JP2016087767A5 - - Google Patents
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- JP2016087767A5 JP2016087767A5 JP2014228335A JP2014228335A JP2016087767A5 JP 2016087767 A5 JP2016087767 A5 JP 2016087767A5 JP 2014228335 A JP2014228335 A JP 2014228335A JP 2014228335 A JP2014228335 A JP 2014228335A JP 2016087767 A5 JP2016087767 A5 JP 2016087767A5
- Authority
- JP
- Japan
- Prior art keywords
- fiber
- fiber reinforced
- resin
- sheet
- base material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 239000000835 fiber Substances 0.000 description 14
- 239000000463 material Substances 0.000 description 7
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 125000003118 aryl group Chemical group 0.000 description 3
- 229920000728 polyester Polymers 0.000 description 3
- 239000011342 resin composition Substances 0.000 description 3
- 238000010030 laminating Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- 230000037250 Clearance Effects 0.000 description 1
- 230000035512 clearance Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000002759 woven fabric Substances 0.000 description 1
Description
本発明の被研磨物保持材は、複数枚の繊維強化シートを積層して形成され、全ての繊維強化シートが、全芳香族ポリエステル繊維からなる織物を繊維基材として用いたものが、被研磨物保持材の反りが起こらず、厚み精度が良好で、金属元素含有量が少なく、また、機械強度に優れ、耐久性も良好である。 The object to be polished holding material of the present invention is formed by laminating a plurality of fiber reinforced sheets, and all fiber reinforced sheets are made of woven fabric made of wholly aromatic polyester fibers as a fiber base material. The warp of the material holding material does not occur , the thickness accuracy is good, the metal element content is low, the mechanical strength is excellent, and the durability is also good.
また、３層以上の繊維強化樹脂シートを積層する場合には、中間層に、全芳香族ポリエステル繊維からなる不織布を繊維基材として用いた繊維強化シートを使用してもよい。
全芳香族ポリエステル繊維基材からなる繊維強化シートのみを用いることで、被研磨物保持材の反りが起こらず、厚み精度が良好で、金属元素含有量が少ない被研磨物保持材が得られる。
Moreover, when laminating | stacking the fiber reinforced resin sheet | seat of three or more layers, you may use the fiber reinforced sheet which used the nonwoven fabric which consists of a wholly aromatic polyester fiber as a fiber base material for an intermediate | middle layer.
By using only fiber-reinforced sheet comprising wholly aromatic polyester fiber base material, without causing warpage of the workpiece holding member, a good thickness accuracy, the metal element content is less workpiece holding member is obtained.
本発明に係る繊維強化樹脂シートは、例えば、以下の方法により製造すればよい。すなわち、各繊維基材に、樹脂を含浸させ、乾燥させることにより、繊維強化シートを調製する。
具体的には、熱硬化性樹脂を用いる場合、熱硬化性樹脂を溶剤に溶解した樹脂組成物を調製し、それを前記繊維基材に塗布後、バーコーターやクリアランスロールなどを用いて余分な樹脂組成物を掻き取ることにより、繊維強化シートを調製することができる。
What is necessary is just to manufacture the fiber reinforced resin sheet which concerns on this invention with the following method, for example. That is, each fiber base material is impregnated with a resin and dried to prepare a fiber reinforced sheet.
Specifically, when a thermosetting resin is used, a resin composition in which a thermosetting resin is dissolved in a solvent is prepared, and after applying the resin composition to the fiber substrate , an extra portion is used using a bar coater or a clearance roll. A fiber reinforced sheet can be prepared by scraping off the resin composition.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014228335A JP2016087767A (en) | 2014-11-10 | 2014-11-10 | Material for holding object to be polished |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014228335A JP2016087767A (en) | 2014-11-10 | 2014-11-10 | Material for holding object to be polished |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2016087767A JP2016087767A (en) | 2016-05-23 |
| JP2016087767A5 true JP2016087767A5 (en) | 2017-02-09 |
Family
ID=56016826
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014228335A Pending JP2016087767A (en) | 2014-11-10 | 2014-11-10 | Material for holding object to be polished |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2016087767A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6470976B2 (en) * | 2015-01-19 | 2019-02-13 | Ｋｂセーレン株式会社 | Workpiece holding material |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001105304A (en) * | 1999-10-05 | 2001-04-17 | Du Pont Toray Co Ltd | Disc holding carrier material |
| JP2004114208A (en) * | 2002-09-25 | 2004-04-15 | Matsushita Electric Works Ltd | Carrier material for polishing |
| JP2009061531A (en) * | 2007-09-05 | 2009-03-26 | Kyocera Chemical Corp | Polishing object holding material and method of manufacturing the same |
| JP2010023217A (en) * | 2008-07-24 | 2010-02-04 | Kyocera Chemical Corp | Carrier disc for retaining article to be polished |
| JP2010099767A (en) * | 2008-10-22 | 2010-05-06 | Kyocera Chemical Corp | Method of manufacturing polished article holding material and polishing article |
| JP6061621B2 (en) * | 2012-10-31 | 2017-01-18 | 花王株式会社 | Manufacturing method of magnetic disk substrate |
-
2014
- 2014-11-10 JP JP2014228335A patent/JP2016087767A/en active Pending
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