JP2016081908A - マグネトロンを検査する方法 - Google Patents

マグネトロンを検査する方法 Download PDF

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Publication number
JP2016081908A
JP2016081908A JP2015154248A JP2015154248A JP2016081908A JP 2016081908 A JP2016081908 A JP 2016081908A JP 2015154248 A JP2015154248 A JP 2015154248A JP 2015154248 A JP2015154248 A JP 2015154248A JP 2016081908 A JP2016081908 A JP 2016081908A
Authority
JP
Japan
Prior art keywords
magnetron
value
predetermined
current
high frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2015154248A
Other languages
English (en)
Japanese (ja)
Inventor
和史 金子
Kazufumi Kaneko
和史 金子
秀生 加藤
Hideo Kato
秀生 加藤
一憲 舩▲崎▼
Kazunori Funasaki
一憲 舩▲崎▼
栄治 ▲高▼橋
栄治 ▲高▼橋
Eiji Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to US14/886,425 priority Critical patent/US9977070B2/en
Priority to KR1020150145296A priority patent/KR102279085B1/ko
Publication of JP2016081908A publication Critical patent/JP2016081908A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/24—Testing of discharge tubes
    • G01R31/25—Testing of vacuum tubes
    • G01R31/255—Testing of transit-time tubes, e.g. klystrons, magnetrons
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32201—Generating means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Environmental & Geological Engineering (AREA)
  • Electromagnetism (AREA)
  • Control Of High-Frequency Heating Circuits (AREA)
  • Chemical Vapour Deposition (AREA)
  • Inverter Devices (AREA)
JP2015154248A 2014-10-21 2015-08-04 マグネトロンを検査する方法 Pending JP2016081908A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US14/886,425 US9977070B2 (en) 2014-10-21 2015-10-19 Method for inspecting magnetron
KR1020150145296A KR102279085B1 (ko) 2014-10-21 2015-10-19 마그네트론을 검사하는 방법

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014214350 2014-10-21
JP2014214350 2014-10-21

Publications (1)

Publication Number Publication Date
JP2016081908A true JP2016081908A (ja) 2016-05-16

Family

ID=55958995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015154248A Pending JP2016081908A (ja) 2014-10-21 2015-08-04 マグネトロンを検査する方法

Country Status (2)

Country Link
JP (1) JP2016081908A (ko)
KR (1) KR102279085B1 (ko)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5163995B2 (ja) 2007-03-08 2013-03-13 ミクロ電子株式会社 マグネトロンの寿命検出装置
JP5252387B2 (ja) 2007-10-19 2013-07-31 ミクロ電子株式会社 寿命判定機能を有するマグネトロンの駆動装置
JP5848982B2 (ja) * 2012-02-17 2016-01-27 東京エレクトロン株式会社 プラズマ処理装置及びプラズマのモニタリング方法
JP5943067B2 (ja) 2012-03-26 2016-06-29 東京エレクトロン株式会社 プラズマ処理装置、および高周波発生器

Also Published As

Publication number Publication date
KR20160046738A (ko) 2016-04-29
KR102279085B1 (ko) 2021-07-19

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