JP2016045147A - Droplet discharger inspection device and droplet supply device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To appropriately evaluate the accuracy of a droplet landing position of a droplet discharged from a nozzle.SOLUTION: An inspection device 1 discharges droplets 15 to a glass plate 8 placed on a glass plate xy table 6 from a nozzle 5 a plurality of times. The inspection device 1 makes the glass plate 8 move every discharge so that the landed droplets 15 do not overlap with one another. The inspection device 1 images the droplets 15 landed on the glass plate 8 by a camera 10 from the rear side of the glass plate 8 and analyzes each droplet landing position by the image. The inspection device 1 calculates an error between a target point where the droplet 15 is landed and an actually landed point and statistically calculates directions, ranges and a degree of variation of the droplets 15 discharged from the nozzle 5.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a droplet ejector inspection device and a droplet supply device, and for example, relates to an apparatus for evaluating the landing position accuracy of a droplet ejected from a single-hole nozzle.

For example, in a small precision machine such as a wristwatch, there are many lubrication points that require precision lubrication, such as the gear wheel (bearing part) and the worm gear and gear meshing part. Transcribed. However, in this method, the amount of lubrication varies as much as 500 to 4000 picoliters, and the needle may be damaged or fouled.
Therefore, the inventor of the present application has decided to study in-house a method of discharging oil droplets from the dispense nozzle to the lubrication site in a non-contact manner.
According to this method, it is possible to discharge 50 to 100 picoliters of oil droplets toward a target location, and a desired amount of oil can be injected by discharging a predetermined number of times to a target location.

However, with this method, oil droplets are fired at an appropriate distance from the target, so the accuracy of oil droplet landing is a problem, and how to evaluate this is a problem.
By the way, as a technique for evaluating the performance of the non-contact type dispenser, there is a “spacer spraying method and a liquid crystal display element manufactured using the method” disclosed in Patent Document 1.
This technique inspects for defects in a coating material (for example, ceramics) formed on a coated surface in a field where a coating material is formed on the coated surface by discharging droplets from a discharge nozzle of a non-contact dispenser. It is about the method.

More specifically, in this technique, droplets are ejected from the ejection nozzle of a non-contact dispenser onto the surface to be coated, and the droplets are stroboscopically photographed by a camera provided in the droplet coating apparatus, and the ejection speed and The ejection direction is measured, and if it is within the set range, the ejection is inspected by counting the number of droplets.
However, in this inspection method, the discharge speed and the discharge direction are the inspection targets, and it is inspected whether or not the coating material can be accurately applied to the specified position on the target to be coated. Absent.

JP 11-316380 A

  An object of the present invention is to appropriately evaluate the landing position accuracy of droplets ejected from a nozzle.

(1) In order to achieve the above object, according to the first aspect of the present invention, in the invention described in claim 1, the planar member disposed horizontally or vertically, and disposed on one side of the plane of the planar member, A droplet ejector having a nozzle for ejecting droplets from an oblique direction toward a target point on the planar member; and disposed on the one side of the plane of the planar member, and a plurality of times by the droplet ejector. An imaging unit that images the discharged droplets that have landed on the planar member from an orthogonal axis that is orthogonal to the planar member, and the droplet deposition position for each droplet by the captured image of each droplet. Acquiring position acquisition means for acquiring, and accuracy acquiring means for acquiring the accuracy with respect to the target point of the landing position of the droplets ejected by the droplet ejector based on the statistics of the obtained landing positions of the respective droplets And a droplet discharger inspection characterized by comprising To provide a location.
(2) In the invention described in claim 2, the imaging means images the droplets ejected a plurality of times by the droplet ejector for each droplet. A droplet discharge device inspection apparatus is provided.
(3) In the invention described in claim 3, the apparatus further comprises a moving means for moving the position of the planar member in the plane direction relative to the droplet discharge device and the imaging means by a predetermined amount, The droplet ejector inspection according to claim 1, wherein the target point on the planar member is changed by performing relative movement for each droplet ejected by the droplet ejector. Providing the device.
(4) In the invention according to claim 4, the droplet ejector ejects oil droplets as droplets, according to any one of claims 1 to 3. Provided is a droplet discharger inspection apparatus as described.
(5) In the invention according to claim 5, the target of the landing position of the oil droplets discharged by the droplet discharger, which is obtained by the droplet discharger inspection device according to claim 4 and the accuracy acquisition means Based on the accuracy with respect to the point, the position of the nozzle was corrected using the correction means for correcting the position of the nozzle in the droplet discharge device and the oil droplet supply position of the machine component that is the supply target of the oil droplet as a target point. There is provided a droplet supply device comprising a droplet discharger moving means for moving the droplet discharger.

  According to the present invention, it is possible to appropriately evaluate the landing position accuracy of droplets ejected from a nozzle by statistics.

It is a figure for demonstrating an inspection apparatus. It is a figure for demonstrating a glass plate etc. FIG. It is a figure for demonstrating the example of a statistical process. It is a flowchart for demonstrating an inspection method. It is a flowchart for demonstrating an inspection method. It is explanatory drawing about the arrangement position of the nozzle and camera in 2nd Embodiment. It is a figure for demonstrating a lubrication apparatus.

(1) Outline of Embodiment The inspection apparatus 1 discharges the droplet 15 a plurality of times from the nozzle 5 (droplet discharger) to the glass plate 8 (planar member) installed on the glass plate xy table 6.
The inspection apparatus 1 moves the glass plate 8 every time it is ejected so that the deposited droplets 15 do not overlap.
The inspection apparatus 1 photographs the droplet 15 that has landed on the glass plate 8 with the camera 10 from the back side of the glass plate 8, and analyzes each droplet deposition position from the image.
Then, the inspection apparatus 1 calculates an error between the target point where the droplet 15 is deposited and the position where the droplet 15 is actually deposited (landed), and in which direction the droplet 15 ejected from the nozzle 5 is in which direction. Statistically calculate the degree of variation.
When the droplets 15 that have landed are photographed every time the droplets are ejected, or when each droplet is photographed after ejecting a predetermined number of droplets, Any of the cases where a plurality of (including all) droplets are photographed collectively after being ejected may be used.

(2) Details of Embodiment FIG. 1A is a schematic diagram for explaining an inspection apparatus 1 according to the first embodiment.
The inspection apparatus 1 functions as a droplet discharger inspection apparatus, and is configured using a nozzle inspection unit 2 and a computer 3.
The inspection device 1 is used by, for example, the manufacturer of the nozzle 5 to inspect the accuracy of the nozzle 5, the user who wants to purchase the nozzle 5 evaluates the accuracy before the purchase, or the user who has purchased the nozzle 5 It can be used to check the accuracy of the nozzle 5 before.

The nozzle 5 is an expensive precision instrument, and the manufacturer may be an overseas manufacturer with inconvenient communication. Therefore, it is very important for the user of the nozzle 5 to inspect the accuracy with the inspection device 1.
Further, as will be described later, the inspection apparatus 1 can be incorporated into a production line and used as a part of the production line.
Here, the nozzle 5 functions as a droplet ejector that ejects droplets from the nozzle toward the target point.

The nozzle inspection unit 2 includes a housing 4 and a nozzle fixing unit 7.
The housing 4 has a box shape having a hollow portion containing a camera to be described later.
A glass plate xy table 6 is formed on the upper surface of the housing 4, and the nozzle fixing portion 7 is held above the glass plate xy table 6 by a support mechanism (not shown).
On the upper surface of the housing 4, an appropriate position is set as the origin, and the z-axis is formed vertically above, the x-axis is in the horizontal longitudinal direction, and the y-axis is formed in the horizontal short direction to form the right-handed system.

The nozzle fixing unit 7 detachably fixes and holds the nozzle 5 with the discharge direction of the nozzle 5 directed vertically downward (−z direction).
The nozzle fixing unit 7 is movable in the z direction by a numerical control system (not shown) controlled by the computer 3. Thereby, the inspection apparatus 1 can numerically control the height of the nozzle 5. In addition, it can also comprise so that it may move to az direction manually with a jig | tool.
Thus, the nozzle 5 is surrounded by the inner wall, and the space in the vicinity of the nozzle 5 is separated from the disturbance caused by the airflow. For this reason, it is possible to prevent the outside air from being contaminated and the droplets 15 from being deflected by the air current.

The glass plate xy table 6 fixes and holds a glass plate (slide glass), which is a flat plate member constituting the non-application surface of droplets, in a detachable manner.
The glass plate xy table 6 is movable in the x direction and the y direction by a numerical control system (not shown) controlled by the computer 3. Thereby, the test | inspection apparatus 1 can control the position on the xy plane of the glass plate 8 installed in the glass plate xy table 6. FIG.

  As described above, since the nozzle fixing portion 7 and the glass plate xy table 6 are configured to be movable, the inspection apparatus 1 uses the numerical control to place the tip (discharge port portion) of the nozzle 5 with respect to the glass plate. It can be moved by numerical control relative to the direction, the y direction, and the z direction.

The computer 3 includes a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), a storage device, an interface, and the like.
The CPU performs various types of information processing and control in accordance with programs stored in a storage device or the like.
In the present embodiment, a program stored in a storage device is executed by a CPU, and numerical control of the nozzle inspection unit 2, droplet discharge control by the nozzle 5, shooting of a droplet, analysis of a captured image, and droplet landing Performs statistical processing of drop position.

The ROM is a read-only memory, and stores basic programs and parameters when the computer 3 operates.
The RAM is a readable / writable memory, and provides a working memory when the CPU operates.
The storage device is configured using a storage medium such as a hard disk, and stores a program for operating the computer 3, captured image data, statistical processing results, and the like.

  The interface connects the numerical control system of the nozzle inspection unit 2, the discharge control system of the nozzle 5, and electronic control means such as a camera to the computer 3 through signal lines. The computer 3 can perform numerical control of the nozzle inspection unit 2, discharge control of the nozzle 5, photographing with a camera, and reception of image data via the signal line.

Although not shown, a keyboard, mouse, speaker, monitor screen, printer, and the like are also connected to the interface.
The monitor screen displays information such as the inspection operation screen, camera images, and inspection results. Operators can input operations necessary for inspection from the keyboard and mouse, and check the inspection results. it can.
For example, the speaker notifies the operator of the start / end of the inspection by voice, and the printer prints out the inspection result.

FIG. 1B is a diagram for explaining a more detailed configuration of the nozzle inspection unit 2.
The nozzle inspection unit 2 constitutes a droplet landing position measuring device that discharges droplets from a non-contact type dispenser discharge nozzle and measures a position where the droplets land on the coated surface.
The nozzle 5 is, for example, a non-contact dispenser having a cylindrical shape or a conical shape, and discharges a droplet in the axial direction from a single hole at the tip.

The nozzle 5 is held by the nozzle fixing unit 7 so that the discharge direction is vertically downward at a predetermined distance above the glass plate 8 to which the droplet is to be applied.
As a result, the nozzle 5 is opposed to the upper surface of the glass plate 8 in a non-contact manner, and discharges the droplet 15 to a target point provided on the glass plate 8 (a target position where the droplet 15 lands on the design). .

The smaller the distance from the tip of the nozzle 5 to the target point of landing, the better the droplet landing accuracy (landing accuracy). However, in order to avoid interference with the mechanical component that is the target of the droplet, it is preferable that the distance from the tip of the nozzle 5 to the target point is large. For this reason, an optimum distance is searched for by a balance between the two by the inspection described later.
In the present embodiment, it is assumed that the liquid of the droplet 15 is a machine oil for a wristwatch, and the nozzle 5 discharges the oil droplet. Thus, the droplet discharger discharges oil droplets as droplets.

The glass plate xy table 6 is provided in a predetermined region on the upper surface of the housing 4, and the glass plate 8 is placed and fixed thereon.
With such a configuration, the glass plate 8 and the casing 4 are formed in a substantially U-shaped cross-section with the lower part opened, and the surface of the glass plate 8 is opposed to the nozzle 5 and receives the droplet 15. It functions as a coating surface.

The glass plate 8 is a planar member that receives droplets 15 and moves in the x direction and the y direction by numerical control together with the glass plate xy table 6.
In this embodiment, in addition to photographing the droplet 15 that has landed from below, oil droplets are used as the droplet 15, so that glass that is a material having transparency and solvent resistance as a planar member for landing the droplet 15 is used. A plate was used.
As described above, the planar member is composed of a transmissive member that transmits the shadow of the droplet, and is disposed horizontally.

In addition, this is because a glass plate is preferable as an inorganic material from the viewpoint of ensuring transparency and solvent resistance, and does not limit the members.
For example, an organic material such as a transparent resin film such as a polyester film or a polyprolene film can be suitably used.

As will be described later, a target point on which the liquid droplet 15 is deposited by the computer 3 is provided on the upper surface of the glass plate 8.
Then, when the nozzle 5 ejects the droplet 15 to the target point and deposits, the glass plate xy table 6 moves by a predetermined amount under the control of the computer 3, and the glass plate 8 also moves along with this movement. The next target point faces the discharge port of the nozzle 5.

Thus, the droplet discharger (nozzle 5) discharges droplets toward the target point on the planar member (glass plate 8).
Further, the glass plate xy table 6 functions as a moving unit that relatively moves the position of the planar member in the planar direction by a predetermined amount with respect to the droplet discharge device and the imaging unit (camera 10 described later). The moving means changes the target point on the planar member by performing relative movement each time the droplet is discharged by the droplet discharger.

A camera xy table 11 driven by numerical control is provided at the bottom of the space surrounded by the housing 4, and the camera 10 is installed on the table.
As described above, since the camera 10 is isolated from the nozzle 5 by the glass plate 8, the lens can be prevented from being contaminated by the droplet 15.
In addition, the nozzle inspection unit 2 can be reduced in size while preventing mechanical interference between the imaging system and the discharge system.

The camera 10 is a digital camera, and forms an image of an object in the shooting direction (the direction of the center line of the camera lens) on a CCD (Charge-Coupled Device) imaging surface using an optical system, and converts this into digital data. To do.
The camera 10 functions as a photographing unit that photographs the droplets ejected a plurality of times by the droplet ejector.

The camera 10 moves on the xy plane by the camera xy table 11 while keeping the shooting direction in the vertical direction. Then, the camera 10 photographs (images) the droplet 15 that has been deposited from the back side (downward) of the glass plate 8.
In this way, the imaging means images the droplet that has landed on the planar member.

The reason why the camera 10 can be moved in the xy plane by numerical control is to obtain the xy coordinate value of the target point.
That is, the camera 10 can photograph the nozzle inspection unit 2 through the glass plate 8, and the operator operates the computer 3 to move the center position of the camera 10 directly below the discharge port of the nozzle 5.

The coordinate value of the center of the camera 10 at this time is the coordinate value of the target point. That is, the intersection of the vertical line connecting the center of the camera lens and the tip of the nozzle and the glass plate 8 becomes the target point, and the coordinate value can be read from the camera xy table 11.
If the coordinate value of the target point is known, the dispersion of the landing position can be obtained from the difference between the center of the droplet 15 that has landed and the target point.

As described above, the ejector is disposed above the planar member and ejects droplets from above the vertical axis passing through the target point on the planar member toward the target point on the planar member.
Further, the photographing means is disposed below the planar member and photographs the shadow of the droplet that has landed on the planar member from the back side of the planar member.
In this case, the imaging unit is arranged below the planar member, and can also capture the shadow of the droplet that has landed on the planar member from the back side of the planar member on the vertical line.

FIG. 2A is a view for explaining the structure of the glass plate 8.
In the present embodiment, in consideration of the contact angle between the droplet 15 that has landed and the glass plate 8, it is preferable to use a member made of a material that does not allow the adjacent droplets 15 to contact each other.
Therefore, an oil retaining layer 22 is formed on the surface of the glass base member 21 constituting the glass plate 8.
The oil retaining layer 22 is a layer formed by subjecting the surface of the base member 21 to an oil retaining treatment, and is subjected to a coating treatment to reduce the surface free energy of the solid (that is, to repel the oil).

Substances with low surface free energy include saturated fluoroalkyl groups (particularly trifluoromethyl groups, so-called Teflon (registered trademark), etc.), alkylsilyl groups (source of stearic acid and candles), fluorosilyl groups, long-chain alkyl groups, etc. The one having a functional group of is representative.
In addition, in order to optimize the tensile strength and the contact angle with respect to the droplet 15, a laminate of different types of films can be used.
Moreover, the glass plate and film which surface-treated with plasma, reactive gas, UV light, etc. can also be used.

FIG. 2B is a diagram for explaining the structure of the nozzle 5.
Inside the nozzle 5, a conduit 33 for supplying a liquid (here, oil) to be the droplet 15 is disposed coaxially with the discharge direction.
One end side of the conduit 33 is an opening that forms a discharge port, and the other end side is connected to a tank that stores liquid.
A piezo element 31 is attached to the side of the conduit 33. When the piezo element 31 is deformed by a signal from the computer 3, the conduit 33 is also deformed accordingly, thereby discharging the liquid.

Furthermore, a heater 32 is wound on the discharge port side of the conduit 33 from the piezo element 31. The heater 32 heats the temperature of the liquid to lower the viscosity of the liquid so that fine droplets 15 can be formed.
The heating temperature is higher than room temperature and lower than the temperature at which the liquid begins to deteriorate due to heat, and is, for example, 70 degrees Celsius.

FIG. 2C shows the glass plate 8 viewed from the camera 10 side, and a plurality of droplets 15, 15, 15,... Land around the target point.
In this way, the nozzle inspection unit 2 does not overlap each other even if each droplet 15 spreads around the landing point due to impact upon landing or wettability of the surface of the glass plate 8. The droplets 15 are applied so as to be scattered at various positions.
In the figure, the droplets 15 have landed at 18 locations. However, in order to statistically analyze the ejection accuracy as will be described later, the more droplets 15 (100 or more locations are desirable).

At the three corners of the glass plate 8, cross-shaped coordinate creation markers 35, 35, 35 are arranged.
The coordinate creation marker 35 indicates a reference position for the computer 3 to recognize the xy coordinates of the glass plate 8 from the image of the camera 10.

The broken line 36 in the x direction and the broken line 37 in the y direction shown in the figure are target point reference lines set by the computer 3 on the glass plate 8 with reference to the coordinate creation marker 35.
In addition, when what printed the broken lines 36 and 37 on the glass plate 8 previously can be utilized, you may use this.
The broken lines 36 and 37 are arranged in an equidistant grid, and the grid points (intersection points) serve as target points for ejection by the nozzle 5.

  When the inspection apparatus 1 ejects the droplet 15 from the nozzle 5 to one target point, the nozzle 5 is moved to an unused target point to eject the droplet 15, and thereafter, this operation is repeated. A plurality of droplets 15 as samples for collecting statistical data are formed on the glass plate 8.

FIG. 2D is a diagram illustrating an example of an image of the droplet 15 deposited on the glass plate 8 by the camera 10.
As described above, the computer 3 receives the image data created by the camera 10 and analyzes the landing state (landing state) based on the image data.
The computer 3 obtains the barycentric point 41 of the droplet 15 from the image of the droplet 15 and calculates the deviation Δx in the x-axis direction and the deviation Δy in the y-axis direction from the target point 42 that is the intersection of the broken line 36 and the broken line 37. . That is, the barycentric point 41 is a landing point, and the position of the barycentric point 41 is the landing position.

More specifically, for example, the computer 3 stores in advance image information of the droplet 15 that has landed on the glass plate 8 without overlapping, and uses this information and the image of the droplet 15 captured from the camera 10. The center of gravity of each droplet 15 is obtained by comparing and performing predetermined image processing.
The computer 3 calculates this deviation for each droplet 15 that has landed on the glass plate 8, thereby obtaining a sample of variations in the landing position of the droplet 15 by the nozzle 5.
As described above, the imaging unit of the inspection apparatus 1 images the droplets ejected a plurality of times by the droplet ejector for each droplet, and the inspection apparatus 1 uses the image of each captured droplet to A landing position acquisition means for acquiring a landing position for each drop is provided.
The photographing of each droplet can be performed either when each droplet is photographed each time a droplet is ejected or when each droplet is photographed after ejecting a predetermined amount of droplets.

FIG. 3 is a diagram for explaining an example of statistical processing performed by the computer 3.
FIG. 3A is a graph showing the distribution of variation in the x-axis direction of the landing position of the droplet 15 while keeping the z coordinate of the nozzle 5 constant.
In this graph, Δx is plotted on the horizontal axis, and the number of samples (frequency) at which Δx is plotted on the vertical axis. In the figure, the frequency is represented by a curve for easy understanding.

In general, the dispersion of the landing positions of the droplets 15 has a normal distribution, and the computer 3 can calculate ΔX, which is the overall deviation, and the dispersion with respect to the center point by statistically processing the sample.
Assuming that the variance is the square of σ, 1σ, 2σ, and 3σ are ranges in which the droplet 15 is included as 68.27%, ± 2σ, and 99.73%, respectively.
The above is the variation in the x-axis direction, but the computer 3 also calculates ΔY and σ for the variation in the y-axis direction.
The computer 3 outputs these values together with the z coordinate when the nozzle 5 is measured.
As described above, the inspection apparatus 1 includes an accuracy acquisition unit that acquires the accuracy of the droplet landing position of the droplet discharged by the droplet discharger with respect to the target point based on the statistics of the droplet landing position of each droplet. .

ΔX and ΔY represent how much the direction in which the droplet 15 ejected by the nozzle 5 flies is more deviated than when the droplet flies straight. On the other hand, σ indicates how much the protruding droplet 15 spreads.
When the nozzle 5 is brought closer to the glass plate 8, that is, when the z coordinate of the nozzle 5 is decreased, ΔX and ΔY approach 0 and the value of σ decreases.
Therefore, the operator measures these values for each z coordinate of the nozzle 5 and selects the optimum z coordinate of the nozzle 5 in consideration of interference between the nozzle 5 and the mechanical component that is the target of the oil droplet.

When the height of the nozzle 5 is set to the selected z-coordinate value and the nozzle 5 is offset on the xy plane by ΔX and ΔY in the z-coordinate value, as shown in FIG. A bell curve centered on a point.
If the value of σ is in the range of the predetermined set value (for example, if 3σ is in the range of D), the operator determines that the nozzle 5 is an acceptable product.
Also, the optimum z coordinate values ΔX and ΔY in the application of the droplet 15 can be known.

Next, a nozzle inspection method using the inspection apparatus 1 configured as described above will be described.
The inspection method includes a method of photographing every landing and a method of photographing a plurality of droplets at once.
FIG. 4 is a flowchart for explaining an inspection method in the case where the droplet 15 is photographed and measured each time it is deposited.

First, the operator places the glass plate 8 on the glass plate xy table 6 and drives the camera 10 to photograph the coordinate creation marker 35 of the glass plate 8.
Then, the computer 3 sets an xy coordinate system on the glass plate 8 from the position of the coordinate creation marker 35.
Next, the computer 3 sets the z coordinate value of the tip of the nozzle 5. This can be performed, for example, by providing a reference point for the z coordinate value in the nozzle fixing portion 7 and inputting the distance from this point to the tip of the nozzle 5 as a parameter.

Next, the operator confirms the image of the camera 10 from the monitor screen and drives the control device so that the center of the camera and the tip of the nozzle 5 coincide.
For example, a cross indicating the center of the camera is displayed on the image, and the operator makes the tip of the nozzle 5 coincide with the cross. Thereby, the tip of the nozzle 5 and the center of the camera 10 are aligned on the vertical line.
The xy coordinate value of the target point (that is, directly below the nozzle 5) is obtained from the position of the camera on the camera xy table 11 at this time.
Next, the operator inputs the z coordinate value (appropriate initial value) of the tip of the nozzle 5 to the computer 3.

Next, the worker activates the inspection program, and the computer 3 performs the following processing according to the inspection program.
First, the inspection apparatus 1 sets the height of the nozzle 5 by numerically controlling the z-axis so that the distance from the tip of the nozzle 5 to the surface of the glass plate 8 becomes an initial value (step 5).

Next, the inspection apparatus 1 drives the nozzle 5 to discharge the droplet 15 onto the glass plate 8 (step 15).
The discharged droplet 15 is deposited near the target point based on the accuracy of the nozzle 5.
Then, the inspection apparatus 1 drives the camera 10 to photograph the droplet 15 that has landed on the glass plate 8, and transmits image data of the droplet 15 to the computer 3 (step 20).

The computer 3 performs image processing on the image data and calculates the xy coordinate value of the landing position (step 25).
In this calculation, the image of the droplet 15 is subjected to image processing to calculate the center of gravity of the droplet 15, and this xy coordinate value is set as the landing position.
The computer 3 calculates the difference between the coordinate value of the target point calculated earlier and the landing position, and stores this as an error.

Next, the computer 3 drives the glass plate xy table 6 to move the glass plate 8 by a predetermined distance in a predetermined direction (step 30).
Thereby, the unused area | region of the glass plate 8 is supplied directly under the nozzle 5 as a next target point.
Next, the computer 3 determines whether or not the nozzle 5 has ejected a predetermined number of times (step 35).

If the predetermined number has not been reached (step 35; N), the computer 3 returns to step 15 and continues the inspection.
As described above, the inspection apparatus 1 can obtain variation due to repetition by moving the glass plate 8 by a certain amount on the glass plate xy table 6 and obtaining the error again.
On the other hand, when the predetermined number of times has been reached (step 35; Y), the computer 3 adds up the error of each droplet 15 for each z-coordinate value of the nozzle 5, performs statistical calculation, and outputs an output device such as a monitor screen or a printer. (Step 40).

Next, the computer 3 determines whether or not the nozzle 5 is measured with another z coordinate value (step 45).
For example, the operator sets in advance that the z coordinate value is increased by 0.1 mm to a total of 1 mm, or is manually performed by the operator.
If necessary, the glass plate 8 is replaced manually or automatically during this time.

When measuring with other z coordinate values (step 45; Y), the computer 3 returns to step 5, sets the height of the nozzle 5 to the next value, and thereafter repeats the same processing.
On the other hand, when not measuring with another z coordinate value (step 45; N), the computer 3 complete | finishes a process.
Through the above inspection, it is possible to statistically obtain the droplet deposition accuracy of the nozzle 5 according to the distance from the tip of the nozzle 5 to the target position.

FIG. 5 is a flowchart for explaining an inspection method in the case where a plurality of droplets 15 are deposited and imaged at once.
The same steps as those in FIG. 4 are denoted by the same step numbers, and description thereof is omitted.
Steps 5 and 15 are the same as described above.
Next, in this method, the computer 3 does not perform photographing and calculation of the landing position after step 15, moves to step 30, and moves the glass plate 8 and discharges the droplet 15 a predetermined number of times. .

As described above, after the droplet 15 is ejected a predetermined number of times on one surface of the glass plate 8 (step 35; Y), the computer 3 takes an image of the droplet 15 deposited on the glass plate 8 at a time (step 100). ). For this reason, it is effective to use a wide-angle lens for the camera 10.
The computer 3 calculates the position of each target point based on the position of the coordinate creation marker 35 shown in the image.
Next, the computer 3 calculates a landing position for each photographed droplet 15 and further calculates an error from the target point (step 105).

As described above, in this method, first, the droplets 15 are continuously deposited on the glass plate 8, and all of the droplets 15 that have been deposited are photographed at once from the back side of the glass plate 8. Variation in drop position can be calculated at once. Therefore, the inspection process can be speeded up.
Further, when the whole image is taken from the back side of the glass plate 8 at once, the image is distorted as the distance from the center of the lens increases. However, the measurement accuracy can be further improved by providing a function for correcting this.

Next, a second embodiment will be described.
In the first embodiment described above, a droplet is ejected toward a target point on the planar member (glass plate 8) that exists vertically below the nozzle 5, and the droplet of the droplet is captured by the camera 10 from the back side of the glass plate 8. The case where a shadow is photographed has been described.
On the other hand, in the second embodiment, droplets are ejected obliquely toward a target point on the planar member that exists in an oblique direction from the nozzle 5, and the camera 10 is viewed from the same side as the nozzle 5 with respect to the planar member. To photograph the droplet.
According to the second embodiment, a mechanical part such as a wristwatch can cope with a case where a complicated oiling technique is required, such as injecting oil from an oblique side to the base.

FIG. 6 is a diagram for explaining the arrangement positions of the nozzle 5 and the camera 10 in the nozzle inspection unit 2 used in the inspection apparatus 1 of the second embodiment.
FIG. 6A shows a case where the droplet 15 is ejected obliquely downward from the nozzle 5.
The nozzle 5 is directed obliquely downward by the nozzle fixing portion 7, and the nozzle fixing portion 7, the camera xy table 11, and the glass plate xy table 6 are provided on the upper surface and the lower surface of the housing 4, respectively.
The camera 10 faces vertically downward, and the target point of the glass plate 8 is positioned in the shooting direction.
The camera 10 photographs the droplet 15 that has landed on the upper surface of the glass plate 8.

The inclination angle θ of the nozzle 5 (the angle formed by the wall surface of the housing 4 and the axis of the nozzle 5) is variable, and can be adjusted by numerical control, for example. Therefore, the optimum θ can be obtained by observing the landing position at each θ and the shape of the droplet 15.
In addition, since the planar member to which the droplet 15 is applied need not be transparent, a plate material made of a metal material such as stainless steel, titanium, or aluminum is used instead of the glass plate 8 from the viewpoint of ensuring solvent resistance. You can also
The configuration of ejecting the droplet 15 a plurality of times and photographing the landing position with the camera 10 is the same as that of the inspection apparatus 1 described in the first embodiment.

Further, in this configuration, the camera 10 is installed at a position higher than the nozzle 5, so that the droplet 15 does not adhere to the camera 10 and a good image can be taken.
Further, in this configuration, since the nozzle 5 and the camera 10 are housed inside the housing 4, it is possible to reduce the size and prevent the liquid droplets 15 from being deflected by the airflow.

FIG. 6B shows a case where the droplet 15 is ejected obliquely upward from the nozzle 5.
The nozzle 5 is directed obliquely upward by the nozzle fixing portion 7, and the nozzle fixing portion 7, the camera xy table 11, and the glass plate xy table 6 are provided on the lower surface and the upper surface of the housing 4, respectively.
The camera 10 faces vertically upward, and the target point of the glass plate 8 is positioned in the shooting direction.
The camera 10 photographs the droplet 15 that has landed on the lower surface of the glass plate 8.

FIG. 6C shows another example in which the droplet 15 is ejected obliquely downward from the nozzle 5.
The nozzle 5 is directed obliquely downward by the nozzle fixing portion 7, and the nozzle fixing portion 7, the camera xy table 11, and the glass plate xy table 6 are provided on opposite side surfaces of the housing 4.
The camera 10 faces horizontally and the target point of the glass plate 8 is positioned in the shooting direction.
The camera 10 photographs the droplet 15 that has landed on the surface of the glass plate 8.

FIG. 6D shows another example of the case where the droplet 15 is ejected obliquely upward from the nozzle 5.
The nozzle 5 is directed obliquely upward by the nozzle fixing portion 7, and the nozzle fixing portion 7, the camera xy table 11, and the glass plate xy table 6 are provided on opposite side surfaces of the housing 4.
The camera 10 faces horizontally and the target point of the glass plate 8 is positioned in the shooting direction.
The camera 10 photographs the droplet 15 that has landed on the surface of the glass plate 8.

In the above example, the planar member is disposed horizontally or vertically, and the droplet discharge device is disposed on one side of the planar surface of the planar member, and obliquely toward the target point on the planar member. Droplet is discharged.
The photographing unit is disposed on one side of the plane of the planar member, and photographs a droplet that has landed on the planar member from an orthogonal axis orthogonal to the planar member.
In this case, the imaging means is arranged on one side of the plane of the planar member, and it is also possible to photograph the droplet that has landed on the planar member from an orthogonal axis that passes through the target point and is orthogonal to the planar member. is there.
The droplet discharge direction with respect to the target point includes all cases where the droplet is discharged toward the target point at a predetermined angle with respect to a straight line passing through the target point and orthogonal to the planar member.

FIG. 7 is a view for explaining the configuration of the oiling device 60.
The inspection apparatus 1 described in the first embodiment and the second embodiment has been inspected in order to evaluate the accuracy of the nozzle 5, but the lubrication apparatus 60 inspects and corrects the position of the nozzle 5.
The oil supply device 60 includes a nozzle inspection unit 2, an oil supply unit 61, and a computer 3, and functions as a droplet supply device.

The nozzle fixing unit 7 of the nozzle inspection unit 2 further includes an adjustment mechanism that adjusts the position in the x-axis direction and the y-axis direction.
This adjusting mechanism may be numerical control, or may be manually adjusted while reading a numerical value with a measuring instrument such as a micrometer.
As described above, the oil supply device 60 corrects the position of the nozzle in the droplet discharger based on the accuracy of the landing position of the oil droplet discharged by the droplet discharger with respect to the target point, which is acquired by the accuracy acquisition unit. Means.

Then, the operator inspects the droplet landing accuracy of the droplet 15 by the nozzle inspection unit 2, and adjusts the position of the nozzle 5 by −ΔX and −ΔY based on the inspection result.
In the inspection device 1 described above, it is desired to evaluate the droplet deposition accuracy of the nozzle 5 itself, whereas in the oil lubrication device 60, the droplet deposition accuracy (oil droplets to a target point) set in a machine part 62 to be described later. The point to be evaluated is the accuracy of the lubricated mechanical system.
That is, the inspection device 1 evaluates the droplet deposition accuracy of the nozzle 5 itself, whereas the oiling device 60 has the droplet deposition accuracy of the nozzle 5 itself and the mechanical accuracy of the nozzle fixing portion 7 (due to assembly accuracy, etc.). Evaluate the synthesized accuracy.

Therefore, in the inspection apparatus 1, the errors ΔX and ΔY of the droplet deposition of the nozzle 5 itself are measured with the target point directly below the discharge port of the nozzle 5, whereas the lubrication apparatus 60 sets the target point as the target point in the numerical control system. The errors ΔX and ΔY are measured.
Then, when the position of the nozzle 5 is corrected with the ΔX and ΔY, the point aimed by the numerical control system can be set as the center of droplet deposition.

The oil supply part 61 is formed integrally with the nozzle inspection part 2, and the nozzle fixing part 7 can move to the oil supply part 61 while maintaining ΔX and ΔY after adjustment. The nozzle fixing part 7 and the nozzle 5 after the movement are indicated by broken lines.
Alternatively, the position of the nozzle fixing portion 7 may be offset by ΔX and ΔY by software.
The oil supply section 61 drives the adjusted nozzle 5 in the x direction, the y direction, and the z direction by numerical control, and performs oil supply by discharging to a plurality of locations of the mechanical component 62.
As described above, the oil supply device 60 includes the droplet discharger moving means for moving the droplet discharger whose nozzle position is corrected, with the oil droplet supply position of the machine part that is the supply target of the oil droplet being the target point. Yes.
Since the volume of the droplet 15 is approximately constant, an appropriate amount of oil can be applied according to the object to be lubricated by continuously discharging until the required amount is reached.

When the lubrication of the machine part 62 is finished, the lubrication part 61 installs the next machine part 62 and lubricates, and can continuously lubricate the plurality of machine parts 62.
Even if the lubrication position and the amount of lubrication differ depending on the type of the machine part 62, the lubrication location and the lubrication amount are stored in the computer 3 for each type of the machine part 62, and the lubrication is individually performed for each type of the machine part 62. You can also
The operator can check the accuracy of the nozzle 5 as appropriate before and during the operation by the lubrication device 60 configured as described above.
Moreover, in this embodiment, the nozzle inspection part 2 and the oiling part 61 were connected and the oiling apparatus 60 was comprised, However, It removes the glass plate 8 and installs the mechanical component 62 in the position of the glass plate 8, and performs oiling. In addition, the nozzle inspection unit 2 and the oil supply unit 61 may be combined.
In this case, since it is not necessary to move the nozzle fixing part 7 to the oiling part 61, the droplet deposition accuracy can be further increased.

  As described above, according to the first and second embodiments, it is possible to easily detect the discharge state of the droplet 15 of the nozzle 5 that is a non-contact dispenser. It is possible to inspect whether or not the droplet discharge state is good.

Further, according to the first embodiment, since the camera 10 is separated from the atmosphere in the space on the nozzle 5 side, the droplet 15 ejected from the nozzle 5 or the droplet evaporated from the deposited droplet 15. The solvent does not enter the space on the camera 10 side.
As a result, the camera 10 is not contaminated by the droplet 15 and a good droplet image can be always taken.

  According to the first and second embodiments, since the droplet 15 is ejected a plurality of times and inspected, it is possible to accurately detect a minor ejection defect of the nozzle 5 that is difficult to detect by only ejecting the droplet 15 once. In addition, by performing ejection in a state close to the actual application of droplets, it is possible to reliably inspect whether or not there is a displacement of the droplets 15 of the nozzle 5 during the droplet application.

In addition, 1st, 2nd embodiment is not restricted to the above-mentioned embodiment, A various change can be performed.
For example, in the above-described embodiment, a case has been described in which the droplet images of all the droplets 15 that have landed on the glass plate 8 are captured (captured), but the droplet images of the droplets 15 in a specific region are captured. You may make it capture (photograph).

  Moreover, although 1st, 2nd embodiment demonstrated the case where lubrication with respect to a machine part was performed, even if apply | coating an aqueous solution, apply | coating a wiring pattern, and forming a coating film by application | coating, for example Good.

Further, in the first and second embodiments, the droplet 15 is photographed by the camera 10 after the droplet 15 has landed on the planar member (glass plate 8). It is also possible to photograph 15. In this case, the target point is not located on the planar member but slightly located on the nozzle side from the planar member.
In the first embodiment, since the droplet is photographed from the back side of the glass plate 8, it is preferable to use the glass plate 8 having higher transparency.
By photographing the droplets before landing, each droplet 15 is photographed immediately before the landing, so that the landing point is reduced due to impact at the time of landing and wettability of the surface of the glass plate 8. Even if it spreads to the periphery, it is possible to take an image of the droplet 15 without deformation due to landing.

  According to the first and second embodiments, it is possible to accurately measure minor ejection defects (variation in droplet landing positions) of the ejection nozzle of the non-contact dispenser during droplet application, and to measure the actual liquid By discharging in a state close to the application of droplets, it is possible to reliably inspect whether or not there is a discharge error of droplets in the discharge nozzle during the droplet application.

The present embodiment can also be configured as follows.
(1) Configuration 1
A liquid droplet ejector that ejects liquid droplets from a nozzle toward a target point, a photographing unit that photographs a plurality of liquid droplets ejected by the liquid droplet ejector, and an image of each photographed liquid droplet, Based on the acquired landing position statistics for each droplet and the acquired droplet landing position for each droplet, the droplet landing position is obtained with respect to a target point of the droplet landing position discharged by the droplet discharger. There is provided a droplet discharger inspection apparatus comprising an accuracy acquisition means for acquiring accuracy.
(2) Configuration 2
2. The droplet ejector inspection device according to Configuration 1, wherein the imaging unit images a droplet ejected a plurality of times by the droplet ejector for each droplet.
(3) Configuration 3
A planar member, wherein the droplet ejector ejects a droplet toward a target point on the planar member, and the imaging unit images the droplet that has landed on the planar member. A droplet discharge device inspection device according to Configuration 1 or Configuration 2 is provided.
(4) Configuration 4
A moving means for moving the planar member in the plane direction relative to the droplet ejector and the photographing means by a predetermined amount is provided, and the moving means is provided for each droplet ejected by the droplet ejector. The droplet discharger inspection apparatus according to Configuration 3, wherein the target point on the planar member is changed by performing relative movement.
(5) Configuration 5
The planar member is composed of a transmission member through which the shadow of a droplet is transmitted and is disposed horizontally. The droplet discharge device is disposed above the planar member, and is a target point on the planar member. The droplets are ejected from above the vertical axis passing through the plane toward the target point on the planar member, and the photographing means is disposed below the planar member, and the shadow of the droplets deposited on the planar member The droplet ejector inspection device according to Configuration 3 or Configuration 4 is characterized in that the image is taken from the back side of the planar member.
(6) Configuration 6
The droplet ejector provides a droplet ejector inspection device according to any one of configurations 1 to 5, wherein the droplet ejector ejects oil droplets as droplets.
(7) Configuration 7
Based on the accuracy with respect to the target point of the landing position of the oil droplet ejected by the droplet ejector, which is obtained by the droplet ejector inspection device according to Configuration 6 and the accuracy obtaining unit, in the droplet ejector A correction unit that corrects the position of the nozzle, and a droplet discharger that moves the droplet discharger that has corrected the nozzle position, with the oil droplet supply position of a mechanical component that is the supply target of the oil droplet as a target point And a droplet supply device.
(8) Configuration 8
A droplet ejector inspection method for inspecting a droplet ejector that ejects a droplet from a nozzle toward a target point, the imaging step of photographing a droplet ejected a plurality of times by the droplet ejector, and The droplet ejector ejects the droplet based on the captured droplet image based on the acquired droplet landing position acquisition step for acquiring the droplet landing position for each droplet and the acquired droplet landing position statistics. And an accuracy acquisition step of acquiring the accuracy with respect to the target point of the landing position of the droplet to be dropped.

DESCRIPTION OF SYMBOLS 1 Inspection apparatus 2 Nozzle inspection part 3 Computer 4 Case 5 Nozzle 6 Glass plate xy table 7 Nozzle fixing part 8 Glass plate 10 Camera 11 Camera xy table 15 Droplet 21 Base member 22 Oil retaining layer 31 Piezo element 32 Heater 33 Conduit 35 Coordinate Marker for creation 36, 37 Dashed line 41 Center of gravity point 42 Target point 60 Lubrication device 61 Lubrication part 62 Machine parts

Claims (5)

A planar member arranged horizontally or vertically;
A liquid droplet ejector having a nozzle disposed on one side of a plane of the planar member and ejecting a droplet from an oblique direction toward a target point on the planar member;
Photographing the droplets disposed on the one side of the plane of the planar member and photographed from an orthogonal axis orthogonal to the planar member, which is ejected a plurality of times by the droplet ejector and deposited on the planar member. Photographing means;
With the captured image of each droplet, droplet landing position acquisition means for acquiring a droplet landing position for each droplet;
Based on the acquired landing position statistics of each droplet, accuracy acquisition means for acquiring the accuracy of the droplet landing position discharged by the droplet discharger with respect to a target point;
A droplet discharger inspection device comprising: The photographing means photographs the droplets ejected a plurality of times by the droplet ejector for each droplet.
The droplet discharger inspection device according to claim 1. A moving means for moving the position of the planar member in the planar direction relative to the droplet discharger and the imaging means by a predetermined amount;
The moving means changes the target point on the planar member by performing relative movement for each discharge of droplets by the droplet discharger.
The droplet discharger inspection device according to claim 1 or 2, characterized in that The droplet ejector ejects oil droplets as droplets,
The droplet discharger inspection device according to any one of claims 1 to 3, wherein the droplet discharger inspection device is characterized in that: A droplet discharger inspection device according to claim 4;
Correction means for correcting the position of the nozzle in the droplet discharger based on the accuracy with respect to the target point of the landing position of the oil droplet discharged by the droplet discharger, acquired by the accuracy acquisition unit;
Droplet ejector moving means for moving the droplet ejector with the position of the nozzle corrected, with the target being the oil drop supply position of a machine part that is the subject of oil droplet supply;
A droplet supply device comprising:

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