JP2016041630A - Glass film transport device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a glass film transport device which takes up a glass film and a protective sheet in a layer.SOLUTION: A glass film transport device 1a includes: an unwinding section 2 for unwinding a glass film from a roll around which the glass film is wound; a glass film transport section 3 for transporting the glass film unwound from the unwinding section 2; and a take-up section 4 for laminating the protective sheet on the glass film transported by the glass film transport section 3 and taking it up in a roll. The glass film transport device 1a has a take-up adjustment mechanism for adjusting a take-up state of the protective sheet and the glass film in the take-up section 4. The take-up adjustment mechanism adjusts the take-up state of the protective sheet and the glass film while keeping a positional relationship in which the glass film is laminated on the protective sheet in a rotation range where a rotation angle after the protective sheet has come in contact with the take-up section is 90° or more and 315° or less.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a thin film glass (glass film) conveyance device that is flexible and can be wound into a roll.

In recent years, thin film glass (glass film) having excellent gas barrier properties and translucency has been used as a substrate material for display devices that display images and the like. At present, the thickness of a general glass film is about 200 μm, but recently, an extremely thin glass film having a thickness of less than 200 μm and a thickness of about 30 μm to 150 μm has been developed.
Such an extremely thin glass film has flexibility because of its thinness, and can be handled as a glass roll obtained by winding the glass film into a roll. The glass roll has a protective sheet (protective film) between the adjacent glass films for the purpose of preventing the glass film wound in a roll shape from coming into contact with the glass film adjacent to the inner peripheral side and the outer peripheral side and breaking. There is something in between.

Patent Document 1 discloses a method for producing a glass roll in which a protective sheet is sandwiched between adjacent glass films.
The method for producing a glass roll disclosed in Patent Document 1 is a method for producing a glass roll by forming a glass film by a downdraw method and winding the shaped glass film on a protective sheet and winding it into a roll. The glass film and the protective sheet are wound up while applying a greater tension in the winding direction than the glass film to the protective sheet.

As a method for efficiently performing various treatments on such a flexible glass film, a glass roll in which a long glass film is wound in a roll shape is conveyed in a roll-to-roll manner, Various techniques for performing various treatments such as coating on the surface have been proposed.
Examples of various treatments for the surface of the glass film include treatments performed in a vacuum vessel whose pressure has been reduced to near the vacuum pressure, such as vacuum deposition and sputtering. Since various effects due to pressure changes occur in a container whose pressure has been reduced to near the vacuum pressure, various treatments (surface treatment) such as vacuum deposition and sputtering are carried out while the glass roll is being transported in consideration of the effect. Technologies have been proposed.

Patent document 2 is disclosing the thin film glass conveying apparatus which conveys thin film glass under a vacuum pressure vicinity.
The thin film glass transport device disclosed in Patent Document 2 includes a thin film glass that includes pressure control means capable of controlling the pressure in the vacuum container and transports a long thin film glass in the vacuum container that has been decompressed to near the vacuum pressure. In the transport apparatus, the pressure control means is configured to reduce the pressure in the vacuum container to 10000 Pa over a period of 3 minutes or more in a state where the roll-shaped thin film glass is disposed in the vacuum container. The pressure is reduced to near the vacuum pressure.

In this thin film glass conveying device, after decompressing under the above-mentioned conditions, the protective film sandwiched between the thin film glasses of the glass roll is removed from the thin film glass during unwinding, and the thin film glass wound with the surface treatment is wound. At the time of taking, another protective film is sandwiched between the thin film glasses, and the thin film glass is wound up in a roll shape.
Further, Patent Document 3 unwinds a base material on which a protective material is laminated and wound in a roll shape while separating it from the protective material, and rolls the unwound protective material together with the base material on which film formation has been performed again. Disclosed is a continuous film forming apparatus that winds up into a shape.

  The continuous film forming apparatus disclosed in Patent Document 3 includes a protective material laminated, holds a base material wound in a roll, and unwinds the base material together with the protective material from the unwinding roll. A substrate unwound together with the protective material is rotatably supported so that the protective material comes into contact with the unwinding portion provided with an unwinding side support roll that conveys to the downstream side, and the unwinding side support roll. A winding side support roll that rotatably supports the passed base material and conveys it to the downstream side, and a winding unit including a winding roll that winds the base material through the winding side support roll; A film forming source for forming a film on the surface of the substrate that is continuously conveyed in a state where tension is applied from the unwinding side support roll to the winding side support roll; When passing through the unwinding side support roll together with the protective material from the base material Separating and conveying the protective material separated and conveyed to the winding side, and the protective material separated and conveyed by the protective material separating and conveying means when the substrate after film formation is supported by the winding side support roll It has a protective material separation and supply section provided with a protective material transport and supply means that contacts the take-side support roll and feeds the base material while transporting it to the base material so as to be laminated.

According to this continuous film forming apparatus, a film can be formed without causing defects in the substrate.
The continuous film forming apparatus of Patent Document 3 is not intended for processing specifically for a glass film, but separates and transports the protective material from the film forming target, and superimposes and winds the film during winding. Such a configuration is considered to be a preferable configuration as a glass roll film forming apparatus in which a glass film and a protective sheet described in Patent Document 1 are overlaid.

JP 2011-201765 A JP 2012-1405 A JP 2008-189957 A

Considering that a thin film glass (glass film) manufactured by a technique such as Patent Document 1 is subjected to surface treatment and the like, a case where the continuous film forming apparatus of Patent Document 3 is adopted is considered.
Here, since the continuous film-forming apparatus of Patent Document 3 is based on the premise that both the base material and the protective material are resin-based materials, the base material in the continuous film-forming apparatus of Patent Document 3 is as shown in Patent Document 2. When the thin film glass which is an inorganic substance is employed, the following problems occur.

  That is, when a protective material (protective film) that is a resin-based material is conveyed in a vacuum, moisture and organic components contained therein may evaporate and the protective film may shrink, but on the other hand, it is an inorganic substance. Glass film does not shrink. Therefore, as in the continuous film forming apparatus of Patent Document 3, when the unwound protective film is wound again into a roll with the glass film, the protective film becomes shorter than the glass film due to shrinkage, and excessive force is applied to the glass. The glass film may be damaged by adding to the film or generating strong wrinkles due to excessive tension.

Conversely, the protective film, which is a resin material, may be stretched by applied tension depending on the material and thickness. In this case, the protective film loosens and becomes undulated during winding, and the glass film may be damaged by the irregularities of the undulated protective film.
In other words, when a glass film is to be treated, when the protective film made of resin and the glass film are overlapped and wound, simply winding the protective film with a slight swell when winding the protective film. There is a risk of damage.

  This invention is made | formed in view of the above-mentioned problem, and it aims at providing the glass film conveying apparatus which can overlap and wind up a glass film and a protective film.

In order to solve the above problems, the film forming method of the present invention employs the following technical means.
That is, the glass film conveyance device of the present invention is a glass film conveyance device that continuously conveys a long glass film, and a roll-out unit that unwinds the glass film from a roll around which the glass film is wound; A glass film transport unit that transports the glass film unwound from the unwind unit, and a wind-up unit that winds up the roll while laminating a protective sheet on the glass film transported by the glass film transport unit. And a winding adjustment mechanism that adjusts the winding state of the protective sheet and the glass film in the winding portion, and the winding adjustment mechanism has a rotation angle after the protective sheet is in contact with the winding portion. While maintaining the positional relationship in which the glass film is laminated on the protective sheet in a rotation range of 90 ° or more and 315 ° or less. And adjusting the winding state of the glass film.

  Moreover, the glass film conveyance device of the present invention is a glass film conveyance device that continuously conveys a long glass film, and from a roll around which the glass film is wound, A glass film transport unit that transports the glass film unwound from the unwind unit, and a wind-up unit that winds up the roll while laminating a protective sheet on the glass film transported by the glass film transport unit. And a winding adjustment mechanism that adjusts the winding state of the protective sheet and the glass film in the winding portion, and the winding adjustment mechanism is a glass conveyed by the glass conveying portion on the protective sheet. A laminating roller for laminating films, and a first rotation angle of the laminating roller after the protective sheet is in contact with the laminating roller; In the rotation range of 5 ° or more, the glass film is laminated on the protective sheet, and in the rotation range in which the second rotation angle of the lamination roller after the lamination is 30 ° or more and 90 ° or less, the glass The protective sheet on which the film is laminated is separated from the laminating roller after being conveyed while maintaining contact with the laminating roller, and the sum of the first rotation angle and the second rotation angle is 270 ° or less. It is characterized by being.

Preferably, a protective sheet conveying unit that unloads the protective sheet separated from the glass film unwound from the unwinding unit and loads the protective sheet toward the winding unit may be provided.
Preferably, the protective sheet separated from the glass film unwound from the unwinding unit is collected, and the collected protective sheet may be wound up by the winding unit.

Here, preferably, the protective sheet conveying unit applies tension to the protective sheet being conveyed by the protective sheet conveying unit along the width direction of the protective sheet, and in the protective sheet conveying unit. It is preferable to have a dancer roller mechanism that adjusts the length of the conveyance path of the protective sheet.
Further, preferably, the dancer roller mechanism has a first roller and a second roller that apply tension by contacting the protective sheet in parallel with each other, and the first roller is one of the protective sheets. The second roller is disposed at a position capable of contacting the other surface of the protective sheet, and the first roller and the second roller are in contact with the protective sheet. It should be possible to move in the direction.

Moreover, it is preferable that at least one roller constituting the protective sheet conveying unit has viscosity on a contact surface with the protective sheet.
Furthermore, it is good to provide two mutually independent area | regions which store the said glass sheet conveyance part and the said protection sheet conveyance part separately, and these two area | regions are each exhausted independently.

  According to the film forming method of the present invention, the glass film and the protective film can be stacked and wound.

It is the schematic which shows the structure of the glass film conveying apparatus by 1st Embodiment of this invention. It is the schematic which shows the dancer roller mechanism of the glass film conveying apparatus by 1st Embodiment, (a)-(c) shows a modification, respectively. It is the schematic which shows the structure of the glass film conveying apparatus by 2nd Embodiment of this invention. It is a figure which shows schematic structure in the state by which the glass film conveying apparatus was accommodated in the vacuum chamber by 3rd Embodiment of this invention. It is the schematic which shows the structure of the glass film conveying apparatus by 1st Embodiment of this invention, (a) And (b) shows a modification, respectively. It is the schematic which shows the modification of the winding adjustment mechanism of the glass film conveying apparatus by 2nd Embodiment of this invention.

Hereinafter, the glass film conveying apparatus by embodiment of this invention is demonstrated, referring drawings. In addition, in each embodiment and drawing demonstrated below, suppose that the same code | symbol and the same name are attached | subjected to the same structural member in a glass film conveyance apparatus. Therefore, the same description will not be repeated for the components having the same reference numerals and the same names.
[First Embodiment]
The glass film transport apparatus 1a according to the first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a schematic diagram showing the configuration of the glass film transport apparatus 1a according to the present embodiment. FIG. 2 is a schematic view showing a configuration of a dancer roller mechanism used in the glass film transport apparatus 1a.

  The glass film conveying apparatus 1a is unwound and unwinding part 2 which unwinds a glass film from the glass roll by which the very thin glass film about 30 micrometers-about 150 micrometers in thickness is rolled, for example about 1 meter in width. A glass film transport unit 3 for transporting the glass film to a surface treatment process for performing surface treatment such as sputtering and vapor deposition, and a winding unit 4 for winding the surface-treated glass film again as a roll-shaped glass roll. Have. The glass film conveying apparatus 1a is an apparatus that conveys a glass roll in which a long glass film having a length of, for example, 100 m or more is wound in a roll shape by a so-called roll-to-roll method.

  Here, in the glass roll, the glass film is alternately laminated with a protective sheet made of a resin formed to have substantially the same width as the glass film. The thickness of the protective sheet is approximately the same as that of the glass film, but may not be approximately the same as that of the glass film as long as the glass film can be protected from breakage and damage. Here, the phrase “the glass film and the protective sheet have substantially the same width” means that the difference between the glass film width and the protective sheet width is less than about 100 mm, and more typically about 50 mm or less. Most typically, the width of the protective sheet is increased by about 50 mm with respect to the glass film width, and the glass film may be prevented from being damaged even when the glass roll receives an accidental force from the end. In another example, protective members called edge tabs may be attached to both ends of the glass film. In this case, the protective sheet is 10-50 mm narrower than the glass film, and the protective sheet interferes with the protective member. There is a case to avoid. Or the width of a glass film and a protection sheet may be made completely the same.

Thus, the glass film and the protective sheet are wound around an unwinding core that constitutes a part of the unwinding portion 2 described later to form a glass roll. The unwinding core is made of, for example, stainless steel or a plastic material.
When unwinding the glass film from the unwinding section 2, the method of first unwinding the glass film and the protective sheet at the same time, and then separating the glass film and the protective sheet, and the protective sheet after unwinding the glass film first. There is a method of unwinding the glass film and the protective sheet alternately.

With reference to FIG. 1, the structure of the glass film conveyance apparatus 1a by this embodiment is demonstrated.
In the following description, the up-down direction toward the paper surface of FIG. 1 is the up-down direction of the glass film transport device 1a, and the left-right direction toward the paper surface is the left-right direction of the glass film transport device 1a.

  As described above, the glass film conveyance device 1a includes the unwinding unit 2 for unwinding the glass film from the glass roll, the glass film conveyance unit 3 for conveying the unwound glass film to the surface treatment process, and surface treatment. And a winding unit 4 for winding the glass film again into a roll shape. In addition, the protective sheet unwound from the glass roll at the unwinding unit 2 is conveyed and directed toward the winding unit 4. The protective sheet conveying section 5a for carrying in the protective sheet. The glass film transport apparatus 1a having such a configuration is provided in a box-shaped vacuum chamber 6, for example.

The vacuum chamber 6 is formed in a hollow bowl shape inside, and holds the inside airtight against the outside of the vacuum chamber 6. Although not shown, a vacuum pump is provided below the vacuum chamber 6, and the inside of the vacuum chamber 6 is depressurized to a vacuum state or a low pressure state by the vacuum pump.
An unwinding unit 2 fitted with a glass roll is arranged on the upper left side of the central portion in the vertical direction in the vacuum chamber 6 shown in FIG. The unwinding core is a cylindrical or columnar winding core having a slightly longer overall length than the width of the glass film or the protective sheet. A glass roll is formed on the unwinding core by alternately winding a glass film and a protective sheet. By attaching this glass roll to the apparatus, it becomes the unwinding part 2.

In this way, the unwinding part 2 fitted with the glass roll is arranged in the vacuum chamber 6 so that the rotation axis of the unwinding part 2 to which the unwinding core is attached is perpendicular to the paper surface of FIG. Yes. Therefore, it can be said that the unwinding part 2 is a member that rotates around the rotation axis by unwinding the glass film and the protective sheet from the glass roll.
1 below the center in the vertical direction in the vacuum chamber 6 shown in FIG. 1, and below the unwinding portion 2, with respect to the surface of the glass film unwound from the unwinding portion 2 and separated from the protective sheet. For example, a film forming mechanism for performing a surface treatment process such as sputtering or plasma CVD is provided. In the present embodiment, a sputter film forming unit 7 is provided as an example of the film forming mechanism unit.

The glass film conveyance part 3 is comprised including the conveyance member of the glass film in the sputter film-forming part 7 which implements this surface treatment process. FIG. 1 shows a film forming roll 8 and a sputter evaporation source T, which are a part of the configuration of a general sputter film forming unit 7.
The film forming roll 8 of the sputter film forming unit 7 shown in FIG. 1 is a conveying member that is formed in a cylindrical shape or a columnar shape with a stainless material or the like, and that is wound around a glass film around a peripheral surface forming a curved surface. The film forming roll 8 is arranged such that the axis (rotating axis) of the film forming roll 8 serving as the rotation center is substantially parallel to the axis serving as the rotation center of the unwinding unit 2.

The sputter evaporation source T is disposed on the left and right sides of the film forming roll 8 so as to face the glass film conveyed by the film forming roll 8. The sputter evaporation source T is an evaporation source composed of components deposited on the surface of the glass film, and the component sputtered (evaporated) by glow discharge is guided and deposited on the surface of the glass film as is well known.
As above-mentioned, the film-forming roll 8 comprises the glass film conveyance part 3 as what conveys the glass film unwound from the unwinding part 2 in order to implement a surface treatment process.

Referring to FIG. 1, the glass film transport apparatus 1 a includes a first guide roller 9 between the unwinding unit 2 and the film forming roll 8. The first guide roller 9 is a member formed in a cylindrical shape or a columnar shape by a stainless material or the like, similar to the film forming roll 8, but has a cylindrical or columnar shape having an outer diameter smaller than the outer diameter of the film forming roll 8. Have.
The rotation axis of the first guide roller 9 is parallel to the rotation axis of the unwinding unit 2 and the film forming roller 8, and is closer to the center of the vacuum chamber 6 than the left end of the film forming roll 8 in the left-right direction of the vacuum chamber 6. That is, the film forming roll 8 is disposed near the rotation axis. This arrangement of the first guide roller 9 makes it possible to always convey the glass film from the film forming roll 8 from a certain angle and direction.

Although the glass film transport unit 3 can be configured only by the film forming roll 8, in the present embodiment, the glass film transport unit 3 is configured by the film forming roll 8 and the first guide roller 9. A glass film conveyance path is formed.
In the vacuum chamber 6 shown in FIG. 1, a winding unit 4 is disposed on the right side of the unwinding unit 2 toward the paper surface of FIG. The winding unit 4 winds again the glass film that has been subjected to the surface treatment through the glass film transport unit 3 as a roll-shaped glass roll.

  The winding unit 4 is configured in the same manner as the unwinding unit 2 and has a cylindrical or column-shaped winding core (winding core) that is slightly longer than the width of the glass film or the protective sheet. The winding unit 4 is arranged so that the rotation axis of the winding unit 4 that is the axis of the winding core is perpendicular to the paper surface of FIG. 1, that is, the above-described winding unit 2 and film forming roll 8. Are arranged in the vacuum chamber 6 so as to be parallel to the rotation axis.

Such a winding unit 4 is rotated around an axis of rotation by an actuator or the like, thereby winding up a protective sheet from a protective sheet conveying unit 5 described later and winding up a glass film from the glass film conveying unit 3. .
Here, as shown in FIG. 1, the glass film transport apparatus 1 a includes a second guide roller 10 between the winding unit 4 and the film forming roll 8 and on the right side of the first guide roller 9. . The second guide roller 10 has the same configuration as the first guide roller 9, and is a member formed in a cylindrical shape or a columnar shape by a stainless material or the like, like the film forming roll 8. It has the same outer diameter as the outer diameter.

  The rotation axis of the second guide roller 10 is parallel to the rotation axes of the winding unit 4 and the film forming roller 8, and is closer to the center of the vacuum chamber 6 than the right end of the film forming roll 8 in the left-right direction of the vacuum chamber 6. That is, the film forming roll 8 is disposed near the rotation axis. This arrangement of the second guide roller 10 makes it possible to always carry out the glass film with respect to the film forming roll 8 along a certain angle and direction.

In the above description, in the glass film conveyance apparatus 1a, the structure until the glass film unwound from the unwinding part 2 is wound up again by the winding part 4 was demonstrated. Below, the structure until the protective sheet unwound from the unwinding part 2 is wound up by the winding part 4 again as a roll is demonstrated.
The glass film conveying apparatus 1 a includes a protective sheet conveying unit 5 a that unloads the protective sheet separated from the glass film unwound from the unwinding unit 2 and loads the protective sheet toward the winding unit 4.

As shown in FIG. 1, the protective sheet conveying unit 5 a includes a first protective sheet roller 11 disposed above the unwinding unit 2, a second protective sheet roller 12 disposed above the winding unit 4, and a first protective sheet roller 12. It has a dancer roller 13 a disposed substantially in the middle between the first protective sheet roller 11 and the second protective sheet roller 12.
The first protective sheet roller 11 and the second protective sheet roller 12 are cylindrical or columnar rollers having substantially the same configuration as the first guide roller 9 and the second guide roller 10, and in the present embodiment, the first protective sheet roller 11 and the second protective sheet roller 12 The outer diameters of the protective sheet roller 11 and the second protective sheet roller 12 are smaller than the outer diameters of the first guide roller 9 and the second guide roller 10. Each of the first protective sheet roller 11 and the second protective sheet roller 12 has a rotating shaft near the unwinding portion 2 or the winding portion 4 and the rotating shaft of the unwinding portion 2 and the winding portion 4. Are arranged so as to be substantially parallel to each other.

  The dancer roller 13 a is a roller having substantially the same configuration as the first protective sheet roller 11 and the second protective sheet roller 12. The dancer roller 13 a has a rotational axis substantially parallel to the rotational axes of the first protective sheet roller 11 and the second protective sheet roller 12 at a substantially intermediate position between the first protective sheet roller 11 and the second protective sheet roller 12. Although arranged, the linear movement in the vertical direction is possible while maintaining the parallel rotation axis.

  As shown in FIG. 2A, the intermediate position of the dancer roller 13a in the vertical movement range is slightly below the rotational axes of the first protective sheet roller 11 and the second protective sheet roller 12. The dancer roller 13a moves up and down by its own weight or a linear slider within the range of movement in the vertical direction, and from above with respect to the protective sheet spanned from the first protective sheet roller 11 to the second protective sheet roller 12. A dancer roller mechanism is realized that applies a tension along the conveying direction of the protective sheet by applying a load along the width direction of the protective sheet.

  When the conveyance path length of the protective sheet becomes longer due to the extension, the dancer roller 13a moves downward by an amount corresponding to the increase in the conveyance path length, and between the first protective sheet roller 11 and the second protective sheet roller 12. Adjustment is made so that the transport path length of the protective sheet becomes longer. On the contrary, when the conveyance path length of the protection sheet is shortened due to the contraction, the dancer roller 13a moves upward by the amount corresponding to the shortening of the conveyance path length, and the first protection sheet roller 11 and the second protection sheet roller 12 are moved. It adjusts so that the conveyance path length of the protection sheet in between becomes short.

That is, the dancer roller 13a appropriately adjusts the transport path length of the protective sheet, and always applies tension to the protective sheet even if the transport path length of the protective sheet changes. And excessive tension due to shrinkage can be prevented. In this way, the dancer roller 13a can realize stable transport of the protective sheet.
Then, the operation | movement of the glass film conveying apparatus 1a is demonstrated, referring FIG. Below, description of preparation operation for operating the glass film conveyance apparatus 1a, such as carrying a glass roll in the glass film conveyance apparatus 1a and winding a protection sheet and a glass film around each roller, is abbreviate | omitted.

From the glass roll of the unwinding part 2, the glass film which is one film of a laminated | multilayer film is unwinded, and is conveyed to the glass film conveyance part 3. FIG. In addition, after the unwinding unit 2 has rotated about half a half from the unwinding of the glass film, the protective sheet that is the other film of the laminated film is unwound and conveyed to the protective sheet conveying unit 5.
The glass film transported to the glass film transport unit 3 is subjected to a surface treatment by being sputtered while being wound around the film forming roll 8 from the first guide roller 9.

The surface-treated glass film is conveyed from the film forming roll 8 to the second guide roller 10, and is conveyed from the second guide roller 10 to the winding unit 4.
Simultaneously with the conveyance of the glass film, the protective sheet is conveyed to the protective sheet conveying unit 5 and is conveyed from the first protective sheet roller 11 to the winding unit 4 through the second protective sheet roller 12. A tension | tensile_strength is added to the protection sheet by the dancer roller 13a in the middle of being conveyed from the 1st protection sheet roller 11 to the 2nd protection sheet roller 12. FIG.

As shown in FIG. 1, the protective sheet that has passed through the second protective sheet roller 12 is wound around the winding unit 4. The winding unit 4 winds the glass film conveyed from the second guide roller 12 on the previously wound protective sheet after rotating about half a half after the protective sheet is wound, and again the glass roll. Form.
As described above, the winding unit 4 winds the glass film on the wound protective sheet after rotating to some extent, not immediately after winding the protective sheet. The winding unit 4 performs the winding of the protective sheet and the winding of the glass film with a time difference. This time difference is realized by the positional relationship between the second guide roller 10 and the second protective sheet roller 12 with respect to the winding unit 4. For example, the positions of the second guide roller 10 and the second protective sheet roller 12 are changed. Therefore, it can change according to the characteristic of a glass film or a protection sheet.

Therefore, it can be said that the winding adjustment mechanism is configured by the winding unit 4, the second guide roller 10, and the second protective sheet roller 12. The second protective sheet roller 12 is a constituent member included in both the protective sheet conveying unit 5a and the winding adjustment mechanism.
Even if the resin protective sheet unwound from the winding unit 4 is contracted or extended in a vacuum by the glass film conveying apparatus 1a having the dancer roller mechanism described above, it always has an appropriate conveying path length. Since it is adjusted and an appropriate tension is applied, it is wound around the winding portion 4 without causing wrinkles or undulations. If the protective sheet is wound without causing wrinkles or undulations, it is possible to prevent the glass film wound on the protective sheet from being damaged. Further, excessive tension is applied to the protective sheet, which can prevent the glass film from being damaged.

Next, a modification of the dancer roller mechanism will be described with reference to FIG.
FIG. 2B shows a dancer roller 13 b that rotates about the rotation axis of the second protective sheet roller 12. In FIG. 2B, one end side of two flat arms 14 rotating around the rotation shaft is attached to the rotation shaft of the second protection sheet roller 12 on both ends of the second protection sheet roller 12. It has been. A dancer roller 13 b is attached to the other end side of the two arms 14 so as to be parallel to the rotation axis of the second protective sheet roller 12. The two arms 14 allow the dancer roller 13b to rotate about the rotation axis of the second protective sheet roller 12, and as shown in FIG. 2 (b), tension can be applied from above the protective sheet. it can. The two arms 14 holding the dancer roller 13b may be rotated by the weight of the dancer roller 13b, or the two arms 14 are rotated independently of the rotation axis of the second protective sheet roller 12. You may rotate by the actuator to make.

  Another modification of the dancer roller mechanism is shown in FIG. The dancer roller mechanism shown in FIG. 2 (c) holds the first roller 13c and the second roller 13d having the same configuration as the dancer roller 13b described above in parallel. The first roller 13c and the second roller 13d kept in parallel are sandwiched by two discs 15 from the rotation axis direction of each roller to form a dancer roller mechanism. At this time, in the direction of the rotation axis of the first roller 13c and the second roller 13d kept parallel, the centers of the two disks 15 correspond to each other, and the rotation axes of the first roller 13c and the second roller 13d are It is preferable that each disk 15 is held by the disk 15 so as to be equidistant from the center of the disk 15 on a certain diameter.

  Further, as shown in FIG. 2 (c), the center of the two disks 15, that is, the rotation shaft of the dancer roller mechanism in which the first roller 13c and the second roller 13d are integrated, is the two disks 15 At a substantially intermediate position between the first protective sheet roller 11 and the second protective sheet roller 12 so as to be parallel to the rotation axes of the first protective sheet roller 11 and the second protective sheet roller 12. Be placed.

After passing the protective sheet between the first roller 13c and the second roller 13d of the dancer roller mechanism, when the torque of the dancer roller mechanism is applied clockwise toward the paper surface of FIG. 2, the first roller 13c and the first roller 13c The two rollers 13d can be rotated and moved in the direction in which the protective sheet is pressed, and tension can be applied to the protective sheet as shown in FIG.
When the protective sheet elongates during the operation, for example, as shown in FIG. 2 (c-2), the dancer roller mechanism further rotates clockwise to absorb the elongation of the protective sheet and continue to apply an appropriate tension. It can be added. When contraction occurs in the protective sheet, the path length is adjusted by the reverse operation.

  Further, at least one surface of the roller constituting the protective sheet conveying mechanism 5 may be provided with adhesiveness so as to have a function of cleaning the protective sheet. For example, in the configuration of FIG. 2A, when the surface of one of the dancer roller 13a and the first protective sheet roller 11 or the second protective sheet roller 12 has a cleaning function, both surfaces of the protective sheet are cleaned. be able to. The glass film transport apparatus 1a according to the present embodiment can prevent the wound glass film from being damaged by foreign matters attached to the protective sheet by removing particles such as dust attached to the surface of the protective sheet.

However, when winding the glass film and the protective sheet around the winding unit 4 and determining the positional relationship between the entrance of the glass film and the protective sheet with respect to the winding unit 4 without considering the protective sheet before winding the glass film, There is a problem that the glass film is broken due to the remaining undulation.
At the end of the present embodiment, a structure around the winding unit 4 for preventing the above-described problem, specifically, a preferable positional relationship of each roller constituting the winding preparation mechanism will be described.

  As described above, the winding unit 4, the second guide roller 10, and the second protective sheet roller 12 constitute a winding adjustment mechanism. In FIG. 1, the winding unit 4 winds the glass film on the wound protective sheet after rotating the protective sheet to some extent rather than immediately after winding the protective sheet. The winding unit 4 performs the winding of the protective sheet and the winding of the glass film with an angle difference. This angle difference is realized by the positional relationship between the second guide roller 10 and the second protective sheet roller 12 with respect to the winding unit 4. For example, the positions of the second guide roller 10 and the second protective sheet roller 12 are changed. Thus, it can be changed according to the characteristics of the glass film or the protective sheet.

  The description will be made again with reference to FIG. In the glass film transport apparatus 1a according to the present embodiment, the winding adjustment mechanism includes the protective sheet roller 12, the winding unit 4, and the second guide roller 10, and the winding unit 4 starts from the protective sheet roller 12. After winding the supplied protective sheet, the glass film from the second guide roller 10 is wound after a predetermined angle θ has elapsed. This angle θ is realized by the relationship between the angle at which the protective sheet and the glass film are supplied to the winding unit 4.

In the present embodiment, the winding adjustment mechanism has a rotation range in which the rotation angle θ of the winding unit 4 after the protective sheet supplied from the protective sheet roller 12 contacts the winding unit 4 is 90 ° or more and 315 ° or less. In the method, the winding state of the protective sheet and the glass film is adjusted by maintaining the positional relationship in which the glass film is laminated on the protective sheet wound up first.
For example, in FIG. 1, the protective sheet supplied from the protective sheet roller 12 is in contact with the left side of the winding unit 4, but the glass film from the second guide roller 10 is in contact with the right side of the winding unit 4. A winding unit 4, a protective sheet roller 12, and a second guide roller 10 are disposed. In FIG. 1, the winding unit 4 requires a rotation angle θ of about 180 ° from the position where the protective sheet is in contact with the winding unit 4 to the position where the glass film is in contact with the winding unit 4.

  Thus, providing the rotation angle θ between the time when the protective sheet is wound and the time when the glass film is wound is intended to prevent the glass film from being damaged. Since there is a possibility that the corrugation of the sheet that causes damage to the glass film may remain on the protective sheet immediately after being wound on the winding part 4, it is preferable to laminate the glass film after the corrugation disappears. It is preferable that an angle of 90 ° or more has elapsed empirically in order for the protective sheet to come into a stably spread state suitable for the lamination of the glass film after contacting the winding portion. On the other hand, when the rotation angle θ from winding the protective sheet to winding the glass film is too large, the protective sheet comes into contact immediately after winding the glass film. If the protective sheet is wound within 45 ° after the glass film is wound, it is not preferable because the protective sheet is wound before the glass film comes into contact with the winding portion in a sufficiently settled state. As a result, the rotation angle from winding the protective sheet to winding the glass film is preferably an angle between 90 ° and 315 °. In addition, this rotation angle (theta) can be changed according to the characteristic of a protection sheet or a glass film.

With reference to FIG. 5, a winding adjustment mechanism including a winding adjustment roller 19 for adjusting the rotation angle θ will be described.
FIG. 5A shows a configuration of a winding adjustment mechanism in which the winding adjustment roller 19 is disposed between the protective sheet roller 12 and the winding unit 4. The winding adjustment roller 19 has substantially the same configuration as the protective sheet roller 12. The winding adjusting roller 19 guides the protective sheet supplied from the protective sheet roller 12 to the left side of the winding unit 4 and then supplies the protective sheet to the lower left side of the winding unit 4. Compared with FIG. 1, the winding adjusting roller 19 moves the position where the protective sheet is in contact with the winding unit 4 to the lower side of the winding unit 4, and the position where the protective sheet is in contact with the winding unit 4. The rotation angle θ of the winding unit 4 up to the position where the glass film is in contact with the winding unit 4 is approximately 90 °.

  FIG. 5B shows a configuration of a winding adjustment mechanism in which the winding adjustment roller 19 is arranged on the right side of the winding unit 4. The winding adjustment roller 19 guides the protective sheet supplied from the protective sheet roller 12 to the right side of the winding unit 4 and then supplies the protective sheet to the right side of the winding unit 4. As a result, the position where the protective sheet is in contact with the winding unit 4 has moved to a position completely different from that in FIG. In FIG. 5B, the rotation angle θ of the winding unit 4 from the position where the protective sheet is in contact with the winding unit 4 to the position where the glass film is in contact with the winding unit 4 is approximately 315 °.

As described above, by providing the winding adjustment roller 19 for guiding the protective sheet supplied from the protective sheet roller 12 to a position different from the winding unit 4 between the protective sheet roller 12 and the winding unit 4, The rotation angle θ described above can be changed according to the characteristics of the protective sheet and the glass film.
In addition, the relationship between the angles at which the protective sheet and the glass film are supplied to the winding unit 4 is also effective for devices other than the glass film conveyance device having the protective sheet conveyance mechanism targeted by the present invention. For example, when the protective sheet is collected in the vicinity of the unwinding unit 2 or the glass roll taken up without using the protective sheet is attached to the unwinding unit 2 as described in the prior document 2 There is no protective sheet to be conveyed to the winding side. In such a case, a protective sheet supply unit is provided in the vicinity of the winding unit 4 as described in, for example, Prior Art Document 2.
Even in such a case, it is preferable to supply the protective sheet supplied from the protective sheet supply unit so as to satisfy the above-described angle relationship. Specifically, a protective sheet supply unit may be provided instead of the protective sheet roller 12.

[Second Embodiment]
With reference to FIG. 3, the glass film conveying apparatus 1b by 2nd Embodiment of this invention is demonstrated.
FIG. 3 shows a schematic configuration of the glass film transport apparatus 1b according to the second embodiment. The unwinding unit 2, the film forming roll 8, the winding unit 4, the first guide roller 9, and the second guide roller 10 are as follows. In the first embodiment, it has the same configuration as the component having the same reference numeral.

Compared with the first embodiment, the glass film transport device 1b according to the present embodiment is different from the protective sheet transport unit 5a of the first embodiment in the configuration and arrangement of the protective sheet transport unit 5b including a dancer roller mechanism. Therefore, the configuration and arrangement of the protective sheet conveying unit 5b including the dancer roller mechanism will be described below.
In addition to the 1st protection sheet roller 11, the 2nd protection sheet roller 12, and the dancer roller 13e, the protection sheet conveyance part 5b has the lamination | stacking roller 16. FIG. Unlike the first embodiment, the first protective sheet roller 11, the second protective sheet roller 12, and the dancer roller 13e of the protective sheet conveying unit 5b are disposed below the unwinding unit 2 and the winding unit 4 unlike the first embodiment. Installed, but performs the same function.

  The laminating roller 16 has substantially the same configuration as the second guide roller 10, and is parallel to the winding unit 4 and the second guide roller 10 between the winding unit 4 and the second guide roller 10. Is provided. The protective sheet transported by the protective sheet transport unit 5b is wound around the laminating roller 16 from the lower side to change the transport direction, and is laminated on the laminating roller 16 so as to overlap with the glass film transported from the glass film transport unit 3. It is conveyed to the take-up unit 4. The winding unit 4 winds the laminated film conveyed from the laminated roller 16 to form a glass roll.

  As shown in FIG. 3, the protective sheet conveying portion 5 b is arranged between the first protective sheet roller 11 and the second protective sheet roller 12 in the same manner as the dancer roller mechanism shown in FIG. It has a dancer roller 13e capable of linear movement in the direction. In the present embodiment, the dancer roller 13e is moved from the upper side to the lower side by an actuator, thereby contacting the protective sheet along the width direction and applying tension to the protective sheet.

  Even in the glass film conveyance device 1b according to the present embodiment, the protective sheet made of resin unwound from the winding unit 4 is always set to an appropriate conveyance path length by the dancer roller mechanism even when contracted or expanded in vacuum. Since it is adjusted and an appropriate tension is applied, it is wound around the laminating roller 16 without causing wrinkles or waves. If the protective sheet is wound around the laminating roller 16 without causing wrinkles or undulations, the glass film laminated on the protective sheet can be prevented from being damaged.

  Thus, the winding unit 4 winds the laminated film in which the protective sheet and the glass film are laminated by the laminating roller 16. The lamination roller 16 performs the winding of the protective sheet and the glass film with a slight time difference, and this time difference is realized by the positional relationship of the second guide roller 10 with respect to the lamination roller 16. Therefore, this time difference can be changed according to the characteristics of the glass film or the protective sheet by changing the position of the second guide roller 10 or the lamination roller 16.

Therefore, it can be said that the winding adjustment mechanism is configured by the winding unit 4, the second guide roller 10, and the lamination roller 16. The stacking roller 16 is a constituent member included in both the protective sheet conveying unit 5b and the winding adjustment mechanism.
However, when the glass film and the protective sheet are overlapped by the laminating roller 16, if the positional relationship between the entrance of the glass film and the protective sheet with respect to the laminating roller 16 is determined without consideration, the undulation of the protective sheet before the glass film is wound remains. The problem which causes the breakage of a glass film arises by causes.

Subsequently, a structure around the laminated roller 16 for preventing the above-described problem, specifically, a preferable positional relationship of each roller constituting the winding preparation mechanism will be described.
As described above, the winding adjustment unit is configured by the winding unit 4, the second guide roller 10, and the second protective sheet roller 12. In FIG. 3, a glass film is wound on the wound protective sheet after being rotated to some extent rather than immediately after the protective sheet is wound on the lamination roller 16. On the laminating roller 16, the protective sheet is wound and the glass film is wound thereon with an angle difference. This angular difference is realized by the positional relationship of the second guide roller 10, the second protective sheet roller 12, and the winding unit 4 with respect to the lamination roller 16. For example, the second guide roller 10 and the second protective sheet roller By changing the position, it can be changed according to the characteristics of the glass film or the protective sheet.

  The description will be given again with reference to FIG. In the glass film transport apparatus 1b according to the present embodiment, the winding adjustment mechanism includes the lamination roller 16, the second protective sheet roller 12, the winding unit 4, and the second guide roller 10, and the lamination roller 16, 2 After winding the protective sheet supplied from the protective sheet roller 12, the glass film from the second guide roller 10 is wound after a predetermined rotation angle θ has passed, and then the predetermined rotation angle η In the state where it was wound up, it conveyed on a lamination | stacking roller, and headed to the winding part 4 in the state by which the glass film and the protective sheet were laminated | stacked after that. The rotation angle θ and the rotation angle η are realized by a relationship between an angle at which the protective sheet and the glass film are supplied to the lamination roller 16 and an angle toward the winding unit 4.

  In the present embodiment, the winding adjustment mechanism is configured so that the protective sheet supplied from the second protective sheet roller 12 is wound on the laminating roller 16 with a rotation angle θ (first rotation angle) of 45 ° or more. The rotation angle η (second rotation angle) at which the glass film is laminated on the protective sheet wound up and the state in which the protective sheet and the glass film are laminated is held on the lamination roller 16 is 30 ° or more. Rotation angle (that is, the sum of the first rotation angle and the second rotation angle (rotation angle θ + rotation angle) in the range of 90 ° or less (30 ° to 90 °) and the protective film wound around the laminated roller 16 By maintaining the positional relationship of η)) less than 270 °, the winding state of the protective sheet and the glass film is adjusted.

In the present embodiment, the winding adjustment mechanism is such that the protective film supplied from the second protective sheet roller 12 has a glass film in a rotation range where the rotation angle θ of the lamination roller 16 is 45 ° or more, preferably 60 ° or more. The winding state of a protective sheet and a glass film is adjusted, maintaining the positional relationship laminated | stacked on a protective sheet.
The inventors of the present application have found through experiments that the undulation of the protective sheet is faster on the laminated roller 16 than in the case of being wound on a glass roll as in the first embodiment. Yes. Specifically, when the protective sheet comes into contact with the laminating roller 16 and is conveyed about 45 ° at the rotation angle of the laminating roller 16, it is found that the protective sheet spreads on the laminating roller 16 without undulation or wrinkles. Yes.

In addition to this, if the temperature of the laminating roller 16 is adjusted to be, for example, about −20 ° C. to 80 ° C., the protective sheet in contact with the laminating roller 16 is glass that has become high temperature in the surface treatment process. Even if films are laminated, they are not damaged by heat.
Further, in the winding adjustment mechanism in the present embodiment, after the protective sheet and the glass film are laminated on the lamination roller 16 to form a lamination film, the lamination film is further subjected to a predetermined rotation angle η (rotation). The sheet is transported while maintaining contact with the lamination roller 16 on the lamination roller 16 only by a rotation range in which the angle η is 30 ° or more and 90 ° or less, and then separated from the lamination roller 16 and supplied to the winding unit 4. When the rotation angle η is less than 30 °, the laminating roller is removed before the stacking of the glass film and the protective sheet is stabilized, and the laminating film is not stable. On the other hand, if it is piled at an angle of 90 ° or more, the possibility of breakage increases empirically.

  Here, the winding adjustment mechanism is the sum of the above two rotation angles, that is, the rotation angle θ of the laminating roller 16 until the glass film is laminated on the protective sheet after the protective sheet comes into contact with the laminating roller 16 and The sum (θ + η) with the rotation angle η that keeps the laminated film in contact with the laminated roller 10 on the laminated roller 10 is preferably 270 ° or less. This is because the mechanical structure becomes unreasonable when the angle exceeds 270 °.

In addition, the diameter of the glass roll of the winding-up part 4 becomes large as a laminated film is wound up. Even in the case of such a variation, the arrangement of each mechanism should be considered so that the above-described angular relationship is satisfied.
As described above, the glass film conveyance device 1b according to the present embodiment provides the rotation angle θ between the time when the protective sheet is wound around the laminating roller 16 and the time when the glass film is taken up, and is laminated on the laminating roller 16. It is characterized by having a winding adjustment mechanism having a configuration in which a rotation angle η is provided after the film is obtained and before the laminated film is supplied to the winding unit 4.

  Such a configuration of the winding adjustment mechanism is intended to prevent breakage of the glass film. Since the protective sheet immediately after being wound around the laminating roller 16 may have undulations that cause damage to the glass film, it is preferable to laminate the glass films after the undulations have disappeared. Moreover, it is preferable that a laminated | multilayer film is wound up, after a protective sheet and a glass film fully adapt. In this embodiment, first, while ensuring the rotation angle θ of the laminating roller 16 necessary for the undulation of the wound protective sheet to disappear, the time difference necessary for the laminated protective sheet and the glass film to become compatible with each other. Is secured as the rotation angle η of the laminating roller 16. In addition, these rotation angle (theta) and rotation angle (eta) can be changed according to the characteristic of a protection sheet or a glass film.

Referring to FIG. 6, a winding adjustment mechanism including a winding adjustment roller 20 for adjusting a rotation angle θ necessary for eliminating the waviness of the wound protection sheet among the two angles. explain.
FIG. 6 shows the configuration of the winding adjustment mechanism in the present embodiment, in which the winding adjustment roller 20 having substantially the same configuration as the second protective sheet roller 12 is positioned on the right side of the protective sheet roller 12 and is a laminated roller. 10 is arranged slightly above. The winding adjustment roller 20 guides the protective sheet supplied from the second protective sheet roller 12 to the upper side of the laminating roller 10 and then supplies it to the left side of the laminating roller 10.

  Compared to FIG. 3, the winding adjusting roller 20 changes the position where the protective sheet contacts the laminating roller 10 to the upper right side of the laminating roller 16, and the glass film from the position where the protective sheet contacts the laminating roller 16. The rotation angle θ up to the position where the contact is made changes from about 90 ° to about 135 °. The winding adjustment roller 20 changes the rotation angle θ to realize a traveling length in which the waviness of the wound protection sheet completely disappears.

As described above, the winding adjustment roller 20 that once guides the protective sheet supplied from the protective sheet roller 12 to a position different from the lamination roller 16 is provided between the second protection sheet roller 12 and the lamination roller 10. Thus, the rotation angle θ described above can be changed according to the characteristics of the protective sheet and the glass film.
Alternatively, the position of the second protective sheet roller 12 can be changed instead of the winding adjustment roller 20.

  In addition, the above-mentioned protective sheet and glass film are supplied to the lamination | stacking roll 16, and also the relationship of the angle supplied to the winding-up part 4 is the glass film conveying apparatus which has the conveyance mechanism of the protective sheet which this invention makes object. It is effective in other cases. For example, when the protective sheet is collected in the vicinity of the unwinding unit 2 or the glass roll taken up without using the protective sheet is attached to the unwinding unit 2 as described in the prior document 2 There is no protective sheet to be conveyed to the winding side. In such a case, a protective sheet supply unit may be provided separately in the vicinity of the winding unit 4. Also in such a case, the protective sheet supplied from the protective sheet supply unit is supplied so as to satisfy the above-described angle relationship. Specifically, a protective sheet supply unit may be provided at the position of the second protective sheet roller 12.

[Third Embodiment]
A third embodiment of the present invention will be described with reference to FIG. FIG. 4 shows a schematic configuration in a state where the glass film conveyance device 1a described in the first embodiment is stored in a vacuum chamber 6 having a chamber partition P. The vacuum chamber 6 has the chamber partition P. Is different from the first embodiment.

The vacuum chamber 6 shown in FIG. 4 has a chamber partition wall P at a position where the first guide roll 9 and the second guide roll 10 are arranged at the substantially center in the vertical direction.
The chamber partition P is formed from the left side wall to the right side wall in the vacuum chamber 6 so as not to interfere with the first guide roll 9 and the second guide roll 10. Partitioning. The upper region of the vacuum chamber 6 is depressurized by a vacuum pump provided above, and the lower region of the vacuum chamber 6 is depressurized by a vacuum pump provided below.

  By this chamber partition P, the sputter film forming unit 7 for performing the surface treatment process can be isolated from the protective sheet conveying unit 5a, and dust such as flakes of the peeled film generated by the film formation can be separated from the protective sheet conveying unit 5a. Since it can prevent adhering to a protection sheet, the situation where the glass film laminated | stacked on the protection sheet by the dust adhering to a protection sheet is damaged can be avoided.

In addition, outgas components such as water vapor and organic components are released from the protective film as the pressure is reduced. However, by providing the chamber partition wall P, the movement of the outgas components to the periphery of the sputter deposition unit 7 can be suppressed. In addition, the influence of the outgas component on the processing such as film formation can be minimized.
By the way, it should be thought that embodiment disclosed this time is an illustration and restrictive at no points. In particular, in the embodiment disclosed this time, matters that are not explicitly disclosed, such as operating conditions and measurement conditions, various parameters, dimensions, weights, volumes, and the like of a component deviate from a range that is normally implemented by those skilled in the art. Instead, values that can be easily assumed by those skilled in the art are employed.

DESCRIPTION OF SYMBOLS 1a-1d Glass film conveying apparatus 2 Winding part 3 Glass film conveying part 4 Winding part 5a-5b Protection sheet conveying part 6 Vacuum chamber 7 Sputtering apparatus 8 Film-forming roll 9 1st guide roller 10 2nd guide roller (lamination roller) )
DESCRIPTION OF SYMBOLS 11 1st protection sheet roller 12 2nd protection sheet roller 13a-13e Dancer roller 14 Arm 15 Disc 16 Lamination roller 19 Winding adjustment roller 20 Winding adjustment roller P Chamber partition T Sputter evaporation source

Claims (8)

It is a glass film transport device that continuously transports a long glass film,
From the roll around which the glass film is wound, an unwinding part for unwinding the glass film;
A glass film transporting section for transporting the glass film unwound from the unwinding section;
A winding unit that winds in a roll while laminating a protective sheet on the glass film conveyed by the glass film conveying unit,
A winding adjusting mechanism for adjusting a winding state of the protective sheet and the glass film in the winding unit;
The winding adjustment mechanism maintains a positional relationship in which the glass film is laminated on the protective sheet in a rotation range in which a rotation angle after the protective sheet comes into contact with the winding portion is 90 ° or more and 315 ° or less. A glass film transporting device characterized by adjusting a winding state of the protective sheet and the glass film. It is a glass film transport device that continuously transports a long glass film,
From the roll around which the glass film is wound, an unwinding part for unwinding the glass film;
A glass film transporting section for transporting the glass film unwound from the unwinding section;
A winding unit that winds in a roll while laminating a protective sheet on the glass film conveyed by the glass film conveying unit,
A winding adjusting mechanism for adjusting a winding state of the protective sheet and the glass film in the winding unit;
The winding adjustment mechanism has a laminating roller for laminating the glass film conveyed by the glass conveying unit on the protective sheet,
The glass film is laminated on the protective sheet in a rotation range where the first rotation angle of the lamination roller after the protective sheet is in contact with the lamination roller is 45 ° or more, and the lamination after the lamination is performed. In a rotation range in which the second rotation angle of the roller is 30 ° or more and 90 ° or less, the protective sheet on which the glass film is laminated is separated from the lamination roller after being conveyed while maintaining contact with the lamination roller. And the sum of said 1st rotation angle and said 2nd rotation angle is 270 degrees or less, The glass film conveying apparatus characterized by the above-mentioned.   The protective sheet conveying part which carries in the protective sheet carried out toward the said winding-up part while carrying out the protective sheet isolate | separated from the glass film unwound from the said unwinding part is provided to Claim 1 or 2 characterized by the above-mentioned. The glass film conveying apparatus of description.   It is comprised so that the protection sheet isolate | separated from the glass film unwound from the said unwinding part may be collect | recovered, and the said collected protection sheet may be wound up in the said winding-up part. The glass film conveying apparatus of description.   The protective sheet conveying unit applies tension by contacting the protective sheet being conveyed by the protective sheet conveying unit along the width direction of the protective sheet, and the protective sheet conveying path of the protective sheet conveying unit The glass film transport device according to any one of claims 1 to 4, further comprising a dancer roller mechanism for adjusting a path length. The dancer roller mechanism has a first roller and a second roller that apply tension to the protective sheet in a state of being parallel to each other, and the first roller can contact one surface of the protective sheet. And the second roller is disposed at a position where the second roller can contact the other surface of the protective sheet,
The glass film conveying device according to claim 5, wherein the first roller and the second roller are movable in a direction in contact with the protective sheet.   The glass film conveyance device according to claim 5 or 6, wherein at least one roller constituting the protection sheet conveyance unit has viscosity on a contact surface with the protection sheet. Two independent areas for separately storing the glass sheet conveying unit and the protective sheet conveying unit,
The glass film transport device according to any one of claims 1 to 7, wherein the two regions are independently evacuated.

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