JPH09297149A - Probe positioning mechanism - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a probe positioning mechanism that can fit a spring member of a different shape. SOLUTION: Probe positioning mechanism has a probe 2 supported by a spring member 3 with one end fixed, and a displacement detecting sensor 7 for detecting the displacement of the probe 2, and adjusts and holds the position of the spring member 3 to the displacement detecting sensor 7. The probe positioning mechanism further has a holder 4 for holding the spring member 3, an intermediate holder 5 for holding the holder 4 by magnetic force and supporting the holder 4 by a holding face in a state of being movable in an X-direction and a Y-direction, and a supporting part 6 for holding the intermediate holder 5 by magnetic force and supporting the intermediate holder 5 by a holding face in a state of being movable in a Z-direction.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe positioning mechanism for a surface condition measuring machine which uses a probe typified by an atomic force microscope or the like and scans the surface of a measurement object to measure its surface condition. More specifically, the present invention relates to a probe positioning mechanism that adjusts the position of a probe that scans the surface shape of a measurement object with respect to a displacement detection sensor and holds the probe.

[0002]

2. Description of the Related Art As a probe positioning mechanism of this type, there is one disclosed in Japanese Patent Laid-Open No. 5-227948, and a conventional example will be described with reference to FIG.

In the conventional probe positioning mechanism of the surface condition measuring machine, as shown in FIG. 8, the laser beam spot from the displacement detecting sensor 108 scans the object 103 to be measured 102.
The holder 104 is positioned and held so that the light is condensed and reflected on the spring member 101 for holding.

That is, the probe positioning mechanism includes a magnetic holder 104 for supporting the spring member 101, a permanent magnet 105 for movably supporting the holder 104 in the X and Y directions, and a permanent magnet. The piezoelectric element 106 for adjusting the position of the magnet 105 in the Z direction, and the spring member 101.
And an X-Y position adjusting mechanism 107 that adjusts the position in the X and Y directions.
The permanent magnet 10 is clamped by the position adjusting mechanism 107.
Positioning is performed by moving the upper part 5 in the X and Y directions.

[0005]

In the above-described conventional probe positioning mechanism, since the piezoelectric element 106 is used for the adjustment in the Z direction, the adjustment range is narrowed and the spring member 101 having a different shape is positioned. There is a problem that cannot be done.

Further, since the rotation cannot be adjusted in the X direction, the contact angle of the probe 102 with respect to the surface of the object to be measured cannot be adjusted, and the contact angle of the surface of the object to be measured greatly affects the friction. There is a problem that accurate measurement cannot be performed in measurement such as force measurement.

Further, since the holder 104 is held by the permanent magnet 105, the probe 102 is magnetized and there is a problem that the magnetic force on the surface of the object to be measured cannot be measured.

The present invention has been made in view of the above problems. It is possible to attach spring members having different shapes, the contact angle of the probe with respect to the surface of the object to be measured can be adjusted, and the magnetic force It is an object of the present invention to provide a probe positioning mechanism capable of measuring.

[0009]

In a probe positioning mechanism according to a first aspect of the present invention, as shown in FIG.
The free end of the spring member 3 is supported so as to face the object to be measured 1, and the fixed end of the spring member 3 is supported by the holder 4. Further, a displacement detection sensor 7 for detecting the displacement of the spring member 3 is arranged above the spring member 3 and held by the supporting portion 6. The supporting portion 6 holds the intermediate holder 5 by using the permanent magnet 8 and also holds the intermediate holder 5 in a movable state in the Z direction on its holding surface. The lower surface of the intermediate holder 5 uses a permanent magnet 9 to hold the holder 4 in a movable state in the X and Y directions on its holding surface.

In the probe positioning mechanism according to the second aspect, the probe 2 is supported by the free end of the spring member 3 so as to face the object to be measured 1, and the fixed end of the spring member 3 is supported by the holder 4. A displacement detection sensor 7 for detecting the displacement of the spring member 3 is arranged above the spring member 3 and is held by the support portion 6. This support 6
The intermediate holder 5 is held by the magnet 8 and can be moved in the Z direction by its holding surface and can be rotated about the Z direction. The intermediate holder 5 includes a holder 9 and a magnet 9
It is held in such a state that it can be moved in the X direction on its holding surface and can rotate about the X direction as an axis.

In the probe positioning mechanism of the third aspect, the probe 2 is supported by the free end of the spring member 3 so as to face the object to be measured 1, and the fixed end thereof is supported by the holder 4. Further, a displacement detection sensor 7 for detecting the displacement of the spring member 3 is arranged above the spring member 3. The holder 4 is held by magnetic force, and the spring member 3 fixes the fixed portion of the probe 2 to the holder 4 formed of a non-magnetic member.

In a surface condition measuring machine that uses a probe typified by an atomic force microscope or the like to scan the surface of the object to be measured 1 to measure the surface condition, a probe 2 for scanning the surface shape of the object 1 to be measured is used. In order to detect the displacement, it is necessary to position the spring member 3 to which the probe 2 is attached so as to face the displacement detection sensor 7.

In the probe positioning mechanism according to the first aspect, since the holder 4 supporting the spring member 3 is magnetically held by the intermediate holder 5 by using the magnet 9, the holder 4 can be moved in the X direction and in the X direction. By applying a certain amount of force in the Y direction, the position of the holder 4 can be adjusted and positioned.

Further, by applying a certain amount of force in the Z direction to the intermediate holder 5 which is magnetically held in the support section 6 by the magnet 8 so as to be magnetically movable in the Z direction. The holder 5 can be moved in the Z direction, and the spring member 3 held by the holder 4 can be adjusted in the Z direction for positioning.

As a result, the probe 2 is
The spring member 3 to which is attached can be positioned in the X direction, the Y direction, and the Z direction.

In the probe positioning mechanism according to the second aspect of the invention, the holder 4 supporting the spring member 3 is magnetically held by the intermediate holder 5 so as to be rotatable about the X direction and the X direction. By applying a certain amount of force in the direction of rotation about the X direction, the position of the probe 2 in the X direction and the measured object 1
The contact angle of the probe 2 with respect to can be adjusted and positioned.

Further, by applying a certain amount of force to the intermediate holder 5 which is magnetically held by the support portion 6 so that it can rotate about the Z direction and the Z direction, the intermediate holder 5 is moved in the Z direction and The spring member 3 held by the holder 4 can be displaced in the direction of rotation about the Z direction as an axis to adjust the position in the Z direction and the Y direction for positioning.

In this way, the spring member 3 to which the probe 2 is attached can be positioned with respect to the displacement detection sensor 7, and the contact angle of the probe 2 with respect to the object to be measured 1 can be accurately positioned.

In the probe positioning mechanism according to the third aspect, since the spring member fixing portion of the holder 4 is formed of a non-magnetic material, even if the holder 4 is magnetically held by the intermediate holder 5, the spring member is held. Magnetization of the probe 3 and the probe 2 can be prevented.

[0020]

Embodiments of the present invention will be described below in detail.

(Embodiment 1) (Structure) FIG. 2 shows a probe positioning mechanism according to a practical embodiment 1 of the present invention. This probe positioning mechanism is on the bottom piece of the L-shaped base 10. Includes an XY stage 1 composed of a piezoelectric element or the like for moving the measurement object 1 in the X and Y directions.
9 is provided, and the arm 1 is provided on the side piece of the base 10.
2 is supported via the piezoelectric element 11.

The probe 2 is attached to the free end of the spring member 3.
The measurement object 1 is arranged so as to face the measurement surface.
The spring member 3 and the probe 2 are formed by processing a member such as silicon nitride using a semiconductor manufacturing process.

Further, the spring member 3 and the probe 2 are several μ
It can also be formed by fixing a diamond having a sharpened tip processed to the end of an elastic body made of a thin piece of phosphor bronze having a thickness of m to several hundreds of μm.

The displacement sensor 7 is supported by the arm portion 12 so as to detect the displacement of the spring member 3 so as to be located above the spring member 3. Also, the piezoelectric element 13
Is supported by the arm portion 12, and the support portion 14 is attached to the piezoelectric element 13 so that the support portion 14 can be slightly moved in the Z direction.

As shown in FIG. 3 which is a sectional view taken along the line AA of FIG. 2, the supporting portion 14 is formed in an L shape, and permanent magnets 16a and 16b are attached to two surfaces of the supporting portion 14 to form the permanent magnet 1.
The intermediate holder 15 is magnetically (by magnetic force) held by 6a and 16b.

Further, a permanent magnet 24 is attached to the bottom piece of the intermediate holder 15, and the permanent magnet 24 holds the holder 22 holding the fixed end of the spring member 3 magnetically (magnetic force). are doing. The holder 1
8, the intermediate holder 15, and the support portion 14 are made of a magnetic material such as iron.

(Operation) In the first embodiment, XY
The stage 19 acts to scan the surface of the probe 2 when the object 1 is moved in the X and Y directions and the surface state is measured. In order to detect the surface state, the force acting on the probe 2 from the surface of the object to be measured 1 is detected as the displacement amount of the spring member 3. Therefore, it is necessary to position the spring member 3 within the detection range of the displacement detection sensor 7. is there.

Since the holder 18 is magnetically held on one surface by the intermediate holder 15, it can be freely moved on the holding surface by applying a certain amount of force in the X and Y directions. Further, since the intermediate holder 15 is held on the two surfaces by the support portion 14, it can be easily moved in the Z direction by applying a certain amount of force in the Z direction.

Therefore, the spring member 3 can be positioned by applying a force to the holder 18 and the intermediate holder 15 for adjustment. It should be noted that each position-adjustable member in the first embodiment is adjusted by applying a force from the outside by, for example, a 5-axis adjustment stage or the like, and is positioned based on the detection output of the displacement detection sensor 7 or visually.

The piezoelectric element 11 includes the arm portion 12 and the piezoelectric element 1 so that the detection output of the displacement detection sensor 7 becomes constant.
3, the probe 2 is moved up and down via the support portion 14, the intermediate holder 15, and the holder 18, and the probe 2 is controlled to scan the surface of the measurement object 1 to detect the state of the surface of the measurement object 1. To do.
Further, the piezoelectric element 13 includes a support portion 14 and an intermediate holder 1
5, the probe 2 is further finely moved through the holder 18 for adjustment, and the zero adjustment of the output of the displacement detection sensor 7 is accurately performed.

(Effect) According to the first embodiment, since the holding surface of the intermediate holder 15 is composed of two surfaces, the straightness of the probe 2 in the Z direction at the time of adjustment is improved, and the Z direction is improved. Adjustment becomes easy. Further, since the holding force of the support portion 14 with respect to the intermediate holder 15 is stronger than the holding force of the intermediate holder 15 with respect to the holder 18, it is possible to prevent the adjustment in the Z direction from being deviated when the holder 18 is adjusted.

(Embodiment 2) FIGS. 4 to 6 show Embodiment 2 of the present invention. The same members as those in Embodiment 1 are designated by the same reference numerals, and detailed description thereof will be given. Is omitted. 4 is a front view of the probe positioning mechanism according to the second embodiment, FIG. 5 is a sectional view taken along line BB of FIG. 4, and FIG. 6 is a sectional view taken along line CC of FIG.

(Structure) The probe positioning mechanism of the second embodiment basically has the same structure as the probe positioning mechanism of the first embodiment, but as shown in FIG.
Instead of the above, a supporting portion 20 having one side surface formed in a concave shape is used, and a permanent magnet 23 fitted to one side surface of the supporting portion 20 is used to form a cylindrical surface having a shape corresponding to the concave portion. Holds the intermediate holder 21 magnetically.

Similarly, as shown in FIG. 6, instead of the intermediate holder 15, an L-shaped intermediate holder 21 whose bottom surface is concave is used. The holder 2 having a cylindrical surface having a shape corresponding to the concave portion by the permanent magnet 24 fitted on the lower surface side.
Holds 2 magnetically

The holder 18, the intermediate holder 15, and the support portion 14 are made of a magnetic material such as iron. Other configurations are the same as those in the first embodiment.

(Operation) According to the second embodiment, the holder 22 is formed by the concave portion of the intermediate holder 21 into the permanent magnet 2.
Since it is magnetically held by 3, by applying a certain amount of force in the X direction and the rotation direction around the X direction,
It is possible to adjust the contact angle of the probe 2 with respect to the X direction and the surface of the measured object 1.

Further, since the holder 22 is magnetically held by the permanent magnet 24 in the concave portion of the intermediate holder 21, it is possible to apply a certain amount of force in the Z direction and the rotational direction about the Z direction. The spring member 3 can be easily moved and adjusted in the Z direction and the Y direction.

Therefore, the holder 22 and the intermediate holder 2
By applying a rotating and sliding force to 1 for adjustment, the spring member 3 can be positioned and the contact angle of the probe 2 with respect to the surface of the measurement object 1 can be adjusted.

(Effects) According to the second embodiment, since the holding surfaces of the support portion 20 and the intermediate holder 21 and the holding surfaces of the intermediate holder 21 and the holder 22 are concave surfaces, the contact area between them is small. The rigidity can be improved by increasing

(Third Embodiment) (Structure) FIG. 6 shows a third embodiment of the present invention, which is the same as the first embodiment except for the support structure of the holder 30 and the spring member 3. , The description is omitted.

In the third embodiment, the probe 2 is arranged at the free end of the spring member 3, the spring member 3 has its fixed end supported by the conductive member 33, and the conductive member 33 is made of a non-magnetic material such as aluminum. It is supported by the holder 30 via the material 31.

(Operation) In the third embodiment, since the holder 30 is magnetized by the permanent magnet 32, the spring member 3 is used.
In order to prevent 1 from being affected by the magnetization, magnetic isolation is performed by an aluminum material 31 which is a non-magnetic material. By attaching the conductive member 33 to the magnetically shielded aluminum material 31 and connecting it to the ground (ground) to set the potential of the spring member 31 to the ground potential, the influence of static electricity can be removed.

(Effects) According to the third embodiment, the aluminum material 31 is used for magnetic isolation, and the conductive member 33 is used to set the potential of the spring member 3 to the ground potential. It can be removed, and the surface condition of the measurement object 1 can be measured with high accuracy.

[0044]

According to the first aspect of the invention, it is possible to provide a probe positioning mechanism capable of attaching spring members having different shapes.

According to the second aspect of the invention, it is possible to provide a probe positioning mechanism capable of adjusting the contact angle of the probe with respect to the surface of the object to be measured.

According to the third aspect of the present invention, it is possible to provide a probe positioning mechanism that can shield the probe from magnetism, prevent magnetization of the probe, and enable measurement of magnetic force. it can.

[Brief description of drawings]

FIG. 1 is a conceptual diagram of a probe positioning mechanism of the present invention.

FIG. 2 is a front view of the probe positioning mechanism according to the first embodiment.

FIG. 3 is a sectional view taken along line AA of FIG. 2;

FIG. 4 is a front view of a probe positioning mechanism according to a second embodiment.

FIG. 5 is a sectional view taken along line BB of FIG. 4;

FIG. 6 is a sectional view taken along line CC of FIG. 4;

FIG. 7 is a diagram showing a part of a probe positioning mechanism according to a second embodiment.

FIG. 8 is a schematic diagram of a conventional example.

[Explanation of symbols]

 1 Measured Object 2 Probe 3 Spring Member 4 Holder 5 Intermediate Holder 6 Supporting Part 7 Displacement Detection Sensor 8 Permanent Magnet 10 Base 11 Piezoelectric Element 12 Arm Part 13 Piezoelectric Element 14 Supporting Part 15 Intermediate Holder 16 Permanent Magnet 17 Permanent Magnet 18 Holder 19 XY stage

Claims (3)

[Claims] 1. A probe having one end fixed by a spring member and a displacement detection sensor for detecting displacement of the probe, wherein a position of the spring member is adjusted with respect to the displacement detection sensor. In a holding probe positioning mechanism for holding, a holder for holding the spring member, the holder is held by magnetic force, and the holding surface holds the holder in the X direction and the Y direction.
Positioning of a probe characterized by having an intermediate holder that supports the intermediate holder in a movable state in a direction and a support portion that holds the intermediate holder by magnetic force and that supports the intermediate surface in a movable state in the Z direction. mechanism. 2. A probe having one end fixed by a spring member and a displacement detection sensor for detecting displacement of the probe, and adjusting the position of the spring member with respect to the displacement detection sensor. In a holding probe positioning mechanism, a holder that holds the spring member and a magnetic force that holds the holder are supported by a holding surface so that the holder is movable in the X direction and rotatable about the X direction. And a supporting portion for holding the intermediate holder by magnetic force and supporting the movable surface in the Z direction on the holding surface and in the state of being rotatable about the X direction as an axis. Needle positioning mechanism. 3. A probe having one end supported by a spring member, and a displacement detection sensor for detecting displacement of the probe, wherein the position of the spring member is adjusted with respect to the displacement detection sensor. A probe positioning mechanism for holding the probe, wherein the spring member fixing portion of the holder is made of a non-magnetic material.