JP2016000392A - Microvolume liquid dripping method and microvolume liquid dispenser - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a microvolume liquid dispensing method that makes it possible to precisely dispense a microvolume liquid of a picoliter order using a microdiameter cylindrical nozzle.SOLUTION: Provided is the microvolume liquid dispensing method in which a variable capacity passage section 10 of a liquid passage 6 is pressurized from the outside and shrunk in a direction that reduces the internal capacity thereof so that a liquid that is within the variable capacity passage section 10 is pushed toward both a downstream passage section 6B and an upstream passage section 6A (Step ST3). A microvolume of the liquid is pushed toward the downstream passage section 6B as a result of the resistance of these liquid passages. It is thus possible to precisely drip a microvolume liquid from a tip opening 4a of a nozzle 4 by simple control.

Description

  The present invention relates to a trace liquid outflow method and a trace liquid dispenser capable of discharging, dropping, and the like of a trace amount liquid in a nanoliter order and further a picoliter order using, for example, a nozzle having a minute diameter of 0.5 mm or less. Note that continuous discharge, intermittent discharge, continuous dripping, and intermittent dripping of liquid from the nozzle are collectively referred to as “outflow”.

  A pneumatic liquid dispenser is known as a mechanism for dropping or discharging liquid on the substrate surface or the like. In a liquid dispenser, a liquid is pressurized using a pressurizer such as a pump, and the liquid is dropped or ejected from a nozzle having a predetermined diameter to apply the liquid onto the surface of a target substrate. Patent Documents 1 to 3 describe such a liquid dispenser.

  Further, fine patterning in a semiconductor manufacturing process or the like is difficult with a pneumatic liquid dispenser, and an electrostatic discharge liquid discharge head or the like is used. Such a liquid discharge head has been proposed in Patent Document 4 by the present inventors.

  On the other hand, Patent Document 5 proposes a micrometering device for metering and dispensing a liquid. The micrometering device proposed here includes a flexible tube with a constant inner diameter to which liquid is supplied from a fluid container, and the flexible tube is crushed by an extruder driven by a piezoelectric actuator and formed at one end of the flexible tube. A small amount of liquid is discharged from the outlet hole.

  The volume change caused by the high speed movement of the extruder causes a fluid flow on the one hand towards the outlet hole of the flexible tube and on the other hand a back flow through the inlet channel to the fluid container. In addition, the extruder is positioned near the outlet hole, and the fluid impedance on the outlet hole side is lower than the fluid impedance on the inlet path side on the upstream side than the portion pushed by the extruder in the flexible tube. Most of the fluid to be discharged is discharged from the outlet hole. Furthermore, the pressing surface of the flexible tube by the extruder is an inclined surface set back toward the outlet hole side, and when the flexible tube is pressed by the pressing device, a lot of fluid is pushed out toward the outlet side. In other words, the flexible tube is deformed so as to be in an axially asymmetric state in order to determine the discharge amount by the ratio of the pipe resistance and to discharge the fluid vigorously from the outlet hole.

Japanese Patent Laid-Open No. 10-57866 Japanese Patent No. 3564361 JP 2005-797 A JP 2010-64359 A Special table 2007-502399 gazette

In the case of an electrostatic discharge type liquid discharge head, an electrostatic force generated between the head and a target substrate is used. Therefore, there is a restriction that the material to be ejected is limited to a non-conductive material (a material having high dielectric properties or dielectric properties). Although it is possible to use a liquid discharge head of another drive type such as a piezo drive type, it is difficult to discharge or drop a highly viscous liquid. For example, it is difficult to discharge and drop a high-viscosity resin liquid material such as a UV curable resin or a high-viscosity metal paste such as an Ag paste in the nanoliter order or picoliter order.

  Therefore, it is conceivable to set the nozzle diameter of a pneumatic dispenser or the like to a minute diameter of 500 μm or less, for example, 100 μm or less, so that a fine droplet can be discharged or can be dropped. However, it is difficult to discharge liquid from such a small diameter nozzle at a constant minute flow rate. For example, since the pipe resistance of a thin nozzle is large, it is difficult to discharge or drop liquid from the nozzle even if the pressure of the liquid supplied to the nozzle is increased.

  Further, when the pressure of the liquid is increased, a large amount of liquid is discharged or dripped from the nozzle at a time, and thereafter, the liquid pressure in the nozzle is temporarily lowered, so that the discharge or dripping of the liquid becomes unstable. This is repeated, and a minute amount of liquid in nanoliter order or picoliter order cannot be discharged or dropped intermittently.

  On the other hand, in the micrometering device proposed in Patent Document 5, a part of a microdiameter flexible tube is deformed in an axially asymmetric state so that fluid is pushed out to the outlet hole side by an extruder driven by a piezoelectric actuator. Will be crushed. By crushing the flexible tube in an axially asymmetric state, most of the liquid is pushed out toward the outlet hole (toward the downstream side) and is ejected vigorously from the outlet hole.

  In order to control the ejected droplets to a minute amount on the order of nanoliters or picoliters, it is necessary to reduce the amount of crushing of the flexible tube. Must be controlled with high accuracy. Moreover, since it is necessary to crush the flexible tube in an axially asymmetric state so that the fluid is pushed out toward the outlet side, the shape of the pressing surface of the extruder must be processed with high accuracy.

  However, the mechanism that crushes a part of a small diameter flexible tube precisely by a minute amount and pushes out micro liquid of nano liter order or pico liter order is the same as that of electrostatic drive and piezo drive ink jet heads. It cannot be manufactured using a lithography technique or the like. Therefore, it is expensive to manufacture a micro mechanism with high accuracy and is not practical.

  In addition, an outlet hole for discharging droplets is formed at the tip of the flexible tube. For this reason, if the tube portion between the portion crushed by the extruder and the outlet hole is deformed, the amount of liquid droplets discharged from the outlet hole may vary. For example, if the internal pressure of the flexible tube fluctuates due to being pushed by the extruder, the tube portion near the outlet hole is deformed accordingly, and the amount of discharged liquid droplets changes, and there is a possibility that a small amount of liquid droplets cannot be discharged accurately. There is.

  In view of these points, the problem of the present invention is to use a nozzle having a minute diameter of, for example, 500 μm or less, and to allow a minute amount of liquid on the order of nanoliters or even picoliters to flow out accurately with an inexpensive configuration. It is an object to provide an outflow method and a trace liquid dispenser.

In order to solve the above-mentioned problem, the present invention is a trace liquid outflow method for flowing out a trace liquid of nanoliter order to picoliter order from the tip end of a cylindrical nozzle,
A liquid passage for supplying a liquid from the liquid supply section to the nozzle is formed of an upstream passage portion, an intermediate passage portion, and a downstream passage portion, and the intermediate passage portion can be expanded and contracted so that its internal volume increases or decreases. A passage part,
When the intermediate passage portion is deformed so that the internal volume of the intermediate passage portion decreases in a liquid-filled state in which the liquid is filled from the liquid passage to the tip end of the nozzle, the intermediate passage portion The ratio of the amount of liquid and the amount of liquid pushed back to the upstream-side passage portion is set to 1: 100 to be such that the amount of liquid pushed out to the downstream-side passage portion becomes a minute amount of nanoliter order to picoliter order. Set to 1: 500,
In the outflow operation of trace liquid,
Forming the liquid filling state,
Deforming the intermediate passage portion so that its internal volume decreases;
A minute amount of liquid pushed out from the intermediate passage portion to the downstream passage portion causes a minute amount of liquid to flow out from the tip end of the nozzle,
The deformation of the intermediate passage portion is released, the inner volume of the intermediate passage portion is returned to the original volume, and a minute amount of liquid is sucked back into the intermediate passage portion from the downstream passage portion, and the upstream passage portion The liquid is sucked into the intermediate passage portion.

  In order to discharge a minute amount of liquid in the order of nanoliters or picoliters, a nozzle having a minute diameter is also used. From the liquid supply source, the liquid is supplied to the nozzle through the liquid passage in a predetermined pressure state. When the nozzle diameter is small, the liquid passage resistance in the nozzle is large, and the liquid cannot be dropped or discharged from the nozzle opening unless the liquid supply pressure is increased. When the supply pressure of the liquid is increased, a large amount of liquid is dripped or discharged at a time from the nozzle opening, and the liquid dropping state or discharging state becomes unstable. For this reason, it is difficult to allow a minute amount of liquid to flow out to the surface of the member with high accuracy. In particular, in the case of a high-viscosity liquid material such as a high-viscosity resin liquid or a high-viscosity metal paste, it is extremely difficult to cause a minute amount of liquid to flow out with high accuracy.

  In the present invention, after supplying and filling the liquid to the tip opening in the nozzle through the liquid passage, the intermediate passage portion in the middle of the liquid passage is pressurized from the outside, and the inner volume is reduced in the direction of decreasing. For example, contract. As a result, the liquid held in the intermediate passage portion is pushed out to the downstream passage portion on the downstream side of the intermediate passage portion and pushed back to the upstream passage portion on the upstream side.

  Here, if the upstream side of the intermediate passage part is blocked by an on-off valve or the like, and the intermediate passage part is pressurized and contracted from the outside and the liquid is pushed out to the nozzle side in this state, a large pressure directly acts on the nozzle side. . In this case, a large amount of liquid is discharged or dripped from the tip end of the nozzle at once. In order to control the liquid pressure acting on the nozzle tip to an appropriate value, it is extremely difficult to finely adjust the deformation amount, for example, the contraction amount, of the intermediate passage portion.

  In the present invention, when the intermediate passage portion is deformed, a liquid flow toward both the downstream side (nozzle side) and the upstream side is formed. By appropriately setting the ratio of the downstream and upstream liquid passage resistances, an appropriate liquid pressure can be generated at the tip end of the nozzle by always contracting the intermediate passage portion by a certain amount. Thereby, a trace amount liquid can be flowed out (dropping, discharging, etc.) with high accuracy by simple control.

  In particular, in the present invention, when the intermediate passage portion is deformed, the amount of liquid pushed out from the intermediate passage portion to the downstream passage portion becomes a minute amount from the nanoliter order to the picoliter order. The ratio between the amount and the amount of liquid pushed back to the upstream passage portion is set to 1: 100 to 1: 500. In other words, the ratio of the liquid passage resistance on the downstream side and the upstream side of the intermediate passage portion determines the liquid discharge range (whether it is 1/100 or 1/500), and the liquid discharge amount is intermediate. It is determined by the volume change of the passage part.

  Accordingly, a very small amount of the liquid pushed out from the intermediate passage portion in response to the amount of decrease in the internal volume of the intermediate passage portion is pushed out to the downstream passage portion, and a trace amount liquid corresponding to this is liquid. It flows out from the tip. When an amount of liquid corresponding to the change in the internal volume is caused to flow out from the tip end of the nozzle, it is necessary to extrude a trace amount liquid in the nanoliter order or picoliter order by minutely changing the internal volume. According to the present invention, the intermediate passage portion may be deformed so that the liquid in the microliter order is pushed out. Further, since the liquid pushed out to the downstream side (nozzle side) is a minute amount, the pressure in the nozzle is temporarily significantly increased, and there is no possibility that a large amount of liquid flows out from the tip end of the nozzle. Therefore, the intermediate passage portion and the mechanism for deforming this portion can be constructed at low cost, and a trace amount of liquid can be accurately discharged from the tip end of the nozzle under an appropriate pressure.

  Here, when the deformation of the intermediate passage portion is released and the inner volume of the intermediate passage portion is returned to the original volume, the amount of liquid sucked back into the intermediate passage portion from the downstream passage portion and the upstream side The ratio of the amount of liquid sucked into the intermediate passage portion from the passage portion is also 1: 100 to 1: 500.

  Accordingly, when the deformation of the intermediate passage portion is released and the inner volume is restored, the amount of liquid flowing backward from the nozzle side to the intermediate passage portion side can be suppressed to a minute amount. As a result, the meniscus formed at the tip end of the nozzle is maintained in an appropriate state without being destroyed. As a result, it is possible to appropriately perform the next outflow operation of the trace liquid.

  Therefore, according to the present invention, the deformation of the intermediate passage portion and the release of the deformation can be repeated at a predetermined cycle, so that the outflow of the minute liquid from the tip end of the nozzle can be performed with high accuracy.

  In the present invention, the flow rate adjusting valve arranged in the upstream passage portion is controlled to increase or decrease the liquid flow path resistance of the upstream passage portion, so that the amount of liquid pushed out from the intermediate passage portion to the downstream passage portion, The ratio of the amount of liquid pushed back from the passage portion to the upstream passage portion can be adjusted. Further, the ratio between the amount of liquid sucked back from the downstream passage portion into the intermediate passage portion and the amount of liquid sucked into the intermediate passage portion from the upstream passage portion can be adjusted.

  In the present invention, it is desirable that the nozzle and at least the downstream passage portion of the downstream passage portion and the upstream passage portion be a passage portion whose internal volume does not change even when the pressure of the liquid flowing inside changes. . As a result, the internal volume of the downstream passage portion and the nozzle does not change due to the internal pressure fluctuation of the intermediate passage portion. Can be discharged.

  In the present invention, a sealed outer peripheral space surrounding the outer periphery of the intermediate passage portion is formed, and by changing the internal pressure of the sealed outer peripheral space, the intermediate passage portion is centered on its central axis so that its inner volume is reduced. As described above, it is desirable to deform into an axially symmetric state and cancel the deformation. Compared with the case of deforming to an axially asymmetric state, the expansion and contraction control of the intermediate passage portion can be easily managed by deforming to the axially symmetric state, and therefore, the liquid pushed out to the nozzle side can be controlled. The amount can be managed accurately.

  For example, the sealed outer peripheral space can be pressurized to contract the intermediate passage portion to push out the liquid, and the pressure can be released to return the intermediate passage portion to its original shape and suck the liquid. Further, the liquid may be sucked in the state where the sealed outer peripheral space is decompressed and the intermediate passage portion is expanded, and the liquid may be released by releasing the decompression and expansion. In order to increase the amount of liquid to be pushed out and sucked, pressurize the sealed outer peripheral space to shrink the intermediate passage portion to push out the liquid, decompress the sealed outer peripheral space to expand the intermediate passage portion and suck in the liquid. do it.

  According to the present inventors, it is possible to accurately drop, discharge, etc., a minute amount liquid of nanoliter order to picoliter order from a nozzle having a fine diameter of 500 μm or less, for example, 100 μm or less, which was impossible in the past. confirmed.

  In addition, even when a high-viscosity liquid material having a viscosity of 1 Pa · s to 100 Pa · s was used as the liquid, it was confirmed that a minute amount of liquid of nanoliter order to picoliter order could be accurately dropped and discharged.

In the present invention, by controlling the contraction amount and contraction speed of the intermediate passage portion based on the following parameters, it is possible to flow out a small amount of liquid of nanoliter order to picoliter order with high accuracy.
Amount of trace amount of liquid that flows out from the tip end of the nozzle at once The inner diameter dimension of the tip end of the nozzle Viscosity of liquid The ratio of the liquid passage resistance on the upstream side and the liquid passage resistance on the downstream side of the intermediate passage portion

Next, the present invention is a minute amount liquid dispenser for discharging a minute amount liquid of nanoliter order to picoliter order from the tip end of a cylindrical nozzle,
A liquid passage comprising an upstream passage portion, an intermediate passage portion, and a downstream passage portion, wherein the intermediate passage portion is a passage portion that can be expanded and contracted so that the internal volume increases and decreases;
A liquid supply section for supplying a liquid to the nozzle through the liquid passage;
A passage deforming portion that deforms the intermediate passage portion so that the internal volume of the intermediate passage portion increases or decreases;
A control unit;
Have
When the intermediate passage portion is deformed so that the internal volume of the intermediate passage portion is reduced in a liquid-filled state in which the liquid is filled from the liquid passage to the tip end of the nozzle, the intermediate passage portion is further downstream than the intermediate passage portion. The ratio between the liquid amount and the liquid amount pushed back to the upstream passage portion is 1: 100 to 1: 1, so that the liquid amount pushed out to the side passage portion becomes a minute amount of nanoliter order to picoliter order. Is set to 500,
The controller is
A control operation for controlling the liquid supply unit to supply liquid to the nozzle via the liquid passage to form the liquid filling state;
By controlling the passage deforming portion to deform the intermediate passage portion so as to reduce the internal volume, the minute amount of liquid pushed out from the intermediate passage portion to the downstream passage portion causes the tip portion of the nozzle to A trace liquid outflow operation that causes a trace liquid to flow out,
By controlling the passage deforming portion, the deformation of the intermediate passage portion is released, the inner volume of the intermediate passage portion is returned to the original volume, and a minute amount of liquid is transferred from the downstream passage portion into the intermediate passage portion. It is characterized by performing a returning operation of sucking back and sucking the liquid from the upstream passage portion into the intermediate passage portion.

1 is an overall configuration diagram of a trace liquid dispenser to which the present invention is applied. It is a flowchart and explanatory drawing which show operation | movement of the trace liquid dispenser of FIG. It is explanatory drawing which shows the modification of the trace liquid dispenser of FIG.

  Embodiments of a trace liquid dispenser to which the present invention is applied will be described below with reference to the drawings.

  FIG. 1 is an overall configuration diagram of a trace liquid dispenser according to the present embodiment. The trace liquid dispenser 1 includes a work table 2 and a nozzle 4 that drops a trace liquid on a predetermined portion such as the surface of the work 3 placed on the work table 2. The work table 2 can be moved on a horizontal plane and in a vertical direction by, for example, a three-axis mechanism 5. It is also possible to fix the work table 2 and move the nozzle 4 side in the triaxial direction.

  The nozzle 4 is an elongated cylindrical nozzle maintained vertically in this example, and a liquid passage 6 having an inner diameter larger than the inner diameter of the nozzle is connected to the nozzle 4. The liquid passage 6 is connected to the liquid storage unit 8 via the pump 7, and the liquid supply unit is configured by the pump 7 and the liquid storage unit 8. As the pump 7, for example, a positive displacement type such as a Mono pump can be used. For example, a viscous liquid 9 is stored in the liquid storage unit 8.

  The liquid passage 6 is formed of an upstream passage portion 6 </ b> A connected to the pump 7, an intermediate passage portion 10, and a downstream passage portion 6 </ b> B connected to the nozzle 4. The nozzle 4 has a cylindrical shape made of a rigid body such as metal, and the downstream-side passage portion 6B is also a cylindrical shape made of a rigid body such as metal, and the inner diameter thereof is larger than the inner diameter of the nozzle, and the viscosity flows inside. The internal volume is not changed by the pressure fluctuation of the liquid. In this example, the upstream passage portion 6A is also formed of a rigid tube. It is also possible to form the upstream passage portion 6A from a flexible tube.

  The intermediate passage portion 10 is a capacity variable passage portion. Therefore, in the following description, the intermediate passage portion 10 is referred to as a capacity variable passage portion 10. The capacity variable passage portion 10 includes a cylindrical passage 11, and both ends of the cylindrical passage 11 are formed by rigid end plates 11a and 11b. The cylindrical body portion 11c has an elastic membrane that is elastically deformable in the radial direction. Formed from. The inner diameter of the cylindrical body portion 11c is larger than that of the downstream passage portion 6B and the upstream passage portion 6A.

  A pressure chamber 12, which is a sealed outer peripheral space having an annular cross section, is formed in a state of concentrically surrounding the cylindrical body portion 11 c of the cylindrical passage 11. The pressure chamber 12 is connected to the pressurizing mechanism 13, and the internal pressure of the pressure chamber 12 can be increased by the pressurizing mechanism 13. When the pressure chamber 12 is pressurized, the cylindrical body portion 11c of the cylindrical passage 11 contracts in an axially symmetric state in the radial direction, and the internal volume of the cylindrical passage 11 decreases. When the pressurization by the pressurization mechanism 13 is released, the cylindrical body 11c is elastically restored to the original cylindrical shape, and the internal volume can be restored. As described above, the pressure chamber 12 and the pressurizing mechanism 13 constitute a passage deforming portion for flexing the cylindrical passage 11 in an axially symmetric state to increase or decrease its internal volume.

  As the passage deforming portion, a pressure reducing mechanism that makes the pressure chamber 12 in a reduced pressure state can be used instead of the pressure mechanism 13. In this case, the viscous liquid 9 is taken into the cylindrical passage 11 in a state where the internal volume of the cylindrical passage 11 is increased under reduced pressure, and the internal volume of the cylindrical passage 11 is reduced and released by releasing the reduced pressure state. The viscous liquid 9 can be extruded. A pressurizing / depressurizing mechanism may be used instead of the pressurizing mechanism 13. In this case, the viscous liquid 9 is taken into the cylindrical passage 11 in a reduced pressure state and the internal volume of the cylindrical passage 11 is increased, and is switched to a pressurized state to reduce the internal volume of the cylindrical passage 11 to reduce the viscous liquid 9. Extrude The extrusion amount of the viscous liquid 9 by increasing / decreasing the internal volume of the cylindrical passage 11 can be increased.

  Driving of each part such as the liquid supply pump 7, the pressurizing mechanism 13, and the triaxial mechanism 5 is controlled by the control unit 14. The control operation by the control unit 14 is performed based on an operation input from the operation / display unit 15, and an operation state or the like can be displayed on the operation / display unit 15.

Here, the nozzle 4 is a nozzle having a minute diameter, and the inner diameter of the tip end 4a is 500 μm or less,
For example, an elongated cylindrical nozzle of 100 μm. Further, the upstream passage portion 6 </ b> A on the upstream side of the capacity variable passage portion 10 in the liquid passage 6 is a passage portion from the discharge port 7 a of the pump 7 to the upstream end opening 10 a of the capacity variable passage portion 10. A downstream passage portion 6 </ b> B downstream of the variable volume passage portion 10 in the liquid passage 6 is a passage portion from the rear end port of the nozzle 4 to the downstream end opening 10 b of the variable volume passage portion 10. Since the nozzle 4 is a minute diameter nozzle, the downstream side liquid passage resistance including the downstream side passage portion 6B and the nozzle 4 is extremely larger than the liquid passage resistance of the upstream side passage portion 6A.

  In this example, when the capacity variable passage portion 10 is contracted so that the internal volume decreases in a liquid filling state in which the viscous liquid 9 is filled up to the liquid passage 6 and the tip end 4a of the nozzle 4, the capacity is changed. The ratio of the liquid amount and the liquid amount pushed back to the upstream side passage portion 6A is such that the amount of liquid pushed out from the passage portion 10 to the downstream side passage portion 6B becomes a minute amount of nanoliter order to picoliter order, The value is set within the range of 1: 100 to 1: 500. In other words, the downstream side liquid passage resistance including the downstream side passage portion 6B and the nozzle 4 is set to be extremely large as compared with the liquid passage resistance on the upstream side passage portion 6A side so as to have such a ratio. Has been.

  FIG. 2A is a schematic flowchart showing the operation of the trace liquid dispenser 1, and FIGS. 2B and 2C are explanatory views showing the movement of the capacity variable passage portion 10.

  2A, the target work 3 is first placed on the work base 2, and the tip 4a of the nozzle 4 is opposed to the position where the trace liquid is dropped from the work 3 with a certain gap from above. An initial setting operation is performed (step ST1). Further, the pump 7 is driven to form a state in which the liquid is supplied from the liquid reservoir 8 through the liquid passage 6 to the tip opening 4a in the nozzle 4 (step ST2).

  In the dropping operation of the trace amount liquid on the workpiece 3, the liquid supply pump 7 is stopped, for example, and the pressurizing mechanism 13 is driven to increase the internal pressure of the pressure chamber 12 to a preset pressure. Thereby, the capacity variable passage portion 10 is pressurized from the outside, and the cylindrical body portion 11c contracts. As a result, as shown in FIG. 2B, the internal volume of the capacity variable passage portion 10 decreases (step ST3).

  When the capacity variable passage portion 10 contracts, the liquid held therein is pushed out from each of the downstream end opening 10b and the upstream end opening 10a, and is divided into the downstream side and the upstream side. The partial flow rate of the viscous liquid 9 pushed out downstream is determined according to the ratio between the downstream liquid passage resistance including the downstream passage portion 6B and the nozzle 4 and the liquid passage resistance on the upstream passage portion 6A side.

  Since the downstream liquid passage resistance is significantly large, a small amount of liquid is pushed downstream. The internal pressure of the downstream-side passage portion 6B is temporarily increased by the trace liquid pushed out downstream, whereby a predetermined amount of trace liquid drops from the tip end 4a of the nozzle 4 toward the workpiece 3.

  Thereafter, the pressurization by the pressurization mechanism 13 is released, and the pressure chamber 12 is returned to, for example, an atmospheric pressure state (step ST4). As a result, as shown in FIG. 2 (c), the cylindrical body portion 11c of the capacity variable passage portion 10 expands outward in the radial direction and elastically returns to the original cylindrical shape. Thereby, the liquid is sucked into the capacity variable passage portion 10 from both the upstream passage portion 6A and the downstream passage portion 6B.

The amount of inflow of the liquid also corresponds to the ratio of the upstream and downstream liquid passage resistances. Therefore, only a slight amount of liquid is drawn back upstream from the downstream passage portion 6B on the nozzle 4 side. Therefore, the tip 4a of the nozzle 4 is pulled up into the nozzle 4 to the extent that the liquid meniscus is not destroyed. In addition, it is possible to reliably prevent problems such as liquid dripping from the tip opening 4a after the trace amount of liquid is dropped.

  When a small amount of liquid is dropped at a predetermined interval over a predetermined length, the liquid is dropped as many times as necessary, and then the operation is terminated (step ST5).

  According to the experiments by the present inventors, a nozzle 4 having a tip 4a of 25 μm to 100 μm is used, and a high viscosity liquid of 50 Pa · s to 100 Pa · s is applied to several tens of picoliters to several nanoliters. It was confirmed that the dropping or discharging operation can be performed with a small amount and with high accuracy.

Here, one or both of the contraction amount and the contraction speed of the capacity variable passage portion 10 can be appropriately set based on the following parameters.
The amount of liquid to be discharged or dripped from the front end 4a of the nozzle 4 at once The inner diameter dimension of the front end 4a of the nozzle 4 The viscosity of the liquid The liquid passage resistance on the upstream passage portion 6A side, the downstream passage portion 6B and the nozzle 4 are included. Ratio with downstream liquid passage resistance

  Since the used nozzle, the used liquid, the amount of liquid dropped once, etc. are set in advance, the control unit 14 may perform drive control of each unit in accordance with these. The ratio of the upstream passage portion 6A and the downstream passage portion 6B can be variably controlled.

  For example, as shown in FIG. 3, a flow rate adjusting valve 16 is attached to the upstream side passage portion 6 </ b> A and can be controlled by the control unit 14. Prior to the dripping operation of the small amount of liquid onto the workpiece 3, the flow rate is adjusted to obtain a ratio between the liquid passage resistance of the upstream passage portion 6A and the downstream liquid passage resistance including the downstream passage portion 6B and the nozzle 4. It is possible to adjust.

In addition, the method and dispenser of this invention can be used for the outflow (dropping, discharge, etc.) of various liquid materials. For example, the following liquid material can be used.
Metal paste (Ag, Cu, solder, etc.)
Resin liquid material (silicone adhesive, UV curable resin, photo resist, UV curable adhesive, other various resin liquids)
Filled liquid material (filler: fluorescent particles, silica particles, frit / glass, titanium oxide, various nano-micro particles, etc.)

In addition, there are the following fields as application technical fields of the present invention.
Application to optical component manufacturing (shading material application, aperture formation, application of various liquid materials to the lens surface)
A very small amount of adhesive dripping onto electronic components (LED, crystal oscillator, MEMS, power device, etc.)
FPD, glass bonding of imaging sensors Wiring with Ag nanopaste (auxiliary wiring to ITO, wiring formation to minute areas, etc.)

DESCRIPTION OF SYMBOLS 1 Trace liquid dispenser 2 Work stand 3 Work 4 Nozzle 4a Tip port 5 Triaxial mechanism 6 Liquid passage 6A Upstream passage part 6B Downstream passage part 7 Pump 7a Discharge port 8 Liquid storage part 9 Viscous liquid 10 Capacity variable passage part 10a Upstream End opening 10b Downstream end opening 11 Cylindrical passages 11a, 11b End plate 11c Cylindrical body 12 Pressure chamber 13 Pressurizing mechanism 14 Control unit 15 Operation / display unit 16 Flow rate adjusting valve

The present invention is, for example 0.5mm using the following small diameter of the nozzle, nanoliter order, more about the micro-liquid dropping method and a trace liquid dispenser capable dripping of microfluidic picoliter order.

  A pneumatic liquid dispenser is known as a mechanism for dropping or discharging liquid on the substrate surface or the like. In a liquid dispenser, a liquid is pressurized using a pressurizer such as a pump, and the liquid is dropped or ejected from a nozzle having a predetermined diameter to apply the liquid onto the surface of a target substrate. Patent Documents 1 to 3 describe such a liquid dispenser.

  Further, fine patterning in a semiconductor manufacturing process or the like is difficult with a pneumatic liquid dispenser, and an electrostatic discharge liquid discharge head or the like is used. Such a liquid discharge head has been proposed in Patent Document 4 by the present inventors.

  On the other hand, Patent Document 5 proposes a micrometering device for metering and dispensing a liquid. The micrometering device proposed here includes a flexible tube with a constant inner diameter to which liquid is supplied from a fluid container, and the flexible tube is crushed by an extruder driven by a piezoelectric actuator and formed at one end of the flexible tube. A small amount of liquid is discharged from the outlet hole.

The volume change caused by the high speed movement of the extruder causes a fluid flow on the one hand towards the outlet hole of the flexible tube and on the other hand a back flow through the inlet channel to the fluid container. In addition, the extruder is positioned near the outlet hole, and the fluid impedance on the outlet hole side is lower than the fluid impedance on the inlet path side on the upstream side than the portion pushed by the extruder in the flexible tube. Most of the fluid to be discharged is discharged from the outlet hole. Furthermore, the pressing surface of the flexible tube by the extruder is an inclined surface set back toward the outlet hole side, and when the flexible tube is pressed by the pressing device, a lot of fluid is pushed out toward the outlet side. In other words, the flexible tube is deformed so as to be in an axially asymmetric state in order to determine the discharge amount by the ratio of the pipe resistance and to discharge the fluid vigorously from the outlet hole.

Japanese Patent Laid-Open No. 10-57866 Japanese Patent No. 3564361 JP 2005-797 A JP 2010-64359 A Special table 2007-502399 gazette

  In the case of an electrostatic discharge type liquid discharge head, an electrostatic force generated between the head and a target substrate is used. Therefore, there is a restriction that the material to be ejected is limited to a non-conductive material (a material having high dielectric properties or dielectric properties). Although it is possible to use a liquid discharge head of another drive type such as a piezo drive type, it is difficult to discharge or drop a highly viscous liquid. For example, it is difficult to discharge and drop a high-viscosity resin liquid material such as a UV curable resin or a high-viscosity metal paste such as an Ag paste in the nanoliter order or picoliter order.

  Therefore, it is conceivable to set the nozzle diameter of a pneumatic dispenser or the like to a minute diameter of 500 μm or less, for example, 100 μm or less, so that a fine droplet can be discharged or can be dropped. However, it is difficult to discharge liquid from such a small diameter nozzle at a constant minute flow rate. For example, since the pipe resistance of a thin nozzle is large, it is difficult to discharge or drop liquid from the nozzle even if the pressure of the liquid supplied to the nozzle is increased.

  Further, when the pressure of the liquid is increased, a large amount of liquid is discharged or dripped from the nozzle at a time, and thereafter, the liquid pressure in the nozzle is temporarily lowered, so that the discharge or dripping of the liquid becomes unstable. This is repeated, and a minute amount of liquid in nanoliter order or picoliter order cannot be discharged or dropped intermittently.

  On the other hand, in the micrometering device proposed in Patent Document 5, a part of a microdiameter flexible tube is deformed in an axially asymmetric state so that fluid is pushed out to the outlet hole side by an extruder driven by a piezoelectric actuator. Will be crushed. By crushing the flexible tube in an axially asymmetric state, most of the liquid is pushed out toward the outlet hole (toward the downstream side) and is ejected vigorously from the outlet hole.

  In order to control the ejected droplets to a minute amount on the order of nanoliters or picoliters, it is necessary to reduce the amount of crushing of the flexible tube. Must be controlled with high accuracy. Moreover, since it is necessary to crush the flexible tube in an axially asymmetric state so that the fluid is pushed out toward the outlet side, the shape of the pressing surface of the extruder must be processed with high accuracy.

However, the mechanism that crushes a part of a small diameter flexible tube precisely by a minute amount and pushes out micro liquid of nano liter order or pico liter order is the same as that of electrostatic drive and piezo drive ink jet heads. It cannot be manufactured using a lithography technique or the like. Therefore, it is expensive to manufacture a micro mechanism with high accuracy and is not practical.

  In addition, an outlet hole for discharging droplets is formed at the tip of the flexible tube. For this reason, if the tube portion between the portion crushed by the extruder and the outlet hole is deformed, the amount of liquid droplets discharged from the outlet hole may vary. For example, if the internal pressure of the flexible tube fluctuates due to being pushed by the extruder, the tube portion near the outlet hole is deformed accordingly, and the amount of discharged liquid droplets changes, and there is a possibility that a small amount of liquid droplets cannot be discharged accurately. There is.

In view of these points, the problem of the present invention is that a trace amount of liquid that can be accurately dropped with a low-cost configuration by using a microliter nozzle having a micro diameter of 500 μm or less, such as a nanoliter order or picoliter order. It is in providing the dripping method of this, and a trace liquid dispenser.

In order to solve the above problems, the present invention is a method for dropping a trace amount liquid from a tip end of a cylindrical nozzle to drop a trace amount liquid in a nanoliter order to a picoliter order,
A liquid passage for supplying a liquid from the liquid supply section to the nozzle is formed of an upstream passage portion, an intermediate passage portion, and a downstream passage portion, and the intermediate passage portion can be expanded and contracted so that its internal volume increases or decreases. A passage part,
When the intermediate passage portion is deformed so that the internal volume of the intermediate passage portion decreases in a liquid-filled state in which the liquid is filled from the liquid passage to the tip end of the nozzle, the intermediate passage portion The ratio of the amount of liquid and the amount of liquid pushed back to the upstream-side passage portion is set to 1: 100 to be such that the amount of liquid pushed out to the downstream-side passage portion becomes a minute amount of nanoliter order to picoliter order. Set to 1: 500,
In the dripping operation of a small amount of liquid,
Forming the liquid filling state,
Deforming the intermediate passage portion so that its internal volume decreases;
With a minute amount of liquid pushed out from the intermediate passage portion to the downstream passage portion, a minute amount of liquid is dropped from the tip end of the nozzle ,
The deformation of the intermediate passage portion is released and the inner volume of the intermediate passage portion is returned to the original volume so that the liquid meniscus formed at the tip end of the nozzle is not destroyed from the downstream passage portion. A minute amount of liquid is sucked back into the intermediate passage portion, and liquid is sucked into the intermediate passage portion from the upstream passage portion.

In order to drop a small amount of liquid in the order of nanoliters or picoliters , a nozzle having a minute diameter is also used. From the liquid supply source, the liquid is supplied to the nozzle through the liquid passage in a predetermined pressure state. When the nozzle diameter is small, the liquid passage resistance in the nozzle is large, and the liquid cannot be dropped or discharged from the nozzle opening unless the liquid supply pressure is increased. When the supply pressure of the liquid is increased, a large amount of liquid is dripped or discharged at a time from the nozzle opening, and the liquid dropping state or discharging state becomes unstable. For this reason, it is difficult to drop a minute amount of liquid on the surface of the member with high accuracy. In particular, in the case of a high-viscosity liquid material such as a high-viscosity resin liquid or a high-viscosity metal paste, it is extremely difficult to accurately drop a trace amount of liquid.

  In the present invention, after supplying and filling the liquid to the tip opening in the nozzle through the liquid passage, the intermediate passage portion in the middle of the liquid passage is pressurized from the outside, and the inner volume is reduced in the direction of decreasing. For example, contract. As a result, the liquid held in the intermediate passage portion is pushed out to the downstream passage portion on the downstream side of the intermediate passage portion and pushed back to the upstream passage portion on the upstream side.

  Here, if the upstream side of the intermediate passage part is blocked by an on-off valve or the like, and the intermediate passage part is pressurized and contracted from the outside and the liquid is pushed out to the nozzle side in this state, a large pressure directly acts on the nozzle side. . In this case, a large amount of liquid is discharged or dripped from the tip end of the nozzle at once. In order to control the liquid pressure acting on the nozzle tip to an appropriate value, it is extremely difficult to finely adjust the deformation amount, for example, the contraction amount, of the intermediate passage portion.

  In the present invention, when the intermediate passage portion is deformed, a liquid flow toward both the downstream side (nozzle side) and the upstream side is formed. By appropriately setting the ratio of the downstream and upstream liquid passage resistances, an appropriate liquid pressure can be generated at the tip end of the nozzle by always contracting the intermediate passage portion by a certain amount. Thereby, a trace amount liquid can be dripped with a sufficient precision by simple control.

  In particular, in the present invention, when the intermediate passage portion is deformed, the amount of liquid pushed out from the intermediate passage portion to the downstream passage portion becomes a minute amount from the nanoliter order to the picoliter order. The ratio between the amount and the amount of liquid pushed back to the upstream passage portion is set to 1: 100 to 1: 500. In other words, the ratio of the liquid passage resistance on the downstream side and the upstream side of the intermediate passage portion determines the liquid discharge range (whether it is 1/100 or 1/500), and the liquid discharge amount is intermediate. It is determined by the volume change of the passage part.

Accordingly, a very small amount of the liquid pushed out from the intermediate passage portion in response to the amount of decrease in the internal volume of the intermediate passage portion is pushed out to the downstream passage portion, and a trace amount liquid corresponding to this is liquid. dripping from the tip opening. When dripping an amount of liquid corresponding to the change in the internal volume from the tip end of the nozzle, it is necessary to extrude a minute amount of liquid in the nanoliter order or picoliter order by minutely changing the internal volume. According to the present invention, the intermediate passage portion may be deformed so that the liquid in the microliter order is pushed out. Further, since the liquid pushed out to the downstream side (nozzle side) is a minute amount, the pressure in the nozzle is temporarily greatly increased, and there is no possibility that a large amount of liquid is dripped from the tip end of the nozzle. Therefore, the intermediate passage portion and the mechanism for deforming this portion can be configured at low cost, and a minute amount of liquid can be accurately dropped from the tip end of the nozzle under an appropriate pressure.

  Here, when the deformation of the intermediate passage portion is released and the inner volume of the intermediate passage portion is returned to the original volume, the amount of liquid sucked back into the intermediate passage portion from the downstream passage portion and the upstream side The ratio of the amount of liquid sucked into the intermediate passage portion from the passage portion is also 1: 100 to 1: 500.

Accordingly, when the deformation of the intermediate passage portion is released and the inner volume is restored, the amount of liquid flowing backward from the nozzle side to the intermediate passage portion side can be suppressed to a minute amount. As a result, the meniscus formed at the tip end of the nozzle is maintained in an appropriate state without being destroyed. Thereby, it becomes possible to appropriately perform the next dropping operation of the trace liquid.

Therefore, according to the present invention, the intermediate passage portion can be repeatedly deformed and released at a predetermined cycle, and the minute liquid can be intermittently dropped from the tip end of the nozzle with high accuracy.

  In the present invention, the flow rate adjusting valve arranged in the upstream passage portion is controlled to increase or decrease the liquid flow path resistance of the upstream passage portion, so that the amount of liquid pushed out from the intermediate passage portion to the downstream passage portion, The ratio of the amount of liquid pushed back from the passage portion to the upstream passage portion can be adjusted. Further, the ratio between the amount of liquid sucked back from the downstream passage portion into the intermediate passage portion and the amount of liquid sucked into the intermediate passage portion from the upstream passage portion can be adjusted.

  In the present invention, it is desirable that the nozzle and at least the downstream passage portion of the downstream passage portion and the upstream passage portion be a passage portion whose internal volume does not change even when the pressure of the liquid flowing inside changes. . As a result, the internal volume of the downstream passage portion and the nozzle does not change due to the internal pressure fluctuation of the intermediate passage portion, so that a small amount of liquid corresponding to the minute amount of liquid pushed out from the intermediate passage portion can be surely received from the nozzle tip. Can be discharged.

  In the present invention, a sealed outer peripheral space surrounding the outer periphery of the intermediate passage portion is formed, and by changing the internal pressure of the sealed outer peripheral space, the intermediate passage portion is centered on its central axis so that its inner volume is reduced. As described above, it is desirable to deform into an axially symmetric state and cancel the deformation. Compared with the case of deforming to an axially asymmetric state, the expansion and contraction control of the intermediate passage portion can be easily managed by deforming to the axially symmetric state, and therefore, the liquid pushed out to the nozzle side can be controlled. The amount can be managed accurately.

  For example, the sealed outer peripheral space can be pressurized to contract the intermediate passage portion to push out the liquid, and the pressure can be released to return the intermediate passage portion to its original shape and suck the liquid. Further, the liquid may be sucked in the state where the sealed outer peripheral space is decompressed and the intermediate passage portion is expanded, and the liquid may be released by releasing the decompression and expansion. In order to increase the amount of liquid to be pushed out and sucked, pressurize the sealed outer peripheral space to shrink the intermediate passage portion to push out the liquid, decompress the sealed outer peripheral space to expand the intermediate passage portion and suck in the liquid. do it.

  According to the present inventors, it is possible to accurately drop, discharge, etc., a minute amount liquid of nanoliter order to picoliter order from a nozzle having a fine diameter of 500 μm or less, for example, 100 μm or less, which was impossible in the past. confirmed.

  In addition, even when a high-viscosity liquid material having a viscosity of 1 Pa · s to 100 Pa · s was used as the liquid, it was confirmed that a minute amount of liquid of nanoliter order to picoliter order could be accurately dropped and discharged.

In the present invention, by controlling the contraction amount and contraction speed of the intermediate passage portion based on the following parameters, it is possible to accurately drop a trace amount liquid of nanoliter order to picoliter order.
Trace amount of liquid dripped from the nozzle tip at a time Inner diameter of the nozzle tip Viscosity of the liquid Ratio of the liquid passage resistance on the upstream side and the liquid passage resistance on the downstream side of the intermediate passage portion

Next, the present invention is a trace liquid dispenser for dropping a trace amount liquid of nanoliter order to picoliter order from the tip end of a cylindrical nozzle,
A liquid passage comprising an upstream passage portion, an intermediate passage portion, and a downstream passage portion, wherein the intermediate passage portion is a passage portion that can be expanded and contracted so that the internal volume increases and decreases;
A liquid supply section for supplying a liquid to the nozzle through the liquid passage;
A passage deforming portion that deforms the intermediate passage portion so that the internal volume of the intermediate passage portion increases or decreases;
A control unit;
Have
When the intermediate passage portion is deformed so that the internal volume of the intermediate passage portion is reduced in a liquid-filled state in which the liquid is filled from the liquid passage to the tip end of the nozzle, the intermediate passage portion is further downstream than the intermediate passage portion. The ratio between the liquid amount and the liquid amount pushed back to the upstream passage portion is 1: 100 to 1: 1, so that the liquid amount pushed out to the side passage portion becomes a minute amount of nanoliter order to picoliter order. Is set to 500,
The controller is
A control operation for controlling the liquid supply unit to supply liquid to the nozzle via the liquid passage to form the liquid filling state;
By controlling the passage deforming portion to deform the intermediate passage portion so as to reduce the internal volume, the minute amount of liquid pushed out from the intermediate passage portion to the downstream passage portion causes the tip portion of the nozzle to A micro liquid dropping operation for dropping a micro liquid,
The intermediate passage portion is deformed by controlling the passage deforming portion to return the inner volume of the intermediate passage portion to its original volume, and is formed from the downstream passage portion to the tip end of the nozzle. A small amount of liquid is sucked back into the intermediate passage portion to such an extent that the liquid meniscus is not destroyed , and a returning operation is performed in which the liquid is sucked into the intermediate passage portion from the upstream side passage portion.

1 is an overall configuration diagram of a trace liquid dispenser to which the present invention is applied. It is a flowchart and explanatory drawing which show operation | movement of the trace liquid dispenser of FIG. It is explanatory drawing which shows the modification of the trace liquid dispenser of FIG.

  Embodiments of a trace liquid dispenser to which the present invention is applied will be described below with reference to the drawings.

  FIG. 1 is an overall configuration diagram of a trace liquid dispenser according to the present embodiment. The trace liquid dispenser 1 includes a work table 2 and a nozzle 4 that drops a trace liquid on a predetermined portion such as the surface of the work 3 placed on the work table 2. The work table 2 can be moved on a horizontal plane and in a vertical direction by, for example, a three-axis mechanism 5. It is also possible to fix the work table 2 and move the nozzle 4 side in the triaxial direction.

  The nozzle 4 is an elongated cylindrical nozzle maintained vertically in this example, and a liquid passage 6 having an inner diameter larger than the inner diameter of the nozzle is connected to the nozzle 4. The liquid passage 6 is connected to the liquid storage unit 8 via the pump 7, and the liquid supply unit is configured by the pump 7 and the liquid storage unit 8. As the pump 7, for example, a positive displacement type such as a Mono pump can be used. For example, a viscous liquid 9 is stored in the liquid storage unit 8.

  The liquid passage 6 is formed of an upstream passage portion 6 </ b> A connected to the pump 7, an intermediate passage portion 10, and a downstream passage portion 6 </ b> B connected to the nozzle 4. The nozzle 4 has a cylindrical shape made of a rigid body such as metal, and the downstream-side passage portion 6B is also a cylindrical shape made of a rigid body such as metal, and the inner diameter thereof is larger than the inner diameter of the nozzle, and the viscosity flows inside. The internal volume is not changed by the pressure fluctuation of the liquid. In this example, the upstream passage portion 6A is also formed of a rigid tube. It is also possible to form the upstream passage portion 6A from a flexible tube.

  The intermediate passage portion 10 is a capacity variable passage portion. Therefore, in the following description, the intermediate passage portion 10 is referred to as a capacity variable passage portion 10. The capacity variable passage portion 10 includes a cylindrical passage 11, and both ends of the cylindrical passage 11 are formed by rigid end plates 11a and 11b. The cylindrical body portion 11c has an elastic membrane that is elastically deformable in the radial direction. Formed from. The inner diameter of the cylindrical body portion 11c is larger than that of the downstream passage portion 6B and the upstream passage portion 6A.

A pressure chamber 12, which is a sealed outer peripheral space having an annular cross section, is formed in a state of concentrically surrounding the cylindrical body portion 11 c of the cylindrical passage 11. The pressure chamber 12 is connected to the pressurizing mechanism 13, and the internal pressure of the pressure chamber 12 can be increased by the pressurizing mechanism 13. When the pressure chamber 12 is pressurized, the cylindrical body portion 11c of the cylindrical passage 11 contracts in an axially symmetric state in the radial direction, and the internal volume of the cylindrical passage 11 decreases. When the pressurization by the pressurization mechanism 13 is released, the cylindrical body 11c is elastically restored to the original cylindrical shape, and the internal volume can be restored. As described above, the pressure chamber 12 and the pressurizing mechanism 13 constitute a passage deforming portion for flexing the cylindrical passage 11 in an axially symmetric state to increase or decrease its internal volume.

  As the passage deforming portion, a pressure reducing mechanism that makes the pressure chamber 12 in a reduced pressure state can be used instead of the pressure mechanism 13. In this case, the viscous liquid 9 is taken into the cylindrical passage 11 in a state where the internal volume of the cylindrical passage 11 is increased under reduced pressure, and the internal volume of the cylindrical passage 11 is reduced and released by releasing the reduced pressure state. The viscous liquid 9 can be extruded. A pressurizing / depressurizing mechanism may be used instead of the pressurizing mechanism 13. In this case, the viscous liquid 9 is taken into the cylindrical passage 11 in a reduced pressure state and the internal volume of the cylindrical passage 11 is increased, and is switched to a pressurized state to reduce the internal volume of the cylindrical passage 11 to reduce the viscous liquid 9. Extrude The extrusion amount of the viscous liquid 9 by increasing / decreasing the internal volume of the cylindrical passage 11 can be increased.

  Driving of each part such as the liquid supply pump 7, the pressurizing mechanism 13, and the triaxial mechanism 5 is controlled by the control unit 14. The control operation by the control unit 14 is performed based on an operation input from the operation / display unit 15, and an operation state or the like can be displayed on the operation / display unit 15.

  Here, the nozzle 4 is a nozzle having a very small diameter, and is an elongated cylindrical nozzle having an inner diameter of the tip end 4a of 500 μm or less, for example, 100 μm. Further, the upstream passage portion 6 </ b> A on the upstream side of the capacity variable passage portion 10 in the liquid passage 6 is a passage portion from the discharge port 7 a of the pump 7 to the upstream end opening 10 a of the capacity variable passage portion 10. A downstream passage portion 6 </ b> B downstream of the variable volume passage portion 10 in the liquid passage 6 is a passage portion from the rear end port of the nozzle 4 to the downstream end opening 10 b of the variable volume passage portion 10. Since the nozzle 4 is a minute diameter nozzle, the downstream side liquid passage resistance including the downstream side passage portion 6B and the nozzle 4 is extremely larger than the liquid passage resistance of the upstream side passage portion 6A.

  In this example, when the capacity variable passage portion 10 is contracted so that the internal volume decreases in a liquid filling state in which the viscous liquid 9 is filled up to the liquid passage 6 and the tip end 4a of the nozzle 4, the capacity is changed. The ratio of the liquid amount and the liquid amount pushed back to the upstream side passage portion 6A is such that the amount of liquid pushed out from the passage portion 10 to the downstream side passage portion 6B becomes a minute amount of nanoliter order to picoliter order, The value is set within the range of 1: 100 to 1: 500. In other words, the downstream side liquid passage resistance including the downstream side passage portion 6B and the nozzle 4 is set to be extremely large as compared with the liquid passage resistance on the upstream side passage portion 6A side so as to have such a ratio. Has been.

  FIG. 2A is a schematic flowchart showing the operation of the trace liquid dispenser 1, and FIGS. 2B and 2C are explanatory views showing the movement of the capacity variable passage portion 10.

  2A, the target work 3 is first placed on the work base 2, and the tip 4a of the nozzle 4 is opposed to the position where the trace liquid is dropped from the work 3 with a certain gap from above. An initial setting operation is performed (step ST1). Further, the pump 7 is driven to form a state in which the liquid is supplied from the liquid reservoir 8 through the liquid passage 6 to the tip opening 4a in the nozzle 4 (step ST2).

In the dropping operation of the trace amount liquid on the workpiece 3, the liquid supply pump 7 is stopped, for example, and the pressurizing mechanism 13 is driven to increase the internal pressure of the pressure chamber 12 to a preset pressure. Thereby, the capacity variable passage portion 10 is pressurized from the outside, and the cylindrical body portion 11c contracts. As a result, as shown in FIG. 2B, the internal volume of the capacity variable passage portion 10 decreases (step ST3).

  When the capacity variable passage portion 10 contracts, the liquid held therein is pushed out from each of the downstream end opening 10b and the upstream end opening 10a, and is divided into the downstream side and the upstream side. The partial flow rate of the viscous liquid 9 pushed out downstream is determined according to the ratio between the downstream liquid passage resistance including the downstream passage portion 6B and the nozzle 4 and the liquid passage resistance on the upstream passage portion 6A side.

  Since the downstream liquid passage resistance is significantly large, a small amount of liquid is pushed downstream. The internal pressure of the downstream-side passage portion 6B is temporarily increased by the trace liquid pushed out downstream, whereby a predetermined amount of trace liquid drops from the tip end 4a of the nozzle 4 toward the workpiece 3.

  Thereafter, the pressurization by the pressurization mechanism 13 is released, and the pressure chamber 12 is returned to, for example, an atmospheric pressure state (step ST4). As a result, as shown in FIG. 2 (c), the cylindrical body portion 11c of the capacity variable passage portion 10 expands outward in the radial direction and elastically returns to the original cylindrical shape. Thereby, the liquid is sucked into the capacity variable passage portion 10 from both the upstream passage portion 6A and the downstream passage portion 6B.

  The amount of inflow of the liquid also corresponds to the ratio of the upstream and downstream liquid passage resistances. Therefore, only a slight amount of liquid is drawn back upstream from the downstream passage portion 6B on the nozzle 4 side. Therefore, the tip 4a of the nozzle 4 is pulled up into the nozzle 4 to the extent that the liquid meniscus is not destroyed. In addition, it is possible to reliably prevent problems such as liquid dripping from the tip opening 4a after the trace amount of liquid is dropped.

  When a small amount of liquid is dropped at a predetermined interval over a predetermined length, the liquid is dropped as many times as necessary, and then the operation is terminated (step ST5).

  According to the experiments by the present inventors, a nozzle 4 having a tip 4a of 25 μm to 100 μm is used, and a high viscosity liquid of 50 Pa · s to 100 Pa · s is applied to several tens of picoliters to several nanoliters. It was confirmed that the dropping or discharging operation can be performed with a small amount and with high accuracy.

Here, one or both of the contraction amount and the contraction speed of the capacity variable passage portion 10 can be appropriately set based on the following parameters.
The amount of liquid to be discharged or dripped from the front end 4a of the nozzle 4 at once The inner diameter dimension of the front end 4a of the nozzle 4 The viscosity of the liquid The liquid passage resistance on the upstream passage portion 6A side, the downstream passage portion 6B and the nozzle 4 are included. Ratio with downstream liquid passage resistance

  Since the used nozzle, the used liquid, the amount of liquid dropped once, etc. are set in advance, the control unit 14 may perform drive control of each unit in accordance with these. The ratio of the upstream passage portion 6A and the downstream passage portion 6B can be variably controlled.

  For example, as shown in FIG. 3, a flow rate adjusting valve 16 is attached to the upstream side passage portion 6 </ b> A and can be controlled by the control unit 14. Prior to the dripping operation of the small amount of liquid onto the workpiece 3, the flow rate is adjusted to obtain a ratio between the liquid passage resistance of the upstream passage portion 6A and the downstream liquid passage resistance including the downstream passage portion 6B and the nozzle 4. It is possible to adjust.

In addition, the method and dispenser of this invention can be used for dripping of various liquid materials.
For example, the following liquid material can be used.
Metal paste (Ag, Cu, solder, etc.)
Resin liquid material (silicone adhesive, UV curable resin, photo resist, UV curable adhesive, other various resin liquids)
Filled liquid material (filler: fluorescent particles, silica particles, frit / glass, titanium oxide, various nano-micro particles, etc.)

In addition, there are the following fields as application technical fields of the present invention.
Application to optical component manufacturing (shading material application, aperture formation, application of various liquid materials to the lens surface)
A very small amount of adhesive dripping onto electronic components (LED, crystal oscillator, MEMS, power device, etc.)
FPD, glass bonding of imaging sensors Wiring with Ag nanopaste (auxiliary wiring to ITO, wiring formation to minute areas, etc.)

DESCRIPTION OF SYMBOLS 1 Trace liquid dispenser 2 Work stand 3 Work 4 Nozzle 4a Tip port 5 Triaxial mechanism 6 Liquid passage 6A Upstream passage part 6B Downstream passage part 7 Pump 7a Discharge port 8 Liquid storage part 9 Viscous liquid 10 Capacity variable passage part 10a Upstream End opening 10b Downstream end opening 11 Cylindrical passages 11a, 11b End plate 11c Cylindrical body 12 Pressure chamber 13 Pressurizing mechanism 14 Control unit 15 Operation / display unit 16 Flow rate adjusting valve

Claims (16)

A trace liquid outflow method for flowing out a trace liquid of nanoliter order to picoliter order from the tip of a cylindrical nozzle,
A liquid passage for supplying a liquid from the liquid supply section to the nozzle is formed of an upstream passage portion, an intermediate passage portion, and a downstream passage portion, and the intermediate passage portion can be expanded and contracted so that its internal volume increases or decreases. A passage part,
When the intermediate passage portion is deformed so that the internal volume of the intermediate passage portion decreases in a liquid-filled state in which the liquid is filled from the liquid passage to the tip end of the nozzle, the intermediate passage portion The ratio of the amount of liquid and the amount of liquid pushed back to the upstream-side passage portion is set to 1: 100 to be such that the amount of liquid pushed out to the downstream-side passage portion becomes a minute amount of nanoliter order to picoliter order. Set to 1: 500,
In the outflow operation of trace liquid,
Forming the liquid filling state,
Deforming the intermediate passage portion so that its internal volume decreases;
A minute amount of liquid pushed out from the intermediate passage portion to the downstream passage portion causes a minute amount of liquid to flow out from the tip end of the nozzle,
The deformation of the intermediate passage portion is released, the inner volume of the intermediate passage portion is returned to the original volume, and a minute amount of liquid is sucked back into the intermediate passage portion from the downstream passage portion, and the upstream passage portion A method for discharging a trace amount of liquid, wherein the liquid is sucked into the intermediate passage portion from the inside.   2. The nozzle and at least the downstream passage portion of the downstream passage portion and the upstream passage portion are passage portions whose internal volume does not change even when the pressure of the liquid flowing through the nozzle changes. The method for flowing out a trace liquid described in 1.   The flow control valve disposed in the upstream passage portion is controlled to increase or decrease the liquid flow path resistance of the upstream passage portion, and the amount of liquid pushed out from the intermediate passage portion to the downstream passage portion, and the upstream The trace liquid outflow method according to claim 1, wherein the ratio of the amount of liquid pushed back to the side passage portion is adjusted. Forming a sealed outer peripheral space surrounding the outer periphery of the intermediate passage portion;
2. The intermediate passage portion is deformed into an axially symmetric state about its central axis so as to reduce its internal volume by changing an internal pressure of the sealed outer peripheral space, and the deformation is released. The described trace liquid outflow method.   The trace amount liquid outflow method of Claim 1 which uses the micro diameter nozzle whose inner diameter dimension of the front-end | tip port is 500 micrometers or less as said nozzle.   The trace liquid outflow method according to claim 1, wherein a high viscosity liquid material having a viscosity of 1 Pa · s to 100 Pa · s is used as the liquid. A small amount of liquid that flows out from the tip of the nozzle at a time,
The inner diameter of the nozzle tip,
The viscosity of the liquid, and
The amount of change in the internal volume and the rate of change in the internal volume of the intermediate passage portion are controlled based on at least one of the ratio of the upstream side liquid passage resistance and the downstream side liquid passage resistance of the intermediate passage portion. Item 2. A method for flowing out a trace liquid according to Item 1.   The trace liquid outflow method according to claim 1, wherein the deformation of the intermediate passage portion and the release of the deformation are repeated at a predetermined cycle, and the outflow of the minute liquid from the tip end of the nozzle is repeated. A minute amount liquid dispenser for discharging a minute amount liquid of nanoliter order to picoliter order from the tip end of a cylindrical nozzle,
A liquid passage comprising an upstream passage portion, an intermediate passage portion, and a downstream passage portion, wherein the intermediate passage portion is a passage portion that can be expanded and contracted so that the internal volume increases and decreases;
A liquid supply section for supplying a liquid to the nozzle through the liquid passage;
A passage deforming portion that deforms the intermediate passage portion so that the internal volume of the intermediate passage portion increases or decreases;
A control unit;
Have
When the intermediate passage portion is deformed so that the internal volume of the intermediate passage portion decreases in a liquid-filled state in which the liquid is filled from the liquid passage to the tip end of the nozzle, The ratio between the liquid amount and the liquid amount pushed back to the upstream passage portion is 1: 100 to 1: 1, so that the liquid amount pushed out to the side passage portion becomes a minute amount of nanoliter order to picoliter order. Is set to 500,
The controller is
A control operation for controlling the liquid supply unit to supply liquid to the nozzle via the liquid passage to form the liquid filling state;
By controlling the passage deforming portion to deform the intermediate passage portion so as to reduce the internal volume, the minute amount of liquid pushed out from the intermediate passage portion to the downstream passage portion causes the tip portion of the nozzle to A trace liquid outflow operation that causes a trace liquid to flow out,
By controlling the passage deforming portion, the deformation of the intermediate passage portion is released, the inner volume of the intermediate passage portion is returned to the original volume, and a minute amount of liquid is transferred from the downstream passage portion into the intermediate passage portion. A trace liquid dispenser which performs a returning operation of sucking back and sucking liquid into the intermediate passage portion from the upstream passage portion.   10. The nozzle and at least the downstream passage portion of the downstream passage portion and the upstream passage portion are passage portions whose inner volume does not change even when the pressure of the liquid flowing through the nozzle changes. The trace liquid dispenser described in 1. Having a flow rate adjusting valve arranged in the upstream passage portion;
The trace liquid dispenser according to claim 9, wherein the control unit can control the flow rate adjustment valve to increase or decrease the liquid flow path resistance of the upstream side passage portion.   The passage deforming portion is in an axially symmetric state about the central axis so that the internal volume of the intermediate passage portion increases or decreases by changing the internal pressure of the sealed outer peripheral space surrounding the outer periphery of the intermediate passage portion. The trace liquid dispenser according to claim 9, further comprising an internal pressure adjusting mechanism that is deformed into a shape.   The trace amount liquid dispenser according to claim 9, wherein the nozzle is a minute diameter nozzle having an inner diameter of a tip end of 500 μm or less.   The trace liquid dispenser according to claim 9, wherein the liquid supplied from the liquid supply unit is a high-viscosity liquid material having a viscosity of 1 Pa · s to 100 Pa · s. The controller is
A small amount of liquid that flows out from the tip of the nozzle at a time,
The inner diameter of the nozzle tip,
The viscosity of the liquid, and
The amount of change in the internal volume and the rate of change in the internal volume of the intermediate passage portion are controlled based on at least one of the ratio of the upstream side liquid passage resistance and the downstream side liquid passage resistance of the intermediate passage portion. Item 10. The micro liquid dispenser according to Item 9.   The trace liquid dispenser according to claim 9, wherein the control unit repeatedly performs the trace liquid outflow operation and the return operation at a predetermined cycle.

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