JP2016097419A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2016097419A5 JP2016097419A5 JP2014234593A JP2014234593A JP2016097419A5 JP 2016097419 A5 JP2016097419 A5 JP 2016097419A5 JP 2014234593 A JP2014234593 A JP 2014234593A JP 2014234593 A JP2014234593 A JP 2014234593A JP 2016097419 A5 JP2016097419 A5 JP 2016097419A5
- Authority
- JP
- Japan
- Prior art keywords
- processing
- carbon film
- hard carbon
- laser beam
- pulse laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910021385 hard carbon Inorganic materials 0.000 claims description 23
- 239000000463 material Substances 0.000 claims description 12
- 238000003672 processing method Methods 0.000 claims description 10
- 230000001678 irradiating Effects 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 7
- 230000000051 modifying Effects 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 230000000737 periodic Effects 0.000 claims 1
- 230000004048 modification Effects 0.000 description 1
- 238000006011 modification reaction Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014234593A JP6348051B2 (ja) | 2014-11-19 | 2014-11-19 | レーザ加工方法、レーザ加工装置、およびレーザ加工品 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014234593A JP6348051B2 (ja) | 2014-11-19 | 2014-11-19 | レーザ加工方法、レーザ加工装置、およびレーザ加工品 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016097419A JP2016097419A (ja) | 2016-05-30 |
| JP2016097419A5 true JP2016097419A5 (fr) | 2016-12-08 |
| JP6348051B2 JP6348051B2 (ja) | 2018-06-27 |
Family
ID=56075774
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014234593A Active JP6348051B2 (ja) | 2014-11-19 | 2014-11-19 | レーザ加工方法、レーザ加工装置、およびレーザ加工品 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6348051B2 (fr) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6781645B2 (ja) * | 2017-03-02 | 2020-11-04 | キヤノンマシナリー株式会社 | レーザ加工方法、レーザ加工装置、及び材料の製造方法 |
| KR20240050470A (ko) * | 2021-09-06 | 2024-04-18 | 도쿄엘렉트론가부시키가이샤 | 기판 처리 방법 및 기판 처리 장치 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006212646A (ja) * | 2005-02-01 | 2006-08-17 | Canon Machinery Inc | 周期構造作成方法 |
| JP2007162045A (ja) * | 2005-12-12 | 2007-06-28 | Japan Science & Technology Agency | 摺動材及びその製造方法 |
| JP5227563B2 (ja) * | 2006-10-26 | 2013-07-03 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| JP5103054B2 (ja) * | 2007-04-27 | 2012-12-19 | サイバーレーザー株式会社 | レーザによる加工方法およびレーザ加工装置 |
-
2014
- 2014-11-19 JP JP2014234593A patent/JP6348051B2/ja active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2019532887A5 (fr) | ||
| MY188444A (en) | Wafer producing method | |
| EP2960007A3 (fr) | Procédé de soudure laser et structure de soudage | |
| MY187223A (en) | Wafer producing method | |
| WO2012149070A3 (fr) | Ablation par laser à tir unique d'un film métallique sur une membrane polymère | |
| JP2014195822A5 (fr) | ||
| JP2015529161A5 (fr) | ||
| WO2016204619A3 (fr) | Procédé de séparation de déchets | |
| MX350229B (es) | Metodo para producir un cristal con un recubrimiento electricamente conductor con defectos aislados electricamente. | |
| JP2015523296A5 (fr) | ||
| GB2544230A (en) | Laser ablation and processing methods and systems | |
| JP2013513487A5 (fr) | ||
| JP2014198345A5 (fr) | ||
| WO2014202413A3 (fr) | Dispositif et procédé de fabrication additive d'au moins une partie d'une pièce | |
| MX2018001081A (es) | Metodo de formacion de ranuras lineales y dispositivo de formacion de ranuras lineales. | |
| WO2014155190A8 (fr) | Appareil d'inspection de partie soudée et procédé d'inspection associé | |
| JP2014223671A5 (ja) | レーザ加工方法及びレーザ加工装置 | |
| JP2010274328A5 (fr) | ||
| JP2016505390A5 (fr) | ||
| FR2975617B1 (fr) | Procede de marquage en surface d'un bouchon destine a l'obturation d'une bouteille | |
| US20190359515A1 (en) | Method of forming hole in glass substrate by using pulsed laser, and method of producing glass substrate provided with hole | |
| JP2013232531A5 (fr) | ||
| WO2013190444A3 (fr) | Systèmes et procédés pour fabrication par traitement en voie sèche de masques binaires ayant des formes arbitraires pour micro-usinage laser dans l'ultraviolet | |
| JP2009200480A5 (fr) | ||
| JP2016097419A5 (fr) |