JP2016085323A - Method for manufacturing color filter and color filter - Google Patents
Method for manufacturing color filter and color filter Download PDFInfo
- Publication number
- JP2016085323A JP2016085323A JP2014217289A JP2014217289A JP2016085323A JP 2016085323 A JP2016085323 A JP 2016085323A JP 2014217289 A JP2014217289 A JP 2014217289A JP 2014217289 A JP2014217289 A JP 2014217289A JP 2016085323 A JP2016085323 A JP 2016085323A
- Authority
- JP
- Japan
- Prior art keywords
- photosensitive resin
- resin composition
- color filter
- group
- color
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 38
- 238000004519 manufacturing process Methods 0.000 title claims description 30
- 239000011342 resin composition Substances 0.000 claims abstract description 80
- 150000001875 compounds Chemical class 0.000 claims abstract description 63
- -1 cyclic acid anhydride Chemical class 0.000 claims abstract description 41
- 239000000758 substrate Substances 0.000 claims abstract description 36
- 239000004593 Epoxy Substances 0.000 claims abstract description 34
- 150000001732 carboxylic acid derivatives Chemical class 0.000 claims abstract description 16
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims abstract description 12
- 239000003999 initiator Substances 0.000 claims abstract description 5
- 239000000178 monomer Substances 0.000 claims abstract description 5
- 238000001035 drying Methods 0.000 claims description 11
- 230000008569 process Effects 0.000 claims description 10
- 230000007613 environmental effect Effects 0.000 claims description 6
- 238000006243 chemical reaction Methods 0.000 abstract description 12
- 239000000203 mixture Substances 0.000 abstract description 12
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 abstract description 9
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N fluorene Chemical compound C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 abstract description 6
- 229930185605 Bisphenol Natural products 0.000 abstract description 3
- 239000000049 pigment Substances 0.000 description 32
- 238000002360 preparation method Methods 0.000 description 26
- 239000002253 acid Substances 0.000 description 20
- 239000002904 solvent Substances 0.000 description 18
- 239000000463 material Substances 0.000 description 16
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 15
- 239000000243 solution Substances 0.000 description 14
- 239000007787 solid Substances 0.000 description 13
- 238000011161 development Methods 0.000 description 12
- 239000002585 base Substances 0.000 description 11
- 230000015572 biosynthetic process Effects 0.000 description 11
- 239000002270 dispersing agent Substances 0.000 description 11
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 10
- 239000006185 dispersion Substances 0.000 description 10
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 10
- 238000003786 synthesis reaction Methods 0.000 description 9
- 238000004438 BET method Methods 0.000 description 8
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 8
- 239000003054 catalyst Substances 0.000 description 8
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 8
- 229910052753 mercury Inorganic materials 0.000 description 8
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 8
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 7
- 125000004432 carbon atom Chemical group C* 0.000 description 7
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 7
- 125000004018 acid anhydride group Chemical group 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 125000003700 epoxy group Chemical group 0.000 description 6
- 239000012860 organic pigment Substances 0.000 description 6
- 239000004033 plastic Substances 0.000 description 6
- 229920003023 plastic Polymers 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 5
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 5
- LFBALUPVVFCEPA-UHFFFAOYSA-N 4-(3,4-dicarboxyphenyl)phthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)C(C(O)=O)=C1 LFBALUPVVFCEPA-UHFFFAOYSA-N 0.000 description 5
- 238000004566 IR spectroscopy Methods 0.000 description 5
- 239000003513 alkali Substances 0.000 description 5
- 125000000217 alkyl group Chemical group 0.000 description 5
- 150000002148 esters Chemical class 0.000 description 5
- 239000004615 ingredient Substances 0.000 description 5
- 239000003505 polymerization initiator Substances 0.000 description 5
- 238000006116 polymerization reaction Methods 0.000 description 5
- 239000004094 surface-active agent Substances 0.000 description 5
- 238000012719 thermal polymerization Methods 0.000 description 5
- KMOUUZVZFBCRAM-UHFFFAOYSA-N 1,2,3,6-tetrahydrophthalic anhydride Chemical compound C1C=CCC2C(=O)OC(=O)C21 KMOUUZVZFBCRAM-UHFFFAOYSA-N 0.000 description 4
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 4
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 4
- 230000005587 bubbling Effects 0.000 description 4
- 125000000524 functional group Chemical group 0.000 description 4
- 239000003112 inhibitor Substances 0.000 description 4
- 229920003986 novolac Polymers 0.000 description 4
- XYFCBTPGUUZFHI-UHFFFAOYSA-N phosphine group Chemical group P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 3
- 206010034972 Photosensitivity reaction Diseases 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical group CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 125000003118 aryl group Chemical group 0.000 description 3
- 238000009835 boiling Methods 0.000 description 3
- 229920006317 cationic polymer Polymers 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 150000002430 hydrocarbons Chemical group 0.000 description 3
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 3
- 239000000976 ink Substances 0.000 description 3
- 238000003801 milling Methods 0.000 description 3
- 230000036211 photosensitivity Effects 0.000 description 3
- 230000000704 physical effect Effects 0.000 description 3
- 230000000087 stabilizing effect Effects 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- VQYUAFDBUVMFKD-UHFFFAOYSA-N 1-(4-phenylsulfanylphenyl)octane-1,2-dione Chemical compound C1=CC(C(=O)C(=O)CCCCCC)=CC=C1SC1=CC=CC=C1 VQYUAFDBUVMFKD-UHFFFAOYSA-N 0.000 description 2
- FALRKNHUBBKYCC-UHFFFAOYSA-N 2-(chloromethyl)pyridine-3-carbonitrile Chemical compound ClCC1=NC=CC=C1C#N FALRKNHUBBKYCC-UHFFFAOYSA-N 0.000 description 2
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 2
- 125000000590 4-methylphenyl group Chemical group [H]C1=C([H])C(=C([H])C([H])=C1*)C([H])([H])[H] 0.000 description 2
- YWFPGFJLYRKYJZ-UHFFFAOYSA-N 9,9-bis(4-hydroxyphenyl)fluorene Chemical compound C1=CC(O)=CC=C1C1(C=2C=CC(O)=CC=2)C2=CC=CC=C2C2=CC=CC=C21 YWFPGFJLYRKYJZ-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 2
- LGRFSURHDFAFJT-UHFFFAOYSA-N Phthalic anhydride Natural products C1=CC=C2C(=O)OC(=O)C2=C1 LGRFSURHDFAFJT-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 150000008065 acid anhydrides Chemical class 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- 239000002518 antifoaming agent Substances 0.000 description 2
- 238000000889 atomisation Methods 0.000 description 2
- 239000011324 bead Substances 0.000 description 2
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 2
- 239000012965 benzophenone Substances 0.000 description 2
- 230000000740 bleeding effect Effects 0.000 description 2
- JHIWVOJDXOSYLW-UHFFFAOYSA-N butyl 2,2-difluorocyclopropane-1-carboxylate Chemical compound CCCCOC(=O)C1CC1(F)F JHIWVOJDXOSYLW-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 2
- 229930003836 cresol Natural products 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- UYAAVKFHBMJOJZ-UHFFFAOYSA-N diimidazo[1,3-b:1',3'-e]pyrazine-5,10-dione Chemical compound O=C1C2=CN=CN2C(=O)C2=CN=CN12 UYAAVKFHBMJOJZ-UHFFFAOYSA-N 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 239000003759 ester based solvent Substances 0.000 description 2
- 239000004210 ether based solvent Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- MUTGBJKUEZFXGO-UHFFFAOYSA-N hexahydrophthalic anhydride Chemical compound C1CCCC2C(=O)OC(=O)C21 MUTGBJKUEZFXGO-UHFFFAOYSA-N 0.000 description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 125000003261 o-tolyl group Chemical group [H]C1=C([H])C(*)=C(C([H])=C1[H])C([H])([H])[H] 0.000 description 2
- 125000000962 organic group Chemical group 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 2
- 150000004714 phosphonium salts Chemical group 0.000 description 2
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 229940116423 propylene glycol diacetate Drugs 0.000 description 2
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 229930195734 saturated hydrocarbon Natural products 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 229940014800 succinic anhydride Drugs 0.000 description 2
- 150000003512 tertiary amines Chemical class 0.000 description 2
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 2
- 229930195735 unsaturated hydrocarbon Natural products 0.000 description 2
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 2
- 229920002554 vinyl polymer Polymers 0.000 description 2
- 239000000080 wetting agent Substances 0.000 description 2
- YILWOUDYBRFIMW-UHFFFAOYSA-N (9-ethyl-6-nitrocarbazol-3-yl)-[4-(1-methoxypropan-2-yloxy)-2-methylphenyl]methanone Chemical compound CCN1C2=CC=C(C=C2C2=C1C=CC(=C2)C(=O)C1=C(C)C=C(OC(C)COC)C=C1)[N+]([O-])=O YILWOUDYBRFIMW-UHFFFAOYSA-N 0.000 description 1
- QYGBYAQGBVHMDD-XQRVVYSFSA-N (z)-2-cyano-3-thiophen-2-ylprop-2-enoic acid Chemical compound OC(=O)C(\C#N)=C/C1=CC=CS1 QYGBYAQGBVHMDD-XQRVVYSFSA-N 0.000 description 1
- WBODDOZXDKQEFS-UHFFFAOYSA-N 1,2,3,4-tetramethyl-5-phenylbenzene Chemical group CC1=C(C)C(C)=CC(C=2C=CC=CC=2)=C1C WBODDOZXDKQEFS-UHFFFAOYSA-N 0.000 description 1
- MYWOJODOMFBVCB-UHFFFAOYSA-N 1,2,6-trimethylphenanthrene Chemical compound CC1=CC=C2C3=CC(C)=CC=C3C=CC2=C1C MYWOJODOMFBVCB-UHFFFAOYSA-N 0.000 description 1
- FWHUTKPMCKSUCV-UHFFFAOYSA-N 1,3-dioxo-3a,4,5,6,7,7a-hexahydro-2-benzofuran-5-carboxylic acid Chemical compound C1C(C(=O)O)CCC2C(=O)OC(=O)C12 FWHUTKPMCKSUCV-UHFFFAOYSA-N 0.000 description 1
- VNQXSTWCDUXYEZ-UHFFFAOYSA-N 1,7,7-trimethylbicyclo[2.2.1]heptane-2,3-dione Chemical compound C1CC2(C)C(=O)C(=O)C1C2(C)C VNQXSTWCDUXYEZ-UHFFFAOYSA-N 0.000 description 1
- CWRBWLKXTXSMEH-UHFFFAOYSA-N 1-[9-ethyl-6-(2-methylbenzoyl)carbazol-3-yl]ethanone Chemical compound C=1C=C2N(CC)C3=CC=C(C(C)=O)C=C3C2=CC=1C(=O)C1=CC=CC=C1C CWRBWLKXTXSMEH-UHFFFAOYSA-N 0.000 description 1
- RWNUSVWFHDHRCJ-UHFFFAOYSA-N 1-butoxypropan-2-ol Chemical compound CCCCOCC(C)O RWNUSVWFHDHRCJ-UHFFFAOYSA-N 0.000 description 1
- JOLQKTGDSGKSKJ-UHFFFAOYSA-N 1-ethoxypropan-2-ol Chemical compound CCOCC(C)O JOLQKTGDSGKSKJ-UHFFFAOYSA-N 0.000 description 1
- LIPRQQHINVWJCH-UHFFFAOYSA-N 1-ethoxypropan-2-yl acetate Chemical compound CCOCC(C)OC(C)=O LIPRQQHINVWJCH-UHFFFAOYSA-N 0.000 description 1
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 1
- BFQFFNWLTHFJOZ-UHFFFAOYSA-N 2-(1,3-benzodioxol-5-yl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound ClC(Cl)(Cl)C1=NC(C(Cl)(Cl)Cl)=NC(C=2C=C3OCOC3=CC=2)=N1 BFQFFNWLTHFJOZ-UHFFFAOYSA-N 0.000 description 1
- CQDMETPQGYKYJG-UHFFFAOYSA-N 2-[(2-methylpropan-2-yl)oxy]-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OC(C)(C)C)C(=O)C1=CC=CC=C1 CQDMETPQGYKYJG-UHFFFAOYSA-N 0.000 description 1
- BDLXTDLGTWNUFM-UHFFFAOYSA-N 2-[(2-methylpropan-2-yl)oxy]ethanol Chemical compound CC(C)(C)OCCO BDLXTDLGTWNUFM-UHFFFAOYSA-N 0.000 description 1
- WMYINDVYGQKYMI-UHFFFAOYSA-N 2-[2,2-bis(hydroxymethyl)butoxymethyl]-2-ethylpropane-1,3-diol Chemical compound CCC(CO)(CO)COCC(CC)(CO)CO WMYINDVYGQKYMI-UHFFFAOYSA-N 0.000 description 1
- MXPYJVUYLVNEBB-UHFFFAOYSA-N 2-[2-(2-carboxybenzoyl)oxycarbonylbenzoyl]oxycarbonylbenzoic acid Chemical compound OC(=O)C1=CC=CC=C1C(=O)OC(=O)C1=CC=CC=C1C(=O)OC(=O)C1=CC=CC=C1C(O)=O MXPYJVUYLVNEBB-UHFFFAOYSA-N 0.000 description 1
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 1
- UHFFVFAKEGKNAQ-UHFFFAOYSA-N 2-benzyl-2-(dimethylamino)-1-(4-morpholin-4-ylphenyl)butan-1-one Chemical compound C=1C=C(N2CCOCC2)C=CC=1C(=O)C(CC)(N(C)C)CC1=CC=CC=C1 UHFFVFAKEGKNAQ-UHFFFAOYSA-N 0.000 description 1
- 125000004182 2-chlorophenyl group Chemical group [H]C1=C([H])C(Cl)=C(*)C([H])=C1[H] 0.000 description 1
- KMNCBSZOIQAUFX-UHFFFAOYSA-N 2-ethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)C(=O)C1=CC=CC=C1 KMNCBSZOIQAUFX-UHFFFAOYSA-N 0.000 description 1
- NLGDWWCZQDIASO-UHFFFAOYSA-N 2-hydroxy-1-(7-oxabicyclo[4.1.0]hepta-1,3,5-trien-2-yl)-2-phenylethanone Chemical class OC(C(=O)c1cccc2Oc12)c1ccccc1 NLGDWWCZQDIASO-UHFFFAOYSA-N 0.000 description 1
- XMLYCEVDHLAQEL-UHFFFAOYSA-N 2-hydroxy-2-methyl-1-phenylpropan-1-one Chemical compound CC(C)(O)C(=O)C1=CC=CC=C1 XMLYCEVDHLAQEL-UHFFFAOYSA-N 0.000 description 1
- 125000000094 2-phenylethyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])C([H])([H])* 0.000 description 1
- OLQWMCSSZKNOLQ-UHFFFAOYSA-N 3-(2,5-dioxooxolan-3-yl)oxolane-2,5-dione Chemical compound O=C1OC(=O)CC1C1C(=O)OC(=O)C1 OLQWMCSSZKNOLQ-UHFFFAOYSA-N 0.000 description 1
- QCAHUFWKIQLBNB-UHFFFAOYSA-N 3-(3-methoxypropoxy)propan-1-ol Chemical compound COCCCOCCCO QCAHUFWKIQLBNB-UHFFFAOYSA-N 0.000 description 1
- MPAGVACEWQNVQO-UHFFFAOYSA-N 3-acetyloxybutyl acetate Chemical compound CC(=O)OC(C)CCOC(C)=O MPAGVACEWQNVQO-UHFFFAOYSA-N 0.000 description 1
- JSGVZVOGOQILFM-UHFFFAOYSA-N 3-methoxy-1-butanol Chemical compound COC(C)CCO JSGVZVOGOQILFM-UHFFFAOYSA-N 0.000 description 1
- QMYGFTJCQFEDST-UHFFFAOYSA-N 3-methoxybutyl acetate Chemical compound COC(C)CCOC(C)=O QMYGFTJCQFEDST-UHFFFAOYSA-N 0.000 description 1
- VATRWWPJWVCZTA-UHFFFAOYSA-N 3-oxo-n-[2-(trifluoromethyl)phenyl]butanamide Chemical compound CC(=O)CC(=O)NC1=CC=CC=C1C(F)(F)F VATRWWPJWVCZTA-UHFFFAOYSA-N 0.000 description 1
- LVNLBBGBASVLLI-UHFFFAOYSA-N 3-triethoxysilylpropylurea Chemical compound CCO[Si](OCC)(OCC)CCCNC(N)=O LVNLBBGBASVLLI-UHFFFAOYSA-N 0.000 description 1
- HMMBJOWWRLZEMI-UHFFFAOYSA-N 4,5,6,7-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1CCCC2=C1C(=O)OC2=O HMMBJOWWRLZEMI-UHFFFAOYSA-N 0.000 description 1
- IRQWEODKXLDORP-UHFFFAOYSA-N 4-ethenylbenzoic acid Chemical compound OC(=O)C1=CC=C(C=C)C=C1 IRQWEODKXLDORP-UHFFFAOYSA-N 0.000 description 1
- VQVIHDPBMFABCQ-UHFFFAOYSA-N 5-(1,3-dioxo-2-benzofuran-5-carbonyl)-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(C(C=2C=C3C(=O)OC(=O)C3=CC=2)=O)=C1 VQVIHDPBMFABCQ-UHFFFAOYSA-N 0.000 description 1
- QQGYZOYWNCKGEK-UHFFFAOYSA-N 5-[(1,3-dioxo-2-benzofuran-5-yl)oxy]-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(OC=2C=C3C(=O)OC(C3=CC=2)=O)=C1 QQGYZOYWNCKGEK-UHFFFAOYSA-N 0.000 description 1
- LQOPXMZSGSTGMF-UHFFFAOYSA-N 6004-79-1 Chemical compound C1CC2C3C(=O)OC(=O)C3C1C2 LQOPXMZSGSTGMF-UHFFFAOYSA-N 0.000 description 1
- IKHGUXGNUITLKF-UHFFFAOYSA-N Acetaldehyde Chemical compound CC=O IKHGUXGNUITLKF-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- 239000004342 Benzoyl peroxide Substances 0.000 description 1
- OMPJBNCRMGITSC-UHFFFAOYSA-N Benzoylperoxide Chemical compound C=1C=CC=CC=1C(=O)OOC(=O)C1=CC=CC=C1 OMPJBNCRMGITSC-UHFFFAOYSA-N 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- XUVIOLDRXNHEBJ-UHFFFAOYSA-N C(C)(=O)C1=CC=2C(C3=CC(=CC=C3C=2C=C1)C(C1=C(C=CC=C1)C)=O)(CCC)CCC Chemical compound C(C)(=O)C1=CC=2C(C3=CC(=CC=C3C=2C=C1)C(C1=C(C=CC=C1)C)=O)(CCC)CCC XUVIOLDRXNHEBJ-UHFFFAOYSA-N 0.000 description 1
- CNQSHDJLXSACFD-UHFFFAOYSA-N C1(C=CC=C2SC3=CC=CC=C3C=C12)=O.CC(CC1=CC=C(C=C1)SC)(C)N1CCOCC1 Chemical compound C1(C=CC=C2SC3=CC=CC=C3C=C12)=O.CC(CC1=CC=C(C=C1)SC)(C)N1CCOCC1 CNQSHDJLXSACFD-UHFFFAOYSA-N 0.000 description 1
- ZPAKUZKMGJJMAA-UHFFFAOYSA-N Cyclohexane-1,2,4,5-tetracarboxylic acid Chemical compound OC(=O)C1CC(C(O)=O)C(C(O)=O)CC1C(O)=O ZPAKUZKMGJJMAA-UHFFFAOYSA-N 0.000 description 1
- YYLLIJHXUHJATK-UHFFFAOYSA-N Cyclohexyl acetate Chemical compound CC(=O)OC1CCCCC1 YYLLIJHXUHJATK-UHFFFAOYSA-N 0.000 description 1
- YFPJFKYCVYXDJK-UHFFFAOYSA-N Diphenylphosphine oxide Chemical compound C=1C=CC=CC=1[P+](=O)C1=CC=CC=C1 YFPJFKYCVYXDJK-UHFFFAOYSA-N 0.000 description 1
- BRLQWZUYTZBJKN-UHFFFAOYSA-N Epichlorohydrin Chemical compound ClCC1CO1 BRLQWZUYTZBJKN-UHFFFAOYSA-N 0.000 description 1
- IMROMDMJAWUWLK-UHFFFAOYSA-N Ethenol Chemical class OC=C IMROMDMJAWUWLK-UHFFFAOYSA-N 0.000 description 1
- ILKOAJGHVUCDIV-UHFFFAOYSA-N FC1=CC=C(N2C=CC=C2)C(F)=C1[Ti]C(C=1F)=C(F)C=CC=1N1C=CC=C1 Chemical compound FC1=CC=C(N2C=CC=C2)C(F)=C1[Ti]C(C=1F)=C(F)C=CC=1N1C=CC=C1 ILKOAJGHVUCDIV-UHFFFAOYSA-N 0.000 description 1
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 239000005062 Polybutadiene Substances 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- NRCMAYZCPIVABH-UHFFFAOYSA-N Quinacridone Chemical compound N1C2=CC=CC=C2C(=O)C2=C1C=C1C(=O)C3=CC=CC=C3NC1=C2 NRCMAYZCPIVABH-UHFFFAOYSA-N 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 239000006087 Silane Coupling Agent Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000007983 Tris buffer Substances 0.000 description 1
- ALBJGICXDBJZGK-UHFFFAOYSA-N [1-[(1-acetyloxy-1-phenylethyl)diazenyl]-1-phenylethyl] acetate Chemical compound C=1C=CC=CC=1C(C)(OC(=O)C)N=NC(C)(OC(C)=O)C1=CC=CC=C1 ALBJGICXDBJZGK-UHFFFAOYSA-N 0.000 description 1
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 150000008062 acetophenones Chemical class 0.000 description 1
- 125000005396 acrylic acid ester group Chemical group 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000004840 adhesive resin Substances 0.000 description 1
- 229920006223 adhesive resin Polymers 0.000 description 1
- 239000005456 alcohol based solvent Substances 0.000 description 1
- 125000002723 alicyclic group Chemical group 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 229910000288 alkali metal carbonate Inorganic materials 0.000 description 1
- 150000008041 alkali metal carbonates Chemical class 0.000 description 1
- 150000008044 alkali metal hydroxides Chemical class 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- 229920006318 anionic polymer Polymers 0.000 description 1
- 229940121375 antifungal agent Drugs 0.000 description 1
- 239000003429 antifungal agent Substances 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000003849 aromatic solvent Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 150000008366 benzophenones Chemical class 0.000 description 1
- 235000019400 benzoyl peroxide Nutrition 0.000 description 1
- AOJOEFVRHOZDFN-UHFFFAOYSA-N benzyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1=CC=CC=C1 AOJOEFVRHOZDFN-UHFFFAOYSA-N 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- 229930006711 bornane-2,3-dione Natural products 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000004555 carbazol-3-yl group Chemical group C1=CC(=CC=2C3=CC=CC=C3NC12)* 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 150000001851 cinnamic acid derivatives Chemical class 0.000 description 1
- 239000006103 coloring component Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 239000003431 cross linking reagent Substances 0.000 description 1
- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical class C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 1
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 1
- PESYEWKSBIWTAK-UHFFFAOYSA-N cyclopenta-1,3-diene;titanium(2+) Chemical class [Ti+2].C=1C=C[CH-]C=1.C=1C=C[CH-]C=1 PESYEWKSBIWTAK-UHFFFAOYSA-N 0.000 description 1
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical compound C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 1
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 1
- PPSZHCXTGRHULJ-UHFFFAOYSA-N dioxazine Chemical compound O1ON=CC=C1 PPSZHCXTGRHULJ-UHFFFAOYSA-N 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000009837 dry grinding Methods 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- ANSXAPJVJOKRDJ-UHFFFAOYSA-N furo[3,4-f][2]benzofuran-1,3,5,7-tetrone Chemical compound C1=C2C(=O)OC(=O)C2=CC2=C1C(=O)OC2=O ANSXAPJVJOKRDJ-UHFFFAOYSA-N 0.000 description 1
- VANNPISTIUFMLH-UHFFFAOYSA-N glutaric anhydride Chemical compound O=C1CCCC(=O)O1 VANNPISTIUFMLH-UHFFFAOYSA-N 0.000 description 1
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000002883 imidazolyl group Chemical group 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000001023 inorganic pigment Substances 0.000 description 1
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 description 1
- PXZQEOJJUGGUIB-UHFFFAOYSA-N isoindolin-1-one Chemical compound C1=CC=C2C(=O)NCC2=C1 PXZQEOJJUGGUIB-UHFFFAOYSA-N 0.000 description 1
- GWVMLCQWXVFZCN-UHFFFAOYSA-N isoindoline Chemical compound C1=CC=C2CNCC2=C1 GWVMLCQWXVFZCN-UHFFFAOYSA-N 0.000 description 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- LVHBHZANLOWSRM-UHFFFAOYSA-N itaconic acid Chemical class OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 1
- 239000005453 ketone based solvent Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 125000000040 m-tolyl group Chemical group [H]C1=C([H])C(*)=C([H])C(=C1[H])C([H])([H])[H] 0.000 description 1
- 150000002688 maleic acid derivatives Chemical class 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- 125000005439 maleimidyl group Chemical class C1(C=CC(N1*)=O)=O 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- XVTQAXXMUNXFMU-UHFFFAOYSA-N methyl 2-(3-oxo-2-pyridin-2-yl-1h-pyrazol-5-yl)acetate Chemical compound N1C(CC(=O)OC)=CC(=O)N1C1=CC=CC=N1 XVTQAXXMUNXFMU-UHFFFAOYSA-N 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 125000001624 naphthyl group Chemical group 0.000 description 1
- 230000003472 neutralizing effect Effects 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 150000001451 organic peroxides Chemical class 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- UCUUFSAXZMGPGH-UHFFFAOYSA-N penta-1,4-dien-3-one Chemical class C=CC(=O)C=C UCUUFSAXZMGPGH-UHFFFAOYSA-N 0.000 description 1
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 1
- DGBWPZSGHAXYGK-UHFFFAOYSA-N perinone Chemical compound C12=NC3=CC=CC=C3N2C(=O)C2=CC=C3C4=C2C1=CC=C4C(=O)N1C2=CC=CC=C2N=C13 DGBWPZSGHAXYGK-UHFFFAOYSA-N 0.000 description 1
- 125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 description 1
- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 description 1
- HPAFOABSQZMTHE-UHFFFAOYSA-N phenyl-(2,4,6-trimethylphenyl)methanone Chemical compound CC1=CC(C)=CC(C)=C1C(=O)C1=CC=CC=C1 HPAFOABSQZMTHE-UHFFFAOYSA-N 0.000 description 1
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 1
- 229940067265 pigment yellow 138 Drugs 0.000 description 1
- 229920006122 polyamide resin Polymers 0.000 description 1
- 229920002857 polybutadiene Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 229920000193 polymethacrylate Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229920005749 polyurethane resin Polymers 0.000 description 1
- 238000011085 pressure filtration Methods 0.000 description 1
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 125000004076 pyridyl group Chemical group 0.000 description 1
- FYNROBRQIVCIQF-UHFFFAOYSA-N pyrrolo[3,2-b]pyrrole-5,6-dione Chemical compound C1=CN=C2C(=O)C(=O)N=C21 FYNROBRQIVCIQF-UHFFFAOYSA-N 0.000 description 1
- 125000000168 pyrrolyl group Chemical group 0.000 description 1
- 125000001453 quaternary ammonium group Chemical group 0.000 description 1
- IZMJMCDDWKSTTK-UHFFFAOYSA-N quinoline yellow Chemical compound C1=CC=CC2=NC(C3C(C4=CC=CC=C4C3=O)=O)=CC=C21 IZMJMCDDWKSTTK-UHFFFAOYSA-N 0.000 description 1
- 229920005604 random copolymer Polymers 0.000 description 1
- WPPDXAHGCGPUPK-UHFFFAOYSA-N red 2 Chemical compound C1=CC=CC=C1C(C1=CC=CC=C11)=C(C=2C=3C4=CC=C5C6=CC=C7C8=C(C=9C=CC=CC=9)C9=CC=CC=C9C(C=9C=CC=CC=9)=C8C8=CC=C(C6=C87)C(C=35)=CC=2)C4=C1C1=CC=CC=C1 WPPDXAHGCGPUPK-UHFFFAOYSA-N 0.000 description 1
- 239000012488 sample solution Substances 0.000 description 1
- 125000000467 secondary amino group Chemical group [H]N([*:1])[*:2] 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000011669 selenium Substances 0.000 description 1
- 238000007086 side reaction Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000007613 slurry method Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- MVQLEZWPIWKLBY-UHFFFAOYSA-N tert-butyl 2-benzoylbenzenecarboperoxoate Chemical compound CC(C)(C)OOC(=O)C1=CC=CC=C1C(=O)C1=CC=CC=C1 MVQLEZWPIWKLBY-UHFFFAOYSA-N 0.000 description 1
- 125000001302 tertiary amino group Chemical group 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- JOUDBUYBGJYFFP-FOCLMDBBSA-N thioindigo Chemical compound S\1C2=CC=CC=C2C(=O)C/1=C1/C(=O)C2=CC=CC=C2S1 JOUDBUYBGJYFFP-FOCLMDBBSA-N 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- QHGNHLZPVBIIPX-UHFFFAOYSA-N tin(ii) oxide Chemical class [Sn]=O QHGNHLZPVBIIPX-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 150000003918 triazines Chemical class 0.000 description 1
- 125000003866 trichloromethyl group Chemical group ClC(Cl)(Cl)* 0.000 description 1
- FRGPKMWIYVTFIQ-UHFFFAOYSA-N triethoxy(3-isocyanatopropyl)silane Chemical compound CCO[Si](OCC)(OCC)CCCN=C=O FRGPKMWIYVTFIQ-UHFFFAOYSA-N 0.000 description 1
- SRPWOOOHEPICQU-UHFFFAOYSA-N trimellitic anhydride Chemical compound OC(=O)C1=CC=C2C(=O)OC(=O)C2=C1 SRPWOOOHEPICQU-UHFFFAOYSA-N 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 239000004034 viscosity adjusting agent Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 238000004383 yellowing Methods 0.000 description 1
Abstract
Description
本発明は、カラーフィルターの製造方法及びカラーフィルターに関する。特に、耐熱温度が150℃以下の基材におけるカラーフィルターの製造方法及びそのような製造方法で製造されたカラーフィルターに関する。 The present invention relates to a color filter manufacturing method and a color filter. In particular, the present invention relates to a method for producing a color filter on a substrate having a heat-resistant temperature of 150 ° C. or lower and a color filter produced by such a production method.
現在、液晶表示デバイスや白色有機ELデバイス、あるいは固体撮像素子等のカラー化のため、カラーフィルターが広く用いられている。基材上にカラーフィルターを形成する方法としては感光性樹脂組成物を用いたフォトリソグラフィーが主流であり、これまではガラスやシリコンウエハー等の比較的耐熱温度の高い基材を用いて、感光性樹脂組成物を200℃以上の高温で処理(ポストベークともいう)して最終硬化させることが行われてきた。 Currently, color filters are widely used for colorization of liquid crystal display devices, white organic EL devices, solid-state imaging devices, and the like. As a method for forming a color filter on a substrate, photolithography using a photosensitive resin composition has been the mainstream, and until now, a relatively high heat-resistant substrate such as glass or silicon wafer has been used for photosensitivity. It has been performed that the resin composition is treated at a high temperature of 200 ° C. or higher (also referred to as post-baking) and finally cured.
最近、デバイスのフレキシブル化やワンチップ化を目的として、プラスチック基板上や白色有機ELデバイス上に直接カラーフィルターを形成することが求められている。ところが、これらの基材は耐熱性が悪く、高々150℃程度の耐熱温度しか有さない場合がある。このような耐熱温度の低い基材に対してカラーフィルターを製造する場合に第1の色のカラーフィルター部を150℃以下(基材の耐熱温度以下)で形成すると、第1の色のカラーフィルター部は硬化膜の強度が不十分となって、第2の色を塗布した際に色の滲み出しが生じるという問題があった。 Recently, for the purpose of making a device flexible or one-chip, it is required to form a color filter directly on a plastic substrate or a white organic EL device. However, these base materials have poor heat resistance and may have a heat resistance temperature of about 150 ° C. at most. When a color filter is manufactured for a substrate having such a low heat resistant temperature, the first color filter is formed by forming the color filter portion of the first color at 150 ° C. or less (below the heat resistant temperature of the substrate). The portion had a problem that the strength of the cured film was insufficient and color bleeding occurred when the second color was applied.
基材の耐熱温度の制約を回避するために、特殊な製造方法の提案がある。例えば特許文献1にはUV硬化インキをフレキソ印刷してカラーフィルターを製造する方法が、特許文献2にはパターンに電子ビームを照射してカラーフィルターを製造する方法が開示されている。 In order to avoid the restriction of the heat-resistant temperature of the substrate, there is a proposal for a special manufacturing method. For example, Patent Document 1 discloses a method of manufacturing a color filter by flexographic printing of UV curable ink, and Patent Document 2 discloses a method of manufacturing a color filter by irradiating a pattern with an electron beam.
一方、特許文献3及び4には、ポスト露光を行うカラーフィルターの製造方法が開示されている。 On the other hand, Patent Documents 3 and 4 disclose a method of manufacturing a color filter that performs post-exposure.
しかし、特許文献1及び2に記載のような特殊な方法においては、従来法と比較してカラーフィルターの品質や歩留まりが課題となりやすい。生産性を考慮すれば特殊な製造方法によることなくカラーフィルターを形成できることが最も有利であり、そのような目的に対して適して使用できる感光性樹脂組成物が強く望まれていた。 However, in the special methods as described in Patent Documents 1 and 2, the quality and yield of the color filter are likely to be problems as compared with the conventional methods. Considering productivity, it is most advantageous that a color filter can be formed without using a special manufacturing method, and a photosensitive resin composition that can be used suitably for such purposes has been strongly desired.
なお、特許文献3及び4は、耐熱温度の低い基材へのカラーフィルターの形成には何ら言及していない。 Patent Documents 3 and 4 do not mention any color filter formation on a substrate having a low heat-resistant temperature.
本発明はかかる従来技術の課題に鑑みてなされたものであり、耐熱温度の低い基材上、例えばプラスチック基板上や白色有機ELデバイス上に直接カラーフィルターを形成可能とするカラーフィルターの製造方法を提供することを目的とする。 The present invention has been made in view of the problems of the prior art, and provides a method for producing a color filter that can directly form a color filter on a substrate having a low heat-resistant temperature, such as a plastic substrate or a white organic EL device. The purpose is to provide.
上記課題を解決するために検討した結果、本発明者等は特定の構造を有する化合物を用いた感光性樹脂組成物が本目的に適していることを見出し、本発明を完成した。 As a result of studies to solve the above problems, the present inventors have found that a photosensitive resin composition using a compound having a specific structure is suitable for this purpose, and completed the present invention.
すなわち、本発明は、感光性樹脂組成物を硬化させた第1の色のカラーフィルター部が形成されている基材に、第1の色とは異なる第2の色のカラーフィルター用の感光性樹脂組成物を塗布し硬化させる工程を含む、カラーフィルターを製造する方法であって、前記感光性樹脂組成物は、(A)ビスフェノールフルオレン型エポキシ化合物とエチレン性不飽和結合基含有カルボン酸とを反応させたヒドロキシ基含有化合物に対して環状酸無水物を反応させて得られた化合物、(B)少なくとも1個のエチレン性不飽和結合を有する重合性モノマー、及び(C)光重合開始剤を含有し、前記基材の耐熱温度は150℃以下であり、前記基材の耐熱温度を超えない環境温度下で行われることを特徴とするカラーフィルターの製造方法である。 That is, the present invention provides photosensitivity for a color filter of a second color different from the first color on a base material on which a color filter portion of the first color obtained by curing the photosensitive resin composition is formed. A method for producing a color filter comprising a step of applying and curing a resin composition, wherein the photosensitive resin composition comprises (A) a bisphenolfluorene type epoxy compound and an ethylenically unsaturated bond group-containing carboxylic acid. A compound obtained by reacting a cyclic acid anhydride with the reacted hydroxy group-containing compound, (B) a polymerizable monomer having at least one ethylenically unsaturated bond, and (C) a photopolymerization initiator. And the heat resistance temperature of the base material is 150 ° C. or less, and the process is performed at an environmental temperature not exceeding the heat resistance temperature of the base material.
ここで、上記製造方法は、(ア)感光性樹脂組成物を基材に塗布する工程、(イ)感光性樹脂組成物を乾燥させる工程、(ウ)感光性樹脂組成物を画像露光する工程、(エ)感光性樹脂組成物を現像する工程、及び(オ)感光性樹脂組成物をポスト露光する工程を順に含むことが好ましく、また、赤色、緑色及び青色の感光性樹脂組成物をそれぞれ使用してカラーフィルターを形成することが好ましい。更に、本発明は、上記のいずれかの方法で製造されたカラーフィルターである。 Here, the manufacturing method includes (a) a step of applying a photosensitive resin composition to a substrate, (b) a step of drying the photosensitive resin composition, and (c) a step of exposing the photosensitive resin composition to an image. (D) preferably includes a step of developing the photosensitive resin composition, and (e) a step of post-exposure of the photosensitive resin composition, and each of the red, green and blue photosensitive resin compositions is included. It is preferably used to form a color filter. Furthermore, the present invention is a color filter manufactured by any one of the methods described above.
以下、本発明を詳細に説明する。
本発明の製造方法は、感光性樹脂組成物を硬化させた第1の色のカラーフィルター部が形成されている基材に、第1の色とは異なる第2の色のカラーフィルター用の感光性樹脂組成物を塗布する工程を含む。色相の異なる複数の感光性樹脂組成物を使用してカラーフィルターを形成することは広く行われており、典型的には赤色、緑色、青色の3種類の感光性樹脂組成物を用いて画素が形成される。また、必要に応じて黄色、橙色、紫色、シアン色、マゼンタ色等も使用されるほか、画面の明るさの改善のために透明色の画素を付加することも行われている。更に、黒色ないし遮光性の感光性樹脂組成物を用いて、画面の周辺部や画素間の遮光のための構造物(ブラックマトリクスともいう)を形成することも一般的である。本発明で使用する感光性樹脂組成物の色相は特に制限されるものではなく、上述した色相以外であってもよい。
Hereinafter, the present invention will be described in detail.
In the production method of the present invention, a photosensitive material for a color filter of a second color different from the first color is formed on a substrate on which a color filter portion of the first color obtained by curing the photosensitive resin composition is formed. The process of apply | coating an adhesive resin composition is included. Forming a color filter using a plurality of photosensitive resin compositions having different hues is widely performed. Typically, a pixel is formed using three types of photosensitive resin compositions of red, green, and blue. It is formed. In addition, yellow, orange, purple, cyan, magenta, and the like are used as necessary, and transparent pixels are added to improve screen brightness. Furthermore, it is also common to form a structure (also referred to as a black matrix) for shielding light between the peripheral portion of the screen and between pixels using a black or light-shielding photosensitive resin composition. The hue of the photosensitive resin composition used in the present invention is not particularly limited, and may be other than the hue described above.
本発明の製造方法は、耐熱温度が150℃以下の基材を使用して、前記基材の耐熱温度を超えない環境温度下で行われることを特徴とする。基材の耐熱温度とは、当該基材を用いてデバイスを作製するにあたりデバイスの機能に影響を及ぼすような寸法変化や特性変化が生じない温度の上限をいい、プラスチック基板の例としてはPETフィルムで100℃程度、PENフィルムで150℃程度が一般的である。白色有機ELデバイスを基材とする場合は、有機EL素子が熱に弱いことから、PETフィルムと同様に100℃程度が耐熱温度である場合が多い。また、カラーフィルターの製造が基材の耐熱温度を超えない環境温度下で行われるとは、単に設備上の設定の温度のみをいうものではなく、その工程のすべての過程において基材及び基材上の感光性樹脂組成物が基材の耐熱温度を超える温度に達しないことを意味する。 The production method of the present invention is characterized in that a substrate having a heat resistant temperature of 150 ° C. or lower is used at an environmental temperature not exceeding the heat resistant temperature of the substrate. The heat-resistant temperature of a base material means the upper limit of the temperature at which no dimensional change or characteristic change occurs that affects the function of the device in manufacturing a device using the base material. An example of a plastic substrate is a PET film. Generally, the temperature is about 100 ° C., and the PEN film is about 150 ° C. When a white organic EL device is used as a base material, since the organic EL element is vulnerable to heat, about 100 ° C. is often the heat resistant temperature as in the case of a PET film. In addition, the fact that the color filter is manufactured at an environmental temperature that does not exceed the heat resistance temperature of the base material does not simply mean the temperature set on the equipment, but the base material and the base material in all steps of the process. It means that the upper photosensitive resin composition does not reach a temperature exceeding the heat resistance temperature of the substrate.
本発明の製造方法で使用する感光性樹脂組成物は、(A)ビスフェノールフルオレン型エポキシ化合物とエチレン性不飽和結合基含有カルボン酸を反応させたヒドロキシ基含有化合物に対して環状酸無水物を反応させて得られた化合物、(B)少なくとも1個のエチレン性不飽和結合を有する重合性モノマー、及び(C)光重合開始剤を含有する。A成分は、ビスフェノールフルオレン型エポキシ化合物とエチレン性不飽和結合基含有カルボン酸とを反応させたヒドロキシ基含有化合物に対して環状酸無水物を反応させて得られた化合物である。かかる化合物は感光性樹脂として公知であり、その例としては特開平5−339356号公報に記載の化合物等が挙げられる。A成分の物性の好ましい範囲としては、重量平均分子量が1千〜2万、より好ましくは2千〜1万、酸価が50〜150mgKOH/g、より好ましくは70〜120mgKOH/gを例示できる。A成分は、1種類の化合物のみを用いてもよく、複数を組み合わせて用いてもよい。 The photosensitive resin composition used in the production method of the present invention reacts a cyclic acid anhydride with a hydroxy group-containing compound obtained by reacting (A) a bisphenolfluorene type epoxy compound and an ethylenically unsaturated bond group-containing carboxylic acid. And (B) a polymerizable monomer having at least one ethylenically unsaturated bond, and (C) a photopolymerization initiator. The component A is a compound obtained by reacting a cyclic acid anhydride with a hydroxy group-containing compound obtained by reacting a bisphenolfluorene type epoxy compound and an ethylenically unsaturated bond group-containing carboxylic acid. Such a compound is known as a photosensitive resin, and examples thereof include compounds described in JP-A-5-339356. As a preferable range of the physical property of A component, a weight average molecular weight is 1,000-20,000, More preferably, it is 2,000-10,000, An acid value is 50-150 mgKOH / g, More preferably, 70-120 mgKOH / g can be illustrated. As the component A, only one type of compound may be used, or a plurality may be used in combination.
本発明において、A成分の重量平均分子量は、サンプリングした溶液をテトラヒドロフランに溶解させて東ソー社製HLC−8220GPCで分子量分布測定を行い、標準ポリスチレン換算の重量平均分子量を算出した値を用いる。またA成分の酸価は、サンプリングした溶液をテトラヒドロフランと水の混合液に溶解させて0.1規定の水酸化カリウム水溶液で中和滴定し、当量点からサンプル溶液の固形分換算の酸価を算出した値を用いる。 In the present invention, the weight average molecular weight of the component A is obtained by dissolving the sampled solution in tetrahydrofuran, measuring the molecular weight distribution with HLC-8220GPC manufactured by Tosoh Corporation, and calculating the weight average molecular weight in terms of standard polystyrene. The acid value of component A is determined by dissolving the sampled solution in a mixed solution of tetrahydrofuran and water and neutralizing with a 0.1N aqueous potassium hydroxide solution, and calculating the acid value in terms of solid content of the sample solution from the equivalence point. Use the calculated value.
A成分の合成原料となるビスフェノールフルオレン型エポキシ化合物とは下記一般式(1)で表される化合物を指し、特にnの値が0〜20の範囲にあるものをいう。実用上はnの平均値が0〜2のものが好ましく、更には0.1〜1.0のものがより好ましい。 The bisphenol fluorene type epoxy compound used as a raw material for the synthesis of the component A refers to a compound represented by the following general formula (1), and particularly refers to a compound having a value of n in the range of 0-20. Practically, the average value of n is preferably 0 to 2, and more preferably 0.1 to 1.0.
ビスフェノールフルオレン型エポキシ化合物の合成方法は特に制限されないが、特開平9−328534号公報に記載の方法、すなわち9,9−ビス(4−ヒドロキシフェニル)フルオレンとエピクロロヒドリンをアルカリ存在下縮合させて得る方法が最も一般的で好ましい。9,9−ビス(4−ヒドロキシフェニル)フルオレンは、一般式(1)に示したようにm個のRで置換されていてもよい。nの値はエポキシ化合物の重合度であり、合成時に原料化合物のモル比や反応条件を常法により調整することで所望の値とすることができる。 The method for synthesizing the bisphenolfluorene type epoxy compound is not particularly limited, but the method described in JP-A-9-328534, that is, 9,9-bis (4-hydroxyphenyl) fluorene and epichlorohydrin are condensed in the presence of an alkali. The most common and preferred method. 9,9-bis (4-hydroxyphenyl) fluorene may be substituted with m R as shown in the general formula (1). The value of n is the degree of polymerization of the epoxy compound, and can be set to a desired value by adjusting the molar ratio of the raw material compounds and reaction conditions during synthesis.
ビスフェノールフルオレン型エポキシ化合物にエチレン性不飽和結合基含有カルボン酸を反応させると、A成分の合成中間体であるヒドロキシ基含有化合物が得られる。エチレン性不飽和結合基含有カルボン酸の具体的な例としては、(メタ)アクリル酸、(メタ)アクリル酸ダイマー、2−ヒドロキシエチル(メタ)アクリレートと無水コハク酸のハーフエステル、2−ヒドロキシエチル(メタ)アクリレートと無水フタル酸のハーフエステル、2−ヒドロキシエチル(メタ)アクリレートとシクロヘキサン−1,2−ジカルボン酸無水物のハーフエステル、4−ビニル安息香酸等が挙げられるが、(メタ)アクリル酸が最も好ましい。ここで(メタ)アクリル酸とは、アクリル酸又はメタクリル酸をいい、(メタ)アクリレートとは、アクリレート又はメタクリレートをいう(以下も同様)。 When a bisphenolfluorene type epoxy compound is reacted with an ethylenically unsaturated bond group-containing carboxylic acid, a hydroxy group-containing compound, which is a synthetic intermediate of component A, is obtained. Specific examples of the ethylenically unsaturated bond group-containing carboxylic acid include (meth) acrylic acid, (meth) acrylic acid dimer, 2-hydroxyethyl (meth) acrylate and succinic anhydride half ester, 2-hydroxyethyl (Meth) acrylate and phthalic anhydride half ester, 2-hydroxyethyl (meth) acrylate and cyclohexane-1,2-dicarboxylic anhydride half ester, 4-vinylbenzoic acid, etc. Acid is most preferred. Here, (meth) acrylic acid refers to acrylic acid or methacrylic acid, and (meth) acrylate refers to acrylate or methacrylate (and so on).
ビスフェノールフルオレン型エポキシ化合物にエチレン性不飽和結合基含有カルボン酸を反応させる方法は特に制限されないが、特開平3−205417号公報に記載の方法、すなわち触媒の存在下に加熱して反応させる方法が最も一般的で好ましい。触媒としては3級アミン、4級アンモニウム塩、3級ホスフィン、4級ホスホニウム塩等を用いることができる。理想的にはビスフェノールフルオレン型エポキシ化合物のエポキシ基とエチレン性不飽和結合基含有カルボン酸のカルボキシ基とを1対1で反応させ、官能基をエステル結合及びヒドロキシ基に完全に変換することが望ましいが、反応に要する時間の制約や副反応の進行の懸念等から必要十分な反応率に達した時点で反応を終了してもよい。反応率はエポキシ当量や酸価を測定することで計算することができ、一般には反応率98モル%以上に達すれば十分である。 The method of reacting the bisphenolfluorene type epoxy compound with the ethylenically unsaturated bond group-containing carboxylic acid is not particularly limited, but the method described in JP-A-3-205417, that is, the method of reacting by heating in the presence of a catalyst, The most common and preferred. As the catalyst, tertiary amine, quaternary ammonium salt, tertiary phosphine, quaternary phosphonium salt and the like can be used. Ideally, it is desirable that the epoxy group of the bisphenolfluorene type epoxy compound and the carboxy group of the carboxylic acid containing the ethylenically unsaturated bond group are reacted one-to-one to completely convert the functional group into an ester bond and a hydroxy group. However, the reaction may be terminated when the necessary and sufficient reaction rate is reached due to the restriction of the time required for the reaction and the concern about the progress of the side reaction. The reaction rate can be calculated by measuring the epoxy equivalent and the acid value. Generally, it is sufficient that the reaction rate reaches 98 mol% or more.
こうして得られたヒドロキシ基含有化合物に対して、環状酸無水物を反応させることによりA成分の化合物が得られる。ここで環状酸無水物とは多価カルボン酸の分子内酸無水物をいい、例えば無水コハク酸、無水マレイン酸、シクロヘキサン−1,2−ジカルボン酸無水物、シクロヘキセン−1,2−ジカルボン酸無水物、シクロヘキセン−4,5−ジカルボン酸無水物、ノルボルナン−2,3−ジカルボン酸無水物、無水フタル酸、ベンゼン−1,2,4−トリカルボン酸−1,2−無水物、シクロヘキサン−1,2,4−トリカルボン酸−1,2−無水物、ベンゼン−1,2,4,5−テトラカルボン酸二無水物、シクロヘキサン−1,2,4,5−テトラカルボン酸二無水物、ブタン−1,2,3,4−テトラカルボン酸二無水物、ビフェニル−3,3′,4,4′−テトラカルボン酸二無水物、ベンゾフェノン−3,3′,4,4′−テトラカルボン酸二無水物、ジフェニルスルホン−3,3′,4,4′−テトラカルボン酸二無水物、4,4′−オキシジフタル酸二無水物、4,4′−[1,1,1,3,3,3−ヘキサフルオロプロパン−2,2−ジイル]ジフタル酸二無水物等を挙げることができる。また、グルタル酸無水物のような6員環の酸無水物も使用できる。 The compound of component A is obtained by reacting the thus obtained hydroxy group-containing compound with a cyclic acid anhydride. Here, the cyclic acid anhydride refers to an intramolecular acid anhydride of a polyvalent carboxylic acid, such as succinic anhydride, maleic anhydride, cyclohexane-1,2-dicarboxylic anhydride, cyclohexene-1,2-dicarboxylic anhydride. , Cyclohexene-4,5-dicarboxylic anhydride, norbornane-2,3-dicarboxylic anhydride, phthalic anhydride, benzene-1,2,4-tricarboxylic acid-1,2-anhydride, cyclohexane-1, 2,4-tricarboxylic acid-1,2-anhydride, benzene-1,2,4,5-tetracarboxylic dianhydride, cyclohexane-1,2,4,5-tetracarboxylic dianhydride, butane 1,2,3,4-tetracarboxylic dianhydride, biphenyl-3,3 ', 4,4'-tetracarboxylic dianhydride, benzophenone-3,3', 4,4'-tetracarboxylic Dianhydride, diphenylsulfone-3,3 ', 4,4'-tetracarboxylic dianhydride, 4,4'-oxydiphthalic dianhydride, 4,4'-[1,1,1,3,3 , 3-hexafluoropropane-2,2-diyl] diphthalic dianhydride and the like. A 6-membered acid anhydride such as glutaric acid anhydride can also be used.
ヒドロキシ基含有化合物に環状酸無水物を反応させる方法は特に制限されないが、特開平5−339356号公報に記載の方法、すなわち触媒の存在下に加熱して反応させる方法が最も一般的で好ましい。触媒としては3級アミン、4級アンモニウム塩、3級ホスフィン、4級ホスホニウム塩等を用いることができる。環状酸無水物はヒドロキシ基をハーフエステル化してカルボキシ基に変換することで化合物に酸価を付与する効果を有するが、酸二無水物を選択すればそれが架橋点となって同時に分子量を高めることができるため有用である。中でも酸二無水物及び酸一無水物を併用して酸価と分子量を共に制御する方法が特に有利であり、酸二無水物1モルに対して酸一無水物を0.01〜10モルの範囲で組み合わせて用いることが好ましい。ヒドロキシ基に対する環状酸無水物の付加量は目的とする酸価に合わせて設定すればよいが、ヒドロキシ基1モルに対して0.5〜1.0モルであることが好ましい。反応の進行の確認は、赤外分光法で酸無水物基の特性吸収スペクトルを観察すればよい。 The method of reacting the cyclic acid anhydride with the hydroxy group-containing compound is not particularly limited, but the method described in JP-A-5-339356, that is, the method of heating and reacting in the presence of a catalyst is the most common and preferred. As the catalyst, tertiary amine, quaternary ammonium salt, tertiary phosphine, quaternary phosphonium salt and the like can be used. Cyclic acid anhydrides have the effect of imparting an acid value to the compound by half-esterifying the hydroxy group and converting it to a carboxy group, but if acid dianhydride is selected, it becomes a crosslinking point and simultaneously increases the molecular weight It is useful because it can. Among them, the method of controlling both the acid value and the molecular weight by using both acid dianhydride and acid monoanhydride is particularly advantageous, and 0.01 to 10 mol of acid monoanhydride is used per 1 mol of acid dianhydride. It is preferable to use a combination in the range. The addition amount of the cyclic acid anhydride with respect to the hydroxy group may be set according to the target acid value, but is preferably 0.5 to 1.0 mol with respect to 1 mol of the hydroxy group. The progress of the reaction can be confirmed by observing the characteristic absorption spectrum of the acid anhydride group by infrared spectroscopy.
A成分は、ビスフェノールフルオレン骨格に由来する耐熱性や光学特性(高透明、高屈折率、低複屈折)、エチレン性不飽和結合基含有カルボン酸に由来する重合性、環状酸無水物に由来するアルカリ溶解性を併せ持つことから、カラーフィルター用感光性樹脂組成物に適して用いることができる化合物である。耐熱温度の低い基材上に直接カラーフィルターを形成する場合、ポストベークによる最終硬化が制限されるため従来の製造方法と比較して感光性樹脂組成物の硬化度が低下するが、A成分については剛直なビスフェノールフルオレン骨格が硬化系に取り込まれるという構造の特異性から低い硬化度においても高い硬化膜物性が得られる利点がある。そのため、A成分を使用した感光性樹脂組成物は、耐熱温度の低い基材上における直接的なカラーフィルターの形成に好適に用いることができる。一方、A成分を用いない場合は硬化膜に十分な物性を付与することが困難となり、例えばカラーフィルターの3色の画素を順次形成しようとても、2色目の感光性樹脂組成物の溶剤で1色目の感光性樹脂組成物が侵されるといった問題が生じてしまう。 Component A is derived from heat resistance and optical properties derived from the bisphenolfluorene skeleton (high transparency, high refractive index, low birefringence), polymerizability derived from ethylenically unsaturated bond group-containing carboxylic acid, and cyclic acid anhydride. Since it has alkali solubility, it is a compound that can be suitably used for a photosensitive resin composition for color filters. When a color filter is directly formed on a substrate having a low heat-resistant temperature, final curing by post-baking is limited, so that the degree of curing of the photosensitive resin composition is lower than that of the conventional manufacturing method. Has the advantage that a high cured film physical property can be obtained even at a low degree of curing because of the uniqueness of the structure that a rigid bisphenolfluorene skeleton is incorporated into the curing system. Therefore, the photosensitive resin composition using the component A can be suitably used for forming a direct color filter on a substrate having a low heat resistance temperature. On the other hand, if the component A is not used, it will be difficult to impart sufficient physical properties to the cured film. For example, the three color pixels of the color filter will be formed sequentially. This causes a problem that the photosensitive resin composition is attacked.
B成分は少なくとも1個のエチレン性不飽和結合を有する重合性モノマーであり、従来感光性材料に用いられている公知の化合物を特に制限なく使用することができる。具体的には、ジエチレングリコールジ(メタ)アクリレート、トリメチロールプロパントリ(メタ)アクリレート、ペンタエリスリトールテトラ(メタ)アクリレート、ジトリメチロールプロパンテトラ(メタ)アクリレート、ジペンタエリスリトールヘキサ(メタ)アクリレート等の(メタ)アクリル酸エステル誘導体や、ビスフェノールA型エポキシジ(メタ)アクリレート、ビスフェノールF型エポキシジ(メタ)アクリレート、ビスフェノールフルオレン型エポキシジ(メタ)アクリレート、フェノールノボラック型エポキシポリ(メタ)アクリレート、クレゾールノボラック型エポキシポリ(メタ)アクリレート等の(メタ)アクリル酸エポキシエステル誘導体等を例示できる。また、上記(メタ)アクリル酸誘導体と、構造中に(好ましくは複数の)イソシアネート基や酸無水物基等を有する化合物との反応生成物等も適している(ただしA成分に該当する化合物は除く)。なお、(メタ)アクリル酸誘導体以外にも、マレイン酸誘導体、マレイミド誘導体、クロトン酸誘導体、イタコン酸誘導体、ケイヒ酸誘導体、ビニル誘導体、ビニルアルコール誘導体、ビニルケトン誘導体、ビニル芳香族誘導体等も挙げることができる。これらのエチレン性不飽和結合を有する化合物は、更にエポキシ基等の熱反応性の官能基やカルボキシ基等のアルカリ溶解性の官能基等を有して、複合機能化されたものであってもよい。B成分は、1種類の化合物のみを用いてもよく、複数を組み合わせて用いてもよい。 Component B is a polymerizable monomer having at least one ethylenically unsaturated bond, and any known compound conventionally used in photosensitive materials can be used without particular limitation. Specifically, (meta) such as diethylene glycol di (meth) acrylate, trimethylolpropane tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, ditrimethylolpropane tetra (meth) acrylate, dipentaerythritol hexa (meth) acrylate, etc. ) Acrylic acid ester derivatives, bisphenol A type epoxy di (meth) acrylate, bisphenol F type epoxy di (meth) acrylate, bisphenolfluorene type epoxy di (meth) acrylate, phenol novolac type epoxy poly (meth) acrylate, cresol novolac type epoxy poly ( Examples include (meth) acrylic acid epoxy ester derivatives such as (meth) acrylate. In addition, a reaction product of the above (meth) acrylic acid derivative and a compound having an (preferably plural) isocyanate group or an acid anhydride group in the structure is also suitable (however, a compound corresponding to the component A is except). In addition to (meth) acrylic acid derivatives, maleic acid derivatives, maleimide derivatives, crotonic acid derivatives, itaconic acid derivatives, cinnamic acid derivatives, vinyl derivatives, vinyl alcohol derivatives, vinyl ketone derivatives, vinyl aromatic derivatives, etc. it can. These compounds having an ethylenically unsaturated bond may further have a thermal functional group such as an epoxy group, an alkali-soluble functional group such as a carboxy group, etc. Good. As the component B, only one type of compound may be used, or a plurality may be used in combination.
C成分は光重合開始剤であり、従来感光性材料に用いられている公知の化合物を特に制限なく使用することができる。具体的には、アセトフェノン、2−ヒドロキシ−2−メチル−1−フェニルプロパン−1−オン、ベンジルジメチルケタール等のアセトフェノン化合物、ベンゾフェノン、2,4,6−トリメチルベンゾフェノン、4,4′−ビス(N,N−ジエチルアミノ)ベンゾフェノン等のベンゾフェノン化合物、ベンゾインエチルエーテル、ベンゾイン−tert−ブチルエーテル等のベンゾインエーテル化合物、2−メチル−1−[4−(メチルスルファニル)フェニル]−2−モルホリノプロパン−1−オン、2−ベンジル−2−(N,N−ジメチルアミノ)−1−(4−モルホリノフェニル)ブタン−1−オン等のα−アミノアルキルフェノン化合物、チオキサントン、2,4−ジエチルチオキサントン等のチオキサントン化合物、3,3′,4,4′−テトラキス(tert−ブチルペルオキシカルボニル)ベンゾフェノン等の有機過酸化物、2,2′−ビス(2−クロロフェニル)−4,4′,5,5′−テトラフェニル−1,2−ビイミダゾール等のビイミダゾール化合物、ビス(η5−シクロペンタジエニル)ビス[2,6−ジフルオロ−3−(1−ピロリル)フェニル]チタン等のチタノセン化合物、2,4,6−トリス(トリクロロメチル)−1,3,5−トリアジン、2−[3,4−(メチレンジオキシ)フェニル]−4,6−ビス(トリクロロメチル)−1,3,5−トリアジン等のトリアジン化合物、(2,4,6−トリメチルベンゾイル)ジフェニルホスフィンオキシド、ビス(2,4,6−トリメチルベンゾイル)フェニルホスフィンオキシド等のアシルホスフィンオキシド化合物、カンファーキノン等のキノン化合物、1−[4−(フェニルスルファニル)フェニル]オクタン−1,2−ジオン=2−O−ベンゾイルオキシム、1−[9−エチル−6−(2−メチルベンゾイル)カルバゾール−3−イル]エタノン=O−アセチルオキシム、(9−エチル−6−ニトロカルバゾール−3−イル)[4−(2−メトキシ−1−メチルエトキシ)−2−メチルフェニル]メタノン=O−アセチルオキシム等のオキシムエステル化合物等を挙げることができるが、特にオキシムエステル化合物が好ましい。C成分は、1種類の化合物のみを用いてもよく、複数を組み合わせて用いてもよい。 Component C is a photopolymerization initiator, and known compounds conventionally used in photosensitive materials can be used without particular limitation. Specifically, acetophenone compounds such as acetophenone, 2-hydroxy-2-methyl-1-phenylpropan-1-one, benzyldimethyl ketal, benzophenone, 2,4,6-trimethylbenzophenone, 4,4′-bis ( Benzophenone compounds such as N, N-diethylamino) benzophenone, benzoin ether compounds such as benzoin ethyl ether and benzoin-tert-butyl ether, 2-methyl-1- [4- (methylsulfanyl) phenyl] -2-morpholinopropane-1- Thioxanthone such as ON, α-aminoalkylphenone compounds such as 2-benzyl-2- (N, N-dimethylamino) -1- (4-morpholinophenyl) butan-1-one, thioxanthone and 2,4-diethylthioxanthone Compound, 3,3 ′, , 4'-tetrakis (tert-butylperoxycarbonyl) benzophenone and other organic peroxides, 2,2'-bis (2-chlorophenyl) -4,4 ', 5,5'-tetraphenyl-1,2-bi Biimidazole compounds such as imidazole, titanocene compounds such as bis (η 5 -cyclopentadienyl) bis [2,6-difluoro-3- (1-pyrrolyl) phenyl] titanium, 2,4,6-tris (trichloromethyl) ) -1,3,5-triazine, triazine compounds such as 2- [3,4- (methylenedioxy) phenyl] -4,6-bis (trichloromethyl) -1,3,5-triazine, (2, Acyl phosphines such as 4,6-trimethylbenzoyl) diphenylphosphine oxide and bis (2,4,6-trimethylbenzoyl) phenylphosphine oxide Quinone compounds such as tin oxide compounds, camphorquinone, 1- [4- (phenylsulfanyl) phenyl] octane-1,2-dione = 2-O-benzoyloxime, 1- [9-ethyl-6- (2-methylbenzoyl) ) Carbazol-3-yl] ethanone = O-acetyloxime, (9-ethyl-6-nitrocarbazol-3-yl) [4- (2-methoxy-1-methylethoxy) -2-methylphenyl] methanone = O -Although oxime ester compounds, such as acetyl oxime, can be mentioned, an oxime ester compound is especially preferable. As the component C, only one type of compound may be used, or a plurality of components may be used in combination.
なお、C成分のオキシムエステル化合物としては下記一般式(2)で表される化合物も好適であり、これは非常に高感度でかつ露光による変色(黄変)が小さいことから、本発明の使用に適している。 In addition, as the oxime ester compound of component C, a compound represented by the following general formula (2) is also suitable, which is very sensitive and has little discoloration (yellowing) due to exposure. Suitable for
本発明で用いる感光性樹脂組成物は、A〜C成分以外の成分として、(D)顔料、(E)分散剤、及び(Z)溶剤を含有することが好ましい。 The photosensitive resin composition used in the present invention preferably contains (D) a pigment, (E) a dispersant, and (Z) a solvent as components other than the components A to C.
D成分は顔料であり、カラーフィルター用の着色剤として知られている公知の化合物(有機顔料、無機顔料、カーボンブラック、チタンブラック等)を特に制限なく使用することができる。カラーフィルターの画素(赤色、緑色、青色等)を形成するための感光性樹脂組成物としてはD成分として有機顔料を含有することが好ましく、より具体的にはアゾ顔料、縮合アゾ顔料、アゾメチン顔料、フタロシアニン顔料、キナクリドン顔料、イソインドリノン顔料、イソインドリン顔料、ジオキサジン顔料、スレン顔料、ペリレン顔料、ペリノン顔料、キノフタロン顔料、ジケトピロロピロール顔料、チオインジゴ顔料等が挙げられる。有機顔料のカラーインデックス名としては、ピグメント・レッド2、同3、同4、同5、同9、同12、同14、同22、同23、同31、同38、同112、同122、同144、同146、同147、同149、同166、同168、同170、同175、同176、同177、同178、同179、同184、同185、同187、同188、同202、同207、同208、同209、同210、同213、同214、同220、同221、同242、同247、同253、同254、同255、同256、同257、同262、同264、同266、同272、同279、ピグメント・オレンジ5、同13、同16、同34、同36、同38、同43、同61、同62、同64、同67、同68、同71、同72、同73、同74、同81、ピグメント・イエロー1、同3、同12、同13、同14、同16、同17、同55、同73、同74、同81、同83、同93、同95、同97、同109、同110、同111、同117、同120、同126、同127、同128、同129、同130、同136、同138、同139、同150、同151、同153、同154、同155、同173、同174、同175、同176、同180、同181、同183、同185、同191、同194、同199、同213、同214、ピグメント・グリーン7、同36、同58、ピグメント・ブルー15、同15:1、同15:2、同15:3、同15:4、同15:6、同16、同60、同80、ピグメント・バイオレット19、同23、同37等を例示することができる。D成分は1種類の化合物のみを用いてもよく、複数を組み合わせて用いてもよい。カラーフィルターの色特性の制御のために、複数の有機顔料を所定の比率で選定して用いることは一般的である。 The component D is a pigment, and known compounds (organic pigments, inorganic pigments, carbon black, titanium black, etc.) known as colorants for color filters can be used without particular limitation. The photosensitive resin composition for forming the color filter pixels (red, green, blue, etc.) preferably contains an organic pigment as component D, and more specifically, an azo pigment, a condensed azo pigment, or an azomethine pigment. Phthalocyanine pigment, quinacridone pigment, isoindolinone pigment, isoindoline pigment, dioxazine pigment, selenium pigment, perylene pigment, perinone pigment, quinophthalone pigment, diketopyrrolopyrrole pigment, thioindigo pigment and the like. Color index names of organic pigments include Pigment Red 2, 3, 3, 4, 9, 9, 12, 14, 22, 23, 31, 38, 112, 122, 144, 146, 147, 149, 166, 168, 170, 175, 176, 177, 178, 179, 184, 185, 187, 188, 202 207, 208, 209, 210, 213, 214, 220, 221, 222, 247, 253, 254, 255, 256, 257, 262, H.264, 266, 272, 279, Pigment Orange 5, 13, 13, 16, 34, 36, 38, 43, 61, 62, 64, 67, 68, 71, 72, 73, 74 81, Pigment Yellow 1, 3, 12, 12, 13, 16, 17, 17, 55, 73, 74, 81, 83, 93, 95, 97, 109, 110, 111, 117, 120, 126, 127, 128, 129, 130, 136, 138, 139, 150, 151, 153, 154 155, 173, 174, 175, 176, 176, 180, 181, 183, 185, 191, 191, 194, 199, 213, 214, Pigment Green 7, 36 58, Pigment Blue 15, 15: 1, 15: 2, 15: 3, 15: 4, 15: 6, 16, 60, 80, Pigment Violet 19, 23 And 37 etc. That. As the component D, only one kind of compound may be used, or a plurality thereof may be used in combination. In order to control the color characteristics of the color filter, it is common to select and use a plurality of organic pigments at a predetermined ratio.
上記の有機顔料は微粒化の加工が施され、BET法による比表面積が50m2/g以上であるものが好ましい。有機顔料の微粒化の方法としては公知の方法が利用でき、例えばドライミリング法、ソルベントミリング法、ソルトミリング法、ソルベントソルトミリング法、アシッドペースティング法、アシッドスラリー法等を挙げることができる。微粒化においては粒径を小さくすると同時に、粒径を均一に揃えることが重要である。 The organic pigment is preferably subjected to atomization and has a specific surface area of 50 m 2 / g or more by the BET method. As the method for atomizing the organic pigment, known methods can be used, and examples thereof include a dry milling method, a solvent milling method, a salt milling method, a solvent salt milling method, an acid pasting method, and an acid slurry method. In atomization, it is important to make the particle size uniform and at the same time make the particle size uniform.
E成分は分散剤であり、従来顔料等の分散に用いられている公知の化合物、例えば分散剤、分散安定剤、分散湿潤剤、分散促進剤等の名称で市販されている化合物等を本発明の効果が得られる限りにおいて特に制限なく使用することができる。顔料の分散安定化に有効な分散剤としては、カチオン性高分子分散剤、アニオン性高分子分散剤、ノニオン性高分子分散剤、顔料誘導体型分散剤(分散助剤)等を例示することができるが、特に顔料への吸着点としてイミダゾリル基、ピロリル基、ピリジル基、一級、二級又は三級のアミノ基等のカチオン性の官能基を有し、アミン価が1〜100mgKOH/g、数平均分子量が1千〜10万の範囲にあるカチオン性高分子分散剤は好適である。このようなカチオン性高分子分散剤の例は、特開平9−169821号公報に開示されている。E成分は1種類の化合物のみを用いてもよく、複数を組み合わせて用いてもよい。E成分の市販品の例としては、ビックケミー社製「BYK(登録商標)」シリーズ、BASF社製「エフカ(登録商標)」シリーズ、ルーブリゾール社製「ソルスパース(登録商標)」シリーズ、味の素ファインテクノ社製「アジスパー(味の素社の登録商標)」シリーズが挙げられる。なお、樹脂類のような高粘度物質は一般に分散を安定させる作用をも有するが、分散促進能を有しないものは分散剤とは扱わない。しかし、本発明は、分散を安定させる目的で樹脂類のような高粘度物質を使用することを制限するものではない。 The component E is a dispersant, and known compounds conventionally used for dispersing pigments and the like, for example, compounds commercially available under the names of dispersants, dispersion stabilizers, dispersion wetting agents, dispersion accelerators, etc. As long as the above effect can be obtained, it can be used without particular limitation. Examples of the dispersant effective for stabilizing the dispersion of the pigment include a cationic polymer dispersant, an anionic polymer dispersant, a nonionic polymer dispersant, and a pigment derivative type dispersant (dispersion aid). In particular, it has a cationic functional group such as an imidazolyl group, a pyrrolyl group, a pyridyl group, a primary, secondary or tertiary amino group as an adsorption point to the pigment, and an amine value of 1 to 100 mgKOH / g, number A cationic polymer dispersant having an average molecular weight in the range of 1,000 to 100,000 is preferred. Examples of such cationic polymer dispersants are disclosed in JP-A-9-169821. As the E component, only one kind of compound may be used, or a plurality thereof may be used in combination. Examples of commercially available E ingredients include “BYK (registered trademark)” series manufactured by BYK Chemie, “Efka (registered trademark)” series manufactured by BASF, “Solspers (registered trademark)” series manufactured by Lubrizol, and Ajinomoto Fine Techno. “Ajisper” (registered trademark of Ajinomoto Co., Inc.) series manufactured by the company. High viscosity substances such as resins generally have an action of stabilizing the dispersion, but those not having the ability to promote dispersion are not treated as dispersants. However, the present invention does not limit the use of high viscosity materials such as resins for the purpose of stabilizing dispersion.
Z成分は溶剤であり、例えばエステル系溶剤(ブチルアセテート、シクロヘキシルアセテート等)、ケトン系溶剤(メチルイソブチルケトン、シクロヘキサノン等)、エーテル系溶剤(ジエチレングリコールジメチルエーテル、ジエチレングリコールエチルメチルエーテル等)、アルコール系溶剤(3−メトキシブタノール、エチレングリコールモノ−t−ブチルエーテル等)、芳香族系溶剤(トルエン、キシレン等)、脂肪族系溶剤、アミン系溶剤、アミド系溶剤等の公知の溶剤を特に制限なく使用することができる。安全性の点からはプロピレングリコール骨格を有するエステル系やエーテル系の溶剤、例えばプロピレングリコールモノメチルエーテル、プロピレングリコールモノエチルエーテル、プロピレングリコールモノブチルエーテル、ジプロピレングリコールモノメチルエーテル、ジプロピレングリコールジメチルエーテル、プロピレングリコールモノメチルエーテルアセテート、プロピレングリコールモノエチルエーテルアセテート、プロピレングリコールジアセテート等が好ましく用いられる。また、類似の構造の3−メトキシブチルアセテート、3−メトキシ−3−メチルブチルアセテート、1,3−ブチレングリコールジアセテート等も好ましい。Z成分は1種類の化合物のみを用いてもよく、複数を組み合わせて用いてもよいが、本発明においては硬化膜中に残存する溶剤量を低減させるため常圧における沸点が150℃未満の溶剤を主成分として選定することが有利であり、常圧における沸点が150℃以上の溶剤は全溶剤中20重量%以内で用いることが好ましい。なお本発明で用いる感光性樹脂組成物の固形分濃度については特に制限はないが、10〜30重量%の範囲に調整されることが一般的である。 Z component is a solvent, for example, ester solvents (butyl acetate, cyclohexyl acetate, etc.), ketone solvents (methyl isobutyl ketone, cyclohexanone, etc.), ether solvents (diethylene glycol dimethyl ether, diethylene glycol ethyl methyl ether, etc.), alcohol solvents ( 3-methoxybutanol, ethylene glycol mono-t-butyl ether, etc.), aromatic solvents (toluene, xylene, etc.), aliphatic solvents, amine solvents, amide solvents, and other known solvents are used without particular limitation. Can do. From the viewpoint of safety, ester or ether solvents having a propylene glycol skeleton, such as propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monobutyl ether, dipropylene glycol monomethyl ether, dipropylene glycol dimethyl ether, propylene glycol monomethyl. Ether acetate, propylene glycol monoethyl ether acetate, propylene glycol diacetate and the like are preferably used. Further, 3-methoxybutyl acetate, 3-methoxy-3-methylbutyl acetate, 1,3-butylene glycol diacetate and the like having a similar structure are also preferable. As the Z component, only one kind of compound may be used, or a plurality of compounds may be used in combination. However, in the present invention, a solvent having a boiling point of less than 150 ° C. at normal pressure is used to reduce the amount of the solvent remaining in the cured film. As a main component, it is advantageous to use a solvent having a boiling point of 150 ° C. or higher at normal pressure within 20% by weight of the total solvent. In addition, although there is no restriction | limiting in particular about the solid content density | concentration of the photosensitive resin composition used by this invention, It is common to adjust to the range of 10 to 30 weight%.
本発明の感光性樹脂組成物における各成分の重量比は、A〜E成分の合計を100とした場合に、A:B:C:D:E=(1〜80):(1〜50):(0.1〜10):(0〜80):(0〜40)が好ましく、(5〜60):(5〜40):(0.5〜5):(10〜70):(2〜30)がより好ましく、(10〜40):(10〜30):(1〜3):(20〜60):(4〜20)が最も好ましい。カラーフィルターを薄膜化し色純度を向上させるためにはD成分の含有量を高めることが重要となるが、本発明の製造方法によればそのような高顔料濃度条件下でも耐熱温度の低い基材へのカラーフィルターの形成が可能となる。更に、A〜E成分の合計に対して30重量%以内で、その他の好ましい成分を添加してもよい。 The weight ratio of each component in the photosensitive resin composition of the present invention is as follows: A: B: C: D: E = (1-80) :( 1-50) : (0.1-10) :( 0-80) :( 0-40) are preferable, (5-60) :( 5-40) :( 0.5-5) :( 10-70) :( 2-30) is more preferable, and (10-40) :( 10-30) :( 1-3) :( 20-60) :( 4-20) is the most preferable. In order to improve the color purity by reducing the thickness of the color filter, it is important to increase the content of the D component. However, according to the production method of the present invention, the substrate having a low heat resistance temperature even under such high pigment concentration conditions. It is possible to form a color filter. Furthermore, you may add another preferable component within 30 weight% with respect to the sum total of AE component.
上記のその他の好ましい成分としては、例えば、エポキシ樹脂、ビニル樹脂、ポリエステル樹脂、ポリアミド樹脂、ポリイミド樹脂、ポリウレタン樹脂、ポリエーテル樹脂、メラミン樹脂等の樹脂類や、架橋剤、界面活性剤、シランカップリング剤、粘度調整剤、湿潤剤、消泡剤、酸化防止剤、紫外線吸収剤、連鎖移動剤等の添加剤類等、カラーフィルター用感光性樹脂組成物に適用される公知の化合物を本発明の効果が得られる限りにおいて特に制限なく使用することができる。より具体的には、樹脂類としてエポキシ樹脂(ビスフェノールA型エポキシ化合物、ビスフェノールF型エポキシ化合物、ビスフェノールフルオレン型エポキシ化合物、テトラメチルビフェニル型エポキシ化合物、フェノールノボラック型エポキシ化合物、クレゾールノボラック型エポキシ化合物、多価アルコールのグリシジルエーテル、多価カルボン酸のグリシジルエステル、(メタ)アクリル酸グリシジルをユニットとして含む重合体、3,4−エポキシシクロヘキサンカルボン酸(3,4−エポキシシクロヘキシル)メチルに代表される脂環式エポキシ化合物、2,2−ビス(ヒドロキシメチル)−1−ブタノールの1,2−エポキシ−4−(2−オキシラニル)シクロヘキサン付加物(例えばダイセル社製「EHPE3150」)、エポキシ化ポリブタジエン(例えば日本曹達社製「NISSO−PB・JP−100」)、シリコーン骨格を有するエポキシ化合物等)、添加剤類として界面活性剤(フッ素系界面活性剤(例えばDIC社製「メガファック」シリーズ)、シリコーン系界面活性剤(例えば東レ・ダウコーニング社製「FZ」シリーズ)等)、及びシランカップリング剤(3−(グリシジルオキシ)プロピルトリメトキシシラン、3−イソシアナトプロピルトリエトキシシラン、3−ウレイドプロピルトリエトキシシラン等)を使用することが有利である。また、シリカ、タルク等のフィラー類、有機染料等の顔料以外の着色剤類も使用することができる。 Examples of other preferable components include resins such as epoxy resins, vinyl resins, polyester resins, polyamide resins, polyimide resins, polyurethane resins, polyether resins, melamine resins, crosslinking agents, surfactants, and silane cups. Known compounds applied to color filter photosensitive resin compositions, such as ring agents, viscosity modifiers, wetting agents, antifoaming agents, antioxidants, ultraviolet absorbers, chain transfer agents, etc. As long as the above effect can be obtained, it can be used without particular limitation. More specifically, epoxy resins (bisphenol A type epoxy compound, bisphenol F type epoxy compound, bisphenol fluorene type epoxy compound, tetramethylbiphenyl type epoxy compound, phenol novolac type epoxy compound, cresol novolac type epoxy compound, many Glycidyl ether of polyhydric alcohol, glycidyl ester of polyvalent carboxylic acid, polymer containing glycidyl (meth) acrylate as a unit, alicyclic typified by 3,4-epoxycyclohexanecarboxylic acid (3,4-epoxycyclohexyl) methyl 1,2-epoxy-4- (2-oxiranyl) cyclohexane adduct of a formula epoxy compound, 2,2-bis (hydroxymethyl) -1-butanol (for example, “EHPE3150” manufactured by Daicel), Poxylated polybutadiene (for example, “Nisso-PB / JP-100” manufactured by Nippon Soda Co., Ltd.), epoxy compounds having a silicone skeleton, etc., surfactants (fluorinated surfactants (for example, “Megafuck” manufactured by DIC) ”Series), silicone surfactants (for example,“ FZ ”series manufactured by Toray Dow Corning), etc., and silane coupling agents (3- (glycidyloxy) propyltrimethoxysilane, 3-isocyanatopropyltriethoxysilane) , 3-ureidopropyltriethoxysilane, etc.). Moreover, colorants other than pigments, such as fillers, such as a silica and a talc, and organic dyes, can also be used.
なお、その他の好ましい成分として、熱重合開始剤を使用してもよい。熱重合開始剤としては公知のアゾ系や過酸化物系の化合物を利用できるが、感光性樹脂組成物との相溶性の高い1,1′−アゾビス(1−アセトキシ−1−フェニルエタン)、2,2′−アゾビス(2−メチルプロピオン酸)ジメチル、過酸化ベンゾイル等が好ましい。熱重合開始剤の10時間半減期温度は50〜80℃であることが有利であり、このような熱重合開始剤は基材の耐熱温度を超えない環境温度においても感光性樹脂組成物の硬化を促進させることができる。一方、10時間半減期温度が50℃を下回る熱重合開始剤は、反応性が高すぎて感光性樹脂組成物の保存安定性を低下させるおそれがある。 In addition, you may use a thermal-polymerization initiator as another preferable component. As the thermal polymerization initiator, known azo compounds and peroxide compounds can be used, but 1,1′-azobis (1-acetoxy-1-phenylethane) having high compatibility with the photosensitive resin composition, 2,2'-azobis (2-methylpropionic acid) dimethyl, benzoyl peroxide and the like are preferable. The 10-hour half-life temperature of the thermal polymerization initiator is advantageously 50 to 80 ° C., and such a thermal polymerization initiator cures the photosensitive resin composition even at an environmental temperature not exceeding the heat resistance temperature of the substrate. Can be promoted. On the other hand, a thermal polymerization initiator having a 10-hour half-life temperature of less than 50 ° C. is too reactive and may reduce the storage stability of the photosensitive resin composition.
本発明の感光性樹脂組成物は、上述の構成によりネガ型のフォトリソグラフィー用材料として好ましく用いることができる。ネガ型のフォトリソグラフィーでは、画像露光によって選択的に光照射された部分(露光部ともいう)が硬化膜としてパターン形成される。その反対に光照射されなかった部分(未露光部ともいう)は、現像工程で取り除かれる。 The photosensitive resin composition of the present invention can be preferably used as a negative photolithography material due to the above-described configuration. In negative photolithography, a portion selectively irradiated with light by image exposure (also referred to as an exposure portion) is patterned as a cured film. On the other hand, a portion that is not irradiated with light (also referred to as an unexposed portion) is removed in the development process.
本発明の製造方法において、各色のカラーフィルターを形成する工程は、(ア)感光性樹脂組成物を基材に塗布する工程、(イ)感光性樹脂組成物を乾燥させる工程、(ウ)感光性樹脂組成物を画像露光する工程、(エ)感光性樹脂組成物を現像する工程、及び(オ)感光性樹脂組成物をポスト露光する工程を順に含むことが好ましい。ここで順に含むとは、上記工程(ア)〜(オ)の順序が入れ替わることなく実施されることを意味するが、必ずしも工程(ア)〜(オ)は連続的に行われる必要はなく、その間に他の工程(例えば輸送工程等)を含むものであってもよい。 In the production method of the present invention, the step of forming each color filter includes (a) a step of applying a photosensitive resin composition to a substrate, (b) a step of drying the photosensitive resin composition, and (c) photosensitivity. It is preferable to sequentially include a step of image-exposing the photosensitive resin composition, (d) a step of developing the photosensitive resin composition, and (e) a step of post-exposing the photosensitive resin composition. Here, including in order means that the steps (a) to (e) are performed without changing the order, but the steps (a) to (e) are not necessarily performed continuously. Another process (for example, a transport process etc.) may be included in the meantime.
(ア)感光性樹脂組成物を基材に塗布する工程では、公知の塗布装置を用いて感光性樹脂組成物を基材に塗布する。塗布装置の例としては、スピンコーター、スリットコーター、バーコーター、カーテンコーター、スプレーコーター等が挙げられるが、スピンコーターやスリットコーターが好ましい。塗布の条件は感光性樹脂組成物の固形分濃度や粘度に影響されるが、使用する塗布装置において所望の膜厚が得られるように調整を行えばよい。 (A) In the step of applying the photosensitive resin composition to the substrate, the photosensitive resin composition is applied to the substrate using a known coating apparatus. Examples of the coating apparatus include a spin coater, a slit coater, a bar coater, a curtain coater, and a spray coater, and a spin coater and a slit coater are preferable. The coating conditions are affected by the solid content concentration and viscosity of the photosensitive resin composition, but may be adjusted so that a desired film thickness is obtained in the coating apparatus to be used.
(イ)感光性樹脂組成物を乾燥させる工程では、公知の乾燥装置を用いて基材上の感光性樹脂組成物を乾燥させる。乾燥装置の例としては、減圧乾燥機、ホットプレート、オーブン等が挙げられるが、減圧乾燥機やホットプレートが好ましい。乾燥後は感光性樹脂組成物中の溶剤が除去されて平滑な塗布膜が形成されることが必要であり、感光性樹脂組成物の固形分濃度や形成する膜厚、使用した溶剤の沸点等を勘案して条件を調整する。乾燥の条件は、減圧乾燥の到達圧力としては1〜100Pa、加熱乾燥としては50〜100℃で1〜10分を例示できる。加熱乾燥の場合は温度の上限に注意し、基材の耐熱温度を超えないようにしなければならない。 (A) In the step of drying the photosensitive resin composition, the photosensitive resin composition on the substrate is dried using a known drying apparatus. Examples of the drying device include a vacuum dryer, a hot plate, and an oven. A vacuum dryer and a hot plate are preferable. After drying, the solvent in the photosensitive resin composition must be removed to form a smooth coating film. The solid content concentration of the photosensitive resin composition, the film thickness to be formed, the boiling point of the solvent used, etc. Adjust the conditions in consideration of Examples of the drying conditions include 1 to 100 Pa as the ultimate pressure for drying under reduced pressure, and 50 to 100 ° C. for 1 to 10 minutes as heat drying. In the case of heat drying, attention should be paid to the upper limit of the temperature so that the heat resistant temperature of the substrate is not exceeded.
(ウ)感光性樹脂組成物を画像露光する工程では、公知のフォトリソグラフィー用露光機及びフォトマスクを用いて、基材上の感光性樹脂組成物に選択的に光照射を行う。露光用の光源としては、キセノンランプ、ハロゲンランプ、タングステンランプ、超高圧水銀ランプ、高圧水銀ランプ、中圧水銀ランプ、低圧水銀ランプ、LEDランプ等を挙げることができ、特に分光分布に波長300nm台の紫外光を含む光源(超高圧水銀ランプ等)が好ましい。光照射の条件は、例えば365nm基準で、照度としては1〜100mW/cm2、露光量としては10〜1000mJ/cm2を例示できる。また、フォトマスクを用いず、レーザー等を光源として直接画像描写を行う方法(ダイレクトイメージング)も適用することができる。 (C) In the step of exposing the photosensitive resin composition to an image, the photosensitive resin composition on the substrate is selectively irradiated with light using a known photolithography exposure machine and photomask. Examples of the light source for exposure include a xenon lamp, a halogen lamp, a tungsten lamp, an ultra-high pressure mercury lamp, a high-pressure mercury lamp, a medium-pressure mercury lamp, a low-pressure mercury lamp, and an LED lamp. A light source (such as an ultra-high pressure mercury lamp) containing ultraviolet light is preferred. Examples of the light irradiation condition include a reference of 365 nm, an illuminance of 1 to 100 mW / cm 2 , and an exposure amount of 10 to 1000 mJ / cm 2 . Further, a method (direct imaging) in which an image is directly drawn using a laser or the like as a light source without using a photomask can be applied.
(エ)感光性樹脂組成物を現像する工程では、公知の現像液を用いて未露光部の感光性樹脂組成物を除去する。現像液としては、未露光部を溶解し露光部を溶解しない現像液であれば特に制限はないが、種々の添加剤を含むアルカリ水溶液であることが好ましい。ここで、現像液のアルカリ成分としては、例えばアルカリ金属の炭酸塩、アルカリ金属の水酸化物、四級アンモニウムの水酸化物等を挙げることができる。アルカリ成分の濃度は現像液中0.001〜5重量%が好ましく、0.01〜0.5重量%がより好ましい。また添加剤としては、例えば界面活性剤、消泡剤、防カビ剤等を適用することができるが、特にノニオン系の界面活性剤を現像液中0.001〜5重量%使用することが好ましい。環境負荷の点からはアルカリ現像方式が有利であり、本発明で示した感光性樹脂組成物の構成はそれに対応するものであるが、有機溶剤による溶剤現像方式も適用することができる。なお現像方法についても公知の方法が利用でき、例えば浸漬現像、パドル現像、シャワー現像、スプレー現像、ブラシ現像、超音波現像等を挙げることができる。現像条件は感光性樹脂組成物の溶解速度やその膜厚に影響されるが、現像液の温度としては10〜30℃、処理時間としては10〜120秒を例示できる。現像後は、純水で十分に洗浄して現像液成分を洗い流した後、水切りや乾燥を行うことが好ましい。 (D) In the step of developing the photosensitive resin composition, the photosensitive resin composition in the unexposed area is removed using a known developer. The developer is not particularly limited as long as it is a developer that dissolves unexposed portions and does not dissolve exposed portions, but is preferably an alkaline aqueous solution containing various additives. Examples of the alkali component of the developer include alkali metal carbonates, alkali metal hydroxides, and quaternary ammonium hydroxides. The concentration of the alkali component is preferably 0.001 to 5% by weight in the developer, and more preferably 0.01 to 0.5% by weight. Further, as the additive, for example, a surfactant, an antifoaming agent, an antifungal agent and the like can be applied, but it is particularly preferable to use 0.001 to 5% by weight of a nonionic surfactant in the developer. . From the viewpoint of environmental load, the alkali development method is advantageous, and the constitution of the photosensitive resin composition shown in the present invention corresponds to that, but a solvent development method using an organic solvent can also be applied. As a developing method, a known method can be used, and examples thereof include immersion development, paddle development, shower development, spray development, brush development, and ultrasonic development. Although the development conditions are affected by the dissolution rate of the photosensitive resin composition and the film thickness thereof, the temperature of the developer can be 10 to 30 ° C., and the processing time can be 10 to 120 seconds. After development, it is preferable to thoroughly drain with pure water to wash away the developer components, and then drain and dry.
(オ)感光性樹脂組成物をポスト露光する工程では、画像形成された硬化膜の強度を高めるため、現像後に再度露光を行う。ポスト露光は画像露光と同一の光源を用いてもよいが、より短い波長の光源を使用することが好ましく、例えば低圧水銀ランプによる光照射は効果的である。ポスト露光は画像形成を目的としないため散乱光による照射でもよく、可能であれば基材の両面から照射を行ってもよい。光照射の条件は、例えば254nm基準で、照度としては1〜100mW/cm2、露光量としては100〜10000mJ/cm2を例示できる。 (E) In the step of post-exposure of the photosensitive resin composition, exposure is performed again after development in order to increase the strength of the cured film formed with an image. The post-exposure may use the same light source as that of the image exposure, but it is preferable to use a light source having a shorter wavelength. For example, light irradiation with a low-pressure mercury lamp is effective. Since the post-exposure is not intended for image formation, irradiation with scattered light may be performed, and irradiation may be performed from both sides of the substrate if possible. Conditions of light irradiation, for example at 254nm reference, 1 to 100 mW / cm 2 as illuminance, the exposure can be mentioned 100~10000mJ / cm 2.
なお、工程(オ)の前もしくは後、又は工程(オ)と同時に、基材の耐熱温度を超えない温度で熱硬化を行ってもよい。例えば、ホットプレートやオーブン等を用いて、100〜150℃で1〜60分の加熱焼成を実施することができる。 In addition, you may perform thermosetting at the temperature which does not exceed the heat-resistant temperature of a base material before or after a process (e), or simultaneously with a process (e). For example, heat baking can be performed at 100 to 150 ° C. for 1 to 60 minutes using a hot plate or an oven.
本発明の製造方法は、赤色、緑色及び青色の感光性樹脂組成物をそれぞれ使用してカラーフィルターを形成する場合に最も適しており、2色目の感光性樹脂組成物の溶剤で1色目の感光性樹脂組成物の硬化膜が侵されるといった問題を生じることなく工程を進めることができる。なお、具体的なカラーフィルターのデザインやそれを作製する方法としては、公知の方法を利用できる。 The production method of the present invention is most suitable when a color filter is formed using each of the red, green and blue photosensitive resin compositions, and the first color photosensitive resin composition with the solvent of the second color photosensitive resin composition. The process can proceed without causing the problem that the cured film of the conductive resin composition is eroded. In addition, as a specific color filter design and a method for producing the same, a known method can be used.
本発明の製造方法は、耐熱温度の低い基材上、例えばプラスチック基板上や白色有機ELデバイス上に直接カラーフィルターを形成できることから、極めて有用である。 The production method of the present invention is extremely useful because a color filter can be directly formed on a substrate having a low heat-resistant temperature, such as a plastic substrate or a white organic EL device.
以下、実施例により本発明を更に詳細に説明するが、本発明はこれらに限定されない。なお、部数及び百分率(%)は特に断りのない限り重量部及び重量百分率(重量%)を表す。 EXAMPLES Hereinafter, although an Example demonstrates this invention further in detail, this invention is not limited to these. The number of parts and percentage (%) represent parts by weight and percentage by weight (% by weight) unless otherwise specified.
実施例及び比較例で使用した成分を以下に示す。
A−1〜3:合成例1〜3で合成した成分(50%溶液の固形分)
AX−1:合成例4で合成した成分(50%溶液の固形分)
B−1:ジペンタエリスリトールヘキサアクリレート
B−2:ペンタエリスリトールテトラアクリレート
C−1:1−[4−(フェニルスルファニル)フェニル]オクタン−1,2−ジオン=2−O−ベンゾイルオキシム
C−2:1−[9−エチル−6−(2−メチルベンゾイル)カルバゾール−3−イル]エタノン=O−アセチルオキシム
C−3:1−[7−(2−メチルベンゾイル)−9,9−ジプロピル−9H−フルオレン−2−イル]エタノン=O−アセチルオキシム (一般式(2)において、R1・R3・R4・R5・R6・R8=水素原子、R2・R11=メチル基、R7=2−メチルフェニル基、R9・R10=プロピル基である化合物)
D−1:微粒化されたピグメント・レッド177(BET法による比表面積70m2/g)
D−2:微粒化されたピグメント・レッド254(BET法による比表面積85m2/g)
D−3:微粒化されたピグメント・グリーン36(BET法による比表面積65m2/g)
D−4:微粒化されたピグメント・グリーン58(BET法による比表面積75m2/g)
D−5:微粒化されたピグメント・イエロー138(BET法による比表面積70m2/g)
D−6:微粒化されたピグメント・ブルー15:6(BET法による比表面積90m2/g)
D−7:微粒化されたピグメント・バイオレット23(BET法による比表面積50m2/g)
E−1:味の素ファインテクノ社製「アジスパーPB822」
S−1:メタクリル酸及びメタクリル酸ベンジルのランダム共重合体(酸価100mgKOH/g、重量平均分子量1万、プロピレングリコールモノメチルエーテルアセテートの35%溶液として合成されたものの固形分)
S−2:ダイセル社製「EHPE3150」
S−3:東レ・ダウコーニング社製「FZ−2122」
Z−1:プロピレングリコールモノメチルエーテルアセテート
Z−2:プロピレングリコールジアセテート
ここで、「A−」「B−」「C−」「D−」「E−」「Z−」はそれぞれ本発明のA、B、C、D、E、Z成分に該当することを示し、「S−」は必要に応じて用いられるその他の成分を示す。また「AX−」は本発明のA成分の構造を有しないことを示す。
The components used in Examples and Comparative Examples are shown below.
A-1 to 3: Components synthesized in Synthesis Examples 1 to 3 (solid content of 50% solution)
AX-1: component synthesized in Synthesis Example 4 (solid content of 50% solution)
B-1: Dipentaerythritol hexaacrylate B-2: Pentaerythritol tetraacrylate C-1: 1- [4- (phenylsulfanyl) phenyl] octane-1,2-dione = 2-O-benzoyloxime C-2: 1- [9-ethyl-6- (2-methylbenzoyl) carbazol-3-yl] ethanone = O-acetyloxime C-3: 1- [7- (2-methylbenzoyl) -9,9-dipropyl-9H -Fluoren-2-yl] ethanone = O-acetyloxime (In the general formula (2), R 1 · R 3 · R 4 · R 5 · R 6 · R 8 = hydrogen atom, R 2 · R 11 = methyl group , R 7 = 2-methylphenyl group, R 9 · R 10 = propyl group)
D-1: Atomized Pigment Red 177 (specific surface area of 70 m 2 / g by BET method)
D-2: Atomized Pigment Red 254 (specific surface area 85 m 2 / g by BET method)
D-3: Atomized pigment green 36 (specific surface area 65 m 2 / g by BET method)
D-4: Atomized pigment green 58 (specific surface area 75 m 2 / g by BET method)
D-5: Atomized Pigment Yellow 138 (specific surface area by BET method 70 m 2 / g)
D-6: Atomized pigment blue 15: 6 (specific surface area by BET method 90 m 2 / g)
D-7: Atomized pigment violet 23 (specific surface area of 50 m 2 / g by BET method)
E-1: “Ajisper PB822” manufactured by Ajinomoto Fine Techno Co., Ltd.
S-1: Random copolymer of methacrylic acid and benzyl methacrylate (solid content of an acid value of 100 mg KOH / g, weight average molecular weight 10,000, synthesized as a 35% solution of propylene glycol monomethyl ether acetate)
S-2: “EHPE3150” manufactured by Daicel Corporation
S-3: “FZ-2122” manufactured by Toray Dow Corning
Z-1: Propylene glycol monomethyl ether acetate Z-2: Propylene glycol diacetate Here, "A-", "B-", "C-", "D-", "E-", and "Z-" are A in the present invention. , B, C, D, E, and Z components, and “S-” indicates other components used as necessary. “AX-” indicates that it does not have the structure of the component A of the present invention.
[A−1成分の合成例1]
一般式(1)で表されるビスフェノールフルオレン型エポキシ化合物(エポキシ当量255)510g、アクリル酸(エチレン性不飽和結合基含有カルボン酸)2.0モル、トリフェニルホスフィン(触媒)0.10モル、BHT(重合禁止剤)0.05モルをプロピレングリコールモノメチルエーテルアセテート255gに溶解させ、乾燥空気をバブリングさせながら100℃で反応させた。エポキシ基とカルボキシ基の反応率が99モル%に達したところでビフェニル−3,3′,4,4′−テトラカルボン酸二無水物(環状酸無水物)0.50モル及びシクロヘキセン−4,5−ジカルボン酸無水物(環状酸無水物)0.50モルを添加し、更に反応させた。赤外分光法で酸無水物基の消費を確認した後、プロピレングリコールモノメチルエーテルアセテートで希釈して室温に冷却し、A−1成分の固形分濃度50%溶液を得た。A−1成分の酸価は96mgKOH/g、重量平均分子量は4千であった。
[Synthesis example 1 of component A-1]
510 g of a bisphenolfluorene type epoxy compound (epoxy equivalent 255) represented by the general formula (1), 2.0 mol of acrylic acid (ethylenically unsaturated bond group-containing carboxylic acid), 0.10 mol of triphenylphosphine (catalyst), 0.05 mol of BHT (polymerization inhibitor) was dissolved in 255 g of propylene glycol monomethyl ether acetate and reacted at 100 ° C. while bubbling dry air. When the reaction rate of epoxy group and carboxy group reached 99 mol%, biphenyl-3,3 ', 4,4'-tetracarboxylic dianhydride (cyclic acid anhydride) 0.50 mol and cyclohexene-4,5 -Dicarboxylic acid anhydride (cyclic acid anhydride) 0.50 mol was added, and it was made to react further. After confirming the consumption of the acid anhydride group by infrared spectroscopy, the solution was diluted with propylene glycol monomethyl ether acetate and cooled to room temperature to obtain a 50% solid content concentration solution of the A-1 component. The acid value of component A-1 was 96 mgKOH / g, and the weight average molecular weight was 4,000.
[A−2成分の合成例2]
一般式(1)で表されるビスフェノールフルオレン型エポキシ化合物(エポキシ当量315)630g、アクリル酸(エチレン性不飽和結合基含有カルボン酸)2.0モル、トリフェニルホスフィン(触媒)0.10モル、BHT(重合禁止剤)0.05モルをプロピレングリコールモノメチルエーテルアセテート315gに溶解させ、乾燥空気をバブリングさせながら100℃で反応させた。エポキシ基とカルボキシ基の反応率が99モル%に達したところでビフェニル−3,3′,4,4′−テトラカルボン酸二無水物(環状酸無水物)0.50モル及びシクロヘキセン−4,5−ジカルボン酸無水物(環状酸無水物)0.50モルを添加し、更に反応させた。赤外分光法で酸無水物基の消費を確認した後、プロピレングリコールモノメチルエーテルアセテートで希釈して室温に冷却し、A−2成分の固形分濃度50%溶液を得た。A−2成分の酸価は84mgKOH/g、重量平均分子量は6千であった。
[Synthesis example 2 of component A-2]
630 g of a bisphenolfluorene type epoxy compound represented by the general formula (1) (epoxy equivalent 315), 2.0 mol of acrylic acid (ethylenically unsaturated bond group-containing carboxylic acid), 0.10 mol of triphenylphosphine (catalyst), 0.05 mol of BHT (polymerization inhibitor) was dissolved in 315 g of propylene glycol monomethyl ether acetate and reacted at 100 ° C. while bubbling dry air. When the reaction rate of epoxy group and carboxy group reached 99 mol%, biphenyl-3,3 ', 4,4'-tetracarboxylic dianhydride (cyclic acid anhydride) 0.50 mol and cyclohexene-4,5 -Dicarboxylic acid anhydride (cyclic acid anhydride) 0.50 mol was added, and it was made to react further. After confirming consumption of the acid anhydride group by infrared spectroscopy, the solution was diluted with propylene glycol monomethyl ether acetate and cooled to room temperature to obtain a 50% solid content concentration solution of the A-2 component. The acid value of component A-2 was 84 mgKOH / g, and the weight average molecular weight was 6,000.
[A−3成分の合成例3]
一般式(1)で表されるビスフェノールフルオレン型エポキシ化合物(エポキシ当量255)510g、アクリル酸(エチレン性不飽和結合基含有カルボン酸)2.0モル、トリフェニルホスフィン(触媒)0.10モル、BHT(重合禁止剤)0.05モルをプロピレングリコールモノメチルエーテルアセテート255gに溶解させ、乾燥空気をバブリングさせながら100℃で反応させた。エポキシ基とカルボキシ基の反応率が99モル%に達したところでビフェニル−3,3′,4,4′−テトラカルボン酸二無水物(環状酸無水物)0.65モル及びシクロヘキセン−4,5−ジカルボン酸無水物(環状酸無水物)0.02モルを添加し、更に反応させた。赤外分光法で酸無水物基の消費を確認した後、プロピレングリコールモノメチルエーテルアセテートで希釈して室温に冷却し、A−3成分の固形分濃度50%溶液を得た。A−3成分の酸価は87mgKOH/g、重量平均分子量は9千であった。
[Synthesis Example 3 of A-3 Component]
510 g of a bisphenolfluorene type epoxy compound (epoxy equivalent 255) represented by the general formula (1), 2.0 mol of acrylic acid (ethylenically unsaturated bond group-containing carboxylic acid), 0.10 mol of triphenylphosphine (catalyst), 0.05 mol of BHT (polymerization inhibitor) was dissolved in 255 g of propylene glycol monomethyl ether acetate and reacted at 100 ° C. while bubbling dry air. When the reaction rate of epoxy group and carboxy group reached 99 mol%, biphenyl-3,3 ', 4,4'-tetracarboxylic dianhydride (cyclic acid anhydride) 0.65 mol and cyclohexene-4,5 -0.02 mol of dicarboxylic acid anhydride (cyclic acid anhydride) was added and further reacted. After confirming the consumption of the acid anhydride group by infrared spectroscopy, it was diluted with propylene glycol monomethyl ether acetate and cooled to room temperature to obtain a 50% solid content concentration solution of the A-3 component. The acid value of A-3 component was 87 mgKOH / g, and the weight average molecular weight was 9,000.
[AX−1成分の合成例4]
ビスフェノールA型エポキシ化合物(エポキシ当量185)370g、アクリル酸(エチレン性不飽和結合基含有カルボン酸)2.0モル、トリフェニルホスフィン(触媒)0.10モル、BHT(重合禁止剤)0.05モルをプロピレングリコールモノメチルエーテルアセテート185gに溶解させ、乾燥空気をバブリングさせながら100℃で反応させた。エポキシ基とカルボキシ基の反応率が99モル%に達したところでビフェニル−3,3′,4,4′−テトラカルボン酸二無水物(環状酸無水物)0.50モル及びシクロヘキセン−4,5−ジカルボン酸無水物(環状酸無水物)0.50モルを添加し、更に反応させた。赤外分光法で酸無水物基の消費を確認した後、プロピレングリコールモノメチルエーテルアセテートで希釈して室温に冷却し、AX−1成分の固形分濃度50%溶液を得た。AX−1成分の酸価は114mgKOH/g、重量平均分子量は3千であった。
[Synthesis Example 4 of AX-1 Component]
370 g of bisphenol A type epoxy compound (epoxy equivalent 185), 2.0 mol of acrylic acid (ethylenically unsaturated bond group-containing carboxylic acid), 0.10 mol of triphenylphosphine (catalyst), 0.05 BHT (polymerization inhibitor) Mole was dissolved in 185 g of propylene glycol monomethyl ether acetate and reacted at 100 ° C. while bubbling dry air. When the reaction rate of epoxy group and carboxy group reached 99 mol%, biphenyl-3,3 ', 4,4'-tetracarboxylic dianhydride (cyclic acid anhydride) 0.50 mol and cyclohexene-4,5 -Dicarboxylic acid anhydride (cyclic acid anhydride) 0.50 mol was added, and it was made to react further. After confirming the consumption of the acid anhydride group by infrared spectroscopy, it was diluted with propylene glycol monomethyl ether acetate and cooled to room temperature to obtain a 50% solid concentration solution of the AX-1 component. The acid value of the AX-1 component was 114 mgKOH / g, and the weight average molecular weight was 3,000.
[カラーフィルター用感光性樹脂組成物の調製]
(カラーフィルター用感光性樹脂組成物の調製例1)
A−1成分の固形分濃度50%溶液(合成例1で得た溶液)10.0部、D−1成分6.0部、D−2成分6.0部、E−1成分3.0部、及びZ−1成分75.0部を混合し、冷却水で30℃以下の状態に保ちながら、直径0.3mmのジルコニアビーズを80%充填した内容積600mLのビーズミルで安定状態となるまで周速8.5m/sで分散して分散液を得た。次にA−1成分10.0部、B−1成分2.0部、B−2成分2.0部、C−1成分0.4部、S−2成分0.5部、S−3成分0.1部、Z−1成分20.0部及びZ−2成分15.0部を上記分散液に配合し、ミキサーを用いて室温で3時間撹拌混合した。最後に濾過精度0.6μmのメンブレンフィルターを用いて圧力0.05MPaで加圧濾過を行い、赤色のカラーフィルター用感光性樹脂組成物を得た。
[Preparation of photosensitive resin composition for color filter]
(Preparation Example 1 of photosensitive resin composition for color filter)
A part 50% solid content solution of A-1 (solution obtained in Synthesis Example 1) 10.0 parts, D-1 ingredient 6.0 parts, D-2 ingredient 6.0 parts, E-1 ingredient 3.0 And 75.0 parts of the Z-1 component are mixed and kept at a temperature of 30 ° C. or lower with cooling water until a stable state is achieved with a bead mill having an internal volume of 600 mL filled with 80% of zirconia beads having a diameter of 0.3 mm. A dispersion was obtained by dispersing at a peripheral speed of 8.5 m / s. Next, A-1 component 10.0 parts, B-1 component 2.0 parts, B-2 component 2.0 parts, C-1 component 0.4 parts, S-2 component 0.5 parts, S-3 0.1 part of a component, 20.0 parts of a Z-1 component, and 15.0 parts of a Z-2 component were mixed in the dispersion, and the mixture was stirred and mixed at room temperature for 3 hours using a mixer. Finally, pressure filtration was performed at a pressure of 0.05 MPa using a membrane filter having a filtration accuracy of 0.6 μm to obtain a red photosensitive resin composition for a color filter.
調製例1のカラーフィルター用感光性樹脂組成物の作製条件を表1に示す。本表ではA−1成分としては固形分量のみを記載し、50%溶液の溶剤分はZ−1成分に含めて表した(以下、A−2、A−3、AX−1、S−1成分についても同様)。 Table 1 shows the production conditions of the photosensitive resin composition for a color filter of Preparation Example 1. In this table, only the solid content is described as the A-1 component, and the solvent content of the 50% solution is included in the Z-1 component (hereinafter referred to as A-2, A-3, AX-1, S-1). The same applies to the ingredients).
[カラーフィルター用感光性樹脂組成物の調製例2〜9]
調製例1の作製条件を表1に示すようにそれぞれ変更し、その他は調製例1と同様にして、調製例2〜9のカラーフィルター用感光性樹脂組成物の作製を行った。
[Preparation Examples 2 to 9 of photosensitive resin composition for color filter]
The production conditions of Preparation Example 1 were changed as shown in Table 1, and the others were made in the same manner as Preparation Example 1, and Photosensitive Resin Compositions for Color Filters of Preparation Examples 2 to 9 were prepared.
[実施例1]
(カラーフィルターの作製)
ガラス基板に保持したPENフィルム上に、調製例1のカラーフィルター用感光性樹脂組成物を硬化後の膜厚が1.0μmとなるような回転数でスピンコートし(工程(ア))、90℃のホットプレートで2分間乾燥させて(工程(イ))試験片を作製した。次に、カラーフィルターの画素のテストパターン形状を有するフォトマスクを介して照度30mW/cm2の超高圧水銀ランプで150mJ/cm2の紫外線(数値はi線基準)を照射し、画像露光を行った(工程(ウ))。その後、試験片を25℃の水酸化カリウム系アルカリ現像液(新日鉄住金化学社製「NSID」の100倍希釈液)で1分間処理し、更に水洗を行って画像を現像した(工程(エ))。最後に試験片に照度10mW/cm2の低圧水銀ランプで1500mJ/cm2の紫外線(数値は254nm基準)を照射し、ポスト露光を行った(工程(オ))。こうして赤色の色相のカラーフィルター用感光性樹脂組成物の硬化膜(1色目の画素)を得た。
[Example 1]
(Production of color filter)
On the PEN film held on the glass substrate, the photosensitive resin composition for color filter of Preparation Example 1 was spin-coated at a rotation speed such that the film thickness after curing was 1.0 μm (step (A)), 90 The specimen was dried for 2 minutes on a hot plate at 0 ° C. (step (i)). Next, image exposure is performed by irradiating 150 mJ / cm 2 of ultraviolet rays (numerical values are based on i-line) with an ultrahigh pressure mercury lamp having an illuminance of 30 mW / cm 2 through a photomask having a test pattern shape of the color filter pixels. (Step (c)). Thereafter, the test piece was treated for 1 minute with a 25 ° C. potassium hydroxide alkaline developer (“NSID” manufactured by Nippon Steel & Sumikin Chemical Co., Ltd.) for 1 minute, and further washed with water to develop the image (step (D)). ). Finally, the test piece was irradiated with 1500 mJ / cm 2 of ultraviolet rays (numerical value is 254 nm standard) with a low-pressure mercury lamp having an illuminance of 10 mW / cm 2 to perform post-exposure (step (e)). Thus, a cured film (first color pixel) of the photosensitive resin composition for a color filter having a red hue was obtained.
次に、上記の手順を調製例2のカラーフィルター用感光性樹脂組成物を用いて同一のPENフィルム上に繰り返して実施し、緑色の色相のカラーフィルター用感光性樹脂組成物の硬化膜(2色目の画素)を得た。更に、上記の手順を調製例3のカラーフィルター用感光性樹脂組成物を用いて同一のPENフィルム上に繰り返して実施し、青色の色相のカラーフィルター用感光性樹脂組成物の硬化膜(3色目の画素)を得た。こうして赤色・緑色・青色の鮮明な3色の画素を有するカラーフィルターを作製した。 Next, the above procedure was repeated on the same PEN film using the photosensitive resin composition for color filter of Preparation Example 2, and the cured film of the photosensitive resin composition for color filter of green hue (2 Color pixel). Furthermore, the above procedure was repeated on the same PEN film using the color filter photosensitive resin composition of Preparation Example 3, and a cured film of the blue hue color photosensitive resin composition (third color) Obtained). In this way, a color filter having clear three-color pixels of red, green, and blue was produced.
[実施例2]
実施例1で使用した調製例1の組成物を調製例4に、調製例2の組成物を調製例5に、調製例3の組成物を調製例6にそれぞれ変更し、その他は実施例1と同様にして、赤色・緑色・青色の鮮明な3色の画素を有するカラーフィルターを作製した。
[Example 2]
The composition of Preparation Example 1 used in Example 1 was changed to Preparation Example 4, the composition of Preparation Example 2 was changed to Preparation Example 5, the composition of Preparation Example 3 was changed to Preparation Example 6, and the others were changed to Example 1. In the same manner as described above, a color filter having clear three-color pixels of red, green, and blue was produced.
[比較例1]
実施例1で使用した調製例1の組成物を調製例7に、調製例2の組成物を調製例8に、調製例3の組成物を調製例9にそれぞれ変更し、その他は実施例1と同様にしてカラーフィルターの作製を行った。2色目の画素を形成しようとすると、調製例8の組成物の溶剤で1色目の画素(調製例7の組成物の硬化膜)が侵されて色が滲み出し、鮮明な画素を得ることができなくなった。画素の色相を形成する順番を変更し、1色目の画素を調製例8又は調製例9の組成物で形成しても、2色目の画素を形成する際に同様に色の滲み出しが観察され、鮮明な画素を得ることはできなかった。
[Comparative Example 1]
The composition of Preparation Example 1 used in Example 1 was changed to Preparation Example 7, the composition of Preparation Example 2 was changed to Preparation Example 8, the composition of Preparation Example 3 was changed to Preparation Example 9, and the others were changed to Example 1. A color filter was prepared in the same manner as described above. If an attempt is made to form a pixel of the second color, the pixel of the first color (the cured film of the composition of Preparation Example 7) is eroded by the solvent of the composition of Preparation Example 8, and the color oozes out to obtain a clear pixel. I can't. Even if the order of forming the hues of the pixels is changed and the first color pixel is formed from the composition of Preparation Example 8 or Preparation Example 9, color bleeding is observed in the same manner when the second color pixel is formed. It was not possible to obtain clear pixels.
本発明の製造方法を適用することにより、プラスチック基板上や白色有機ELデバイス上に直接カラーフィルターを形成することが可能となり、デバイスのフレキシブル化やワンチップ化が容易に実現できる。また、本発明で用いる感光性樹脂組成物は、カラーフィルターの作製のみならず、塗料、印刷インキ、筆記具インキ、プラスチック等の着色成分としても利用することが可能である。 By applying the manufacturing method of the present invention, it is possible to directly form a color filter on a plastic substrate or a white organic EL device, and the device can be easily made flexible or made into one chip. The photosensitive resin composition used in the present invention can be used not only for the production of color filters but also for coloring components such as paints, printing inks, writing instrument inks, and plastics.
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014217289A JP6508911B2 (en) | 2014-10-24 | 2014-10-24 | Method of manufacturing color filter and color filter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014217289A JP6508911B2 (en) | 2014-10-24 | 2014-10-24 | Method of manufacturing color filter and color filter |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016085323A true JP2016085323A (en) | 2016-05-19 |
JP6508911B2 JP6508911B2 (en) | 2019-05-08 |
Family
ID=55971770
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014217289A Active JP6508911B2 (en) | 2014-10-24 | 2014-10-24 | Method of manufacturing color filter and color filter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6508911B2 (en) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH061938A (en) * | 1992-06-19 | 1994-01-11 | Nippon Steel Corp | Alkali-developable photo-sensitive ink for color filter and color filter produced by using the ink |
JP2011185966A (en) * | 2010-03-04 | 2011-09-22 | Sumitomo Chemical Co Ltd | Method for manufacturing cured pattern |
JP2011191391A (en) * | 2010-03-12 | 2011-09-29 | Sumitomo Chemical Co Ltd | Method for producing hardened pattern |
JP2014162814A (en) * | 2013-02-21 | 2014-09-08 | Nippon Shokubai Co Ltd | Curable resin composition for plastic substrate and use of same |
US9029052B1 (en) * | 2013-12-05 | 2015-05-12 | Chi Mei Corporation | Photosensitive resin composition, color filter and method for manufacturing the same, and liquid crystal display apparatus |
-
2014
- 2014-10-24 JP JP2014217289A patent/JP6508911B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH061938A (en) * | 1992-06-19 | 1994-01-11 | Nippon Steel Corp | Alkali-developable photo-sensitive ink for color filter and color filter produced by using the ink |
JP2011185966A (en) * | 2010-03-04 | 2011-09-22 | Sumitomo Chemical Co Ltd | Method for manufacturing cured pattern |
JP2011191391A (en) * | 2010-03-12 | 2011-09-29 | Sumitomo Chemical Co Ltd | Method for producing hardened pattern |
JP2014162814A (en) * | 2013-02-21 | 2014-09-08 | Nippon Shokubai Co Ltd | Curable resin composition for plastic substrate and use of same |
US9029052B1 (en) * | 2013-12-05 | 2015-05-12 | Chi Mei Corporation | Photosensitive resin composition, color filter and method for manufacturing the same, and liquid crystal display apparatus |
Also Published As
Publication number | Publication date |
---|---|
JP6508911B2 (en) | 2019-05-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6409936B2 (en) | Colored photosensitive composition, black photo spacer, color filter, and liquid crystal display device | |
TWI820050B (en) | Photosensitive coloring composition for color filter, and color filter | |
TWI774657B (en) | Colored curable resin composition, color filter and display device containing the same | |
JP2017115163A (en) | Polymer, photosensitive composition, pattern formation method and color filter | |
JP2013104002A (en) | Colored curable resin composition | |
JP2014005466A (en) | Alkali-soluble resin, photosensitive resin composition containing the same, and color filter using the same | |
TWI554827B (en) | Coloring the fake composition | |
JP6716257B2 (en) | Method for producing high pigment concentration photosensitive resin composition, method for producing cured product of the composition, and method for producing color filter | |
JP2018035345A (en) | Colored curable resin composition | |
JP6463018B2 (en) | Method for producing photosensitive resin composition for color filter and photosensitive resin composition for color filter | |
JP2014130186A (en) | Photosensitive composition and cured product | |
KR102100753B1 (en) | Colored photosensitive resin composition and color filter using the same | |
CN103116244B (en) | Hardening resin composition | |
JP6783041B2 (en) | A photosensitive resin composition for a color filter, a cured film thereof, and a color filter containing the cured film as a constituent component. | |
TW201932496A (en) | Photosensitive resin composition for color filter, color filter, image display element and method for producing color filter | |
JP2014026278A (en) | Colored photosensitive resin composition | |
JP6508911B2 (en) | Method of manufacturing color filter and color filter | |
JP7250591B2 (en) | A method for producing a polymerizable unsaturated group-containing alkali-soluble resin, a polymerizable unsaturated group-containing alkali-soluble resin, a photosensitive resin composition containing the same, a cured product obtained by curing the same, and a touch panel containing the cured product as a constituent component and color filters | |
KR20140000774A (en) | Colored photosensitive resin composition and color filter | |
JP5736713B2 (en) | Photosensitive composition and color filter | |
KR20170077362A (en) | Colored photosensitive resin composition, color filter and image display device produced using the same | |
JP7108670B2 (en) | Photosensitive resin composition for color filters | |
KR20140015677A (en) | Colored photosensitive resin composition and color filter | |
JP7263709B2 (en) | Coloring composition for color filter and color filter | |
JP2011099034A (en) | Polycarboxylic acid resin and polycarboxylic acid resin composition |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20170914 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20180830 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20180904 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20181023 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20181025 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20190326 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20190402 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6508911 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |