JP2016073164A5 - - Google Patents

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Publication number
JP2016073164A5
JP2016073164A5 JP2014203613A JP2014203613A JP2016073164A5 JP 2016073164 A5 JP2016073164 A5 JP 2016073164A5 JP 2014203613 A JP2014203613 A JP 2014203613A JP 2014203613 A JP2014203613 A JP 2014203613A JP 2016073164 A5 JP2016073164 A5 JP 2016073164A5
Authority
JP
Japan
Prior art keywords
linear motor
magnetic
pole teeth
magnetic pole
connects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2014203613A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016073164A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2014203613A priority Critical patent/JP2016073164A/ja
Priority claimed from JP2014203613A external-priority patent/JP2016073164A/ja
Priority to PCT/JP2015/064670 priority patent/WO2016051855A1/ja
Publication of JP2016073164A publication Critical patent/JP2016073164A/ja
Publication of JP2016073164A5 publication Critical patent/JP2016073164A5/ja
Pending legal-status Critical Current

Links

JP2014203613A 2014-10-02 2014-10-02 リニアモータ Pending JP2016073164A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2014203613A JP2016073164A (ja) 2014-10-02 2014-10-02 リニアモータ
PCT/JP2015/064670 WO2016051855A1 (ja) 2014-10-02 2015-05-22 リニアモータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014203613A JP2016073164A (ja) 2014-10-02 2014-10-02 リニアモータ

Publications (2)

Publication Number Publication Date
JP2016073164A JP2016073164A (ja) 2016-05-09
JP2016073164A5 true JP2016073164A5 (enExample) 2017-09-07

Family

ID=55629911

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014203613A Pending JP2016073164A (ja) 2014-10-02 2014-10-02 リニアモータ

Country Status (2)

Country Link
JP (1) JP2016073164A (enExample)
WO (1) WO2016051855A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7538691B2 (ja) 2020-10-29 2024-08-22 キヤノン株式会社 搬送装置、真空装置、加工システム及び物品の製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61247264A (ja) * 1985-04-23 1986-11-04 Yaskawa Electric Mfg Co Ltd リニアモ−タ
JP4537745B2 (ja) * 2004-03-30 2010-09-08 株式会社日立製作所 リニアモータ
JP5477126B2 (ja) * 2010-04-07 2014-04-23 日立金属株式会社 リニアモータ
WO2014064785A1 (ja) * 2012-10-24 2014-05-01 株式会社日立製作所 リニアモータ及びリニアモータ駆動システム

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