JP2016044979A5 - - Google Patents

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Publication number
JP2016044979A5
JP2016044979A5 JP2014166926A JP2014166926A JP2016044979A5 JP 2016044979 A5 JP2016044979 A5 JP 2016044979A5 JP 2014166926 A JP2014166926 A JP 2014166926A JP 2014166926 A JP2014166926 A JP 2014166926A JP 2016044979 A5 JP2016044979 A5 JP 2016044979A5
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JP
Japan
Prior art keywords
counter electrode
fixed electrode
electrode
physical quantity
quantity sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014166926A
Other languages
English (en)
Japanese (ja)
Other versions
JP6464608B2 (ja
JP2016044979A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2014166926A priority Critical patent/JP6464608B2/ja
Priority claimed from JP2014166926A external-priority patent/JP6464608B2/ja
Priority to US14/822,041 priority patent/US9810712B2/en
Priority to CN201510494373.3A priority patent/CN105372451B/zh
Publication of JP2016044979A publication Critical patent/JP2016044979A/ja
Publication of JP2016044979A5 publication Critical patent/JP2016044979A5/ja
Priority to US15/723,726 priority patent/US10641789B2/en
Application granted granted Critical
Publication of JP6464608B2 publication Critical patent/JP6464608B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2014166926A 2014-08-15 2014-08-19 物理量センサー、電子機器および移動体 Expired - Fee Related JP6464608B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2014166926A JP6464608B2 (ja) 2014-08-19 2014-08-19 物理量センサー、電子機器および移動体
US14/822,041 US9810712B2 (en) 2014-08-15 2015-08-10 Physical quantity sensor, physical quantity sensor device, electronic equipment, and moving body
CN201510494373.3A CN105372451B (zh) 2014-08-15 2015-08-12 物理量传感器、物理量传感器装置、电子设备以及移动体
US15/723,726 US10641789B2 (en) 2014-08-15 2017-10-03 Physical quantity sensor, physical quantity sensor device, electronic equipment, and moving body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014166926A JP6464608B2 (ja) 2014-08-19 2014-08-19 物理量センサー、電子機器および移動体

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2019001879A Division JP6665950B2 (ja) 2019-01-09 2019-01-09 物理量センサー、電子機器および移動体

Publications (3)

Publication Number Publication Date
JP2016044979A JP2016044979A (ja) 2016-04-04
JP2016044979A5 true JP2016044979A5 (https=) 2017-09-28
JP6464608B2 JP6464608B2 (ja) 2019-02-06

Family

ID=55635689

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014166926A Expired - Fee Related JP6464608B2 (ja) 2014-08-15 2014-08-19 物理量センサー、電子機器および移動体

Country Status (1)

Country Link
JP (1) JP6464608B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6897224B2 (ja) 2017-03-27 2021-06-30 セイコーエプソン株式会社 物理量センサー、電子機器、および移動体
JP6816603B2 (ja) 2017-03-27 2021-01-20 セイコーエプソン株式会社 物理量センサー、電子機器、および移動体
JP6911444B2 (ja) 2017-03-27 2021-07-28 セイコーエプソン株式会社 物理量センサー、電子機器、および移動体

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008043790B4 (de) * 2008-11-17 2017-04-06 Robert Bosch Gmbh Mikromechanisches Bauelement
JP5681408B2 (ja) * 2010-08-05 2015-03-11 旭化成エレクトロニクス株式会社 静電容量型加速度検出装置及びそのキャリブレーション方法
JP5811634B2 (ja) * 2011-06-30 2015-11-11 セイコーエプソン株式会社 物理量センサー、電子機器
JP5979344B2 (ja) * 2012-01-30 2016-08-24 セイコーエプソン株式会社 物理量センサーおよび電子機器
JP5930183B2 (ja) * 2012-04-09 2016-06-08 セイコーエプソン株式会社 物理量センサーおよび電子機器

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