JP2016087763A - Method for regenerating resin layer of guide roller for wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent the resin layer composing the periphery of a guide roller from peeling out of the regenerated guide roller.SOLUTION: There is provided a method for regenerating a resin layer (15) of the guide roller (10) for a wire saw which is integrally molded into such a state that the resin layer (15) wound by a wire (101) is adhered to the outer peripheral face of a cylindrical roller body (13) by an adhesive. The method includes removing the resin layer (15) from the roller body (13), flushing the outer peripheral face of the roller body (13) from which the resin layer (15) is removed, and molding the resin layer (15) integrally by applying an adhesive for molding on the outer peripheral face of the flushed roller body (13).SELECTED DRAWING: Figure 3

Description

  The present invention relates to a method for regenerating a resin layer constituting an outer peripheral portion of a guide roller used in a wire saw.

  Conventionally, a wire saw is known as means for cutting a workpiece such as a semiconductor ingot into a plurality of thin pieces. The wire saw has a configuration in which wires are spirally wound around a plurality of guide rollers that rotate around rotation axes parallel to each other, and a wire row arranged at an equal pitch is formed between the guide rollers. This is a device that runs at a high speed in a reciprocating direction while guiding a wire by a roller, and presses and cuts a workpiece while supplying a machining fluid to a running wire row (see, for example, Patent Document 1).

  A guide roller used in such a wire saw includes a resin layer provided with a guide groove for guiding a wire on an outer peripheral portion. The resin layer is worn by repeated use of a wire saw. The thickness accuracy of the thin piece of the workpiece cut out by the wire saw decreases due to the abrasion of the resin layer. For this reason, it is necessary to replace the guide roller when a predetermined usage period or number of uses is exceeded.

  The guide roller includes an inner roller that is rotatably attached to a roller support shaft of the wire saw, and an outer roller that includes a plurality of divided pieces that are detachably attached to the outer peripheral surface of the inner roller. A roller having a split structure has been developed in which only the outer roller can be removed and replaced while being mounted on the roller support shaft (see, for example, Patent Document 2).

  The divided pieces constituting the outer roller of this type of guide roller are formed of a relatively hard metal material, specifically cast iron, and a resin layer having the guide groove is provided on the outer peripheral surface thereof. ing. This resin layer is integrally formed on the outer surface of the divided piece using a mold after the molding adhesive is applied to the outer surface of the divided piece, and is bonded to the divided piece.

  In addition, the wire saw cutting method uses a free abrasive grain method that uses a liquid called a slurry in which abrasive grains are dispersed in an oil as a working liquid, and the abrasive grains are fixed to the surface by electrodeposition or bonding (bonding material). A fixed abrasive method using a wire and using a machining fluid for lubrication or cooling is known.

  The working fluid used in the loose abrasive wire saw may be an oily slurry or a water-soluble slurry, but there are problems such as recycling after use and wastewater treatment, and flammability concerns. Therefore, in recent years, the use of water-soluble slurries containing glycol-based components has become mainstream (see, for example, Patent Document 3). On the other hand, the use of water-soluble machining fluid is the mainstream as the machining fluid used for fixed abrasive wire saws, and it contains glycol components for the purpose of improving affinity (surface activity) and permeability. There are many things.

JP 2003-159642 A JP 2009-190140 A JP 2007-031502 A

  In order to regenerate the guide roller having the above-described divided structure, it is necessary to re-mold the resin layer on the divided pieces constituting the outer roller. In the operation of re-molding the resin layer on the divided piece, the resin layer is once removed from the divided piece by cutting, and then the oily component of the working liquid that has penetrated into the resin layer and adhered to the outer surface of the divided piece is cleaned with an organic solvent. Cleaning process to wipe is performed.

  However, on the outer surface of the used guide roller split piece in the wire saw using the above water-soluble processing liquid, not only the oily component of the processing liquid but also the water-soluble component, specifically, the glycol-based component is passed through the resin layer. The glycol-based component adheres and enters the micropores formed on the outer surface of the divided piece. For this reason, it is difficult to wipe even such a glycol component cleanly only by wiping with an organic solvent, and the glycol component remains on the outer surface of the divided piece.

  When the resin layer is integrally formed on the outer surface of the divided piece in which the glycol-based component remains in this way, the glycol-based component remaining on the outer surface of the divided piece inhibits the adhesion between the divided piece and the resin layer, Adhesiveness between these divided pieces and the resin layer is lowered. Thereby, when using the regenerated guide roller, the resin layer may be peeled off from the outer roller.

  The present invention has been made in view of such a point, and an object of the present invention is to prevent the resin layer constituting the outer peripheral portion from being peeled from the guide roller to be recycled.

  In order to achieve the above object, in the present invention, the outer peripheral surface of the roller body from which the resin layer has been removed is washed with water.

  Specifically, the present invention is directed to a method for regenerating a resin layer of a wire saw guide roller integrally formed in a state where a resin layer around which a cutting wire is wound is bonded to an outer peripheral surface of a cylindrical roller body. And the following solutions were taken.

  That is, the first invention relates to a resin layer removing step for removing the resin layer from the roller body, a cleaning step for cleaning the outer peripheral surface of the roller body from which the resin layer has been removed, and the cleaned outer peripheral surface of the roller body. And a resin layer molding step of integrally molding the resin layer using a mold after applying the molding adhesive. And 1st invention wash | cleans the outer peripheral surface of a roller main body with water at a washing | cleaning step. “Washing” as used herein means not only water at room temperature, but also washing with hot water, cold water, and pressure water, as well as washing with water vapor and wiping with water.

  According to a second aspect of the present invention, in the method for regenerating a wire saw guide roller according to the first aspect of the invention, the roller body is removably attached to the inner roller supported by the roller support shaft of the wire saw and the outer peripheral surface of the inner roller. An outer roller, the outer roller being a casting, and a method for regenerating a guide roller having an outer peripheral surface on which a resin layer is integrally formed. In the resin layer removing step, a process for removing the resin layer is performed on the outer roller removed from the inner roller. The second invention is characterized in that, in the cleaning step, the outer surface of the outer roller is subjected to high-pressure cleaning with water. “High-pressure cleaning” as used herein means cleaning with water discharged at a pressure higher than a general water pressure (eg, 0.3 MPa).

  According to a third aspect of the present invention, in the method for regenerating a wire saw guide roller according to the first or second aspect, the outer peripheral surface of the roller body is wiped with an organic solvent in the cleaning step.

  According to a fourth aspect of the present invention, in the method for regenerating a wire saw guide roller according to any one of the first to third aspects, after removing the resin layer in the resin layer removing step, shot blasting is performed on the outer peripheral surface of the roller body. It is characterized by giving.

  According to a fifth invention, in the method for regenerating a wire saw guide roller according to any one of the first to fourth inventions, the wire saw guide roller supplies the wire with a working fluid containing a water-soluble glycol component. The guide roller is a guide roller used in a wire saw that cuts a workpiece by guiding and running the wire supplied with the machining fluid in a guide groove.

  According to the first invention, after removing the resin layer from the roller body, the outer peripheral surface of the roller body is washed with water, so that the guide roller to be regenerated contains a water-soluble component such as a glycol-based component. Even in the case of a used guide roller in a wire saw using a liquid, a water-soluble processing liquid component that has penetrated into the resin layer and adhered to the outer peripheral surface of the roller body can be dissolved in water and removed. Thereby, when the resin layer is integrally formed on the outer peripheral surface of the roller body, the resin layer can be firmly adhered to the roller body. Therefore, it is possible to prevent the resin layer constituting the outer peripheral portion from being peeled off from the recycled guide roller.

  According to the second invention, since the outer peripheral surface of the outer roller is washed with water at a high pressure, even if the outer roller is a casting, a glycol-based component or the like that has entered a minute hole formed in the outer peripheral surface of the outer roller. Even water-soluble processing fluid components can be sufficiently removed with water. Thereby, the water-soluble processing liquid component adhering to the outer peripheral surface of the outer roller can be surely removed.

  According to the third aspect of the invention, since the outer peripheral surface of the roller body is wiped with an organic solvent together with water washing, the processing liquid component that cannot be washed away with water can also be removed from the outer peripheral surface of the roller body. Accordingly, it is possible to prevent the adhesion between the roller main body and the resin layer from being hindered by not only water-soluble processing liquid components such as glycol components but also other processing liquid components.

  According to the fourth aspect of the invention, since the outer peripheral surface of the roller body is subjected to shot blasting after the resin layer is removed from the roller main body, when the resin layer is integrally formed on the outer peripheral surface of the roller main body, The resin layer enters a large number of dimples formed on the outer peripheral surface of the roller body by processing to obtain an anchor effect, and the interface area between the roller body and the resin layer increases. Thereby, the adhesive strength between the roller body and the resin layer can be increased.

  According to the fifth aspect of the present invention, the used guide roller used in the wire saw using the processing liquid containing the water-soluble glycol component can be regenerated well.

FIG. 1 is a perspective view showing a main part of a wire saw in which a guide roller according to an embodiment of the present invention is used. FIG. 2 is an exploded perspective view showing a schematic configuration of the guide roller according to the embodiment of the present invention in a partial cross section. FIG. 3 is a flowchart of the resin layer recycling method for the guide roller according to the embodiment of the present invention.

  DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments according to the present invention will be described in detail with reference to the drawings. The following embodiments are essentially preferable examples, and are not intended to limit the scope of the present invention, its application, or its use.

  In this embodiment, a wire saw 100 in which the guide roller 10 according to the present invention is used will be described using a loose abrasive wire saw 100 as an example. FIG. 1 is a perspective view showing a main part of a loose abrasive wire saw 100.

  As shown in FIG. 1, the wire saw 100 includes a plurality (two in the example shown in FIG. 1) of cylindrical guide rollers 10 that rotate about rotation axes A that are parallel to each other. A cutting wire 101 made of a piano wire or the like is spirally wound around the outer peripheral surfaces of the plurality of guide rollers 10, and a wire row 102 arranged at an equal pitch (for example, about several hundred μm) is provided between the guide rollers 10. Is formed.

  The wire saw 100 also has a wire feed mechanism (not shown) that runs at high speed by winding the wire 101 from one end side and winding the other end side, and a slurry S in the running wire row 102. And a work holding unit 104 for holding a work (workpiece) W such as a semiconductor ingot. The wire feeding mechanism is configured to be able to switch the feeding direction of the wire 101 to the reciprocating direction. Slurry S is a cutting processing fluid in which abrasive grains are dispersed in an oil, and includes a water-soluble glycol-based component such as ethylene glycol.

  The wire saw 100 travels at a high speed while guiding the wire 101 by the plurality of guide rollers 10, and supplies the slurry S from the processing liquid supply device 103 to the traveling wire array 102, while the wire array 102 to which the slurry S adheres. The workpiece W held by the workpiece holding unit 104 is pressed from above, and by doing so, the workpiece W is cut into a plurality of thin pieces.

  FIG. 2 is an exploded perspective view showing a schematic configuration of the guide roller 10 in a partial cross section. As shown in FIG. 2, the guide roller 10 includes a cylindrical inner roller 11 that is rotatably supported by a roller support shaft 105 of the wire saw 100 via a bearing (not shown), and an outer peripheral surface of the inner roller 11. And a fixed cylindrical outer roller 12.

  Both the inner roller 11 and the outer roller 12 are casts formed of a relatively hard material such as metal, specifically nickel cast iron, and constitute a cylindrical roller body 13 that is the main body of the guide roller 10. ing. Since the outer roller 12 is a casting, it has an outer peripheral surface on which a large number of minute holes (not shown) are formed.

  The outer roller 12 has a so-called shell-type divided structure, and is composed of two divided pieces 12A and 12B having a semicircular cross section divided in the circumferential direction. A resin layer 15 made of a thermoplastic synthetic resin, such as polyurethane (PU), is integrally formed on the outer surface of each of the divided pieces 12A and 12B, that is, the outer peripheral surface of the outer roller 12. ing. The thickness of the resin layer 15 is about several mm to several tens of mm. A guide groove 16 for guiding the wire 101 is provided on the outer peripheral surface of the resin layer 15.

  The two divided pieces 12A and 12B constituting the outer roller 12 are respectively attached to the inner roller 11 with fasteners such as bolts, and constitute an exterior body 17 that can be attached to and detached from the outer peripheral surface of the inner roller 11 together with the resin layer 15. ing. In the guide roller 10 having such a configuration, the exterior body 17 is divided into the divided pieces 12A and 12B from the inner roller 11 and removed, so that only the exterior body 17 remains attached to the roller support shaft 105. Can be exchanged.

  The replaced outer package 17 of the used guide roller 10 can be recycled by re-molding the resin layer 15 on the divided pieces 12A and 12B constituting the outer roller 12 and regenerating the resin layer 15 of the guide roller 10. . A method of regenerating the resin layer 15 of the guide roller 10 will be described with reference to FIG.

  FIG. 3 is a flowchart of the resin layer regeneration method of the guide roller 10. As shown in FIG. 3, the resin layer regeneration method for the guide roller 10 according to this embodiment includes a resin layer removal step ST1, a surface processing step ST2, a cleaning step ST3, a resin layer molding step ST4, and guide groove formation. And step ST5.

  In the resin layer removal step ST1, the resin layer 15 is cut out and removed from the divided pieces 12A and 12B of the exterior body 17 by, for example, cutting using a machine tool. In the subsequent surface processing step ST2, shot blasting is performed in which particles called a projection material collide with the outer surfaces of the divided pieces 12A and 12B from which the resin layer 15 has been removed, that is, the outer peripheral surface of the outer roller 12. Apply. As a result, a large number of dimples are formed on the outer surfaces of the divided pieces 12A and 12B.

  In the next cleaning step ST3, the outer surfaces of the divided pieces 12A and 12B are cleaned. The slurry S supplied to the wire row 102 when using the wire saw 100 soaks into the resin layer 15 constituting the outer peripheral portion of the guide roller 10 and reaches the interface between the outer roller 12 (roller body 13) and the resin layer 15. To penetrate. In this cleaning step ST3, the processing liquid component of the slurry S thus adhering to the outer peripheral surface of the outer roller 12 is cleaned.

  In the washing step ST3, first, a washing process is performed in which the outer surfaces of the divided pieces 12A and 12B are washed with water. Specifically, the divided pieces 12A and 12B are placed on a placing table such as crating, and the entire outer surface of the divided pieces 12A and 12B is rotated with a general water pressure (for example, 0) while rotating the placing table at a constant speed. High pressure cleaning is performed for a predetermined time (for example, about 5 minutes to 10 minutes) with water discharged at a pressure higher than 3 MPa. As a result, water-soluble processing liquid components such as glycol-based components adhering to the outer surfaces of the divided pieces 12A and 12B are sufficiently removed by dissolving them in water up to the minute pores formed on the outer surfaces. be able to. This water washing process may be performed manually by a person or using a dedicated washing machine. The water used for the water washing treatment may be hot water or cold water as well as room temperature water.

  In the cleaning step ST3, after the moisture remaining on the outer surfaces of the divided pieces 12A and 12B washed in this way is blown off by air blow, the outer surfaces of the divided pieces 12A and 12B are naturally dried. And the degreasing washing | cleaning is performed to the outer surface of the dried division | segmentation piece 12A, 12B. Specifically, the outer surfaces of the divided pieces 12A and 12B are wiped with an organic solvent. As a result, not only water-soluble processing liquid components such as glycol-based components but also other processing liquid components that cannot be washed away with water can be removed from the outer surfaces of the divided pieces 12A and 12B.

  In the resin layer molding step ST4 to be performed next, after applying a molding adhesive to be bonded to the outer surfaces of the divided pieces 12A and 12B by thermal reaction or the like, the divided pieces 12A and 12B are accommodated in a mold, and the mold The resin material 15 is poured onto the outer surfaces of the divided pieces 12A and 12B, and is cured after being heated, so that the resin layer 15 is integrally bonded to the outer surfaces of the divided pieces 12A and 12B.

  At this time, since the processing liquid component adhering to the outer surfaces of the divided pieces 12A and 12B is removed even in the cleaning step ST3 performed in advance, even the glycol-based components are removed, so that the adhesion between the divided pieces 12A and 12B and the resin layer 15 is achieved. The resin layer 15 can be firmly adhered to the divided pieces 12A and 12B without being hindered by the processing liquid component such as the glycol-based component of the slurry S.

  In addition, since a large number of dimples are formed on the outer surfaces of the divided pieces 12A and 12B in the previous surface processing step, the resin layer 15 enters the dimples to obtain an anchor effect, and the divided pieces are formed by the uneven shape of the dimples. Since the interface area between 12A and 12B and the resin layer 15 increases, the resin layer 15 can be firmly adhered to the divided pieces 12A and 12B.

  In the guide groove forming step ST5 performed thereafter, NC (Numerical Control) processing using a machine tool is performed on the outer surface of the resin layer 15 formed on the divided pieces 12A and 12B, that is, the surface forming the outer peripheral surface of the guide roller 10. The guide groove 16 is formed by cutting. Through the above steps, the resin layer 15 of the guide roller 10 can be regenerated.

-Effect of the embodiment-
According to the resin layer regeneration method of the guide roller 10 according to this embodiment, the resin layer 15 can be firmly adhered to the divided pieces 12A and 12B of the outer roller 12, so that the resin layer 15 is regenerated from the guide roller 10 that is recycled. Can be prevented from peeling off.

  In the above embodiment, the outer surfaces of the divided pieces 12A and 12B are washed with water at high pressure in the washing step ST3 in the resin layer regeneration method of the guide roller 10, but the present invention is not limited to this, and in the washing step ST3, Instead of high-pressure cleaning using water, water discharged at a general water pressure may be hung on the outer surfaces of the divided pieces 12A and 12B with a hose or the like.

  The water washing process performed in the washing step ST3 may be a process of washing away the water-soluble components of the slurry S by exposing the outer surfaces of the divided pieces 12A and 12B to water vapor. In addition, the water washing process may be a process in which the divided pieces 12A and 12B are immersed in water stored in a washing tank and bathed. When this water bath treatment is adopted, the water in the cleaning tank in which the divided pieces 12A and 12B are immersed can be stirred, or ultrasonic vibration can be added to the water in the cleaning tank. It is preferable from the viewpoint of improving the cleaning property.

  In addition, the water washing process may just wipe off the outer surface of division | segmentation piece 12A, 12B with water. In short, in the washing step ST3, the outer surfaces of the divided pieces 12A and 12B may be washed with water.

  In the above embodiment, the outer surfaces of the divided pieces 12A and 12B are washed with water after washing in the washing step ST3. However, the present invention is not limited to this, and in the washing step ST3, the divided pieces 12A and 12B are washed. The outer surface may be washed with an organic solvent and then washed with water.

  In the above embodiment, the inner roller 11 and the outer roller 12 are both formed of cast iron. However, the present invention is not limited to this, and the inner roller 11 and the outer roller 12 may be made of other hard metal materials. It may be formed of non-metallic material such as carbon fiber reinforced resin (carbon resin). For example, if the outer roller 12 is formed of a carbon fiber reinforced resin, the outer roller 12 can be reduced in weight, so that the replacement work of the exterior body 17 can be facilitated.

  In the above embodiment, the roller main body 13 is composed of the inner roller 11 and the outer roller 12, and the outer roller 12 has a shell-type divided structure composed of two divided pieces 12A and 12B. Not only this but the outer side roller 12 may be comprised by the 3 or more division | segmentation piece, and the thing of a cylindrical non-division structure may be sufficient as it. The roller body 13 may not be a structure that can be separated into the inner roller 11 and the outer roller 12 but may be an integral member that is rotatably supported by the roller support shaft 105.

  In the above-described embodiment, the loose abrasive type wire saw 100 has been described as an example. However, the present invention is not limited to this, and the guide roller resin layer regeneration method used for the fixed abrasive type wire saw is also used. Of course, it can be applied.

  As mentioned above, although preferable embodiment of this invention was described, the technical scope of this invention is not limited to the range as described in the said embodiment. It is understood by those skilled in the art that the above embodiment is an exemplification, and that various modifications can be made to the combination of each component and each processing process, and such modifications are also within the scope of the present invention. By the way.

  As described above, the present invention is useful for a method for regenerating a resin layer that constitutes the outer periphery of a guide roller used in a wire saw, and in particular, prevents the resin layer from being peeled off from a recycled guide roller. Is suitable for a resin layer regeneration method for a wire saw guide roller.

S Slurry (working fluid)
W Work 10 Guide roller 11 Inner roller 12 Outer roller 12A Divided piece 12B Divided piece 13 Roller body 15 Resin layer 16 Guide groove 17 Exterior body 100 Wire saw
DESCRIPTION OF SYMBOLS 101 Wire 102 Wire row 103 Processing liquid supply apparatus 104 Work holding part 105 Roller support shaft

Claims (5)

A method of regenerating the resin layer of a wire saw guide roller integrally formed in a state where a resin layer around which a cutting wire is wound is bonded to an outer peripheral surface of a cylindrical roller body,
A resin layer removing step of removing the resin layer from the roller body;
A cleaning step of cleaning the outer peripheral surface of the roller body from which the resin layer has been removed;
A resin layer molding step of integrally molding the resin layer using a mold after applying a molding adhesive to the cleaned outer peripheral surface of the roller body,
In the cleaning step, the outer peripheral surface of the roller body is washed with water, and the resin layer regeneration method for the wire saw guide roller is provided. In the resin layer reproduction | regeneration method of the guide roller for wire saws described in Claim 1,
The roller body includes an inner roller supported by a roller support shaft of a wire saw, and an outer roller detachably attached to the outer peripheral surface of the inner roller,
The outer roller is a casting, and has an outer peripheral surface on which the resin layer is integrally formed,
In the resin layer removing step, a process of removing the resin layer is performed on the outer roller removed from the inner roller,
In the cleaning step, the outer peripheral surface of the outer roller is subjected to high-pressure cleaning with water, and the resin layer regeneration method for a wire saw guide roller is provided. In the resin layer reproduction | regeneration method of the guide roller for wire saws described in Claim 1 or 2,
In the cleaning step, the outer peripheral surface of the roller body is wiped with an organic solvent, and the resin layer regeneration method for a wire saw guide roller is provided. In the resin layer reproduction | regeneration method of the guide roller for wire saws described in any one of Claims 1-3,
A method for regenerating a resin layer of a guide roller for a wire saw, wherein after removing the resin layer in the resin layer removing step, shot blasting is performed on an outer peripheral surface of the roller body. In the resin layer reproduction | regeneration method of the guide roller for wire saws described in any one of Claims 1-4,
The wire saw guide roller is a wire saw for cutting a workpiece by supplying a working fluid containing a water-soluble glycol component to the wire, and guiding and running the wire supplied with the working fluid through the guide groove. A resin layer regeneration method for a wire saw guide roller, characterized in that the guide roller is used.

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