JP2016057122A - Rotation detection device and inspection device equipped with rotation detection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a rotation detection device with which it is possible to accurately detect whether or not an object to be inspected has rotated a prescribed number of times or more.SOLUTION: A rotation detection device 40 comprises: an optical path change unit 42 for changing the optical path of light; a signal generation unit 41 for irradiating an object 1 to be inspected with measurement light via the optical path change unit 42, receiving the measurement light from the object 1 to be inspected via the optical path change unit 42, and generating a peripheral velocity signal associated with the peripheral velocity of the object 1 to be inspected, on the basis of a change in the frequency of the measurement light; a control unit 44 for operating the optical path change unit 42 so that the measurement light is continuously radiated toward the reference position of the object 1 to be inspected while the object 1 to be inspected is moving in a measurement section; and a rotation determination unit 45 for determining, on the basis of the peripheral velocity signal, whether or not the object 1 to be inspected has rotated a prescribed number of times or more while the object 1 to be inspected was moving in the measurement section.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a rotation detection device that detects rotation of an inspection object and an inspection device including the rotation detection device.

  2. Description of the Related Art There is an inspection apparatus that photographs the appearance of an inspection object while rotating and conveying the inspection object in order to inspect for the presence or absence of defects and foreign matters. This type of inspection apparatus has a function for detecting whether or not the inspection object is correctly rotated. For example, Patent Document 1 discloses an inspection apparatus that performs foreign object inspection while rotating a bottle as an example of an inspection object. In this inspection apparatus, a guide roller provided with a spiral step portion is brought into contact with a body portion of a rotating bottle, and the position of the spiral step portion that changes as the guide roller rotates is photographed with a camera to make one turn of the bottle. It is detected whether or not it is rotating as described above.

  However, since the detection device described in Patent Document 1 indirectly detects the rotation of the bottle via the guide roller, when the slip occurs between the bottle and the guide roller, the guide roller rotates. In spite of this, the bottle may not rotate. In such a case, the rotation of the bottle cannot be detected correctly.

JP 2010-156550 A

  The present invention has been made in view of the above-described problems, and includes a rotation detection device capable of accurately detecting whether or not an inspection object such as a container has rotated a predetermined number of times or more, and the rotation detection device. An object is to provide an inspection device.

  In order to achieve the above-described object, one aspect of the present invention is a rotation detection device that detects rotation of an inspection object that moves while rotating, an optical path changing unit that changes an optical path of light, and the optical path changing unit The measurement object is irradiated with the measurement light via the optical path changing unit, the measurement light from the inspection object is received via the optical path changing unit, and the peripheral speed of the inspection object based on the change in the frequency of the measurement light And a signal generation unit that generates a peripheral speed signal related to the optical path change so that the measurement light is continuously irradiated toward the reference position of the inspection object while the inspection object is moving in the measurement section. And a rotation determination unit that determines whether or not the inspection object has rotated more than a predetermined number of times while moving in the measurement section based on the peripheral speed signal. It is characterized by.

In a preferred aspect of the present invention, the rotation determination unit may be configured such that when the peripheral speed index value obtained from the peripheral speed signal exceeds a predetermined threshold, the inspection object is moving in the measurement section. It is determined that the motor has rotated more than the predetermined number of times.
In a preferred aspect of the present invention, the optical path changing unit is a tracking mirror configured such that an angle can be changed, and the control unit is configured to check the inspection target while the inspection target is moving in the measurement section. The angle of the tracking mirror is controlled so that the measurement light is continuously irradiated toward the reference position.

  In another aspect of the present invention, the rotation detection device, a transfer device that moves the inspection object while rotating, an imaging device that images the inspection object that moves in the measurement section, and the imaging device captures an image. An inspection apparatus comprising: an image processing apparatus that inspects the inspection object based on the obtained image.

In a preferred aspect of the present invention, the imaging device is disposed above or below the signal generation unit, and images the inspection object via the optical path changing unit.
A preferred aspect of the present invention includes a light guide unit for guiding measurement light from the inspection object to the imaging device, and the control unit is configured to move the inspection object while moving the measurement object. The light guide is operated so that measurement light from the inspection object is guided to the imaging device, and the imaging device images the inspection object via the light guide.
In a preferred aspect of the present invention, the imaging device and the light guide unit are arranged on the same side as the signal generation unit with respect to the inspection object.
In a preferred aspect of the present invention, the imaging device and the light guide unit are arranged on the opposite side of the signal generation unit with respect to the inspection object.

  According to the present invention, the signal generation unit generates a peripheral speed signal of the inspection object based on a change in the frequency of the measurement light from the inspection object. Therefore, the rotation detection device can accurately determine whether or not the inspection object has rotated a predetermined number of times or more based on the peripheral speed signal.

It is a figure showing an inspection device concerning one embodiment of the present invention. It is the figure which looked at the main rotor apparatus from the side. It is a perspective view of a main rotor apparatus. It is a figure which shows a rotation detection apparatus. It is a figure which shows a signal production | generation part when producing | generating the peripheral speed signal of the container in the end point of a measurement area. FIGS. 6A and 6B are views of the camera and the signal generation unit as viewed from the side. It is a figure which shows another example of arrangement | positioning of a camera and a signal generation part. It is a figure which shows another example of arrangement | positioning of a camera and a signal generation part. It is a figure which shows another example of arrangement | positioning of a camera and a signal generation part.

Embodiments of the present invention will be described below with reference to the drawings. 1 to 9, the same or corresponding components are denoted by the same reference numerals, and redundant description is omitted.
FIG. 1 is a view showing an inspection apparatus according to an embodiment of the present invention. The inspection apparatus is configured to inspect the container 1 being conveyed while conveying the container 1 (see FIGS. 2 and 3) as an inspection object along a predetermined conveyance path.

  In the present embodiment, a cylindrical preform that is a preformed plastic bottle is used as the container 1. As the inspection, for example, an appearance inspection for inspecting the appearance of the container 1 is performed. The inspection device serves as a moving means for transporting the container 1 along a predetermined transport path, in order from the upstream side in the transport direction, the screw transport device 2, the inlet star wheel transport device 3, the main rotor device 4, and the outlet. A star wheel type transfer device 5 is provided.

  The screw type conveying device 2 is disposed adjacent to the inlet star wheel type conveying device 3, and the screw type conveying device 2 includes a screw 2 a that supplies the container 1 to the inlet star wheel type conveying device 3 at regular intervals. is set up. The container 1 is continuously carried in by the screw type conveying device 2, and a fixed interval is formed by the screw 2 a and is conveyed to the inlet star wheel type conveying device 3.

  The inlet star wheel type transfer device 3 is configured to take the container 1 and transfer it into a plurality of pockets 3b (see FIG. 3) provided at equal intervals on the outer periphery of the star wheel 3a. At this time, the container 1 is supported by the star wheel 3a with its mouth 1a (see FIG. 2) facing upward. The outlet star wheel type conveying device 5 is also configured in the same manner as the inlet star wheel type conveying device 3, and takes the container 1 into a plurality of pockets (not shown) provided at equal intervals on the outer periphery of the star wheel 5a for conveyance. . The screw-type transport device 2 is configured so that the spacing between the containers 1 is aligned with the pitch between the pockets 3b of the downstream inlet star wheel-type transport device 3 by the screw 2a.

  FIG. 2 is a side view of the main rotor device 4. FIG. 3 is a perspective view of the main rotor device 4. The main rotor device 4 is a container transport device that holds the container 1 with a suction head 10 as a holding member and transports the container 1 held by the suction head 10 along a predetermined transport path while rotating. As shown in FIG. 2, the main rotor device 4 includes a gantry 11 that is fixed to the floor F, a main rotary shaft 12 that is rotatably supported by the gantry 11, and a main rotary shaft that is provided coaxially with the main rotary shaft 12. 12 and a flat disk 14 that rotates integrally therewith. Further, the main rotor device 4 includes a plurality of suction heads 10 that are supported by the flat disk 14 via support members 15. The support member 15 rotatably supports the suction head 10.

  The main rotor device 4 includes a switching valve 16 for switching between holding and releasing the container 1 by the suction head 10. The switching valve 16 is provided in a gas suction path between a vacuum pump (not shown) as a vacuum source and the suction head 10. The switching valve 16 is a valve for switching connection and disconnection between the vacuum pump and the suction head 10 so that a suction force acts on the suction head 10.

  The suction head 10 includes a head body 20 that sucks and holds the container 1, a head rotation shaft 21 that is connected to the head body 20 and has a communication path 21 a, and a rotary joint (rotary joint) 22 that is connected to the head rotation shaft 21. It has. As shown in FIG. 2, the rotary joint 22 is connected to the switching valve 16 via a tube 23. A gas flow path 20 a is formed in the head body 20, and the gas flow path 20 a is connected to the communication path 21 a of the head rotation shaft 21. A suction port (not shown) is formed on the lower surface of the head main body 20, and the suction port communicates with the gas flow path 20a.

  When a vacuum is formed in the communication path 21 a and the gas flow path 20 a by the vacuum pump, the air in the container 1 is sucked from the suction port of the head body 20, and a vacuum pressure is formed in the container 1. The container 1 is sucked and held by the head body 20 by this vacuum pressure.

  Next, a procedure for sucking and holding the container 1 by the suction head 10 of the main rotor device 4 will be described with reference to FIG. As described above, the inlet star wheel type transfer device 3 supports the container 1 with the mouth portion 1a facing upward. The suction head 10 moves along a predetermined conveyance path while being maintained at a predetermined height by the flat disk 14. When the container 1 reaches the carry-in position P1, the vacuum pump is driven, the communication path 21a and the gas flow path 20a are depressurized, and the container 1 is adsorbed and held by the head body 20.

  When the suction head 10 holding the container 1 by suction moves to the carry-out position P2 (see FIG. 1), the switching valve 16 cuts off the connection between the suction head 10 and the vacuum pump. Then, the vacuum in the container 1 is broken and the container 1 is released from the suction head 10. And the container 1 is conveyed by the exit starwheel type conveying apparatus 5, and is further conveyed by the unloading conveyor 7 to a downstream process.

  The container 1 is conveyed by the main rotor device 4 while rotating within a predetermined rotation section. A mechanism for rotating the container 1 will be described with reference to FIGS. 1 and 2. As shown in FIG. 1, the inspection apparatus includes a rotation mechanism 30 that rotates the container 1. The rotation mechanism 30 is in contact with the suction head 10 to rotate the suction head 10, the belt pulleys 32 and 32 for running the timing belt 31, and the tensioner 33 that applies tension to the timing belt 31. , 33 and a drive device 34 for rotating one of the belt pulleys 32, 32.

  As shown in FIG. 2, the head rotating shaft 21 is provided with a head pulley 35 that rotates integrally with the head rotating shaft 21. The head pulley 35 meshes with the timing belt 31 and rotates as the timing belt 31 travels. Along with the rotation of the head pulley 35, the head body 20 and the container 1 sucked and held by the head body 20 rotate in the direction indicated by the arrow in FIG. In the present embodiment, the main rotor device 4 rotates counterclockwise and the container 1 rotates clockwise. However, the rotation direction of the main rotor device 4 and the container 1 is not limited to this example.

  The inspection apparatus includes a rotation detection device 40 that detects the rotation of the container 1. The rotation detection device 40 will be described with reference to FIG. FIG. 4 is a diagram illustrating the rotation detection device 40. In FIG. 4, the rotation mechanism 30 is omitted. As shown in FIG. 4, the rotation detection device 40 includes a signal generation unit 41 that irradiates the container 1 with light and generates a peripheral speed signal related to the peripheral speed of the container 1, and an optical path configured to change the angle. A tracking mirror 42 as a changing unit and a control unit 44 for controlling the angle of the tracking mirror 42 are provided.

  While the container 1 is moving in a preset measurement section (from the start point A to the end point B in the example of FIG. 4), the signal generator 41 irradiates the container 1 with measurement light via the tracking mirror 42. The measurement light from the container 1 is received through the tracking mirror 42, the peripheral speed signal of the container 1 is generated from the change in the frequency of the measurement light, and this peripheral speed signal is output. The measurement section is in the rotation section of the container 1.

The tracking mirror 42 is disposed on the normal line direction of the main rotor device 4 and is disposed on the optical path of the measurement light emitted from the signal generation unit 41. The peripheral speed of the container 1 is the speed of the surface of the container 1 rotating around its own axis, and is the rotational speed [min ⁻¹ ] of the container 1 and the distance from the axis of the container 1 to the measurement point. It depends on the speed.

  The peripheral speed signal may be a displacement signal indicating that the surface of the container 1 is displaced by a certain reference distance. The reference distance is a preset unit distance and can be arbitrarily selected. An example of the displacement signal is a pulse signal. The period of the displacement signal (for example, one pulse signal) represents the time required for the surface of the container 1 to be displaced by the reference distance. The signal generator 41 continuously outputs a displacement signal each time the surface of the container 1 is displaced by a reference distance. In this embodiment, a pulse signal is used as the peripheral speed signal.

  When the container 1 enters the measurement section, the measurement light from the signal generation unit 41 is applied to the container 1 via the tracking mirror 42. The control unit 44 operates the tracking mirror 42 so that the measurement light follows the container 1 while the container 1 is moving in the measurement section. More specifically, the control unit 44 controls the angle of the tracking mirror 42 so that the measurement light is continuously irradiated toward the reference position of the container 1 while the container 1 is moving in the measurement section. In the present embodiment, the reference position is set to the central axis of the container 1, and the control unit 44 controls the angle of the tracking mirror 42 so that the measurement light is continuously irradiated toward the reference position. The reference position may be a position other than the central axis of the container 1, for example, a position slightly deviated from the central axis of the container 1.

  In this embodiment, the tracking mirror 42 is used as the optical path changing unit. However, an optical member having another configuration may be used as long as the apparatus can change the optical path. For example, as the optical path changing unit, an optical element such as a lens or a prism, or a combination of these optical elements may be used, and the optical path may be changed by controlling the position and angle of the optical element. Further, an optical element that can change the refractive index, such as a liquid lens, may be used, and the optical path may be changed by controlling the change in the refractive index.

  FIG. 5 is a diagram illustrating the signal generation unit 41 when the peripheral speed signal of the container 1 at the end point B of the measurement section is generated. As shown in FIGS. 4 and 5, while the container 1 is moving in the measurement section, the signal generation unit 41 continues to irradiate the outer peripheral surface of the container 1 with the measurement light via the tracking mirror 42, and the tracking mirror 42. The measurement light from the container 1 continues to be received via. The signal generation unit 41 generates a peripheral speed signal of the container 1 moving in the measurement section based on a change between the frequency of emitted light and the frequency of received light.

  The container 1 is moved by the main rotor device 4 while rotating in the rotation section. According to this embodiment, by changing the angle of the tracking mirror 42 according to the movement of the container 1, that is, by causing the moving container 1 to follow the measurement light, the signal generating unit 41 is influenced by the moving speed of the container 1 itself. The peripheral speed signal indicating only the peripheral speed of the container 1 can be generated without receiving the signal.

  When the container 1 leaves the measurement section, the control unit 44 returns the angle of the tracking mirror 42 to the initial position. When the next container 1 enters the measurement section, the measurement light from the signal generation unit 41 is irradiated to the next container 1. The control unit 44 controls the angle of the tracking mirror 42 so that the measurement light is continuously irradiated toward the reference position of the next container 1. In this way, the signal generation unit 41 acquires peripheral speed signals of all containers 1 that pass through the measurement section.

  The rotation detection device 40 further includes a rotation determination unit 45 that determines whether the container 1 has rotated a predetermined number of times or more based on the peripheral speed signal. The rotation determination unit 45 is connected to the signal generation unit 41, and the peripheral speed signal of the container 1 is sent to the rotation determination unit 45. The rotation determination unit 45 stores (stores) a predetermined threshold value. This predetermined threshold value is a value used to determine whether or not the container 1 has rotated a predetermined number of times or more (for example, one round or more) within the measurement section.

  As described above, in the present embodiment, a pulse signal indicating that the surface of the container 1 has been displaced by a certain reference distance is used as the peripheral speed signal, and the signal generator 41 displaces the surface of the container 1 by the reference distance. A pulse signal is continuously output each time. The rotation determination unit 45 obtains the peripheral speed index value indicating the peripheral speed of the container 1 when moving in the measurement section, that is, the number of pulse signals (number of pulses) when moving in the measurement section from the pulse signal. Then, it is determined whether or not the number of pulse signals exceeds a predetermined threshold value. When the number of pulse signals exceeds a predetermined threshold value, the rotation determination unit 45 determines that the container 1 has rotated a predetermined number of times or more while moving in the measurement section. Since the number of pulse signals that are peripheral speed index values indicates the peripheral speed of the container 1 that does not reflect the moving speed of the container 1 itself, the rotation detection device 40 determines whether the container 1 has rotated a predetermined number of times or not. Can be accurately detected.

  When the number of pulse signals does not reach the predetermined threshold value, the rotation determination unit 45 identifies the container 1 as an untested container. The specified container 1 is removed by a mechanism (not shown). Therefore, the uninspected container is prevented from being transferred to the downstream process.

  The signal generation unit 41 or the rotation determination unit 45 may calculate the displacement (movement distance) of the surface of the container 1 from the number of pulse signals (number of pulses) and the reference distance. For example, when a pulse signal is generated four times within a certain measurement time, the distance obtained by multiplying the reference distance by 4 is the distance that the surface of the container 1 has moved within that measurement time. Furthermore, by dividing the reference distance by the period of the pulse signal, it is possible to obtain the surface speed of the container 1, that is, the peripheral speed. Also in this case, the rotation determination unit 45 similarly determines whether or not the container 1 has rotated a predetermined number of times or more.

  Further, the signal generation unit 41 or the rotation determination unit 45 may calculate the movement distance of the surface of the container 1 from the peripheral speed of the container 1. Specifically, the moving speed of the surface of the container 1 is calculated by multiplying the peripheral speed of the container 1 by the elapsed time. In this case, the rotation determination unit 45 determines whether the moving distance of the surface of the container 1 has exceeded a predetermined threshold value. When the movement distance of the surface of the container 1 exceeds a predetermined threshold value, the rotation determination unit 45 determines that the container 1 has rotated a predetermined number of times or more while moving in the measurement section.

  The measurement light from the container 1 received by the signal generator 41 includes scattered light scattered on the surface of the container 1 and reflected light reflected on the surface of the container 1. A laser Doppler velocimeter may be used as the signal generator 41. The laser Doppler velocimeter irradiates the container 1 with measurement light such as laser light, receives scattered light scattered on the surface of the container 1 as measurement light from the container 1, and based on a change in the frequency of the measurement light, the container 1 Measure the peripheral speed.

  The inspection device includes a camera 50 that is an imaging device that captures an image of the container 1 that moves in the measurement section via the tracking mirror 42, and an image processing device 51 that inspects the container 1 based on the image acquired by the camera 50. I have. The camera 50 is configured to image the appearance of the container 1 a predetermined number of times while the container 1 is moving in the measurement section. The image processing device 51 is connected to the camera 50 and inspects the container 1 based on the image of the container 1 captured by the camera 50.

  FIGS. 6A and 6B are views of the camera 50 and the signal generation unit 41 as viewed from the side. As illustrated in FIG. 6A, the camera 50 is disposed on the signal generation unit 41, and both the camera 50 and the signal generation unit 41 face the tracking mirror 42. With such an arrangement, the camera 50 and the signal generation unit 41 can simultaneously acquire the image of the container 1 and the peripheral speed signal of the container 1 via the tracking mirror 42. As illustrated in FIG. 6B, the camera 50 may be disposed below the signal generation unit 41.

  FIG. 7 is a diagram illustrating another example of the arrangement of the camera 50 and the signal generation unit 41. In the example of FIG. 7, the camera 50 and the signal generator 41 are arranged at different positions. The rotation detection device 40 further includes a tracking mirror 52. In the following description, the tracking mirror 42 is referred to as a first tracking mirror 42, and the tracking mirror 52 is referred to as a second tracking mirror 52.

  The second tracking mirror 52 is a light guide for guiding the measurement light from the container 1 to the camera 50. The control unit 44 controls the angle of the second tracking mirror 52 so that the measurement light from the container 1 is guided to the camera 50 while the container 1 is moving in the measurement section. The camera 50 images the appearance of the container 1 via the second tracking mirror 52. In the present embodiment, the second tracking mirror 52 is used as the light guide. However, any device having another configuration may be used as long as the device can guide the measurement light to the camera 50. For example, an optical element such as a lens or a prism, or a combination of these optical elements may be used as the light guide, and the optical path may be changed by controlling the position and angle of the optical element. Further, an optical element that can change the refractive index, such as a liquid lens, may be used, and the optical path may be changed by controlling the change in the refractive index.

  While the container 1 is moving in the measurement section, the control unit 44 controls the angle of the tracking mirror 42 so that the measurement light emitted from the signal generation unit 41 is continuously emitted toward the reference position of the container 1. Similarly, while the container 1 is moving in the measurement section, the control unit 44 controls the angle of the second tracking mirror 52 so that the camera 50 can image the surface of the container 1. The camera 50 and the second tracking mirror 52 are disposed on the same side as the signal generator 41 with respect to the container 1. In the example of FIG. 7, the signal generation unit 41 is located on the right side of the camera 50, but the signal generation unit 41 may be located on the left side of the camera 50.

  FIG. 8 is a diagram showing still another example of the arrangement of the camera 50 and the signal generation unit 41. In the example of FIG. 8, the camera 50 is disposed on the opposite side of the signal generation unit 41. More specifically, the positions of the signal generator 41 and the camera 50 are symmetric with respect to the main rotor device 4. The camera 50 and the second tracking mirror 52 are disposed on the opposite side of the signal generation unit 41 with respect to the container 1. While the container 1 is moving in the measurement section, the control unit 44 adjusts the angle of the first tracking mirror 42 so that the measurement light emitted from the signal generation unit 41 is continuously emitted toward the reference position of the container 1. Control. Similarly, the controller 44 controls the angle of the second tracking mirror 52 so that the camera 50 can image the surface of the container 1 while the container 1 is moving in the measurement section.

  FIG. 9 is a diagram showing still another example of the arrangement of the camera 50 and the signal generation unit 41. The arrangement shown in FIG. 9 is the same as the arrangement shown in FIG. 8 in that the camera 50 and the second tracking mirror 52 are arranged on the opposite side of the signal generation unit 41, but the signal generation unit 41 shown in FIG. Is different from the signal generator 41 shown in FIG. As long as the signal generation unit 41 can irradiate the container 1 with the measurement light via the tracking mirror 42, the position of the signal generation unit 41 is not limited to the positions shown in FIGS.

  Although the embodiment of the present invention has been described so far, the present invention is not limited to the above-described embodiment, and it is needless to say that the present invention may be implemented in various different forms within the scope of the technical idea. For example, although the measurement section of the above-described embodiment is curved, the measurement section may be a straight line. That is, the rotation detection device of the present invention may be provided adjacent to a transport device that transports the inspection object linearly.

  In the above embodiment, a preform is used as the container 1 that is an inspection object. However, as another example of the inspection object, a container made of PET (polyethylene terephthalate), a cylindrical container such as a so-called PET bottle is used. Can be mentioned. However, the inspection object is not limited to a cylindrical shape, and may be a polygonal shape as long as the measurement light can be transmitted and received by the signal generation unit 41. Furthermore, the inspection object is not limited to a container, and may be another article.

  The peripheral speed index value indicating the peripheral speed of the inspection object when the inspection object is moving in the measurement section may be a numerical value directly indicating the peripheral speed of the inspection object, or the surface speed of the inspection object. A numerical value indicating the displacement in the circumferential direction may be used. For example, when a laser Doppler velocimeter is used as the signal generation unit 41, the signal generation unit 41 generates the speed of the surface of the container 1 as a peripheral speed index value.

DESCRIPTION OF SYMBOLS 1,100 Container 2,102 Screw type conveying apparatus 3,103 Inlet star wheel type conveying apparatus 4,104 Main rotor apparatus 5,105 Outlet star wheel type conveying apparatus 7,107 Unloading conveyor 10,108 Holding member 11 Base 12 Main rotation Shaft 14 Flat disk 15 Support member 16 Switching valve 20 Head body 20a Gas flow path 21 Head rotation shaft 21a Communication path 22 Rotary joint 23 Tube 30 Rotating mechanism 31, 110 Timing belt 32 Belt pulley 33, 112 Tensioner 34, 113 Drive device 35 Head pulley 40 Rotation detection device 41 Signal generation unit 42 Tracking mirror 44 Control unit 45 Rotation determination unit 50 Camera (imaging device)
51 Image Processing Device 52 Tracking Mirror

Claims (8)

A rotation detection device that detects rotation of an inspection object that moves while rotating,
An optical path changing unit for changing an optical path of light;
Irradiating the inspection object with measurement light through the optical path changing unit, receiving measurement light from the inspection object through the optical path changing unit, and based on a change in frequency of the measurement light, the inspection object A signal generator for generating a peripheral speed signal related to the peripheral speed of the object;
A control unit that operates the optical path changing unit so that the measurement light is continuously irradiated toward the reference position of the inspection object while the inspection object is moving in the measurement section;
A rotation detection device, comprising: a rotation determination unit that determines, based on the peripheral speed signal, whether or not the inspection object has rotated a predetermined number of times while moving in the measurement section.   When the peripheral speed index value obtained from the peripheral speed signal exceeds a predetermined threshold value, the rotation determination unit rotates more than the predetermined number of times while the inspection object moves in the measurement section. The rotation detection device according to claim 1, wherein it is determined that the rotation has been performed. The optical path changing unit is a tracking mirror configured to change an angle,
The control unit controls an angle of the tracking mirror so that the measurement light is continuously irradiated toward a reference position of the inspection object while the inspection object is moving in the measurement section. The rotation detection device according to claim 1 or 2. The rotation detection device according to any one of claims 1 to 3,
A transfer device for moving the inspection object while rotating;
An imaging device for imaging the inspection object moving in the measurement section;
An inspection apparatus comprising: an image processing apparatus that inspects the inspection object based on an image captured by the imaging apparatus.   The inspection apparatus according to claim 4, wherein the imaging apparatus is disposed above or below the signal generation unit and images the inspection object via the optical path changing unit. A light guide for guiding measurement light from the inspection object to the imaging device;
The control unit operates the light guide unit so that measurement light from the inspection object is guided to the imaging device while the inspection object is moving in the measurement section,
The inspection apparatus according to claim 4, wherein the imaging apparatus images the inspection object through the light guide unit.   The inspection apparatus according to claim 6, wherein the imaging device and the light guide unit are arranged on the same side as the signal generation unit with respect to the inspection object.   The inspection apparatus according to claim 6, wherein the imaging device and the light guide unit are arranged on a side opposite to the signal generation unit with respect to the inspection object.

Images