JP2016080537A - Voltage detection device - Google Patents

Voltage detection device Download PDF

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JP2016080537A
JP2016080537A JP2014212900A JP2014212900A JP2016080537A JP 2016080537 A JP2016080537 A JP 2016080537A JP 2014212900 A JP2014212900 A JP 2014212900A JP 2014212900 A JP2014212900 A JP 2014212900A JP 2016080537 A JP2016080537 A JP 2016080537A
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detection
voltage
insulator
circuit
current
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JP6486644B2 (en
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浩一 柳沢
Koichi Yanagisawa
浩一 柳沢
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Hioki EE Corp
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Priority to US14/870,603 priority patent/US10012677B2/en
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Abstract

PROBLEM TO BE SOLVED: To detect a voltage of an object to be detected without contacting, even when an insulator exists between the object to be detected and a detection electrode.SOLUTION: A voltage detection device comprises: a detection electrode 11 disposed in contact with an insulator 51 covering an object 52 to be detected; a vibrator 13 for causing the insulator 51 to vibrate; a current-voltage conversion circuit 14 having an arithmetic amplifier 14a which, in a state where a first input terminal is set to a reference voltage, a second input terminal is connected to the detection electrode 11, and a feedback resistor 14b is connected between the second input terminal and an output terminal, with the insulator 51 made to vibrate, converts a detection current I flowing from the object 52 to be detected to the reference voltage via the detection electrode 11, modulated in amplitude in accordance with a potential difference Vdi between a voltage V1 to be detected and the reference voltage, and synchronized to the vibration of the vibrator 51, to a detection voltage signal V2; and a detection circuit 16 for detecting a detection output V3 indicating the potential difference Vdi from the detection voltage signal V2.SELECTED DRAWING: Figure 1

Description

本発明は、絶縁材で被覆された検出対象の電圧をこの絶縁材を介して検出する非接触型の電圧検出装置に関するものである。   The present invention relates to a non-contact type voltage detection device that detects a voltage to be detected covered with an insulating material through the insulating material.

非接触型の電圧検出装置として、下記の特許文献1に開示された電圧検出装置(非接触式の静電圧フォロア)が知られている。この電圧検出装置は、電圧検出のためのプローブを備えている。このプローブは、測定されるべき静電量をもつ測定表面(検出対象の表面)に向けて配置される検出電極と、検出電極と測定表面間の容量結合を変調するために検出電極に作用連結された変調器ないし駆動手段と、検出電極と一致する測定表面の区域を照射するために測定表面に向けられた輻射線の通路を規定する手段とを含んでいる。   As a non-contact type voltage detection device, a voltage detection device (non-contact type static voltage follower) disclosed in Patent Document 1 below is known. This voltage detection device includes a probe for voltage detection. The probe is operatively connected to a detection electrode arranged towards a measurement surface (surface to be detected) having an electrostatic quantity to be measured and to modulate capacitive coupling between the detection electrode and the measurement surface. Modulator or drive means, and means for defining a path of radiation directed to the measurement surface to illuminate an area of the measurement surface that coincides with the detection electrode.

また、検出電極はハウジング内に収容されている。また、このハウジングには第1開口ないし窓が設けられ、この第1開口ないし窓を通して検出電極が測定表面に露呈される。また、検出電極は、ハウジング内に収容された増幅器(電流電圧変換用の演算増幅器)の加算入力端(反転入力端)に線によって接続され、この増幅器の非反転入力端は線によって基準単位となるハウジングに接続されている。また、変調器ないし駆動手段には、例えば圧電トランスデューサを用いることができ、変調器ないし駆動手段は、作用連結された検出電極を機械的に運動(振動)させることで、測定表面と検出電極との間に形成される容量(結合容量)を変調させる。   The detection electrode is accommodated in the housing. The housing is provided with a first opening or window, and the detection electrode is exposed to the measurement surface through the first opening or window. The detection electrode is connected to a summing input terminal (inverting input terminal) of an amplifier (an operational amplifier for current / voltage conversion) accommodated in the housing by a line, and the non-inverting input terminal of the amplifier is connected to a reference unit by the line. Connected to the housing. Further, for example, a piezoelectric transducer can be used as the modulator or the driving means, and the modulator or the driving means mechanically moves (vibrates) the operation-connected detection electrode, so that the measurement surface, the detection electrode, The capacitance (coupling capacitance) formed between the two is modulated.

このプローブを備えた電圧検出装置では、この容量の変調時に、この容量、および電流電圧変換用として増幅器の加算入力端(反転入力端)と出力端子との間に接続された抵抗を介して流れる電流に基づいて、測定表面の電圧を非接触で検出することが可能になっている。   In the voltage detection device including the probe, when the capacitance is modulated, the capacitance and current / voltage conversion flow through a resistor connected between the addition input terminal (inverting input terminal) and the output terminal of the amplifier. Based on the current, the voltage on the measurement surface can be detected in a non-contact manner.

特公平7−92487号公報(第6頁、第7図)Japanese Examined Patent Publication No. 7-92487 (6th page, Fig. 7)

ところが、上記の電圧検出装置には、以下のような解決すべき課題が存在している。すなわち、この電圧検出装置では、ハウジングに設けられた第1開口(ないし窓)を通して検出電極が測定表面に露呈されるようにプローブを測定表面に配置する必要がある。これは、第1開口を絶縁体で覆う構成とすると、絶縁体の表面にも理論的には測定表面の電圧の影響を受けて電荷が現れるが、絶縁体の表面に現れる電荷は容易に逃げて消失する。したがって、この電圧検出装置には、測定表面と検出電極との間に絶縁体が介在する場合には、測定表面の電圧を検出することができないという解決すべき課題が存在している。   However, the above voltage detection device has the following problems to be solved. That is, in this voltage detection apparatus, it is necessary to arrange the probe on the measurement surface so that the detection electrode is exposed to the measurement surface through the first opening (or window) provided in the housing. This is because when the first opening is covered with an insulator, charges appear theoretically on the surface of the insulator due to the voltage of the measurement surface, but the charges appearing on the surface of the insulator easily escape. Disappear. Therefore, this voltage detection device has a problem to be solved that the voltage on the measurement surface cannot be detected when an insulator is interposed between the measurement surface and the detection electrode.

本発明は、かかる課題を解決するためになされたものであり、検出対象と検出電極との間に絶縁体が存在する場合であっても、検出対象の電圧を非接触で検出し得る電圧検出装置を提供することを主目的とする。   The present invention has been made to solve such a problem, and even when an insulator is present between the detection target and the detection electrode, voltage detection that can detect the voltage of the detection target in a non-contact manner. The main purpose is to provide a device.

上記目的を達成すべく請求項1記載の電圧検出装置は、絶縁体で被覆された検出対象に生じている検出対象電圧を検出する電圧検出装置であって、前記絶縁体に直接的または他の絶縁体を介在させた状態で間接的に接触して配設された検出電極と、前記絶縁体を振動させる振動体と、前記絶縁体が振動させられている状態において、前記検出対象から前記検出電極を経由して基準電圧に流れると共に前記検出対象電圧と当該基準電圧との間の電位差に応じて振幅が変調された前記振動体の振動に同期する検出電流を検出電圧信号に変換する電流電圧変換回路と、前記電位差を示す検波出力を前記検出電圧信号から検出する検波回路とを備えている。   In order to achieve the above object, a voltage detection device according to claim 1 is a voltage detection device for detecting a detection target voltage generated in a detection target covered with an insulator, and the voltage detection device is directly or otherwise applied to the insulator. A detection electrode disposed in indirect contact with an insulator interposed; a vibrating body that vibrates the insulator; and the detection from the detection target in a state where the insulator is vibrated A current voltage that flows to a reference voltage via an electrode and converts a detection current synchronized with vibration of the vibrating body whose amplitude is modulated according to a potential difference between the detection target voltage and the reference voltage into a detection voltage signal A conversion circuit; and a detection circuit that detects a detection output indicating the potential difference from the detection voltage signal.

請求項2記載の電圧検出装置は、請求項1記載の電圧検出装置において、前記検波回路は、前記検出電圧信号に同期した同期信号で当該検出電圧信号を同期検波して前記検波出力を検出する。   The voltage detection apparatus according to claim 2 is the voltage detection apparatus according to claim 1, wherein the detection circuit detects the detection output by synchronously detecting the detection voltage signal with a synchronization signal synchronized with the detection voltage signal. .

請求項3記載の電圧検出装置は、請求項1または2記載の電圧検出装置において、前記電流電圧変換回路は、第1の入力端子が前記基準電圧に規定され、第2の入力端子が前記検出電極に接続され、かつ当該第2の入力端子と出力端子との間に帰還回路が接続されて、当該帰還回路に流れる前記検出電流を前記検出電圧信号に変換する演算増幅器を有している。   The voltage detection device according to claim 3 is the voltage detection device according to claim 1 or 2, wherein the current-voltage conversion circuit has a first input terminal defined by the reference voltage and a second input terminal detected by the detection. An operational amplifier is connected to the electrode and a feedback circuit is connected between the second input terminal and the output terminal, and the detection current flowing through the feedback circuit is converted into the detection voltage signal.

請求項4記載の電圧検出装置は、請求項1から3のいずれかに記載の電圧検出装置において、絶縁材料で形成されると共に、前記検出電極、前記振動体、前記電流電圧変換回路および前記検波回路が内部に配設されたケースを備え、前記検出電極は、前記ケースを構成する複数の壁部のうちの外面が前記絶縁体と接触させられる前記他の絶縁体としての壁部の内面に配設され、前記振動体は、前記複数の壁部のうちのいずれかの壁部の内面に固定されて前記ケースを振動させる。   A voltage detection device according to a fourth aspect is the voltage detection device according to any one of the first to third aspects, wherein the voltage detection device is formed of an insulating material, and the detection electrode, the vibrator, the current-voltage conversion circuit, and the detection A circuit is provided with a case disposed therein, and the detection electrode is provided on an inner surface of the wall as the other insulator in which an outer surface of the plurality of walls constituting the case is brought into contact with the insulator. The vibrating body is fixed to an inner surface of any one of the plurality of wall portions and vibrates the case.

請求項5記載の電圧検出装置は、請求項1から4のいずれかに記載の電圧検出装置において、前記検出電極、前記振動体、前記電流電圧変換回路および前記検波回路を覆うシールド部材を備えている。   The voltage detection device according to claim 5 is the voltage detection device according to any one of claims 1 to 4, further comprising a shield member that covers the detection electrode, the vibrator, the current-voltage conversion circuit, and the detection circuit. Yes.

請求項1記載の電圧検出装置によれば、検出電極を直接的または間接的に接触させた絶縁体を振動体で振動させることで、検出対象と検出電極との間に検出電流を発生させ、この検出電流に基づいて、検出対象の検査対象電圧を検出するため、検出対象と検出電極との間に絶縁体が存在する場合であっても、検査対象電圧を非接触で(検出電極を検出対象に直接接触させることなく)検出することができる。   According to the voltage detection device of claim 1, a detection current is generated between the detection target and the detection electrode by vibrating the insulator with the detection electrode in direct or indirect contact with the vibrating body, Since the inspection target voltage is detected based on the detected current, the inspection target voltage is detected in a non-contact manner (detection of the detection electrode) even when an insulator exists between the detection target and the detection electrode. (Without direct contact with the object).

請求項2記載の電圧検出装置によれば、検波回路が検出電圧信号を同期信号で同期検波して検波出力を出力することにより、外乱の影響が少ない状態で検波出力を検出することができる。   According to the voltage detection apparatus of the second aspect, the detection circuit can detect the detection output in a state where the influence of the disturbance is small by outputting the detection output by synchronously detecting the detection voltage signal with the synchronization signal.

請求項3記載の電圧検出装置によれば、電流電圧変換回路を、演算増幅器および帰還抵抗を有する構成としたことにより、検出電流を感度よく検出して検出電圧信号に変換することができる。   According to the voltage detection device of the third aspect, since the current-voltage conversion circuit includes the operational amplifier and the feedback resistor, the detection current can be detected with high sensitivity and converted into the detection voltage signal.

請求項4記載の電圧検出装置によれば、電圧検出装置を絶縁材料で形成されたケース内に収納(配設)して、検出電極および振動体を露出させない構成とすることにより、検出電極および振動体を個別に絶縁体に接触させる手間が省けることから、検査対象電圧の検出作業をより効率よく実施することができる。   According to the voltage detection device of claim 4, the voltage detection device is housed (arranged) in a case made of an insulating material so that the detection electrode and the vibrating body are not exposed. Since it is possible to save the trouble of individually contacting the vibrating body with the insulator, the operation of detecting the inspection target voltage can be performed more efficiently.

請求項5記載の電圧検出装置によれば、電圧検出装置1を構成する回路への外乱(外部磁界や外部電界など)の影響を低減することができるため、外乱の影響が一層少ない状態で検波出力を検出して出力することができる。   According to the voltage detection device of the fifth aspect, since the influence of disturbances (external magnetic field, external electric field, etc.) on the circuit constituting the voltage detection apparatus 1 can be reduced, detection can be performed in a state where the influence of the disturbance is even less. Output can be detected and output.

電圧検出装置1の構成図である。1 is a configuration diagram of a voltage detection device 1. FIG. 検出電極11と振動体13についての他の配置を説明するための説明図である。10 is an explanatory diagram for explaining another arrangement of the detection electrode 11 and the vibrating body 13. FIG. 検出電極11と振動体13についてのさらに他の配置を説明するための説明図である。11 is an explanatory diagram for explaining still another arrangement of the detection electrode 11 and the vibrating body 13. FIG. ケース21を備えた電圧検出装置1の構成を説明するための説明図である。4 is an explanatory diagram for explaining a configuration of a voltage detection device 1 including a case 21. FIG.

以下、電圧検出装置の実施の形態について、添付図面を参照して説明する。   Hereinafter, embodiments of a voltage detection device will be described with reference to the accompanying drawings.

最初に、電圧検出装置の構成について、図面を参照して説明する。   First, the configuration of the voltage detection device will be described with reference to the drawings.

図1に示す電圧検出装置としての電圧検出装置1は、非接触型の電圧検出装置であって、一例として、検出電極11、発振回路12、振動体13、電流電圧変換回路14、バッファアンプ15、検波回路16、位相調整回路17および出力回路18を備え、絶縁体51で被覆された検出対象52に生じている電圧(検出対象電圧)V1を非接触で検出可能に構成されている。   A voltage detection device 1 as a voltage detection device shown in FIG. 1 is a non-contact type voltage detection device. As an example, a detection electrode 11, an oscillation circuit 12, a vibrating body 13, a current-voltage conversion circuit 14, and a buffer amplifier 15 are used. The detection circuit 16, the phase adjustment circuit 17, and the output circuit 18 are provided so that the voltage (detection target voltage) V <b> 1 generated in the detection target 52 covered with the insulator 51 can be detected without contact.

この場合、検出対象52は、図1に示すように、その表面における一部の部位が絶縁体51で被覆されていてもよいし、図2,3,4に示すように、表面全域が絶縁体51で被覆されていてもよい(例えば、検出対象52は、外周面全域が絶縁被覆で覆われた被覆電線の芯線でもよい)。また、絶縁体51は、1種類の絶縁材料で構成された単層構造であってもよいし、それぞれ異なる種類の絶縁材料で構成された複数の層が積層されてなる多層構造であってもよい。   In this case, as shown in FIG. 1, the detection target 52 may be partially covered with an insulator 51 as shown in FIG. 1, or the entire surface may be insulated as shown in FIGS. It may be covered with the body 51 (for example, the detection target 52 may be a core wire of a covered electric wire whose entire outer peripheral surface is covered with an insulating coating). The insulator 51 may have a single layer structure made of one type of insulating material, or may have a multilayer structure in which a plurality of layers each made of different types of insulating materials are stacked. Good.

検出電極11は、検出対象52を被覆する絶縁体51の表面に直接的に接触、またはこの表面に接(密着)して配設された他の絶縁体(空気などの気体以外の絶縁体)を介在させた状態で間接的に接触させ得る形状に構成されている。この場合、検出電極11は、絶縁体51の表面に密着により近い状態で接触させるのが好ましい。このため、例えば、絶縁体51の表面が平面状のときには、これに対応して、絶縁体51の表面との接触面が平面状に形成された形状に構成され、絶縁体51の表面が円筒状のときには、これに対応して、絶縁体51の表面との接触面が凹面状に形成された形状に構成されている。   The detection electrode 11 is in direct contact with the surface of the insulator 51 that covers the detection object 52, or another insulator (insulator other than a gas such as air) disposed in contact (contact) with the surface. It is comprised in the shape which can be made to contact indirectly in the state which interposed. In this case, the detection electrode 11 is preferably brought into contact with the surface of the insulator 51 in a state of being closer to the close contact. For this reason, for example, when the surface of the insulator 51 is planar, correspondingly, the contact surface with the surface of the insulator 51 is formed in a planar shape, and the surface of the insulator 51 is cylindrical. In the case of a shape, the contact surface with the surface of the insulator 51 is correspondingly formed into a concave shape.

発振回路12は、例えば、十数kHz〜数MHz程度の一定の周波数(所定周波数)の駆動信号S1を生成して出力する。この場合、発振回路12は、この駆動信号S1を作動中において連続的に出力する構成を採用することもできるし、一定時間ずつ断続して周期的に出力する構成を採用することもできるし、測定時にのみ単発的に一定時間だけ出力する構成を採用することもできる。また、発振回路12は、例えば、矩形波信号、三角波信号および正弦波信号などのいずれかの信号を駆動信号S1として出力する。なお、発振回路12は、上記のように一定の周波数で駆動信号S1を生成して出力する構成に代えて、例えば、予め規定された下限周波数および上限周波数の範囲内で周波数が時間と共に変化するスイープ信号として駆動信号S1を生成して出力する構成や、周波数が時間と共にランダムに変化するランダム信号(ノイズ信号)として駆動信号S1を生成して出力する構成を採用することもできる。   The oscillation circuit 12 generates and outputs a drive signal S1 having a constant frequency (predetermined frequency) of, for example, about several tens of kHz to several MHz. In this case, the oscillation circuit 12 can employ a configuration that continuously outputs the drive signal S1 during operation, or can employ a configuration that outputs intermittently at regular intervals. It is also possible to adopt a configuration that outputs only for a certain period of time only at the time of measurement. In addition, the oscillation circuit 12 outputs, for example, one of a rectangular wave signal, a triangular wave signal, and a sine wave signal as the driving signal S1. Note that the oscillation circuit 12 is replaced with a configuration in which the drive signal S1 is generated and output at a constant frequency as described above, for example, the frequency changes with time within a predetermined lower limit frequency and upper limit frequency range. It is also possible to adopt a configuration in which the drive signal S1 is generated and output as a sweep signal, or a configuration in which the drive signal S1 is generated and output as a random signal (noise signal) whose frequency changes randomly with time.

振動体13は、発振回路12からの駆動信号S1で駆動されて、一例として、駆動信号S1の周波数と同じ振動周波数(本例では所定周波数)で振動して、接触させられた部材(本例では絶縁体)に機械的振動を伝達する。この振動体13は、例えば、超音波振動子、圧電振動子、セラミック振動子、電磁誘導型振動子、磁歪振動子または回転子を用いた振動子などで構成することができる。   The vibrating body 13 is driven by the drive signal S1 from the oscillation circuit 12, and, as an example, vibrates at the same vibration frequency (predetermined frequency in this example) as the frequency of the drive signal S1 (this example). Then, mechanical vibration is transmitted to the insulator). The vibrating body 13 can be configured by, for example, an ultrasonic vibrator, a piezoelectric vibrator, a ceramic vibrator, an electromagnetic induction vibrator, a magnetostrictive vibrator, or a vibrator using a rotor.

電流電圧変換回路14は、一例として、演算増幅器14aおよび帰還回路としての帰還抵抗14bを備えて構成されている。演算増幅器14aは、非反転入力端子(第1の入力端子)が基準電位(グランド)に接続されて基準電圧(ゼロボルト)に規定され、反転入力端子(第2の入力端子)が検出電極11に接続され、かつ反転入力端子と出力端子との間に帰還抵抗14bが接続されている。なお、本例では一例として、1個の帰還抵抗14bで帰還回路を構成しているが、複数の抵抗の直列回路または並列回路や、直列回路および並列回路を組み合わせた直並列回路で帰還回路を構成することもできる。   As an example, the current-voltage conversion circuit 14 includes an operational amplifier 14a and a feedback resistor 14b as a feedback circuit. In the operational amplifier 14a, a non-inverting input terminal (first input terminal) is connected to a reference potential (ground) to be regulated to a reference voltage (zero volts), and an inverting input terminal (second input terminal) is connected to the detection electrode 11. A feedback resistor 14b is connected between the inverting input terminal and the output terminal. In this example, the feedback circuit is configured by one feedback resistor 14b as an example. However, the feedback circuit is configured by a series circuit or a parallel circuit of a plurality of resistors, or a series-parallel circuit combining a series circuit and a parallel circuit. It can also be configured.

この電流電圧変換回路14は、後述するようにして、振動体13からの振動によって検出対象52と検出電極11との間に位置する絶縁体51の静電容量の容量値が変化しているときに、検出対象52の電圧V1と検出電極11の電圧(演算増幅器14aの各入力端子間がバーチャルショート状態のため、基準電圧)との電位差Vdi(本例では基準電圧はゼロボルトのため、電圧V1)に起因して、この電位差Vdiの大きさに応じた電流値(振幅)で検出対象52から検出電極11を経由して基準電位に流れる検出電流Iを検出電圧信号V2に変換して出力する。つまり、この電流電圧変換回路14では、検出対象52の電圧V1と、検出電極11の電圧(基準電圧)との間の電位差に応じて振幅が変調された振動体13の振動に同期する検出電流Iを検出電圧信号V2に変換する。   As will be described later, the current-voltage conversion circuit 14 is used when the capacitance value of the capacitance of the insulator 51 located between the detection object 52 and the detection electrode 11 is changed by vibration from the vibrating body 13. In addition, the potential difference Vdi between the voltage V1 of the detection object 52 and the voltage of the detection electrode 11 (the reference voltage is the reference voltage because each input terminal of the operational amplifier 14a is in a virtual short state). ), The detection current I flowing from the detection object 52 to the reference potential via the detection electrode 11 with a current value (amplitude) corresponding to the magnitude of the potential difference Vdi is converted into a detection voltage signal V2 and output. . That is, in the current-voltage conversion circuit 14, the detection current synchronized with the vibration of the vibrating body 13 whose amplitude is modulated according to the potential difference between the voltage V 1 of the detection target 52 and the voltage (reference voltage) of the detection electrode 11. I is converted into a detection voltage signal V2.

この場合、検出電流Iは、振動体13の振動周波数で絶縁体51の静電容量の容量値が変化することに起因して発生するため、振動周波数と同じ周波数の交流信号であって、その振幅が上記した電位差Vdi(本例では電圧V1)に応じたレベルに変調された交流信号として発生する。このため、検出電圧信号V2もまた、振動周波数と同じ周波数の交流信号であって、その振幅が電位差Vdi(本例では電圧V1)に応じたレベルに変調された交流信号として電流電圧変換回路14から出力される。   In this case, the detection current I is generated due to the change in the capacitance value of the capacitance of the insulator 51 at the vibration frequency of the vibrating body 13, and therefore is an AC signal having the same frequency as the vibration frequency. The amplitude is generated as an AC signal modulated to a level corresponding to the potential difference Vdi (voltage V1 in this example). Therefore, the detection voltage signal V2 is also an AC signal having the same frequency as the vibration frequency, and the current-voltage conversion circuit 14 is an AC signal whose amplitude is modulated to a level corresponding to the potential difference Vdi (voltage V1 in this example). Is output from.

なお、電流電圧変換回路14は、一例として上記したように、演算増幅器14aおよび帰還抵抗14bを有する構成として、一般的にその振幅が極めて小さな(微弱な)検出電流Iを感度よく検出して検出電圧信号V2に変換し得るようにしているが、これに限定されるものではない。例えば、より簡易な構成で電流電圧変換回路14を実現することが望まれる場合には、上記の構成に代えて、図示はしないが、検出電極11に一端が接続されると共に他端が基準電位(グランド)に接続された抵抗を有する構成を採用することもできる。この構成の電流電圧変換回路14では、この抵抗が、検出対象52から検出電極11を経由して基準電位(基準電圧)に流れる検出電流Iを検出電圧信号V2に変換する。そして、この抵抗の一端において変換された検出電圧信号V2が、後述するバッファアンプ15に出力される。   Note that, as described above, the current-voltage conversion circuit 14 has an operational amplifier 14a and a feedback resistor 14b as described above, and generally detects and detects a detection current I having a very small amplitude (weak) with high sensitivity. Although it can be converted into the voltage signal V2, it is not limited to this. For example, when it is desired to realize the current-voltage conversion circuit 14 with a simpler configuration, instead of the above configuration, although not shown, one end is connected to the detection electrode 11 and the other end is a reference potential. A configuration having a resistor connected to (ground) can also be adopted. In the current-voltage conversion circuit 14 having this configuration, the resistor converts the detection current I flowing from the detection target 52 to the reference potential (reference voltage) via the detection electrode 11 into the detection voltage signal V2. Then, the detection voltage signal V2 converted at one end of the resistor is output to a buffer amplifier 15 described later.

バッファアンプ15は、高入力インピーダンス、かつ低出力インピーダンスのアンプで構成されて、電流電圧変換回路14から出力される検出電圧信号V2を入力して低インピーダンスで出力する。検波回路16は、一例として同期検波回路で構成されて、バッファアンプ15から入力した検出電圧信号V2を、位相調整回路17から入力した同期信号S2で同期検波することにより、検出電圧信号V2の振幅成分(直流成分)を検出(抽出)して、検波出力(電圧信号)V3として出力する。この検波回路16は、乗算器、アナログスイッチで構成された切替スイッチ(マルチプレクサ)、および相関器のいずれかで構成されている。なお、検波回路16は、包絡線検波回路で構成することもでき、この構成を採用したときには、同期信号S2が不要となるため、位相調整回路17を省略することができる。   The buffer amplifier 15 is composed of an amplifier having a high input impedance and a low output impedance, and receives the detection voltage signal V2 output from the current-voltage conversion circuit 14 and outputs it with a low impedance. The detection circuit 16 is configured as a synchronous detection circuit as an example, and detects the amplitude of the detection voltage signal V2 by synchronously detecting the detection voltage signal V2 input from the buffer amplifier 15 with the synchronization signal S2 input from the phase adjustment circuit 17. A component (DC component) is detected (extracted) and output as a detection output (voltage signal) V3. The detection circuit 16 is composed of any one of a multiplier, a changeover switch (multiplexer) composed of analog switches, and a correlator. Note that the detection circuit 16 can also be configured by an envelope detection circuit. When this configuration is adopted, the synchronization signal S2 is not necessary, and therefore the phase adjustment circuit 17 can be omitted.

位相調整回路17は、発振回路12からの駆動信号S1を入力すると共に遅延させて同期信号S2として出力する。位相調整回路17は、この駆動信号S1に対する同期信号S2の遅延量を調整することが可能に構成されている。また、この遅延量は、検波回路16に入力される交流信号としての検出電圧信号V2の位相と、同期信号S2の位相とが一致するように予め調整されている。   The phase adjustment circuit 17 receives the drive signal S1 from the oscillation circuit 12 and outputs it as a synchronization signal S2 with a delay. The phase adjustment circuit 17 is configured to be able to adjust the delay amount of the synchronization signal S2 with respect to the drive signal S1. The delay amount is adjusted in advance so that the phase of the detection voltage signal V2 as an AC signal input to the detection circuit 16 matches the phase of the synchronization signal S2.

出力回路18は、例えば、検波出力V3の電圧値を検出して表示する電圧計や、検波出力V3を入力して低インピーダンスで出力するバッファ回路や、検波出力V3をA/D変換してその電圧値を示す電圧データを出力するA/D変換器などで構成されている。   The output circuit 18 includes, for example, a voltmeter that detects and displays the voltage value of the detection output V3, a buffer circuit that inputs the detection output V3 and outputs it at a low impedance, and A / D converts the detection output V3 to convert it An A / D converter that outputs voltage data indicating a voltage value is used.

次いで、電圧検出装置1による検出対象52の電圧V1についての検出動作について説明する。なお、電圧V1は、直流電圧であってもよいし、交流電圧であってもよい。本例では一例として、電圧V1は直流電圧であるものとする。   Next, the detection operation for the voltage V1 of the detection target 52 by the voltage detection device 1 will be described. The voltage V1 may be a DC voltage or an AC voltage. In this example, as an example, the voltage V1 is a DC voltage.

まず、図1に示すように、検出対象52を被覆する絶縁体51の表面に検出電極11および振動体13を接触(密着)させる。この際には、同図に示すように、絶縁体51における検出対象52との接触面に対する背面側の表面に、検出電極11および振動体13の双方を離間させて接触させてもよいし、図2に示すように、絶縁体51の表面に接触させた検出電極11に振動体13を接触(密着)させてもよい。なお、図2に示すように、検出電極11に振動体13を接触させる構成を採用したときには、振動体13において発生する電気信号の検出電極11への影響を軽減するため、同図に示すように、検出電極11と振動体13との間にシールドシート(例えば、電界や磁界をシールドするシート)53を介在させる構成が好ましい。また、これらの部材間(絶縁体51と検出電極11との間、絶縁体51と振動体13との間、検出電極11(またはシールドシート53)と振動体13との間)の密着性を向上させるため、部材間に他の絶縁体(例えば、絶縁シートやジェル状の絶縁体)を介在させてもよい。   First, as shown in FIG. 1, the detection electrode 11 and the vibrating body 13 are brought into contact (contacted) with the surface of the insulator 51 that covers the detection target 52. In this case, as shown in the figure, both the detection electrode 11 and the vibrating body 13 may be brought into contact with the surface on the back side with respect to the contact surface with the detection target 52 in the insulator 51, As shown in FIG. 2, the vibrator 13 may be brought into contact (contact) with the detection electrode 11 brought into contact with the surface of the insulator 51. As shown in FIG. 2, when the configuration in which the vibrating body 13 is brought into contact with the detection electrode 11 is adopted, as shown in FIG. 2, in order to reduce the influence of the electrical signal generated in the vibrating body 13 on the detection electrode 11. Further, a configuration in which a shield sheet (for example, a sheet for shielding an electric field or a magnetic field) 53 is interposed between the detection electrode 11 and the vibrating body 13 is preferable. Further, the adhesion between these members (between the insulator 51 and the detection electrode 11, between the insulator 51 and the vibration body 13, and between the detection electrode 11 (or the shield sheet 53) and the vibration body 13) is improved. In order to improve, another insulator (for example, an insulating sheet or a gel-like insulator) may be interposed between the members.

また、図3に示すように、検出対象52の外周が全域に亘って絶縁体51に覆われている構成のときには、絶縁体51における検出電極11を接触させた表面の背面側に振動体13を接触させるようにすることもできる。   As shown in FIG. 3, when the outer periphery of the detection target 52 is covered with the insulator 51 over the entire area, the vibrating body 13 is placed on the back side of the surface of the insulator 51 that is in contact with the detection electrode 11. Can be brought into contact with each other.

この状態において、発振回路12から駆動信号S1が出力されると、振動体13は、この駆動信号S1で駆動されて振動する。また、位相調整回路17は、この駆動信号S1を入力すると共に遅延させることにより、同期信号S2を出力する。   In this state, when the drive signal S1 is output from the oscillation circuit 12, the vibrator 13 is driven by the drive signal S1 and vibrates. In addition, the phase adjustment circuit 17 outputs the synchronization signal S2 by inputting and delaying the drive signal S1.

この振動体13の振動(機械的振動)は振動体13と接触している絶縁体51に伝わるため、絶縁体51も、振動体13の振動周波数と同じ周波数で振動する。この場合、検出対象52と検出電極11との間の距離または密度(絶縁体51の密度)が振動体13の振動周波数と同じ周波数で変化するため、検出対象52と検出電極11との間に位置する絶縁体51の静電容量の容量値もこの振動周波数と同じ周波数で変化する。また、この静電容量の容量値が変化するのに伴い、振幅が電位差Vdi(電圧V1)に応じたレベルに変調され、かつ振動周波数と同じ周波数の交流信号である検出電流Iが、検出対象52、検出電極11および電流電圧変換回路14の帰還抵抗14bを含む経路に流れる。   Since the vibration (mechanical vibration) of the vibration body 13 is transmitted to the insulator 51 in contact with the vibration body 13, the insulator 51 also vibrates at the same frequency as the vibration frequency of the vibration body 13. In this case, the distance or density between the detection object 52 and the detection electrode 11 (density of the insulator 51) changes at the same frequency as the vibration frequency of the vibration body 13, and therefore, between the detection object 52 and the detection electrode 11. The capacitance value of the capacitance of the insulator 51 located also changes at the same frequency as this vibration frequency. In addition, as the capacitance value of the capacitance changes, the detection current I, which is an AC signal having the same frequency as the vibration frequency and whose amplitude is modulated to a level corresponding to the potential difference Vdi (voltage V1), is detected. 52, the current flows through a path including the detection electrode 11 and the feedback resistor 14b of the current-voltage conversion circuit 14.

電流電圧変換回路14は、この検出電流Iを検出電圧信号V2に変換して出力し、バッファアンプ15が、電流電圧変換回路14から出力されるこの検出電圧信号V2を入力して低インピーダンスで出力する。検波回路16は、バッファアンプ15から出力されるこの検出電圧信号V2を、位相調整回路17から出力される同期信号S2で同期検波することにより、検出電圧信号V2の振幅成分(直流成分)を外乱の影響が少ない状態で検出して検波出力(電圧信号)V3として出力回路18に出力する。この場合、検波出力V3として検出された検出電圧信号V2の振幅成分(直流成分)は、上記した電位差Vdi(本例では電圧V1)に応じて、そのレベルが変化する。   The current-voltage conversion circuit 14 converts this detection current I into a detection voltage signal V2 and outputs it, and the buffer amplifier 15 inputs this detection voltage signal V2 output from the current-voltage conversion circuit 14 and outputs it with a low impedance. To do. The detection circuit 16 disturbs the amplitude component (DC component) of the detection voltage signal V2 by synchronously detecting the detection voltage signal V2 output from the buffer amplifier 15 with the synchronization signal S2 output from the phase adjustment circuit 17. And output to the output circuit 18 as a detection output (voltage signal) V3. In this case, the level of the amplitude component (DC component) of the detected voltage signal V2 detected as the detection output V3 changes according to the potential difference Vdi (the voltage V1 in this example).

出力回路18は、この検波出力(電圧信号)V3を入力して、例えば、アナログ電圧計で構成されているときには、検波出力V3の電圧値(電位差Vdi(電圧V1)と比例する電圧値)に基づいて、電位差Vdi(電圧V1)の電圧値を示す数値まで指針を移動させることで、電位差Vdi(電圧V1)の電圧値を目視し得る状態で出力する。また、出力回路18は、例えば、バッファ回路で構成されているときには、検波出力V3を入力して低インピーダンスで外部に出力する(外部の計測器などに対して、検波出力V3に基づいて、電位差Vdi(電圧V1)の電圧値を検出できるように出力する)。また、出力回路18は、例えば、A/D変換器で構成されているときには、検波出力V3を入力してその電圧値を示す電圧データ(電位差Vdi(電圧V1)の電圧値を示す電圧データでもある)を、内部に設けられた処理部(不図示)や外部の処理装置に出力する。   The output circuit 18 inputs this detection output (voltage signal) V3 and, for example, when it is constituted by an analog voltmeter, the voltage value of the detection output V3 (voltage value proportional to the potential difference Vdi (voltage V1)). Based on this, by moving the pointer to a numerical value indicating the voltage value of the potential difference Vdi (voltage V1), the voltage value of the potential difference Vdi (voltage V1) is output in a state where it can be visually observed. For example, when the output circuit 18 is configured by a buffer circuit, the detection output V3 is input and output to the outside with a low impedance (for an external measuring instrument or the like based on the detection output V3, the potential difference Vdi (voltage V1) is output so that the voltage value can be detected). For example, when the output circuit 18 is composed of an A / D converter, the detection output V3 is inputted and voltage data indicating the voltage value (voltage data indicating the voltage value of the potential difference Vdi (voltage V1) is also used. Is output to a processing unit (not shown) provided inside or an external processing device.

このように、この電圧検出装置1では、検出電極11を接触させた絶縁体51を振動体13で振動させることで、検出電流Iを発生させ、この検出電流Iに基づいて、検出対象52の電圧V1を検出する。したがって、この電圧検出装置1によれば、検出対象52と検出電極11との間に絶縁体51が存在する場合であっても、検出対象52の電圧V1を非接触で(検出電極11を検出対象52に直接接触させることなく)検出することができる。   As described above, in the voltage detection device 1, the insulator 51 that is in contact with the detection electrode 11 is vibrated by the vibrating body 13 to generate the detection current I. Based on the detection current I, the detection object 52 is detected. The voltage V1 is detected. Therefore, according to this voltage detection device 1, even when the insulator 51 exists between the detection target 52 and the detection electrode 11, the voltage V1 of the detection target 52 is detected without contact (the detection electrode 11 is detected). (Without direct contact with the object 52).

また、この電圧検出装置1によれば、検波回路16が検出電圧信号V2を同期信号S2で同期検波して検波出力V3を出力することにより、外乱の影響が少ない状態で検波出力V3を検出して出力することができる。   Further, according to the voltage detection device 1, the detection circuit 16 detects the detection output V3 in a state where the influence of the disturbance is small by synchronously detecting the detection voltage signal V2 with the synchronization signal S2 and outputting the detection output V3. Can be output.

また、この電圧検出装置1によれば、電流電圧変換回路14を、演算増幅器14aおよび帰還抵抗14bを有する構成としたことにより、検出電流Iを感度よく検出して検出電圧信号V2に変換することができる。   Further, according to the voltage detection device 1, the current-voltage conversion circuit 14 includes the operational amplifier 14a and the feedback resistor 14b, thereby detecting the detection current I with high sensitivity and converting it to the detection voltage signal V2. Can do.

なお、上記の例では、検出対象52を被覆している絶縁体51に検出電極11を直接接触させる構成を採用しているが、上記したように、絶縁体51は多層構造でもよいことに着目して、図4に示すように、電圧検出装置1を絶縁材料で形成されたケース21内に収納(配設)して、検出電極11および振動体13を露出させない構成を採用することもできる。この構成では、同図に示すように、ケース21を構成する複数の壁部のうちの外面が絶縁体51と接触させられる他の絶縁体としての壁部21aの内面に検出電極11を配設する。なお、振動体13については、その振動をケース21を介して絶縁体51に伝えることができる限り、ケース21を構成するいずれの壁部に配設してもよいが、検出電極11と共に共通の壁部21aに配置することで、その振動を最も効率的に絶縁体51に伝えることが可能となる。また、この図4では、検出電極11および振動体13以外の構成要素については図示を省略している。   In the above example, the configuration in which the detection electrode 11 is brought into direct contact with the insulator 51 covering the detection target 52 is employed. However, as described above, the insulator 51 may have a multilayer structure. Then, as shown in FIG. 4, it is possible to adopt a configuration in which the voltage detection device 1 is housed (arranged) in a case 21 made of an insulating material so that the detection electrode 11 and the vibrating body 13 are not exposed. . In this configuration, as shown in the figure, the detection electrode 11 is arranged on the inner surface of the wall portion 21a as another insulator whose outer surface is brought into contact with the insulator 51 among the plurality of wall portions constituting the case 21. To do. As long as the vibration body 13 can transmit the vibration to the insulator 51 through the case 21, the vibration body 13 may be disposed on any wall portion constituting the case 21. By arranging it on the wall 21a, the vibration can be transmitted to the insulator 51 most efficiently. In FIG. 4, the components other than the detection electrode 11 and the vibrating body 13 are not shown.

このように、電圧検出装置1を絶縁材料で形成されたケース21内に収納(配設)して、検出電極11および振動体13を露出させない構成とすることにより、検出電極11および振動体13を個別に絶縁体51に接触させる手間が省けることから、電圧V1の検出作業をより効率よく実施することができる。   As described above, the voltage detection device 1 is housed (arranged) in the case 21 formed of an insulating material so that the detection electrode 11 and the vibrating body 13 are not exposed, whereby the detection electrode 11 and the vibrating body 13 are configured. Therefore, the operation of detecting the voltage V1 can be performed more efficiently.

また、上記したように、電圧検出装置1を絶縁材料で形成されたケース21内に収納する構成を採用したときには、図4に示すように、ケース21にシールド部材(例えば、ケース21の内面へのシールド部材54や、ケース21の外面へのシールド部材55)を配設する構成を採用することもできる。この場合、検出電極11と検出対象52との間にシールド部材が介在しないようにする。また、図4において、ケース21における検出電極11と振動体13とが配置される壁部(絶縁体51に接触させられる上壁)のみを絶縁材料として、シールド部材54やシールド部材55が配置される壁部(側壁および下壁)をシールド材で構成して、この壁部自体をシールド部材とする構成を採用することもできる。また、このシールド部材は、電圧検出装置1を構成する上記の各回路(検出電極11、発振回路12、振動体13、電流電圧変換回路14、バッファアンプ15、検波回路16、位相調整回路17および出力回路18)の基準電位(図1に示される演算増幅器14aの非反転入力端子が接続された基準電位)に電気的に接続される。   Further, as described above, when the configuration in which the voltage detection device 1 is housed in the case 21 made of an insulating material is adopted, as shown in FIG. 4, the case 21 has a shield member (for example, the inner surface of the case 21). It is also possible to adopt a configuration in which the shield member 54 and the shield member 55) on the outer surface of the case 21 are disposed. In this case, a shield member is not interposed between the detection electrode 11 and the detection target 52. In FIG. 4, the shield member 54 and the shield member 55 are disposed using only the wall portion (the upper wall that is in contact with the insulator 51) in the case 21 where the detection electrode 11 and the vibrating body 13 are disposed as an insulating material. It is also possible to adopt a configuration in which the wall portions (side walls and lower wall) are made of a shielding material and the wall portions themselves are used as shielding members. The shield member includes the above-described circuits constituting the voltage detection device 1 (detection electrode 11, oscillation circuit 12, vibration body 13, current-voltage conversion circuit 14, buffer amplifier 15, detection circuit 16, phase adjustment circuit 17, and The output circuit 18) is electrically connected to the reference potential (reference potential to which the non-inverting input terminal of the operational amplifier 14a shown in FIG. 1 is connected).

この構成によれば、このシールド部材によって電圧検出装置1が覆われるため、電圧検出装置1を構成する上記の各回路(検出電極11、発振回路12、振動体13、電流電圧変換回路14、バッファアンプ15、検波回路16、位相調整回路17および出力回路18)への外乱(外部磁界や外部電界など)の影響を低減することができるため、外乱の影響が一層少ない状態で検波出力V3を検出して出力することが可能になる。   According to this configuration, since the voltage detection device 1 is covered by this shield member, each of the above-described circuits (the detection electrode 11, the oscillation circuit 12, the vibration body 13, the current-voltage conversion circuit 14, the buffer) that constitutes the voltage detection device 1. Since it is possible to reduce the influence of disturbance (external magnetic field, external electric field, etc.) on the amplifier 15, the detection circuit 16, the phase adjustment circuit 17 and the output circuit 18), the detection output V3 is detected with less influence of the disturbance. Can be output.

1 電圧検出装置
11 検出電極
13 振動体
14 電流電圧変換回路
14a 演算増幅器
14b 帰還抵抗
16 検波回路
21 ケース
51 絶縁体
52 検出対象
54,55 シールド部材
I 検出電流
V1 電圧(検出対象電圧)
V2 検出電圧信号
V3 検波出力
Vdi 電位差
DESCRIPTION OF SYMBOLS 1 Voltage detection apparatus 11 Detection electrode 13 Vibrating body 14 Current-voltage conversion circuit 14a Operational amplifier 14b Feedback resistance 16 Detection circuit 21 Case 51 Insulator 52 Detection object 54,55 Shield member
I Detection current V1 Voltage (Detection target voltage)
V2 detection voltage signal V3 detection output Vdi potential difference

Claims (5)

絶縁体で被覆された検出対象に生じている検出対象電圧を検出する電圧検出装置であって、
前記絶縁体に直接的または他の絶縁体を介在させた状態で間接的に接触して配設された検出電極と、
前記絶縁体を振動させる振動体と、
前記絶縁体が振動させられている状態において、前記検出対象から前記検出電極を経由して基準電圧に流れると共に前記検出対象電圧と当該基準電圧との間の電位差に応じて振幅が変調された前記振動体の振動に同期する検出電流を検出電圧信号に変換する電流電圧変換回路と、
前記電位差を示す検波出力を前記検出電圧信号から検出する検波回路とを備えている電圧検出装置。
A voltage detection device for detecting a detection target voltage generated in a detection target covered with an insulator,
A detection electrode disposed in direct contact with the insulator directly or in a state of interposing another insulator;
A vibrator for vibrating the insulator;
In a state where the insulator is vibrated, the amplitude is modulated in accordance with a potential difference between the detection target voltage and the reference voltage while flowing from the detection target to the reference voltage via the detection electrode. A current-voltage conversion circuit that converts a detection current synchronized with the vibration of the vibrating body into a detection voltage signal;
A voltage detection apparatus comprising: a detection circuit that detects a detection output indicating the potential difference from the detection voltage signal.
前記検波回路は、前記検出電圧信号に同期した同期信号で当該検出電圧信号を同期検波して前記検波出力を検出する請求項1記載の電圧検出装置。   The voltage detection device according to claim 1, wherein the detection circuit detects the detection output by synchronously detecting the detection voltage signal with a synchronization signal synchronized with the detection voltage signal. 前記電流電圧変換回路は、第1の入力端子が前記基準電圧に規定され、第2の入力端子が前記検出電極に接続され、かつ当該第2の入力端子と出力端子との間に帰還回路が接続されて、当該帰還回路に流れる前記検出電流を前記検出電圧信号に変換する演算増幅器を有している請求項1または2記載の電圧検出装置。   In the current-voltage conversion circuit, a first input terminal is defined by the reference voltage, a second input terminal is connected to the detection electrode, and a feedback circuit is provided between the second input terminal and the output terminal. The voltage detection apparatus according to claim 1, further comprising an operational amplifier connected to convert the detection current flowing through the feedback circuit into the detection voltage signal. 絶縁材料で形成されると共に、前記検出電極、前記振動体、前記電流電圧変換回路および前記検波回路が内部に配設されたケースを備え、
前記検出電極は、前記ケースを構成する複数の壁部のうちの外面が前記絶縁体と接触させられる前記他の絶縁体としての壁部の内面に配設され、
前記振動体は、前記複数の壁部のうちのいずれかの壁部の内面に固定されて前記ケースを振動させる請求項1から3のいずれかに記載の電圧検出装置。
A case in which the detection electrode, the vibrating body, the current-voltage conversion circuit, and the detection circuit are formed inside is formed of an insulating material,
The detection electrode is disposed on the inner surface of the wall portion as the other insulator, the outer surface of the plurality of wall portions constituting the case being brought into contact with the insulator,
4. The voltage detection device according to claim 1, wherein the vibrating body is fixed to an inner surface of any one of the plurality of wall portions and vibrates the case. 5.
前記検出電極、前記振動体、前記電流電圧変換回路および前記検波回路を覆うシールド部材を備えている請求項1から4のいずれかに記載の電圧検出装置。   5. The voltage detection device according to claim 1, further comprising a shield member that covers the detection electrode, the vibrating body, the current-voltage conversion circuit, and the detection circuit.
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