JP2016097419A5 - - Google Patents

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Publication number
JP2016097419A5
JP2016097419A5 JP2014234593A JP2014234593A JP2016097419A5 JP 2016097419 A5 JP2016097419 A5 JP 2016097419A5 JP 2014234593 A JP2014234593 A JP 2014234593A JP 2014234593 A JP2014234593 A JP 2014234593A JP 2016097419 A5 JP2016097419 A5 JP 2016097419A5
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JP
Japan
Prior art keywords
processing
carbon film
hard carbon
laser beam
pulse laser
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JP2014234593A
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English (en)
Japanese (ja)
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JP2016097419A (ja
JP6348051B2 (ja
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Priority to JP2014234593A priority Critical patent/JP6348051B2/ja
Priority claimed from JP2014234593A external-priority patent/JP6348051B2/ja
Publication of JP2016097419A publication Critical patent/JP2016097419A/ja
Publication of JP2016097419A5 publication Critical patent/JP2016097419A5/ja
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Publication of JP6348051B2 publication Critical patent/JP6348051B2/ja
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JP2014234593A 2014-11-19 2014-11-19 レーザ加工方法、レーザ加工装置、およびレーザ加工品 Active JP6348051B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014234593A JP6348051B2 (ja) 2014-11-19 2014-11-19 レーザ加工方法、レーザ加工装置、およびレーザ加工品

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014234593A JP6348051B2 (ja) 2014-11-19 2014-11-19 レーザ加工方法、レーザ加工装置、およびレーザ加工品

Publications (3)

Publication Number Publication Date
JP2016097419A JP2016097419A (ja) 2016-05-30
JP2016097419A5 true JP2016097419A5 (enrdf_load_stackoverflow) 2016-12-08
JP6348051B2 JP6348051B2 (ja) 2018-06-27

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ID=56075774

Family Applications (1)

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JP2014234593A Active JP6348051B2 (ja) 2014-11-19 2014-11-19 レーザ加工方法、レーザ加工装置、およびレーザ加工品

Country Status (1)

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JP (1) JP6348051B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6781645B2 (ja) * 2017-03-02 2020-11-04 キヤノンマシナリー株式会社 レーザ加工方法、レーザ加工装置、及び材料の製造方法
WO2023032833A1 (ja) * 2021-09-06 2023-03-09 東京エレクトロン株式会社 基板処理方法及び基板処理装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006212646A (ja) * 2005-02-01 2006-08-17 Canon Machinery Inc 周期構造作成方法
JP2007162045A (ja) * 2005-12-12 2007-06-28 Japan Science & Technology Agency 摺動材及びその製造方法
JP5227563B2 (ja) * 2006-10-26 2013-07-03 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP5103054B2 (ja) * 2007-04-27 2012-12-19 サイバーレーザー株式会社 レーザによる加工方法およびレーザ加工装置

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