JP2016099206A - Gyro sensor, electronic equipment and mobile body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a gyro sensor, electronic equipment, a mobile body or the like, which can produce an output with high accuracy.SOLUTION: The gyro sensor includes: a substrate 10; a vibrator 112; fixed drive electrodes 130, 132 and a movable drive electrode 116 to vibrate the vibrator 112; fixed monitor electrodes 160, 162 and a movable monitor electrode 118 to detect a vibration state of the vibrator 112; and a drive circuit 200 that generates a drive signal based on a signal from at least one of the fixed monitor electrodes 160, 162 and the movable monitor electrode 118 and outputs the drive signal to at least one of the fixed drive electrodes 130, 132 and the movable drive electrode 116. The movable monitor electrode 118 reciprocates; and a distance between the movable monitor electrode 118 and the fixed monitor electrodes 160, 162 in a direction orthogonal to the direction of reciprocating motion is smaller when the movable monitor electrode 118 is located at a first end that is one end in the reciprocating motion than the distance when the movable monitor electrode is located at the center of the reciprocating motion.SELECTED DRAWING: Figure 8

Description

  The present invention relates to a gyro sensor, an electronic device, a moving object, and the like.

In recent years, for example, silicon MEMS (Micro Electro Mechanical)
An angular velocity sensor (gyro sensor) for detecting an angular velocity using a (System) technology has been developed.

  Patent Document 1 discloses a gyro sensor that operates by generating a drive signal based on a signal from a monitor electrode and supplying the drive signal to the drive electrode.

JP-A-11-183178

  In the gyro sensor described in Patent Document 1, noise (particularly phase noise) included in the signal from the monitor electrode becomes an error factor of the drive signal, and as a result, an error factor of the output of the gyro sensor.

  The present invention has been made in view of the above technical problems. According to some embodiments of the present invention, it is possible to provide a gyro sensor, an electronic device, a moving body, and the like that can output with high accuracy.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following aspects or application examples.

[Application Example 1]
The gyro sensor according to this application example is
A substrate,
A vibrating body,
A fixed drive electrode fixed on the substrate and vibrating the vibrating body;
A movable drive electrode extending from the vibrating body and vibrating the vibrating body;
A fixed monitor electrode fixed on the substrate and detecting a vibration state of the vibrating body;
A movable monitor electrode extending from the vibrating body and detecting a vibration state of the vibrating body;
A drive circuit that generates a drive signal based on a signal from at least one of the fixed monitor electrode and the movable monitor electrode, and outputs the drive signal to at least one of the fixed drive electrode and the movable drive electrode;
Including
The movable monitor electrode is provided to face the fixed monitor electrode, and performs a reciprocating motion.
The distance between the movable monitor electrode and the fixed monitor electrode in the direction orthogonal to the direction of the reciprocating motion is such that one end of the reciprocating motion is greater than when the movable monitor electrode is located at the center of the reciprocating motion. Is smaller when located at the first end,
This is a gyro sensor.

  According to such a gyro sensor, since the capacitance between the fixed monitor electrode and the movable monitor electrode is increased at the end of the reciprocation (first end), the impedance is decreased. Therefore, the slope of the current waveform becomes large when the current signal from at least one of the fixed monitor electrode and the movable monitor electrode is in the vicinity of 0 (phase 0 or 180 degrees). As a result, phase noise (noise due to phase shift) included in a signal from at least one of the fixed monitor electrode and the movable monitor electrode can be suppressed. Therefore, a gyro sensor capable of outputting with high accuracy can be realized.

[Application Example 2]
In the above gyro sensor,
The distance may be smaller when the movable monitor electrode is at the second end located at the other end of the reciprocating motion than when the movable monitor electrode is located at the center of the reciprocating motion.

  According to such a gyro sensor, since the capacitance between the fixed monitor electrode and the movable monitor electrode is increased at the end of the reciprocating motion (first end and second end), the impedance is reduced. Therefore, the slope of the current waveform becomes large when the current signal from the monitor electrode is in the vicinity of 0 (phases of 0 degrees and 180 degrees). As a result, phase noise (noise due to phase shift) included in signals from the fixed monitor electrode and the movable monitor electrode can be suppressed. Therefore, a gyro sensor capable of outputting with high accuracy can be realized.

[Application Example 3]
In the above gyro sensor,
The fixed monitor electrode is provided on one side and the other side of the movable monitor electrode,
The movable monitor electrode may perform the reciprocating motion between the fixed monitor electrodes.

  According to such a gyro sensor, since the capacitance between the fixed monitor electrode and the movable monitor electrode is increased at the end of the reciprocating motion (first end and second end), the impedance is reduced. Therefore, the slope of the current waveform becomes large when the current signal from the monitor electrode is in the vicinity of 0 (phases of 0 degrees and 180 degrees). As a result, phase noise (noise due to phase shift) included in signals from the fixed monitor electrode and the movable monitor electrode can be suppressed. Therefore, a gyro sensor capable of outputting with high accuracy can be realized.

[Application Example 4]
In the above gyro sensor,
A fixed detection electrode that is fixed on the substrate and detects a signal that changes according to the vibration of the vibrating body;
A movable detection electrode that detects a signal extending from the vibrating body and changing in accordance with the vibration of the vibrating body;
A detection circuit including a synchronous detection circuit for synchronously detecting a signal from at least one of the fixed detection electrode and the movable detection electrode based on a signal from at least one of the fixed monitor electrode and the movable monitor electrode;
May further be included.

  According to such a gyro sensor, phase noise (noise due to phase shift) included in a signal from at least one of the fixed monitor electrode and the movable monitor electrode can be suppressed, so that synchronous detection can be performed with high accuracy. Therefore, a gyro sensor capable of outputting with high accuracy can be realized.

[Application Example 5]
The electronic device according to this application example is
An electronic device including any one of the above gyro sensors.

[Application Example 6]
The mobile object according to this application example is
It is a moving body characterized by including any of the above-mentioned gyro sensors.

  According to these electronic devices and moving bodies, since the gyro sensor capable of outputting with high accuracy is included, it is possible to realize electronic devices and moving bodies that can operate with high accuracy.

The top view which shows typically the functional element contained in the sensor device which concerns on this embodiment. It is sectional drawing which shows typically the functional element contained in the sensor device which concerns on this embodiment. The figure for demonstrating operation | movement of the sensor device which concerns on this embodiment. The figure for demonstrating operation | movement of the sensor device which concerns on this embodiment. The figure for demonstrating operation | movement of the sensor device which concerns on this embodiment. The figure for demonstrating operation | movement of the sensor device which concerns on this embodiment. The circuit diagram of the gyro sensor which concerns on this embodiment. FIGS. 8A to 8C are plan views showing configurations of a fixed monitor electrode and a movable monitor electrode in the first specific example. The graph which shows the normalized electric current value with respect to the X coordinate of a movable monitor electrode. FIGS. 10A to 10C are plan views showing configurations of a fixed monitor electrode and a movable monitor electrode in the second specific example. FIG. 11A to FIG. 11C are plan views showing configurations of a fixed monitor electrode and a movable monitor electrode in a third specific example. FIGS. 12A to 12C are plan views showing configurations of a fixed monitor electrode and a movable monitor electrode in a fourth specific example. The functional block diagram of the electronic device which concerns on this embodiment. FIG. 14A illustrates an example of the appearance of a smartphone that is an example of an electronic device, and FIG. 14B illustrates an example of the appearance of an arm-mounted portable device that is an example of an electronic device. The figure (top view) which shows an example of the mobile body which concerns on this embodiment.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. The drawings used are for convenience of explanation. The embodiments described below do not unduly limit the contents of the present invention described in the claims. Also, not all of the configurations described below are essential constituent requirements of the present invention.

1. Gyro sensor 1-1. Sensor Device First, a sensor device 100 included in the gyro sensor 1 according to the present embodiment will be described with reference to the drawings. FIG. 1 is a plan view schematically showing a functional element 102 included in the sensor device 100 according to the present embodiment. FIG. 2 is a cross-sectional view schematically showing the functional element 102 included in the sensor device 100 according to the present embodiment. In FIG. 1, an X axis, a Y axis, and a Z axis are shown as three axes orthogonal to each other.

As described in detail below, the sensor device 100 according to the present embodiment includes a substrate 10, a vibrating body 112, a fixed drive electrode 130 and a fixed drive electrode 132, a movable drive electrode 116, a fixed monitor electrode 160, and a fixed. The monitor electrode 162, the movable monitor electrode 118, the fixed detection electrode 140 and the fixed detection electrode 142, and the movable detection electrode 126 can be included.

  As illustrated in FIGS. 1 to 2, the sensor device 100 can include a substrate 10, a functional element 102, and a lid body 60. For convenience, the substrate 10 and the lid 60 are omitted in FIG.

  The material of the substrate 10 is, for example, glass or silicon. As shown in FIG. 2, the substrate 10 has a first surface 11 and a second surface 12 opposite to the first surface 11. In the illustrated example, the first surface 11 and the second surface 12 are surfaces parallel to the XY plane.

  The functional element 102 is provided on the substrate 10 (on the first surface 11 of the substrate 10). Hereinafter, an example in which the functional element 102 is a gyro sensor element (capacitive MEMS gyro sensor element) that detects an angular velocity around the Z axis will be described.

  As illustrated in FIG. 1, the functional element 102 includes a first structure body 106 and a second structure body 108. The first structure 106 and the second structure 108 are connected to each other along the X axis. The first structure 106 is located on the −X direction side of the second structure 108. As shown in FIG. 1, the structures 106 and 108 have, for example, a shape that is symmetric with respect to a boundary line B (a straight line along the Y axis) of both. Although not illustrated, the functional element 102 may not include the second structure 108 but may be configured by the first structure 106.

  As shown in FIG. 1, each of the structures 106 and 108 includes a vibrating body 112, a first spring portion 114, a movable drive electrode 116, a displacement portion 122, a second spring portion 124, a fixed drive electrode 130, 132, movable vibration detection electrodes 118 and 126, fixed vibration detection electrodes 140, 142, 160 and 162, and a fixed portion 150. The movable vibration detection electrodes 118 and 126 are classified into a movable monitor electrode 118 and a movable detection electrode 126. The fixed vibration detection electrodes 140, 142, 160, 162 are classified into fixed detection electrodes 140, 142 and fixed monitor electrodes 160, 162.

  The vibrating body 112, the spring portions 114 and 124, the movable drive electrode 116, the movable monitor electrode 118, the displacement portion 122, the movable detection electrode 126, and the fixed portion 150 are, for example, a silicon substrate (not shown) bonded to the substrate 10. Are formed integrally. As a result, it is possible to apply a fine processing technique used for manufacturing a silicon semiconductor device, and the functional element 102 can be downsized. The material of the functional element 102 is, for example, silicon imparted with conductivity by doping impurities such as phosphorus and boron.

  The vibrating body 112 has, for example, a frame shape (frame shape). Inside the vibrating body 112, a displacement portion 122, a movable detection electrode 126, and fixed detection electrodes 140 and 142 are provided.

  The first spring portion 114 has one end connected to the vibrating body 112 and the other end connected to the fixed portion 150. The fixing unit 150 is fixed on the substrate 10 (on the first surface 11 of the substrate 10). That is, the concave portion 14 is not provided below the fixed portion 150. The vibrating body 112 is supported by the fixed portion 150 via the first spring portion 114. In the illustrated example, four first spring portions 114 are provided in each of the first structure body 106 and the second structure body 108. Note that the fixing part 150 on the boundary line B between the first structure 106 and the second structure 108 may not be provided.

  The first spring portion 114 is configured to be able to displace the vibrating body 112 in the X-axis direction. More specifically, the first spring portion 114 has a shape extending in the X axis direction (along the X axis) while reciprocating in the Y axis direction (along the Y axis). Note that the number of the first spring portions 114 is not particularly limited as long as the vibrating body 112 can vibrate along the X axis.

  The movable drive electrode 116 is connected to the vibrating body 112. The movable drive electrode 116 extends from the vibrating body 112 in the + Y direction and the −Y direction. A plurality of movable drive electrodes 116 may be provided, and the plurality of movable drive electrodes 116 may be arranged in the X-axis direction. The movable drive electrode 116 can vibrate along the X axis with the vibration of the vibrating body 112.

  The fixed drive electrodes 130 and 132 are fixed on the substrate 10 (on the first surface 11 of the substrate 10), and are provided on the + Y direction side of the vibrating body 112 and the −Y direction side of the vibrating body 112.

  The fixed drive electrodes 130 and 132 face the movable drive electrode 116 and are provided with the movable drive electrode 116 interposed therebetween. More specifically, in the fixed drive electrodes 130 and 132 sandwiching the movable drive electrode 116, the first structure 106 is provided with the fixed drive electrode 130 on the −X direction side of the movable drive electrode 116. A fixed drive electrode 132 is provided on the + X direction side. In the second structure 108, the fixed drive electrode 130 is provided on the + X direction side of the movable drive electrode 116, and the fixed drive electrode 132 is provided on the −X direction side of the movable drive electrode 116.

  In the example shown in FIG. 1, the fixed drive electrodes 130 and 132 have a comb-like shape, and the movable drive electrode 116 has a shape that can be inserted between the comb teeth of the fixed drive electrodes 130 and 132. doing. A plurality of fixed drive electrodes 130 and 132 may be provided according to the number of movable drive electrodes 116 and arranged in the X-axis direction. The fixed drive electrodes 130 and 132 and the movable drive electrode 116 are electrodes for vibrating the vibrating body 112.

  The movable monitor electrode 118 is connected to the vibrating body 112. The movable monitor electrode 118 extends from the vibrating body 112 in the + Y direction and the −Y direction. In the example shown in FIG. 1, one movable monitor electrode 118 is provided on the + Y direction side of the vibrating body 112 of the first structure 106 and one on the + Y direction side of the vibrating body 112 of the second structure 108. A plurality of movable drive electrodes 116 are arranged between the monitor electrodes 118. Further, one movable monitor electrode 118 is provided on the −Y direction side of the vibrating body 112 of the first structure 106 and on the −Y direction side of the vibrating body 112 of the second structure 108, and the movable monitor electrode 118 is provided. A plurality of movable drive electrodes 116 are arranged in between. The planar shape of the movable monitor electrode 118 is the same as the planar shape of the movable drive electrode 116, for example. The movable monitor electrode 118 can vibrate along the X-axis with the vibration of the vibrating body 112, that is, can reciprocate.

  The fixed monitor electrodes 160 and 162 are fixed on the substrate 10 (on the first surface 11 of the substrate 10), and are provided on the + Y direction side of the vibrating body 112 and the −Y direction side of the vibrating body 112.

  The fixed monitor electrodes 160 and 162 face the movable monitor electrode 118 and are provided with the movable monitor electrode 118 interposed therebetween. More specifically, in the fixed monitor electrodes 160 and 162 sandwiching the movable monitor electrode 118, the first structure 106 is provided with the fixed monitor electrode 160 on the −X direction side of the movable monitor electrode 118. A fixed monitor electrode 162 is provided on the + X direction side. In the second structure 108, the fixed monitor electrode 160 is provided on the + X direction side of the movable monitor electrode 118, and the fixed monitor electrode 162 is provided on the −X direction side of the movable monitor electrode 118.

  The fixed monitor electrodes 160 and 162 have a comb-like shape, and the movable monitor electrode 118 has a shape that can be inserted between the comb teeth of the fixed monitor electrodes 160 and 162.

  The fixed monitor electrodes 160 and 162 and the movable monitor electrode 118 are electrodes for detecting a signal that changes in accordance with the vibration of the vibrating body 112, and are electrodes for detecting the vibration state of the vibrating body 112. More specifically, the displacement of the movable monitor electrode 118 along the X-axis causes the capacitance between the movable monitor electrode 118 and the fixed monitor electrode 160 and the relationship between the movable monitor electrode 118 and the fixed monitor electrode 162. The capacitance between them changes. As a result, the currents of the fixed monitor electrodes 160 and 162 change. By detecting this change in current, the vibration state of the vibrating body 112 can be detected.

  A more detailed configuration example of the fixed monitor electrodes 160 and 162 and the movable monitor electrode 118 will be described later in the section “1-3. Configuration of fixed monitor electrode and movable monitor electrode”.

  The displacement part 122 is connected to the vibrating body 112 via the second spring part 124. In the illustrated example, the planar shape of the displacement portion 122 is a rectangle having a long side along the Y axis. Although not shown, the displacement part 122 may be provided outside the vibrating body 112.

  The second spring portion 124 is configured to be able to displace the displacement portion 122 in the Y-axis direction. More specifically, the second spring portion 124 has a shape that extends in the Y-axis direction while reciprocating in the X-axis direction. The number of the second spring portions 124 is not particularly limited as long as the displacement portions 122 can be displaced along the Y axis.

  The movable detection electrode 126 is connected to the displacement part 122. For example, a plurality of movable detection electrodes 126 are provided. The movable detection electrode 126 extends from the displacement portion 122 in the + X direction and the −X direction.

  The fixed detection electrodes 140 and 142 are fixed on the substrate 10 (on the first surface 11 of the substrate 10). More specifically, the fixed detection electrodes 140 and 142 have one end fixed on the substrate 10 and the other end extending to the displacement part 122 side as a free end.

  The fixed detection electrodes 140 and 142 face the movable detection electrode 126 and are provided with the movable detection electrode 126 interposed therebetween. More specifically, in the fixed detection electrodes 140 and 142 sandwiching the movable detection electrode 126, in the first structure 106, the fixed detection electrode 140 is provided on the −Y direction side of the movable detection electrode 126. A fixed detection electrode 142 is provided on the + Y direction side. In the second structure 108, the fixed detection electrode 140 is provided on the + Y direction side of the movable detection electrode 126, and the fixed detection electrode 142 is provided on the −Y direction side of the movable detection electrode 126.

  In the example shown in FIG. 1, a plurality of fixed detection electrodes 140 and 142 are provided and are alternately arranged along the Y axis. The fixed detection electrodes 140 and 142 and the movable detection electrode 126 are electrodes for detecting a signal (capacitance) that changes according to the vibration of the vibrating body 112.

  As shown in FIG. 2, the lid 60 is provided on the substrate 10. The board | substrate 10 and the cover body 60 can comprise a package. The substrate 10 and the lid body 60 can form a cavity 62, and the functional element 102 can be accommodated in the cavity 62. The cavity 62 is sealed with a vacuum, for example. The material of the lid 60 is, for example, silicon or glass.

  Next, the operation of the sensor device 100 will be described. 3 to 6 are diagrams for explaining the operation of the sensor device 100. 3 to 6, the X axis, the Y axis, and the Z axis are illustrated as three axes orthogonal to each other. 3 to 6, members other than the functional element 102 are not shown, and the movable drive electrode 116, the movable monitor electrode 118, the movable detection electrode 126, the fixed drive electrodes 130 and 132, and the fixed detection electrode are further omitted. 140 and 142 and the fixed monitor electrodes 160 and 162 are omitted, and the functional element 102 is simplified.

  When a voltage is applied between the movable drive electrode 116 and the fixed drive electrodes 130 and 132 by a power source (not shown), an electrostatic force can be generated between the movable drive electrode 116 and the fixed drive electrodes 130 and 132. (See FIG. 1). Thereby, as shown in FIGS. 3 and 4, the first spring portion 114 can be expanded and contracted along the X axis, and the vibrating body 112 can be vibrated along the X axis.

  More specifically, a constant potential Vr is applied to the movable drive electrode 116 via the fixed potential wiring 40. Further, the first AC voltage is applied to the fixed drive electrode 130 via the drive wiring 20 with reference to Vr. Further, a second AC voltage whose phase is shifted by 180 degrees from the first AC voltage is applied to the fixed drive electrode 132 via the drive wiring 21 as a reference.

  Here, in the fixed drive electrodes 130 and 132 sandwiching the movable drive electrode 116, the first structure 106 includes the fixed drive electrode 130 on the −X direction side of the movable drive electrode 116, and the + X direction side of the movable drive electrode 116. Is provided with a fixed drive electrode 132 (see FIG. 1). In the second structure 108, the fixed drive electrode 130 is provided on the + X direction side of the movable drive electrode 116, and the fixed drive electrode 132 is provided on the −X direction side of the movable drive electrode 116 (see FIG. 1). Therefore, the first AC voltage and the second AC voltage cause the vibrating body 112a of the first structure body 106 and the vibrating body 112b of the second structure body 108 to have opposite phases and a predetermined frequency along the X axis. Can be vibrated. In the example shown in FIG. 3, the vibrating body 112a is displaced in the α1 direction, and the vibrating body 112b is displaced in the α2 direction opposite to the α1 direction. In the example shown in FIG. 4, the vibrating body 112a is displaced in the α2 direction, and the vibrating body 112b is displaced in the α1 direction.

  The displacement part 122 is displaced along the X axis with the vibration of the vibrating body 112. Similarly, the movable detection electrode 126 (see FIG. 1) is displaced along the X axis with the vibration of the vibrating body 112.

  As shown in FIGS. 5 and 6, when an angular velocity ω around the Z axis is applied to the functional element 102 in a state where the vibrating bodies 112 a and 112 b vibrate along the X axis, Coriolis force acts and the displacement The part 122 is displaced along the Y axis. In other words, the displacement portion 122a connected to the vibrating body 112a and the displacement portion 122b connected to the vibrating body 112b are displaced in opposite directions along the Y axis. In the example shown in FIG. 5, the displacement part 122a is displaced in the β1 direction, and the displacement part 122b is displaced in the β2 direction opposite to the β1 direction. In the example shown in FIG. 6, the displacement part 122a is displaced in the β2 direction, and the second displacement part 122b is displaced in the β1 direction.

  As the displacement parts 122a and 122b are displaced along the Y axis, the distance between the movable detection electrode 126 and the fixed detection electrode 140 changes (see FIG. 1). Similarly, the distance between the movable detection electrode 126 and the fixed detection electrode 142 changes (see FIG. 1). Therefore, the electrostatic capacitance between the movable detection electrode 126 and the fixed detection electrode 140 changes. Similarly, the capacitance between the movable detection electrode 126 and the fixed detection electrode 142 changes.

In the sensor device 100, by applying a voltage between the movable detection electrode 126 and the fixed detection electrode 140 via the detection wiring 30 and the fixed potential wiring 40, the gap between the movable detection electrode 126 and the fixed detection electrode 140 is set. The amount of change in capacitance can be detected (see FIG. 1). Further, by applying a voltage between the movable detection electrode 126 and the fixed detection electrode 142 via the detection wiring 31 and the fixed potential wiring 40, the electrostatic capacitance between the movable detection electrode 126 and the fixed detection electrode 142. Can be detected (see FIG. 1). In this way, the sensor device 100 can obtain the angular velocity ω around the Z axis based on the amount of change in capacitance between the movable detection electrode 126 and the fixed detection electrodes 140 and 142.

  Further, in the sensor device 100, the vibration bodies 112a and 112b vibrate along the X axis, whereby the distance between the movable monitor electrode 118 and the fixed monitor electrode 160 changes (see FIG. 1). Similarly, the distance between the movable monitor electrode 118 and the fixed monitor electrode 162 changes (see FIG. 1). Therefore, the electrostatic capacitance between the movable monitor electrode 118 and the fixed monitor electrode 160 changes. Similarly, the capacitance between the movable monitor electrode 118 and the fixed monitor electrode 162 changes. Along with this, the current flowing through the fixed monitor electrodes 160 and 162 changes. The vibration state of the vibrating bodies 112a and 112b can be detected (monitored) by this change in current.

1-2. Driving Circuit and Detection Circuit FIG. 7 is a circuit diagram of the gyro sensor 1 according to this embodiment. The gyro sensor 1 includes the above-described sensor device 100, a drive circuit 200, and a detection circuit 300.

  The drive circuit 200 generates a drive signal based on a signal from at least one of the fixed monitor electrodes 160 and 162 and the movable monitor electrode 118, and outputs a drive signal to at least one of the fixed drive electrodes 130 and 132 and the movable drive electrode 116. To do. In the present embodiment, the drive circuit 200 generates a drive signal based on signals from the fixed monitor electrodes 160 and 162 and outputs the drive signal to the fixed drive electrodes 130 and 132 and the movable drive electrode 116.

  The drive circuit 200 outputs a drive signal to drive the sensor device 100 and receives a feedback signal from the sensor device 100. Thereby, the sensor device 100 is excited. The detection circuit 300 receives a detection signal from the sensor device 100 driven by the drive signal, and extracts an angular velocity component based on the Coriolis force from the detection signal.

  The drive circuit 200 in this embodiment includes an amplifier circuit 202, a filter circuit 204, an AGC (automatic gain control circuit) 206, and an amplifier circuit 208.

  When the vibrating body 112 of the sensor device 100 vibrates, a current based on a change in capacitance is output from the fixed monitor electrodes 160 and 162 as a feedback signal and input to the amplifier circuit 202. The amplifier circuit 202 outputs an alternating voltage signal having the same frequency as the vibration frequency of the vibrating body 112.

  The AC voltage signal output from the amplifier circuit 202 is input to the filter circuit 204. The filter circuit 204 removes unnecessary frequency components from the input AC voltage signal. As the filter circuit 204, for example, a band pass filter can be adopted.

  The AC voltage signal output from the filter circuit 204 is input to an AGC (automatic gain control circuit) 204. The AGC 204 controls the gain so as to hold the amplitude of the input AC voltage signal at a constant value, and outputs the AC voltage signal after gain control to the amplifying circuit 208 and the synchronous detection circuit 306 (described later) of the detection circuit 300. .

  The amplifier circuit 208 amplifies the input AC voltage signal to generate a drive signal and outputs it to the fixed drive electrodes 130 and 132. The sensor device 100 is driven by a drive signal (AC voltage signal) input to the fixed drive electrodes 130 and 132.

  The detection circuit 300 in this embodiment includes an amplifier circuit 302, a phase shift circuit 304, a synchronous detection circuit 306, a filter circuit 308, and an amplifier circuit 310.

  The signals output from the fixed detection electrodes 140 and 142 include an angular velocity component based on the Coriolis force acting on the sensor device 100 and a self-vibration component (leakage signal component) based on the excitation vibration of the sensor device 100. The detection circuit 300 extracts an angular velocity component from signals output from the fixed detection electrodes 140 and 142.

  When the vibrating body 112 of the sensor device 100 vibrates, a current based on the capacitance change is output from the fixed detection electrodes 140 and 142 and input to the amplifier circuit 302. The amplifier circuit 302 outputs an AC voltage signal to the phase shift circuit 304.

  The phase shift circuit 304 advances the phase of the input AC voltage signal by 90 degrees and outputs it to the synchronous detection circuit 306.

  The synchronous detection circuit 306 synchronously detects a signal from at least one of the fixed detection electrodes 140 and 142 and the movable detection electrode 126 based on a signal from at least one of the fixed monitor electrodes 160 and 162 and the movable monitor electrode 118. In the present embodiment, the synchronous detection circuit 306 performs synchronous detection on the signals from the fixed detection electrodes 140 and 142 based on the signals from the fixed monitor electrodes 160 and 162. In the example shown in FIG. 7, the synchronous detection circuit 306 synchronously detects the output signal of the phase shift circuit 304 based on the output signal of the AGC 206. The angular velocity component signal extracted by the synchronous detection circuit 306 is input to the filter circuit 308.

  The filter circuit 308 is composed of a low-pass filter that removes a high-frequency component from the angular velocity component signal and converts it into a DC voltage signal. The filter circuit 308 outputs the output signal to the amplifier circuit 310.

  The amplifier circuit 310 amplifies the input signal and outputs a voltage signal based on the angular velocity.

1-3. Configuration of fixed monitor electrode and movable monitor electrode 1-3-1. First Specific Example FIGS. 8A to 8C are plan views showing configurations of the fixed monitor electrodes 160 and 162 and the movable monitor electrode 118 in the first specific example.

  The movable monitor electrode 118 is provided to face the fixed monitor electrodes 160 and 162, and reciprocates. In the example shown in FIGS. 8A to 8C, the movable monitor electrode 118 reciprocates in the X-axis direction.

  In this specific example, the fixed monitor electrodes 160 and 162 are provided on one side and the other side of the movable monitor electrode 118, and the movable monitor electrode 118 reciprocates between the fixed monitor electrodes 160 and 162. In the example shown in FIGS. 8A to 8C, the fixed monitor electrode 160 is provided on the negative side of the X axis of the movable monitor electrode 118, and the fixed monitor electrode 162 is the X axis of the movable monitor electrode 118. It is provided on the positive side.

FIG. 8A shows a case where the movable monitor electrode 118 is positioned at the center of the reciprocating motion. FIG. 8B shows a case where the movable monitor electrode 118 is located at the first end which is one end of the reciprocating motion. FIG. 8C shows a case where the movable monitor electrode 118 is located at the second end which is the other end of the reciprocating motion.

  In the example shown in FIG. 8A and FIG. 8B, the shortest distance between the movable monitor electrode 118 and the fixed monitor electrode 160 in the direction (Y-axis direction) orthogonal to the direction of the reciprocating motion of the movable monitor electrode 118. The distance is smaller when the movable monitor electrode 118 is located at the first end, which is one end of the reciprocation, than when the movable monitor electrode 118 is located at the center of the reciprocation.

  In the example shown in FIGS. 8A and 8B, the narrowed portion 160a is provided such that the interval between the fixed monitor electrodes 160 in the Y-axis direction is smaller on the negative side of the X-axis than on the positive side. . Therefore, the shortest distance between the movable monitor electrode 118 and the fixed monitor electrode 160 in the direction orthogonal to the reciprocating direction of the movable monitor electrode 118 (Y-axis direction) is d0 in FIG. 8A and FIG. ), If d1, d1 <d0.

  In the example shown in FIGS. 8A and 8C, the shortest distance between the movable monitor electrode 118 and the fixed monitor electrode 162 in the direction (Y-axis direction) orthogonal to the reciprocating direction of the movable monitor electrode 118. The distance is smaller when the movable monitor electrode 118 is located at the second end, which is the other end of the reciprocation, than when the movable monitor electrode 118 is located at the center of the reciprocation.

  In the example shown in FIG. 8A and FIG. 8C, the narrowed portion 162a is provided so that the interval between the fixed monitor electrodes 162 in the Y-axis direction is smaller on the positive side of the X-axis than on the negative side. . Therefore, the shortest distance between the movable monitor electrode 118 and the fixed monitor electrode 162 in the direction orthogonal to the reciprocating direction of the movable monitor electrode 118 (Y-axis direction) is d0 in FIG. 8A and FIG. ), If d2, d2 <d0.

  FIG. 9 is a graph showing the normalized current value with respect to the X coordinate of the movable monitor electrode 118. The horizontal axis in FIG. 9 represents the displacement in the X direction from the center of the reciprocating motion, and the vertical axis represents the normalized current value. FIG. 9 shows a case where the movable monitor electrode 118 transitions from the state shown in FIG. 8A to the state shown in FIG. The standardized current value is a value obtained by standardizing the current value of the current signal output from the fixed monitor electrodes 160 and 162 and input to the amplifier circuit 202 of the drive circuit 200. In FIG. 9, the case of d2 <d0 (in the case of this specific example) is indicated by a solid line, and the case of d2 = d0 (in the case of a comparative example) is indicated by a broken line.

  As shown in FIG. 9, in the case of this specific example, the slope of the current value in the vicinity of the second end is larger than that of the comparative example. Note that the same tendency as in the second terminal state is exhibited in the first terminal state shown in FIG.

  As described above, according to the gyro sensor 1 of this specific example, the capacitance between the fixed monitor electrodes 160 and 162 and the movable monitor electrode 118 becomes large at the end of the reciprocating motion (first end or second end). Impedance is reduced. Therefore, the slope of the current waveform increases when the current signal from at least one of the fixed monitor electrodes 160 and 162 and the movable monitor electrode 118 is near 0 (phase 0 or 180 degrees). As a result, phase noise (noise due to phase shift) included in a signal from at least one of the fixed monitor electrodes 160 and 162 and the movable monitor electrode 118 can be suppressed. Therefore, the gyro sensor 1 capable of outputting with high accuracy can be realized.

Further, according to the gyro sensor 1 of this specific example, the capacitance between the fixed monitor electrodes 160 and 162 and the movable monitor electrode 118 becomes large at the end of the reciprocating motion (first end and second end), so that the impedance Becomes smaller. Therefore, the slope of the current waveform increases when the current signal from at least one of the fixed monitor electrodes 160 and 162 and the movable monitor electrode 118 is near 0 (phase 0 or 180 degrees). As a result, phase noise (noise due to phase shift) included in a signal from at least one of the fixed monitor electrodes 160 and 162 and the movable monitor electrode 118 can be suppressed. Therefore, the gyro sensor 1 capable of outputting with high accuracy can be realized.

  Further, according to the gyro sensor 1 of this specific example, phase noise (noise due to phase shift) included in a signal from at least one of the fixed monitor electrodes 160 and 162 and the movable monitor electrode 118 can be suppressed. In 306, synchronous detection can be performed with high accuracy. Therefore, the gyro sensor 1 capable of outputting with high accuracy can be realized.

  Further, according to the gyro sensor 1 of this specific example, since the distance between the fixed monitor electrodes 160 and 162 and the movable monitor electrode 118 is wide at the center of the reciprocating motion, the manufacture is easy.

1-3-2. Second Specific Example FIGS. 10A to 10C are plan views showing configurations of the fixed monitor electrodes 160 and 162 and the movable monitor electrode 118 in the second specific example.

  The movable monitor electrode 118 is provided to face the fixed monitor electrodes 160 and 162, and reciprocates. In the example shown in FIGS. 10A to 10C, the movable monitor electrode 118 reciprocates in the X-axis direction.

  In this specific example, the fixed monitor electrodes 160 and 162 are provided on one side and the other side of the movable monitor electrode 118, and the movable monitor electrode 118 reciprocates between the fixed monitor electrodes 160 and 162. In the example shown in FIGS. 10A to 10C, the fixed monitor electrode 160 is provided on the negative side of the X axis of the movable monitor electrode 118, and the fixed monitor electrode 162 is the X axis of the movable monitor electrode 118. It is provided on the positive side.

  FIG. 10A shows a case where the movable monitor electrode 118 is positioned at the center of the reciprocating motion. FIG. 10B shows a case where the movable monitor electrode 118 is located at the first end which is one end of the reciprocating motion. FIG. 10C shows a case where the movable monitor electrode 118 is located at the second end which is the other end of the reciprocating motion.

  In the example shown in FIG. 10A and FIG. 10B, the shortest distance between the movable monitor electrode 118 and the fixed monitor electrode 160 in the direction (Y-axis direction) orthogonal to the reciprocating direction of the movable monitor electrode 118. The distance is smaller when the movable monitor electrode 118 is located at the first end, which is one end of the reciprocation, than when the movable monitor electrode 118 is located at the center of the reciprocation.

  In the example shown in FIGS. 10A and 10B, the narrowed portion 160a is provided such that the interval between the fixed monitor electrodes 160 in the Y-axis direction is smaller on the negative side of the X-axis than on the positive side. . In addition, a wide portion 118a is provided so that the width in the Y-axis direction near the center in the X-axis direction of the movable monitor electrode 118 is wider than the end portion in the X-axis direction. Therefore, the shortest distance between the movable monitor electrode 118 and the fixed monitor electrode 160 in the direction orthogonal to the reciprocating direction of the movable monitor electrode 118 (Y-axis direction) is d0 in FIG. 10A and FIG. ), If d1 or d11, d1 <d0 or d11 <d0.

  In the example shown in FIGS. 10A and 10C, the shortest distance between the movable monitor electrode 118 and the fixed monitor electrode 162 in the direction (Y-axis direction) orthogonal to the reciprocating direction of the movable monitor electrode 118. The distance is smaller when the movable monitor electrode 118 is located at the second end, which is the other end of the reciprocation, than when the movable monitor electrode 118 is located at the center of the reciprocation.

  In the example shown in FIGS. 10A and 10C, the narrowed portion 162a is provided such that the interval between the fixed monitor electrodes 162 in the Y-axis direction is smaller on the positive side of the X-axis than on the negative side. . In addition, a wide portion 118b is provided so that the width in the Y-axis direction in the vicinity of the center in the X-axis direction of the movable monitor electrode 118 is wider than the end portion in the X-axis direction. Therefore, the shortest distance between the movable monitor electrode 118 and the fixed monitor electrode 162 in the direction orthogonal to the reciprocating direction of the movable monitor electrode 118 (Y-axis direction) is d0 in FIG. 10A and FIG. ), If d2 or d21, d2 <d0 or d21 <d0.

  According to this specific example, the movable monitor electrode 118 has the wide portions 118a and 118b in addition to the narrowed portion 160a of the fixed monitor electrode 160 and the narrowed portion 162a of the fixed monitor electrode 162, so that the capacitance is larger than that of the first specific example. Can be bigger. Moreover, the same effect is produced for the same reason as in the first specific example.

1-3-3. Third Specific Example FIGS. 11A to 11C are plan views showing configurations of the fixed monitor electrode 160 and the movable monitor electrode 118 in the third specific example. Although the configuration on the fixed monitor electrode 162 side is not illustrated in FIGS. 11A to 11C, the configuration can be the same as that on the fixed monitor electrode 160 side.

  FIG. 11A shows a case where the movable monitor electrode 118 is positioned at the center of the reciprocating motion. FIG. 11B shows a case where the movable monitor electrode 118 is located at the first end which is one end of the reciprocating motion. FIG. 11C shows a case where the movable monitor electrode 118 is located at the second end which is the other end of the reciprocating motion.

  In the example shown in FIGS. 11A and 11B, the shortest distance between the movable monitor electrode 118 and the fixed monitor electrode 160 in the direction (Y-axis direction) orthogonal to the direction of the reciprocating motion of the movable monitor electrode 118. The distance is smaller when the movable monitor electrode 118 is located at the first end, which is one end of the reciprocation, than when the movable monitor electrode 118 is located at the center of the reciprocation.

  In the example shown in FIGS. 11A and 11B, a plurality of constricted portions 160a are provided so that the interval between the fixed monitor electrodes 160 in the Y-axis direction is small. The movable monitor electrode 118 has a plurality of wide portions 118a so that the width in the Y-axis direction is widened. Therefore, the shortest distance between the movable monitor electrode 118 and the fixed monitor electrode 160 in the direction orthogonal to the reciprocating direction of the movable monitor electrode 118 (Y-axis direction) is d0 in FIG. 11A and FIG. ), If d1, d1 <d0.

  In the example shown in FIGS. 11A and 11C, the shortest distance between the movable monitor electrode 118 and the fixed monitor electrode 160 in the direction (Y-axis direction) orthogonal to the reciprocating direction of the movable monitor electrode 118. The distance is smaller when the movable monitor electrode 118 is located at the second end, which is the other end of the reciprocation, than when the movable monitor electrode 118 is located at the center of the reciprocation.

  In the example shown in FIGS. 11A and 11C, a plurality of constricted portions 160a are provided so that the interval between the fixed monitor electrodes 160 in the Y-axis direction is small. The movable monitor electrode 118 has a plurality of wide portions 118a so that the width in the Y-axis direction is widened. Therefore, the shortest distance between the movable monitor electrode 118 and the fixed monitor electrode 160 in the direction orthogonal to the reciprocating direction of the movable monitor electrode 118 (Y-axis direction) is d0 in FIG. 11A and FIG. ), If d2, d2 <d0.

According to this specific example, by having the plurality of constricted portions 160a of the fixed monitor electrode 160 and the plurality of wide portions 118a of the movable monitor electrode 118, the capacity can be made larger than that of the first specific example and the second specific example. Moreover, the same effect is produced for the same reason as in the first specific example.

1-3-4. Fourth Specific Example FIGS. 12A to 12C are plan views showing configurations of the fixed monitor electrode 160 and the movable monitor electrode 118 in the fourth specific example. Although the configuration on the fixed monitor electrode 162 side is not illustrated in FIGS. 12A to 12C, the configuration can be the same as that on the fixed monitor electrode 160 side.

  FIG. 12A shows a case where the movable monitor electrode 118 is positioned at the center of the reciprocating motion. FIG. 12B shows a case where the movable monitor electrode 118 is located at the first end which is one end of the reciprocating motion. FIG. 12C shows a case where the movable monitor electrode 118 is located at the second end which is the other end of the reciprocating motion.

  In the example shown in FIGS. 12A and 12B, the shortest distance between the movable monitor electrode 118 and the fixed monitor electrode 160 in the direction (Y-axis direction) orthogonal to the reciprocating direction of the movable monitor electrode 118. The distance is smaller when the movable monitor electrode 118 is located at the first end, which is one end of the reciprocation, than when the movable monitor electrode 118 is located at the center of the reciprocation.

  In the example shown in FIGS. 12A and 12B, a plurality of fixed monitor electrodes 160 have a plurality of intervals so that the interval in the Y-axis direction becomes smaller at the negative end and the positive end of the X axis. It has a narrowed portion 160a. In addition, a wide portion 118a is provided so that the width in the Y-axis direction in the vicinity of the end portion of the movable monitor electrode 118 in the X-axis direction is wider than that in the vicinity of the center in the X-axis direction. Therefore, the shortest distance between the movable monitor electrode 118 and the fixed monitor electrode 160 in the direction orthogonal to the reciprocating direction of the movable monitor electrode 118 (Y-axis direction) is d0 in FIG. 12A and FIG. ), If d1, d1 <d0.

  In the example shown in FIGS. 12A and 12C, the shortest distance between the movable monitor electrode 118 and the fixed monitor electrode 160 in the direction (Y-axis direction) orthogonal to the reciprocating direction of the movable monitor electrode 118. The distance is smaller when the movable monitor electrode 118 is located at the second end, which is the other end of the reciprocation, than when the movable monitor electrode 118 is located at the center of the reciprocation.

  In the example shown in FIG. 12A and FIG. 12C, a plurality of fixed monitor electrodes 160 have a plurality of intervals so that the interval in the Y-axis direction becomes smaller at the negative end and the positive end of the X axis. It has a narrowed portion 160a. The movable monitor electrode 118 has a plurality of wide portions 118a so that the width in the Y-axis direction near the center in the X-axis direction is wider than the end portion in the X-axis direction. Therefore, the shortest distance between the movable monitor electrode 118 and the fixed monitor electrode 160 in the direction orthogonal to the reciprocating direction of the movable monitor electrode 118 (Y-axis direction) is d0 in FIG. 12A and FIG. ), If d2, d2 <d0.

  According to this specific example, by having the plurality of constricted portions 160a of the fixed monitor electrode 160 and the wide portion 118a of the movable monitor electrode 118, the capacity can be made larger than those of the first specific example and the second specific example. Moreover, the same effect is produced for the same reason as in the first specific example.

1-3-5. In the above-described specific example, the movable monitor electrode 118 reciprocates between the fixed monitor electrode 160 and the fixed monitor electrode 162. However, the movable monitor electrode 118 may have only the fixed monitor electrode 160. Even in this case, the same effect is obtained for the same reason as in the above-described specific examples. In particular, the configurations of the third specific example and the fourth specific example are more preferable because the capacitance change can be configured symmetrically between the first end and the second end of the reciprocating motion.

  In the specific example described above, the fixed drive electrodes 130 and 132 and the movable drive electrode 116 are configured to have neither a narrowed portion nor a wide portion. This is because the waveform of the drive signal is preferably close to a sine wave. Even when the fixed drive electrodes 130 and 132 and the movable drive electrode 116 have narrow portions or wide portions, the effects of the specific examples described above are not hindered.

2. Electronic Device FIG. 13 is a functional block diagram of an electronic device 500 according to this embodiment. In addition, the same code | symbol is attached | subjected to the structure similar to each embodiment mentioned above, and detailed description is abbreviate | omitted.

  The electronic device 500 according to the present embodiment is an electronic device 500 including the gyro sensor 1. In the example illustrated in FIG. 13, the electronic device 500 includes a gyro sensor 1, an arithmetic processing device 510, an operation unit 530, a ROM (Read Only Memory) 540, a RAM (Random Access Memory) 550, a communication unit 560, a display unit 570, A sound output unit 580 is included. Note that the electronic apparatus 500 according to the present embodiment may be configured such that some of the components (each unit) illustrated in FIG. 13 are omitted or changed, or other components are added.

  The arithmetic processing unit 510 performs various calculation processes and control processes according to programs stored in the ROM 540 and the like. Specifically, the arithmetic processing unit 510 performs various processes according to the output signal of the gyro sensor 1 and the operation signal from the operation unit 530, the process of controlling the communication unit 560 to perform data communication with the outside, and the display A process of transmitting a display signal for displaying various information on the unit 570, a process of outputting various sounds on the sound output unit 580, and the like are performed.

  The operation unit 530 is an input device including operation keys, button switches, and the like, and outputs an operation signal corresponding to an operation by the user to the arithmetic processing unit 510.

  The ROM 540 stores programs, data, and the like for the arithmetic processing unit 510 to perform various calculation processes and control processes.

  The RAM 550 is used as a work area of the arithmetic processing unit 510, and temporarily stores programs and data read from the ROM 540, data input from the operation unit 530, arithmetic results executed by the arithmetic processing unit 510 according to various programs, and the like. To remember.

  The communication unit 560 performs various controls for establishing data communication between the arithmetic processing device 510 and an external device.

  The display unit 570 is a display device configured by an LCD (Liquid Crystal Display), an electrophoretic display, or the like, and displays various types of information based on a display signal input from the arithmetic processing unit 510.

  The sound output unit 580 is a device that outputs sound such as a speaker.

  Since the electronic device 500 according to the present embodiment includes the gyro sensor 1 that can output with high accuracy, the electronic device 500 with high operation accuracy can be realized.

Various electronic devices can be considered as the electronic device 500. For example, personal computers (for example, mobile personal computers, laptop personal computers, tablet personal computers), mobile terminals such as mobile phones, digital still cameras, inkjet discharge devices (for example, inkjet printers), routers and switches Storage area network equipment, local area network equipment, mobile terminal base station equipment, TV, video camera, video recorder, car navigation device, pager, electronic notebook (including communication functions), electronic dictionary, calculator, electronic Game equipment, game controllers, word processors, workstations, videophones, security TV monitors, electronic binoculars, POS (point of sale) terminals, medical equipment Instruments (for example, electronic thermometers, blood pressure monitors, blood glucose meters, electrocardiogram measuring devices, ultrasonic diagnostic devices, electronic endoscopes), fish detectors, various measuring instruments, measuring instruments (for example, vehicles, aircraft, ship instruments), Flight simulators, head mounted displays, motion traces, motion tracking, motion controllers, PDR (pedestrian position and orientation measurement), and the like.

  14A illustrates an example of the appearance of a smartphone that is an example of the electronic device 500, and FIG. 14B illustrates an example of the appearance of an arm-mounted portable device that is an example of the electronic device 500. It is. A smartphone that is the electronic device 500 illustrated in FIG. 14A includes a button as the operation portion 530 and an LCD as the display portion 570. An arm-mounted portable device that is the electronic device 500 illustrated in FIG. 14B includes a button and a crown as the operation portion 530, and an LCD as the display portion 570. Since these electronic devices 500 are configured to include the gyro sensor 1 capable of outputting with high accuracy, the electronic device 500 with high operation accuracy can be realized.

3. FIG. 15 is a diagram (top view) illustrating an example of the moving object 400 according to the present embodiment. In addition, the same code | symbol is attached | subjected to the structure similar to each embodiment mentioned above, and detailed description is abbreviate | omitted.

  The moving body 400 according to the present embodiment is a moving body 400 including the gyro sensor 1. In the example shown in FIG. 15, the moving object 400 includes a controller 420 that performs various controls such as an engine system, a brake system, and a keyless entry system, a controller 430, a controller 440, a battery 450, and a backup battery 460. ing. Note that the moving body 400 according to the present embodiment may be configured such that some of the components (each unit) illustrated in FIG. 15 are omitted or changed, or other components are added.

  Since the mobile body 400 according to the present embodiment includes the gyro sensor 1 that can output with high accuracy, the mobile body 400 with high operation accuracy can be realized.

  As such a moving body 400, various moving bodies can be considered, and examples thereof include automobiles (including electric automobiles), aircraft such as jets and helicopters, ships, rockets, and artificial satellites.

  As mentioned above, although this embodiment or the modification was demonstrated, this invention is not limited to these this embodiment or a modification, It is possible to implement in a various aspect in the range which does not deviate from the summary.

  The present invention includes configurations that are substantially the same as the configurations described in the embodiments (for example, configurations that have the same functions, methods, and results, or configurations that have the same objects and effects). In addition, the invention includes a configuration in which a non-essential part of the configuration described in the embodiment is replaced. In addition, the present invention includes a configuration that achieves the same effect as the configuration described in the embodiment or a configuration that can achieve the same object. In addition, the invention includes a configuration in which a known technique is added to the configuration described in the embodiment.

DESCRIPTION OF SYMBOLS 1 ... Gyro sensor, 10 ... Board | substrate, 11 ... 1st surface, 12 ... 2nd surface, 14 ... Recessed part, 60 ... Lid, 62 ... Cavity, 100 ... Sensor device, 102 ... Functional element, 106 ... 1st structure 108, second structure, 112, vibrating body, 112a, vibrating body, 112b, vibrating body, 114, first spring part, 116, movable drive electrode, 118, movable monitor electrode, 118a, 118b, wide part, 122 ... Displacement part 122a ... Displacement part 122b ... Displacement part 124 ... Second spring part 126 ... Movable detection electrode 130, 132 ... Fixed drive electrode 140, 142 ... Fixed detection electrode 150 ... Fixed part 160 162 ... fixed monitor electrode, 160a, 162a ... constriction, 200 ... drive circuit, 202 ... amplification circuit, 204 ... filter circuit, 206 ... AGC, 208 ... amplification circuit, 3 DESCRIPTION OF SYMBOLS 0 ... Detection circuit, 302 ... Amplification circuit, 304 ... Phase shift circuit, 306 ... Synchronous detection circuit, 308 ... Filter circuit, 310 ... Amplification circuit, 400 ... Moving body, 420 ... Controller, 430 ... Controller, 440 ... Controller, 450 ... Battery, 460 ... Backup battery, 500 ... Electronic device, 510 ... Arithmetic processing unit, 530 ... Operation part, 540 ... ROM, 550 ... RAM, 560 ... Communication part, 570 ... Display part, 580 ... Audio output part

Claims (6)

A substrate,
A vibrating body,
A fixed drive electrode fixed on the substrate and vibrating the vibrating body;
A movable drive electrode extending from the vibrating body and vibrating the vibrating body;
A fixed monitor electrode fixed on the substrate and detecting a vibration state of the vibrating body;
A movable monitor electrode extending from the vibrating body and detecting a vibration state of the vibrating body;
A drive circuit that generates a drive signal based on a signal from at least one of the fixed monitor electrode and the movable monitor electrode, and outputs the drive signal to at least one of the fixed drive electrode and the movable drive electrode;
Including
The movable monitor electrode is provided to face the fixed monitor electrode, and performs a reciprocating motion.
The distance between the movable monitor electrode and the fixed monitor electrode in the direction orthogonal to the direction of the reciprocating motion is such that one end of the reciprocating motion is greater than when the movable monitor electrode is located at the center of the reciprocating motion. Is smaller when located at the first end,
This is a gyro sensor. The gyro sensor according to claim 1,
The distance is smaller when the movable monitor electrode is the second end located at the other end of the reciprocating motion than when the movable monitor electrode is located at the center of the reciprocating motion,
This is a gyro sensor. The gyro sensor according to claim 1 or 2,
The fixed monitor electrode is provided on one side and the other side of the movable monitor electrode,
The movable monitor electrode performs the reciprocating motion between the fixed monitor electrodes;
This is a gyro sensor. The gyro sensor according to any one of claims 1 to 3,
A fixed detection electrode that is fixed on the substrate and detects a signal that changes according to the vibration of the vibrating body;
A movable detection electrode that detects a signal extending from the vibrating body and changing in accordance with the vibration of the vibrating body;
A detection circuit including a synchronous detection circuit for synchronously detecting a signal from at least one of the fixed detection electrode and the movable detection electrode based on a signal from at least one of the fixed monitor electrode and the movable monitor electrode;
Further comprising a gyro sensor.   An electronic apparatus comprising the gyro sensor according to claim 1.   A moving body comprising the gyro sensor according to claim 1.