JP2016073164A5 - - Google Patents
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- Publication number
- JP2016073164A5 JP2016073164A5 JP2014203613A JP2014203613A JP2016073164A5 JP 2016073164 A5 JP2016073164 A5 JP 2016073164A5 JP 2014203613 A JP2014203613 A JP 2014203613A JP 2014203613 A JP2014203613 A JP 2014203613A JP 2016073164 A5 JP2016073164 A5 JP 2016073164A5
- Authority
- JP
- Japan
- Prior art keywords
- linear motor
- magnetic
- pole teeth
- magnetic pole
- connects
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000004907 flux Effects 0.000 claims 1
Claims (1)
- 請求項４に記載のリニアモータにおいて、
前記支持部品は、前記第一の磁極歯及び前記第二の磁極歯をつなぎ磁束の経路を形成する前記磁性体の内側に配置されていることを特徴とするリニアモータ。
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014203613A JP2016073164A (ja) | 2014-10-02 | 2014-10-02 | リニアモータ |
| PCT/JP2015/064670 WO2016051855A1 (ja) | 2014-10-02 | 2015-05-22 | リニアモータ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014203613A JP2016073164A (ja) | 2014-10-02 | 2014-10-02 | リニアモータ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2016073164A JP2016073164A (ja) | 2016-05-09 |
| JP2016073164A5 true JP2016073164A5 (ja) | 2017-09-07 |
Family
ID=55629911
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014203613A Pending JP2016073164A (ja) | 2014-10-02 | 2014-10-02 | リニアモータ |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2016073164A (ja) |
| WO (1) | WO2016051855A1 (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7538691B2 (ja) | 2020-10-29 | 2024-08-22 | キヤノン株式会社 | 搬送装置、真空装置、加工システム及び物品の製造方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61247264A (ja) * | 1985-04-23 | 1986-11-04 | Yaskawa Electric Mfg Co Ltd | リニアモ−タ |
| JP4537745B2 (ja) * | 2004-03-30 | 2010-09-08 | 株式会社日立製作所 | リニアモータ |
| JP5477126B2 (ja) * | 2010-04-07 | 2014-04-23 | 日立金属株式会社 | リニアモータ |
| WO2014064785A1 (ja) * | 2012-10-24 | 2014-05-01 | 株式会社日立製作所 | リニアモータ及びリニアモータ駆動システム |
-
2014
- 2014-10-02 JP JP2014203613A patent/JP2016073164A/ja active Pending
-
2015
- 2015-05-22 WO PCT/JP2015/064670 patent/WO2016051855A1/ja active Application Filing
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