JP2016060663A - Glass substrate with antistatic film and method for producing glass substrate with antistatic film - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a glass substrate with an antistatic film in which an antistatic film can be formed on a glass substrate using a simple apparatus by a simple operation and a resulting antistatic film has a relatively stable and adequate antistatic function, and a method for producing the glass substrate with the antistatic film having those characteristics.SOLUTION: There is provided a glass substrate with an antistatic film comprising: a glass substrate; and an antistatic film formed on the surface of the glass substrate in which the antistatic film comprises a zwitter ionic compound having a cationic group and an anionic group in a molecule or a cation polymer which has a plurality of cationic groups but substantially no anionic group in a molecule having an average molecular weight of 200 to 1,000,000.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a glass substrate with an antistatic film and a method for producing a glass substrate with an antistatic film.

  Glass generally has a property of being easily charged with static electricity, that is, easily charged due to friction or peeling of laminated materials. Such charging of glass often becomes a problem when a glass substrate is processed into a product.

  For example, glass substrates used for electronic parts such as flat panel displays (FPD) and TFT (Thin Film Transistor) circuits and precision instruments are manufactured, and then laminated with sandwich sheets sandwiched between the substrates, and processed into products. To be transported to the factory. When this glass substrate is made into a product, the slip sheet is removed and conveyed to the production line for processing.

  In such a process, the glass substrate is charged, and there are problems such as sticking of interleaf paper, adhesion of dust, disconnection at the time of manufacturing the TFT circuit, and short circuit.

  So far, as an attempt to prevent the charging of the glass surface, a conductive coat made of conductive fine particles and a binder component is formed (see, for example, Patent Document 1), and a silane coupling agent having a hydrophilic group introduced at the terminal is used. Processing such as forming a surface coat (see, for example, Patent Document 2) is performed.

  However, each of these treatments is a non-aqueous treatment using an organic solvent or an organic binder, and further a treatment that forms a strong bond by heat treatment at a predetermined temperature. Therefore, after water washing generally performed in the manufacturing process of the glass substrate, it is necessary to provide another line for processing, which is an economic burden. Furthermore, once the surface has been coated by such treatment, it was very difficult to remove.

JP 2011-187286 A JP 05-168920 A

  In the present invention, it is possible to form an antistatic film on a glass substrate by a simple operation with a simple apparatus, and the obtained antistatic film is relatively stable and has a sufficient antistatic function. It is an object of the present invention to provide a glass substrate with an antistatic film and a method for producing a glass substrate with an antistatic film having such characteristics.

  The glass substrate with an antistatic film of the present invention is a glass substrate, a zwitterionic compound having a cationic group and an anionic group in one molecule formed on the surface of the glass substrate, or a molecule having an average molecular weight of 2 to 1,000,000. And an antistatic film made of a cationic polymer having a plurality of cationic groups and having substantially no anionic group.

  Moreover, the manufacturing method of the glass substrate with an antistatic film of the present invention includes a zwitterionic compound having a cationic group and an anionic group in one molecule or a molecule having an average molecular weight of 2 to 1,000,000 on the surface of the glass substrate. A solution containing a cationic polymer having a plurality of cationic groups and having substantially no anionic group is contacted to obtain a coating film, and the coating film is dried to comprise the zwitterionic compound or the cationic polymer. It has the process of forming an antistatic film.

According to the present invention, an antistatic film can be formed on a glass substrate by a simple operation with a simple apparatus, and the obtained antistatic film has a relatively stable and sufficient antistatic function. A glass substrate with an antistatic film can be provided.
Further, according to the production method of the present invention, a glass substrate with an antistatic film having a relatively stable and sufficient antistatic function can be produced by a simple operation with a simple apparatus.

It is sectional drawing which shows schematic structure of an example of the glass substrate with an antistatic film of embodiment of this invention. It is the figure which showed the charging voltage in the peeling charging test of the glass substrate with an antistatic film of an Example and a comparative example, or a glass substrate.

  Embodiments of the present invention will be described below with reference to the drawings. In addition, this invention is not limited to the following embodiment.

[Glass substrate with antistatic film]
FIG. 1 is a cross-sectional view illustrating a schematic configuration of an example of a glass substrate with an antistatic film according to an embodiment of the present invention. A glass substrate 1 with an antistatic film shown in FIG. 1 includes a glass substrate 2 and an antistatic film 3 formed on the surface thereof.

  The glass substrate 2 used here is not particularly limited as long as it is a glass substrate with glass exposed on its surface. In particular, glass substrates used in connection with the manufacture of semiconductor products that require the surface of the glass substrate to be kept uncharged, such as glass substrates for TFT circuit substrates, optical multilayer film substrates, etc. Preferably applied.

  The glass substrate used in the present embodiment is appropriately selected in material, shape and the like according to its use. Examples of the material for the glass substrate include ordinary soda lime glass, aluminosilicate glass, borosilicate glass, alkali-free borosilicate glass, and quartz glass. As the glass substrate, a glass substrate made of glass or tempered glass that absorbs ultraviolet rays or infrared rays can be used.

  The shape of the glass substrate may be a flat plate, or the entire surface or a part thereof may have a curvature. The thickness of a glass substrate can be suitably selected according to the use of the glass substrate with an antistatic film obtained. Generally, it is preferable that it is 0.3-3.0 mm. The glass substrate may be a laminated glass in which a plurality of glass plates are bonded with an intermediate film interposed therebetween.

  In the glass substrate 1 with an antistatic film shown in FIG. 1, the antistatic film 3 is formed in the entire region of one main surface of the glass substrate 1. In the glass substrate with an antistatic film of this embodiment, the antistatic film may be disposed in the entire region of one or both main surfaces of the glass substrate. If necessary, an antistatic film may be formed so as to cover the entire surface of the glass substrate including the end face.

  The antistatic film 3 used in the present embodiment is a film having a single layer structure provided on the surface of the glass substrate 2. Here, the antistatic film 3 includes a zwitterionic compound having a cationic group and an anionic group in one molecule (hereinafter also referred to as zwitterionic compound (A)) or a plurality of molecules in a molecule having an average molecular weight of 2 to 1,000,000. It is a film | membrane comprised from the cationic polymer (henceforth a cationic polymer (B)) which has a cationic group and has substantially no anionic group.

  A silanol group (—Si—OH) that is easily charged to a negative charge is present on the surface of the glass substrate. When the zwitterionic compound (A) or the cationic polymer (B) is brought into contact with the glass substrate, the silanol group of the glass substrate and the cationic group possessed by the zwitterionic compound (A) or the cationic polymer (B) are bonded. At this time, in the zwitterionic compound (A), the anionic groups are aligned toward the atmosphere opposite to the surface of the glass substrate to form an antistatic film as a monomolecular film. In the cationic polymer (B), an antistatic film is formed by aligning cationic groups that are not used for bonding with silanol groups toward the atmosphere opposite to the surface of the glass substrate.

  In the antistatic film 3 shown in FIG. 1, when the antistatic film 3 is made of the zwitterionic compound (A), a cationic group bonded to the silanol group is present on the interface 3a which is a surface in contact with the glass substrate 2. An anionic group is present on the surface 3b of the antistatic film 3, which is the opposite surface. When the antistatic film 3 is made of a cationic polymer (B), the surface 3b of the antistatic film 3 on the opposite side of the cationic group bonded to the silanol group is present at the interface 3a with the glass substrate 2. There is also a cationic group.

  Since the antistatic film 3 has the above-described structure, the surface 3b can strongly adsorb moisture in the air, and has a property of easily releasing static electricity by the action of the adsorbed water. Thereby, in the glass substrate with an antistatic film of the present invention, even if the glass substrate is charged, it is quickly attenuated, and the static electricity amount on the surface can be kept low.

(Zwitterionic compound (A))
The zwitterionic compound (A) constituting the antistatic film is not particularly limited as long as it is a compound having a cationic group and an anionic group in one molecule. Moreover, the zwitterionic compound (A) constituting the antistatic film may be one type or two or more types.

  The cationic group is a group that becomes a cation when dissolved in a solvent such as water, and examples thereof include an amino group and a quaternary ammonium group. At this time, the amino group is a monovalent functional group obtained by removing hydrogen from ammonia, primary amine, or secondary amine, and forms a primary amine, secondary amine, or tertiary amine, respectively. The quaternary ammonium group forms a quaternary ammonium cation. Among these, a primary amine and a quaternary ammonium group are preferable from the viewpoint of ionization degree and antistatic performance, and a quaternary ammonium group is particularly preferable.

An anionic group is a group that becomes an anion when dissolved in a solvent such as water, and examples thereof include a carboxy group (—COOH) and a sulfo group (—SO ₃ H). As described above, in the antistatic film made of the zwitterionic compound (A), an anionic group is located on the surface thereof, and water is adsorbed on the anionic group to obtain antistatic performance. Therefore, as the anionic group, a group having a high ability to adsorb water, that is, a large degree of ionization (pKa is small) is preferable. Of the exemplified anionic groups, a sulfo group (—SO ₃ H) is preferable.

  The number of cationic groups and anionic groups possessed by the zwitterionic compound (A) is preferably 1 or 2, and is preferably 3 or less in total. More preferably, the zwitterionic compound (A) has one cationic group and one anionic group in each molecule.

  Furthermore, the zwitterionic compound (A) is preferably a compound having a linear molecular structure and having a cationic group and an anionic group at both ends of the molecular chain, respectively. When the zwitterionic compound (A) has such a molecular structure, the antistatic film formed by the compound can be a monomolecular film in which molecules are regularly and densely aligned in the same direction. Thereby, a film having high antistatic performance can be obtained.

  The molecular weight of the zwitterionic compound (A) is not particularly limited. The molecular weight is preferably in the range of about 70 to 200 from the viewpoints of good solubility in a solvent during formation of the antistatic film and easy alignment of molecules in the same direction. In addition, by setting the molecular weight within the above range, when the antistatic film is removed from the glass substrate with the antistatic film and used, it can be easily removed as necessary. Specific examples of the removal method include a method of immersing and washing in an acidic solution having a pH of 4 or less, and scrub cleaning with a detergent.

  Specific examples of the zwitterionic compound (A) include alanine, arginine, asparagine, aspartic acid, glutamine, glutamic acid, glycine, lysine, creatine, carnitine, betaine (trimethylglycine), taurine, and β-alanine. The structural formulas of these zwitterionic compounds (A) are shown in Table 1.

  Among these compounds, carnitine, betaine, taurine are straight-chain compounds each having one cationic group and one anionic group, and each having a cationic group and an anionic group at both ends of the molecular chain. , Β-alanine and the like are preferable compounds.

  When the antistatic film is composed of the zwitterionic compound (A), the film thickness is a monomolecular film, and in the case of a linear compound having a cationic group and an anionic group at both ends, The molecular length is approximately equal to the film thickness. Specifically, the film thickness of the antistatic film made of the zwitterionic compound (A) is approximately 0.6 to 1.0 nm.

(Cationic polymer (B))
The cationic polymer (B) constituting the antistatic film is a cationic polymer having a plurality of cationic groups in a molecule having an average molecular weight of 2 to 1,000,000 and having substantially no anionic group. In the present specification, the average molecular weight means a weight average molecular weight (MW) in terms of polystyrene by gel permeation chromatography unless otherwise specified.

  Specific examples of the cationic group in the cationic polymer (B) include an amino group and a quaternary ammonium group. The cationic polymer (B) has substantially no anionic group. The cationic polymer (B) does not substantially have an anionic group, for example, an anionic group is excluded except for an amount in which an anionic group contained in a raw material compound, a polymerization initiator or the like remains slightly. It means not containing.

  For example, in the antistatic film 3 shown in FIG. 1, the cationic group (B) has a cationic group bonded to the silanol group at the interface 3a with the glass substrate 2 on the opposite side. It is sufficient that the surface 3b of a certain antistatic film 3 can have a structure in which a cationic group is present. The number of cationic groups contained in the cationic polymer (B) is usually represented by the average number of cationic groups per 1000 molecular weight.

  Hereinafter, the average number of cationic groups that the cationic polymer (B) has per 1000 molecular weight is referred to as “cationic group density”, and the unit is represented by [eq / MW1000]. Specifically, the cationic group density in the cationic polymer (B) is preferably 3 to 25 [eq / MW1000].

  The cationic polymer (B) may be a network polymer (B1) having a three-dimensional network structure or a chain polymer (B2). The chain polymer (B2) may have a side chain. The preferable average molecular weight and the number of cationic groups of the cationic polymer (B) largely depend on the molecular structure of the cationic polymer (B). Hereinafter, the cationic polymer (B) will be described according to the classification of the network polymer (B1) and the chain polymer (B2).

  When the cationic polymer (B) is the network polymer (B1), the cationic group is usually present on the surface and inside of the network polymer (B1). Here, for example, in the antistatic film 3 shown in FIG. 1, the network polymer (B1) has any cationic groups present on the interface 3a with the glass substrate 2 and the surface 3b on the opposite side thereof on the surface. It is considered a cationic group. Therefore, when the network polymer (B1) is used, the density of the cationic group is relatively large. Specifically, the network polymer (B1) of 10 to 25 [eq / MW1000] is preferable, and 15 to 25 [eq / MW1000] is more preferable. In addition, when cationic polymer (B) is network polymer (B1), the network polymer (B1) which comprises an antistatic film | membrane may be the 1 type (s) or 2 or more types.

  Moreover, 200-100,000 are preferable and, as for the average molecular weight of network polymer (B1), 300-10,000 are more preferable. In the network polymer (B1), when the cationic group density is the same, the smaller the average molecular weight, the larger the specific surface area per molecule, and the cationic groups present on the surface with respect to the number of cationic groups present inside. The average molecular weight is preferably within the above range because the ratio of the number of the above becomes high. That is, in the network polymer (B1), when the cationic group density is the same, it can be said that the obtained antistatic film is superior in antistatic performance when the average molecular weight is smaller. In the network polymer (B1), when the average molecular weight is 50,000 or less, the antistatic film can be removed easily from the glass substrate with the antistatic film if necessary. Yes. The specific method of removal can be the same as in the case of the zwitterionic compound (A).

  In the network polymer (B1), when the average molecular weight is in the above range, if necessary, the antistatic film can be removed easily from the glass substrate with the antistatic film. . The specific method of removal can be the same as in the case of the zwitterionic compound (A).

  Specific examples of the network polymer (B1) include polyethyleneimine containing a 1,2, tertiary amine. A commercially available product may be used as the polyethyleneimine. As commercial products, for example, Epomin SP-003 (average molecular weight; about 300, cationic group density; 23.2 [eq / MW1000]), Epomin SP-006 (average) as trade names manufactured by Nippon Shokubai Co., Ltd. Molecular weight: about 600, cationic group density: 23.2 [eq / MW1000]) and the like.

  When the antistatic film is composed of the network polymer (B1), the film thickness is considered to be approximately equal to the molecular diameter. Specifically, the film thickness of the antistatic film made of the network polymer (B1) is approximately 0.5 to 2.5 nm.

  When the cationic polymer (B) is a chain polymer (B2), the cationic group may be present in the main chain or in the side chain. In any case, in the chain polymer (B2), a part of the cationic group is present at the interface 3a of the antistatic film 3 with the glass substrate 2, and another part of the cationic group is formed on the antistatic film 3. The main chain is folded so as to be present on the surface 3b to constitute the antistatic film 3.

  In the chain polymer (B2), when the side chain has a cationic group, the position of the cationic group has a higher degree of freedom than the case where the main chain has a cationic group, and the surface 3b of the antistatic film 3 Some cationic groups may be hidden inside. Since it is difficult to control the position of the cationic group in the side chain, the chain polymer (B2) preferably has a cationic group in the main chain. The chain polymer (B2) having a cationic group in the main chain may have a side chain having no cationic group. When the cationic polymer (B) is a chain polymer (B2), the chain polymer (B2) constituting the antistatic film may be one type or two or more types. Furthermore, you may comprise an antistatic film | membrane by combining 1 or more types of chain polymer (B2), and 1 or more types of network polymer (B1).

  When the chain polymer (B2) is used, the average molecular weight is preferably 1,000 to 1,000,000, and more preferably 10,000 to 100,000. Moreover, when using a chain polymer (B2), 3-25 [eq / MW1000] is preferable and, as for cationic group density, 5-20 [eq / MW1000] is more preferable. In the chain polymer (B2), as in the case of the network polymer (B1), the antistatic film is removed from the glass substrate with the antistatic film as necessary by setting the average molecular weight to 50,000 or less. When used, it can be easily removed. The specific method of removal can be the same as in the case of the zwitterionic compound (A).

  Specifically, the chain polymer (B2) having a cationic group in the main chain as the chain polymer (B2) includes, for example, polydiallyldimethylammonium chloride, polydiallylamine, dimethylamine-epichlorohydrin condensate salt, dimethylamine -Ammonia-epichlorohydrin condensate salt, dicyandiamide-formalin condensate salt, dicyandiamide-diethylenetriamine condensate salt and the like.

  Specific examples of the chain polymer (B2) having a cationic group in the side chain include poly (dimethylaminoethyl acrylate methyl chloride quaternary salt), poly (dimethylaminoethyl methacrylate methyl chloride quaternary salt), trimethylammonium. Examples include alkyl acrylamide polymer salts, polyallylamine, and polyvinylamidine.

  Commercial products may be used as these chain polymers (B2). Examples of commercially available products include PDAC (trade name: FPA100L, manufactured by Senka Co., Ltd., polydiallyldimethylammonium chloride, average molecular weight: 20,000, cationic group density: 6.2 [eq / MW1000]), DE (trade name: KHE104L, SENKA, dimethylamine-epichlorohydrin condensate salt, average molecular weight: 100,000, cationic group density: 7.3 [eq / MW1000]), DNE (trade name KHE100L, SENKA, dimethylamine-ammonia-epichlorohydrin condensation) Body salt, average molecular weight: 100,000, cationic group density: 8.1 [eq / MW1000]), PQEM ((trade name FPV1000L, manufactured by Senka Co., Ltd., poly (dimethylaminoethyl methacrylate methyl chloride quaternary salt)), average molecular weight Unknown, cationic group density; 3.7 [eq / W1000]), and the like.

  When the antistatic film is composed of the chain polymer (B2), part of the cationic group is present at the interface with the glass substrate as described above, and another part of the cationic group is present on the surface of the antistatic film. Since the main chain of the molecule is folded so as to form an antistatic film, the film thickness can be adjusted as appropriate by the molecular design such as the molecular chain length and the cationic group density.

  Such a glass substrate with an antistatic film according to an embodiment of the present invention can be formed by a simple operation with a simple apparatus for forming an antistatic film on a glass substrate, for example, as in the production method of the present invention described below. Is possible. Moreover, in the glass substrate with an antistatic film of the embodiment of the present invention, the antistatic film is relatively stable and has a sufficient antistatic function. In addition, such a design change can be easily performed in an application in which removal of the antistatic film is required as required.

[Method for producing glass substrate with antistatic film]
The manufacturing method of the glass substrate with an antistatic film of the present invention will be described below.
In the embodiment of the present invention, the method for producing a glass substrate with an antistatic film comprises a zwitterionic compound having a cationic group and an anionic group in one molecule (zwitterionic compound (A)) or average molecular weight on the surface of the glass substrate. Is obtained by contacting a solution containing a cationic polymer (cationic polymer (B)) having a plurality of cationic groups in the molecule of 2 to 1,000,000 and having substantially no anionic group. A step of drying the film to form an antistatic film made of the zwitterionic compound or the cationic polymer.

  In the above production method, the solution of the zwitterionic compound (A) or the cationic polymer (B) is prepared using the zwitterionic compound (A) or the cationic polymer (B) as a solute and a solvent capable of dissolving them. The solvent is not particularly limited as long as it dissolves the zwitterionic compound (A) or the cationic polymer (B) and does not react with these and the glass substrate. Specific examples of the solvent include one or more water-soluble organic solvents such as water, ethanol, and isopropyl alcohol. Among these, water or a mixture of water-soluble organic solvent such as ethanol and water is preferable.

  The content of the zwitterionic compound (A) in the above solution is preferably adjusted to be in the range of 0.01 mmol / L to 100 mmol / L as the molar concentration in 1 L of the solution. The content of the zwitterionic compound (A) is more preferably 0.1 to 10 mmol / L in order to prevent the glass substrate surface from being excessively covered while being appropriately covered.

  The content of the cationic polymer (B) in the solution is preferably adjusted to be in the range of 0.01 meq / L to 100 meq / L as the concentration (equivalent) of the cationic group. The concentration (equivalent) of the cationic group in the cationic polymer (B) is more preferably 0.1 meq / L to 10 meq / L in order to prevent the glass substrate from being excessively covered while being appropriately covered. When 1 mol of the cationic group is contained in 1 L of the solution, the concentration is 1 equivalent and expressed as 1 eq / L.

  About pH of the said solution, it can adjust suitably in the range of acidity-alkalinity, for example, pH about 3-12. A solution in which the amount of zwitterionic compound (A) or cationic polymer (B) can be increased while the electrostatic bonding force is further strengthened by promoting the ionization of silanol groups on the surface of the glass substrate and making it negatively charged. 6-12 are preferable and 10-11 are more preferable.

  The pH of the solution is adjusted using acid or alkali. Ammonia, sulfuric acid, and the like are preferable from the viewpoints that the equipment is not easily corroded and that the residue after washing is small.

  Next, the solution prepared as described above is applied in contact with the surface of the glass substrate on which the antistatic film is to be formed. Examples of the coating method include coating methods used in known film forming methods such as dip coating, spray coating, spin coating, squeegee coating, and sponge coating.

  In the coating operation, only by bringing the prepared solution into contact with the surface of the glass substrate, one of the cationic group of the zwitterionic compound (A) or the cationic group of the cationic polymer (B) contained in the solution. Part is aligned on the surface side of the glass substrate toward the atmosphere where the anionic group of the zwitterionic compound (A) or the cationic group not facing the glass substrate side of the cationic polymer is on the opposite side, It becomes a coating film containing. This is because the silanol group (—Si—OH) present on the surface of the glass substrate is easily charged to a negative charge, and therefore, the cationic group or the cationic polymer of the zwitterionic compound (A) that is positively charged only by contact. This is because a part of the cationic group (B) is electrostatically attracted to the surface side of the glass substrate.

  The coating film obtained by the coating operation is a layer of the solution containing a solvent. After the coating operation, with the zwitterionic compound (A) or the cationic polymer (B) aligned on the surface of the glass substrate as described above, the solvent in the coating film is removed by drying to obtain a uniform charge. A prevention film can be easily formed.

  As a drying method, a drying method such as heating or air blow, which is usually used for solvent removal, can be applied without any particular limitation. When performing heat drying, it is preferable to heat to 50-80 degreeC, and it is preferable to blow 15-30 degreeC air by an air blow.

  In addition, it is preferable to add the operation which wash | cleans a coating film between formation of the coating film on the glass substrate using the said solution, and drying. As a method of washing with water, a method of washing the glass substrate with water, such as immersing in a water bath or washing with a shower, is usually applicable without particular limitation. Excess chemicals are removed by washing with water, and the antistatic film obtained after drying becomes transparent, so that there is no abnormality in the defect inspection machine.

  In general, in the production of a glass substrate, the operation of washing with water and drying as necessary is often repeated several times as the final step. In the production of such a glass substrate, application of the solution of the zwitterionic compound (A) or the cationic polymer (B) is performed once in the washing and optional drying steps, preferably once except for the final washing step. By replacing with drying, it is possible to produce a glass substrate with an antistatic film. According to this method, it is possible to produce a glass substrate with an antistatic film using a normal production line, which is very advantageous economically. In addition, in the glass substrate with an antistatic film of the present invention, it is not removed by washing with water.

  As described above, according to the manufacturing method of the present invention, the application and drying of the solution when forming the antistatic film on the surface of the glass substrate can be achieved by a simple operation with a simple apparatus, and further, it conflicts with the drainage regulations. This can be done without increasing the environmental load.

  As mentioned above, although embodiment of the manufacturing method of the glass substrate with an antistatic film and the glass substrate with an antistatic film of the present invention was described, the present invention is not limited to these. As long as it does not contradict the spirit of the present invention, the configuration can be changed as necessary.

Hereinafter, the present invention will be described in more detail based on examples and comparative examples.
[Preparation of various solutions]
<Solutions 1 to 3 for forming an antistatic film>
Each component was dissolved in pure water so that the concentration of taurine, which is the zwitterionic compound (A), was 1 mmol / L and ammonia was 10 mmol / L to prepare Solution 1 for forming an antistatic film. The pH of this solution 1 is about 10.5.
Similarly, solutions 2 and 3 for forming an antistatic film were prepared in the same manner as described above except that both taurine in solution 1 were changed to betaine and carnitine, which are zwitterionic compounds (A), respectively. The pH of solution 2 and solution 3 is about 10.5.

<Solution 4 for forming antistatic film>
Polyethyleneimine (Epomin SP-003 manufactured by Nippon Shokubai Co., Ltd. (average molecular weight: about 300, cationic group density: 23.2 [eq / MW1000]) as a cationic polymer (B), hereinafter referred to as “PEI-300 Is dissolved in pure water to a concentration of 1 meq / L to prepare a solution for forming an antistatic film. The pH of this solution is about 10.5.

<Solution 5 for forming antistatic film>
Polyethyleneimine (PEI; Nippon Shokubai Epomin SP-006 (average molecular weight of about 600), cationic group density: 23.2 [eq / MW1000], hereinafter referred to as “PEI” as the cationic polymer (B) -600 ") was dissolved in pure water so as to have a concentration of 1 meq / L to prepare a solution 5 for forming an antistatic film. The pH of this solution is about 10.5.

<Solution 6 for forming antistatic film>
Dimethylamine-epichlorohydrin condensate salt (DE; trade name KHE104L, manufactured by Senka Co., Ltd., average molecular weight: 100,000, cationic group density: 7.3 [eq / MW1000] as the cationic polymer (B), which is a chain polymer (B2) ]) Were dissolved in pure water so that the concentration of 1 meq / L and ammonia was 10 mmol / L to prepare a solution 6 for forming an adhesion preventing film. The pH of this solution 6 is about 10.5.

<Solution 7 for forming antistatic film>
Polydiallyldimethylammonium chloride which is a chain polymer (B2) as the cationic polymer (B) (PDAC or PDADMAC; trade name FPA100L, manufactured by Senka Co., Ltd., average molecular weight 20,000, cationic group density: 6.2 [eq / MW1000] ) Was dissolved in pure water so that the concentration of 1 meq / L and ammonia was 10 mmol / L to prepare a solution 7 for forming an antistatic film. The pH of this solution 7 is about 10.5.

<Solution 8 for forming antistatic film>
2. Poly (dimethylaminoethyl methacrylate methyl chloride quaternary salt) which is a chain polymer (B2) as the cationic polymer (B) (PQEM; trade name FPV1000L, manufactured by Senka Co., Ltd., average molecular weight; unknown, cationic group density; Each component was dissolved in pure water so that the concentration of 7 [eq / MW1000]) was 1 meq / L and ammonia was 10 mmol / L to prepare 8 solutions for forming an antistatic film. The pH of this solution 8 is about 10.5.

<Solution 9 for forming antistatic film>
Dimethylamine-ammonia-epichlorohydrin condensate salt (DNE; trade name KHE100L, manufactured by Senka Co., Ltd., average molecular weight; 100,000 or less, cationic group density; 8.1 [], which is a chain polymer (B2) as the cationic polymer (B) Each component was dissolved in pure water so that the concentration of eq / MW1000]) was 1 meq / L and ammonia was 10 mmol / L to prepare 9 solutions for forming an antistatic film. The pH of this solution 9 is about 10.5.

Example 1
100 mL of the antistatic film-forming solution 1 obtained above was applied to the entire area of one main surface of a glass substrate made of non-alkali borosilicate glass having a surface of 470 mm × 370 mm × 0.7 mm in thickness. It was applied with a sponge to form a coating film. After the coating, the glass substrate with a coating film left for 20 to 30 seconds is washed with water, and then the coating film is dried by blowing off water droplets with an air blow (room temperature), on one main surface of the glass substrate. An antistatic film was formed to obtain a glass substrate 1 with an antistatic film.

(Examples 2-9)
The antistatic film was formed on one main surface of the glass substrate in the same manner as described above except that the antistatic film forming solutions 2 to 9 obtained above were used instead of the antistatic film forming solution 1. Glass substrates 2 to 9 with antistatic films having the following characteristics were produced.

(Comparative Example 1)
The surface-polished glass substrate made of alkali-free borosilicate glass having a size of 470 mm × 370 mm × thickness 0.7 mm was washed with pure water. This glass substrate has a surface after polishing, and is not provided with an antistatic film or the like.

[Peeling electrification test]
For the glass substrates 1 to 9 with the antistatic film obtained in the above examples and the glass substrate without the antistatic film of Comparative Example 1, a peeling electrification test was performed as follows to evaluate the antistatic performance.

(Test method)
16 vacuum suction holes evenly arranged in the stage capable of aspirating the specimen placed on the stage, and 9 equally arranged in the stage capable of lifting the specimen horizontally from the stage Charge level equipped with a stage (1050 mm × 850 mm) made of aluminum alumite having a lift pin (PEEK material) and a surface potential meter capable of measuring the surface potential of the surface of the specimen placed on the stage opposite to the stage The test was performed using a measurement tester. The test environment was 22 ° C. and 49 RH%.

First, the glass substrate with the antistatic film is placed on the stage of the charge amount measuring test machine so that the antistatic film of the glass substrate with the antistatic film is in contact.
Next, an adsorption / release operation is performed in which a glass substrate with an antistatic film is sucked from a vacuum suction hole at an adsorption pressure of 32 to 44 kPa (about 0.3 to 0.4 atm) for 5 seconds and then released for 3 seconds. This is performed for 110 cycles.

  Immediately after the end of the 110th cycle, the glass substrate with the antistatic film is lifted up to a position of 5 cm from the stage at a pin lifting speed of 83 mm / second by lift pins. When lifting the glass substrate with the antistatic film, the surface potential change on the surface opposite to the stage of the glass substrate with the antistatic film, that is, the surface where the glass is exposed, is contactlessly measured with a surface potentiometer over time. To measure. During the surface potential measurement, the distance between the measurement surface and the surface electrometer is maintained at 3 cm.

  The absolute value of the peak charging voltage [V] in the change in the surface potential measured was used for evaluation. In this case, it can be evaluated that the glass substrate with the antistatic film, which has a small value regardless of whether the charging voltage [V] is positive or negative, is excellent in antistatic performance.

  The results are shown in Table 2 together with the characteristics of the compounds constituting the antistatic film. In the compound classification, (A) is the zwitterionic compound (A), (B1) is the network polymer (B1) of the cationic polymer (B), and (B2) is the chain polymer of the cationic polymer (B). (B2) is shown respectively. The results are also shown in FIG.

  From this result, it can be seen that any of the glass substrates with antistatic films obtained in Examples has an antistatic function. Of the examples, antistatic by an antistatic film formed of the zwitterionic compound (A) of Examples 1 to 3 and the cationic polymer (B2) having a high functional group density network of Examples 4 and 5 It turns out that an effect is high.

  The method for producing a glass substrate with an antistatic film and a glass substrate with an antistatic film according to the present invention can be widely applied to a glass substrate, and can effectively prevent the surface of the glass substrate from being charged. In particular, the surface of the glass substrate is charged. It is preferably applied to glass substrates used in connection with the manufacture of semiconductor products that are required to be kept in a non-existing state, for example, glass substrates for TFT circuit substrates, optical multilayer film substrates, and the like.

  DESCRIPTION OF SYMBOLS 1 ... Glass substrate with antistatic film, 2 ... Glass substrate, 3 ... Antistatic film, 3a ... Interface of antistatic film with glass substrate, 3b ... Surface of antistatic film

Claims (10)

  A glass substrate and a zwitterionic compound having a cationic group and an anionic group in one molecule formed on the surface of the glass substrate or having a plurality of cationic groups in a molecule having an average molecular weight of 2 to 1,000,000 And an antistatic film made of a cationic polymer having no anionic group.   The glass substrate with an antistatic film according to claim 1, wherein the zwitterionic compound has a linear molecular structure and has a cationic group and an anionic group at both ends of the molecular chain, respectively.   The glass substrate with an antistatic film according to claim 1, wherein the zwitterionic compound is at least one selected from carnitine, betaine, taurine, and β-alanine.   The glass substrate with an antistatic film according to claim 1, wherein the cationic polymer has 3 to 25 cationic groups per 1000 molecular weight.   The glass substrate with an antistatic film according to claim 1 or 4, wherein the cationic group is an amino group or a quaternary ammonium group.   The glass substrate with an antistatic film according to claim 1, wherein the cationic polymer is a chain polymer having the cationic group in the main chain and having an average molecular weight of 1,000 to 1,000,000.   The glass substrate with an antistatic film according to claim 1, wherein the cationic polymer is a network polymer having an average molecular weight of 200 to 100,000.   On the surface of the glass substrate, a zwitterionic compound having a cationic group and an anionic group in one molecule or a plurality of cationic groups in a molecule having an average molecular weight of 2 to 1,000,000 and having an anionic group substantially. An antistatic film comprising a step of contacting a solution containing a non-cationic polymer to obtain a coating film, and drying the coating film to form an antistatic film comprising the zwitterionic compound or the cationic polymer. Manufacturing method of glass substrate with film.   The method for producing a glass substrate with an antistatic film according to claim 8, wherein the solution used for forming the antistatic film is an aqueous solution having a pH of 6 to 12.   The method for producing a glass substrate with an antistatic film according to claim 8 or 9, wherein the coating film obtained by the contact is washed with water before drying.

Images