JP6584257B2 - Tuning-fork type crystal vibrating element - Google Patents

Description

  In the present invention, a tuning fork type crystal vibrating element (hereinafter, abbreviated as “tuning fork element”) used for a reference signal source and a clock signal source will be described.

  FIG. 6A is a schematic plan view showing a tuning fork element of Related Art 1. FIG. FIG. 6B is a schematic plan view showing a tuning fork element according to Related Technique 2. Hereinafter, description will be given based on these drawings.

  The tuning fork element 210 of Related Art 1 includes a base 211 and vibrating arm portions 212a and 212b, and is sealed by an element mounting member and a lid member (not shown). The base 211 has a substantially rectangular shape in plan view, and the lower surface side is fixed to the element mounting member with a conductive adhesive. That is, the tuning fork element 210 is fixed to the element mounting member in a cantilever shape. For this reason, when an impact is applied to the tuning fork element 210, the tips of the vibrating arm portions 212a and 212b may come into contact with the element mounting member or the lid member, causing a malfunction of the tuning fork element 210.

  A tuning fork element 310 of Related Technology 2 that solves the problem of Related Technology 1 is known (see Patent Document 1). The tuning fork element 310 includes a base 311, vibrating arm portions 312 a and 312 b, and a support arm portion 313, and is different from the related technique 1 in that the support arm portion 313 is provided. The support arm portion 313 has a shape extending from the base portion 311 in the short direction of the vibrating arm portion 312a and further extending from the distal end thereof in the longitudinal direction of the vibrating arm portion 312a. For example, by fixing the tip side of the support arm 313 to the element mounting member with a conductive adhesive, the tuning fork element 310 can be fixed substantially in the form of a double-supported beam, so that the impact resistance of the tuning fork element 310 is improved.

Japanese Patent No. 4049017

  However, the tuning fork element 310 of the related technique 2 has electrical characteristics such as a deviation of the oscillation frequency from the design value (hereinafter referred to as “frequency shift”) or an increase in the equivalent series resistance value. There was a problem that it was inferior to 1.

  Therefore, an object of the present invention is to provide a technique capable of improving electrical characteristics such as reduction of frequency deviation in a tuning fork element having a support arm portion.

  The inventor conducted research to solve the problem that the electrical characteristics such as frequency shift are inferior in the tuning fork element 310 of Related Art 2, and as a result, obtained the following knowledge.

  Since the support arm portion 313 and the vibrating arm portions 312a and 312b extend in the same direction, when the vibrating arm portions 312a and 312b are bent and vibrated, the vibration is transmitted to the support arm portion 313 and also to the support arm portion 313. Bending vibration will occur. Further, since the mounting arm pattern is formed on the support arm portion 313, bending vibration also occurs due to the voltage applied from the electrode pattern. At this time, when the vibration arm portions 312a and 312b and the support arm portion 313 have close bending vibration frequencies, the vibrations of each other influence each other. As a result, the electrical characteristics are deteriorated, such as a frequency shift or an increased equivalent series resistance value.

The present invention has been made based on this finding,
A substantially quadrangular base portion in plan view composed of first and second sides facing each other and third and fourth sides facing each other;
A pair of vibrating arms extending in the same direction from the first side;
Provided on at least one of the second side of the third side and the second side of the fourth side, extends from the second side in the lateral direction of the vibrating arm portion, and further from the tip thereof A support arm extending in the longitudinal direction of the vibrating arm;
In a tuning fork element with
When the width parallel to the short direction of the vibrating arm portion,
The support arm portion has a width have a partially thin narrow section than the width of said vibrating arms,
At the tips of the pair of vibrating arms, weight portions for frequency adjustment are provided,
The narrow width portion is formed at a position facing the weight portion,
It is characterized by that.
The longitudinal direction is the Y′-axis direction of the crystal axis, and the short direction is the X-axis direction of the crystal axis,
The narrow width portion is formed by removing only the + X plane side of the support arm portion by wet etching.
Or a tuning fork element in which a large number of the same shape is manufactured from one crystal wafer,
The supporting arm portion is provided on either the second side of the third side or the second side of the fourth side, and the weight portion of another adjacent tuning-fork type crystal vibrating element Arranged on the quartz wafer so as to face
The convex shape of the weight portion and the concave shape of the narrow width portion coincide with each other at a constant interval.

  According to the present invention, since the supporting arm portion has a narrow width portion that is partially narrower than the width of the vibrating arm portion, the frequency difference between the bending vibration of the supporting arm portion and the bending vibration of the vibrating arm portion can be increased. In addition, the influence of the bending vibration of the support arm portion on the vibrating arm portion can be suppressed, and electrical characteristics such as reduction of frequency deviation can be improved.

FIG. 3 is a plan view showing a tuning fork element according to the first embodiment. 2A is a cross-sectional view taken along line IIa-IIa in FIG. 1, and FIG. 2B is a schematic cross-sectional view showing a state where the tuning fork element in FIG. 1 is mounted on an element mounting member. FIG. 5 is a schematic plan view showing a modification of the first side to the fourth side of the tuning fork element of FIG. 1. FIGS. 3A to 3C are partial plan views showing a modification of the narrow portion in the first embodiment, FIG. 3A is a modification 1, FIG. 3B is a modification 2, FIG. 3C is a third modification, and FIG. 3D is a fourth modification. 4A is a schematic plan view showing the tuning fork element of Embodiment 2, FIG. 4B is a partial perspective view showing a comparative example, FIG. 4C is a partial perspective view showing Embodiment 2, and FIG. D] is a partial plan view showing a comparative example, and FIG. 4E is a partial plan view showing the second embodiment. 5A is a schematic plan view showing a tuning fork element according to the third embodiment, FIG. 5B is a schematic plan view showing a comparative example, and FIG. 5C is a schematic plan view showing the fourth embodiment. FIG. 6A is a schematic plan view showing a related technique, FIG. 6A shows the related technique 1, and FIG.

  DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments for carrying out the present invention (hereinafter referred to as “embodiments”) will be described with reference to the accompanying drawings. In the present specification and drawings, the same reference numerals are used for substantially the same components. Moreover, since the shape drawn on drawing is drawn so that those skilled in the art can understand easily, it does not necessarily correspond with an actual dimension and ratio.

  FIG. 1 is a plan view showing a tuning fork element according to the first embodiment. 2A is a cross-sectional view taken along line IIa-IIa in FIG. FIG. 2B is a schematic cross-sectional view showing a state where the tuning fork element of FIG. 1 is mounted on an element mounting member. FIG. 2C is a schematic plan view showing a modification of the first to fourth sides of the tuning fork element of FIG. Hereinafter, description will be given based on these drawings.

  As shown in FIGS. 1 and 2A, the tuning fork element 10 according to the first embodiment includes a base 11, a pair of vibrating arms 12a and 12b, and a support arm 13. The base 11 has a substantially quadrangular shape in plan view, which includes a first side 111 and a second side 112 facing each other, and a third side 113 and a fourth side 114 facing each other. The pair of vibrating arm portions 12 a and 12 b extend from the first side 111 in the same direction. The support arm portion 13 is provided on at least one of the second side 112 side of the third side 113 and the second side 112 side of the fourth side 114, and the short side direction of the vibrating arm portions 12a and 12b from the second side 112 side. And extending further in the longitudinal direction of the vibrating arms 12a and 12b from the tip. In the first embodiment, the support arm portion 13 is provided only on the second side 112 side of the third side 113. When the dimension parallel to the short direction of the vibrating arm portions 12a and 12b is defined as the width, the support arm portion 13 has a narrow width portion whose width W2 is partially narrower than the width W1 of the vibrating arm portions 12a and 12b. 131. That is, W2 <W1 holds.

  In the first embodiment, weight adjusting portions 16a and 16b are provided at the tips of the vibrating arm portions 12a and 12b, respectively. The narrow portion 131 is formed at a position facing the weight portion 16a.

  The vibrating arm portions 12a and 12b are extended from the base portion 11 in the same direction, and groove portions 15a and 15b are provided along the extending direction. The base portion 11, the vibrating arm portions 12 a and 12 b, the support arm portion 13, and the weight portions 16 a and 16 b are made of a crystal vibrating piece 19. The tuning fork element 10 includes pad electrodes 21a and 21b, excitation electrodes 22a and 22b, frequency adjusting metal films 23a and 23b, and wiring patterns 24a and 24b in addition to the crystal vibrating piece 19.

  Next, the configuration of the tuning fork element 10 will be described in more detail.

  The base 11 is a flat plate having a substantially rectangular shape in a plan view (a region surrounded by a solid line and a broken line). The quartz crystal vibrating piece 19 has a tuning fork shape in which the base 11, the vibrating arms 12a and 12b, the supporting arm 13 and the weights 16a and 16b are integrated, and is formed by a film forming technique, a photolithography technique, and a wet etching technique. Manufactured.

  The groove portions 15a and 15b vibrate from the boundary portion with the base 11 toward the tip of the vibrating arm portions 12a and 12b, two grooves on the front and rear surfaces of the vibrating arm portion 12a and two grooves on the front and rear surfaces of the vibrating arm portion 12b. It is provided with a predetermined length in parallel with the longitudinal direction of the arms 12a, 12b. In the first embodiment, two grooves 15a and 15b are provided on the front and back surfaces of the vibrating arm 12a and two grooves on the front and back surfaces of the vibrating arm 12b. However, the number of the grooves 15a and 15b is not limited. For example, one may be provided on the front and back surfaces of the vibrating arm portion 12a and one on each of the front and back surfaces of the vibrating arm portion 12b, or may be provided on only one side of the front and back surfaces. An etching suppression pattern may be provided in the grooves 15a and 15b so that the grooves 15a and 15b that do not penetrate at the same time as the outer shape of the crystal vibrating piece 19 is formed during wet etching.

  The vibrating arm 12a is provided with excitation electrodes 22a on both side surfaces so that the planes facing each other across the crystal have the same polarity, and excitation electrodes 22b are provided inside the groove portions 15a on the front and back surfaces. Similarly, the vibrating arm portion 12b is provided with excitation electrodes 22b on both side surfaces so that the planes facing each other across the crystal have the same polarity, and the excitation electrode 22a is provided inside the groove portion 15b on the front and back surfaces. . Therefore, in the vibrating arm portion 12a, the excitation electrode 22a provided on both sides and the excitation electrode 22b provided in the groove 15a have different polarities, and in the vibrating arm portion 12b, the excitation electrode 22b provided on both sides. And the excitation electrode 22a provided in the groove 15b have different polarities.

  The support arm portion 13 is provided with pad electrodes 21a and 21b, the support arm portion 13 and the base portion 11 are provided with wiring patterns 24a and 24b, and the weight portions 16a and 16b are provided with frequency adjusting metal films 23a and 23b. It is done. The wiring pattern 24a electrically connects the pad electrode 21a and the excitation electrode 22a, and the wiring pattern 24b electrically connects the pad electrode 21b and the excitation electrode 22b. The pad electrode 21a, the excitation electrode 22a, the frequency adjusting metal film 23a, and the wiring pattern 24a are electrically connected to each other. The pad electrode 21b, the excitation electrode 22b, the frequency adjusting metal film 23b, and the wiring pattern 24b are also electrically connected to each other.

  As shown in FIG. 2 [B], the tuning fork element 10 is substantially connected to the pad electrodes 33a and 32b on the element mounting member 32 side via the pad electrodes 21a and 21b (FIG. 1) and the conductive adhesives 31a and 31b. At the same time it is fixed in the shape of a cantilever, it is electrically connected. The element mounting member 32 on which the tuning fork element 10 is mounted is sealed with a lid member 34. For the sealing method, for example, electric welding or molten glass is used.

  Quartz crystals are trigonal. A crystal axis passing through the crystal apex is defined as a Z axis, three crystal axes connecting ridge lines in a plane perpendicular to the Z axis are defined as an X axis, and a coordinate axis orthogonal to the X axis and the Z axis is defined as a Y axis. Here, when the coordinate system consisting of these X, Y, and Z axes is rotated within a range of ± 5 degrees around the X axis, the rotated Y axis and Z axis are respectively represented as Y ′ axis and Z axis. 'As axis. In this case, in the first embodiment, the longitudinal direction of the two vibrating arm portions 12a and 12b is the Y′-axis direction, and the short direction of the two vibrating arm portions 12a and 12b is the X-axis direction. . Further, the crystal plane in which the normal line faces the + X axis direction is the + X plane, and the crystal plane in which the normal line faces the −X axis direction is the −X plane.

  Here, modified examples of the first side to the fourth side 111 to 114 will be described. The first side to the fourth side 111 to 114 are not limited to linear ones, and may be provided with concave portions or convex portions. For example, as shown in FIG. 2C, the first side 111 may be provided with a protrusion 171 and a slit 172 suitable for preventing an electrical short circuit on the side surface when forming an electrode by the lift-off method. The third side 113 and the fourth side 114 may be provided with notches 18a and 18b for suppressing vibration leakage from the vibrating arm portions 12a and 12b. Moreover, you may provide a pair of shoulder part 14a, 14b. The pair of shoulder portions 14a and 14b has a third side 113 and a fourth side 114 extending from the roots of the vibrating arm portions 12a and 12b in the short direction of the vibrating arm portions 12a and 12b, respectively.

  Here, the size of the tuning fork element 10 will be described. The length of the first side 111 of the base 11 is 250 to 350 μm, and the length of the third side 113 of the base 11 is 115 to 210 μm. The vibrating arm portions 12a and 12b have a length of 450 to 550 μm and a width W1 of 20 to 55 μm. Further, the width W2 of the narrow portion 131 provided on the support arm 13 is 10 to 45 μm. Further, the weight portions 16a and 16b have a length of 195 to 580 μm and a width of 25 to 85 μm.

  Next, the operation of the tuning fork element 10 will be described. When the tuning fork element 10 is bent and vibrated, an alternating voltage is applied to the pad electrodes 21a and 21b. When an electrical state after application is instantaneously captured, the excitation electrodes 22b provided in the groove portions 15a on the front and back of the vibrating arm portion 12a have a positive potential, and the excitation electrodes 22a provided on both side surfaces of the vibrating arm portion 12a are A negative electric potential is generated, and an electric field is generated from positive to negative. At this time, the excitation electrodes 22a provided in the groove portions 15b on the front and back of the vibrating arm portion 12b have a negative potential, and the excitation electrodes 22b provided on both side surfaces of the vibrating arm portion 12b have a positive potential, and are generated in the vibrating arm portion 12a. The polarity is opposite to the polarity, and an electric field is generated from plus to minus. The electric field generated by the alternating voltage causes a stretching phenomenon in the vibrating arm portions 12a and 12b, and a flexural vibration mode having a predetermined resonance frequency is obtained.

  Next, the operation and effect of the tuning fork element 10 will be described.

  (1) According to the first embodiment, the support arm portion 13 has the narrow width portion 131 (width W2, W2 <W1) that is partially narrower than the width W1 of the vibrating arm portions 12a and 12b. Since the frequency difference between the bending vibration of the portion 13 and the bending vibration of the vibrating arm portions 12a and 12b can be increased, the influence of the bending vibration of the support arm portion 13 on the vibrating arm portions 12a and 12b can be suppressed, and the frequency deviation can be reduced. , Electrical characteristics can be improved.

  As the widths of the support arm 13 and the vibrating arms 12a and 12b become thinner, the frequency of the bending vibrations becomes higher. Therefore, by narrowing the width of a part of the support arm portion 13, the frequency of the bending vibration generated in the support arm portion 13 is shifted to a high frequency band. As a result, the frequency difference between the bending vibration of the support arm portion 13 and the bending vibration of the vibrating arm portions 12a and 12b increases.

  It is also conceivable to change the frequency of the bending vibration of the support arm 13 by narrowing the entire width of the support arm 13. However, when the entire width of the support arm 13 is narrower than the vibrating arms 12a and 12b, the support arm portion 13 is easily broken, which is not preferable.

  On the contrary, it is also conceivable to increase the width of the support arm 13 and change the frequency of the bending vibration of the support arm 13. However, it is not preferable that the entire width of the support arm 13 is larger than the widths of the weight portions 16a and 16b because it causes a problem in the oscillation circuit. This is because if the width of the support arm portion 13 is increased, the frequency of the support arm portion 13 becomes lower than the frequency of the vibrating arm portions 12a and 12b. Then, a general oscillation circuit tries to oscillate in the frequency band of the support arm portion 13. Because it does. In addition to this, increasing the width of the support arm portion 13 has a disadvantage that the tuning fork element 10 is increased in size.

(2) The frequency of the vibrating arm portions 12a and 12b is designed mainly by the length (longitudinal dimension) and width of the vibrating arm portions 12a and 12b, and is adjusted by the mass of the weight portions 16a and 16b. In the first embodiment, since the narrow portion 131 is formed at a position facing the weight portion 16a, the frequency of the support arm portion 13 can be easily calculated. The reason is that the length and width of the support arm portion 13 excluding the narrow width portion 131 and the mass of the narrow width portion 131 are the same as the length and width of the vibrating arm portions 12a and 12b and the mass of the weight portions 16a and 16b. It is because it corresponds. Therefore, the frequency calculation process of the vibrating arm portions 12 a and 12 b can also be used for calculating the frequency of the support arm portion 13.

  Next, a modification of the narrow portion 131 in the first embodiment will be described. FIGS. 3A to 3C are partial plan views showing a modification of the narrow portion in the first embodiment, FIG. 3A is a modification 1, FIG. 3B is a modification 2, FIG. 3C is a third modification, and FIG. 3D is a fourth modification.

  3, as in FIG. 1, the longitudinal direction is the Y′-axis direction of the crystal axis, and the short direction is the X-axis direction of the crystal axis. The narrow portion 131a of the first modification shown in FIG. 3A is formed by the remainder obtained by removing only the + X plane side of the support arm portion 13 by wet etching. The narrow portion 131b of Modification 2 shown in FIG. 3B is formed by removing both the + X plane side and the −X plane side of the support arm portion 13 by wet etching. The narrow portion 131c of Modification 3 shown in FIG. 3 [C] consists of the remainder obtained by removing only the −X surface side of the support arm portion 13 by wet etching.

  In other words, in the narrow width portion 131a of the modified example 1, the surface opposite to the surface facing the weight portion is cut out, as in the narrow width portion 131 shown in FIG. 1, and this becomes the cutout portion C1. ing. In the narrow width portion 131b of the modified example 2, both the surface facing the weight portion and the surface on the opposite side are notched, and the respective portions are notched portions C2 and C1. The narrow portion 131c of Modification 3 has a surface that is opposed to the weight portion, which is a notch C2.

  In wet etching of quartz using hydrofluoric acid or the like, etching residues adhere to the quartz by anisotropic etching unique to quartz. Etching residues L1 and L2 are generated in the notches C1 and C2, respectively. The etching residue L2 generated on the −X plane is larger than the etching residue L1 generated on the + X plane due to the difference in etching rate. Therefore, the amount of etching residue is modified example 1 (L1) <modified example 3 (L2) <modified example 2 (L1 + L2). It can be said that the smaller the amount of etching residue, the better the shape as designed.

  The modification 4 is used for a tuning fork element in which a large number of the same shape is manufactured from one crystal wafer. If it demonstrates using FIG. 1, the support arm part 13 in the modification 4 will be provided only in the 2nd side 112 side of the 3rd side 113, and it may oppose the weight part 16b of the other adjacent tuning fork element 10. FIG. To a quartz wafer (not shown). Note that the support arm portion may be provided only on the second side 112 side of the fourth side 114.

  Then, as shown in FIG. 3D, the convex shape of the weight portion 16b and the concave shape of the narrow width portion 131d coincide with each other with a constant interval d. According to the fourth modification, by matching the concave shape of the narrow portion 131a with the convex shape of the weight portion 16b of the adjacent tuning fork element, the adjacent tuning fork elements can be brought closer to each other on the crystal wafer. The number of tuning fork elements per crystal wafer can be increased.

  Next, Embodiment 2 will be described with reference to FIG. In FIG. 4, illustration of a groove part, an electrode, etc. is abbreviate | omitted.

  As shown in FIG. 4A, the narrow width portion 132 in the tuning fork element 40 of the second embodiment extends in the short direction of the vibrating arm portions 12a and 12b, and further extends in the longitudinal direction of the vibrating arm portions 12a and 12b. It is formed at the corner. As shown in FIG. 4B to FIG. 4E, the tuning fork element 40 is formed by applying a conductive adhesive 31 in a circular shape on the element mounting member 32 and placing the tuning fork element 40 thereon. Is mounted on the element mounting member 32. At this time, according to the second embodiment, the following effects can be obtained. The comparative example has the same configuration as the tuning fork element 40 except that the narrow portion 132 is not provided.

  In the comparative example shown in FIG. 4B, the conductive adhesive 31 crawls up only on the two surfaces of the support arm 13. On the other hand, in the second embodiment shown in FIG. 4C, the two surfaces of the support arm portion 13 where the narrow portion 132 is provided and the support where the narrow portion 132 is not provided. The conductive adhesive 31 crawls up on a total of four surfaces including the two surfaces of the arm portion 13. Therefore, according to the second embodiment, since the conductive adhesive 31 spreads in many ways, the adhesive strength by the conductive adhesive 31 can be improved. Furthermore, compared to the comparative example shown in FIG. 4D, the second embodiment shown in FIG. 4E has three corners rather than one, so that the corners crawl up. The meniscus of the conductive adhesive 31 further increases the creeping area of the conductive adhesive 31, increasing the amount of the conductive adhesive 31 present at the boundary between the element mounting member 32 and the tuning fork element 10, and tuning fork. It can be formed such that the thickness portion parallel to the direction from the back surface to the front surface of the element 10 changes smoothly. Therefore, it is possible to improve the adhesive strength and also improve the impact resistance due to external impact.

  In the comparative example shown in FIG. 4D, since the amount of the conductive adhesive 31 sandwiched between the element mounting member 32 and the support arm portion 13 is large, the conductive adhesive 31 is spread to the base 11 side. Therefore, there is a risk of increasing the vibration leakage of the vibrating arm portions 12a and 12b. This is because the bending vibration of the vibrating arm portions 12 a and 12 b leaks to the element mounting member 32 side through the conductive adhesive 31. On the other hand, in the second embodiment shown in FIG. 4E, since the narrow width portion 132 is provided, the amount of the conductive adhesive 31 sandwiched between the element mounting member 32 and the support arm portion 13 is reduced. it can. Thereby, since the conductive adhesive 31 is not spread to the base 11 side, vibration leakage of the vibrating arm portions 12a and 12b can be suppressed. Further, it is possible to reduce a short circuit between the wiring patterns 24 a and 24 b provided on the base 11 by the conductive adhesive 31.

  Note that the effect on the adhesive strength due to the decrease in the amount of the conductive adhesive 31 sandwiched between the element mounting member 32 and the support arm portion 13 can be compensated by the effect shown in FIG. 4C. Other configurations, operations, and effects of the second embodiment are the same as those of the first embodiment.

  Next, Embodiment 3 will be described based on FIG. 5A and FIG. 5B. In FIG. 5, illustration of a groove part, an electrode, etc. is abbreviate | omitted.

  As shown in FIG. 5A, the narrow width portion 133 in the tuning fork element 50 according to the third embodiment is formed at a position facing the base portion 11. More specifically, the surface of the support arm 13 that faces the base 11 is cut out, and the narrow portion 133 is formed there. The tuning fork element 50 ′ of the comparative example shown in FIG. 5B has the same configuration as the tuning fork element 50 except that the narrow width portion 133 is not provided.

  FIG. 5A shows the distance W3 from the base 11 to the support arm 13 and the etching residue L3 generated there in the third embodiment. FIG. 5B shows the distance W4 from the base 11 to the support arm 13 and the etching residue L4 generated there in the comparative example. At this time, since the narrow portion 133 is provided in the third embodiment, the distance W3 is longer than the distance W4. Since the etching residue becomes smaller as the distance from the base 11 to the support arm 13 becomes longer, the etching residue L3 is smaller than the etching residue L4. The etching residues L3 and L4 function to transmit vibration leakage from the vibrating arm portion 12a through the base portion 11 to the support arm portion 13, and are therefore desirably as small as possible.

  Therefore, according to the third embodiment, since the distance W3 from the base 11 to the support arm 13 can be increased, the etching residue L3 generated therebetween can be reduced, so that the vibration leakage from the vibration arm 12a to the support arm 13 can be reduced. Can be reduced. Other configurations, operations, and effects of the third embodiment are the same as those of the first and second embodiments.

  Next, Embodiment 4 will be described based on FIG.

  The tuning fork element 60 of the fourth embodiment includes all of the narrow portions 131, 132, 133 described in the first to third embodiments. Therefore, according to the fifth embodiment, all the effects described in the first to third embodiments are synergistically exhibited. It should be noted that any two of the narrow portions 131, 132, 133 may be provided. Other configurations, operations, and effects of the fourth embodiment are the same as those of the first to third embodiments.

  Although the present invention has been described with reference to the above embodiments, the present invention is not limited to the above embodiments. Various changes that can be understood by those skilled in the art can be made to the configuration and details of the present invention. Further, the present invention includes a combination of some or all of the configurations of the above-described embodiments as appropriate.

  The present invention can be applied to any tuning fork element including a base, a vibrating arm, and a support arm.

<Embodiment 1>
10 tuning fork element 11 base 111 first side 112 second side 113 third side 114 fourth side 12a, 12b vibrating arm part 13 support arm part 131, 131a, 131b, 131c, 131d narrow part 14a, 14b shoulder part 15a, 15b Groove portion 16a, 16b Weight portion 171 Protrusion portion 172 Slit 18a, 18b Notch portion 19 Crystal vibrating piece 21a, 21b Pad electrode 22a, 22b Excitation electrode 23a, 23b Frequency adjustment metal film 24a, 24b Wiring pattern 31a, 31b Conductive adhesion Agent 32 Element mounting member 33a, 32b Pad electrode 34 Lid member C1, C2 Notch L1, L2 Etching residue W1, W2 Width d Fixed interval <Embodiment 2>
40 tuning fork element 132 narrow portion 31 conductive adhesive <Embodiment 3>
50, 50 'tuning fork element 133 narrow portion W3, W4 distance L3, L4 etching residue <Embodiment 4>
60 Tuning Fork Element <Related Technology 1>
210 tuning fork element 211 base 212a, 212b vibrating arm <related technology 2>
310 tuning fork element 311 base 312a, 312b vibrating arm 313 support arm

Claims (2)

A substantially quadrangular base portion in plan view composed of first and second sides facing each other and third and fourth sides facing each other;
A pair of vibrating arms extending in the same direction from the first side;
Provided on at least one of the second side of the third side and the second side of the fourth side, extends from the second side in the lateral direction of the vibrating arm portion, and further from the tip thereof A support arm extending in the longitudinal direction of the vibrating arm;
In the tuning fork type crystal vibrating element with
When the width parallel to the short direction of the vibrating arm portion,
The support arm portion has a width have a partially thin narrow section than the width of said vibrating arms,
At the tips of the pair of vibrating arms, weight portions for frequency adjustment are provided,
The narrow width portion is formed at a position facing the weight portion,
The longitudinal direction is the Y′-axis direction of the crystal axis, and the short direction is the X-axis direction of the crystal axis,
The narrow width portion consists of the remainder obtained by removing only the + X plane side of the support arm portion by wet etching.
A tuning-fork type crystal vibrating element characterized by that. A substantially quadrangular base portion in plan view composed of first and second sides facing each other and third and fourth sides facing each other;
A pair of vibrating arms extending in the same direction from the first side;
Provided on at least one of the second side of the third side and the second side of the fourth side, extends from the second side in the lateral direction of the vibrating arm portion, and further from the tip thereof A support arm extending in the longitudinal direction of the vibrating arm;
In the tuning fork type crystal vibrating element with
When the width parallel to the short direction of the vibrating arm portion,
The support arm part has a narrow part whose width is partially narrower than the width of the vibrating arm part,
At the tips of the pair of vibrating arms, weight portions for frequency adjustment are provided,
The narrow width portion is formed at a position facing the weight portion,
And a tuning fork type crystal resonator element in which a large number of the same shape is manufactured from one crystal wafer,
The supporting arm portion is provided on either the second side of the third side or the second side of the fourth side, and the weight portion of another adjacent tuning-fork type crystal vibrating element Arranged on the quartz wafer so as to face
The convex shape of the weight portion and the concave shape of the narrow width portion coincide with each other at a constant interval.
A tuning-fork type crystal vibrating element characterized by that .

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