JP2016017768A5 - - Google Patents

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Publication number
JP2016017768A5
JP2016017768A5 JP2014138838A JP2014138838A JP2016017768A5 JP 2016017768 A5 JP2016017768 A5 JP 2016017768A5 JP 2014138838 A JP2014138838 A JP 2014138838A JP 2014138838 A JP2014138838 A JP 2014138838A JP 2016017768 A5 JP2016017768 A5 JP 2016017768A5
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JP
Japan
Prior art keywords
pair
driving
arm
fixing portions
extending
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JP2014138838A
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English (en)
Japanese (ja)
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JP2016017768A (ja
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Priority to JP2014138838A priority Critical patent/JP2016017768A/ja
Priority claimed from JP2014138838A external-priority patent/JP2016017768A/ja
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Publication of JP2016017768A5 publication Critical patent/JP2016017768A5/ja
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JP2014138838A 2014-07-04 2014-07-04 センサー素子、センサーデバイス、電子機器および移動体 Withdrawn JP2016017768A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014138838A JP2016017768A (ja) 2014-07-04 2014-07-04 センサー素子、センサーデバイス、電子機器および移動体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014138838A JP2016017768A (ja) 2014-07-04 2014-07-04 センサー素子、センサーデバイス、電子機器および移動体

Publications (2)

Publication Number Publication Date
JP2016017768A JP2016017768A (ja) 2016-02-01
JP2016017768A5 true JP2016017768A5 (enrdf_load_stackoverflow) 2017-07-27

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Family Applications (1)

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JP2014138838A Withdrawn JP2016017768A (ja) 2014-07-04 2014-07-04 センサー素子、センサーデバイス、電子機器および移動体

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JP (1) JP2016017768A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6619313B2 (ja) 2016-09-21 2019-12-11 株式会社東芝 センサ及びセンサパッケージ
CN108731659A (zh) * 2018-05-25 2018-11-02 中国电子科技集团公司第二十九研究所 一种多检测振动单元微惯性导航陀螺仪

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4352975B2 (ja) * 2003-07-25 2009-10-28 セイコーエプソン株式会社 圧電振動片、圧電振動片の支持構造、圧電振動子及び振動型圧電ジャイロスコープ
JP2014089049A (ja) * 2012-10-29 2014-05-15 Tdk Corp 角速度センサ

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