JP2016081648A - High frequency transmission window structure - Google Patents

High frequency transmission window structure Download PDF

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JP2016081648A
JP2016081648A JP2014210161A JP2014210161A JP2016081648A JP 2016081648 A JP2016081648 A JP 2016081648A JP 2014210161 A JP2014210161 A JP 2014210161A JP 2014210161 A JP2014210161 A JP 2014210161A JP 2016081648 A JP2016081648 A JP 2016081648A
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frequency transmission
transmission window
sleeve
high frequency
joint
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JP6408337B2 (en
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俊郎 阿武
Toshiro Anno
俊郎 阿武
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Toshiba Corp
Canon Electron Tubes and Devices Co Ltd
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Toshiba Corp
Toshiba Electron Tubes and Devices Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a high frequency transmission window structure which hardly generates clacks in the vicinity of a joint area of the high frequency transmission window.SOLUTION: The high frequency transmission window structure 20 includes a high frequency transmission window 30 and a sleeve 31. The high frequency transmission window 30 is formed of a ceramic and has a joint area 34 on an outer periphery. The sleeve 31 constitutes a high frequency transmission path and has a joint area 37 with a joint area 34 of the high frequency transmission window 30 which is joined to the inner peripheral surface by soldering, and a groove 38 which is formed along the side of the part 37 and a part of the joint area 34 is opposed thereto.SELECTED DRAWING: Figure 1

Description

本発明の実施形態は、高周波の出力に用いられる高周波透過窓構体に関する。   Embodiments described herein relate generally to a high-frequency transmission window structure used for high-frequency output.

従来、高周波(マイクロ波)を増幅するクライストロンなどのマイクロ波電子管は、内部を真空に保ちながら外部へ高周波を出力するため、出力導波管に高周波透過窓構体を備えている。   Conventionally, a microwave electron tube such as a klystron that amplifies a high frequency (microwave) is provided with a high frequency transmission window structure in an output waveguide in order to output a high frequency to the outside while keeping the inside vacuum.

高周波透過窓構体は、気密を保ち高周波を透過する高周波透過窓と、高周波透過窓の外周側がろう付けにより接合され高周波信号の伝送路を構成する銅などの金属のスリーブとを備えている。高周波透過窓の材料には、例えばアルミナなどのセラミックが用いられている。高周波透過窓は、スリーブとの接合面に薄い金属の層であるメタライズ層を有し、メタライズ層を介してろう付けによりスリーブと接合されている。   The high-frequency transmission window structure includes a high-frequency transmission window that is air-tight and transmits high-frequency waves, and a metal sleeve such as copper that forms a transmission path for a high-frequency signal by joining the outer periphery of the high-frequency transmission window by brazing. For example, ceramic such as alumina is used as the material of the high-frequency transmission window. The high-frequency transmission window has a metallized layer which is a thin metal layer on the joint surface with the sleeve, and is joined to the sleeve by brazing via the metallized layer.

高周波透過窓構体は、ろう付けによる組み立て時に、例えば1000度以上の高温にさらされる。また、マイクロ波電子管の管球を組み立てた後に内部を真空にするための排気時にも、加熱のため高周波透過窓構体は例えば400度以上の高温にさらされる。   The high-frequency transmission window structure is exposed to a high temperature of, for example, 1000 degrees or more when assembled by brazing. In addition, the high-frequency transmission window structure is also exposed to a high temperature of, for example, 400 ° C. or higher for heating even during exhaust for vacuuming the inside after assembling the tube of the microwave electron tube.

セラミックの高周波透過窓と金属のスリーブとでは、材料の熱膨張率が異なる。そのため、室温から高温状態への温度上昇時、あるいは高温状態から室温への温度降下時の温度変化により、高周波透過窓とスリーブとの接合部分において、高周波透過窓に引張応力が生じる。特に、高周波透過窓の接合面における幅方向の端部では、高周波透過窓に応力集中が起こりやすい。その結果、高周波透過窓の接合面の端部を起点として、高周波透過窓の内部に向かってクラックが発生することがある。このクラックが高周波透過窓を貫通した場合、マイクロ波電子管の気密を保てなくなるという課題がある。   The thermal expansion coefficient of the material differs between the ceramic high-frequency transmission window and the metal sleeve. Therefore, a tensile stress is generated in the high-frequency transmission window at the joint between the high-frequency transmission window and the sleeve due to a temperature change when the temperature increases from room temperature to a high temperature state or when the temperature decreases from the high temperature state to room temperature. In particular, stress concentration tends to occur in the high-frequency transmission window at the end in the width direction of the joint surface of the high-frequency transmission window. As a result, cracks may occur toward the inside of the high frequency transmission window starting from the end of the joint surface of the high frequency transmission window. When this crack penetrates the high-frequency transmission window, there is a problem that the airtightness of the microwave electron tube cannot be maintained.

特開平9−63490号公報JP-A-9-63490

本発明が解決しようとする課題は、高周波透過窓の接合面近傍にクラックを生じにくい高周波透過窓構体を提供することである。   The problem to be solved by the present invention is to provide a high-frequency transmission window structure in which cracks are unlikely to occur in the vicinity of the joint surface of the high-frequency transmission window.

本実施形態の高周波透過窓構体は、高周波透過窓、およびスリーブを備える。高周波透過窓は、セラミックであり、外周に接合面を有する。スリーブは、高周波の伝送路を構成し、内周面に、高周波透過窓の接合面がろう付けにより接合される接合部を有するとともに、接合部の側部に沿って設けられ接合面の一部が対向する溝部を有する。   The high-frequency transmission window structure of the present embodiment includes a high-frequency transmission window and a sleeve. The high-frequency transmission window is made of ceramic and has a joint surface on the outer periphery. The sleeve constitutes a high-frequency transmission line, and has a joint portion on the inner peripheral surface where the joint surface of the high-frequency transmission window is joined by brazing, and is provided along a side portion of the joint portion. Have opposite groove portions.

第1の実施形態を示す高周波透過窓構体の一部の断面図である。It is a sectional view of a part of the high frequency transmission window structure showing the first embodiment. 同上高周波透過窓構体の概略構造を示す断面図である。It is sectional drawing which shows schematic structure of a high frequency transmission window structure same as the above. 同上高周波透過窓構体を用いたマイクロ波電子管の断面図である。It is sectional drawing of the microwave electron tube using a high frequency transmission window structure same as the above. 第2の実施形態を示す高周波透過窓構体の一部の断面図である。It is sectional drawing of a part of high frequency transmission window structure which shows 2nd Embodiment.

以下、第1の実施形態を、図1ないし図3を参照して説明する。   Hereinafter, a first embodiment will be described with reference to FIGS. 1 to 3.

図3は高周波透過窓構体を用いたマイクロ波電子管の断面図である。マイクロ波電子管10は、例えばクライストロンである。マイクロ波電子管10は、電子銃部11を備えている。電子銃部11は、電子ビーム12を発生する陰極13aおよび電子ビーム12を加速する陽極13bを備えている。   FIG. 3 is a cross-sectional view of a microwave electron tube using a high-frequency transmission window structure. The microwave electron tube 10 is, for example, a klystron. The microwave electron tube 10 includes an electron gun unit 11. The electron gun unit 11 includes a cathode 13 a that generates an electron beam 12 and an anode 13 b that accelerates the electron beam 12.

電子ビーム12の進行方向に対し、電子銃部11の前方には高周波相互作用部14が設けられている。高周波相互作用部14は、電子ビーム12の進行方向に配列された例えば5個の共振空胴15a〜15eを備えている。   A high-frequency interaction unit 14 is provided in front of the electron gun unit 11 with respect to the traveling direction of the electron beam 12. The high-frequency interaction unit 14 includes, for example, five resonant cavities 15 a to 15 e arranged in the traveling direction of the electron beam 12.

高周波相互作用部14のさらに前方には、電子ビーム12を捕捉するコレクタ16が設けられている。   A collector 16 that captures the electron beam 12 is provided further in front of the high-frequency interaction unit 14.

高周波相互作用部14を構成する複数の共振空胴15a〜15eのうち、電子銃部11側に位置する共振空胴15aには、高周波信号の入力部17、例えば同軸線路が接続されている。コレクタ16側に位置する共振空胴15eには、増幅した高周波の出力部18、例えば導波管19が接続されている。導波管19には、マイクロ波電子管10の内部を真空に保ちながら外部へ高周波を出力するための高周波透過窓構体20が設けられている。   Among the plurality of resonance cavities 15a to 15e constituting the high frequency interaction unit 14, a high frequency signal input unit 17, for example, a coaxial line, is connected to the resonance cavity 15a located on the electron gun unit 11 side. An amplified high-frequency output section 18, for example, a waveguide 19 is connected to the resonance cavity 15e located on the collector 16 side. The waveguide 19 is provided with a high-frequency transmission window structure 20 for outputting a high frequency to the outside while keeping the inside of the microwave electron tube 10 in a vacuum.

電子銃部11と高周波相互作用部14との間、複数の共振空胴15a〜15e間、高周波相互作用部14とコレクタ16との間は、それぞれ同一径のドリフト管21で連結されている。   A drift tube 21 having the same diameter is connected between the electron gun unit 11 and the high-frequency interaction unit 14, between the plurality of resonance cavities 15a to 15e, and between the high-frequency interaction unit 14 and the collector 16.

図1は高周波透過窓構体20の一部の断面図、および図2は高周波透過窓構体20の概略構造を示す断面図である。高周波透過窓構体20は、気密を保ち高周波を透過する高周波透過窓30、高周波の伝送路を構成するスリーブ31、および高周波透過窓30がろう付けされる部分のスリーブ31の外側に巻き付けられるワイヤ32を備えている。   FIG. 1 is a partial cross-sectional view of the high-frequency transmission window assembly 20, and FIG. 2 is a cross-sectional view showing a schematic structure of the high-frequency transmission window assembly 20. The high-frequency transmission window structure 20 includes a high-frequency transmission window 30 that is airtight and transmits high frequencies, a sleeve 31 that constitutes a high-frequency transmission path, and a wire 32 that is wound around the sleeve 31 where the high-frequency transmission window 30 is brazed. It has.

高周波透過窓30の材料には、例えばアルミナなどのセラミックが用いられている。高周波透過窓30は、円板状に形成されている。高周波透過窓30の外周面には、スリーブ31に接合される接合面34が形成されている。高周波透過窓30は、接合面34に薄い金属の層であるメタライズ層を有し、高周波透過窓30とスリーブ31との間に挿入した板状のろう材を高温で溶融することにより、スリーブ31と接合される。高周波透過窓30の接合面34の両端部、すなわち高周波透過窓30の幅方向両側の角部には、斜めにカットされた傾斜面(面取り部)35が形成されている。接合面34の幅Wは、高周波透過窓30の幅方向の厚み寸法よりも小さくなっている。   As a material of the high-frequency transmission window 30, for example, ceramic such as alumina is used. The high frequency transmission window 30 is formed in a disc shape. A joint surface 34 to be joined to the sleeve 31 is formed on the outer peripheral surface of the high-frequency transmission window 30. The high-frequency transmission window 30 has a metallized layer, which is a thin metal layer, on the joining surface 34, and melts a plate-like brazing material inserted between the high-frequency transmission window 30 and the sleeve 31 at a high temperature, thereby allowing the sleeve 31 to Joined with. At both ends of the joint surface 34 of the high-frequency transmission window 30, that is, the corners on both sides in the width direction of the high-frequency transmission window 30, inclined surfaces (chamfered portions) 35 that are obliquely cut are formed. The width W of the bonding surface 34 is smaller than the thickness dimension of the high-frequency transmission window 30 in the width direction.

スリーブ31の材料には、例えば銅などの金属が用いられている。スリーブ31は、円筒状に形成されている。スリーブ31の内周面には、高周波透過窓30の接合面34を接合する接合部37が形成されているとともに、接合部37の両側部に沿って2つの溝部38が形成されている。接合部37および2つの溝部38は、それぞれスリーブ31の内周面の一周に亘って形成されている。溝部38には、両側の内側面39、および溝奥側の溝底面40を有し、溝入口側にスリーブ31の内周面に開口する開口部41が形成されている。本実施形態の溝部38の断面形状は、両側の内側面39がスリーブ31の中心軸に対して直交する矩形に形成されている。   As the material of the sleeve 31, for example, a metal such as copper is used. The sleeve 31 is formed in a cylindrical shape. A joint portion 37 that joins the joint surface 34 of the high-frequency transmission window 30 is formed on the inner peripheral surface of the sleeve 31, and two groove portions 38 are formed along both side portions of the joint portion 37. The joint portion 37 and the two groove portions 38 are formed over the entire circumference of the inner peripheral surface of the sleeve 31. The groove portion 38 has inner side surfaces 39 on both sides and a groove bottom surface 40 on the back side of the groove, and an opening portion 41 that opens to the inner peripheral surface of the sleeve 31 is formed on the groove inlet side. The cross-sectional shape of the groove portion 38 in this embodiment is formed in a rectangular shape in which the inner side surfaces 39 on both sides are orthogonal to the central axis of the sleeve 31.

2つの溝部38の間隔X(接合部37の幅X)は、高周波透過窓30の接合面34の幅Wよりも小さくなっている。そして、スリーブ31の内側には、高周波透過窓30の接合面34の両端部が各溝部38に対向するように高周波透過窓30が設置されている。   An interval X between the two groove portions 38 (width X of the joint portion 37) is smaller than the width W of the joint surface 34 of the high-frequency transmission window 30. The high frequency transmission window 30 is installed inside the sleeve 31 so that both end portions of the joint surface 34 of the high frequency transmission window 30 face the groove portions 38.

なお、スリーブ31が備える溝部38は1つでもよく、この場合、高周波透過窓30の接合面34が溝部38に対向するように高周波透過窓30が設置すればよい。   The sleeve 31 may have only one groove portion 38. In this case, the high frequency transmission window 30 may be installed so that the joint surface 34 of the high frequency transmission window 30 faces the groove portion 38.

ワイヤ32は、ろう付け時に、高周波透過窓30がろう付けされる部分のスリーブ31の外側に巻き付けられ、高周波透過窓30とスリーブ31との位置を固定する役割を果たす。ワイヤ32は、スリーブ31よりも熱膨張率の小さい例えばモリブデンなどの金属材料で形成されている。スリーブ31へのワイヤ32の巻き数は任意である。   At the time of brazing, the wire 32 is wound around the outside of the sleeve 31 where the high-frequency transmission window 30 is brazed, and serves to fix the position of the high-frequency transmission window 30 and the sleeve 31. The wire 32 is formed of a metal material such as molybdenum having a smaller coefficient of thermal expansion than the sleeve 31. The number of windings of the wire 32 around the sleeve 31 is arbitrary.

そして、高周波透過窓構体20は、高周波透過窓30とスリーブ31とをろう付けにより接合する。ろう付け時には、高周波透過窓30とスリーブ31との間に挿入した板状のろう材を高温で溶融することにより、高周波透過窓30とスリーブ31とを接合する。   The high-frequency transmission window structure 20 joins the high-frequency transmission window 30 and the sleeve 31 by brazing. At the time of brazing, the high frequency transmission window 30 and the sleeve 31 are joined by melting a plate-like brazing material inserted between the high frequency transmission window 30 and the sleeve 31 at a high temperature.

このとき、スリーブ31が溝部38を備えていることにより、高周波透過窓30の接合面34の端部と溝部38の内側面39との間にろう材43のメニスカス44が形成される。   At this time, since the sleeve 31 includes the groove portion 38, the meniscus 44 of the brazing material 43 is formed between the end portion of the joint surface 34 of the high-frequency transmission window 30 and the inner side surface 39 of the groove portion 38.

ところで、高周波透過窓構体20は、ろう付けによる組み立て時に例えば1000度以上の高温にさらされる。また、マイクロ波電子管10の管球を組み立てた後に内部を真空にするための排気時にも、加熱のため高周波透過窓構体20は例えば400度以上の高温にさらされる。セラミックの高周波透過窓30と例えば銅のスリーブ31とでは材料の熱膨張率が異なる。そのため、室温から高温状態への温度上昇時、あるいは高温状態から室温への温度降下時の温度変化により、高周波透過窓30とスリーブ31との接合部分において、高周波透過窓30に引張応力が生じる。そして、高周波透過窓30の接合面34における端部では、高周波透過窓30に応力集中が起こりやすい。その結果、高周波透過窓30の接合面34の端部を起点とし、高周波透過窓30の内部に向かってクラックが発生することがある。このクラックが高周波透過窓30を貫通した場合、マイクロ波電子管10の気密を保てなくなる。   By the way, the high-frequency transmission window structure 20 is exposed to a high temperature of, for example, 1000 degrees or more during assembly by brazing. In addition, the high-frequency transmission window assembly 20 is exposed to a high temperature of, for example, 400 ° C. or higher for heating even during exhaust for vacuuming the inside after assembling the tube of the microwave electron tube 10. The thermal expansion coefficient of the material differs between the ceramic high-frequency transmission window 30 and the copper sleeve 31, for example. Therefore, a tensile stress is generated in the high-frequency transmission window 30 at the joint portion between the high-frequency transmission window 30 and the sleeve 31 due to a temperature change from the room temperature to the high temperature state or a temperature change at the time of the temperature decrease from the high temperature state to the room temperature. Then, stress concentration tends to occur in the high frequency transmission window 30 at the end portion of the joint surface 34 of the high frequency transmission window 30. As a result, cracks may occur toward the inside of the high frequency transmission window 30 starting from the end of the joint surface 34 of the high frequency transmission window 30. If this crack penetrates the high-frequency transmission window 30, the microwave electron tube 10 cannot be kept airtight.

第1の実施形態の高周波透過窓構体20によれば、高周波透過窓30とスリーブ31との接合部分にろう材43のメニスカス44が形成されることにより、高周波透過窓30に起こりやすい応力集中が緩和され、高周波透過窓30にクラックを生じにくくすることが可能となる。   According to the high frequency transmission window assembly 20 of the first embodiment, the meniscus 44 of the brazing material 43 is formed at the joint portion between the high frequency transmission window 30 and the sleeve 31, so that stress concentration that tends to occur in the high frequency transmission window 30 is increased. It is mitigated and it becomes possible to make the high frequency transmission window 30 less likely to crack.

さらに、スリーブ31は、接合部37の両側部に沿って2つの溝部38を有し、2つの溝部38間の間隔Xが高周波透過窓30の接合面34の幅Wよりも小さいことにより、高周波透過窓30の接合面34の両端部が溝部38に対向し、高周波透過窓30の接合面34における両端部において、応力集中が緩和され、高周波透過窓30にクラックをより生じにくくすることが可能となる。   Further, the sleeve 31 has two groove portions 38 along both side portions of the joint portion 37, and the interval X between the two groove portions 38 is smaller than the width W of the joint surface 34 of the high-frequency transmission window 30. Both end portions of the joining surface 34 of the transmission window 30 face the groove 38, stress concentration is mitigated at both ends of the joining surface 34 of the high-frequency transmission window 30, and cracks are less likely to occur in the high-frequency transmission window 30. It becomes.

次に、図4に第2の実施形態を示す。なお、第1の実施形態と同じ構成については同じ符号を用い、その構成および作用効果についての説明を省略する。   Next, FIG. 4 shows a second embodiment. In addition, the same code | symbol is used about the same structure as 1st Embodiment, and the description about the structure and effect is abbreviate | omitted.

スリーブ31の溝部38の断面形状が台形に形成されている。台形とは、溝部38の断面の4隅の点を結んだ形状を指すものである。すなわち、溝部38は、溝底面40の幅よりも開口部41の幅が広く、溝底面40から開口部41へ向けて両側の内側面39が拡開するように、台形に形成されている。そして、高周波透過窓30の接合面34とこの接合面34に交わる溝部38の内側面39とがなす角度θは90度より小さくなっている。   The cross-sectional shape of the groove portion 38 of the sleeve 31 is formed in a trapezoidal shape. The trapezoid refers to a shape connecting the four corner points of the cross section of the groove 38. That is, the groove 38 is formed in a trapezoidal shape so that the width of the opening 41 is wider than the width of the groove bottom 40 and the inner side surfaces 39 on both sides expand from the groove bottom 40 toward the opening 41. The angle θ formed by the joint surface 34 of the high-frequency transmission window 30 and the inner side surface 39 of the groove 38 that intersects the joint surface 34 is smaller than 90 degrees.

スリーブ31が溝部38を備えていることにより、高周波透過窓30の接合面34の端部と溝部38の内側面39との間にろう材43のメニスカス44が形成される。   Since the sleeve 31 includes the groove portion 38, the meniscus 44 of the brazing material 43 is formed between the end portion of the joint surface 34 of the high-frequency transmission window 30 and the inner side surface 39 of the groove portion 38.

第2の実施形態の高周波透過窓構体20によれば、高周波透過窓30とスリーブ31との接合部分にろう材43のメニスカス44が形成されることにより、高周波透過窓30に起こりやすい応力集中が緩和され、高周波透過窓30にクラックを生じにくくすることが可能となる。   According to the high-frequency transmission window assembly 20 of the second embodiment, the meniscus 44 of the brazing material 43 is formed at the joint between the high-frequency transmission window 30 and the sleeve 31, so that stress concentration that tends to occur in the high-frequency transmission window 30 is increased. It is mitigated and it becomes possible to make the high frequency transmission window 30 less likely to crack.

それに加えて、溝部38の内側面39が90度よりも小さい角度θで傾斜することにより、メニスカス44を形成するろう材43がスリーブ31と接する面積を容易に大きくでき、接合強度を高めることができる。   In addition, since the inner side surface 39 of the groove portion 38 is inclined at an angle θ smaller than 90 degrees, the area where the brazing material 43 forming the meniscus 44 is in contact with the sleeve 31 can be easily increased, and the bonding strength can be increased. it can.

以上説明した少なくとも1つの実施形態の高周波透過窓構体20によれば、高周波透過窓30とスリーブ31との接合部分にろう材43のメニスカス44が形成されることにより、高周波透過窓30に起こりやすい応力集中が緩和され、高周波透過窓30にクラックを生じにくくすることが可能となる。   According to the high-frequency transmission window structure 20 of at least one embodiment described above, the meniscus 44 of the brazing material 43 is formed at the joint portion between the high-frequency transmission window 30 and the sleeve 31, and thus easily occurs in the high-frequency transmission window 30. The stress concentration is relaxed, and it is possible to make it difficult for the high-frequency transmission window 30 to crack.

本発明のいくつかの実施形態を説明したが、これらの実施形態は、例として提示したものであり、発明の範囲を限定することは意図していない。これら新規な実施形態は、その他の様々な形態で実施されることが可能であり、発明の要旨を逸脱しない範囲で、種々の省略、置き換え、変更を行うことができる。これら実施形態やその変形は、発明の範囲や要旨に含まれるとともに、特許請求の範囲に記載された発明とその均等の範囲に含まれる。   Although several embodiments of the present invention have been described, these embodiments are presented by way of example and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

20 高周波透過窓構体
30 高周波透過窓
31 スリーブ
34 接合面
37 接合部
38 溝部
20 High-frequency transmission window structure
30 High-frequency transmission window
31 sleeve
34 Joint surface
37 joints
38 Groove

Claims (3)

外周に接合面を有するセラミックの高周波透過窓と、
高周波の伝送路を構成し、内周面に、前記高周波透過窓の前記接合面がろう付けにより接合される接合部を有するとともに、前記接合部の側部に沿って設けられ前記接合面の一部が対向する溝部を有するスリーブと
を具備することを特徴とする高周波透過窓構体。
A ceramic high-frequency transmission window having a joint surface on the outer periphery;
A high-frequency transmission line is configured, and an inner peripheral surface has a joint portion where the joint surface of the high-frequency transmission window is joined by brazing, and is provided along a side portion of the joint portion. A high-frequency transmission window structure, comprising: a sleeve having groove portions facing each other.
前記スリーブは、前記接合部の両側部に沿って2つの前記溝部を有し、2つの前記溝部間の間隔が前記接合面の幅よりも小さい
ことを特徴とする請求項1の高周波透過窓構体。
2. The high-frequency transmission window structure according to claim 1, wherein the sleeve has two groove portions along both side portions of the joint portion, and an interval between the two groove portions is smaller than a width of the joint surface. .
前記接合面と前記接合面に交わる前記溝部の内側面とがなす角度は90度よりも小さい
ことを特徴とする請求項1または2の高周波透過窓構体。
3. The high-frequency transmission window structure according to claim 1, wherein an angle formed between the joint surface and an inner surface of the groove portion intersecting the joint surface is smaller than 90 degrees.
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6270274A (en) * 1985-09-19 1987-03-31 日立化成工業株式会社 Method for bonding ceramics and metal member
JPH02239166A (en) * 1989-03-09 1990-09-21 New Japan Radio Co Ltd Production of ceramics window
JPH0963490A (en) * 1995-08-18 1997-03-07 Toshiba Corp Airtight window structure for wave guide
JP2008302414A (en) * 2007-06-11 2008-12-18 Sumitomo Denko Shoketsu Gokin Kk Braze joining method, and sintered component produced by being brazed according to the method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6270274A (en) * 1985-09-19 1987-03-31 日立化成工業株式会社 Method for bonding ceramics and metal member
JPH02239166A (en) * 1989-03-09 1990-09-21 New Japan Radio Co Ltd Production of ceramics window
JPH0963490A (en) * 1995-08-18 1997-03-07 Toshiba Corp Airtight window structure for wave guide
JP2008302414A (en) * 2007-06-11 2008-12-18 Sumitomo Denko Shoketsu Gokin Kk Braze joining method, and sintered component produced by being brazed according to the method

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