontal plane. Moving,
The table device according to claim 6. At least the table and the table guide bearing are disposed in an internal space of the chamber device,
The actuator is disposed in an external space of the chamber device.
The table apparatus as described in any one of Claims 4-7. The table is disposed between the lower surface of the table and the upper surface of the base member, and the lower surface of the table and the upper surface of the base member face each other with a gap therebetween in a horizontal direction parallel to the upper surface of the base member. A plain guide device for guiding the table;
The table apparatus as described in any one of Claims 1-8. The plane guide device has a rod-shaped second slide member,
A plain guide bearing supported by the table and movably supporting the second slide member in the vertical direction;
The table apparatus according to claim 9. Comprising a drive element for moving the plane guide device in the vertical direction;
The table apparatus according to claim 10. A table apparatus according to any one of claims 1 to 11, comprising:
Determining a position of a work supported by the table of the table device;
Positioning device. The table device according to any one of claims 1 to 11,
A processing unit for processing the work supported by the table;
A flat panel display manufacturing apparatus. The table device according to any one of claims 1 to 11,
A processing unit for processing the work supported by the table;
Precision machine equipped with.

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