JP2016029573A - Data generation apparatus, data generation method and program - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a data generation apparatus, a data generation method and a program capable of easily handling many parameters when generating an image data for drawing images on each of many drawing objects.SOLUTION: The data generation apparatus is a system for generating image data of drawing images for drawing the image on the drawing subjects having plural drawing objects. The data generation apparatus includes: an input screen section which has an input box for inputting parameter values prescribing the image data; and an auxiliary display screen section that displays a two-dimensional shape based on the input parameter values.SELECTED DRAWING: Figure 7

Description

  The present invention relates to a data generation device, a data generation method, and a program for generating drawing data for drawing an image on each drawing medium for a number of drawing media.

Conventionally, by forming images such as numbers, letters and figures on the outer surface of industrially manufactured products, display of product names and model numbers, product lot numbers and individual identification displays, etc. To be described in the product.
As a drawing method capable of efficiently forming an image on a large number of products, Patent Document 1 discloses that marking is performed using a marking device having an inkjet head on a chip resistor aligned on a tape or a substrate. An electronic component manufacturing method and an electronic component manufacturing apparatus are disclosed in which small characters and symbols can be marked by quickly curing before the landing ink starts bleeding.

However, in order to generate image data for forming an image on a large number of drawing media, it is necessary to handle a large number of parameters such as the size, number, and arrangement of the drawing media. The work was complicated.
In Patent Document 2, print pattern data corresponding to a print pattern to be repeatedly printed and a plurality of print position data corresponding to the positions of the print patterns are grasped and stored by predetermined reference coordinates and deviations thereof, By inputting the correction value from the console to enable both the correction of the reference coordinates and the correction of the deviation, when printing the same character repeatedly, the print position of the entire character group can also be adjusted. A laser marking device is disclosed that enables easy adjustment of the printing position.
In Patent Document 3, a calculation formula that allows coordinate data to be calculated for print pattern data corresponding to a print pattern to be repeatedly printed and a plurality of print position data corresponding to the position of the print pattern is created, and marking information setting is performed. A laser marking device that, when input is set on the screen, can generate coordinate data of a desired pattern based on the calculation result of the calculation formula, so that the marking information input operation is simple and the marking operation can be performed quickly. Is disclosed.
In Patent Document 4, a processing data generation unit, a display unit that can display an image of processing data three-dimensionally, a processing defect area detection unit that calculates a region that cannot be processed by the processing data, and contents that cannot be processed are hidden. A laser processing device, a laser processing condition setting device, a laser processing condition setting method, and a laser processing condition setting device, which can confirm that the processing content is arranged in a region where processing can be performed correctly at the stage of setting processing conditions. A laser processing condition setting program, a computer-readable recording medium, and a recorded device are disclosed.

JP 2003-80687 A JP 2002-292484 A JP 2009-82963 A JP 2008-12539 A

However, since the devices disclosed in Patent Document 2 and Patent Document 3 handle parameters only as numbers, they are misconfigured due to the difficulty of distinguishing each parameter while handling many parameters. There was a problem that there was a possibility. In addition, even if an incorrect setting is made, it is difficult to notice the error, and there is a problem that there is a high possibility that the image data is output as it is.
In the device disclosed in Patent Document 4, it is possible to check the set data for a single image, but it is not possible to handle parameters for arranging multiple images, so it handles a large number of parameters. There is a problem that it is impossible to eliminate the complexity caused by the problem.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 A data generation apparatus according to this application example is a data generation apparatus that generates image data of a drawing image to be drawn on a drawing object including a plurality of drawing media, and defines the image data An input screen unit having an input box for inputting a parameter value to be input, and an auxiliary display screen unit for displaying the input parameter value as a two-dimensional shape.

  The data generation apparatus according to this application example includes an input screen unit having an input box and an auxiliary display screen unit that displays the input parameter value as a two-dimensional shape. With this configuration, an operator who performs an input operation of a parameter value can visually recognize the input parameter value as a two-dimensional shape displayed on the auxiliary display screen unit. Since the parameter value can be visually recognized as a two-dimensional shape, the parameter value can be easily confirmed.

  Application Example 2 In the data generation apparatus according to the application example, the parameters include a shape parameter that defines the shape of the drawing medium and a placement parameter that defines the arrangement of the drawing medium, and the auxiliary display screen unit Preferably has a preview screen portion for displaying a shape and an arrangement position of the drawing medium according to the value of the shape parameter or the value of the arrangement parameter.

  According to this data generation apparatus, the preview screen unit is provided, and the shape and arrangement position of the drawing medium corresponding to the input parameter value are displayed as a two-dimensional shape. Thereby, an operator who performs an input operation of parameter values can visually recognize the shape and arrangement position of the drawing medium as a two-dimensional shape. Since the shape and arrangement position of the drawing medium can be visually recognized as a two-dimensional shape, the shape and arrangement position of the drawing medium can be easily confirmed.

  Application Example 3 In the data generation device according to the application example, the input screen unit includes a setting confirmation button unit, and the input parameter value is determined by selecting the setting confirmation button unit. It is preferable.

  According to this data generation device, the value of the input parameter is determined by clicking the setting confirmation button part. Thereby, the value of the input parameter can be confirmed or corrected before the value is confirmed. By confirming or correcting before confirming, generation of image data using an incorrect parameter value can be suppressed.

  Application Example 4 The data generation apparatus according to the application example described above is a limit value display screen unit that displays at least one of a maximum value and a minimum value that can be set in the parameter for inputting a value using the selected input box. It is preferable to further have.

  According to this data generation device, at least one of the maximum value and the minimum value that can be set in the parameter for inputting a value using the selected input box is displayed on the limit value display screen. A value that exceeds the maximum or minimum value that can be set for a parameter is an inappropriate value for the parameter. By displaying the maximum and minimum values that can be set, it is easy for operators who perform parameter value input operations to recognize the maximum and minimum values when performing parameter value input operations. can do. Thereby, it can suppress that the value exceeding the maximum value or minimum value which can be set is input.

  Application Example 5 The data generation apparatus according to the application example further includes a warning display control unit that displays an inconsistency warning screen, and the warning display control unit has an input value of the parameter that is inappropriate. In this case, it is preferable to display the inconsistency warning screen.

  According to this data generation device, the warning display control unit displays the inconsistency warning screen when the input parameter value is an inappropriate value. By displaying the inconsistency warning screen, it is possible to notify the operator who inputs the parameter value that the input parameter value is inappropriate. Thereby, it is possible to suppress the generation of image data using an inappropriate parameter value.

  Application Example 6 The data generation apparatus according to the application example displays the inconsistency warning screen when the input parameter value is inappropriate, and the input with an inappropriate numerical value input. It is preferable to return the numerical value displayed in the box to the numerical value immediately before the inappropriate numerical value is input.

  According to this data generation device, when the input parameter value is inappropriate, an inconsistency warning screen is displayed, and the numerical value displayed in the input box where the inappropriate numerical value is input is displayed. , It is returned to the value just before the incorrect value was entered. Accordingly, it is possible to prevent an inappropriate parameter value from being erroneously determined and generating image data using the inappropriate parameter value.

  Application Example 7 In the data generation device according to the application example, when the input parameter value is an inappropriate value, the inconsistency warning screen is displayed and an inappropriate numerical value is input. The input box is preferably in a selected state.

  According to this data generation device, when the input parameter value is an inappropriate value, an input box in which an inappropriate numerical value is input is selected. The state in which the input box is selected is a state in which the input box is selected to input a value. By selecting an input box in which an inappropriate numerical value is input, it is possible to clarify which input box is an input box in which an inappropriate numerical value is input.

  Application Example 8 In the data generation apparatus according to the application example described above, it is preferable that the input parameter value is physically inconsistent when the input parameter value is inappropriate.

  According to this data generation device, when the input parameter values are physically contradictory, the process is executed when the input parameter value is an inappropriate value. Thereby, it is possible to suppress the generation of image data using parameter values that are physically contradictory. The case where the parameter values physically contradict each other is, for example, when the size of the drawing medium is larger than the arrangement pitch of the drawing medium.

  Application Example 9 In the data generation device according to the application example described above, the drawing image defined by the input parameter value may not be drawn by a drawing device for drawing the drawing image. It is preferable that the input parameter value is inappropriate.

  According to this data generation device, when the drawing image defined by the input parameter value is an image that cannot be drawn by the drawing device for drawing the drawing image, the input parameter value Processing is executed when is an inappropriate value. Thereby, it can suppress that the image which cannot be drawn with the drawing apparatus for drawing a drawing image is produced | generated. The image that cannot be drawn by the drawing device for drawing the drawing image is, for example, an image drawn on a drawing object larger than the drawing object that can be held by the drawing device.

  Application Example 10 In the data generation apparatus according to the application example, it is preferable that the input screen unit includes a total thickness input screen unit for inputting the thickness of the drawing object.

  According to this data generation device, the thickness of the drawing object can be input using the screen of the total thickness input screen section. Thereby, the thickness information of the drawing object can be added to the image data to be formed.

  Application Example 11 In the data generation apparatus according to the application example described above, the input screen unit is configured to input a substrate thickness input screen for inputting a thickness of a drawing material substrate that supports the drawing medium in the drawing object. It is preferable to provide a part.

  According to this data generation device, the thickness of the drawing material substrate can be input using the screen of the substrate thickness input screen section. Thereby, the information of the thickness of a drawing body base material can be added to the image data to be formed.

  Application Example 12 A data generation method according to this application example is a data generation method for generating image data of a drawing image to be drawn on a drawing object including a plurality of drawing media, and defines the image data. A predetermined value input step for inputting a parameter value to be input, and an auxiliary display step for displaying the input parameter value as a two-dimensional shape.

  The data generation method according to this application example includes a specified value input step for inputting a parameter value and an auxiliary display step for displaying the input parameter value as a two-dimensional shape. Thereby, an operator who performs an input operation of the parameter value can visually recognize the input parameter value as the displayed two-dimensional shape. Since the parameter value can be visually recognized as a two-dimensional shape, the parameter value can be easily confirmed.

  Application Example 13 A program according to this application example is a program for causing a computer to execute a process for generating image data of a drawing image to be drawn on a drawing object including a plurality of drawing media. A program for causing a computer to execute a specified value input step for inputting a parameter value for specifying the image data and an auxiliary display step for displaying the input parameter value as a two-dimensional shape.

  According to the program according to this application example, the computer is caused to execute the specified value input process for inputting the parameter value and the auxiliary display process for displaying the input parameter value as a two-dimensional shape. Thereby, an operator who performs an input operation of the parameter value can visually recognize the input parameter value as the displayed two-dimensional shape. Since the parameter value can be visually recognized as a two-dimensional shape, the parameter value can be easily confirmed.

(A) is explanatory drawing which shows the semiconductor package by which the marking image was drawn. FIG. 5B is an explanatory diagram showing a package drawing body in which semiconductor packages are aligned on a holding substrate. (C) is explanatory drawing which shows the marking image drawn on the semiconductor chip. (D) is explanatory drawing which shows the state in which the semiconductor chip was aligned on the holding substrate. Explanatory drawing which shows the structure of a drawing apparatus unit. (A) is an external appearance perspective view which shows schematic structure of the whole droplet discharge apparatus. (B) is an external perspective view showing a schematic configuration of a droplet discharge head provided in the droplet discharge device. Explanatory drawing which shows the functional structure of an image data generation apparatus. The flowchart which shows the process of producing | generating drawing image data. (A) is explanatory drawing which shows the outline | summary of a setting screen. (B) is explanatory drawing which shows the example of the setting screen in which only some parameters were displayed on the parameter display part. (A) is explanatory drawing which shows the example of the setting screen of the state by which the input box was selected. (B) is explanatory drawing which shows the example of the setting screen of the state which completed the input of the parameter. (A) is explanatory drawing which shows the example of a display of the setting screen in which the warning screen was displayed. (B) is explanatory drawing which shows the example of a display of the setting screen from which the warning screen was erase | eliminated. (A) is explanatory drawing which shows the setting screen for implementing the option setting of a drawing body. (B) is explanatory drawing which shows the setting screen for implementing the option setting of a chip unit. (A) is explanatory drawing which shows the example of a display of the setting screen in which the warning screen was displayed. (B) is explanatory drawing which shows the example of a display of the setting screen from which the warning screen was erase | eliminated. (A) is explanatory drawing which shows the setting screen for implementing the position setting of an alignment mark. (B) is explanatory drawing which shows the setting screen for implementing the position setting of the front / back discrimination mark. (A) is explanatory drawing which shows the example of a display of the setting screen in which the warning screen was displayed. (B) is explanatory drawing which shows the example of a display of the setting screen from which the warning screen was erase | eliminated. (A) is explanatory drawing which shows the example of a display of the setting screen in which the warning screen was displayed. (B) is an explanatory view showing a setting screen when setting a drawing mode in the droplet discharge device. (A) is explanatory drawing which shows the setting screen at the time of setting the value of the parameter regarding a magazine. (B) is explanatory drawing which shows the setting screen for implementing a pre-processing setting process. (A) is explanatory drawing which shows the image sticking screen before sticking a chip image image. (B) is explanatory drawing which shows the image sticking screen which stuck the chip image image. Explanatory drawing which shows the example of the produced | generated drawing image data.

  Hereinafter, the data generation device will be described with reference to the drawings. In the present embodiment, a data generation apparatus used for generating image data of a drawing image (hereinafter referred to as drawing image data) for forming a marking image on a marking object will be described as an example. In the present embodiment, a drawn image is drawn using a droplet discharge device including an inkjet droplet discharge head. In the drawings referred to in the following description, the vertical and horizontal scales of members or portions may be shown differently from actual ones for convenience of illustration. The marking object corresponds to a drawing medium.

<Marking object>
First, the marking object will be described with reference to FIG. FIG. 1 is an explanatory diagram showing a marking object and a marking image drawn on the marking object. FIG. 1A is an explanatory view showing a semiconductor package on which a marking image is drawn, and FIG. 1B is an explanatory view showing a package drawing body in which the semiconductor package is aligned on a holding substrate. FIG. 1C is an explanatory diagram showing a marking image drawn on a semiconductor chip, and FIG. 1D is an explanatory diagram showing a state in which the semiconductor chips are aligned on a holding substrate.

The semiconductor package 11 shown in FIG. 1A is a package mounted by flip chip connection. A package image 110, which is a marking image, is drawn on the surface opposite to the surface on which the bumps are formed. The package image 110 is, for example, an image such as a logo mark, a product name, a product model number, and a lot number.
As shown in FIG. 1B, the semiconductor package 11 is aligned and temporarily fixed on the holding substrate 12 to form the package drawing body 10. An image drawn on the package drawing body 10 is referred to as a package drawing image 110A. The package drawing body 10 is placed on the medium mounting table 31 (see FIG. 3) of the droplet discharge device 101 (see FIG. 3), and the package drawing image 110A is drawn on the package drawing body 10 to thereby create the semiconductor package 11. The package image 110 is drawn. A set of 16 semiconductor packages 11 arranged in 4 rows and 4 columns is referred to as a package unit 11A.
The semiconductor package 11 corresponds to a drawing medium. The package drawing object 10 corresponds to a drawing object. The package drawing image 110A corresponds to a drawing image.

In the semiconductor chip 16 shown in FIG. 1C, a chip image 150, which is a marking image, is drawn on the surface opposite to the surface on which the bonding pads are formed. The chip image 150 is, for example, an image such as a logo mark, a product name, a product model number, and a lot number.
As shown in FIG. 1 (d), the semiconductor chip 16 is aligned and temporarily fixed on the holding substrate 17 to constitute the chip drawing body 15. An image drawn on the chip drawing body 15 is referred to as a chip drawing image 150A. The chip drawing body 15 is placed on the medium mounting table 31 of the droplet discharge device 101, and the chip drawing image 150A is drawn on the chip drawing body 15, thereby drawing the chip image 150 on the semiconductor chip 16. A set of 15 semiconductor chips 16 arranged in 3 rows and 5 columns is referred to as a chip unit 16A.
The semiconductor chip 16 corresponds to a drawing medium. The chip drawing body 15 corresponds to a drawing object. The chip drawing image 150A corresponds to a drawing image.

<Drawer unit>
Next, a drawing apparatus unit that draws an image such as the chip drawing image 150A on a drawing target such as the chip drawing body 15 described above will be described with reference to FIG. FIG. 2 is an explanatory diagram showing the configuration of the drawing apparatus unit.

As shown in FIG. 2, the drawing apparatus unit 100 includes a droplet discharge device 101, a transfer robot 102, a pretreatment device 103, a temperature adjustment device 104a, a temperature adjustment device 104b, a load device 105, and an unload. A device 106 and a drawing unit control device 107 are provided.
The chip drawing body 15 and the like are mounted on a predetermined magazine. By loading the magazine with the chip drawing body 15 and the like mounted on the load device 105, the chip drawing body 15 and the like are supplied to the drawing apparatus unit 100.
The chip drawing body 15 and the like that have been processed in the drawing apparatus unit 100 are mounted on a magazine loaded in the unload apparatus 106. By removing the magazine from the unload device 106, the processed chip drawing body 15 and the like are removed from the drawing device unit 100.

The transfer robot 102 takes out the chip drawing body 15 and the like from the magazine loaded in the load device 105 and places it on a predetermined position such as the droplet discharge device 101. Further, the chip drawing body 15 or the like processed by the droplet discharge device 101 or the like is removed from the droplet discharge device 101 or the like and supplied to an apparatus that performs the next processing.
The droplet discharge device 101 draws an image such as a chip drawing image 150 </ b> A on a drawing target such as the chip drawing body 15.
The preprocessing device 103 performs preprocessing for bringing the chip drawing body 15 and the like into a state suitable for drawing with the droplet discharge device 101.
The temperature adjusting device 104 a and the temperature adjusting device 104 b adjust the temperature of the chip drawing body 15 and the like to a temperature suitable for performing processing by the preprocessing device 103 and drawing by the droplet discharge device 101. Moreover, it may be used to carry out heating or the like for curing the functional liquid constituting the chip drawing image 150A or the like.
The drawing unit control device 107 controls each device described above according to the image data generated by using the image data generation device 50 (see FIG. 4), and sets the chip to the drawing target such as the chip drawing body 15. An image such as the drawn image 150A is drawn.

<Droplet ejection device>
Next, the droplet discharge device 101 will be described with reference to FIG. FIG. 3 is an external perspective view showing a schematic configuration of the droplet discharge device. 3A is an external perspective view showing a schematic configuration of the entire droplet discharge device, and FIG. 3B is an external perspective view showing a schematic configuration of a droplet discharge head included in the droplet discharge device. .

  As shown in FIG. 3A, the droplet discharge device 101 includes a head mechanism unit 2, a medium mechanism unit 3, a maintenance device unit 5, and a discharge device control unit 7. The head mechanism unit 2 includes a droplet discharge head 20 that discharges a functional liquid as droplets. The droplet discharge device 101 also includes a functional liquid supply unit and a discharge inspection device unit (not shown). The functional liquid discharged from the droplet discharge head 20 is supplied to the droplet discharge head 20 from the functional liquid supply unit. The discharge device control unit 7 comprehensively controls each mechanism unit described above.

  The head mechanism unit 2 includes a carriage unit 22 and a carriage scanning mechanism 42. The carriage unit 22 includes a head unit 21 having a droplet discharge head 20 and an ultraviolet irradiation unit 27 that irradiates ultraviolet rays. The carriage scanning mechanism 42 includes a carriage frame 45 on which the carriage unit 22 is suspended, and moves the carriage unit 45 in the Y-axis direction by moving the carriage frame 45 in the Y-axis direction.

The carriage scanning mechanism 42 includes a support column 43, a support beam 44, a guide portion 46, a drive motor 47, a drive pulley 47a, a driven pulley 47b, a belt 42a, a carriage frame 45, and an encoder 48. I have.
The support beam 44 is provided so as to be stretched over the two support columns 43 and extends in the Y-axis direction. The guide part 46 is fixed to the support beam 44 and extends in the Y-axis direction. The drive motor 47 is fixed to the support beam 44 near one end of the support beam 44 in the Y-axis direction. A drive pulley 47 a is fixed to the output shaft of the drive motor 47, and the drive pulley 47 a is rotationally driven by the drive motor 47. The driven pulley 47b is rotatably fixed to the support beam 44 near the end opposite to the end to which the drive motor 47 is fixed in the Y-axis direction of the support beam 44. The axial direction of the rotation shaft of the driven pulley 47b is substantially parallel to the axial direction of the rotation shaft of the drive pulley 47a (the output shaft of the drive motor 47). The belt 42a is stretched between the driving pulley 47a and the driven pulley 47b, and is driven by the rotation of the driving pulley 47a. The belt 42 a extends in the Y-axis direction in parallel with the guide portion 46. The encoder 48 is fixed to the support beam 44, and extends in the Y-axis direction substantially parallel to the guide portion 46.

A carriage frame 45 is fixed to the belt 42a. The carriage frame 45 is engaged with the guide portion 46 so as to be slidable in the Y-axis direction. The carriage frame 45 is driven in the Y-axis direction along the guide portion 46 when the belt 42 a is driven by the drive motor 47. The position of the carriage frame 45 in the Y-axis direction is detected by the encoder 48.
By moving the carriage frame 45 in the Y-axis direction by the carriage scanning mechanism 42, the droplet discharge head 20 of the head unit 21 suspended from the carriage frame 45 can be freely moved in the Y-axis direction. . Moreover, it can hold | maintain in the moved arbitrary positions.

  As shown in FIG. 3B, the droplet discharge head 20 includes a nozzle substrate 25. On the nozzle substrate 25, two rows of nozzle rows 24A in which a large number of discharge nozzles 24 are arranged in a substantially straight line are formed. The functional liquid is ejected as droplets from the ejection nozzle 24 and landed on the chip drawing body 15 or the like located at the opposite position, thereby arranging the functional liquid at the position. The nozzle row 24A extends in the X-axis direction shown in FIG. 3A in a state where the droplet discharge head 20 is mounted on the droplet discharge device 101. In the nozzle row 24A, the discharge nozzles 24 are arranged at equal nozzle pitches, and the position of the discharge nozzle 24 is shifted by a half nozzle pitch in the X-axis direction between the two nozzle rows 24A. As a result, the liquid droplet ejection head 20 can dispose functional liquid droplets at half-nozzle pitch intervals in the X-axis direction.

As shown in FIG. 3A, the medium mechanism unit 3 includes a medium mounting table 31, a slide table 31 a, and a medium moving mechanism 33.
The medium moving mechanism 33 includes an X-axis guide 35 and an X-axis linear motor (not shown). The X-axis guide 35 is disposed below the support beam 44 between the two support pillars 43 and extends substantially parallel to the X-axis direction orthogonal to the Y-axis direction.
The slide table 31a is supported by the X-axis guide 35 so as to be slidable in the X-axis direction. The X-axis linear motor is disposed substantially parallel to the X-axis guide 35, and the slide base 31a is moved in the X-axis direction by the X-axis linear motor. Moreover, it is held at the moved arbitrary position. The medium mounting table 31 is fixed on the slide table 31a by a medium rotation mechanism (not shown) so as to be rotatable in a direction around an axis parallel to the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction. Is supported.

  By moving the slide table 31a in the X-axis direction by the medium moving mechanism 33, the medium mounting table 31 fixed and supported by the slide table 31a can be freely moved in the X-axis direction. Moreover, it can hold | maintain in the moved arbitrary positions. That is, the chip drawing body 15 and the like held on the medium mounting table 31 can be freely moved in the X-axis direction. Moreover, it can hold | maintain in the moved arbitrary positions.

In the head mechanism section 2, the droplet discharge head 20 of the head unit 21 suspended from the carriage frame 45 is held with the nozzle substrate 25 facing downward. The chip drawing body 15 or the like held on the medium mounting table 31 is moved to a position where the droplet discharge head 20 in the X-axis direction can be opposed and stopped, and the droplet discharge head 20 (head unit 21) located above is stopped. In synchronization with the movement in the Y-axis direction, the functional liquid is discharged as droplets. By relatively controlling the chip drawing body 15 and the like moving in the X-axis direction and the droplet discharge head 20 moving in the Y-axis direction, the droplets are landed at an arbitrary position on the chip drawing body 15 and the like. By doing so, it is possible to perform drawing of a desired planar shape.
In the carriage unit 22, one ultraviolet irradiation unit 27 for curing the ultraviolet curable functional liquid is disposed on each side of the head unit 21 in the Y-axis direction. An image drawn using an ultraviolet curable functional liquid can be cured using the ultraviolet irradiation unit 27.

  The discharge device control unit 7 is electrically connected to the droplet discharge head 20, the ultraviolet irradiation unit 27, the drive motor 47 of the carriage scanning mechanism 42, the X-axis linear motor of the medium moving mechanism 33, and the like. A control signal is sent from a control unit included in the discharge device control unit 7 to operate the droplet discharge head 20, the ultraviolet irradiation unit 27, the drive motor 47, the X-axis linear motor, and the like.

The maintenance device unit 5 includes various maintenance devices. The maintenance device is a device that performs various types of maintenance of the droplet discharge head 20. When performing maintenance of the droplet discharge head 20, the head unit 21 (droplet discharge head 20) is moved to a position facing the maintenance device unit 5 using the carriage scanning mechanism 42, and maintenance work is performed. The
The droplet discharge device 101 corresponds to a drawing device for drawing a drawing image.

<Image data generation device>
Next, an image data generation device 50 used to generate drawing image data for drawing the chip drawing image 150A and the like using the drawing device unit 100 will be described with reference to FIG. FIG. 4 is an explanatory diagram illustrating a functional configuration of the image data generation device.

As shown in FIG. 4, the image data generation device 50 includes a host computer 51, a display device 53, and an input / output device 52.
The host computer 51 includes an arithmetic device 51a and a storage device 51b. The storage device 51b stores a program, data, or the like that causes the image data generation device 50 to function as a device for generating drawing image data. The computing device 51a performs computation for generating drawing image data in accordance with a program stored in the storage device 51b.
The display device 53 includes a screen display unit 53a. The display device 53 is controlled by the host computer 51 to display various setting screens used for generating drawing image data on the screen display unit 53a.
The input / output device 52 functions as an input unit for inputting a program, data, and the like stored in the storage device 51b and numerical values of parameters that define drawing image data. It also functions as an output means for the generated drawing image data.

<Drawing image data generation process and setting screen>
Next, with respect to the process of generating the drawing image data using the image data generation device 50, the process of generating the drawing image data of the chip drawing image 150A to be drawn on the chip drawing body 15 described above will be described with reference to FIGS. Reference is made to FIG. FIG. 5 is a flowchart showing a process of generating drawing image data. 6 to 15 are explanatory diagrams showing setting screens displayed in the process of generating drawing image data. FIG. 16 is an explanatory diagram illustrating an example of generated drawing image data.

<Setting screen>
The image data generation device 50 displays various setting screens used for generating drawing image data on the screen display unit 53a. An operator who generates drawing image data using the image data generation device 50 inputs data for generating drawing image data along the displayed setting screen. FIG. 6A is an explanatory diagram showing an outline of the setting screen.
A setting screen 60 shown in FIG. 6A is an initial setting screen 60. When new drawing image data is generated, the initial setting screen 60 shown in FIG. 6A is displayed on the screen display unit 53a by selecting the new creation of the drawing image data. As shown in FIG. 6A, the setting screen 60 includes a process display screen 61, an auxiliary display screen 71, an input screen 91, a process transition button 62, and a limit value display screen 64. .

The process display screen 61 displays three processes for inputting data related to the chip drawing body 15 and processes currently being performed in the three processes. The three processes for inputting data related to the chip drawing body 15 are a drawing object setting process, an image processing mark setting process, and a drawing apparatus unit setting process. The character indicating the drawing object setting process is changed to the character indicating the image processing mark setting process or the drawing apparatus unit setting process, and the process currently being performed is the drawing object setting process. For example, the character indicating the process currently being performed is made different from the character indicating the other process by making the character thicker or darker.
The process transition button 62 is a button for changing the process to be performed. By clicking the process transition button 62, for example, the setting screen 60 of the drawing object setting process can be changed to the setting screen 60 of the image processing setting process, and the process to be performed can be changed.

  The input screen 91 is a screen for inputting parameter values that define the chip drawing body 15. The input screen 91 has an input box 92 and a box display 93. By selecting the input box 92 and inputting a numerical value, the value of the parameter to which the selected input box 92 is assigned can be input. A box display 93 displays the parameters to which the input box 92 is assigned. In the input screen 91 shown in FIG. 6A, 20 input boxes 92 are set, and numerical values of 20 parameters can be set. The input box 92 is selected by clicking the input box 92 to be selected or the box display 93 corresponding to the input box 92. The portion of the screen display unit 53a where the input screen 91 is displayed corresponds to the input screen unit.

The auxiliary display screen 71 includes a preview screen 72 and a parameter position screen 74. The auxiliary display screen 71 is a screen that displays the parameters input from the input screen 91 as a two-dimensional shape as shown in the drawing. The portion where the auxiliary display screen 71 is displayed in the screen display portion 53a corresponds to the auxiliary display screen portion.
The parameter position screen 74 includes a flat display screen 75, a thickness display screen 76, and a display selection box 77.

  The flat display screen 75 and the thickness display screen 76 include a graphic display unit 81 and a parameter display unit 82. The graphic display unit 81 of the flat display screen 75 includes a chip display image 16a, a holding substrate display image 17a, and a unit frame 84. The graphic display unit 81 of the thickness display screen 76 includes a chip display image 16a and a holding substrate display image 17a. The chip display image 16a and the holding substrate display image 17a are outlines of the outline of the semiconductor chip 16 or the holding substrate 17 shown in a substantially rectangular shape. A unit frame 84 shown as a substantially rectangular shape of a two-dot chain line in FIG. 6 indicates a chip unit 16 A of the semiconductor chip 16. A plurality of semiconductor chips 16 surrounded by the unit frame 84 are handled as one chip unit 16A. In the flat display screen 75 and the thickness display screen 76, the chip display image 16a, the holding substrate display image 17a, and the unit frame 84 indicate the schematic shape of the chip drawing body 15. The flat display screen 75 shows a schematic shape of the planar shape of the chip drawing body 15. The thickness display screen 76 shows a schematic side shape of the chip drawing body 15.

The parameter display unit 82 indicates a part corresponding to each parameter in the graphic display unit 81. In the parameter display part 82, the part corresponding to each parameter in the figure display part 81 is shown like a dimension line and a dimension auxiliary line. For example, the width Wc of the semiconductor chip 16 corresponds between the dimension auxiliary line line drawn substantially perpendicularly to the one side from each end of the one side of the chip display image 16a and the dimension auxiliary line line. Dimensional line drawn substantially parallel to one side.
An input box 92 for inputting the value of the parameter is formed on the input screen 91 corresponding to the parameter displayed on the parameter display unit 82. On the input screen 91, the names of the parameters shown in the parameter display section 82 are displayed as the box display 93 of the input box 92 corresponding to the parameter. A parameter (input box 92) corresponding to the display can also be selected by clicking on the display of the parameter display section 82.

  The display selection box 77 is a check box. When the display selection box 77 is checked as in the display selection box 77 shown in FIG. 6A, all parameters are displayed as in the parameter display section 82 shown in FIG. Is displayed on the parameter display section 82. FIG. 6B is an explanatory diagram illustrating an example of a setting screen in which only some parameters are displayed on the parameter display unit. When the display selection box 77 is not checked as in the display selection box 77 shown in FIG. 6B, only the parameter corresponding to the input box 92 selected on the input screen 91 is displayed in the parameter display section. 82. Since the input box 92 is not selected on the input screen 91 shown in FIG. 6B, the parameter display section 82 is displayed on the flat display screen 75 and the thickness display screen 76 shown in FIG. It has not been.

  The preview screen 72 includes a chip display image 16a, a holding substrate display image 17a, and a unit frame 84. Similar to the graphic display unit 81 described above, the chip display image 16a and the holding substrate display image 17a outline the outline of the semiconductor chip 16 or the holding substrate 17 in a substantially rectangular shape. The unit frame 84 indicates the range of the chip unit 16 </ b> A of the semiconductor chip 16. On the preview screen 72, the chip display image 16a, the holding substrate display image 17a, and the unit frame 84 have shapes corresponding to the parameter values input to the input screen 91. For example, the aspect ratio of the chip display image 16a, the holding substrate display image 17a, and the unit frame 84 is the same as the ratio of the input vertical dimension to the horizontal width. The ratio of the size of the chip display image 16a, the holding substrate display image 17a, and the unit frame 84 is the size value of the input semiconductor chip 16, the size value of the holding substrate 17, and the size of the range of the chip unit 16A. It is the same as the ratio of the dimension value. Therefore, the image of the chip drawing body 15 displayed on the preview screen 72 is a reduced or enlarged view of the chip drawing body 15 having a shape corresponding to the input parameter value. The portion of the screen display unit 53a where the preview screen 72 is displayed corresponds to the preview screen unit.

  The limit value display screen 64 displays a maximum value and a minimum value that can be set as parameter values. The maximum value and the minimum value are the maximum value and the minimum value in the parameter corresponding to the input box 92 selected on the input screen 91. For the maximum value and the minimum value, for example, values that can be physically set are set in advance for each parameter. The value that is not physically settable is, for example, the value of the width of the holding substrate 17 whose parameter is the width of the holding substrate 17 of the chip drawing body 15 and larger than the width that can be placed on the droplet discharge device 101. . The value that is not physically settable is, for example, the value of the width of the semiconductor chip 16 whose parameter is the width of the semiconductor chip 16 and smaller than the minimum pitch that can be drawn by the droplet discharge device 101. The part where the limit value display screen 64 is displayed in the screen display part 53a corresponds to the limit value display screen part.

<Drawing image data generation process>
In order to generate the drawing image data, first, the host computer 51 of the image data generation apparatus 50 is activated to select, for example, new creation. By selecting new creation, the setting screen 60 described with reference to FIG. 6A is displayed on the screen display unit 53a.
In the following description, the horizontal direction on the setting screen 60 is expressed as the W-axis direction, and the vertical direction perpendicular to the W-axis direction is expressed as the H-axis direction. In the auxiliary display screen 71 shown in FIG. 6A and the like, the sides of the chip display image 16a and the holding substrate display image 17a are substantially parallel to the W-axis direction or the H-axis direction. The chip display image 16a is aligned in a state of constituting a row substantially parallel to the W-axis direction and a column substantially parallel to the H-axis direction. The direction corresponding to the W-axis direction or the H-axis direction in the chip display image 16a or the holding substrate display image 17a is also expressed as the W-axis direction or the H-axis direction in the semiconductor chip 16 or the holding substrate 17.

First, by performing steps S21 to S23 in FIG. 5, the drawing object setting step is performed, and data related to the chip drawing object 15 is input.
In step S21 of FIG. 5, the layout setting of the chip drawing body 15 is performed. The layout setting is performed by inputting a setting value in the input box 92 of the input screen 91. A default value is displayed in the input box 92 of the setting screen 60 displayed by selecting new creation.

On the input screen 91, 20 input boxes 92 are arranged in 10 rows and 2 columns.
An input box 92 having two lines from the top is used to input parameters related to the entire chip drawing body 15. The parameter input from the input box 92 in the first column of the first row is the width of the holding substrate 17 in the W-axis direction. The parameter input from the input box 92 in the second column of the first row is the width of the holding substrate 17 in the H-axis direction. The parameter input from the input box 92 in the first column of the second row is the thickness of the chip drawing body 15 and is the thickness obtained by adding the thickness of the semiconductor chip 16 to the thickness of the holding substrate 17. The parameter input from the input box 92 in the second row and the second column is the thickness of the holding substrate 17.
The portion where the input box 92 for inputting the thickness of the chip drawing body 15 in the screen display portion 53a is displayed corresponds to the total thickness input screen portion. A portion where the input box 92 for inputting the thickness of the holding substrate 17 in the screen display portion 53a is displayed corresponds to the base material thickness input screen portion.

Input boxes 92 from the third line to the sixth line from the top are used to input parameters relating to the configuration of the chip unit 16A in the chip drawing body 15.
The parameter input from the input box 92 in the third row is the coordinates of the reference point position of the chip unit 16A (unit frame 84). The reference point of the chip unit is one of the corners of the unit frame 84 having a substantially rectangular shape (upper left corner in the drawing). The origin of the coordinates is one of the corners (upper left corner in the drawing) of the holding substrate 17 (holding substrate display image 17a) having a substantially rectangular shape.
The parameters input from the input box 92 on the fourth row are the number of columns and the number of rows of the chip unit 16A (unit frame 84). The row of chip units is a row in which chip units 16A (unit frames 84) are arranged in the H-axis direction. The row of chip units is a row in which the chip units 16A (unit frame 84) are arranged in the W-axis direction.
The parameters input from the input box 92 in the fifth row are the width in the W-axis direction and the width in the H-axis direction of the chip unit 16A (unit frame 84).
The parameters input from the input box 92 in the sixth row are the arrangement pitch (column pitch) in the W-axis direction and the arrangement pitch (row pitch) in the H-axis direction of the chip unit 16A (unit frame 84).

Input boxes 92 from the seventh line to the tenth line from the top are used to input parameters related to the configuration of the semiconductor chip 16 in the chip unit 16A (the configuration of the chip display image 16a in the unit frame 84).
The parameter input from the input box 92 on the seventh line is the coordinates of the reference point position of the semiconductor chip 16 (chip display image 16a). The reference point of the semiconductor chip 16 (chip display image 16a) is one of the corners (upper left corner in the drawing) of the semiconductor chip 16 (chip display image 16a) having a substantially rectangular shape. The origin of the coordinates is one of the corners of the chip unit 16A (unit frame 84) having a substantially rectangular shape (upper left corner in the drawing).
The parameters input from the input box 92 in the eighth row are the number of columns and the number of rows of the semiconductor chip 16 (chip display image 16a) in the chip unit 16A (unit frame 84). The column of the semiconductor chips 16 (chip display image 16a) is a column in which the semiconductor chips 16 (chip display image 16a) are arranged in the H-axis direction. The row of the semiconductor chip 16 (chip display image 16a) is a row in which the semiconductor chips 16 (chip display image 16a) are arranged in the W-axis direction.
The parameters input from the input box 92 on the ninth line are the width in the W-axis direction and the width in the H-axis direction of the semiconductor chip 16 (chip display image 16a).
The parameters input from the input box 92 in the tenth row are the arrangement pitch (column pitch) in the W-axis direction and the arrangement pitch (row pitch) in the H-axis direction of the semiconductor chip 16 (chip display image 16a).

FIG. 7A is an explanatory diagram illustrating an example of a setting screen in a state where an input box is selected. In the setting screen 60 shown in FIG. 7A, the input box 92 in the first column of the first row is selected to input the value of the width of the holding substrate 17 in the W-axis direction. The selected input box 92 is in an input state in which a numerical value can be input from, for example, a keyboard. The input box 92 that has been selected and is in the input state is, for example, that the input box 92 is selected and in the input state by inverting the background of the part that displays the numerical value and the color of the number. Be able to distinguish.
In the parameter position screen 74, a portion indicating the width in the W-axis direction of the holding substrate 17 in the parameter display portion 82 of the flat display screen 75 is highlighted. For highlighting, for example, the color tone is changed, the density is changed, or the thickness of characters and lines is changed.
On the limit value display screen 64, the maximum value display unit 66 displays the maximum value of the width of the holding substrate 17 in the W-axis direction, and the minimum value display unit 67 displays the minimum value. In this case, the maximum value of the width in the W-axis direction of the holding substrate 17 is, for example, the maximum value of the workpiece that can be drawn by the droplet discharge device 101.
As described above, the input box 92 can be selected by clicking the input box 92 to be selected or the box display 93 corresponding to the input box 92. Also, a parameter (input box 92) corresponding to the display can be selected by clicking on the display of the parameter display section 82.

  FIG. 7B is an explanatory diagram illustrating an example of a setting screen in a state where parameter input is completed. The setting screen 60 shown in FIG. 7B is an example of the setting screen 60 in a state where input of 20 parameters is completed. On the preview screen 72, a chip display image 16a, a holding substrate display image 17a, and a unit frame 84 having a shape reflecting the input parameter values are displayed.

When the numerical value input in the input box 92 exceeds the range from the minimum value displayed on the limit value display screen 64 to the maximum value, a warning screen 68 is displayed. FIG. 8 is an explanatory diagram illustrating an example of display of a setting screen or the like when a warning screen is displayed. FIG. 8A is an explanatory diagram illustrating an example of the display of the setting screen on which the warning screen is displayed, and FIG. 8B is an explanatory diagram illustrating an example of the display of the setting screen from which the warning screen is deleted. is there.
In the setting screen 60 shown in FIG. 8A, 260 mm is input with respect to the width in the W-axis direction of the holding substrate 17 whose maximum value displayed on the maximum value display unit 66 is 250 mm. When the ENTER key or the like is pressed to make the next input, a warning screen 68 is displayed over the setting screen 60 as shown in FIG. In the warning screen 68 shown in FIG. 8A, a comment notifying the reason for the inappropriate value is described.
The displayed warning screen 68 is deleted as shown in FIG. 8B by clicking the “OK” button of the warning screen 68. At this time, the numerical value of the input box 92 (the input box 92 in the first row and the first column) of the width in the W-axis direction of the holding substrate 17 shown in FIG. 8B is 240 mm. 240 is a numerical value that was input before 260 that was the target of the warning is input.
The warning screen 68 corresponds to an inconsistency warning screen. The arithmetic device 51a that performs the calculation for generating the drawing image data and also displays the warning screen 68 corresponds to the warning display control unit.

  Following step S21 in FIG. 5, in step S22, option setting of the drawing object is performed. FIG. 9A is an explanatory diagram showing a setting screen for performing option setting of a drawing object. As shown in FIG. 9A, an option selection box 92a is formed on the input screen 91 in the setting screen 60 for setting the options of the drawing body. The option selection box 92a is a check box, and setting an option enables option setting. In the example shown in FIG. 9A, position correction and tilt correction of the holding substrate 17 are possible. The parameter position screen 74 shows a holding substrate display image 17a and reference axes for position correction and inclination correction.

  Following step S22 in FIG. 5, in step S23, optional setting of the chip unit 16A is performed. FIG. 9B is an explanatory diagram showing a setting screen for performing option setting of the chip unit. As shown in FIG. 9B, an option selection box 92a is formed on the input screen 91 in the setting screen 60 for performing option setting of the chip unit. The option selection box 92a is a check box, and setting an option enables option setting. In the example shown in FIG. 9B, the pitch interval can be individually set for each row or column of the chip unit 16A. The parameter position screen 74 shows the same shape as in the layout setting.

After step S23 in FIG. 5, in step S24, the process proceeds from the drawing object setting process to the image processing mark setting process. As in the setting screen 60 shown in FIG. 7B, by clicking the process transition button 62 on the setting screen 60 in a state in which the drawing object setting process is performed, the image processing mark setting is set from the drawing object setting process. Move to the process. At this time, if there is a mismatch in the parameter values input in the drawing object setting step, a warning screen 68 is displayed.
FIG. 10 is an explanatory diagram illustrating an example of display of a setting screen or the like when a warning screen is displayed. FIG. 10A is an explanatory diagram illustrating an example of the display of the setting screen on which the warning screen is displayed, and FIG. 10B is an explanatory diagram illustrating an example of the display of the setting screen from which the warning screen is deleted. is there. The case where the input parameter values are inconsistent is a case where each parameter value is an appropriate value as a parameter value but is not appropriate when combined. For example, the size and arrangement pitch of the semiconductor chips 16 are appropriate, but the columns and rows of the semiconductor chips 16 are longer than the width and length of the holding substrate 17.
In the setting screen 60 shown in FIG. 10A, the width of the semiconductor chip 16 in the W-axis direction and the H-axis direction is 12 mm, but the column pitch and the row pitch are set to 11 mm. For this reason, a warning screen 68 is displayed. In the warning screen 68 shown in FIG. 10A, a comment notifying the reason for the inappropriate value is described.

The displayed warning screen 68 is deleted as shown in FIG. 10B by clicking the “OK” button of the warning screen 68. At this time, the column pitch input box 92 of the semiconductor chip 16 shown in FIG. 10B (the input box 92 in the 10th row and the first column) is in a selected state. When a new value is input to the input box 92, the input box 92 of the row pitch of the semiconductor chip 16, which is another input box 92 to which an inappropriate value is input (input of the second row and the tenth row). Box 92) is selected.
The warning screen 68 corresponds to an inconsistency warning screen. The arithmetic device 51a that performs the calculation for generating the drawing image data and also displays the warning screen 68 corresponds to the warning display control unit.

After step S24 in FIG. 5, in step S25, the position of the alignment mark is set. FIG. 11A is an explanatory diagram showing a setting screen for setting the position of the alignment mark. As shown in FIG. 11A, an alignment mark selection box 92b is formed on the input screen 91 in the setting screen 60 for setting the position of the alignment mark. The alignment mark selection box 92b is a check box, and the alignment mark position can be set by checking this box. In the example shown in FIG. 11A, the position of the two alignment marks and the surface on which the alignment mark is drawn on the holding substrate 17 can be set. The surface of the holding substrate 17 on which the semiconductor chip 16 is placed is the front surface, and the opposite surface is the back surface. On the parameter position screen 74, a holding substrate display image 17a, an alignment mark image 86, and a parameter display portion 82 indicating the position of the alignment mark image 86 are displayed. On the preview screen 72, two alignment mark images 86 are displayed at positions determined by the values input on the input screen 91.
The alignment mark is used when the chip drawing body 15 placed on the processing apparatus is aligned. By recognizing the alignment mark by the imaging device, the chip drawing body 15 placed on the processing device is aligned.

  Following step S25 in FIG. 5, in step S26, the position of the front / back discrimination mark is set. FIG. 11B is an explanatory diagram showing a setting screen for setting the position of the front / back discrimination mark. As shown in FIG. 11B, in the setting screen 60 for setting the position of the front / back discrimination mark, the input screen 91 has a front / back discrimination mark selection box 92c. The front / back discrimination mark selection box 92c is a check box, and by checking this, the front / back discrimination mark position can be set. In the example shown in FIG. 11B, the position of the front / back discrimination mark and the surface of the holding substrate 17 on which the front / back discrimination mark is drawn can be set. The surface of the holding substrate 17 on which the semiconductor chip 16 is placed is the front surface, and the opposite surface is the back surface. On the parameter position screen 74, a holding substrate display image 17a, a front / back discrimination mark image 87, and a parameter display portion 82 indicating the position of the front / back discrimination mark image 87 are displayed. On the preview screen 72, a front / back discrimination mark image 87 is displayed at a position determined by the value input on the input screen 91.

When the numerical value input in the input box 92 exceeds the range from the minimum value displayed on the limit value display screen 64 to the maximum value, a warning screen 68 is displayed. FIG. 12 is an explanatory diagram illustrating an example of display of a setting screen or the like when a warning screen is displayed. FIG. 12A is an explanatory diagram illustrating an example of the display of the setting screen on which the warning screen is displayed, and FIG. 12B is an explanatory diagram illustrating an example of the display of the setting screen from which the warning screen is deleted. is there.
In the setting screen 60 shown in FIG. 12A, 120 mm is input with respect to the position in the H-axis direction of the reference point whose maximum value displayed on the maximum value display unit 66 is 110 mm. When the ENTER key or the like is pressed to make the next input, a warning screen 68 is displayed over the setting screen 60 as shown in FIG. In the warning screen 68 shown in FIG. 12A, a comment for notifying the reason for the inappropriate value is described.
The displayed warning screen 68 is deleted as shown in FIG. 12B by clicking the “OK” button of the warning screen 68. At this time, the numerical value in the input box 92 (input box 92 in the first row and second column) of the position in the H-axis direction of the reference point of the front / back discrimination mark shown in FIG. 12B is 86 mm. 86 is a numerical value that was input before 120 that was the target of the warning is input.
The warning screen 68 corresponds to an inconsistency warning screen. The arithmetic device 51a that performs the calculation for generating the drawing image data and also displays the warning screen 68 corresponds to the warning display control unit.

After step S26 in FIG. 5, in step S27, the process proceeds from the image processing mark setting step to the drawing apparatus unit setting step. As in the setting screen 60 shown in FIG. 11, when the process transition button 62 is clicked on the setting screen 60 in a state where the image processing mark setting process is performed, the image processing mark setting process shifts to the drawing apparatus unit setting process. To do. At this time, if there is a mismatch in the parameter values input in the image processing mark setting step, a warning screen 68 is displayed as shown in FIG. FIG. 13A is an explanatory diagram illustrating an example of a display of a setting screen on which a warning screen is displayed.
The case where the input parameter values are inconsistent is a case where each parameter value is an appropriate value as a parameter value but is not appropriate when combined. For example, in the example shown in FIG. 13A, an appropriate value that defines the position of the front / back discrimination mark is in the range from the minimum value (0) to the maximum value (110) displayed on the limit value display screen 64. This is a case where the value (100) does not fall within the width (89) of the holding substrate 17 set in the drawing object setting step. In the warning screen 68, a comment notifying the reason for the inappropriate value is described. The displayed warning screen 68 is deleted by clicking an “OK” button included in the warning screen 68. At this time, as in the case described with reference to FIG. 10B, the input box 92 for inputting the position of the front / back discrimination mark is selected. When a new value is input in the input box 92, another input box 92 in which an inappropriate value is input is selected.
The warning screen 68 corresponds to an inconsistency warning screen. The arithmetic device 51a that performs the calculation for generating the drawing image data and also displays the warning screen 68 corresponds to the warning display control unit.

  Next to step S27 in FIG. 5, in step S28, a drawing setting process of the drawing apparatus unit setting process is performed. FIG. 13B is an explanatory diagram showing a setting screen when setting a drawing mode in the droplet discharge device. In the drawing setting step, as shown in FIG. 13B, a drawing mode in the droplet discharge device 101 is set.

  Following step S28 in FIG. 5, in step S29, a magazine setting step of the drawing apparatus unit setting step is performed. FIG. 14A is an explanatory diagram showing a setting screen for setting parameter values related to a magazine. In the magazine setting step, as shown in FIG. 14A, parameter values related to the magazine are set. As shown in FIG. 14A, a magazine setting selection box 92d is formed on the input screen 91 in the setting screen 60 for performing the magazine setting process. The magazine setting selection box 92d is a check box, and a magazine can be set by checking this box. As described above, the chip drawing body 15 and the like are mounted on a predetermined magazine. By loading the magazine with the chip drawing body 15 and the like mounted on the load device 105, the chip drawing body 15 and the like are supplied to the drawing apparatus unit 100. In the magazine setting step, parameter values related to the magazine used when drawing the generated chip drawing image 150A are set.

  Following step S29 in FIG. 5, in step S30, a preprocessing setting step of the drawing apparatus unit setting step is performed. FIG. 14B is an explanatory diagram showing a setting screen for performing the preprocessing setting step. As shown in FIG. 14B, in the setting screen 60 for performing the preprocessing setting step, a preprocessing setting selection box 92e is formed on the input screen 91. The pre-processing setting selection box 92e is a check box, and setting a check enables pre-processing setting. As described above, the preprocessing device 103 performs preprocessing for bringing the chip drawing body 15 and the like into a state suitable for drawing with the droplet discharge device 101. In the preprocessing setting step, parameter values related to the preprocessing conditions are input.

After step S30 in FIG. 5, in step S31, the process proceeds to a chip image pasting step. By clicking the completion button 63 shown in FIG. 14 or the like, an image pasting screen 600 for performing the chip image pasting process is displayed as shown in FIG.
When the completion button 63 is clicked, it is verified whether there is any inconsistency in the values of the parameters input so far. If there is a mismatch, a warning screen 68 is displayed to prompt correction of the mismatch. If there is no inconsistency, the value of each input parameter is determined by clicking the completion button 63.
The portion where the completion button 63 is displayed in the screen display portion 53a corresponds to the setting confirmation button portion. The warning screen 68 corresponds to an inconsistency warning screen. The arithmetic device 51a that performs the calculation for generating the drawing image data and also displays the warning screen 68 corresponds to the warning display control unit.

After step S31 in FIG. 5, in step S32, a chip image pasting step is performed. FIG. 15 is an explanatory diagram showing an image pasting screen when performing the chip image pasting step. FIG. 15A is an explanatory diagram showing an image pasting screen before pasting a chip image image, and FIG. 15B is an explanatory diagram showing an image pasting screen pasted with a chip image image.
In the chip image pasting step, a chip image acquiring step is first performed. By performing the chip image acquisition process, the chip image image 150a is inserted into the image pasting screen 600 as shown in FIG. In the image pasting screen 600 shown in FIG. 15A, two types of chip image images 150a are inserted.
Next, in the chip image pasting step, the chip image image 150a is pasted on the chip display image 16a on the layout display screen 720 on the image pasting screen 600 as shown in FIG. By sticking the predetermined chip image image 150a on the chip display image 16a on which the chip image image 150a is printed, a drawn image is formed as shown in FIG.

After step S32 in FIG. 5, in step S33, the drawing image data is output. The drawing image data is electronic data and is output from the input / output device 52 of the image data generation device 50. FIG. 16 is an explanatory diagram illustrating an example of generated drawing image data. Drawing image data partially shown in FIG. 16 is output as electronic data.
Step S33 is implemented and the process of generating drawing image data is completed.
The electronic data of the drawing image data is input to the drawing unit control device 107 of the drawing device unit 100. The drawing unit control device 107 performs chip image drawing as shown in FIG. 15B in accordance with the input drawing image data.

Hereinafter, the effect by embodiment is described. According to the present embodiment, the following effects can be obtained.
(1) In the image data generation device 50, various setting screens used for generating drawing image data are displayed on the screen display unit 53a. An operator who generates drawing image data by using the image data generation device 50 inputs the setting values of various parameters for generating drawing image data along the displayed setting screen, thereby inputting It is possible to easily recognize parameters correctly. Thereby, it can suppress performing an incorrect operation.

  (2) The setting screen 60 includes an auxiliary display screen 71 and an input screen 91. While it is possible to input parameter values from the input screen 91 while checking on the auxiliary display screen 71, it is possible to easily recognize the parameter to be input correctly. Thereby, it is possible to suppress mistakes in parameters to be input.

  (3) On the auxiliary display screen 71, the parameters input from the input screen 91 are displayed as a two-dimensional shape as shown in the drawing. Thereby, the value of the parameter can be visually recognized as a two-dimensional shape displayed on the auxiliary display screen unit. Since the parameter value can be visually recognized as a two-dimensional shape, the parameter value can be easily confirmed.

  (4) The auxiliary display screen 71 includes a parameter position screen 74. The parameter position screen 74 includes a graphic display unit 81 and a parameter display unit 82. The graphic display unit 81 displays a schematic shape of the chip drawing body 15 such as the chip display image 16 a, and the parameter display unit 82 indicates a part corresponding to each parameter in the graphic display unit 81. Thereby, each parameter can be illustrated clearly.

  (5) The parameter position screen 74 has a display selection box 77. By unchecking the display selection box 77, only the selected parameter is displayed on the parameter display section 82. This makes it easier to understand the selected parameter.

  (6) The auxiliary display screen 71 includes a preview screen 72. On the preview screen 72, the chip display image 16 a, the holding substrate display image 17 a, and the unit frame 84 have shapes corresponding to the parameter values input on the input screen 91 and are displayed on the preview screen 72. The image of the chip drawing body 15 is a reduced or enlarged view of the chip drawing body 15 having a shape corresponding to the input parameter value. Thereby, the input parameter value can be confirmed as a shape.

  (7) The setting screen 60 includes a limit value display screen 64. The limit value display screen 64 displays the maximum value and the minimum value in the parameters corresponding to the input box 92 selected on the input screen 91. By providing the limit value display screen 64, it is possible to easily recognize the maximum value and the minimum value of the parameter to be input. Thereby, it can suppress that the value exceeding the maximum value or minimum value which can be set is input.

  (8) An input box 92 for inputting parameters related to the configuration of the chip unit 16A in the chip drawing body 15, and parameters related to the configuration of the semiconductor chip 16 in the chip unit 16A (configuration of the chip display image 16a in the unit frame 84). And an input box 92 for inputting. Thereby, the semiconductor chip 16 can be handled in units of chip units 16 </ b> A that are aggregates of the semiconductor chips 16. By handling in units of the chip unit 16A, the amount of data to be handled can be reduced as compared with the case of handling each individual semiconductor chip 16.

  (9) When the numerical value input in the input box 92 exceeds the range from the minimum value displayed on the limit value display screen 64 to the maximum value, a warning screen 68 is displayed. Thereby, it is possible to substantially eliminate the input of a value exceeding the maximum value or the minimum value.

  (10) When the warning screen 68 displayed when the range from the minimum value to the maximum value displayed on the limit value display screen 64 is exceeded, the numerical value of the input box 92 that is the target of warning is: The numerical value that was input before the numerical value that was the target of the warning is input. Thereby, it is possible to substantially eliminate the input of the numerical value that is the target of the warning as it is.

  (11) In the warning screen 68 displayed when the range from the minimum value to the maximum value displayed on the limit value display screen 64 is exceeded, a comment notifying the reason for the inappropriate value is described. Yes. Thereby, it is possible to easily select an appropriate value while avoiding the cause of an inappropriate value.

  (12) When the process input button 62 is clicked and the parameter value input in the drawing object setting process is inconsistent when the drawing object setting process is shifted to the image processing mark setting process. The warning screen 68 is displayed. It is possible to substantially eliminate the completion of the drawing object setting process in a state where the parameter values input in the drawing object setting process are inconsistent.

  (13) The warning screen 68 displayed when there is an inconsistency in the parameter value input in the drawing object setting step describes a comment notifying the reason for the inconsistency in the parameter value. ing. Thereby, it is possible to easily select an appropriate value while avoiding the cause of inconsistency.

  (14) When the warning screen 68 displayed when the parameter value input in the drawing object setting process is inconsistent is deleted, the input box 92 in which the parameter value is inconsistent is displayed. Selected state. Thereby, it is possible to easily recognize a parameter in which inconsistency has occurred and to easily correct an inappropriate value.

  (15) The setting screen 60 includes a completion button 63, and when the completion button 63 is clicked, the process proceeds to the chip image pasting step. At this time, when the completion button 63 is clicked, the value of each input parameter is confirmed. Thereby, since it can clarify that the setting was completed, it can suppress that it transfers to a chip | tip image sticking process in the state where setting is not completed.

  (16) The setting screen 60 includes a completion button 63, and when the completion button 63 is clicked, the process proceeds to the chip image pasting step. At this time, if there is a mismatch in the parameter values input so far, a warning screen 68 is displayed. Thereby, it is possible to substantially eliminate the shift to the chip image pasting step in a state where the input parameter values are inconsistent.

  (17) When the completion button 63 is clicked, the parameter value is inconsistent on the warning screen 68 displayed when the parameter value input using the setting screen 60 is inconsistent. A comment is provided to notify the reason. Thereby, it is possible to easily select an appropriate value while avoiding the cause of inconsistency.

  (18) When the warning screen 68 displayed when there is an inconsistency in the parameter value input using the setting screen 60 when the completion button 63 is clicked, the parameter value is displayed. The input box 92 in which a mismatch occurs is selected. Thereby, it is possible to easily recognize a parameter in which inconsistency has occurred and to easily correct an inappropriate value.

  (19) In the input box 92 that has been selected and is in the input state, for example, the background of the part displaying the numerical value and the color of the number are inverted. Thereby, it can be clearly shown that the input box 92 is selected and in the input state.

  (20) On the parameter position screen 74, the portion corresponding to the selected parameter in the parameter display section 82 of the flat display screen 75 or the thickness display screen 76 is highlighted. Thereby, the selected parameter can be visually recognized in the two-dimensional shape of the flat display screen 75 or the thickness display screen 76.

  (21) By clicking the display of the parameter display section 82 on the parameter position screen 74, the parameter (input box 92) corresponding to the display can be selected. Accordingly, the parameter (input box 92) can be selected while visually recognizing the two-dimensional shape of the flat display screen 75 or the thickness display screen 76.

  (22) As a parameter that can be input, the thickness of the chip drawing body 15 (the thickness obtained by adding the thickness of the semiconductor chip 16 to the thickness of the holding substrate 17) is set. Thereby, the thickness information of the chip drawing body 15 can be added to the drawing image data to be generated. The information on the thickness of the chip drawing body 15 is useful for accurately setting the gap with the droplet discharge head 20 when the chip drawing body 15 is set on the droplet discharge apparatus 101 for drawing, for example. .

(23) The thickness of the holding substrate 17 is set as an inputable parameter. Thereby, the thickness information of the holding substrate 17 can be added to the generated drawing image data. Information on the thickness of the holding substrate 17 is, for example, when the chip drawing body 15 is set in the droplet discharge device 101 and an alignment mark or front / back discrimination mark is drawn, and the holding substrate which is the drawing target of the droplet discharge head 20 This is useful for setting the distance to the 17 planes accurately.
Further, when optically recognizing the alignment mark or the front / back discrimination mark, it is useful for specifying the position to be focused (the position of the surface on which the alignment mark or the front / back discrimination mark is formed).

  (24) The drawing apparatus unit 100 includes a droplet discharge device 101, a transfer robot 102, a pretreatment device 103, a temperature adjustment device 104a, a temperature adjustment device 104b, a load device 105, an unload device 106, A drawing unit control device 107. The image data generation device 50 has a function of generating drawing image data for drawing the chip drawing image 150 </ b> A using the drawing device unit 100. Accordingly, the drawing image data generated by the image data generation device 50 is input to the drawing device unit 100 and the chip drawing body 15 is supplied, whereby the chip image 150 can be drawn on the semiconductor chip 16.

  As mentioned above, although preferred embodiment was described referring an accompanying drawing, suitable embodiment is not restricted to the said embodiment. The embodiment can of course be modified in various ways without departing from the scope, and can also be implemented as follows.

(Modification 1) In the embodiment, the drawing device unit 100 that draws the chip drawing image 150A according to the drawing image data of the chip drawing image 150A includes the droplet discharge device 101 including the ink jet type droplet discharge head 20. I was prepared. However, it is not essential that the apparatus that performs drawing is an apparatus that includes an inkjet discharge head. The apparatus that performs drawing may be an apparatus that includes an ejection head of a system other than the ink jet system. The discharge head may be a discharge head that discharges a liquid material continuously instead of as droplets.
In addition, it is not essential that the drawing apparatus is an apparatus for forming an image using a liquid material. It may be an apparatus that forms an image by irradiating a laser beam and changing the state of the portion of the drawing medium irradiated with the laser beam.

  (Modification 2) In the above-described embodiment, the image data generation device 50 is a device different from the drawing device unit 100. However, it is not essential that the data generation device is separate from the device that forms an image. Absent. The drawing control device such as the drawing unit control device 107 may include a data generation device such as the image data generation device 50. Alternatively, the drawing control apparatus and the data generation apparatus may be electrically connected to transmit image data directly from the data generation apparatus to the drawing control apparatus.

  (Modification 3) In the embodiment, the image data generation device 50 has a function of generating drawing image data for drawing the chip drawing image 150A and the like using the drawing device unit 100. Accordingly, it is possible to generate data related to the preprocessing step and the material to be drawn and material removal. However, it is not indispensable that the drawing image data generated by the data generation device includes data related to the preprocessing process and the material for supplying and removing the drawing medium. The data generation apparatus may be an apparatus having only a function capable of forming data necessary for operating a drawing apparatus such as the droplet discharge apparatus 101.

  (Modification 4) In the above embodiment, the semiconductor chip 16 is described as an example of the drawing medium. However, the drawing medium is not limited to the semiconductor chip. The drawing medium for which the above-described data generation apparatus, data generation method, or program functions suitably performs drawing at the same time when drawing an image on each drawing medium on a number of drawing media. Any drawing medium may be used as long as the drawing medium can be efficiently drawn. For example, the above-mentioned data generation device and data are also used when marking a packaged semiconductor device, printing on a label, decorating various objects, printing metal wiring on a wiring board, etc. A generation method or a program can be suitably applied.

  (Modification 5) In the embodiment, the limit value display screen 64 includes the maximum value display unit 66 for displaying the maximum value of the parameter and the minimum value display unit 67 for displaying the minimum value. It is not essential to display both the maximum value and the minimum value on the limit value display screen. It may be a configuration or a method for displaying only one of the maximum value and the minimum value on the limit value display screen.

  DESCRIPTION OF SYMBOLS 15 ... Chip drawing body, 16 ... Semiconductor chip, 16A ... Chip unit, 16a ... Chip display image, 17 ... Holding substrate, 17a ... Holding substrate display image, 50 ... Image data generation device, 51 ... Host computer, 51a ... Arithmetic device , 51b ... Storage device, 52 ... Input / output device, 53 ... Display device, 53a ... Screen display unit, 60 ... Setting screen, 61 ... Process display screen, 62 ... Process transition button, 63 ... Complete button, 64 ... Limit value display Screen 66. Maximum value display section 67. Minimum value display section 68 68 Warning screen 71 71 Auxiliary display screen 72 Preview screen 74 Parameter position screen 75 Flat display screen 76 Thickness display screen , 77 ... Display selection box, 81 ... Graphic display section, 82 ... Parameter display section, 84 ... Unit frame, 86 ... Alignment mark image, 87 ... Front / back discrimination mark Image 91 ... Input screen 92 ... Input box 92a ... Option selection box 92b ... Alignment mark selection box 92c ... Front / back discrimination mark selection box 92d ... Magazine setting selection box 92e ... Pre-processing setting selection box 93 ... Box display, 100 ... Drawing device unit, 101 ... Droplet discharge device, 102 ... Transport robot, 103 ... Pretreatment device, 104a, 104b ... Temperature adjustment device, 105 ... Load device, 106 ... Unload device, 107 ... Drawing unit Control device 110 ... package image 110A ... package drawing image 150 ... chip image 150A ... chip drawing image 150a ... chip image image 600 ... image pasting screen 720 ... layout display screen

Claims (13)

A data generation device that generates image data of a drawing image for drawing on a drawing object including a plurality of drawing media,
An input screen portion having an input box for inputting a parameter value defining the image data;
An auxiliary display screen that displays the input parameter values as a two-dimensional shape. The parameters include a shape parameter that defines the shape of the drawing medium and an arrangement parameter that defines the arrangement of the drawing medium,
The auxiliary display screen unit includes a preview screen unit that displays a shape and an arrangement position of the drawing medium according to a value of the shape parameter or a two-dimensional shape formed according to the value of the arrangement parameter. Item 4. The data generation device according to Item 1. The input screen part includes a setting confirmation button part,
The data generation apparatus according to claim 1, wherein the input parameter value is determined by selecting the setting confirmation button unit.   4. The display device according to claim 1, further comprising a limit value display screen that displays at least one of a maximum value and a minimum value that can be set in the parameter for inputting a value using the selected input box. The data generation device according to any one of claims. It further includes a warning display control unit that displays an inconsistency warning screen,
The said warning display control part displays the said inconsistency warning screen, when the value of the said input parameter is an improper value, It is characterized by the above-mentioned. Data generator. If the entered parameter value is inappropriate,
The inconsistency warning screen is displayed, and the numerical value displayed in the input box in which an inappropriate numerical value is input is returned to the numerical value immediately before the inappropriate numerical value is input. 5. The data generation device according to 5. If the entered parameter value is inappropriate,
The data generation apparatus according to claim 5, wherein the inconsistency warning screen is displayed and the input box in which an inappropriate numerical value is input is selected.   The data according to any one of claims 5 to 7, wherein the case where the input parameter values are physically inconsistent is a case where the input parameter values are inappropriate. Generator.   The case where the drawing image defined by the input parameter value cannot be drawn by a drawing device for drawing the drawing image is an inappropriate case of the input parameter value. The data generation device according to any one of claims 5 to 7, wherein   The data generation apparatus according to claim 1, wherein the input screen unit includes a total thickness input screen unit for inputting a thickness of the drawing object.   The said input screen part is equipped with the base-material thickness input screen part for inputting the thickness of the drawing body base material which supports the said drawing medium in the said to-be-drawn body, The Claim 1 thru | or 10 characterized by the above-mentioned. The data generation device according to any one of claims. A data generation method for generating image data of a drawing image for drawing on a drawing object having a plurality of drawing media,
A prescribed value input step for inputting a value of a parameter defining the image data;
An auxiliary display step of displaying the input value of the parameter as a two-dimensional shape. A program for causing a computer to execute a process for generating image data of a drawing image for drawing on a drawing object having a plurality of drawing media,
A prescribed value input step for inputting a value of a parameter defining the image data;
A program for causing a computer to execute an auxiliary display step of displaying the input parameter value as a two-dimensional shape.