JP2016057549A - Display device and manufacturing method therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a display device configured to facilitate correction of faulty positioning of shutter bodies.SOLUTION: A display device includes; a substrate having openings 9-1, 9-2 provided for each of a plurality of pixels; a shutter body 2 provided for each of the plurality of pixels and supported to be movable relative to the substrate; and drive beams 61, 62 provided for each shutter body and configured to drive the shutter body 2 when signal voltage is applied. Each shutter body 2 has a shutter opening 4 and stepped sections 3 provided facing ends of the shutter opening 4. The stepped sections 3 include protruded portions 3a protruding toward the shutter opening 4.Viewing from a direction perpendicular to the substrate, the protruded portions 3a are positioned to overlap with the openings 9-1, 9-2 of the substrate when the signal voltage is not applied to the drive beams 61, 62.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a display device using a mechanical shutter and a manufacturing method thereof.

  In recent years, a MEMS display (Micro Electro Mechanical System Display) has been proposed as a display device using a mechanical shutter. For example, Patent Document 1 below discloses a transmissive MEMS display. In this MEMS display, a plurality of shutter mechanisms made of MEMS are arranged in a matrix corresponding to the pixels on the TFT substrate. The light shielding film laminated on the TFT substrate side of the counter substrate is provided with a plurality of openings arranged in a matrix corresponding to the pixels. By moving the shutter portion of the shutter mechanism, the opening portion is opened and closed, and light is transmitted or blocked from the backlight unit to the display surface.

JP 2014-142394 A

  As described above, in the MEMS display, the shutter portion is supported in a movable state with respect to the opening of the substrate. Therefore, it is necessary to keep the shutter part floating without contacting the TFT substrate or the counter substrate. However, in the manufacturing process, the shutter unit may come into contact with the substrate so that it cannot move. In such a case, in the structure of the conventional MEMS display, it is difficult to apply a force to the shutter portion and separate it from the substrate. Therefore, the present application discloses a display device having a configuration that can easily correct a defective position of the shutter, and a method for manufacturing the same.

  A display device according to an embodiment of the present invention includes a plurality of pixels, a substrate having a plurality of openings provided corresponding to each of the plurality of pixels, and provided corresponding to each of the plurality of pixels. A shutter supported in a movable state with respect to the substrate; and a driving beam provided corresponding to each of the shutters and driving the corresponding shutter when a signal voltage is applied thereto. The shutter includes an opening and a step portion provided to face an end portion of the opening. The step portion includes a protruding portion protruding in the moving direction of the shutter body. The protrusion is provided at a position overlapping the opening of the substrate when viewed from a direction perpendicular to the substrate in a state where no signal voltage is applied to the drive beam.

  According to the present disclosure, it is possible to realize a display device having a configuration that can easily correct a defective position of the shutter.

FIG. 1 is a perspective view illustrating a configuration example of a display device according to the present embodiment. FIG. 2 is an equivalent circuit diagram of the display device 10. FIG. 3 is a cross-sectional view illustrating a configuration example in one pixel of the display device 10. FIG. 4 is a perspective view illustrating a detailed configuration example of the shutter mechanism in one pixel. FIG. 5 is a plan view of the shutter mechanism shown in FIG. FIG. 6 is a diagram illustrating an example of driving the shutter. FIG. 7 is a diagram illustrating an example of driving the shutter. FIG. 8 is an equivalent circuit diagram illustrating a circuit configuration example in one pixel. FIG. 9 is an equivalent circuit diagram illustrating another example of a circuit configuration in one pixel. 10A is a diagram showing a positional relationship between the shutter body 2 and the openings 9-1 and 9-2 in the cross section taken along the line AA in FIG. FIG. 10B is a diagram showing a positional relationship between the shutter body 2 and the openings 9-1 and 9-2 in the cross section taken along the line BB in FIG. FIG. 10C is a diagram illustrating an example of a state where the shutter body cannot be driven by contacting the substrate. FIG. 11 is a diagram for explaining the position of the protruding portion 3a. FIG. 12 is a perspective view illustrating a configuration example of a one-pixel shutter mechanism in the present embodiment. FIG. 13 is a plan view of the shutter mechanism shown in FIG. 14A is a diagram for explaining an example of a manufacturing process of the shutter mechanism shown in FIG. 14B is a diagram for explaining an example of a manufacturing process of the shutter mechanism shown in FIG. FIG. 14C is a diagram for explaining an example of the manufacturing process of the shutter mechanism shown in FIG. 13. FIG. 14D is a diagram for describing an example of a manufacturing process of the shutter mechanism illustrated in FIG. 13. FIG. 14E is a view for explaining an example of a manufacturing process of the shutter mechanism shown in FIG. FIG. 14F is a diagram for describing an example of a manufacturing process of the shutter mechanism illustrated in FIG. 13. FIG. 15A is a diagram illustrating a modification of the protruding portion. FIG. 15B is a diagram illustrating a modification of the protruding portion. FIG. 15C is a diagram illustrating a modification of the protruding portion. FIG. 15D is a diagram illustrating a modification of the protruding portion.

  A display device according to an embodiment of the present invention includes a plurality of pixels, a substrate having an opening provided corresponding to each of the plurality of pixels, and provided to each of the plurality of pixels. A shutter body that is supported in a movable state, and a drive beam that is provided corresponding to each of the shutter bodies and that drives the corresponding shutter body when a signal voltage is applied thereto. The shutter body includes an opening and a step portion provided to face an end portion of the opening. The step portion includes a protruding portion protruding in the moving direction of the shutter body. The protrusion is provided at a position overlapping the opening of the substrate when viewed from a direction perpendicular to the substrate in a state where no signal voltage is applied to the drive beam.

  The display device is electrically connected to the shutter body and elastically deformed to make the shutter body movable, and the display device is electrically connected to the shutter body and elastically deformed. A second shutter beam that enables the shutter body to move; a first shutter beam anchor that is electrically connected to the first shutter beam and supports the first shutter beam; and the second shutter. A second shutter beam anchor electrically connected to the beam and supporting the second shutter beam. The drive beam is provided opposite to the first shutter beam, and is opposed to the first drive beam for driving the shutter body by applying a signal voltage and the second shutter beam. And a second drive beam that drives the shutter body by applying a signal voltage. Further, the display device is electrically connected to the first drive beam, electrically connected to the first drive beam anchor that supports the first drive beam, and the second drive beam, and And a second drive beam anchor supporting the second drive beam.

  In the above configuration, the protruding portion of the stepped portion is disposed so as to overlap the opening of the substrate in a direction perpendicular to the substrate in a state where no signal voltage is applied to the drive beam. Thereby, it becomes easy to irradiate light to the protrusion part of the level | step-difference part of a shutter body through an opening part. Here, it has been found that a force can be applied to the shutter body by irradiating the stepped portion of the shutter body with light such as laser light. Therefore, it becomes easy to correct the position defect of the shutter body.

  The step portion may include a plurality of the protruding portions that are formed to extend along an end portion of the opposed opening and are arranged in a direction in which the step portion extends. Thereby, it becomes easy to irradiate a laser beam etc. in several positions in the direction where the level | step-difference part of a shutter body is extended. As a result, it becomes even easier to correct the defective position of the shutter body.

  In the stepped portion, at least one of the protrusions may be provided on both sides of a center line in a direction perpendicular to the driving direction of the shutter body. This makes it easier to correct the defective position of the shutter body. For example, when a defect occurs in which either one of both end portions of the shutter body in the direction perpendicular to the driving direction of the shutter body comes into contact with the substrate, the projecting portion near the portion in contact with the substrate is irradiated with laser light or the like. Thus, the position defect can be easily corrected.

  The protruding portion may be formed so as to be in contact with an end portion of the opposed opening. Thereby, the area of the protrusion part which can apply force with respect to a shutter body by irradiating a laser beam etc. can be expanded. Therefore, it becomes easier to correct the defective position of the shutter body.

  The step portion may be composed of a pair of step portions provided symmetrically across the opening. In this case, in the pair of stepped portions, the protruding portions can be provided symmetrically across the opening. Thereby, the symmetry of the shutter structure can be enhanced.

  At least two openings of the substrate can be provided per pixel. Furthermore, the shutter may be configured to have one opening. In this case, one of the openings of the substrate in one pixel is one of the openings of the shutter body when viewed from a direction perpendicular to the substrate in a state where no signal voltage is applied to the drive beam. When the other one of the openings of the substrate in the one pixel is viewed from a direction perpendicular to the substrate in a state where no signal voltage is applied to the driving beam. It can be set as the structure provided in the position which overlaps with the edge part of the said shutter body. Thereby, two opening parts can be opened and closed with the shutter body which has one opening. Therefore, the shutter configuration can be simplified.

  The said board | substrate can be set as the structure containing a pair of board | substrate which opposes on both sides of the space in which the said shutter body is provided. In this case, the distance from one of the pair of substrates on the surface of the shutter body in the stepped portion can be smaller than the distance from the one substrate on the surface of the shutter body in a portion other than the stepped portion. . Thus, by forming the stepped portion as the lowest layer with respect to one substrate, the distance between the protruding portion of the stepped portion and one substrate becomes smaller than the other portion. Therefore, it becomes easy to irradiate light to a protrusion part through the opening part of one board | substrate.

  The substrate may include a pair of substrates facing each other across a space where the shutter body is provided, and the space may be filled with oil. Thereby, when light is irradiated to the protruding portion of the stepped portion, a force is easily applied to the shutter body.

  An embodiment of the present invention also includes a method for manufacturing a display device that includes a plurality of pixels and includes a movable shutter body corresponding to each pixel and a drive beam for driving the shutter body. In one embodiment, a manufacturing method corresponds to a shape of an anchor that supports a shutter body and the driving beam on the first substrate on a first substrate having a first opening corresponding to each of the plurality of pixels. A step of forming a first resist and a second resist corresponding to the shape of the shutter body and the driving beam; a step of forming a conductor film and a metal film on the first resist and the second resist; Forming a third resist corresponding to a region where the metal film is to be left on the conductor film and the metal film; and etching the conductor film and the metal film in a state where the third resist is formed. A step of removing the first resist, the second resist, and the third resist, and a shutter body and a driving beam supported by the anchor so as to be movable on the first substrate Forming, bonding a second substrate having a second opening corresponding to the first opening of the first substrate to the first substrate, and the shutter body being the first substrate or the second substrate. A signal voltage is not applied to the drive beam to the step of inspecting whether the substrate is in contact with the shutter body determined to be in contact with the first substrate or the second substrate as a result of the inspection. And a correction step of irradiating laser light through the first opening or the second opening to release the shutter body from the first substrate or the second substrate. In the step of forming the shutter body and the drive beam, the shutter body has an opening and a step portion provided to face an end portion of the opening, and the step portion is arranged in a moving direction of the shutter body. A protruding portion that protrudes from the first substrate or the second substrate when viewed from a direction perpendicular to the first substrate when no signal voltage is applied to the driving beam. It is formed so as to be provided at a position overlapping with the opening. In the correction step, the laser light is irradiated to the protruding portion of the shutter body.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the drawings, the same or corresponding parts are denoted by the same reference numerals and description thereof will not be repeated. In addition, in order to make the explanation easy to understand, in the drawings referred to below, the configuration is shown in a simplified or schematic manner, or some components are omitted. Further, the dimensional ratio between the constituent members shown in each drawing does not necessarily indicate an actual dimensional ratio.

<Embodiment 1>
FIG. 1 is a perspective view illustrating a configuration example of a display device according to the present embodiment. FIG. 2 is an equivalent circuit diagram of the display device 10. The display device 10 shown in FIG. 1 is a transmissive MEMS display. The display device 10 has a configuration in which a first substrate 11, a second substrate 21, and a backlight 31 are sequentially stacked.

  The first substrate 11 includes a display area 13 in which pixels for displaying an image are arranged, and a source driver 12 and a gate driver 14 that supply a signal for controlling light transmission of each pixel. The second substrate 21 is installed so as to cover the backlight surface of the backlight 31.

  The backlight 31 has, for example, a red (R) light source, a green (G) light source, and a blue (B) light source to irradiate each pixel with backlight light. The backlight 31 causes a predetermined light source to emit light based on the input backlight control signal.

  As shown in FIG. 2, the first substrate 11 is provided with a plurality of data lines 16 and a plurality of gate lines 15 extending so as to intersect the data lines 16, and the data lines 16 and the gate lines 15 form the pixel P. Is formed. Thereby, the pixels P are arranged in a matrix in the display area 13. A shutter mechanism S corresponding to each pixel P is provided.

  The shutter mechanism S includes a shutter that controls display of the pixels P, and a drive beam (drive electrode) that drives the shutter. In addition, a switching element 17 that controls the voltage signal of the driving beam of each pixel P is provided for each pixel P. The switching element 17 can be constituted by, for example, a thin film transistor (TFT) and is connected to the data line 16, the gate line 15, and the drive beam.

  Each data line 16 is connected to the source driver 12, and each gate line 15 is connected to the gate driver 14. The gate driver 14 scans the gate line 15 by sequentially inputting a gate signal for switching the gate line 15 to a selected or non-selected state to each gate line 15. The source driver 12 inputs a data signal to each data line 16 in synchronization with the scanning of the gate line 15. Thereby, a desired signal voltage is applied to the shutter mechanism S of each pixel P connected to the selected gate line 15.

(Configuration example of shutter mechanism)
FIG. 3 is a cross-sectional view illustrating a configuration example of one pixel P in the display region 13 of the display device 10. In the example illustrated in FIG. 3, the first substrate 11, the second substrate 21, and the backlight 31 are overlaid in order. The 1st board | substrate 11 and the 2nd board | substrate 21 are arrange | positioned so that it may mutually oppose at intervals. In the space between the first substrate 11 and the second substrate 21, the shutter body 2 and the drive beam 6 are arranged. The 1st board | substrate 11 and the 2nd board | substrate 21 are mutually bonded by the sealing material 24 provided in the edge part vicinity. The sealing material 24 seals the space between the first substrate 11 and the second substrate 21. The space between the first substrate 11 and the second substrate 21 is filled with the liquid 25. The liquid 25 can be oil such as silicon oil, for example. The vibration caused by the movement of the shutter body 2 can be suppressed by the oil. Further, by using oil that reduces the difference between the refractive index of the first substrate 11 and the second substrate 21 and the refractive index of the oil, reflection of light at the interface between the first substrate 11 and the second substrate 21 is suppressed. be able to. In addition to the sealing material 24, a spacer for holding a space may be provided between the first substrate 11 and the second substrate 21.

  The first substrate 11 has openings 9-1 and 9-2 provided corresponding to the respective pixels. The openings 9-1 and 9-2 are portions through which light can pass, and portions other than the openings 9-1 and 9-2 do not transmit light. For example, the light shielding film 111 can be formed on the first substrate 11, and the openings 9-1 and 9-2 can be formed in the light shielding film 111. In this case, as the material of the light shielding film 111, for example, an opaque insulator material can be used. Alternatively, instead of the light shielding film 111 or in addition to the light shielding film 111, the opening 9 can be formed by patterning a wiring for driving the shutter body 2 provided on the first substrate 11. The second substrate 21 is also provided with an opening 23 corresponding to each pixel. In this example, a light shielding film 22 having an opening is provided on the surface of the second substrate 21 on the first substrate 11 side. The opening of the light shielding film 22 becomes the opening 23. In each pixel, the opening 23 of the second substrate 21 and the opening 9 of the first substrate 11 are arranged at positions overlapping each other when viewed from the direction perpendicular to the first substrate 11 or the second substrate 21.

  The shutter body 2 is a plate-like body having a shutter opening 4 and is supported by the first substrate 11 in a state that it can move in a direction parallel to the surface of the first substrate 11. A drive beam 6 is provided adjacent to the shutter body 2. A signal voltage is applied to the drive beam 6. The shutter body 2 is moved by the electrostatic force generated between the drive beam 6 to which the signal voltage is applied and the shutter body 2. That is, the shutter body 2 is driven according to the signal voltage applied to the drive beam 6. When the shutter body 2 moves to a position where the entire shutter opening 4 of the shutter body 2 overlaps the opening 9-1 of the first substrate 11, an open state in which light passes through the pixels is obtained. At this time, since the right end of the shutter body 2 moves to the left from the right opening 9-2, the opening 9-2 and the shutter 2 do not overlap. When the shutter body 2 moves to a position where the shutter opening 4 and the opening 9-1 do not overlap at all, the pixel enters a closed state where light does not pass through the pixels. At this time, the right end of the shutter body 2 moves to the right from the right opening 9-2, and the opening 9-2 is covered with the shutter body 2. Thus, by controlling the signal voltage of the drive beam 6 in each pixel, the position of the shutter body 2 can be controlled, and the transmission of light from the backlight 31 to the display surface can be controlled.

  FIG. 4 is a perspective view illustrating a detailed configuration example of the shutter mechanism in one pixel. FIG. 5 is a plan view of the shutter mechanism shown in FIG. In the example shown in FIGS. 4 and 5, the shutter body 2 is a rectangular plate. In this example, the direction perpendicular to the longitudinal direction (long side direction) of the shutter body 2, that is, the short side direction (short side direction) is the driving direction (movement direction) of the shutter body 2. A shutter opening 4 is formed at a central portion in the short direction of the shutter body 2. The shutter opening 4 is formed extending in the longitudinal direction of the shutter body 2. The shutter opening 4 is formed in, for example, a rectangle having a long side in the longitudinal direction of the shutter body 2.

  The shutter body 2 has a stepped portion 3 provided to face an end (edge) 4 a of the shutter opening 4. The step portion 3 is a portion where the surface position of the shutter body 2 in the direction perpendicular to the first substrate 11, that is, the height of the surface is different from the surroundings. The step 3 extends along the end of the shutter opening 4. That is, the stepped portion 3 is also formed to extend in the longitudinal direction of the shutter body 2 (direction perpendicular to the driving direction). In this example, the step 3 is formed on a line extending along the long side of the shutter opening 4 at a position away from the long side of the shutter opening 4. In this way, by providing the shutter with a linear stepped portion extending in one direction, the shutter can be prevented from bending in the one direction. By providing the step portion 3 on the center line between the end portion 4a of the shutter opening 4 and the end portion 2a of the shutter body 2, the bending can be efficiently suppressed.

  The step portion 3 includes a protruding portion 3 a that protrudes toward the shutter opening 4. The protruding portion 3a has an opening 9-1 or an opening when viewed from a direction perpendicular to the substrate (the first substrate 11 or the second substrate 21) in a state where no signal voltage is applied to the drive beams 61 and 62. It is provided at a position overlapping the portion 23. In this example, the surface of the shutter body 2 has a plurality of layers having different heights, and the step layer 3 is the lowest layer closest to the first substrate 11 among the plurality of layers, that is, the lowest layer. Therefore, the protrusion 3a is also formed as the lowest layer. Details of the protrusion 3a will be described later.

  One end of shutter beams 51 and 52 which are beams is connected to the shutter body 2. The other ends of the shutter beams 51 and 52 are connected to shutter beam anchors 71 and 72 which are support portions fixed to the first substrate 11. The shutter beams 51 and 52 can be elastically deformed. The first shutter beam 51 is connected to one end of the shutter body 2 in the driving direction, and the second shutter beam 52 is connected to the other end. That is, the second shutter beam 52 is connected to the end opposite to the end of the shutter body 2 to which the first shutter beam 51 is connected. In this example, two first shutter beams 51 and two second shutter beams 52 are connected to two long sides of the shutter body 2, respectively. The shutter beams 51 and 52 are connected to the shutter body 2 near the center line C in a direction (longitudinal direction) perpendicular to the driving direction of the shutter body 2. That is, the shutter beams 51 and 52 are connected to a substantially central position in a direction perpendicular to the driving direction. The shutter beams 51 and 52 extend outward from the connection portion with the shutter body 2 and further extend along the end portion (long side in this example) of the shutter body 2 and are connected to the shutter beam anchors 71 and 72. In this way, the shutter beams 51 and 52 connect the shutter beam anchors 71 and 72 fixed to the first substrate 11 and the shutter body 2. Since the shutter beams 51 and 52 have flexibility, the shutter body 2 is supported in a movable state with respect to the first substrate 11. The shutter body 2 is electrically connected to wiring (not shown) provided on the first substrate 11 via the shutter beam anchors 71 and 72 and the shutter beams 51 and 52.

  The drive beams 61 and 62 are provided adjacent to both sides in the drive direction of the shutter body 2. The first drive beam 61 is provided at one end in the driving direction of the shutter body 2, and the second drive beam 62 is provided to face the other end in the driving direction of the shutter body 2. That is, the drive beams 61 and 62 are disposed at positions facing the shutter beams 51 and 52 connected to the shutter body 2. End portions of the drive beams 61 and 62 are connected to drive beam anchors 81 and 82 fixed to the first substrate 11. The drive beams 61 and 62 are electrically connected to wiring (not shown) provided on the first substrate 11 via drive beam anchors 81 and 82. Here, as an example, the first drive beam 61 is composed of a pair of drive beams, but the first drive beam 61 can also be composed of a single drive beam. The same applies to the second drive beam 62.

  In the example shown in FIGS. 4 and 5, the first substrate 11 is provided with two openings 9-1 and 9-2 per pixel. One shutter opening 4 is provided in the shutter body 2 of each pixel. One of the two openings 9-1 is provided at a position overlapping with a part of the shutter opening 4 of the shutter body 2 in a state where no signal voltage is applied to the drive beams 61 and 62. The other opening 9-2 is provided at a position overlapping the end (edge) in the driving direction of the shutter body 2 in a state where no signal voltage is applied to the driving beams 61 and 62.

(Operation example of shutter)
Here, an operation example of the shutter body 2 will be described. When no signal voltage is applied to the drive beams 61 and 62, for example, the shutter body 2 is disposed at the position shown in FIG. In a state where no signal voltage is applied to the drive beams 61 and 62, no electrostatic force acts between the drive beams 61 and 62 and the shutter body 2. For example, in the manufacturing process of the display device 10, the position of the shutter body 2 when the shutter beams 51 and 52 and the shutter body 2 are formed is the position of the shutter body 2 in a state where no signal voltage is applied to the drive beams 61 and 62. Often position. In addition, when the same signal voltage is applied to the drive beams 61 and 62 provided on both sides of the shutter body 2 and the shutter body 2, it is regarded as being the same as the state where no signal voltage is applied to the drive beams 61 and 62. You can also. For example, when the potentials of the shutter body 2 and the drive beams 61 and 62 on both sides are the same, the shutter body 2 receives a repulsive force from the drive beams 61 and 62 on both sides and is positioned at the approximate center of the drive beams 61 and 62 on both sides. Be placed. If the shutter body 2 is formed to be disposed at the center of the drive beams 61 and 62 even when no signal voltage is applied to the drive beams 61 and 62, the shutter body 2 and the drive beams 61 and 62 on both sides are arranged. The state where the potential of 62 is the same can be regarded as the same as the state where the signal voltage is not applied to the drive beams 61 and 62.

  In the example shown in FIG. 5, the shutter body 2 is arranged at a position where a part of the shutter opening 4 of the shutter body 2 and a part of one opening 9-1 of the first substrate 11 overlap. Further, the shutter body 2 is disposed at a position where the end of the shutter body 2 in the driving direction (the right long side of the shutter body 2 in this example) and the other opening 9-2 of the first substrate 11 overlap. . In this example, when no signal voltage is applied to the drive beams 61 and 62, the opening 9-1 and the opening 9-2 are viewed by the shutter body 2 when viewed from the direction perpendicular to the surface of the first substrate 11. More than half of it is covered. At this time, the protrusion 3 a of the step 3 provided to the left of the shutter opening 4 of the shutter body 2 overlaps the opening 9-1 of the first substrate 11. That is, the protrusion 3 a of the left step portion 3 has an opening 9 in the first substrate 11 when viewed from a direction perpendicular to the first substrate 11 in a state where no signal voltage is applied to the drive beams 61 and 62. -1 is provided at a position overlapping with -1. Note that the protrusion 3 a of the step 3 provided to the right of the shutter opening 4 does not overlap with the openings 9-1 and 9-2 of the first substrate 11. By forming the protrusions 3a symmetrically, the operation of the shutter body 2 can be stabilized.

  When a high level signal voltage is applied to the first drive beam 61 and a low level signal voltage is applied to the shutter body 2 and the second drive beam 6, for example, FIG. As shown, the shutter body 2 moves toward the first drive beam 61. In this case, the entire shutter opening 4 of the shutter body 2 overlaps the entire opening 9-1 of the first substrate 11. The right end of the shutter body 2 moves to the left from the opening 9-2. Therefore, neither the opening 9-1 nor the opening 9-2 is covered. Therefore, light is transmitted through the pixel. That is, the pixel is in an open state. In this case, the light from the backlight 31 passes through the pixels and is emitted from the display surface.

  When a high level signal voltage is applied to the second drive beam 62 and a low level signal voltage is applied to the shutter body 2 and the left first drive beam 61, for example, as shown in FIG. The shutter body 2 moves toward the driving beam 62. In this case, the portions other than the shutter opening 4 of the shutter body 2 overlap the entire openings 9-1 and 9-2 of the first substrate 11. Therefore, the opening 9-1 and the opening 9-2 are covered by the shutter body 2. In this case, the pixel is in a closed state. Light from the backlight 31 does not pass through the pixels.

(Circuit configuration example)
FIG. 8 is an equivalent circuit diagram illustrating a circuit configuration example in one pixel. In the example shown in FIG. 8, switching elements 17, 17u, 17e, 17p1, and 17p2 are provided for one pixel. The switching element 17 is connected to the gate line 15 and the data line 16 and controls the input of the data signal SD that determines opening / closing (on / off) of the shutter. The switching element 17u is connected between the switching element 17 and the first drive beam 61, and updates the potential of the first drive beam 61 to a potential corresponding to the data signal at a timing based on the update signal SU. The switching element 17e is connected between the switching element 17u and the second drive beam 62, and updates the potential of the second drive beam 62 to a potential corresponding to the data signal at a timing based on the enable signal SE. The switching elements 17p1 and 17p2 are respectively connected between the first and second drive beams 61 and 62 and the wiring for supplying the shutter drive voltage SA, and the shutter drive voltage is based on a pre-charge control signal. The supply of SA to the first drive beam 61 and the second drive beam 62 is controlled. The shutter body 2 is connected to the shutter wiring 19-2.

  Specifically, the gate of the switching element 17 is connected to the gate line 15, the drain is connected to the data line 16, and the source is connected to the gate of the switching element 17u. The drain of the switching element 17u is connected to the first drive beam 61, the source of the switching element 17p1, and the gate of the switching element 17e. The source of the switching element 17u is connected to the wiring that supplies the update signal SU. The source of the switching element 17e is connected to the wiring that supplies the enable signal SE. The drain of the switching element 17e is connected to the source of the switching element 17p2 and the second drive beam 62. The gates of the switching elements 17p1 and 17p2 are connected to the wiring 19-1 for supplying the precharge control signal SP, and the drains are connected to the wiring for supplying the shutter drive voltage SA.

  A capacitor C1 is formed between a node (hereinafter referred to as a storage node) between the switching element 17 and the switching element 17u and the shutter wiring 19-2. The capacitor C1 holds a signal voltage of a data signal indicating opening / closing of the shutter body 2. A capacitor C2 is formed between a node (hereinafter referred to as a master node n1n1) to which the first drive beam 61 and the switching elements 17u, 17p1, and 17e are connected and the shutter wiring 19-2. The capacitor C2 stabilizes the shutter drive voltage held at the master node n1n1. A capacitor C3 is formed between a node (hereinafter referred to as slave node n2) to which the second drive beam 62 and the switching elements 17e and 17p1 are connected and the shutter wiring 19-2. The capacitor C3 stabilizes the shutter driving voltage held in the slave node n2.

  The data signal SD is input from the data line 16 at the timing when the gate signal indicating the selected state is input to the gate line 15 and the switching element 17 is turned on. A data voltage corresponding to the data signal SD that determines opening and closing of the shutter body 2 is stored in the capacitor C1. At this time, in the update signal SU, the switching element 17u is off regardless of the data voltage. The shutter drive voltage SA is applied to the first drive beam 61 and the second drive beam 62 at the timing when the switching elements 17p1 and 17p2 are turned on based on the pre-jersey control signal SP. As a result, the drive voltage (high level) is stored in the master node n1n1 and the slave node n2n2.

  For example, when the update signal SU changes from a high level to a low level, on / off of the switching element 17u is controlled according to the data voltage of the storage node. In this example, when the data voltage is high level, the switching element 17u is turned on and the master node n1n1 is low level. When the data voltage is low level, the switching element 17u remains off and the master node n1n1 is high level. Level (drive voltage). For example, when the enable signal SE changes from a high level to a low level, on / off of the switching element 17e is controlled according to the voltage of the master node n1. In this example, when the master node n1 is at a high level, the switching element 17u is turned on and the slave node n2 is at a low level. When the master node n1 is at a low level, the switching element 17u remains off and the slave node n2 Becomes a high level (drive voltage).

  Thus, when writing data to the pixel, the polarity (high / low) of the voltages of the master node n1 and the slave node n2 is always reversed. Therefore, the shutter is attracted to the drive beam of the node having the opposite polarity to the polarity (high / low) of the shutter body 2 by an electric force. Note that charging of the shutter can be prevented by switching the polarity of the shutter at a predetermined period.

  The circuit configuration is not limited to the above example. FIG. 9 is an equivalent circuit diagram illustrating another example of a circuit configuration in one pixel. In FIG. 9, elements corresponding to those shown in FIG. In the example shown in FIG. 9, two data lines 161 and 162 are provided for each pixel. One of these two data lines 161 supplies a first data signal SD-1 indicating the signal voltage of the first drive beam 61, and the other data line 162 supplies the second drive beam 62. A second data signal SD-2 indicating the signal voltage is supplied. Therefore, in one writing, the polarity of the first data signal SD-1 and the polarity of the second data signal SD-2 are reversed.

  In the example shown in FIG. 9, as a configuration for controlling the voltage of the first drive beam 61, a switching element for controlling the input of the first data signal SD-1 of the data line 162 based on the gate signal SG of the gate line 15. 171, a capacitor C11 that stores a data signal voltage based on the first data signal SD-1, a switching element 17u1 that controls the voltage of the master node n1 connected to the first drive beam 61 according to the data signal voltage, and a master node A switching element 17p1 for controlling the supply of the shutter drive voltage SA to n1 is provided. Similarly, as a configuration for controlling the voltage of the second drive beam 62, a switching element 172, a capacitor C12, a switching element 17u2, and a switching element 17p2 are provided. Also in the circuit shown in FIG. 9, the driving of the shutter body 2 is controlled in accordance with the first and second data signals 161 and 162.

(Example of shutter position correction)
Here, an example of correcting the shutter position using the protruding portion 3a of the stepped portion 3 of the shutter body 2 will be described. 10A is a diagram showing a positional relationship between the shutter body 2 and the openings 9-1 and 9-2 in the cross section taken along the line AA shown in FIG. 10B is a diagram showing a positional relationship between the shutter body 2 and the openings 9-1 and 9-2 in the cross section taken along the line BB shown in FIG. In the example shown in FIG. 10A, the protrusion 3 a is arranged at a position overlapping the opening 9-1 in the direction perpendicular to the first substrate 11 in a state where no signal voltage is applied to the drive beams 61 and 62. . In this case, it becomes easy to irradiate the projecting portion 3a with the laser light L from the outside of the first substrate 11 through the opening 9-1. It has been found that by irradiating the projecting portion 3a with the laser light L, a force in the direction in which the laser light L travels can be applied to the shutter body 2. For example, when oil is filled in the space between the first substrate 11 and the second substrate 21 where the shutter body 2 is disposed, when the shutter body 2 is irradiated with laser light, the portion of the shutter body 2 that has been hit by the laser light It is considered that a force is applied to the shutter body 2 by generating heat and vaporizing surrounding oil.

  Thereby, for example, as shown in FIG. 10C, when the shutter body 2 comes into contact with the first substrate 11 due to a defective manufacturing process and cannot be driven, the opening 9-1 of the first substrate 11 is interposed. By irradiating the projection 3 a of the step 3 of the shutter body 2 with laser light, the shutter body 2 can be separated from the first substrate 11 by applying a force to the shutter body 2.

  On the other hand, at the position shown in FIG. 10B, the opening 9-1 and the step 3 do not overlap. Therefore, the laser beam L that has passed through the opening 9-1 is likely to be irradiated to a portion that is not the stepped portion 3 of the shutter body 2. When a force due to the laser beam L is applied to a portion that is not the stepped portion 3, the position of the shutter body 2 is often unchanged only by the deflection of the shutter body 2. Therefore, in order to correct the position of the shutter body 2, it is preferable to irradiate the stepped portion 3 of the shutter body 2 with laser light. By providing the protruding portion 3a, it becomes easy to irradiate the stepped portion 3 with laser light through the opening 9-1.

  In the example shown in FIG. 10A, the distance between the surface of the shutter body 2 and the first substrate 11 at the stepped portion 3 (that is, the height of the surface of the shutter body 2 with respect to the first substrate 11) is the shutter body at a portion other than the stepped portion 3. It is smaller than the distance between the first substrate 11 on the two surfaces. Therefore, the protruding portion 3 a is disposed at a position closer to the first substrate 11 than the portion other than the stepped portion 3. Therefore, it becomes easy to irradiate the projecting portion 3a with the laser light through the opening 9-1 of the first substrate 11. Moreover, a force can be efficiently applied to the shutter body 2 by irradiating the projection 3a with laser light.

  In the above example, the case where the position of the shutter body 2 is corrected by irradiating the laser beam through the opening 9-1 of the first substrate 11 has been described. The position can also be corrected by irradiating the shutter body 2 with laser light through the shutter. For example, the distance between the stepped portion 3 and the second substrate 21 on the surface of the shutter body 2 can be made smaller than the distance between the portion other than the stepped portion 3 and the surface of the shutter body 2 on the second substrate 21.

(About the structure of the protrusion)
In the shutter body 2 shown in FIGS. 4 and 5, the protruding portion 3 a has a form protruding toward the shutter opening 4. Thereby, since the protrusion 3a can be provided at a position close to the shutter opening 4, the protrusion 3a is provided at a position easily overlapping the opening 9-1 of the first substrate 11. Note that if the entire stepped portion 3 is too close to the first substrate 11, the area of the stepped portion 3 becomes large and the shutter body 2 may easily come into contact with the first substrate 11. Therefore, as shown in FIGS. 4 and 4, by providing a protruding portion 3 a that protrudes toward the shutter opening 4 in a part of the stepped portion 3 extending along the shutter opening 4, the adverse effects of the step 3 are suppressed. Position correction by laser light can be facilitated.

  In the shutter body 2 shown in FIGS. 4 and 5, a plurality of protrusions 3a arranged in the direction in which the stepped portion 3 extends (y direction in FIG. 5) are provided. In this way, by arranging the plurality of protruding portions 3a side by side in the stepped portion 3 formed along one line, the positions where laser light can be irradiated can be distributed in the direction of the one line. . For example, as in the above example, when a plurality of protrusions 3a are distributed and provided in the longitudinal direction of the shutter body 2 (y direction in FIG. 5), a force is applied to a part of the shutter body 2 in the longitudinal direction. In addition, it is possible to irradiate the protrusion 3a at an appropriate position with laser light.

  For example, in the example shown in FIG. 4 and FIG. 5, in the stepped portion 3, one is provided on each side across the center line C in the direction perpendicular to the driving direction (movement direction: x direction in FIG. 5) of the shutter body 2. Projections 3a are provided one by one. As described above, by disposing at least one protrusion 3a on both sides of the center line C, it is easy to apply a force to either one of the both ends of the shutter body 2 in the direction perpendicular to the driving direction. For example, when only one end of the shutter body 2 (the upper side of the shutter body 2 in FIG. 5) is in contact with the first substrate 11, the protrusion 3 a on the one end side of the center line C By irradiating the laser beam, it is possible to efficiently apply a force to the one end of the shutter body 2.

  FIG. 11 is a diagram for explaining the position of the protruding portion 3a. In the example shown in FIG. 11, one protrusion 3 a is provided on each side of the center line C in the direction perpendicular to the driving direction of the shutter body 2. In this configuration, the distances Lshort1 and Lshort2 from the end portions (upper side and lower side in FIG. 11) in the direction (longitudinal direction) perpendicular to the driving direction of the shutter body 2 to the center of the projecting portion 3a are as follows. The length in the longitudinal direction Lshutter can be within 20%. The protrusion 3a is in contact with the first substrate 11 at one end of the longitudinal ends (upper side and lower side), for example, at the end on the head side (the upper side of the shutter body 2 in FIG. 11). In this case, the shutter body 2 can be easily returned to the normal position by irradiating the protrusion 3a on the head side with laser light. On the contrary, when the shutter body 2 is in contact with the first substrate 11 at the other end portion in the longitudinal direction, that is, the tail side end portion (the lower side in FIG. 11), the laser is applied to the tail side protruding portion 3a. By irradiating light, the shutter body 2 can be easily returned to the normal position. When both ends in the longitudinal direction of the shutter body 2 (both the upper side and the lower side in FIG. 11) are dropped, both the head-side protruding portion 3a and the tail-side protruding portion 3a may be irradiated with laser light. it can.

Although the area of the protrusion part 3a is not specifically limited, For example, the protrusion part 3a can be provided so that the area of the step part 3 which overlaps with the opening part 9-1 may be about 25 μm ² or more. As an example, the area of the protruding portion 3a protruding from the rib extending along the longitudinal direction in the stepped portion 3 toward the shutter opening portion 4 can be 3 μm × 7 μm.

  Further, the shutter body 2 shown in FIGS. 4, 5, and 11 has a pair of step portions 3 provided symmetrically with the shutter opening 4 interposed therebetween. In the pair of stepped portions 3, projecting portions 3 a are provided symmetrically with the shutter opening 4 interposed therebetween. In the above example, the shape of the stepped portion 3 is axisymmetric with respect to the center line C2 of the shutter body 2 in the driving direction as the symmetry axis. Thus, by providing the protruding portions 3a symmetrically on both sides of the shutter opening 4, the symmetry of the shape of the shutter body 2 can be ensured. Note that the symmetry of the shape may not be strict. For example, symmetry can be ensured to some extent only by equalizing the distance from the shutter opening 4 of the protrusions 3 a on both sides of the shutter opening 4.

  Note that the protrusions 3 b are not necessarily provided on both sides of the shutter opening 4. In the example shown in FIG. 11, the position of the shutter 2 is corrected by irradiating the laser beam only by providing the protrusion 3 a at a position overlapping the opening 9-1 when no signal voltage is applied to the drive beams 61 and 62. The effect that it becomes easy is acquired. For example, in the pair of stepped portions 3 provided to face the shutter opening 4, the protruding portion 3 a is provided only on one stepped portion 3 (in the example of FIG. 11, only the left stepped portion of the shutter opening 4). You can also.

<Embodiment 2>
FIG. 12 is a perspective view illustrating a configuration example of a one-pixel shutter mechanism in the present embodiment. FIG. 13 is a plan view of the shutter mechanism shown in FIG. In the example shown in FIGS. 12 and 13, the protrusion 3 b is formed so as to be in contact with the end (edge) of the opposing shutter opening 4. The end of the shutter opening 4 has a step at a portion in contact with the protrusion 3b. In this example, the step portion 3 protrudes from the linear shape toward the shutter opening 4 toward the shutter opening 4 and reaches the long side of the shutter opening 4 in the longitudinal direction (direction perpendicular to the driving direction) of the shutter body 2. Projecting portion 3b. The step portion 3 has a surface (side wall) perpendicular to a surface (bottom surface) parallel to the surface of the first substrate 11. The side wall of the protrusion 3 b is formed to extend into the shutter opening 4. The side wall formed extending into the shutter opening 4, that is, the bridge portion 3 c is connected to the side wall of the projecting portion 3 b located opposite to the shutter opening 4. In other words, the protruding portions 3 b that are located opposite to each other with the shutter opening 4 interposed therebetween are connected to each other by a plate-like bridge portion 3 c that is perpendicular to the first substrate 11 and straddles the shutter opening 4. Thereby, the shutter body 2 can be made difficult to bend. Here, the shutter body 2 can be configured to include a conductor layer and a metal layer. In this case, the bridge part 3c straddling the shutter opening part 4 can be formed of only a conductor layer, for example.

  In this manner, by forming the protruding portion 3b of the stepped portion 3 in the shutter body 2 so as to be in contact with the shutter opening portion 4, it is possible to secure a wider area that can be irradiated with laser light. For example, as will be described later, when the shutter body 2 having the stepped portion 3 is formed by depositing the material of the shutter body 2 on the resist, the protruding portion 3b may be formed smaller than a desired area. is there. Therefore, as shown in FIGS. 12 and 13, it is possible to more reliably secure the area of the protrusion 3 b by forming the protrusion 3 b so as to reach the shutter opening 4.

(Manufacturing process)
Here, an example of the manufacturing process of the shutter mechanism shown in FIG. 13 will be described. 14A to 14F are views for explaining an example of a manufacturing process of the shutter mechanism shown in FIG. 14A to 14F, the right diagram shows the manufacturing process of the portion of line D in FIG. 13, and the left diagram shows the manufacturing process of the portion of line E in FIG. Note that the manufacturing steps shown in FIGS. 14A to 14F can also be applied to the first embodiment.

  As shown in FIG. 14A, a first resist A and a second resist M are applied on the first substrate 11 and patterned by photolithography. The first resist A and the second resist M can be formed in one lithography process by using, for example, a halftone mask. These first resist A and second resist M are for forming the shutter beam anchors 71 and 72, the drive beam anchors 81 and 82, the drive beams 61 and 62, the shutter beams 51 and 52, and the shutter body 2. is there. For example, the first resist A is formed according to the shape of the portion where the shutter beam anchors 71 and 72 and the drive beam anchors 81 and 82 to be fixed to the first substrate 11 are formed. The second resist M is patterned according to the shapes of the shutter beams 51 and 52, the drive beams 61 and 62, and the shutter body 2. In the example of FIG. 14A, the first resist A and the second resist M are not provided in the region where the shutter beam anchors 71 and 72 and the drive beam anchors 81 and 82 are formed. In addition, at least a first resist A is provided in a region where the shutter body 2, the shutter beams 51 and 52, and the drive beams 61 and 62 are provided. The second resist M is not provided in the portion where the step portion 3 of the shutter body 2 is formed.

  As shown in FIG. 14B, the conductor layer 41 is formed on the first resist A and the second resist M by using, for example, a CVD method. The conductor layer 41 can be formed of, for example, amorphous silicon, SiGe, GaAs, CdSe, InP, or other semiconductors. As shown in FIG. 14C, the metal layer 42 is formed on the conductor layer 41. The metal layer 42 can be formed of, for example, an alloy containing Al, Cu, No, Mo, Ta, or the like.

  As shown in FIG. 14D, a third resist M2 is formed and patterned by photolithography. As shown in FIG. 14E, portions exposed from the metal layer 42 and the third resist M2 are removed by wet etching. The conductor layer 41 is removed by anisotropic dry etching. In anisotropic dry etching, portions of the conductor layer 41 formed on the top surfaces of the first resist A and the second resist M that are not covered with the third resist M2 and the metal layer 42 are removed. The conductor layer 41 formed on the side surfaces (walls) of the first resist A and the second resist M remains. Shutter beams 51 and 52 and drive beams 61 and 62 can be formed by the conductor layer 41 remaining on the side surfaces of the first resist A and the second resist M. Accordingly, the shutter beams 51 and 52 and the drive beams 61 and 62 can be formed with a structure that is easily elastically deformed in a direction parallel to the surface of the first substrate 11.

  As shown in FIG. 14F, the first resist A and the second resist M formed as the sacrificial layer are removed. Thereby, the shutter beam anchors 71 and 72, the drive beams 61 and 62, the shutter beams 51 and 52, and the shutter body 2 fixed to the first substrate 11 are formed. The shutter body 2 includes a conductor layer 41 and a metal layer 42.

  The second substrate 21 is bonded to a position of the first substrate 11 facing the surface on which the shutter beam anchors 71 and 72, the drive beams 61 and 62, the shutter beams 51 and 52, and the shutter body 2 are formed. In the state where the first substrate 11 and the second substrate 21 are bonded together, it is inspected whether the shutter body 2 is in contact with the first substrate 11 or the second substrate. As a result of the inspection, the laser beam is irradiated to the shutter body 2 determined to be in contact with the first substrate 11 or the second substrate 21. As described above, the laser light is applied to the projecting portions 3 a and 3 b of the step portion 3 of the shutter body 2. Thereby, the shutter body 2 can be separated from the first substrate 11 or the second substrate 21 and returned to the normal position.

(Modification)
As mentioned above, although embodiment of this invention was described, this invention is not restricted to the said Embodiment 1,2. For example, in the first and second embodiments, one pixel has two openings 9 and the shutter body 2 has one shutter opening 4, but the openings 9 and the shutter openings of the shutter body 2 are used. The number of 4 is not limited to this. For example, the shutter opening 4 and the opening 9 of the shutter body 2 may have a one-to-one correspondence.

  In the first and second embodiments, the positional relationship between the protruding portion 3a and the opening 9-1 of the first substrate 11 has been described. However, the positional relationship between the protruding portion 3a and the opening 23 of the second substrate 21 is also described. A similar configuration can be used.

  In the above example, the shutter beams 51 and 52 are connected to the shutter body 2 in the vicinity of the center line C in the direction (longitudinal direction) perpendicular to the driving direction of the shutter body 2. On the other hand, the shutter beams 51 and 52 may be connected to a position close to the end of one of the shutter bodies 2 from the center line C. For example, it may be connected between the center line and the end in the direction perpendicular to the driving direction of the shutter body 2. The first shutter beam 51 is composed of a pair of shutter beams, but the first shutter beam 51 can also be composed of a single shutter beam. The same applies to the second shutter beam 52.

  As the thin film transistor used for the switching element, for example, amorphous silicon, low-temperature polysilicon, or an oxide semiconductor can be used. As a structure of the oxide semiconductor, for example, a compound (In—Ga—Zn—O), indium (In), gallium (Ga), zinc (Zn), and oxygen (O) are used. In), tin (Tin), zinc (Zn), and a compound composed of oxygen (O) (In-Tin-Zn-O), or indium (In), aluminum (Al), zinc (Zn) And a compound composed of oxygen (O) (In-Al-Zn-O) or the like.

  Moreover, the form of the step part 3 and the protrusion part 3a is not restricted to the said example. For example, as shown in FIG. 15A, one protruding portion 3 a can be disposed on one step portion 3 that faces the shutter opening 4. In the example illustrated in FIG. 15A, a pair of stepped portions 3 that are opposed to each other with the shutter opening 4 interposed therebetween are provided, and one protruding portion 3 a is provided in each of the pair of stepped portions 3. In the example shown in FIG. 15A, the protrusion 3a is provided at the same position as the position where the shutter beam 51 is connected to the shutter body 2 in the direction perpendicular to the driving direction of the shutter body 2 (y direction in FIG. 15A). . That is, the rib (groove) formed by the protrusion 3 a extends in the driving direction (x direction) and is connected to the end 2 a of the shutter body 2. As described above, by providing the protruding portion 3 a at a position close to the connection position of the shutter beam 51, the force generated by irradiating the protruding portion 3 a with the laser light is easily transmitted to the shutter beam 51.

  In the example shown in FIG. 15B, the protrusion 3a is connected to the shutter opening 3a. A bridge portion 3c straddling the shutter opening 3a is further extended from the end of the shutter opening 3a to which the protrusion 3a is connected, and is connected to the protrusion 3a of the step portion 3 provided on the opposite bank. As described above, the connection position of the shutter beam 51 to the shutter body 2, the protruding portion 3a, and the bridge portion 3c straddling the shutter opening portion 3a are arranged so as to be aligned along substantially one straight line. The lifting effect of the shutter body 2 by laser light irradiation can be enhanced.

  In the example shown in FIG. 15C, the protrusion 3 a is formed to extend toward the end of the shutter body 2 on the side opposite to the shutter opening 4. In this example, in a state where no signal voltage is applied to the drive beams 51 and 52, a protruding portion 3a extending toward the end of the shutter body 2 that overlaps the opening 9-2 of the first substrate 11 is formed. In FIG. 15D, the protruding portion 3 a is formed to extend until reaching the end portion 2 a of the shutter body 2. Thereby, the protrusion part 3a can be provided in the position which is easy to overlap with the opening part 9-2 of the 1st board | substrate 11 which overlaps with the edge part 2a of the shutter body 2. FIG.

2 Shutter 3 Step 3a, 3b Projection 4 Opening 51, 52 Shutter beam 6, 61, 62 Driving beam 71, 72 Shutter beam anchor 81, 82 Driving beam anchor 9-1, 9-2 Opening substrate 11, 21

Claims (9)

A display device having a plurality of pixels,
A substrate having an opening provided corresponding to each of the plurality of pixels;
A shutter body provided corresponding to each of the plurality of pixels and supported in a movable state with respect to the substrate;
A first shutter beam that is electrically connected to the shutter body and elastically deforms to move the shutter body;
A second shutter beam that is electrically connected to the shutter body and elastically deforms to move the shutter body;
A first shutter beam anchor electrically connected to the first shutter beam and supporting the first shutter beam;
A second shutter beam anchor electrically connected to the second shutter beam and supporting the second shutter beam;
A first driving beam provided opposite to the first shutter beam and driving the shutter body by applying a signal voltage;
A second driving beam provided opposite to the second shutter beam and driving the shutter body by applying a signal voltage;
A first drive beam anchor electrically connected to the first drive beam and supporting the first drive beam;
A second drive beam anchor electrically connected to the second drive beam and supporting the second drive beam;
The shutter body has a shutter opening and a stepped portion provided to face an end of the shutter opening,
The step portion includes a protruding portion protruding in the moving direction of the shutter body,
The protrusion is located at a position overlapping the opening of the substrate when viewed from a direction perpendicular to the substrate in a state where no signal voltage is applied to the first drive beam and the second drive beam. A display device provided.   The display device according to claim 1, wherein the stepped portion includes a plurality of the protruding portions that are formed to extend along an end portion of the opposed shutter opening and are arranged in a direction in which the stepped portion extends.   The display device according to claim 2, wherein at least one of the projecting portions is provided on both sides of the stepped portion across a center line in a direction perpendicular to the driving direction of the shutter body.   The display device according to claim 1, wherein the protruding portion is formed so as to be in contact with an end portion of the opposed shutter opening. The stepped portion comprises a pair of stepped portions provided symmetrically across the shutter opening,
5. The display device according to claim 1, wherein, in the pair of stepped portions, the projecting portions are provided symmetrically across the shutter opening. 6. The substrate has at least two openings per pixel,
The shutter body has one shutter opening,
One of the openings of the substrate in one pixel is when viewed from a direction perpendicular to the substrate in a state where no signal voltage is applied to the first drive beam and the second drive beam. Provided at a position overlapping with a part of the shutter opening of the shutter body, the other one of the openings of the substrate in the one pixel is a signal to the first driving beam and the second driving beam. The display device according to claim 1, wherein the display device is provided at a position overlapping with an end of the shutter body when viewed from a direction perpendicular to the substrate in a state where no voltage is applied. The substrate includes a pair of substrates facing each other across a space where the shutter body is provided,
The distance from one board | substrate among the said pair of board | substrates of the said shutter body surface in the said level | step-difference part is smaller than the distance from said one board | substrate of the shutter body surface in parts other than the said level | step-difference part. The display device according to any one of the above. The substrate includes a pair of substrates facing each other across a space where the shutter body is provided,
The display device according to claim 1, wherein the space is filled with a liquid. A method of manufacturing a display device having a plurality of pixels, including a movable shutter body corresponding to each pixel and a driving beam for driving the shutter body,
A first resist corresponding to the shape of an anchor that supports the shutter body and the drive beam on the first substrate on a first substrate having a first opening corresponding to each of the plurality of pixels, and the shutter body, Forming a second resist corresponding to the shape of the drive beam;
Forming a conductor film and a metal film on the first resist and the second resist;
Forming a third resist corresponding to a region where the metal film is to be left on the conductor film and the metal film;
Etching the conductor film and the metal film with the third resist formed;
Removing the first resist, the second resist, and the third resist, and forming a shutter body and a drive beam that are movably supported on the first substrate by the anchor; and
Bonding a second substrate having a second opening corresponding to the first opening of the first substrate to the first substrate;
Inspecting whether the shutter body is in contact with the first substrate or the second substrate;
As a result of the inspection, in a state where a signal voltage is not applied to the drive beam to the shutter body determined to be in contact with the first substrate or the second substrate, the first opening or the second substrate A correction step of separating the shutter body from the first substrate or the second substrate by irradiating a laser beam through the opening;
In the step of forming the shutter body and the drive beam, the shutter body has a shutter opening and a stepped portion provided opposite to an end of the shutter opening, and the stepped portion is the shutter body. A protrusion that protrudes in the direction of movement of the first substrate or the protrusion when viewed from a direction perpendicular to the first substrate in a state where no signal voltage is applied to the drive beam. Formed so as to overlap with the opening of the second substrate,
The method for manufacturing a display device, wherein, in the correcting step, the laser light is irradiated to the protruding portion of the shutter body.

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