JP2016054364A - Crystal vibration element - Google Patents

Crystal vibration element Download PDF

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JP2016054364A
JP2016054364A JP2014178618A JP2014178618A JP2016054364A JP 2016054364 A JP2016054364 A JP 2016054364A JP 2014178618 A JP2014178618 A JP 2014178618A JP 2014178618 A JP2014178618 A JP 2014178618A JP 2016054364 A JP2016054364 A JP 2016054364A
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vibrating arm
arm portion
vibration
portions
base
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JP6419491B2 (en
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井上　憲司
Kenji Inoue
憲司 井上
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Kyocera Crystal Device Corp
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Kyocera Crystal Device Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a vibration element capable of maintaining an effective length of each vibration arm part if the vibration arm is folded to shorten the total length of the vibration element.SOLUTION: A vibration element 10 includes: a base 11; two vibration arms 12a, 12b extending from the base 11; and excitation electrodes 21a, 21b formed on the vibration arms 12a, 12b. The two vibration arms 12a, 12b are folded to from inner vibration arms 121a, 121b and outer vibration arms 122a, 122b, respectively, in a manner to be symmetrical with respect to a center line 101 of an extended direction 100. Further, the excitation electrodes 21a, 21b are formed only on the outer vibration arms 122a, 122b.SELECTED DRAWING: Figure 1

Description

本発明は、例えば基準信号源やクロック信号源に用いられる水晶振動素子に関する。以下、水晶振動素子の一例として、音叉型屈曲水晶振動素子（以下「振動素子」と略称する。）について説明する。   The present invention relates to a crystal resonator element used for a reference signal source or a clock signal source, for example. Hereinafter, a tuning fork-type bending quartz crystal vibrating element (hereinafter abbreviated as “vibrating element”) will be described as an example of a quartz crystal vibrating element.

図３は、関連技術１の振動素子を示す平面図である。以下、この図面に基づき説明する。   FIG. 3 is a plan view showing the vibration element of the related art 1. FIG. Hereinafter, description will be given based on this drawing.

本関連技術１の振動素子９００は、水晶のＺ板からなり、基部９１１と、基部９１１から平行に伸びる一対の振動腕部９１２ａ，９１２ｂと、を備えている。振動腕部９１２ａ，９１２ｂには、それぞれ溝部９１３ａ，９１３ｂが形成されている。   The vibration element 900 according to the related technique 1 includes a base 911 and a pair of vibration arms 912a and 912b extending in parallel from the base 911. Groove portions 913a and 913b are formed in the vibrating arm portions 912a and 912b, respectively.

振動腕部９１２ａ，９１２ｂの側面と溝部９１３ａ，９１３ｂとには、励振電極９２１ａ，９２１ｂが形成されている。基部９１１には、二つのパッド電極９２２ａ，９２２ｂが形成されている。パッド電極９２２ａ，９２２ｂは、互いに絶縁されるように、分離された状態で配置されている。振動腕部９１２ａの側面及び振動腕部９１２ｂの溝部９１３ｂに形成された励振電極９２１ａと、基部９１１に形成されたパッド電極９２２ａとは、同じ極性同士になるように配線及び接続されている。振動腕部９１２ｂの側面及び振動腕部９１２ａの溝部９１３ａに形成された励振電極９２１ｂと、基部９１１に形成されたパッド電極９２２ｂとは、同じ極性同士になるように配線及び接続されている。   Excitation electrodes 921a and 921b are formed on the side surfaces of the vibrating arm portions 912a and 912b and the groove portions 913a and 913b. Two pad electrodes 922 a and 922 b are formed on the base 911. The pad electrodes 922a and 922b are arranged in a separated state so as to be insulated from each other. The excitation electrode 921a formed on the side surface of the vibrating arm portion 912a and the groove portion 913b of the vibrating arm portion 912b and the pad electrode 922a formed on the base portion 911 are wired and connected to have the same polarity. The excitation electrode 921b formed on the side surface of the vibrating arm portion 912b and the groove portion 913a of the vibrating arm portion 912a and the pad electrode 922b formed on the base portion 911 are wired and connected to have the same polarity.

パッド電極９２２ａ，９２２ｂは、図示を略すが、パッケージ側のパッド電極に導電性接着剤を介して固定されると同時に電気的に接続される。パッド電極９２２ａ，９２２ｂに交番電圧が印加されると、発生した電界により振動腕部９１２ａ，９１２ｂに伸縮が生じ、これにより振動素子９００に所定の共振周波数の屈曲振動が生じる。   Although not shown, the pad electrodes 922a and 922b are electrically connected to the pad electrode on the package side via a conductive adhesive at the same time. When an alternating voltage is applied to the pad electrodes 922a and 922b, the vibrating arms 912a and 912b are expanded and contracted by the generated electric field, and thereby bending vibration of a predetermined resonance frequency is generated in the vibrating element 900.

振動素子９００は、例えば携帯電話などの電子機器において、同期信号源として用いられている。近年の電子機器の小型化に伴い、そこに使われる振動素子９００にも小型化が求められている。振動素子９００の小型化にあたっては、振動素子９００の全長（長手方向の長さ）すなわち基部９１１又は振動腕部９１２ａ，９１２ｂの長さを短くする必要がある。   The vibration element 900 is used as a synchronization signal source in an electronic device such as a mobile phone. With recent miniaturization of electronic devices, the vibration element 900 used therein is also required to be miniaturized. In order to reduce the size of the vibration element 900, it is necessary to shorten the entire length (length in the longitudinal direction) of the vibration element 900, that is, the length of the base portion 911 or the vibration arm portions 912a and 912b.

基部９１１の長さを短くすると、振動腕部９１２ａ，９１２ｂからの振動が、基部９１１内で十分に吸収されず、基部９１１の固定部分を介して、外部のパッケージなどに漏れてしまう問題（以下「振動漏れ」という。）が発生する。この振動漏れは、振動エネルギの損失となるため、振動素子９００に重要な特性値であるＣＩ（Crystal Impedance）を劣化すなわち増加させる要因となる。   When the length of the base portion 911 is shortened, the vibration from the vibrating arm portions 912a and 912b is not sufficiently absorbed in the base portion 911 and leaks to an external package or the like via the fixed portion of the base portion 911 (hereinafter referred to as the base portion 911). "Vibration leakage") occurs. This vibration leakage is a loss of vibration energy, and causes deterioration (increase) in CI (Crystal Impedance), which is an important characteristic value for the vibration element 900.

また、振動腕部９１２ａ，９１２ｂの長さＬを短くすると、次式から明らかなように、所定の振動周波数ｆを得るために振動腕部９１２ａ，９１２ｂの幅Ｗを狭くする必要がある。そのため、幅Ｗを狭くすることにより、製造が困難になる、特性が劣化する等の問題を引き起こす。
ｆ＝Ｃ（Ｗ／Ｌ２） ここで、Ｃは定数である。 Further, when the length L of the vibrating arm portions 912a and 912b is shortened, the width W of the vibrating arm portions 912a and 912b needs to be narrowed in order to obtain a predetermined vibration frequency f as is apparent from the following equation. Therefore, narrowing the width W causes problems such as difficulty in manufacture and deterioration of characteristics.
f = C (W / L 2 ) where C is a constant.

一方、特許文献１〜３には、振動腕部をＵ字状に折り曲げることにより、基部を短くすることなく、かつ振動腕部の実質的な長さを短くすることなく、全長を短くしようとする振動素子が開示されている（以下「関連技術２」という。）。   On the other hand, Patent Documents 1 to 3 attempt to shorten the overall length without bending the base and shortening the substantial length of the vibrating arm by bending the vibrating arm into a U shape. (Hereinafter referred to as “Related Art 2”).

特開２００８−１９９２８３号公報JP 2008-199283 A 特開平０６−１１２７６１号公報Japanese Patent Laid-Open No. 06-112761 特開２０１３−１４３７７９号公報JP2013-1443779A 特開２０１１−１５１５６７号公報JP 2011-151567 A

しかしながら、関連技術２の振動素子は、その全長を短くできるものの、次のような問題があった。   However, the vibration element of Related Art 2 has the following problems, although its overall length can be shortened.

関連技術２の振動素子は、Ｕ字状に折り曲げられた振動腕部の複数の棒状部分がそれぞれ伸縮するように励振電極が形成されている。この場合、振動腕部を屈曲振動モードで振動させようとすると、その折り曲げ箇所を中心に対称な伸縮が発生するので、その折り曲げ箇所が振動の節になりやすい。つまり、振動腕部は、基部に固定された基端側と折れ曲げ箇所との二点で支持されることにより、一次振動ではなく、二次振動等の高次振動モードで振動するおそれがあった。このことは、振動腕部をＵ字状に折り曲げることにより、振動腕部の実効的な長さを短くしてしまうことを意味する。   In the resonator element according to Related Art 2, excitation electrodes are formed so that a plurality of rod-shaped portions of the vibrating arm portion bent in a U-shape expands and contracts, respectively. In this case, if the vibrating arm portion is vibrated in the bending vibration mode, a symmetrical expansion and contraction occurs around the bent portion, and the bent portion tends to become a vibration node. In other words, the vibrating arm portion is supported at two points, that is, the base end side fixed to the base portion and the bent portion, and may vibrate in a higher order vibration mode such as a secondary vibration instead of a primary vibration. It was. This means that the effective length of the vibrating arm portion is shortened by bending the vibrating arm portion into a U shape.

そこで、本発明の目的は、振動腕部を折り曲げて振動素子の全長を短くした場合でも、振動腕部の実効的な長さを保持し得る、振動素子を提供することにある。   Accordingly, an object of the present invention is to provide a vibration element that can retain the effective length of the vibration arm even when the vibration arm is bent to shorten the entire length of the vibration element.

本発明に係る振動素子は、
基部と、
この基部から延設された二本の振動腕部と、
これらの振動腕部に形成された励振電極と、
を備えた水晶振動素子において、
前記二本の振動腕部は、延設された方向の中心線に対して互いに対称になるようにそれぞれ内側振動腕部と外側振動腕部とに折り曲げられ、
前記外側振動腕部にのみ前記励振電極が形成された、
ことを特徴とする。 The vibration element according to the present invention is
The base,
Two vibrating arms extending from the base,
Excitation electrodes formed on these vibrating arms,
In the crystal resonator element with
The two vibrating arm portions are bent into an inner vibrating arm portion and an outer vibrating arm portion, respectively, so as to be symmetric with respect to the center line in the extending direction,
The excitation electrode was formed only on the outer vibrating arm portion,
It is characterized by that.

本発明によれば、二本の振動腕部が互いに対称になるようにそれぞれ内側振動腕部と外側振動腕部とに折り曲げられ、外側振動腕部にのみ励振電極が形成されたことにより、外側振動腕部のみが伸縮して屈曲振動し、これに内側振動腕部が付勢されて屈曲振動するので、内側振動腕部と外側振動腕部との折り曲げ箇所が振動の節になりにくい。したがって、振動腕部を折り曲げて振動素子の全長を短くした場合でも、振動腕部の実効的な長さを保持できる。   According to the present invention, the two vibrating arm portions are bent into the inner vibrating arm portion and the outer vibrating arm portion so as to be symmetrical with each other, and the excitation electrode is formed only on the outer vibrating arm portion. Since only the vibrating arm portion expands and contracts to bend and vibrate, and the inner vibrating arm portion is urged to bend and vibrate, the bending portion between the inner vibrating arm portion and the outer vibrating arm portion is unlikely to become a vibration node. Therefore, even when the vibrating arm portion is bent to shorten the entire length of the vibrating element, the effective length of the vibrating arm portion can be maintained.

実施形態１の振動素子を示す平面図である。FIG. 3 is a plan view showing the resonator element according to the first embodiment. 図２［Ａ］は図１におけるII−II線断面図であり、図２［Ｂ］は図１の振動素子を素子搭載部材に実装した状態を示す概略断面図である。2A is a cross-sectional view taken along line II-II in FIG. 1, and FIG. 2B is a schematic cross-sectional view illustrating a state where the vibration element of FIG. 1 is mounted on an element mounting member. 関連技術１の振動素子を示す平面図である。FIG. 12 is a plan view showing a vibration element of Related Art 1.

以下、添付図面を参照しながら、本発明を実施するための形態（以下「実施形態」という。）について説明する。なお、本明細書及び図面において、実質的に同一の構成要素については同一の符号を用いる。図面に描かれた形状は、当業者が理解しやすいように描かれているため、実際の寸法及び比率とは必ずしも一致していない。   DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments for carrying out the present invention (hereinafter referred to as “embodiments”) will be described with reference to the accompanying drawings. In the present specification and drawings, the same reference numerals are used for substantially the same components. The shapes depicted in the drawings are drawn so as to be easily understood by those skilled in the art, and thus do not necessarily match the actual dimensions and ratios.

図１は、実施形態１の振動素子の平面図である。図２［Ａ］は図１におけるII−II線断面図であり、図２［Ｂ］は図１の振動素子を素子搭載部材に実装した状態を示す概略断面図である。以下、図１及び図２に基づき説明する。   FIG. 1 is a plan view of the resonator element according to the first embodiment. 2A is a cross-sectional view taken along line II-II in FIG. 1, and FIG. 2B is a schematic cross-sectional view illustrating a state where the vibration element of FIG. 1 is mounted on an element mounting member. Hereinafter, a description will be given based on FIG. 1 and FIG.

本実施形態１の振動素子１０は、基部１１と、基部１１から延設された二本の振動腕部１２ａ，１２ｂと、振動腕部１２ａ，１２ｂに形成された励振電極２１ａ，２１ｂとを、基本的に備えている。二本の振動腕部１２ａ，１２ｂは、延設された方向１００の中心線１０１に対して互いに対称になるように、それぞれ内側振動腕部１２１ａ，１２１ｂと外側振動腕部１２２ａ，１２２ｂとに折り曲げられている。すなわち、振動腕部１２ａは内側振動腕部１２１ａと外側振動腕部１２２ａとを有し、振動腕部１２ｂは内側振動腕部１２１ｂと外側振動腕部１２２ｂとを有する。そして、外側振動腕部１２２ａ，１２２ｂにのみ励振電極２１ａ，２１ｂが形成されている。   The vibration element 10 according to the first embodiment includes a base 11, two vibration arms 12a and 12b extending from the base 11, and excitation electrodes 21a and 21b formed on the vibration arms 12a and 12b. Basically equipped. The two vibrating arm portions 12a and 12b are bent into inner vibrating arm portions 121a and 121b and outer vibrating arm portions 122a and 122b, respectively, so as to be symmetrical with respect to the center line 101 in the extending direction 100. It has been. That is, the vibrating arm portion 12a has an inner vibrating arm portion 121a and an outer vibrating arm portion 122a, and the vibrating arm portion 12b has an inner vibrating arm portion 121b and an outer vibrating arm portion 122b. Excitation electrodes 21a and 21b are formed only on the outer vibrating arms 122a and 122b.

詳しく言えば、振動素子１０は、基部１１から第一方向としての方向１００へ延設された突出部１４を更に備えている。二本の振動腕部１２ａ，１２ｂは、基部１１から突出部１４を介して延設されている。二本の内側振動腕部１２１ａ，１２１ｂは、突出部１４の先端から互いに離れる方向へ延びてから、方向１００の反対側へ延びるように、延設されている。二本の外側振動腕部１２２ａ，１２２ｂは、内側振動腕部１２１ａ，１２１ｂの先端から互いに離れる方向へ延びてから、方向１００と同一側へ延びるように、延設されている。   Specifically, the vibration element 10 further includes a protrusion 14 that extends from the base 11 in the direction 100 as the first direction. The two vibrating arm portions 12 a and 12 b extend from the base portion 11 via the protruding portion 14. The two inner vibrating arm portions 121 a and 121 b are extended so as to extend in a direction away from each other from the tip of the protruding portion 14 and then extend in the opposite direction of the direction 100. The two outer vibrating arm portions 122 a and 122 b extend so as to extend from the tips of the inner vibrating arm portions 121 a and 121 b in a direction away from each other and then extend to the same side as the direction 100.

内側振動腕部１２１ａ及び外側振動腕部１２２ａの延設された方向に直交する方向の寸法を幅とした場合、内側振動腕部１２１ａの幅Ｗ１は外側振動腕部１２２ａの幅Ｗ２よりも短い。内側振動腕部１２１ｂ及び外側振動腕部１２２ｂについても同様である。   When the width in the direction perpendicular to the extending direction of the inner vibrating arm portion 121a and the outer vibrating arm portion 122a is defined as the width, the width W1 of the inner vibrating arm portion 121a is shorter than the width W2 of the outer vibrating arm portion 122a. The same applies to the inner vibrating arm 121b and the outer vibrating arm 122b.

内側振動腕部１２１ａ及び外側振動腕部１２２ａの延設された方向の寸法を長さとした場合、内側振動腕部１２１ａの長さＬ１は外側振動腕部１２２ａの長さＬ２の半分以下である。内側振動腕部１２１ｂ及び外側振動腕部１２２ｂについても同様である。   When the dimension in the extending direction of the inner vibrating arm portion 121a and the outer vibrating arm portion 122a is a length, the length L1 of the inner vibrating arm portion 121a is less than or equal to half the length L2 of the outer vibrating arm portion 122a. The same applies to the inner vibrating arm 121b and the outer vibrating arm 122b.

突出部１４の先端と内側振動腕部の１２１ａ，１２１ｂの基端との連結部分をそれぞれ内側折り曲げ箇所１２３ａ，１２３ｂと呼び、内側振動腕部の１２１ａ，１２１ｂの先端と外側振動腕部の１２２ａ，１２２ｂの基端との連結部分をそれぞれ外側折り曲げ箇所１２４ａ，１２４ｂと呼ぶ。   The connecting portions between the distal end of the projecting portion 14 and the base ends of the inner vibrating arm portions 121a and 121b are referred to as inner bent portions 123a and 123b, respectively, and the distal ends of the inner vibrating arm portions 121a and 121b and the outer vibrating arm portion 122a and Portions connected to the base end of 122b are referred to as outer bent portions 124a and 124b, respectively.

内側振動腕部１２１ａ，１２１ｂ及び外側振動腕部１２２ａ，１２２ｂの延設方向は、方向１００に平行となっているが、中心線１０１に対して互いに対称であれば、方向１００に非平行としてもよい。内側折り曲げ箇所１２３ａ，１２３ｂ及び外側折り曲げ箇所１２４ａ，１２４ｂは、直線状になっているが、曲線状や折れ線状などとしてもよい。   The extending directions of the inner vibrating arm portions 121a and 121b and the outer vibrating arm portions 122a and 122b are parallel to the direction 100, but may be non-parallel to the direction 100 as long as they are symmetrical with respect to the center line 101. Good. The inner bent portions 123a and 123b and the outer bent portions 124a and 124b are linear, but may be curved or bent.

基部１１は、平面視略四角形状の平板であり、その一辺に突出部１４が設けられている。突出部１４も、平面視略四角形状の平板であり、その先端に内側折り曲げ箇所１２３ａ，１２３ｂを介して内側振動腕部の１２１ａ，１２１ｂの基端が連結されている。   The base 11 is a flat plate having a substantially rectangular shape in plan view, and a protruding portion 14 is provided on one side thereof. The projecting portion 14 is also a flat plate having a substantially rectangular shape in plan view, and the base ends of the inner vibrating arm portions 121a and 121b are connected to the distal ends thereof via the inner bent portions 123a and 123b.

次に、振動素子１０の構成について更に詳しく説明する。   Next, the configuration of the vibration element 10 will be described in more detail.

図１及び図２［Ａ］に示すように、振動素子１０は、水晶振動片１５と、水晶振動片１５に設けられた励振電極２１ａ，２１ｂ、パッド電極２２ａ，２２ｂ、周波数調整用金属膜２３ａ，２３ｂ及び配線パターン２４ａ，２４ｂとから、主に構成されている。   As shown in FIG. 1 and FIG. 2 [A], the vibration element 10 includes a crystal vibrating piece 15, excitation electrodes 21a and 21b, pad electrodes 22a and 22b provided on the crystal vibrating piece 15, and a metal film 23a for frequency adjustment. , 23b and wiring patterns 24a, 24b.

水晶振動片１５は、例えば成膜技術、フォトリソグラフィ技術、化学エッチング技術によりＺ板から音叉状に加工され、基部１１、突出部１４、振動腕部１２ａ，１２ｂなどにより概略構成される。振動腕部１２ａ，１２ｂには、水晶を挟んで対向する平面同士に同極となるように励振電極２１ａ，２１ｂがそれぞれ設けられている。   The quartz crystal vibrating piece 15 is processed into a tuning fork shape from a Z plate by, for example, a film forming technique, a photolithography technique, and a chemical etching technique, and is roughly configured by a base portion 11, a protruding portion 14, vibrating arm portions 12a and 12b, and the like. Excitation electrodes 21a and 21b are respectively provided on the vibrating arm portions 12a and 12b so as to have the same polarity on the planes facing each other across the crystal.

水晶の結晶は三方晶系である。水晶の頂点を通る結晶軸をＺ軸、Ｚ軸に垂直な平面内の稜線を結ぶ三つの結晶軸をＸ軸、Ｘ軸及びＺ軸に直交する座標軸をＹ軸とする。ここで、これらのＸ軸、Ｙ軸及びＺ軸からなる座標系をＸ軸を中心として±５度の範囲で回転させたときの回転後のＹ軸及びＺ軸を、それぞれＹ’軸及びＺ’軸とする。この場合、本実施形態１では、二本の外側振動腕部１２２ａ，１２２ｂの延設方向がＹ’軸の方向であり、二本の外側振動腕部１２２ａ，１２２ｂの並ぶ方向がＸ軸の方向である。   Quartz crystals are trigonal. A crystal axis passing through the crystal apex is defined as a Z axis, three crystal axes connecting ridge lines in a plane perpendicular to the Z axis are defined as an X axis, and a coordinate axis orthogonal to the X axis and the Z axis is defined as a Y axis. Here, when the coordinate system consisting of these X, Y, and Z axes is rotated within a range of ± 5 degrees around the X axis, the rotated Y axis and Z axis are respectively represented as Y ′ axis and Z axis. 'As axis. In this case, in the first embodiment, the extending direction of the two outer vibrating arm portions 122a and 122b is the Y′-axis direction, and the direction in which the two outer vibrating arm portions 122a and 122b are arranged is the X-axis direction. It is.

図２［Ａ］に基づき詳しく説明すると、外側振動腕部１２２ａには、水晶を挟んで対向する平面同士が同極となるように、両側面に励振電極２１ａが設けられ、表裏面の溝部１３ａに励振電極２１ｂが設けられる。同様に、外側振動腕部１２２ｂには、水晶を挟んで対向する平面同士に同極となるように、両側面に励振電極２１ｂが設けられ、表裏面の溝部１３ｂに励振電極２１ａが設けられる。したがって、外側振動腕部１２２ａにおいては両側面に設けられた励振電極２１ａと溝部１３ａ内に設けられた励振電極２１ｂが異極同士となり、外側振動腕部１２２ｂにおいては両側面に設けられた励振電極２１ｂと溝部１３ｂ内に設けられた励振電極２１ａが異極同士となる。このとき、外側振動腕部１２２ａにおいては両側面の励振電極２１ａと溝部１３ａ内の励振電極２１ｂとが平行平板電極となり、それらの電極間で大きな電界強度が得られる。外側振動腕部１２２ｂにおいても同様である。   Describing in detail with reference to FIG. 2A, the outer vibrating arm portion 122a is provided with excitation electrodes 21a on both side surfaces so that the planes facing each other across the crystal have the same polarity, and the groove portion 13a on the front and back surfaces. Is provided with an excitation electrode 21b. Similarly, in the outer vibrating arm portion 122b, excitation electrodes 21b are provided on both side surfaces so as to have the same polarity on opposite surfaces across the crystal, and excitation electrodes 21a are provided in the groove portions 13b on the front and back surfaces. Therefore, in the outer vibrating arm portion 122a, the excitation electrode 21a provided on both side surfaces and the excitation electrode 21b provided in the groove portion 13a have different polarities, and in the outer vibrating arm portion 122b, the excitation electrodes provided on both side surfaces. The excitation electrode 21a provided in 21b and the groove part 13b becomes different polarity. At this time, in the outer vibrating arm portion 122a, the excitation electrode 21a on both sides and the excitation electrode 21b in the groove 13a become parallel plate electrodes, and a large electric field strength is obtained between these electrodes. The same applies to the outer vibrating arm portion 122b.

外側振動腕部１２２ａ，１２２ｂの長手方向には、それぞれ溝部１３ａ，１３ｂが設けられている。溝部１３ａ，１３ｂの本数は、特に制限はなく、例えば外側振動腕部１２２ａの表裏面に二本ずつ及び外側振動腕部１２２ｂの表裏面に二本ずつ設けてもよいし、外側振動腕部１２２ａの表裏面に一本ずつ及び外側振動腕部１２２ｂの表裏面に一本ずつ設けてもよい。なお、溝部１３ａ，１３ｂは、外側振動腕部１２２ａの表裏面のどちらか一方にのみ設けてもよいし、外側振動腕部１２２ｂの表裏面のどちらか一方にのみ設けてもよい。   Groove portions 13a and 13b are provided in the longitudinal direction of the outer vibrating arm portions 122a and 122b, respectively. The number of the groove portions 13a and 13b is not particularly limited. For example, two grooves may be provided on the front and back surfaces of the outer vibrating arm portion 122a, and two grooves may be provided on the front and rear surfaces of the outer vibrating arm portion 122b, or the outer vibrating arm portions 122a. One on each front and back and one on each front and back of the outer vibrating arm portion 122b. The groove portions 13a and 13b may be provided only on either the front or back surface of the outer vibrating arm portion 122a, or may be provided only on either the front or rear surface of the outer vibrating arm portion 122b.

励振電極２１ａは、外側振動腕部１２２ａの両側面及び外側振動腕部１２２ｂの表裏面の溝部１３ａに設けられている。励振電極２１ｂは、外側振動腕部１２２ｂの両側面及び外側振動腕部１２２ａの表裏面の溝部１３ｂに設けられている。   The excitation electrode 21a is provided in the groove part 13a of the both sides | surfaces of the outer side vibration arm part 122a, and the front and back of the outer side vibration arm part 122b. The excitation electrode 21b is provided on both side surfaces of the outer vibrating arm portion 122b and the groove portions 13b on the front and rear surfaces of the outer vibrating arm portion 122a.

基部１１にはパッド電極２２ａ，２２ｂが設けられる。基部１１、突出部１４及び振動腕部１２ａ，１２ｂの表裏面及び側面には、配線パターン２４ａ，２４ｂが設けられる。配線パターン２４ａはパッド電極２２ａと励振電極２１ａとを電気的に接続し、配線パターン２４ｂはパッド電極２２ｂと励振電極２１ｂとを電気的に接続する。ただし、不要な振動の発生を避けるために、配線パターン２４ａ，２４ｂによるＸ軸方向への電界強度が無視できる程度になるように、配線パターン２４ａ，２４ｂを配置する。励振電極２１ａ、パッド電極２２ａ、周波数調整用金属膜２３ａ及び配線パターン２４ａは互いに電気的に導通し、励振電極２１ｂ、パッド電極２２ｂ、周波数調整用金属膜２３ｂ及び配線パターン２４ｂは互いに電気的に導通している。   The base 11 is provided with pad electrodes 22a and 22b. Wiring patterns 24a and 24b are provided on the front and back surfaces and side surfaces of the base portion 11, the projecting portion 14, and the vibrating arm portions 12a and 12b. The wiring pattern 24a electrically connects the pad electrode 22a and the excitation electrode 21a, and the wiring pattern 24b electrically connects the pad electrode 22b and the excitation electrode 21b. However, in order to avoid unnecessary vibrations, the wiring patterns 24a and 24b are arranged so that the electric field strength in the X-axis direction by the wiring patterns 24a and 24b can be ignored. The excitation electrode 21a, the pad electrode 22a, the frequency adjusting metal film 23a, and the wiring pattern 24a are electrically connected to each other, and the excitation electrode 21b, the pad electrode 22b, the frequency adjusting metal film 23b, and the wiring pattern 24b are electrically connected to each other. doing.

励振電極２１ａ，２１ｂ、パッド電極２２ａ，２２ｂ、周波数調整用金属膜２３ａ，２３ｂ及び配線パターン２４ａ，２４ｂは、例えば成膜技術、フォトリソグラフィ技術、エッチング技術により形成され、例えばＴｉ層の上にＰｄ又はＡｕ層が設けられた積層構造となっている。   The excitation electrodes 21a and 21b, the pad electrodes 22a and 22b, the frequency adjusting metal films 23a and 23b, and the wiring patterns 24a and 24b are formed by, for example, a film formation technique, a photolithography technique, and an etching technique. Or it has a laminated structure in which an Au layer is provided.

振動素子１０は、パッド電極２２ａ，２２ｂを介して、図２［Ｂ］に示すように、導電性接着剤３１によって素子搭載部材３２側のパッド電極３３に固定されると同時に電気的に接続される。   As shown in FIG. 2B, the vibration element 10 is fixed to the pad electrode 33 on the element mounting member 32 side and electrically connected to the vibration element 10 via the pad electrodes 22a and 22b. The

振動素子１０を動作させるには、パッド電極２２ａ，２２ｂに交番電圧を印加する。印加後のある電気的状態を瞬間的に捉えると、外側振動腕部１２２ａの表裏面の溝部１３ａ内に設けられた励振電極２１ｂはプラス電位となり、外側振動腕部１２２ａの両側面に設けられた励振電極２１ａはマイナス電位となり、互いに対向する励振電極２１ｂと励振電極２１ａとの間でプラスからマイナスに電界が生じる。このとき、外側振動腕部１２２ｂの表裏面の溝部１３ｂ内に設けられた励振電極２１ａはマイナス電位となり、外側振動腕部１２２ｂの両側面に設けられた励振電極２１ｂはプラス電位となり、外側振動腕部１２２ａに生じた極性とは反対の極性となり、互いに対向する励振電極２１ｂと励振電極２１ａとの間でプラスからマイナスに電界が生じる。この交番電圧で生じた電界によって、外側振動腕部１２２ａ，１２２ｂに伸縮現象が生じ、これに内側振動腕部１２１ａ，１２１ｂが付勢され、振動腕部１２ａ，１２ｂの形状で設定された共振周波数の屈曲振動モードが得られる。   In order to operate the vibration element 10, an alternating voltage is applied to the pad electrodes 22a and 22b. When an electrical state after application is captured instantaneously, the excitation electrode 21b provided in the groove portion 13a on the front and back surfaces of the outer vibrating arm portion 122a has a positive potential and is provided on both side surfaces of the outer vibrating arm portion 122a. The excitation electrode 21a has a negative potential, and an electric field is generated from positive to negative between the excitation electrode 21b and the excitation electrode 21a facing each other. At this time, the excitation electrode 21a provided in the groove 13b on the front and back surfaces of the outer vibrating arm portion 122b has a negative potential, and the excitation electrodes 21b provided on both side surfaces of the outer vibrating arm portion 122b have a positive potential. The polarity is opposite to that generated in the portion 122a, and an electric field is generated from plus to minus between the excitation electrode 21b and the excitation electrode 21a facing each other. The electric field generated by the alternating voltage causes an expansion / contraction phenomenon in the outer vibrating arm portions 122a and 122b, and the inner vibrating arm portions 121a and 121b are energized to the resonance frequency set in the shape of the vibrating arm portions 12a and 12b. The bending vibration mode is obtained.

次に、振動素子１０の作用及び効果について説明する。   Next, the operation and effect of the vibration element 10 will be described.

（１）本実施形態１によれば、二本の振動腕部１２ａ，１２ｂが互いに対称になるようにそれぞれ内側振動腕部１２１ａ，１２１ｂと外側振動腕部１２２ａ，１２２ｂとに折り曲げられ、外側振動腕部１２２ａ，１２２ｂにのみ励振電極２１ａ，２１ｂが形成されたことにより、外側振動腕部１２２ａ，１２２ｂのみが伸縮して屈曲振動し、これに内側振動腕部１２１ａ，１２１ｂが付勢されて屈曲振動するので、内側振動腕部１２１ａ，１２１ｂと外側振動腕部１２２ａ，１２２ｂとを連結する外側折り曲げ箇所１２４ａ，１２４ｂが振動の節になりにくい。したがって、振動腕部１２ａ，１２ｂを折り曲げて振動素子１０の全長を短くした場合でも、振動腕部１２ａ，１２ｂの実効的な長さを保持できる。   (1) According to the first embodiment, the two vibrating arm portions 12a and 12b are bent into the inner vibrating arm portions 121a and 121b and the outer vibrating arm portions 122a and 122b, respectively, so that they are symmetrical with each other. Since the excitation electrodes 21a and 21b are formed only on the arms 122a and 122b, only the outer vibrating arms 122a and 122b expand and contract and vibrate, and the inner vibrating arms 121a and 121b are urged and bent. Since it vibrates, the outer bent portions 124a and 124b connecting the inner vibrating arm portions 121a and 121b and the outer vibrating arm portions 122a and 122b are less likely to become vibration nodes. Therefore, even when the vibrating arm portions 12a and 12b are bent to shorten the entire length of the vibrating element 10, the effective length of the vibrating arm portions 12a and 12b can be maintained.

（２）内側振動腕部１２１ａ，１２１ｂの幅Ｗ１を外側振動腕部１２２ａ，１２２ｂの幅Ｗ２よりも短くした場合は、内側振動腕部１２１ａ，１２１ｂの剛性を小さくできるので、より共振周波数を下げることができる。   (2) When the width W1 of the inner vibrating arm portions 121a and 121b is shorter than the width W2 of the outer vibrating arm portions 122a and 122b, the rigidity of the inner vibrating arm portions 121a and 121b can be reduced, so that the resonance frequency is further lowered. be able to.

（３）振動素子の長手方向の振動腕部側の端を振動素子の先端としたとき、関連技術２の振動素子は、振動素子の先端において振動腕部を折り曲げる構造である。そのため、振動素子の先端で振動腕部が二重になっていることにより、振動素子の先端の重量が大きい。その結果、振動素子が落下などの衝撃を受けた場合に、振動腕部と基部との接続部分が破損しやすいなど、耐衝撃性が低下する。また、振動腕部の重心が振動素子の先端側にあるため、不要な振動が生じてＣＩが増大したり、実装時に振動素子の先端がパッケージの底面に接触してＣＩが増大したりする可能性がある。   (3) When the vibration arm portion side end in the longitudinal direction of the vibration element is used as the tip of the vibration element, the vibration element according to Related Art 2 has a structure in which the vibration arm portion is bent at the tip of the vibration element. For this reason, since the vibrating arm portion is doubled at the tip of the vibrating element, the weight of the tip of the vibrating element is large. As a result, when the vibration element receives an impact such as dropping, the connection between the vibrating arm portion and the base portion is easily damaged, and the impact resistance is lowered. In addition, since the center of gravity of the vibrating arm is on the tip side of the vibration element, unnecessary vibration may occur and CI may increase, or the tip of the vibration element may contact the bottom surface of the package during mounting, and CI may increase. There is sex.

これに対し、本実施形態１において、内側振動腕部１２１ａ，１２１ｂが突出部１４の先端から互いに離れる方向へ延びてから方向１００の反対側へ延びるように延設され、外側振動腕部１２２ａ，１２２ｂが内側振動腕部１２１ａ，１２１ｂの先端から互いに離れる方向へ延びてから方向１００と同一側へ延びるように延設され、かつ、内側振動腕部１２１ａ，１２１ｂの長さＬ１が外側振動腕部１２２ａ，１２２ｂの長さＬ２の半分以下である場合は、振動腕部１２ａ，１２ｂの基部１１側において振動腕部１２ａ，１２ｂを折り曲げる構造を採用したことになり、振動素子１０の全長を短くできるとともに、関連技術２に比べて振動素子１０の先端側を軽量化できるので、振動腕部１２ａ，１２ｂと基部１１との接続部分における耐衝撃性を向上できる。また、関連技術２に比べて振動腕部１２ａ，１２ｂの重心が基部１１側にあるため、不要な振動が生じてＣＩが増大したり、実装時に振動素子１０の先端がパッケージの底面に接触してＣＩが増大したりする可能性を抑制できる。   On the other hand, in the first embodiment, the inner vibrating arm portions 121a and 121b are extended so as to extend away from the tips of the projecting portions 14 and then extend to the opposite side of the direction 100, and the outer vibrating arm portions 122a and 122b extends so as to extend away from the tips of the inner vibrating arm portions 121a and 121b and then extend to the same side as the direction 100, and the length L1 of the inner vibrating arm portions 121a and 121b is the outer vibrating arm portion. When the length is less than half of the length L2 of 122a and 122b, a structure in which the vibrating arm portions 12a and 12b are bent on the base 11 side of the vibrating arm portions 12a and 12b is adopted, and the overall length of the vibrating element 10 can be shortened. In addition, since the distal end side of the vibration element 10 can be reduced in weight compared to the related art 2, the impact resistance at the connection portion between the vibration arm portions 12a and 12b and the base portion 11 is reduced. It can improve the sex. Further, since the center of gravity of the vibrating arms 12a and 12b is on the base 11 side as compared with the related technique 2, the unnecessary vibration occurs and the CI increases, or the tip of the vibrating element 10 contacts the bottom surface of the package during mounting. Therefore, the possibility of increasing CI can be suppressed.

（４）なお、突出部１４及び内側振動腕部１２１ａ，１２１ｂの長さを図示する長さよりも長くすることにより、内側振動腕部１２１ａ，１２１ｂの剛性が更に下がるので、共振周波数を更に下げることができる。また、内側振動腕部１２１ａ，１２１ｂと外側振動腕部１２２ａ，１２２ｂとの間隔、又は、内側振動腕部１２１ａ，１２１ｂと突出部１４との間隔を広げることにより、共振周波数を下げることも可能である。基部１１又は突出部１４に切れ込みを設けることにより、基部１１側に伝わる漏れ振動を削減し、ＣＩの増大を防ぐこともできる。更に、内側折り曲げ箇所１２３ａ，１２３ｂ及び外側折り曲げ箇所１２４ａ，１２４ｂは、その幅を任意に変更してよく、エッチング残渣を考慮して面取りをしてもよい。   (4) Since the rigidity of the inner vibrating arm portions 121a and 121b is further lowered by making the length of the protruding portion 14 and the inner vibrating arm portions 121a and 121b longer than the illustrated length, the resonance frequency is further lowered. Can do. Further, the resonance frequency can be lowered by increasing the distance between the inner vibrating arm portions 121a and 121b and the outer vibrating arm portions 122a and 122b or the distance between the inner vibrating arm portions 121a and 121b and the protruding portion 14. is there. By providing a cut in the base 11 or the protrusion 14, leakage vibration transmitted to the base 11 side can be reduced, and an increase in CI can be prevented. Further, the widths of the inner bent portions 123a and 123b and the outer bent portions 124a and 124b may be arbitrarily changed, and chamfering may be performed in consideration of etching residues.

次に、振動素子１０の寸法の一例について説明する。ここでは、振動素子１０の長手方向を「長さ」、短手方向を「幅」とする。   Next, an example of the dimensions of the vibration element 10 will be described. Here, the longitudinal direction of the vibration element 10 is defined as “length”, and the lateral direction is defined as “width”.

内側振動腕部１２１ａ，１２１ｂは、長さＬ１が２００μｍ、幅Ｗ１が２５μｍである。外側振動腕部１２２ａ，１２２ｂは、長さＬ２が５５０μｍ、幅Ｗ２が３１μｍである。突出部１４は、長さが２５０μｍ、幅が５０μｍである。溝部１３ａ，１３ｂの幅は５．３μｍである。周波数調整領域の幅は４５μｍである。振動素子１０の厚みは、使用する水晶ウェハの厚みと同程度であり、１００μｍである。このとき、振動素子１０は３５ｋＨｚ付近で共振する。   The inner vibrating arm portions 121a and 121b have a length L1 of 200 μm and a width W1 of 25 μm. The outer vibrating arm portions 122a and 122b have a length L2 of 550 μm and a width W2 of 31 μm. The protrusion 14 has a length of 250 μm and a width of 50 μm. The width of the grooves 13a and 13b is 5.3 μm. The width of the frequency adjustment region is 45 μm. The thickness of the vibration element 10 is approximately the same as the thickness of the crystal wafer used, and is 100 μm. At this time, the vibration element 10 resonates around 35 kHz.

なお、突出部１４の先端に、図示しないがスリット付きの第二突出部を設けてもよい。このスリットは、スパッタ技術及びフォトリソグラフィ技術を用いたリフトオフ法によって電極を形成する際に、電極を電気的に切り離す役割を果たす（特許文献４参照）。   In addition, you may provide the 2nd protrusion part with a slit in the front-end | tip of the protrusion part 14 although it is not illustrated. The slit plays a role of electrically separating the electrode when the electrode is formed by a lift-off method using a sputtering technique and a photolithography technique (see Patent Document 4).

以上、上記各実施形態を参照して本発明を説明したが、本発明は上記各実施形態に限定されるものではない。本発明の構成や詳細については、当業者が理解し得るさまざまな変更を加えることができる。また、本発明には、上記各実施形態の構成の一部又は全部を相互に適宜組み合わせたものも含まれる。   Although the present invention has been described with reference to the above embodiments, the present invention is not limited to the above embodiments. Various changes that can be understood by those skilled in the art can be made to the configuration and details of the present invention. Further, the present invention includes a combination of some or all of the configurations of the above-described embodiments as appropriate.

＜実施形態１＞
１０ 振動素子
１００ 方向（第一方向）
１０１ 中心線
１１ 基部
１２ａ 振動腕部
１２１ａ 内側振動腕部
１２２ａ 外側振動腕部
１２３ａ 内側折り曲げ箇所
１２４ａ 外側折り曲げ箇所
１２ｂ 振動腕部
１２１ｂ 内側振動腕部
１２２ｂ 外側振動腕部
１２３ｂ 内側折り曲げ箇所
１２４ｂ 外側折り曲げ箇所
１３ａ，１３ｂ 溝部
１４ 突出部
１５ 水晶振動片
２１ａ，２１ｂ 励振電極
２２ａ，２２ｂ パッド電極
２３ａ，２３ｂ 周波数調整用金属膜
２４ａ，２４ｂ 配線パターン
３１ 導電性接着剤
３２ 素子搭載部材
３３ パッド電極
Ｌ１，Ｌ２ 長さ
Ｗ１，Ｗ２ 幅
＜関連技術１＞
９００ 振動素子
９１１ 基部
９１２ａ，９１２ｂ 振動腕部
９１３ａ，９１３ｂ 溝部
９２１ａ，９２１ｂ 励振電極
９２２ａ，９２２ｂ パッド電極
Ｌ 長さ
Ｗ 幅 <Embodiment 1>
10 vibration element 100 direction (first direction)
101 center line 11 base 12a vibrating arm portion 121a inner vibrating arm portion 122a outer vibrating arm portion 123a inner bent portion 124a outer bent portion 12b vibrating arm portion 121b inner vibrating arm portion 122b outer vibrating arm portion 123b inner bent portion 124b outer bent portion 13a , 13b Groove part 14 Projection part 15 Crystal vibrating piece 21a, 21b Excitation electrode 22a, 22b Pad electrode 23a, 23b Frequency adjustment metal film 24a, 24b Wiring pattern 31 Conductive adhesive 32 Element mounting member 33 Pad electrode L1, L2 Length W1, W2 width <Related technology 1>
900 Vibration element 911 Base 912a, 912b Vibration arm 913a, 913b Groove 921a, 921b Excitation electrode 922a, 922b Pad electrode L Length W Width

Claims (4)

基部と、
この基部から延設された二本の振動腕部と、
これらの振動腕部に形成された励振電極と、
を備えた水晶振動素子において、
前記二本の振動腕部は、延設された方向の中心線に対して互いに対称になるようにそれぞれ内側振動腕部と外側振動腕部とに折り曲げられ、
前記外側振動腕部にのみ前記励振電極が形成された、
ことを特徴とする水晶振動素子。 The base,
Two vibrating arms extending from the base,
Excitation electrodes formed on these vibrating arms,
In the crystal resonator element with
The two vibrating arm portions are bent into an inner vibrating arm portion and an outer vibrating arm portion, respectively, so as to be symmetric with respect to the center line in the extending direction,
The excitation electrode was formed only on the outer vibrating arm portion,
A crystal resonator element characterized by the above. 前記基部から第一方向へ延設された突出部を更に備え、
二本の前記振動腕部は、前記基部から前記突出部を介して延設され、
二本の前記内側振動腕部は、前記突出部の先端から互いに離れる方向へ延びてから前記第一方向の反対側へ延びるように延設され、
二本の前記外側振動腕部は、前記内側振動腕部の先端から互いに離れる方向へ延びてから前記第一方向と同一側へ延びるように延設された、
請求項１記載の水晶振動素子。 And further comprising a protrusion extending in the first direction from the base,
The two vibrating arm portions are extended from the base portion through the protruding portion,
The two inner vibrating arm portions extend in a direction away from the tip of the protruding portion and then extend to the opposite side of the first direction,
The two outer vibrating arm portions are extended so as to extend from the tip of the inner vibrating arm portion in a direction away from each other and then to the same side as the first direction.
The crystal resonator element according to claim 1. 前記内側振動腕部及び前記外側振動腕部の前記延設された方向に直交する方向の寸法を幅とした場合、
前記内側振動腕部の幅は前記外側振動腕部の幅よりも短い、
請求項１又は２記載の水晶振動素子。 When the width in the direction perpendicular to the extending direction of the inner vibrating arm portion and the outer vibrating arm portion,
The width of the inner vibrating arm portion is shorter than the width of the outer vibrating arm portion,
The crystal resonator element according to claim 1 or 2. 前記内側振動腕部及び前記外側振動腕部の前記延設された方向の寸法を長さとした場合、
前記内側振動腕部の長さは前記外側振動腕部の長さの半分以下である、
請求項２記載の水晶振動素子。 When the length of the extending direction of the inner vibrating arm portion and the outer vibrating arm portion is a length,
The length of the inner vibrating arm portion is not more than half of the length of the outer vibrating arm portion,
The crystal resonator element according to claim 2.
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JP2014045255A (en) * 2012-08-24 2014-03-13 Kyocera Crystal Device Corp Crystal vibration element
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06112761A (en) * 1992-09-25 1994-04-22 Seiko Electronic Components Ltd Tortion crystal vibrator
JP2002141770A (en) * 2000-11-01 2002-05-17 Citizen Watch Co Ltd Small-sized vibrator
JP2006345517A (en) * 2005-06-09 2006-12-21 Eta Sa Manufacture Horlogere Suisse Small-sized piezoelectric resonator
JP2008199283A (en) * 2007-02-13 2008-08-28 Epson Toyocom Corp Piezoelectric vibrating piece and manufacturing method thereof
JP2009206759A (en) * 2008-02-27 2009-09-10 Seiko Instruments Inc Piezoelectric vibration chip, piezoelectric vibrator, oscillator, electronic apparatus, radio wave clock, and method of manufacturing piezoelectric vibration chip
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