JP2016099128A - Measurement device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a measurement device that allows a relative position of a measurement head with respect to a measurement portion of a measurement object to accurately and easily adjusted regarding a measurement device using measurement means having the measurement head.SOLUTION: A measurement device unit 1A measuring a dimension of a measurement object W1 comprises: a measurement base 10 that arranges the measurement object W1; an air micrometer 20 that has an air jet nozzle 21; a drive cylinder 31 that moves the air jet nozzle 21 in a direction where a dimension displacement displaces for arranging the air jet nozzle 21 and the measurement object W1 at a prescribed position relation; a first engaging part 30A that corresponds to the air jet nozzle 21; and a second engaging part 10A that corresponds to the measurement base 10. The first engaging part and the second engaging part abut against each other in the dimension displacement direction, which in turn the relative position between the measurement base 10 and the air jet nozzle 21 is set to a prescribed dimension.SELECTED DRAWING: Figure 5

Description

  The present invention relates to a measuring apparatus having measuring means having a measuring element and measuring a dimensional displacement amount at a measurement site of an object to be measured by the measuring element of the measuring means.

  As is well known, for example, a measuring apparatus using an air micrometer (measuring means) places a measurement object at a predetermined position so that a nozzle (measuring element) is opposed to a measurement site and ejects air from the nozzle. Then, the dimension of the measurement object is measured by detecting the distance (dimensional displacement amount) from the measurement site (see, for example, Patent Document 1).

  Further, in a measuring apparatus using an electric micrometer (measuring means), an object to be measured is arranged at a predetermined position, and a contact (measuring element) of the electric micrometer is brought into contact with a measurement site of the object to be measured. Then, it is moved to a predetermined position, and the dimension of the measurement object is measured by electrically detecting the displacement of the contact corresponding to the amount of entry / exit of the measurement site (dimensional displacement amount).

  As described above, in a measuring apparatus using a measuring unit having a measuring element, the measuring part of the measuring object and the measuring element (for example, a nozzle or a contactor) of the measuring unit are in a predetermined positional relationship, and the measuring element Thus, the dimension of the measurement object is measured by detecting the amount of entry / exit (dimensional displacement) of the measurement site.

JP 2001-165641 A

  However, since a measuring apparatus using a measuring unit having such a probe requires high measurement accuracy, the relative positional relationship between the measuring base on which the measurement object is placed and the measuring unit is accurately determined ( It was necessary to make adjustments with high accuracy, and a lot of adjustment time was required for maintenance and the like.

  In addition, when there are multiple types of measurement objects with different dimensions (product, model, measurement site dimensions, etc.), it is necessary to prepare a dedicated measurement device for each measurement object according to the type of measurement object. . As a result, the capital investment cost required for the preparation of the measuring device increases, and it is necessary to replace the measuring device for each product having different dimensions, which is a factor of reducing production efficiency.

  The present invention has been made in consideration of such circumstances, and relates to a measuring apparatus using a measuring means having a measuring element, and the relative position of the measuring element with respect to the measurement site of the measuring object can be accurately and easily determined. It is an object of the present invention to provide a measuring apparatus that can be adjusted and can be accurately and easily handled even when there are a plurality of measuring objects having different dimensional displacement amounts.

In order to solve the above problems, the present invention proposes the following means.
The invention according to claim 1 is a measuring device for measuring a dimensional displacement amount at a measurement site of a measurement object, and has a measurement base on which the measurement object is arranged and a measuring element to measure the dimensional displacement amount. And at least one of the measuring element and the measurement base is moved in a direction in which the dimensional displacement amount is displaced in order to arrange the measuring means, the measuring element, and the measuring object in a predetermined positional relationship. Drive means; a first engagement portion formed corresponding to the measuring element; and a second engagement portion formed corresponding to the measurement base; and the first engagement portion and the The second engagement portion is configured to set a relative position between the measurement base and the measuring element to a predetermined dimension by abutting in a direction in which the dimensional displacement amount is displaced. To do.

The measuring apparatus according to the present invention includes a measuring base on which a measurement object is arranged, a measuring means for measuring a dimensional displacement amount having a measuring element, and a driving means. At least one of the table and the measuring means is moved in the direction of measuring the dimensional displacement, and the first engagement portion corresponding to the measuring element and the second engagement portion corresponding to the measurement base are brought into contact with each other. Thus, the measuring element and the measurement base are set at a predetermined relative position, so that the measuring element is set at a predetermined relative position with respect to the measurement object.
As a result, the measuring element can be accurately and easily adjusted to a predetermined relative position with respect to the measurement object arranged on the measurement base.
In this way, by bringing the first engagement portion and the second engagement portion into contact with each other, the measuring element and the measurement object are accurately set at a predetermined relative position. The displacement amount can be accurately detected.

  In this specification, the dimensional displacement amount can be detected by a probe of the measuring means, and is a dimension (length) from any reference, a displacement amount (change in length) with respect to the reference dimension, This includes spacing, etc., that can be converted into dimensional measurements.

The measurement object includes a cylindrical shape, a part of the cylindrical shape cut off, a rectangular parallelepiped, and the like, and the shape and measurement site of the measurement object are not limited.
The measuring element refers to an element that can detect the amount of dimensional displacement, such as an air ejection nozzle, an optical detector, or a contact, and the type is not limited.

  In addition, the first engagement portion and the second engagement portion may be configured to be able to set the relative position between the measuring element of the measuring unit and the measurement object by abutting each other. The shape of can be arbitrarily set.

Whether or not the first engaging portion is formed integrally with the measuring means (measuring element) or the member on which the first engaging portion is formed, and whether or not the first engaging portion is configured to be detachable by screwing or insertion is arbitrary. Can be set to Moreover, it is good also as a structure which changes an attitude | position by rotating, for example in the mounted state.
Moreover, it can also be set arbitrarily about whether a 2nd engaging part is integrally formed with a measurement base, or it can be attached or detached with respect to a measurement base. Moreover, you may change in the mounted state.

  Invention of Claim 2 is a measuring apparatus of Claim 1, Comprising: When several measuring object is made into a measuring object, at least of the said 1st engaging part and said 2nd engaging part Any one of them is configured to be able to be changed corresponding to the measurement object.

According to the measuring apparatus according to the present invention, at least one of the first engaging portion and the second engaging portion is configured to be able to change corresponding to the measurement object. By changing either one or both of the joint portion and the second engaging portion, the relative positional relationship between the measurement base and the probe can be changed.
In addition, by making one of the first engagement portion and the second engagement portion correspond to the dimension of the measurement object, a plurality of measurement can be performed without replacing both the measurement side means and the measurement base. The amount of dimensional displacement of the object can be measured.
As a result, when measuring multiple measurement objects, there is no need to change the setup of both the measurement-side means and the measurement base, and it is possible to handle multiple measurement objects without changing the entire measuring device. Can be made.

  Invention of Claim 3 is a measuring apparatus of Claim 2, Comprising: The said 2nd engaging part has the attachment formed corresponding to each dimension of these measurement objects. The relative position is set to a predetermined dimension by exchanging the attachment.

According to the measuring apparatus according to the present invention, the second engagement portion corresponding to the dimensions of each of the plurality of measurement objects is formed on the measurement base by exchanging the attachment. A relative position can be made to correspond to each measuring object efficiently.
As a result, the relative positional relationship between the measurement base and the probe can be made to correspond to each measurement object.

  In this specification, the attachment refers to a structure that can be attached to and detached from the measuring device, and includes parts (for example, keys, frames, etc.) constituting the first engagement part and the second engagement part. This is a concept including a member in which these are formed (for example, a jig or table on which a measurement object is placed).

  Invention of Claim 4 is a measuring apparatus of Claims 1-3, Comprising: Either one of the said 1st engaging part and the said 2nd engaging part is the said measuring element and the said measuring object. And the first engaging portion and the second engaging portion approach each other so that the interval in the direction orthogonal to the relative moving direction is gradually reduced to a concave shape portion. .

  According to the measuring apparatus according to the present invention, either the first engaging portion or the second engaging portion is moved between the first engaging portion and the second engaging portion by the relative movement of the measuring element and the measurement object. Since the distance between the direction perpendicular to the relative movement direction is gradually reduced as the distance approaches, the first engagement part and the second engagement part move relative to each other in the direction in which the dimensional displacement amount is measured. Then, in addition to the relative position in the measurement direction of the dimensional displacement amount, the probe can be positioned at a predetermined position with respect to the measurement site of the measurement object. As a result, the dimensional change amount of the measurement object can be accurately measured.

  In this specification, the concave-shaped portion whose interval in the direction perpendicular to the relative movement direction gradually decreases is, for example, a concave-shaped portion including an arc-shaped concave portion and a V-groove-shaped concave portion. In addition to the shape part where either the direction or the vertical direction gradually approaches, the shape part where both of them gradually approach, or those gradually approaching in two or more directions including a spherical surface, a cone or a polygonal pyramid are included. It is a concept.

  The invention according to claim 5 is the measuring apparatus according to claim 4, wherein the measuring means is an air micrometer, and the first engaging portion and the second engaging portion are in contact with each other. A gap is formed between the air ejection nozzle of the air micrometer and the measurement object arranged on the measurement base, and the air ejection nozzle is located at a predetermined position with respect to the reference of the measurement object. It is characterized by being set.

  According to the measurement apparatus according to the present invention, when the first engagement portion and the second engagement portion come into contact with each other, between the air ejection nozzle of the air micrometer and the measurement object arranged on the measurement base. A gap is formed, and the air ejection nozzle is set at a predetermined position (with reference to the measurement object) with respect to a predetermined reference of the measurement object, so that the dimensional displacement amount of the measurement object can be accurately measured. can do.

  Invention of Claim 6 is a measuring apparatus of Claim 4, Comprising: The said measurement means has a contactor, The said 1st engaging part and the said 2nd engaging part contact | abutted In this case, the contact is formed with a gap between the contact with the measurement object arranged on the measurement base, and the contact is set at a predetermined position with respect to the reference of the measurement object. The dimensional displacement amount is measured by relative movement of the contact and the object to be measured so that the contact comes into contact with the measurement object portion.

  According to the measuring apparatus according to the present invention, when the first engaging portion and the second engaging portion come into contact with each other, a gap is formed between the contact and the measurement object arranged on the measurement base. At the same time, the contact is set at a predetermined position (with respect to the measurement object as a reference) with respect to the preset reference of the measurement object, and the contact and the measurement object move relative to each other so that the contact comes into contact with the measurement object part. Thus, the dimensional displacement amount is measured, so that the dimensional displacement amount of the measurement object can be accurately measured.

According to the measuring apparatus according to the present invention, the measuring element and the measuring base included in the measuring means can be accurately and easily adjusted to a predetermined relative position.
Further, when a plurality of measurement objects having different dimensions are targeted, the measuring element and the measurement base included in the measurement means can be applied to the plurality of measurement objects and adjusted accurately and easily. As a result, when measuring a plurality of measurement objects, it is not necessary to change the setup of the measuring device.

It is a top view explaining an example of schematic structure of measuring device Assy concerning a 1st embodiment of the present invention. It is a side view explaining schematic structure of a measuring device unit which constitutes measuring device Assy concerning a 1st embodiment of the present invention. It is a figure explaining schematic structure of the measuring device unit concerning a 1st embodiment of the present invention, and is a fragmentary sectional view seen from the front. It is the fragmentary figure explaining the principal part detail of the measuring apparatus unit which concerns on the 1st Embodiment of this invention, and is the fragmentary sectional view seen from the front. BRIEF DESCRIPTION OF THE DRAWINGS It is a figure explaining the outline of the measuring device unit which concerns on the 1st Embodiment of this invention, (A) is the fragmentary sectional view seen from the front before adjusting a measuring element, (B) is a measuring element. The fragmentary sectional view seen from the front after position adjustment is shown. It is a figure explaining schematic structure of the measuring device unit concerning a 1st embodiment of the present invention, and (A) is a partial plane showing the 1st engaging part and the 2nd engaging part before position adjustment of a measuring element. It is a figure and (B) is a partial top view which shows the 1st engaging part and 2nd engaging part after adjusting the position of a measuring element. It is a flowchart explaining the outline of the stage change in the measuring apparatus unit which concerns on the 1st Embodiment of this invention. It is a figure explaining the outline of the stage change in the measuring apparatus unit which concerns on the 1st Embodiment of this invention. It is a fragmentary top view explaining the 1st modification regarding the 1st engaging part and the 2nd engaging part of the measuring device unit concerning a 1st embodiment of the present invention. It is the fragmentary view seen from the front explaining the 2nd-the 4th modification about the 1st engagement part and the 2nd engagement part of the measuring device unit concerning a 1st embodiment of the present invention. It is a figure explaining schematic structure of the measuring apparatus unit which concerns on the 2nd Embodiment of this invention, (A) is the fragmentary sectional view seen from the front before adjusting a position of a measuring element, (B) is a measuring element. (C) has shown the partial cross section seen from the front in the state which advances a measuring element and measures the amount of dimensional displacement.

<First Embodiment>
Hereinafter, a measuring apparatus according to a first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a plan view illustrating a schematic configuration of an example of a measurement apparatus according to the first embodiment. Reference numeral 1 denotes a measurement apparatus Assy (measurement apparatus), reference numeral 1A denotes a measurement apparatus unit (measurement apparatus), Reference sign W1 indicates a measurement object.

  The measuring device Assy1 detects the dimensional displacement amount at the measurement site M1 of the measuring object W1 and measures the dimension. In this embodiment, the measurement apparatus Assy1 includes, for example, three measurement apparatus units 1A as shown in FIG.

  Each measuring device unit 1A includes, for example, a measuring base 10, an air micrometer (measuring means) 20, and a drive unit 30, and the measuring base 10 is shared by three measuring device units 1A. It is configured.

  The measurement base 10 includes, for example, as shown in FIGS. 2 to 4, a measurement base 11, a measurement jig mounting base 12, and a measurement object mounting jig 13. The mounting jig 13 includes a measuring object mounting jig 13A corresponding to the measuring object W1 and a measuring object mounting jig 13B corresponding to the measuring object W2.

  Moreover, the measurement base 11, the measurement jig mounting base 12, and the measurement object mounting jig 13 are arranged in this order from the lower side, and the measurement object mounting jig 13 is, for example, a measurement jig. The mounting base 12 is detachably mounted.

The measurement base base 11 is, for example, a flat plate member formed in a square shape in plan view, and three measurement jig mounting bases 12 are arranged on the upper surface.
In addition, four buffer rubbers 11A are arranged on the lower side of the measurement base 11, and the occurrence of errors in measured values is suppressed by buffering shocks and vibrations received from the outside. Yes.

  The measuring jig mounting base 12 is, for example, a block-shaped member having a substantially hexagonal column shape in which the long side and the short side are alternately arranged in a plan view. As shown in FIG. 6 (B), a circular concave portion 12H extending downward for mounting the measuring object mounting jig 13 (13A) is formed, and a female portion is formed at the bottom of the circular concave portion 12H. Screw holes are formed.

  Further, as shown in FIG. 6C, a positioning pin 15 is erected on the bottom of the circular recess 12H to ensure the relative positional accuracy between the measurement jig mounting base 12 and the measurement object placing jig 13. It has come to be.

The measurement object placing jig 13 (13A) has a cylindrical shape that can be inserted into the circular recess 12H. The recess 13H is formed on the inner peripheral side, and a through hole is formed at the bottom of the recess 13H. Is formed.
The measurement object placing jig 13 is inserted into the circular recess 12H and attached to the measurement jig attachment base 12, and can be attached to and detached from the measurement jig attachment base 12 with an attachment bolt 14 disposed in the recess 13H. It can be mounted on.

  As shown in FIGS. 3 and 4, the upper outer peripheral side of the measurement object placing jig 13A is formed lower than the part where the first measurement object W1 is placed, and the air micrometer body 20A. Is configured to suppress interference between the air micrometer main body 20A and the measurement object placing jig 13A.

As shown in FIG. 6, the measurement object placing jig 13 </ b> A has, for example, an arcuate recess 13 </ b> C extending in the thickness direction that is arcuate in plan view on the outer peripheral surface that is cylindrical. Yes.
Three arcuate recesses 13C are formed at intervals of 120 ° in the circumferential direction, and constitute second engaging portions 10A, respectively.

Further, the measurement object placing jig 13B is formed with a second engagement portion 10B corresponding to the measurement object W2.
The second engagement portion 10A of the measurement object placing jig 13A and the second engagement portion 10B of the measurement object placement jig 13B are the respective references of the first measurement object W1 and the measurement object W2. It is formed corresponding to the difference in dimensions.
As a result, it can be applied to the measurement of two measurement objects (products, etc.) W1 and W2.
In this embodiment, the measurement object placing jig 13A constitutes an attachment that can be replaced with the measurement object placing jig 13B.

As the air micrometer 20, for example, a well-known one can be applied. The air micrometer 20 is ejected to the measurement site M1 of the air micrometer main body 20A and the measurement object W1 and the distance (dimensional displacement) between the measurement site M1 is measured. The air supply nozzle 23 is connected to an air connector 22 formed at the rear of the air micrometer body 20A, and air is supplied to the air micrometer 20. It has come to be.
And it blows from the air ejection nozzle 21 to the measurement site | part M1 arrange | positioned facing the air ejection nozzle 21, and comes to detect the space | interval of the air ejection nozzle 21 and the measurement site | part M1 based on the back pressure. ing.

  The drive unit 30 includes, for example, a drive cylinder (drive means) 31, a guide block 32, a slide member 33, an attachment member 34, and an attachment bracket 31A, and the attachment bracket 31A, the drive cylinder 31, the guide block 32, and the slide member. 33 are arranged in this order from the lower side, and are attached to the measurement base 11 through the attachment bracket 31A.

  The drive cylinder 31 is constituted by, for example, an air cylinder, and is connected to the slide member 33 by a connecting portion (not shown) so as to drive the slide member 33.

  The guide block 32 has, for example, a T-shaped groove 32 </ b> T formed in a cross section perpendicular to the longitudinal direction in the upper part, and a T-shaped guide convex part formed in the lower part of the slide member 33 can slide in the T-shaped groove 32 </ b> T. Is housed in.

The slide member 33 is configured to be guided by the drive block 31 to the guide block 32 and to advance and retreat along the dimensional displacement direction.
Further, a first engaging portion 30 </ b> A is formed at the forward portion (the side where the measurement base 10 is disposed) of the slide member 33 in correspondence with the air ejection nozzle (measuring element) 21 of the air micrometer 20. .

For example, as shown in FIG. 6, the first engagement portion 30 </ b> A is formed in a direction (in this embodiment, a vertical direction (vertical direction) in which two sides intersect at right angles and are perpendicular to the direction in which the slide member 33 advances and retreats. )) And a substantially cylindrical parallel pin 13P that is mounted in the V-shaped recess 30V and arranged in the vertical direction.
The parallel pin 13P is, for example, in line contact with the arcuate recess 13C that forms the second engagement portion 10A when viewed in plan, at two locations on the left and right, and the slide member 33 and the measurement object placing jig 13A. , 13B (13) and a relative positional relationship is formed.

  In this embodiment, the first engagement portion 30 </ b> A formed on the slide member 33 is brought into contact with the second engagement portion 10 </ b> A formed on the measurement base 10, whereby the air ejection nozzle of the air micrometer 20. 21 and the measurement base 10 are configured to be stopped and held at a predetermined relative position in the direction in which the amount of dimensional displacement of the measurement object W1 occurs.

For example, the attachment member 34 is attached to the slide member 33 with a bolt and is erected on the slide member 33.
The mounting member 34 holds the air ejection nozzle 21 of the air micrometer 20, and the slide of the slide member 33 moves the air ejection nozzle 21 along the direction in which a dimensional displacement amount is formed with respect to the measurement site M <b> 1. It is designed to advance and retreat.

Next, with reference to FIG. 7 and FIG. 8, an example when the setup is changed from the measurement object W1 to the measurement object W2 in the measurement apparatus Assy1 will be described.
For convenience, the measurement apparatus unit 1A is illustrated as an example, and the case where the above-described setup change is performed in three measurement apparatus units 1A will be described.
FIG. 7 is a flowchart for explaining the outline of the setup change in the measuring apparatus unit 1A. FIG. 8 is a diagram for explaining the outline of the setup change in the measuring apparatus unit 1A.

  The measurement object placing jig 13B has basically the same configuration as the measurement object placing jig 13A. As described above, the second engagement portion 10B is connected to the measurement object W2. It is changed corresponding to the difference in the set dimension of the measurement object W2.

(1) First, the measuring apparatus unit 1A is in a state adapted to the measuring object W1 (S01).
Specifically, as shown in FIG. 8A, a measurement object placing jig 13A corresponding to the measurement object W1 is arranged in the measurement apparatus unit 1A, and the slide member 33 is measured by the drive cylinder 31. The first engagement portion 30A formed on the slide member 33 is moved to the placement jig 13A side and is in contact with the second engagement portion 10A formed on the measurement object placement jig 13A and pressed. Is retained.
As a result, when the measurement object W1 is placed on the measurement object placement jig 13A, a detectable gap is formed between the air ejection nozzle 21 of the air micrometer 20 and the measurement site M1 of the measurement object W1. .

(2) Next, the drive cylinder 31 is driven to retract the slide member 33 from the measurement object placing jig 13A (S02).
Specifically, as shown in FIG. 8B, the drive cylinder 31 is driven to retract the slide member 33 in the direction of the arrow T1, and the air ejection nozzle 21 of the air micrometer 20 causes the measurement object placement treatment. Retreat from the tool 13A. Further, since the contact between the first engagement portion 30A formed on the slide member 33 and the second engagement portion 10A formed on the measurement object placing jig 13A is released, the measurement object placement treatment is performed. The tool 13A can be removed.

(3) Next, the measurement object placing jig 13A adapted to the measurement object W1 is replaced with the measurement object placing jig 13B adapted to the measurement object W2 (S03).
Specifically, as shown in FIG. 8C, the measurement object mounting jig 13A is removed from the measurement jig mounting base 12, and the measurement object applied to the measurement object W2 prepared in advance. The mounting jig 13B is attached to the measuring jig attachment base 12.

(4) Next, the drive cylinder 31 is driven to advance the slide member 33 toward the measurement object placing jig 13A (S04).
Specifically, as shown in FIG. 8D, the drive cylinder 31 is driven to advance the slide member 33 in the direction of arrow T2, and the air ejection nozzle 21 of the air micrometer 20 is placed on the object to be measured. Advance toward the tool 13B. Then, the first engagement portion 30A formed on the slide member 33 and the second engagement portion 10B formed on the measurement object placing jig 13B are brought into contact with each other and held.

(5) As a result, the measuring apparatus unit 1A is in a state adapted to the measuring object W2 (S05).
When the measuring object W2 is placed on the measuring object placing jig 13B in this state, the air ejecting nozzle 21 can detect between the air ejection nozzle 21 of the air micrometer 20 and the measurement site M2 of the measuring object W2. Gaps are formed.

  According to the measuring device Assy1 and the measuring device unit 1A according to the first embodiment, the first engaging portion 30A corresponding to the air ejection nozzle 21 of the air micrometer 20 is formed on the slide member 33 constituting the driving portion 30. In addition, a second engagement portion 10A corresponding to the measurement base 10 is formed on the measurement object mounting jig 13, and the slide member 33 is moved by the drive cylinder 31 in the direction of measuring the dimensional displacement amount of the air micrometer 20. The first engagement portion 30A corresponding to the air ejection nozzle 21 and the second engagement portion 10A corresponding to the measurement base 10 are brought into contact with each other.

  As a result, the air ejection nozzle 21 can be accurately and easily adjusted to a predetermined relative position with respect to the measurement objects W1 and W2 arranged on the measurement base 10.

  In addition, since the air ejection nozzle 21 is configured to form a predetermined detectable interval with respect to the measurement objects W1 and W2, the air micrometer 20 allows the measurement sites M1 and M2 of the measurement objects W1 and W2 to be measured. It is possible to accurately measure the dimensions of the measurement objects W1 and W2 by detecting the dimensional displacement amount.

  According to the measurement apparatus 1 according to the first embodiment, the second engagement portions 10A and 10B corresponding to the measurement objects W1 and W2 are changed to the measurement base by exchanging the measurement object mounting jigs 13A and 13B. Since it is arrange | positioned at the base 10, the relative position of the measurement base 10 with respect to the air ejection nozzle 21 can be matched with each measuring object W1 and W2 efficiently.

  As a result, it is not necessary to prepare a dedicated measuring device for each measurement object W, and capital investment can be reduced.

Further, according to the measuring apparatus 1 according to the first embodiment, the second engagement portion 10A formed on the measurement object placing jig 13 is composed of the parallel pins 13P and is formed on the slide member 33. Since the engaging portion 30A is formed as a V-shaped groove 33V, as the slide member 33 is moved toward the measurement base 10 by the drive cylinder 31, the first engaging portion 30A approaches the parallel pin 13P. When viewed, the parallel pin 13P is guided toward the center of the V-shaped groove 33V, and the parallel pin 13P is disposed at the distribution position of the V-shaped groove 33V when contacting the V-shaped groove 33V.
As a result, the air ejection nozzle is opposed to the center position to be measured of the measurement parts M1 and M2 of the measurement objects W1 and W2, and the dimensional displacement amount of the measurement objects W1 and W2 can be accurately detected.

<First Modification (First Embodiment)>
Next, with reference to FIG. 9, a first modification example relating to the first engagement portion and the second engagement portion of the measuring apparatus unit 1A according to the first embodiment of the present invention will be described.
FIG. 9 is a partial plan view for explaining a first modified example related to the first engaging portion and the second engaging portion in the measuring apparatus unit according to the first embodiment.

In the first modification according to the first embodiment, the first engagement portion 30A in the first embodiment is configured by a V-shaped recess 30V formed in a V shape in plan view, and the second engagement portion 10A was formed by a parallel pin 13P having a circular cross section formed in an arc shape in plan view and attached to the arc-shaped concave portion 13C, whereas the first engagement portion 30B is formed at the distal end portion of the slide member 33. The second engaging portion 10 </ b> C includes a formed spherical portion 33 </ b> S, and is configured by a carbide ball 13 </ b> K attached to the spherical portion 13 </ b> S formed on the measurement object placing jig 13.
Since others are the same as those of the first embodiment, the same reference numerals are given and description thereof is omitted.

According to the first modification of the first embodiment, the air ejection nozzle 21 is configured to be easily adjustable from the center in the plan view and the center in the vertical direction with respect to the center of the measurement site M1.
As a result, in addition to the relative positions of the air micrometer 20 and the measurement object W in the dimensional displacement direction, the air ejection nozzle 21 is moved in the horizontal direction and the vertical direction with respect to the measurement position M1 of the measurement object W1. It can be centered accurately and efficiently.

  Next, referring to FIG. 10A to FIG. 10C, second to second regarding the first engaging portion and the second engaging portion of the measuring apparatus unit 1A according to the first embodiment of the present invention. A fourth modification will be described.

  FIG. 10 is a partial view seen from the front for explaining second to fourth modified examples of the first engaging portion and the second engaging portion of the measuring apparatus unit according to the first embodiment. 10 (A) to 10 (C), among the first engaging portion and the second engaging portion, those shown by hatching are not attached / detached, and those marked with X are attachable / detachable. Is shown.

<Second Modification (First Embodiment)>
FIG. 10A is a partial view seen from the front for explaining a second modified example according to the first embodiment.
As shown in FIG. 10A, the second modification includes a first engagement portion 301A and a second engagement portion 101A.
For example, the first engagement portion 301A is formed integrally with the distal end portion of the slide member 331 and is not changed.
In addition, the second engagement portion 101A is formed on the measurement object placing jig 131 and can be changed.
And in the 1st modification, the measurement object made into a measurement object can be changed by changing the 2nd engaging part 101A.

<Third Modification (First Embodiment)>
FIG. 10B is a partial view seen from the front for explaining a third modification according to the first embodiment.
As shown in FIG. 10B, the third modification includes a first engaging portion 302A and a second engaging portion 102A.
302 A of 1st engaging parts are formed in the front-end | tip part of the slide member 332, and are comprised so that a change is possible.
In addition, the second engagement portion 102A is formed integrally with the measurement object placing jig 132, for example, and is not changed.
And in the 3rd modification, the measuring object made into a measuring object can be changed by changing the 1st engaging part 302A.

<Fourth Modification (First Embodiment)>
FIG. 10C is a partial view seen from the front for explaining a fourth modified example according to the first embodiment.
As shown in FIG. 10C, the fourth modification includes a first engaging portion 302A and a second engaging portion 101A.
302 A of 1st engaging parts are formed in the front-end | tip part of the slide member 331, and are set as the structure which can be changed.
In addition, the second engagement portion 101A is formed on the measurement object placing jig 131 and can be changed.
And in the 4th modification, the measuring object made into a measuring object can be changed by changing the 1st engaging part 302A and the 2nd engaging part 101A.

  Here, in the second to fourth modified examples, the changeable configuration refers to, for example, the measurement means (measuring element) or a member (for example, the slide member 332 or the like) on which the first engagement portion 302A is arranged. ), Or detachably attached to the keys and frames forming the first engaging portion 302A by screwing or insertion, or mounted on the slide member 332 or the like, for example. This is a configuration that is changed by changing the surface to be contacted. The same applies to the second engagement portion 101A.

<Second Embodiment>
Next, with reference to FIG. 11, a measuring apparatus according to the second embodiment of the present invention will be described. FIG. 11 is a diagram illustrating a schematic configuration of a measurement device unit according to the second embodiment, and reference numeral 2A denotes a measurement device unit (measurement device).

The second embodiment is different from the first embodiment in that an electric micrometer 40 is used instead of the air micrometer 20 as a measuring means, and the rest is the same as in the first embodiment. It is.
Hereinafter, the measurement apparatus unit 2A will be described, and the same portions as those in the first embodiment are denoted by the same reference numerals and description thereof is omitted. For example, as in the first embodiment, a measurement device Assy (measurement device) including three measurement device units 2A may be configured.

  The measurement device unit 2A includes, for example, a measurement base 10, a drive unit 300, and an electric micrometer unit 35. The measurement base 10 may be configured to be shared by a plurality of measurement device units 2A.

  As shown in FIG. 11, the measurement base 10 includes a measurement base base 11, a measurement jig mounting base 12, and a measurement object mounting jig 13A. The measurement base base 11 and the measurement jig mounting The base 12 and the measurement object placing jig 13A are arranged in this order from the lower side, and the measurement object placing jig 13A is detachable.

  The drive unit 300 includes, for example, a drive cylinder (drive means) 31, a guide block 32, and a slide member 33. The mounting bracket 31A, the drive cylinder 31, the guide block 32, and the slide member 33 are arranged in this order from the lower side. The mounting base 31A is attached to the measurement base 11 through the mounting bracket 31A. An electric micrometer unit 35 is placed on the slide member 33.

  The electric micrometer unit 35 includes a ball screw device 36, a slide portion 37, an attachment portion 38, and an electric micrometer (measuring means) 40, and the electric micrometer 40 is attached to the slide portion 37 by the attachment portion 38. When the ball screw device 36 drives the slide portion 37, the electric micrometer 40 is advanced and retracted with respect to the measurement object placing jig 13A.

  The electrical micrometer 40 includes a probe (measuring element) 41 and a detection unit 42, and an electrical signal generated in correspondence with the position and orientation of the probe 41 when the probe 41 comes into contact with the measurement object W1. The change is detected by the detector 42 and a dimensional displacement signal is output.

FIG. 11A is a diagram showing a state before the position of the probe 41 is adjusted.
As shown in FIG. 11A, the measurement apparatus unit 2A can remove and attach the measurement object placing jig 13A by moving the slide member 33 in the direction of the arrow T10 by the driving unit 300. Is possible. At this time, the electric micrometer 40 is normally retracted by the ball screw device 36.

Next, FIG. 11 (B) is a diagram showing a state in which the position of the probe 41 is adjusted to a predetermined position with respect to the measurement object placing jig 13A.
In this state, the measurement device unit 2A places the measurement object W1 on the measurement object placement jig 13A, and advances and retracts the slide portion 37 by the ball screw device 36, thereby completing the preparation for measurement.

  Then, as shown in FIG. 11C, when the slide portion 37 is advanced in the direction of arrow T12 by the ball screw device 36 and the probe 41 of the electric micrometer 40 comes into contact with the measurement object W1, the dimensional displacement is caused to the detection portion 42. A signal corresponding to the amount is generated, and the dimensional displacement amount is measured by this signal.

  In addition, about the technical matter described in said embodiment, it is possible to add a various change in the range which does not deviate from the meaning of invention.

  For example, in the above-described embodiment, a case has been described in which the measurement devices Assy 1 and 2 include three measurement units (air micrometer 20 and electric micrometer 40), and the measurement device units 1A and 2A include one measurement unit. However, it is possible to arbitrarily set the number of measuring means provided in the measuring apparatus and the shape of the measuring object W1.

  Moreover, in the said embodiment, although the measurement object mounting jig 13 (13A, 13B) demonstrated the case where it attaches / detaches to the measurement jig attachment base 12 with the attachment bolt 14, attachment / detachment other than the attachment bolt 14 is carried out. A member may be applied.

  In the above embodiment, the measuring apparatus unit 1A includes the two measurement object placing jigs 13 (13A and 13B), and the measurement object placing jig 13A and the measurement object placing jig 13B. The case where the measurement object is applied to the measurement of the two measurement objects W1 and W2 has been described. However, for example, a configuration including the measurement object mounting jig 13 applied to three or more measurement objects Alternatively, only one measurement object placing jig 13 is provided, and the present invention is applied to improve the maintainability when the measurement object placing jig 13 is repaired or inspected. Also good.

  Moreover, in the said embodiment, although demonstrated about the case where the 2nd engaging part 10A, 10B was changed with the measurement object mounting jigs 13A, 13B, without changing about the 1st engaging part 30A, For example, without changing both the measurement means and the measurement object mounting jig 13, either one or both of the first engagement portion 30A and the second engagement portions 10A, 10B are formed as detachable parts, It is good also as a structure which adjusts the relative position of the measuring element of a measurement means, and the measurement base 10 by replacing | exchanging these parts.

  Moreover, in the said embodiment, although the measuring apparatus Assy1 and the measuring apparatus unit 1A were provided with the air micrometer 20, and the measuring apparatus unit 2A was provided with the electric micrometer 40, the air micrometer 20, electrical Instead of the micrometer 40, for example, it may be applied to a measuring means having a measuring element such as a dial gauge or an optical measuring device.

  In the above-described embodiment, the measurement apparatus units 1A and 2A have been described as including a drive cylinder 31 such as an air cylinder as a drive unit. However, for example, a drive unit other than the drive cylinder such as a ball screw or a linear motor. It is good also as a structure provided with.

  In the above embodiment, the case where the driving means moves the measuring means (the air micrometer 20 and the electric micrometer 40) relative to the measuring base 10 has been described. For example, the measuring base is attached to the measuring means. A structure that moves, a structure that moves both the measurement means and the measurement base, or a structure that moves some of the measurement means when a plurality of measurement means are used may be used.

  The measuring apparatus according to the present invention is industrially applicable because the relative position between the measuring element and the measuring object can be accurately and easily adjusted with respect to the measuring apparatus using the measuring means having the measuring element. .

W1, W2 Measurement object M1, M2 Measurement site 1 Measuring device Assy (measuring device)
1A, 2A Measuring device unit (measuring device)
10 Measurement bases 10A, 10B, 10C, 101A, 101B Second engaging portions 13, 13A, 13B Measurement object mounting jig (attachment)
13P Parallel key (second engaging part)
13K Carbide ball (second engaging part)
20 Air micrometer (measuring means)
21 Air ejection nozzle (measuring element)
30, 300 Drive unit 30A, 30B, 301A, 301B First engagement unit 31 Drive cylinder (drive means)
33S Spherical surface portion (first engaging portion)
33V V-shaped groove (first engaging part)
35 Electric micrometer unit 40 Electric micrometer (measuring means)
41 Probe (Measuring element)

Claims (6)

A measuring device for measuring a dimensional displacement amount at a measurement site of a measurement object,
A measurement base for placing the measurement object;
A measuring means having a measuring element for measuring a dimensional displacement,
Driving means for moving at least one of the measuring element and the measurement base in a direction in which the dimensional displacement is displaced in order to arrange the measuring element and the measurement object in a predetermined positional relationship;
A first engaging portion formed corresponding to the measuring element;
A second engagement portion formed corresponding to the measurement base;
With
The relative position between the measuring base and the measuring element is set to a predetermined dimension by the first engaging portion and the second engaging portion coming into contact with each other in the direction in which the dimensional displacement amount is displaced. A measuring device characterized by being configured. The measuring device according to claim 1,
When multiple objects are measured,
At least one of the first engagement portion and the second engagement portion is configured to be able to change in correspondence with the measurement object. The measuring device according to claim 2,
The second engaging portion is
The measurement has an attachment formed corresponding to each dimension of the plurality of measurement objects, and is configured to set the relative position to a predetermined dimension by exchanging the attachment. apparatus. It is a measuring device according to claims 1-3,
Either one of the first engaging portion and the second engaging portion is
A concave-shaped portion in which the interval in the direction orthogonal to the relative movement direction gradually decreases as the probe and the measurement object move relative to each other and the first engagement portion and the second engagement portion approach each other. A measuring device. The measuring device according to claim 4,
The measuring means is an air micrometer;
When the first engagement portion and the second engagement portion abut,
A gap is formed between the air ejection nozzle of the air micrometer and the measurement object arranged on the measurement base, and the air ejection nozzle is set at a predetermined position with respect to the reference of the measurement object. A measuring device. The measuring device according to claim 4,
The measuring means has a contact,
When the first engagement portion and the second engagement portion abut,
The contact is formed with a gap between the measurement object placed on the measurement base and the contact is set at a predetermined position with respect to the reference of the measurement object. A measuring apparatus characterized in that the dimensional displacement is measured by relative movement of a measurement object and contact of the contact with the measurement object portion.

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